CN217402858U - Air heater and temperature control device - Google Patents

Abstract

The application provides an air heater and temperature control device, air heater includes heating wire, the anodal interface of power supply and the negative pole interface of power supply, the heating wire includes the many heating wire return circuits that set up between the anodal interface of power supply, the negative pole interface of power supply, parallelly connected in order to form netted between the heating wire return circuit. In the air heater and the temperature control device, the heating wires are connected in parallel through the heating wire loop to form a net shape, the air can fully finish the heat exchange process on the whole air circulation section when passing through, and meanwhile, because the heating wire loops are connected in parallel, the diameter of each heating wire can be relatively smaller, and a winding dead zone cannot be formed on the leeward side of the heating wire; the current of each heating wire is relatively small in a parallel connection mode, the surface temperature of each heating wire is low, the temperature difference between the heating wires and air is small, the nonuniformity of air flow can not be aggravated even the air flow is unevenly distributed in space, and the requirements on the accuracy and the uniformity of the target air outlet temperature are met.

Description

Air heater and temperature control device

Technical Field

The application relates to the technical field of temperature control, in particular to an air heater and a temperature control device.

Background

Ultra-precision processing equipment represented by a photoetching machine has high requirements on temperature control, and the precision and the uniformity generally reach below 20 mK. For ultra-precise temperature control equipment, the air inlet treatment is generally required, the stabilizing treatment is reduced to be lower than the target temperature through a cooling unit, and then the temperature is finely adjusted through a heater to reach the target value. Under the ultrahigh precision control, the fluctuation and the heat distribution of each link through which the air flow of the temperature control equipment flows are required to be uniform in temperature, so that the target requirement can be met, the link of fine adjustment of air heating after passing through a cooling unit is particularly important, the heater equipment for fine adjustment is required to be uniform in surface heating, the contact area with wind is large enough, and the process of heat exchange to achieve local heat balance can be quickly completed.

For the temperature control industry, the conventional heating modes at present comprise air heating and water heating. The water heating is to exchange heat between hot water with certain flow and temperature and air flowing through the finned tube heat exchanger to complete the air heating process, which belongs to an indirect heating process. The air heating type heater is heated by direct contact with air, has no intermediate loss, high efficiency and quick response, so that the air heating type heater is widely integrated with temperature control equipment for fine adjustment of temperature.

One of the commonly used air heaters is an electric heating tubular heater, and the electric heating tubular heater is made by embedding a heating part in a metal tube such as a stainless steel tube and then filling heat conduction materials such as magnesium oxide, so that the diameter of the heating tube is large, air flow is easy to form a streaming at the leeward side of the heating tube during operation, the heat exchange area and efficiency are reduced, and local high temperature is caused. Moreover, under a certain power, the electric heating tube heater has a large current and a high surface temperature, which increases the temperature difference between the heater and the air, and when the airflow at the contact surface is not uniform, a dead zone or the like is generated, which causes great non-uniformity and is not beneficial to the control requirement of the target temperature.

SUMMERY OF THE UTILITY MODEL

In view of the above, the present application provides an air heater and a temperature control device for improving uniformity of heat exchange.

In one aspect, the present application provides an air heater, including heating wire, the anodal interface of power supply and the negative interface of power supply, the heating wire includes many sets up the heating wire return circuits between the anodal interface of power supply, the negative interface of power supply, parallelly connected in order to form netted between the heating wire return circuit.

In one embodiment, the heating wire loops are connected in series to form a heating wire series large loop, and the heating wire series large loop is connected in parallel to form a net; or the heating wire loops are connected in parallel to form a heating wire parallel large loop, and the heating wire parallel large loops are connected in series to form a net shape.

In one embodiment, the mesh comprises at least one of: rectangular meshes, triangular meshes, rhombic meshes and parallelogram meshes.

In one embodiment, the heating wire is a Cr20Ni80 heating wire.

In one embodiment, the air heater comprises a mounting structure having a transverse direction and a longitudinal direction perpendicular to each other, and the heating wire loop comprises a transverse heating wire and a longitudinal heating wire, wherein the transverse heating wire and the longitudinal heating wire are distributed in a stacked manner and are not in contact with each other; a transverse parallel loop anode main interface and a transverse parallel loop cathode main interface are respectively arranged on the two transverse sides of the mounting structural member, a plurality of groups of transverse electric heating wires are connected in parallel between the transverse parallel loop anode main interface and the transverse parallel loop cathode main interface, and the transverse electric heating wires are distributed in a transverse equal-interval turn-back manner; the longitudinal electric heating wires are distributed in the longitudinal direction at equal intervals in a turning-back manner.

In one embodiment, the air heater includes a mounting frame, the positive power supply interface and the negative power supply interface are respectively disposed on two opposite sides of the mounting frame, and the heating wire loop is connected between the positive power supply interface and the negative power supply interface to form a mesh structure between the two opposite sides of the mounting frame.

In another aspect, the present application provides a temperature control apparatus comprising:

the air conditioner comprises a box body, a fan and a controller, wherein the box body is provided with an air inlet and an air outlet, and a gas circulation channel communicated with the air inlet and the air outlet is arranged in the box body; and

fixedly set up in the box and set gradually in among the gas flow channel:

a circulating power fan for driving gas from the inlet into the gas stream

A channel is communicated;

a fan air-out flow equalizing plate for providing gas flow resistance and gas flow rate

Homogenizing;

the cooling coil is used for cooling the gas flowing through;

a heater for heating the gas flowing through; and

the swirling device is used for generating deflection and vortex of gas flowing through;

wherein, the heater adopts the air heater as described in the foregoing.

In one embodiment, the heater comprises a primary heater and a fine adjustment heater, and the primary heater and/or the fine adjustment heater adopts an air heater as described above.

In one embodiment, a partition plate is arranged in the box body to divide the space in the box body into the U-shaped gas circulation channel.

In one embodiment, the air conditioner further comprises a steady flow uniform plate, wherein the steady flow uniform plate is arranged in the air flow channel and is positioned between the cyclone device and the air outlet so as to reduce the speed fluctuation of the flowing air; the steady flow uniform plate comprises one-level or multi-level screen meshes, or the steady flow uniform plate comprises one-level or multi-level pore plates.

The application provides an air heater and temperature control device has following beneficial effect at least: the heating wires in the air heater are connected in parallel through the heating wire loop to form a net shape, the heat exchange process of the air can be fully completed on the whole air circulation section when the air passes through the net shape, and meanwhile, the diameter of each heating wire can be relatively smaller because the heating wire loops are connected in parallel, so that the probability of forming a flow winding dead zone on the leeward side of the heating wires is extremely low; the current of each heating wire is relatively small in a parallel connection mode, the surface temperature of each heating wire is low, the temperature difference between the heating wires and air is small, the nonuniformity of air flow can not be aggravated even the air flow is unevenly distributed in space, and the requirements on the accuracy and the uniformity of the target air outlet temperature are met.

Drawings

FIG. 1 is a schematic structural diagram of a temperature control device according to an embodiment of the present application;

FIG. 2 is a schematic structural diagram of an air heater according to an embodiment of the present application;

fig. 3 is a schematic structural diagram of an air heater according to another embodiment of the present application.

The elements in the figures are numbered as follows:

a box body 10 (wherein, an air inlet 11, an air outlet 12, a side plate 13 and a partition plate 14); a circulating power fan 20; a fan air-out flow equalizing plate 30; a cooling coil 40; a primary heater 50; a fine adjustment heater 60; a swirl device 70 (wherein, a primary swirl tuyere 71, a secondary swirl tuyere 72, and a swirl tuyere air-flow mixing structure 73); a steady flow homogenizing plate 80;

a temperature control device 100;

the air heater 200 (wherein, the installation structure 210, the horizontal parallel loop anode general interface 220, the horizontal parallel loop cathode general interface 230, the horizontal heating wire 240, the vertical single loop power supply anode interface 250, the vertical single loop power supply cathode interface 260, the vertical heating wire 270; the installation frame 310, the heating wire anode interface 320, the heating wire cathode interface 330, the heating wire 340, the insulating ceramic particles 350).

Detailed Description

Before the embodiments are described in detail, it is to be understood that the application is not limited to the details of construction or the arrangements of components set forth in the following description or illustrated in the drawings. The present application is capable of embodiments that can be practiced in other ways. Also, it is to be understood that the phraseology and terminology used herein is for the purpose of description and should not be regarded as limiting. The use of "including," "comprising," "having," and the like, herein is meant to encompass the items listed thereafter and equivalents thereof as well as additional items. In particular, when "a certain element" is described, the present application does not limit the number of the element to one, and may include a plurality of the elements.

At present, the node size of a mainstream photoetching machine reaches below 20nm, the alignment precision reaches 3nm or even lower, and a 12nm chip is successfully applied to commercial production. When the photoetching machine works, the spatial unevenness or fluctuation and drift of the local environment can affect the final photoetching positioning precision, the alignment precision and the like, and particularly, the critical parts of the workpiece table deform due to the spatial unevenness, fluctuation and drift of the temperature, so that the movement error is caused; ultra-precise sensing and measuring devices represented by laser interferometers generate measuring errors due to nonuniform spatial distribution, fluctuation and drift of temperature, humidity and pressure. Therefore, the ultra-precision processing equipment represented by the photoetching machine has the requirements on the external large environment and the very strict requirements on the microenvironment in the equipment to ensure the processing precision.

For environmental control of ultra-precision processing equipment represented by a lithography machine, independent temperature control equipment such as immersion cooling and air cooling is required for a microenvironment inside the equipment since the equipment is arranged outside a high-grade clean room. Air cooling is widely used because of its simple layout and the convenience of heat exchange with the chilled water of the clean room. However, because the specific heat capacity of air is small, the air is easy to fluctuate and generate local nonuniformity in environmental micro-adjustment, and therefore, each link in the ultra-precise temperature control equipment needs to be designed with stable control and uniform temperature flow field distribution.

To current because the inhomogeneous problem of air heater heat exchange causes whole temperature control device's the inhomogeneous problem of temperature control, poor stability, the application provides an air heater and temperature control device, sets up by treating the environment at temperature control equipment place, treats the environment at temperature control equipment place and carries out the temperature regulation and control to satisfy the environmental control requirement of treating temperature control equipment to the temperature. It should be noted that the temperature control device may also perform temperature control, and in an embodiment, the area to be temperature controlled may include the device to be temperature controlled.

Referring to fig. 1, a temperature control apparatus 100 according to an embodiment of the present invention may include a case 10, and a circulation fan 20, a fan air-out flow-equalizing plate 30, a cooling coil 40, a primary heater 50, a precision adjusting heater 60, a swirling device 70, and a flow-stabilizing and equalizing plate 80 disposed in the case 10.

It is understood that in other embodiments, the temperature control device 100 may also omit the precise adjustment heater 60, reduce the number of swirl tuyere stages of the swirling device 70, and reduce the number of the flow stabilizing uniform plates 80; in other embodiments, the temperature control device 100 may also increase one or more of the number of stages of the heater, the number of stages of the swirl ports of the swirling device 70, or the number of stages of the flow stabilizing and homogenizing plate as needed.

The peripheral side of the box body 10 is enclosed by a side plate 13 made of heat-insulating material, an air inlet 11 and an air outlet 12 are arranged on the top of the box body 10, the air inlet 11 receives the gas in the environment of the equipment to be temperature controlled and enters the box body 10, and the air outlet 12 conveys the gas in the box body 10 to the equipment to be temperature controlled. A partition plate 14 is disposed between two parallel side plates 13 in the box 10 to separate the air inlet 11 and the air outlet 12, and a gas flow passage is formed from the air inlet 11 to the air outlet 12. The gas flow channel defines a gas flow direction (as indicated by an arrow in fig. 1) in the gas flow channel, and the gas entering the interior of the box 10 from the inlet 11 flows along the gas flow direction to the outlet 12. In the illustrated embodiment, the housing 10 is provided with two air inlets 11 and two air outlets 12, the bottom of the partition plate 14 is provided with a notch for installing the fine adjustment heater 60 and allowing the air flow to pass through, and the air flow passage is U-shaped.

The circulating power fan 20 is arranged in the gas circulation channel and close to the air inlet 11, gas entering from the air inlet 11 enters the circulating power fan 20, the circulating power fan 20 provides power for gas circulation, the power for flowing gas to flow along the gas circulation channel is provided, positive pressure is continuously provided for the box body 10, and the risk of external gas (especially unclean gas) infiltration is reduced.

The fan air-out flow-equalizing plate 30 is disposed in the air flow channel and located downstream of the circulating power fan 20 along the air flow direction. The fan air-out flow equalizing plate 30 provides a flow resistance to the flowing air to equalize the flow rate of the flowing air. The fan air-out flow equalizing plate 30 may be a member that generates resistance with a certain aperture ratio, and plays a role in making the velocity of the flowing air flow more uniform.

The cooling coil 40 is disposed in the air flow channel and located downstream of the fan air-out flow equalizing plate 30 along the air flow direction, and cools the flowing air. The cooling coil 40 reduces the temperature of the air stream flowing over the tubes to a set temperature by passing chilled water through the tubes.

A primary heater 50 is disposed in the gas flow path downstream of the cooling coil 40 in the gas flow direction to provide primary heating of the flowing gas. A fine adjustment heater 60 is disposed in the gas flow passage between the primary heater 50 and the swirling device 70 to secondarily heat the gas flowing therethrough.

As shown in fig. 1, a secondary heater is arranged in the gas flow channel, the primary heater 50 and the fine adjustment heater 60 are respectively a coarse adjustment heater and a fine adjustment heater, and the overall average temperature of the gas meets the set requirement through multi-stage heating power control. The fine adjustment heater 60 is installed at the gap between the bottom of the partition plate 14 and the bottom plate. The primary heater 50 and the fine adjustment heater 60 may be air heaters such as a perforated plate heater, a wire mesh heater, or a pipe mesh heater. In a preferred embodiment, the primary heater 50 and the fine adjustment heater 60 may be heating wire heaters, and the specific structure will be described later with reference to fig. 2 and 3.

A swirl device 70 is disposed in the gas flow path downstream of the fine adjustment heater 60 in the gas flow direction to induce deflection and swirl of the gas flowing therethrough. The swirl device 70 comprises a primary swirl tuyere 71, a secondary swirl tuyere 72 and a swirl tuyere air-flow mixing structure 73 which are arranged in the gas flow channel, wherein the swirl tuyere air-flow mixing structure 73 is arranged between the primary swirl tuyere 71 and the secondary swirl tuyere 72. The primary cyclone air port 71 and the secondary cyclone air port 72 are provided with blades, and the blades can be fixed blades, passive rotating blades or active rotating blades. The airflow will generate deflection and vortex after flowing through the rotational flow device 70, so that the airflow is fully mixed, and the multi-stage arrangement is adopted to gradually improve the temperature uniformity of the airflow.

The flow stabilizing and homogenizing plate 80 is disposed in the gas flow passage and between the swirling device 70 and the air outlet 12 to reduce the speed fluctuation of the flowing gas, thereby ensuring the stability of the outlet air. In some embodiments, the flow stabilizing homogenizing plate 80 is one or more stages of screens disposed within the gas flow passage; in other embodiments, the flow stabilizing and homogenizing plate 80 is a one-stage or multi-stage orifice plate disposed within the gas flow passage. In the illustrated embodiment, the flow stabilizing and uniformizing plate 80 is provided with three stages and is arranged between the swirling device 70 and the air outlet 12 at equal intervals.

In the temperature control apparatus 100, the partition plate 14 divides the space in the case 10 into a first air chamber on the same side as the gas inlet 11 and a second air chamber on the same side as the air outlet 12, and the two air chambers are communicated with each other through a notch (a fine adjustment heater 60) in the bottom of the partition plate 14, so that a U-shaped gas flow passage is formed as a whole. Gas pumped out from the environment of the equipment to be temperature controlled enters the first air chamber inside through the air inlet 11 on the box body 10, and then becomes airflow with relatively uniform speed through the circulating power fan 20 and the fan air-out flow equalizing plate 30; the air flow is changed into air flow with the temperature lower than the set temperature after flowing through the cooling coil 40, and then is heated to the set temperature through the primary heater 50 and the fine adjustment heater 60; the air flow enters the second air chamber again, the rotational vortex structure is generated by the rotational flow device 70 to enable the air flow to be mixed to reach uniform temperature, the speed is uniform through the steady flow uniform plate 80, and finally the air flow is sent into the equipment to be controlled by temperature through the air outlet 12, so that the whole temperature control process is completed.

Referring to FIG. 2, a schematic diagram of one embodiment of an air heater 200 that may be used as the primary heater 50 is shown. The air heater 200 is a heating wire type heater, and heating wires are vertically and horizontally arranged on the mounting structure 210, so that the whole air circulation section is cut into a plurality of rectangular blocks with equal intervals. The mounting structure 210 is rectangular, and defines the transverse, longitudinal and air circulation cross-sections perpendicular to each other, the transverse two sides are respectively provided with a transverse parallel loop anode main interface 220 and a transverse parallel loop cathode main interface 230, and the transverse heating wires 240 are transversely and equally distributed in a folded manner, and then the two ends are respectively connected to the transverse parallel loop anode main interface 220 and the transverse parallel loop cathode main interface 230. In the illustrated embodiment, 3 sets of transverse heating wires 240 form a parallel circuit between the transverse parallel circuit positive bus connection 220 and the transverse parallel circuit negative bus connection 230. Each group of transverse heating wires 240 may be a heating wire parallel large loop formed by connecting a plurality of heating wire loops connected between the power supply positive interface and the power supply negative interface in series or in parallel.

For each group of heating wires, taking the longitudinal heating wire 270 as an example, after the longitudinal heating wire 270 is longitudinally and equally distributed at intervals, two ends of the longitudinal heating wire 270 are respectively connected to the longitudinal single-loop power supply positive connector 250 and the longitudinal single-loop power supply negative connector 260. In the illustrated embodiment, 3 sets of longitudinal heating wires 270 may be connected in series to form a large heating wire series loop.

The transverse heating wires 240 and the longitudinal heating wires 270 are staggered in the air flow cross-section, i.e., the transverse heating wires 240 and the longitudinal heating wires 270 are different in height in a direction perpendicular to the transverse and longitudinal directions.

The horizontal heating wire 240 and the vertical heating wire 270 employ Cr20Ni80 heating wires having a diameter less than 1mm (e.g., 0.2 mm). The Cr20Ni80 is a resistance electrothermal alloy, and the alloy has the advantages of stable structure, stable electrical and physical properties, good high-temperature mechanical properties, good cold deformation plasticity, good weldability, no brittle fracture after long-term use, working at 1000 ℃ and long service life. Of course, heating wires of other materials may be used as long as the aforementioned performance requirements are met.

The air heater 200 calculates the heating wire current in the spatial layout according to the power of the primary heater 50 and the meter resistance parameter, under the condition of large current, the heating wires are uniformly distributed on the air circulation section by the parallel connection of the heating wire loops to form a heating wire parallel large loop and a heating wire series large loop, so that the air circulation section is equally divided into a plurality of rectangular matrixes, the target air can fully finish the heat exchange process on the whole air circulation section when passing through, and simultaneously, because the diameter of the electric heating wire is very small (such as 0.2mm level), no winding dead zone is formed on the leeward side of the electric heating wires, the current of each electric heating wire is small by a parallel connection mode, the surface temperature of the electric heating wires is low, the temperature difference with air is small, even if the spatial airflow distribution is not uniform, the nonuniformity of the airflow is not aggravated, and the requirements on the accuracy and uniformity of the target outlet air temperature are facilitated.

Referring to fig. 3, another embodiment of an air heater 200 that can be used as the primary heater 50 is shown. The air heater 200 is a heating wire type heater, which is formed by obliquely pulling the heating wires 340 at a certain angle on the mounting frame 310 according to the diameter of the selected heating wire, the different components of the chrome-nickel alloy, the meter resistance, the flexibility, the strength and the like of the heating wire. Specifically, the two sides of the mounting frame 310 are respectively provided with a heating wire positive electrode interface 320 and a heating wire negative electrode interface 330, the heating wires 340 are obliquely connected in series or in parallel between the heating wire positive electrode interface 320 and the heating wire negative electrode interface 330 to form a heating wire series or parallel large loop, and the adjacent heating wires 340 are arranged at equal intervals and separated by insulating ceramic particles 350 to prevent a short circuit phenomenon, thereby ensuring the safety of the air heater 200.

Of course, the spatially uniform distribution of the air heaters 200 is not limited to that shown in fig. 2 and 3, and may be, for example, a prismatic interval between the heating wire loops.

In addition, the air heater 20 may be used in a similar design to the primary heater 50 for the fine adjustment heater 60.

In the air heater 200, the electric heating wires are connected in series through the heating wire loop, the heating wire series large loop is connected in parallel on the air flow on-off surface to form a mesh form, or the heating wire loop is connected in parallel, the heating wire series large loop is connected in series on the air flow on-off surface to form a mesh form, and the mesh form can be a rectangular mesh (shown in fig. 2), a triangular mesh (shown in fig. 3), a rhombic mesh, a parallelogram mesh, and the like, so that the air flow flowing through the air heater can be fully contacted with the heating surface for heating treatment, and the accuracy control and uniformity requirement of the target temperature are facilitated.

When the ultra-high precision temperature control apparatus using the above air heater 200 is operated, the target air can perform a heat exchange process throughout the entire air flow cross section while passing through the air heater 200. On the air circulation section with the same area, a structure that the heating wires are connected in parallel is adopted, so that the single heating wire can adopt a thinner heating wire, and as the diameter of the heating wire is less than 1mm and even can reach 0.2mm, a flow winding dead zone can not be formed on the leeward side of the heating wire; on the other hand, the surface current and the surface temperature of a single heating wire loop (single heating wire) are small and the surface temperature is low in a heating wire parallel connection mode (direct parallel connection, series connection after parallel connection, and parallel connection after series connection), so that the temperature difference with air is relatively small, even if the spatial airflow leading to the air heater 200 is not uniformly distributed, the nonuniformity of the airflow cannot be aggravated after passing through the air heater 200, and the requirements on the accuracy and the uniformity of the target outlet air temperature are met.

To sum up, the very high air heater of a homogeneity of air heater and temperature control device of this application, through certain series-parallel connection mode with the even distribution of heating wire at the circulation of air section, make air heater's circulation of air section divide equally into the netted of a plurality of geometric shape square matrix formation, the diameter of single heating wire can reduce relatively, the surface current of single heating wire can reduce relatively, surface temperature reduces relatively, thereby reduce the difference in temperature with the air, even the inhomogeneous air current that can not aggravate yet of space air current distribution, be favorable to equipment target air-out temperature precision and homogeneity requirement.

The concepts described herein may be embodied in other forms without departing from the spirit or characteristics thereof. The particular embodiments disclosed should be considered illustrative rather than limiting. The scope of the application is, therefore, indicated by the appended claims rather than by the foregoing description. Any changes which come within the meaning and range of equivalency of the claims are to be embraced within their scope.

Claims (10)

1. An air heater, characterized by: the heating wire comprises a plurality of heating wire loops arranged between the power supply positive electrode interface and the power supply negative electrode interface, and the heating wire loops are connected in parallel to form a net shape.

2. The air heater according to claim 1, wherein: the heating wire loops are connected in series to form a heating wire series large loop, and the heating wire series large loop is connected in parallel to form a net shape; or the heating wire loops are connected in parallel to form a heating wire parallel large loop, and the heating wire parallel large loops are connected in series to form a net.

3. The air heater of claim 1, wherein the mesh comprises at least one of: rectangular meshes, triangular meshes, rhombic meshes and parallelogram meshes.

4. The air heater of claim 1, wherein: the heating wire is a Cr20Ni80 heating wire.

5. The air heater of claim 4, wherein: the air heater also comprises an installation structural part, the installation structural part is provided with a transverse direction and a longitudinal direction which are vertical to each other, the heating wire loop comprises a transverse heating wire and a longitudinal heating wire, and the transverse heating wire and the longitudinal heating wire are distributed in a stacked mode and are not in contact with each other; the installation structural member is respectively provided with a transverse parallel loop anode main interface and a transverse parallel loop cathode main interface, a plurality of groups of transverse electric heating wires are connected in parallel between the transverse parallel loop anode main interface and the transverse parallel loop cathode main interface, and the transverse electric heating wires are distributed in a turn-back manner at equal intervals in the transverse direction; the longitudinal electric heating wires are distributed in the longitudinal direction at equal intervals in a turning-back manner.

6. The air heater of claim 4, wherein: the air heater further comprises an installation frame, the power supply positive electrode interface and the power supply negative electrode interface are respectively arranged on two opposite sides of the installation frame, and the heating wire loop is connected between the power supply positive electrode interface and the power supply negative electrode interface so as to form a mesh structure between the two opposite sides of the installation frame.

7. A temperature control device, characterized by: the method comprises the following steps:

the air conditioner comprises a box body, a fan and a controller, wherein the box body is provided with an air inlet and an air outlet, and a gas circulation channel communicated with the air inlet and the air outlet is arranged in the box body; and

fixedly set up in the box and set gradually in among the gas flow channel:

the circulating power fan is used for driving gas to enter the gas circulation channel from the air inlet;

the fan air-out flow equalizing plate is used for providing flowing gas flow resistance to equalize gas flow velocity;

a cooling coil for cooling the gas flowing therethrough;

a heater for heating the gas flowing through; and

the swirling device is used for generating deflection and vortex of gas flowing through;

wherein the heater employs an air heater as claimed in any one of claims 1 to 6.

8. The temperature control apparatus according to claim 7, wherein: the heater comprises a primary heater and a fine adjustment heater, and the primary heater and/or the fine adjustment heater adopt the air heater of any one of claims 1 to 6.

9. The temperature control apparatus according to claim 8, wherein: and a partition plate is arranged in the box body to divide the space in the box body into U-shaped gas circulation channels.

10. The temperature control apparatus according to claim 7, wherein: the flow stabilizing and homogenizing plate is arranged in the gas flow channel and positioned between the cyclone device and the air outlet so as to reduce the speed fluctuation of the flowing gas; the steady flow uniform plate comprises one-level or multi-level screen meshes, or the steady flow uniform plate comprises one-level or multi-level pore plates.

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