CN113834147A

CN113834147A - Temperature control device

Info

Publication number: CN113834147A
Application number: CN202111051111.1A
Authority: CN
Inventors: 郭宝坤; 韦立川; 蔡志强
Original assignee: Shenzhen Envicool Technology Co Ltd
Current assignee: Shenzhen Envicool Technology Co Ltd
Priority date: 2021-09-08
Filing date: 2021-09-08
Publication date: 2021-12-24
Also published as: WO2023035393A1

Abstract

The present invention provides a temperature control device, comprising: the shell is provided with an inlet and an outlet, and a gas circulation channel communicated with the inlet and the outlet is arranged in the shell; cooling means for cooling the gas flowing therethrough; and fixedly set up in the casing and set up in proper order in gas flow channel: a blower for driving gas from the inlet into the gas flow channel; the flow equalizing component is used for equalizing the flow velocity of the gas flowing through; the heating device is used for heating the gas flowing through; the rotational flow device is used for homogenizing the temperature of the gas flowing through; wherein, the cooling device is arranged in the gas circulation channel and between the inlet and the heating device. In the temperature control device, the fan, the cooling device and the heating device can be selected according to requirements, and the range of applicable equipment to be temperature controlled is wide; forced convection is realized by adopting the fan, the temperature of the flowing gas is homogenized by the cyclone device, and the temperature uniformity of the gas provided for the temperature control equipment is high.

Description

Temperature control device

Technical Field

The invention relates to the technical field of temperature control, in particular to a temperature control device.

Background

The high-precision equipment mainly comprises measuring equipment and processing equipment, and is particularly widely applied to the fields of micro-nano measurement, ultra-precision semiconductor processing, high-precision grinding type mechanical processing and the like. In order to control the error caused by thermal deformation, the equipment in these fields has very high requirements on the control of environmental parameters such as temperature and cleanliness.

The high-precision equipment adopts a scheme of adopting gas as a medium to realize temperature control so as to improve the uniformity and stability of the temperature of the equipment. For example, semiconductor refrigeration and natural convection are adopted, but the heat which can be discharged is less, the power of the applicable equipment is limited, and the high-power high-precision equipment is not applicable; in addition, because the natural convection is caused by temperature difference in the above scheme, when the temperature uniformity reaches a certain level, the effect of the natural convection is very little, and the temperature uniformity cannot be continuously improved.

Disclosure of Invention

In view of this, the present invention provides a temperature control device with more uniform temperature control.

The present invention provides a temperature control device, comprising: the gas distribution device comprises a shell, a gas distribution device and a gas distribution device, wherein the shell is provided with an inlet and an outlet, and a gas circulation channel communicated with the inlet and the outlet is arranged in the shell; the cooling device is fixedly arranged in the shell and used for cooling the gas flowing through the cooling device; and fixedly set up in the casing and set up in proper order in among the gas flow channel:

a blower for driving gas from the inlet into the gas flow channel;

the flow equalizing component is used for equalizing the flow velocity of the gas flowing through;

the heating device is used for heating the gas flowing through; and

the rotational flow device is used for homogenizing the temperature of the gas flowing through;

wherein the cooling device is disposed within the gas flow channel and between the inlet and the heating device.

In one embodiment, the flow equalizing member comprises one or more of the following members with preset opening ratio: flat sheet, wire mesh, member with a matrix of raised holes.

In one embodiment, the heating device is provided with one or more stages on the gas flow channel, and the heating device comprises at least one of the following: a hollowed plate heater, a silk screen heater and a pipe network heater.

In one embodiment, the swirling device is disposed proximate to the outlet.

In one embodiment, the swirling device comprises one or more stages of swirling tuyeres, wherein:

each stage of the swirl tuyere is provided with at least one of the following blades: the device comprises fixed blades, passive rotating blades and active rotating blades; or

Each stage of the swirl tuyere is provided with at least one of the following blades: the air inlet of each swirl air inlet is additionally provided with swirl blades.

In one embodiment, the gas flow regulating device further comprises a flow stabilizer arranged in the gas flow passage, wherein the flow stabilizer is arranged between the cyclone device and the outlet to reduce the speed fluctuation of the gas flowing through.

In one embodiment, the flow stabilizer comprises one or more stages of screens, or the flow stabilizer comprises one or more stages of perforated plates.

In one embodiment, the gas cyclone device further comprises a primary mixing device arranged in the gas flowing channel, and the primary mixing device is arranged between the cooling device and the cyclone device to generate vortex flow for the gas flowing through.

In one embodiment, the primary mixing device comprises at least one of: the plate component is a flat plate component consisting of a hole plate, a hollow rotational flow plate and a matrix of a plurality of axial flow or centrifugal blades.

In one embodiment, the housing is made of a heat insulating material, and the inlet and the outlet are both arranged at the top of the housing.

In one embodiment, an inner partition plate is arranged in the shell to divide the space in the shell into the U-shaped gas circulation channel.

The temperature control device provided by the invention has the following beneficial effects: in the temperature control device, the capacities of the fan, the cooling device, the heating device and the like can be selected according to requirements, and the range of the equipment in the environment controlled by the temperature is wide; the fan is adopted to realize forced convection, the relationship between the mixing effect of the forced convection and the temperature difference is not large, the cyclone device enables the temperature of the flowing gas to be uniform, and the temperature uniformity of the gas provided by the temperature control device to the temperature control equipment is higher.

Drawings

FIG. 1 is a schematic perspective view of a temperature control device according to the present invention;

FIG. 2 is an exploded view of a temperature control device according to a first embodiment of the present invention;

FIG. 3 is a schematic perspective view of the primary mixing device of FIG. 2;

FIG. 4 is a schematic perspective view of another angle of the primary mixing device of FIG. 2;

FIG. 5 is a sectional view in the A-A direction of a temperature control apparatus according to a first embodiment of the present invention;

FIG. 6 is a sectional view in the A-A direction of a temperature control apparatus according to a second embodiment of the present invention;

FIG. 7 is a sectional view in the A-A direction of a temperature control apparatus according to a third embodiment of the present invention;

FIG. 8 is a sectional view in the A-A direction of a temperature control apparatus according to a fourth embodiment of the present invention;

fig. 9 is a sectional view in the a-a direction of a temperature control apparatus according to a fifth embodiment of the present invention;

fig. 10 is a sectional view in the direction a-a of a temperature control apparatus according to a sixth embodiment of the present invention;

fig. 11 is a sectional view in the direction a-a of a temperature control apparatus according to a seventh embodiment of the present invention.

The elements in the figures are numbered as follows: a housing 10 (wherein, an inlet 11, an outlet 12, a side plate 13, an inner partition plate 14); a fan 20; a flow equalizing member 30; a cooling device 40; a heating device 50; a primary mixing device 60; a swirling device 70; a flow stabilizer 80; a temperature control device 100.

Detailed Description

Before the embodiments are described in detail, it is to be understood that the invention is not limited in its application to the details of construction and the arrangements of components set forth in the following description or illustrated in the drawings. The invention is capable of embodiments in other forms of implementation. Also, it is to be understood that the phraseology and terminology used herein is for the purpose of description and should not be regarded as limiting. The use of "including," "comprising," "having," and the like, herein is meant to encompass the items listed thereafter and equivalents thereof as well as additional items. In particular, when "a certain element" is described, the present invention is not limited to the number of the element being one, and may include a plurality of the elements.

The invention provides a temperature control device which is arranged beside an environment where equipment to be temperature controlled is located and used for carrying out temperature regulation and control on the environment where the equipment to be temperature controlled is located, so that the requirement of the equipment to be temperature controlled on temperature environment control is met. It should be noted that the temperature control device may also perform temperature control, and in an embodiment, the area to be temperature controlled may include the device to be temperature controlled.

Referring to fig. 1 and 2, a temperature control device 100 according to a first embodiment of the present invention may include a housing 10, and a fan 20, a flow equalizing part 30, a cooling device 40, a heating device 50, a primary mixing device 60, a swirling device 70, and a flow stabilizer 80 disposed in the housing 10. It is understood that in one embodiment, the temperature control device 100 may also omit the primary mixing device 60 and the flow stabilizer 80.

The casing 10 is enclosed by a side plate 13 made of heat insulation materials, an inlet 11 and an outlet 12 are arranged on the top of the casing, the inlet 11 receives gas in the environment of the temperature control equipment to enter the casing 10, and the outlet 12 conveys the gas in the casing 10 to enter the environment of the temperature control equipment to be controlled. An internal partition 14 is provided in the housing 10 to separate the inlet 11 and the outlet 12 and to form a gas flow passage from the inlet 11 to the outlet 12. The gas flow passage defines a gas flow direction (as indicated by an arrow in fig. 5) in the gas flow passage, and the gas entering the inside of the housing 10 from the inlet 11 flows in the gas flow direction in the gas flow passage. In the embodiment shown, the housing 10 is provided with two inlets 11 and two outlets 12, the bottom of the inner partition 14 is provided with a gap for the gas flow, and the gas flow channel is U-shaped.

The fan 20 is disposed in the gas flow channel near the inlet 11, and gas entering from the inlet 11 enters the fan 20. The blower 20 provides power for gas circulation, provides power for gas flowing through along the gas circulation channel, and continuously provides positive pressure for the shell 10, so that the risk of external gas (especially unclean gas) infiltration is reduced.

The flow equalizing member 30 is disposed in the gas flow passage and downstream of the blower 20 in the gas flow direction. The flow equalization member 30 provides resistance to the flow of gas therethrough to equalize the flow rate of the gas therethrough. The flow equalizing member 30 is a member that generates resistance with a constant opening ratio, and serves to make the velocity of the air flow passing therethrough more uniform. In particular, the flow equalization members 30 may be one or more of the following members of a preset or fixed open area ratio: a plate, a mesh, or a member having a matrix of raised holes that can increase the diffusion effect of the outflow within the holes.

The cooling device 40 is disposed in the gas flow channel and located downstream of the flow equalizing part 30 in the gas flow direction, and cools the flowing gas. The cooling device 40 may employ a radiator, such as a liquid-cooled radiator. More specifically, the cooling device 40 may be implemented as, for example, a finned coil, with chilled water flowing inside the tubes to reduce the temperature of the air flowing over the tubes to a set temperature.

The heating device 50 is disposed in the gas flow passage and downstream of the cooling device 40 in the gas flow direction, and heats the flowing gas. The heating device 50 may be provided in one or more stages in the gas flow passage according to actual use. As shown in fig. 2, a two-stage heating device 50 is arranged in the gas flow channel, the two-stage heating device 50 is a coarse adjusting heater and a fine adjusting heater, and the overall average temperature of the gas meets the set requirement through multi-stage heating power control. In the illustrated embodiment, the first stage heating means 50 and the second and heating means 50 are disposed in parallel on one side of the inner partition, and the primary mixing means 60 is disposed between the first stage heating means 50 and the second and heating means 50. The heating device 50 may be a hollowed-out plate heater, a wire mesh heater, or a pipe mesh heater.

The primary mixing device 60 is disposed in the gas flow passage and between the heating device 50 and the swirling device 70 to generate a swirl to the gas flowing therethrough. Primary mixing arrangement 60 can adopt for orifice plate or the whirl board of fretwork, and the air current can produce the vortex through this device, strengthens the air current mixing of different positions and temperature, increases the temperature homogeneity of air current, improves temperature monitoring's accuracy. Alternatively, referring to fig. 3 and 4, the primary mixing device 60 is a flat plate member formed by a matrix of axial flow or centrifugal blades, which can generate a vortex mixing effect on the gas flowing through. It is noted that in an embodiment, the primary mixing device 60 may also be arranged upstream of the heating device 50 in the gas flow direction. The primary mixing device 60 is used for generating vortex flow of the cooled gas flowing through, and performing primary mixing before the gas enters the swirling device 70, so that the primary mixing device 60 is arranged between the cooling device 40 and the swirling device 70.

A swirling device 70 is provided in the flow passage adjacent the outlet 12 to induce deflection and swirl of the gas flowing therethrough. The swirling device 70 includes one or more stages of swirl ports disposed in the gas flow passage, each stage of the swirl ports being provided with blades, which may be fixed blades, passive rotating blades, or active rotating blades. The airflow will generate deflection and vortex after flowing through the rotational flow device 70, so that the airflow is fully mixed, and the temperature uniformity of the airflow can be improved step by adopting multi-stage arrangement.

A flow stabilizer 80 is provided in the gas flow path between the swirling device 70 and the outlet 12 to reduce the velocity fluctuation of the gas flowing therethrough, thereby ensuring the stability of the outlet air. In some embodiments, the flow stabilizer 80 is one or more stages of screens disposed within the gas flow passage; in other embodiments, the flow stabilizer 80 is one or more stages of orifice plates disposed within the gas flow passage.

Referring to fig. 5, in the temperature control device 100, the inner partition 14 divides the space in the box body housing 10 into a first air chamber on the same side as the gas inlet 11 and a second air chamber on the same side as the outlet 12, and the two air chambers are communicated through a gap in the inner partition 14, so that a U-shaped gas flow passage is formed as a whole. The air pumped out from the environment of the equipment to be temperature controlled enters the first air chamber inside through the inlet 11 on the shell 10, and then becomes air flow with relatively uniform speed through the fan 20 and the flow equalizing part 30; the air flow is changed into air flow with the temperature lower than the set temperature after flowing through the cooling device 40, and then is heated to the set temperature through the heating device 50; a primary mixing device 60 can be arranged at the middle-downstream or between the cooling device 40 and the heating device 50, so that the cooled airflow or the heated airflow is primarily mixed, and the temperature uniformity is improved; the air flow enters the second air chamber through the gap on the middle inner baffle plate 14, the rotational vortex structure is generated by the rotational flow device 70 to enable the air flow to be mixed to reach uniform temperature, the speed is uniform through the flow stabilizing device 80, and the air flow is sent into the environment controlled by the temperature through the outlet 12.

Please refer to fig. 6, which is a schematic diagram illustrating a gas flow direction of a temperature control apparatus 100 according to a second embodiment of the present invention. The temperature control device 100 comprises a shell 10, and a fan 20, a flow equalizing part 30, a cooling device 40, a heating device 50, a swirling device 70 and a flow stabilizer 80 which are arranged in the shell 10.

Unlike the first embodiment, in the present embodiment, the primary mixing device 60 is not provided in the gas flow passage according to the requirements of the actual use scenario. Meanwhile, a second-stage heating device 50 is arranged in the gas circulation channel, the second-stage heating device 50 is a rough adjusting heater and a fine adjusting heater respectively, and the overall average temperature of the gas meets the set requirement through multi-stage heating power control. In the two-stage heating apparatus 50, the first-stage heating apparatus 50 is disposed in parallel downstream of the cooling apparatus 40, and the second-stage heating apparatus 50 is disposed at the notch of the inner partition 14, so that the space between the two-stage heating apparatuses 50 is increased.

Please refer to fig. 7, which is a schematic diagram illustrating a gas flow direction of a temperature control apparatus 100 according to a third embodiment of the present invention. The temperature control device 100 comprises a shell 10, and a fan 20, a flow equalizing part 30, a cooling device 40, a heating device 50, a primary mixing device 60, a swirling device 70 and a flow stabilizer 80 which are arranged in the shell 10.

Unlike the second embodiment, in the present embodiment, a primary mixing device 60 is provided in the gas flow passage according to the requirements of the actual use scenario, and the primary mixing device 60 is disposed between the first stage heating device 50 and the second stage heating device 50 in parallel with the first stage heating device 50. The two-stage heating device 50 is arranged in a mutually vertical mode, so that the space between the first-stage heating device 50 and the second-stage heating device 50 can be enlarged, enough space is reserved for the primary mixing device 60, and the mixed flow effect is increased.

Please refer to fig. 8, which is a schematic diagram illustrating a gas flow direction of a temperature control apparatus 100 according to a fourth embodiment of the present invention. The temperature control device 100 comprises a shell 10, and a fan 20, a flow equalizing part 30, a cooling device 40, a heating device 50, a primary mixing device 60, a swirling device 70 and a flow stabilizer 80 which are arranged in the shell 10.

Unlike the third embodiment, in the present embodiment, the first-stage heating device 50 and the second-stage heating device 50 are disposed adjacent to and in parallel downstream of the cooling device 40, according to the requirements of the actual usage scenario; and the primary mixing device 60 is disposed at the gap of the inner partition 14 downstream of the first-stage heating device 50 and the second-stage heating device 50.

Please refer to fig. 9, which is a schematic diagram illustrating a gas flow direction of a temperature control apparatus 100 according to a fifth embodiment of the present invention. The temperature control device 100 comprises a shell 10, and a fan 20, a flow equalizing part 30, a cooling device 40, a heating device 50, a primary mixing device 60, a swirling device 70 and a flow stabilizer 80 which are arranged in the shell 10.

Different from the third embodiment, in the present embodiment, according to the requirement of the actual usage scenario, the number of stages of the swirling device 70 is increased to three stages, that is, the first stage swirling device 70, the second stage swirling device 70, and the third stage swirling device 70 are adjacently and parallelly disposed in the second air chamber; while the flow stabilizer 80 is provided in only one stage.

Please refer to fig. 10, which is a schematic diagram illustrating a gas flow direction of a temperature control apparatus 100 according to a sixth embodiment of the present invention. The temperature control device 100 comprises a shell 10, and a fan 20, a flow equalizing part 30, a cooling device 40, a heating device 50, a primary mixing device 60, a swirling device 70 and a flow stabilizer 80 which are arranged in the shell 10.

Different from the fifth embodiment, in the present embodiment, according to the requirement of the actual usage scenario, the number of stages of the swirling device 70 is three, but the swirling air port of the second stage swirling device 70 is reversely arranged with the swirling air ports of the first stage swirling device 70 and the third stage swirling device 70, and the swirling air port of the second stage swirling device 70 is in butt joint with the swirling air port of the third stage swirling device 70, so that the airflow can generate deflection and vortex after flowing through the swirling device 70, and can flow back and forth between the swirling devices 70, so that the mixing is more sufficient, and finally the airflow flows to the flow stabilizing device 80.

Please refer to fig. 11, which is a schematic diagram illustrating a gas flow direction of a temperature control apparatus 100 according to a seventh embodiment of the present invention. The temperature control device 100 comprises a shell 10, and a fan 20, a flow equalizing part 30, a cooling device 40, a heating device 50, a primary mixing device 60, a swirling device 70 and a flow stabilizer 80 which are arranged in the shell 10.

Different from the fifth embodiment, in this embodiment, according to the requirement of the actual usage scenario, the number of stages of the swirling device 70 is two, but the swirling blade is added to the air inlet of the swirling air inlet of the second stage swirling device 70, so as to further increase the swirling effect, make the gas mixing more sufficient, and improve the uniformity.

It is to be noted that in the above illustrated embodiment, the cooling devices 30 are both disposed downstream of the fan 20 in the gas flow direction; in other embodiments, not shown, the cooling device 30 may also be arranged upstream of the fan 20 in the gas flow direction, i.e. the gas enters the gas flow channel from the inlet 11, is cooled by the cooling device 30 and then enters the fan 20.

In summary, the temperature control apparatus of the present invention can provide a stable and uniform temperature to the environment of the device to be temperature controlled and continuously replace the gas in the environment, thereby ensuring the stability and uniformity of the environment. Compared with the prior art, the temperature control device at least has the following advantages:

(1) the device which is suitable for being controlled by the temperature has wide range and strong expandability. The temperature control device can select the fan, the cooling device and the heating device according to the requirements, and the power range of the equipment in the environment controlled by the temperature is not limited in principle. Because can select the ability of joining in marriage fan, cooling device, heating device etc. as required, the environment of the equipment of adaptable equidimension not, scalability is strong.

(2) The temperature uniformity is high. The temperature control device adopts forced convection, the fan is adopted to realize the forced convection, the relationship between the mixing effect of the forced convection and the temperature difference is not large, the rotational flow device enables the temperature of the flowing gas to be uniform, and the temperature uniformity of the gas provided by the temperature control device to the equipment to be controlled by the temperature is high. Taking an example of a certain embodiment of the temperature control apparatus of the present invention, the temperature deviation of the gas sent out can be as low as 0.02 ℃.

(3) The temperature control device is internally provided with the fan, so that the gas circulation flow channel at the downstream of the fan can be ensured to be positive pressure, and the external gas is prevented from permeating.

(4) The temperature control device has simple structure and low failure rate.

The concepts described herein may be embodied in other forms without departing from the spirit or characteristics thereof. The particular embodiments disclosed should be considered illustrative rather than limiting. The scope of the invention is, therefore, indicated by the appended claims rather than by the foregoing description. Any changes which come within the meaning and range of equivalency of the claims are to be embraced within their scope.

Claims

1. A temperature control apparatus, comprising:

the gas distribution device comprises a shell, a gas distribution device and a gas distribution device, wherein the shell is provided with an inlet and an outlet, and a gas circulation channel communicated with the inlet and the outlet is arranged in the shell;

the cooling device is fixedly arranged in the shell and used for cooling the gas flowing through the cooling device; and

fixedly set up in the casing and set gradually in among the gas flow channel:

a blower for driving gas from the inlet into the gas flow channel;

the heating device is used for heating the gas flowing through; and

2. The temperature control apparatus of claim 1, wherein: the flow equalizing part comprises one or more of the following parts with preset opening rate: flat sheet, wire mesh, member with a matrix of raised holes.

3. The temperature control apparatus of claim 1, wherein: the heating device is provided with one or more stages on the gas circulation channel, and the heating device comprises at least one of the following components: a hollowed plate heater, a silk screen heater and a pipe network heater.

4. The temperature control apparatus of claim 1, wherein: the swirling device is arranged close to the outlet.

5. The temperature control apparatus of claim 4, wherein: the cyclone device comprises cyclone tuyeres arranged in one stage or multiple stages, wherein:

6. The temperature control apparatus of claim 4, wherein: the gas flow stabilizing device is arranged in the gas flow passage and is arranged between the cyclone device and the outlet so as to reduce the speed fluctuation of gas flowing through.

7. The temperature control apparatus of claim 6, wherein: the flow stabilizer comprises one-stage or multi-stage screen meshes, or the flow stabilizer comprises one-stage or multi-stage orifice plates.

8. The temperature control apparatus of claim 1, wherein: the primary mixing device is arranged between the cooling device and the swirling device so as to generate vortex flow for the gas flowing through.

9. The temperature control apparatus of claim 8, wherein: the primary mixing device comprises at least one of: the plate component is a flat plate component consisting of a hole plate, a hollow rotational flow plate and a matrix of a plurality of axial flow or centrifugal blades.

10. The temperature control apparatus according to any one of claims 1 to 9, wherein: the shell is enclosed by heat-insulating materials, and the inlet and the outlet are both arranged at the top of the shell.

11. A temperature control apparatus according to any one of claims 1 to 9, wherein an internal partition is provided in the housing to divide the space in the housing into the U-shaped gas flow passage.