WO2023035393A1

WO2023035393A1 - Temperature control apparatus

Info

Publication number: WO2023035393A1
Application number: PCT/CN2021/128917
Authority: WO
Inventors: 郭宝坤; 韦立川; 蔡志强
Original assignee: 深圳市英维克科技股份有限公司
Priority date: 2021-09-08
Filing date: 2021-11-05
Publication date: 2023-03-16
Also published as: CN113834147A

Abstract

Provided in the present invention is a temperature control apparatus, comprising: a housing, the housing being provided with an inlet and an outlet, and a gas flow channel in communication with the inlet and the outlet being provided in the housing; and a cooling apparatus, used for cooling gas flowing through. The temperature control apparatus also comprises the following components fixedly disposed in the housing and arranged in sequence in the gas flow channel: a fan, used to drive gas to enter into the gas flow channel from the inlet; a flow equalizer, used to equalize the flow rate of the gas flowing through; a heating apparatus, used to heat the gas flowing through; and a cyclone apparatus, used to equalize the temperature of the gas flowing through. The cooling apparatus is disposed in the gas flow channel, and disposed between the inlet and the heating apparatus. In the temperature control apparatus of the present invention, a fan, a cooling apparatus and a heating apparatus can be chosen as needed, applicable to a wide range of devices to be temperature-controlled. The fan is used to achieve forced convection, and the cyclone apparatus makes the temperature of gas flowing through uniform, such that the temperature uniformity of gas supplied to the device to be temperature-controlled.

Description

temperature control device

technical field

The invention relates to the technical field of temperature control, in particular to a temperature control device.

Background technique

High-precision equipment mainly includes measurement equipment and processing equipment, especially in the fields of micro-nano measurement, ultra-precision semiconductor processing, and high-precision cutting and grinding machining. In order to control the error caused by thermal deformation, the equipment in these fields has very high requirements on the control of environmental parameters such as temperature and cleanliness.

The high-precision equipment has a temperature control scheme using gas as the medium to improve the uniformity and stability of the equipment temperature. For example, semi-conductor refrigeration and natural convection are used, but the heat that can be discharged is relatively small, the power of the applicable equipment is limited, and it is not suitable for high-power high-precision equipment; in addition, because the natural convection is caused by the temperature difference in the above scheme, when When the temperature uniformity reaches a certain level, the effect of natural convection is negligible and cannot continue to improve the temperature uniformity.

technical problem

In view of this, the present invention proposes a temperature control device with more uniform temperature regulation.

technical solution

The present invention provides a temperature control device, comprising: a casing, the casing is provided with an inlet and an outlet, and a gas circulation channel connecting the inlet and the outlet is arranged in the casing; a cooling device is fixedly arranged on Inside the casing, used to cool the gas flowing through; and fixedly arranged in the casing and sequentially arranged in the gas circulation channel:

a fan, used to drive gas from the inlet into the gas circulation channel;

A flow-equalizing part, which is used to homogenize the flow rate of the passing gas;

heating means for heating the gas passing through; and

Cyclone device for homogenizing the temperature of the passing gas;

Wherein, the cooling device is arranged in the gas circulation channel and between the inlet and the heating device.

In one embodiment, the flow equalizing component includes one or more of the following components with a preset opening ratio: a flat plate, a wire mesh, and a component with a matrix of raised holes.

In one of the embodiments, the heating device is provided with one or more stages on the gas circulation channel, and the heating device includes at least one of the following: a hollow plate heater, a wire mesh heater, a pipe network type heater.

In one of the embodiments, the cyclone device is arranged near the outlet.

In one of the embodiments, the swirl device includes swirl tuyere arranged in one or more stages, wherein:

The swirl tuyere of each stage is provided with at least one of the following blades: fixed blades, passive rotating blades, active rotating blades; or

Each stage of the swirl tuyere is provided with at least one of the following blades: fixed blades, passive rotating blades, and active rotating blades, and each swirling tuyere is equipped with swirl blades at the air inlet.

In one of the embodiments, it further includes a flow stabilizing device arranged in the gas circulation channel, and the flow stabilizing device is arranged between the cyclone device and the outlet to reduce the velocity fluctuation of the gas flowing through.

In one embodiment, the flow stabilization device includes one or more stages of screens, or the flow stabilization device includes one or more stages of orifice plates.

In one embodiment, it further includes a primary mixing device arranged in the gas circulation channel, and the primary mixing device is arranged between the cooling device and the swirling device to generate a vortex flow in the gas flowing therethrough.

In one embodiment, the primary mixing device includes at least one of the following: an orifice plate, a hollow swirl plate, a flat plate component composed of a matrix of axial flow or centrifugal blades.

In one embodiment, the housing is surrounded by heat-insulating material, and the inlet and the outlet are both opened on the top of the housing.

In one of the embodiments, an inner partition is provided in the housing to divide the inner space of the housing into the U-shaped gas circulation channel.

Beneficial effect

The temperature control device provided by the present invention has the following beneficial effects: in the temperature control device of the present invention, the fan, cooling device, heating device capacity, etc. can be selected according to requirements, and the range of equipment in the temperature-controlled environment is applicable to a wide range; The fan realizes forced convection, and the mixing effect of forced convection has little to do with the temperature difference. The cyclone device makes the temperature of the gas flowing through it uniform, so that the temperature control device provides a higher temperature uniformity of the gas to the temperature-controlled equipment.

Description of drawings

Fig. 1 is the three-dimensional structure schematic diagram of temperature control device of the present invention;

2 is a schematic diagram of an exploded structure of a temperature control device according to a first embodiment of the present invention;

Fig. 3 is the three-dimensional schematic diagram of the primary mixing device in Fig. 2;

Fig. 4 is the three-dimensional structure diagram of another angle of the primary mixing device in Fig. 2;

5 is a sectional view along the direction A-A of the temperature control device according to the first embodiment of the present invention;

6 is a cross-sectional view along the direction A-A of the temperature control device of the second embodiment of the present invention;

7 is a sectional view along the A-A direction of the temperature control device according to the third embodiment of the present invention;

8 is a cross-sectional view along the direction A-A of the temperature control device of the fourth embodiment of the present invention;

9 is a cross-sectional view along the direction A-A of a temperature control device according to a fifth embodiment of the present invention;

Fig. 10 is a sectional view along the direction A-A of the temperature control device of the sixth embodiment of the present invention;

Fig. 11 is a sectional view along the direction A-A of the temperature control device of the seventh embodiment of the present invention.

The numbers of the components in the figure are as follows: housing 10 (inlet 11, outlet 12; side plate 13, inner partition 14); fan 20; flow equalizer 30; cooling device 40; heating device 50; primary mixing device 60; Cyclone device 70 ; steady flow device 80 ; temperature control device 100 .

Embodiments of the present invention

Before describing the embodiments in detail, it should be understood that the present invention is not limited to the detailed structures or arrangements of elements described herein below or in the accompanying drawings. The present invention can be implemented in other ways. Also, it should be understood that the phraseology and terminology used herein are for descriptive purposes only and should not be interpreted as limiting. The terms "including", "comprising", "having" and similar expressions used herein are meant to include the items listed thereafter, their equivalents and other additional items. In particular, when "a certain element" is mentioned, the present invention does not limit the number of the element to one, but may also include a plurality.

Aiming at the problem that the existing temperature control scheme using gas as the medium has a limited scope of application and the uniformity of temperature regulation, the present invention provides a temperature control device, which is installed next to the environment where the temperature control equipment is located, and where the temperature control equipment is located. The temperature of the environment is adjusted to meet the environmental control requirements of the temperature-controlled equipment for the temperature. It should be noted that the temperature control device may also control the temperature. In one embodiment, the area to be temperature controlled may include the device to be temperature controlled.

Please refer to Fig. 1 and Fig. 2, the temperature control device 100 of the first embodiment of the present invention can comprise housing 10 and the blower fan 20 that is arranged in housing 10, current equalization part 30, cooling device 40, heating device 50, primary mixing Device 60, swirl device 70 and flow stabilization device 80. It can be understood that, in an embodiment, the temperature control device 100 can also omit the primary mixing device 60 and the flow stabilizing device 80 .

The casing 10 is enclosed by side plates 13 made of heat-insulating materials, and an inlet 11 and an outlet 12 are provided on the top of the casing. The gas in the transport housing 10 enters the environment of the equipment to be temperature controlled. The housing 10 is provided with an inner partition 14 , which separates the inlet 11 and the outlet 12 , and forms a gas circulation channel from the inlet 11 to the outlet 12 . The gas circulation channel defines the flow direction of the gas in the gas circulation channel (as shown by the arrow in FIG. 5 ), and the gas entering the housing 10 through the inlet 11 flows along the gas flow direction in the gas circulation channel. In the illustrated embodiment, the casing 10 is provided with two inlets 11 and outlets 12, and the bottom of the inner partition 14 is provided with a gap for the airflow to pass through, and the gas circulation channel is U-shaped.

The blower 20 is arranged in the gas circulation passage near the inlet 11 , and the gas entering through the inlet 11 enters the blower 20 . The blower 20 provides power for gas circulation, provides power for the passing gas to flow along the gas circulation channel, and continuously provides positive pressure for the housing 10 to reduce the risk of infiltration of external gas (especially unclean gas).

The flow equalizing component 30 is disposed in the gas circulation channel and is located downstream of the blower 20 along the gas flow direction. The flow equalizing component 30 provides flow resistance of the gas flowing therethrough to make the flow rate of the gas flowing therethrough uniform. The flow-equalizing component 30 is a resistance-generating component with a certain opening ratio, and plays a role in making the velocity of the air flow passing through more uniform. Specifically, the flow equalizing component 30 can be one or more of the following components with a preset or fixed porosity: a flat plate, a wire mesh or a component with a matrix of bulging holes, and the bulging holes can increase the diffusion of the outflow in the hole Effect.

The cooling device 40 is arranged in the gas circulation channel and is located downstream of the flow equalizing component 30 along the gas flow direction, and cools the passing gas. The cooling device 40 may employ a heat sink, such as a liquid cooled heat sink. More specifically, the cooling device 40 may adopt, for example, a finned coil tube, and chilled water flows through the tube to reduce the temperature of the airflow flowing outside the tube to a certain set temperature.

The heating device 50 is arranged in the gas circulation channel and is located downstream of the cooling device 40 along the gas flow direction, and heats the passing gas. The heating device 50 can be arranged in one or more stages in the gas circulation channel according to actual usage conditions. As shown in Figure 2, a secondary heating device 50 is provided in the gas circulation channel, and the secondary heating device 50 is a coarse adjustment heater and a fine adjustment heater respectively, and the overall average temperature of the gas meets the set value through multi-level heating power control. Require. In the embodiment of the figure, the first-stage heating device 50 and the second and heating device 50 are arranged in parallel on one side of the inner partition, and the primary mixing device 60 is arranged between the first-stage heating device 50 and the second and heating device 50 between. The heating device 50 can be a hollow plate heater, a wire mesh heater or a tube mesh heater.

The primary mixing device 60 is disposed in the gas circulation channel, and is disposed between the heating device 50 and the swirl device 70 to make the gas flowing through generate a vortex. The primary mixing device 60 can be an orifice plate or a hollowed-out swirl plate. When the airflow passes through this device, a vortex will be generated, which will enhance the mixing of airflow at different parts and temperatures, increase the temperature uniformity of the airflow, and improve the accuracy of temperature monitoring. Alternatively, please refer to FIG. 3 and FIG. 4 in conjunction. The primary mixing device 60 is a flat plate component formed by a matrix of several axial flow or centrifugal blades, which can generate a vortex mixing effect on the passing gas. It should be noted that, in an embodiment, the primary mixing device 60 may also be arranged upstream of the heating device 50 along the gas flow direction. The primary mixing device 60 is used to generate a vortex flow in the cooled passing gas, and perform preliminary mixing before the gas enters the cyclone device 70, so the primary mixing device 60 is arranged between the cooling device 40 and the cyclone device 70 to meet the requirements .

The swirl device 70 is arranged in the flow channel close to the outlet 12 to make the gas flowing through deflect and vortex. The swirl device 70 includes one or more stages of swirl tuyere arranged in the gas circulation channel, each stage of the swirl tuyere is provided with blades, and the blades can be fixed blades, passive rotating blades or active rotating blades. After the airflow passes through the swirl device 70, it will generate deflection and vortex, so that the airflow can be fully mixed, and multi-stage arrangement can be adopted to improve the temperature uniformity of the airflow step by step.

The flow stabilizing device 80 is arranged in the gas circulation channel and between the swirl device 70 and the outlet 12 to reduce the velocity fluctuation of the gas flowing through, so as to ensure the stability of the air outlet. In some embodiments, the flow stabilizing device 80 is a one-stage or multi-stage screen set in the gas circulation channel; in other embodiments, the flow stabilizing device 80 is a Set of one-stage or multi-stage orifice plates.

Please refer to FIG. 5 , in the temperature control device 100 described above, the inner partition 14 divides the space in the box housing 10 into a first air chamber on the same side as the gas inlet 11 and a second air chamber on the same side as the outlet 12 , the two air chambers communicate through the gap on the inner partition 14, so that a U-shaped gas circulation channel is formed as a whole. The extracted gas from the environment of the temperature-controlled equipment enters the first air chamber inside through the inlet 11 on the housing 10, and then passes through the fan 20 and the flow equalizing component 30 to become a relatively uniform airflow; after passing through the cooling device 40, it becomes The airflow lower than the set temperature is heated to the set temperature through the heating device 50; the primary mixing device 60 can be set in the middle and downstream of the cooling device 40, the heating device 50 or between them, so that the airflow through the cooled airflow or the heated airflow can be preliminarily Mixing to improve temperature uniformity; the air flow enters the second air chamber through the gap on the middle inner partition 14, and the swirl device 70 generates a rotating vortex structure to make the air flow mix to achieve uniform temperature, and then pass through the flow stabilization device 80 to make the speed uniform Down, through the outlet 12 into the temperature-controlled environment.

Please refer to FIG. 6 , which is a schematic diagram of the gas flow direction of the temperature control device 100 according to the second embodiment of the present invention. The temperature control device 100 includes a casing 10 and a fan 20 , a flow equalizing component 30 , a cooling device 40 , a heating device 50 , a swirling device 70 and a flow stabilizing device 80 arranged in the casing 10 .

Different from the first embodiment, in this embodiment, no primary mixing device 60 is provided in the gas circulation channel according to the requirements of actual usage scenarios. At the same time, a secondary heating device 50 is provided in the gas circulation channel, and the secondary heating devices 50 are coarse adjustment heaters and fine adjustment heaters, and the overall average temperature of the gas meets the set requirements through multi-level heating power control. In the secondary heating device 50, the first-stage heating device 50 is arranged in parallel downstream of the cooling device 40, and the second-stage heating device 50 is arranged at the gap of the inner partition 14, so that the space between the secondary heating devices 50 is increased. .

Please refer to FIG. 7 , which is a schematic diagram of the gas flow direction of the temperature control device 100 according to the third embodiment of the present invention. The temperature control device 100 includes a housing 10 and a fan 20 , a flow equalizer 30 , a cooling device 40 , a heating device 50 , a primary mixing device 60 , a swirling device 70 and a flow stabilizing device 80 disposed in the housing 10 .

The difference from the second embodiment is that in this embodiment, according to the requirements of actual use scenarios, a primary mixing device 60 is provided in the gas circulation channel, and the primary mixing device 60 is arranged on the first stage parallel to the first stage heating device 50 Between the first stage heating device 50 and the second stage heating device 50 . The secondary heating devices 50 are placed perpendicular to each other, which can increase the space between the first heating device 50 and the second heating device 50, reserve enough space for the primary mixing device 60, and increase the mixing effect.

Please refer to FIG. 8 , which is a schematic diagram of the gas flow direction of the temperature control device 100 according to the fourth embodiment of the present invention. The temperature control device 100 includes a housing 10 and a fan 20 , a flow equalizer 30 , a cooling device 40 , a heating device 50 , a primary mixing device 60 , a swirling device 70 and a flow stabilizing device 80 disposed in the housing 10 .

Different from the third embodiment, in this embodiment, according to the requirements of the actual use scenario, the first-stage heating device 50 is adjacent to the second-stage heating device 50 and arranged in parallel downstream of the cooling device 40; while the primary mixing The device 60 is arranged at the gap of the inner partition 14 and is located downstream of the first-stage heating device 50 and the second-stage heating device 50 .

Please refer to FIG. 9 , which is a schematic diagram of the gas flow direction of the temperature control device 100 according to the fifth embodiment of the present invention. The temperature control device 100 includes a housing 10 and a fan 20 , a flow equalizer 30 , a cooling device 40 , a heating device 50 , a primary mixing device 60 , a swirling device 70 and a flow stabilizing device 80 disposed in the housing 10 .

Different from the third embodiment, in this embodiment, according to the requirements of the actual use scene, the number of stages of the swirl device 70 is increased to three stages, that is, the first-stage swirl device 70, the second-stage swirl device 70. The third-stage cyclone device 70 is adjacently and parallelly arranged in the second air chamber; while the flow-stabilizing device 80 is only provided in one stage.

Please refer to FIG. 10 , which is a schematic diagram of the gas flow direction of the temperature control device 100 according to the sixth embodiment of the present invention. The temperature control device 100 includes a housing 10 and a fan 20 , a flow equalizer 30 , a cooling device 40 , a heating device 50 , a primary mixing device 60 , a swirling device 70 and a flow stabilizing device 80 disposed in the housing 10 .

The difference from the fifth embodiment is that in this embodiment, according to the requirements of actual use scenarios, the number of stages of the swirl device 70 is three, but the swirl outlet of the second-stage swirl device 70 is the same as the first-stage swirl The swirl tuyere of the flow device 70 and the third-stage swirl device 70 are set in reverse, and the swirl tuyere of the second-stage swirl device 70 is docked with the swirl tuyere of the third-stage swirl device 70, and the airflow flows through the swirl After the device 70 , deflection and vortex flow will be generated, and it will flow back and forth between the swirl devices 70 to make the mixing more complete, and finally flow to the flow stabilization device 80 .

Please refer to FIG. 11 , which is a schematic diagram of the gas flow direction of the temperature control device 100 according to the seventh embodiment of the present invention. The temperature control device 100 includes a housing 10 and a fan 20 , a flow equalizer 30 , a cooling device 40 , a heating device 50 , a primary mixing device 60 , a swirling device 70 and a flow stabilizing device 80 disposed in the housing 10 .

The difference from the fifth embodiment is that in this embodiment, according to the requirements of the actual use scenario, the number of stages of the swirl device 70 is two, but the air inlet of the swirl tuyere of the second-stage swirl device 70 is additionally swirled. Flow blades to further increase the swirl effect, make the gas mix more fully and improve the uniformity.

It should be noted that in the above illustrated embodiments, the cooling device 30 is arranged downstream of the fan 20 along the gas flow direction; Upstream, that is, after the gas enters the gas circulation channel from the inlet 11, it is first cooled by the cooling device 30 and then enters the fan 20.

To sum up, the temperature control device of the present invention can provide stable and uniform gas to the environment of the temperature-controlled equipment and continuously replace the gas in the environment, thereby ensuring the stability and uniformity of the environment. Compared with the prior art, the temperature control device of the present invention has at least the following advantages:

(1) The applicable temperature-controlled equipment has a wide range and strong scalability. The temperature control device of the present invention can select fans, cooling devices, and heating devices according to requirements. In principle, there is no limit to the power range of the equipment in the temperature-controlled environment. Because fans, cooling devices, and heating devices can be selected according to requirements, it can adapt to the environment of equipment of different sizes and has strong scalability.

(2) High temperature uniformity. The temperature control device of the present invention adopts forced convection, and a fan is used to realize forced convection. The mixing effect of forced convection has little to do with the temperature difference. The temperature uniformity of the gas is high. Taking a certain embodiment of the temperature control device of the present invention as an example, the temperature deviation of the gas sent out can be as low as 0.02°C.

(3) The fan in the temperature control device of the present invention can ensure that the gas flow channel downstream of the fan is under positive pressure, and avoid the infiltration of external gas.

(4) The temperature control device of the present invention has a simple structure and low failure rate.

The concepts described herein may be implemented in other forms without departing from their spirit and characteristics. The particular embodiments disclosed are to be considered as illustrative rather than restrictive. Accordingly, the scope of the invention is to be determined by the appended claims rather than by these preceding descriptions. Any change within the literal meaning of the claims and within the range of equivalency shall belong to the scope of these claims.

Claims

A temperature control device, characterized in that it comprises:

A housing, the housing is provided with an inlet and an outlet, and a gas circulation channel communicating with the inlet and the outlet is provided in the housing;

a cooling device, fixedly arranged in the housing, for cooling the gas flowing through; and

Fixedly arranged in the housing and sequentially arranged in the gas circulation channel:

a fan, used to drive gas from the inlet into the gas circulation channel;

A flow-equalizing part, which is used to homogenize the flow rate of the passing gas;

heating means for heating the gas passing through; and

Cyclone device for homogenizing the temperature of the passing gas;

Wherein, the cooling device is arranged in the gas circulation channel and between the inlet and the heating device.
The temperature control device according to claim 1, characterized in that: the flow equalization component comprises one or more of the following components with a preset opening ratio: a flat plate, a wire mesh, and a component with a matrix of raised holes.
The temperature control device according to claim 1, characterized in that: the heating device is provided with one or more stages on the gas circulation channel, and the heating device includes at least one of the following: a hollow plate heater , Wire mesh heaters, pipe network heaters.
The temperature control device according to claim 1, wherein the swirl device is arranged near the outlet.
The temperature control device according to claim 4, characterized in that: the swirl device comprises swirl air outlets arranged in one or more stages, wherein:

The swirl tuyere of each stage is provided with at least one of the following blades: fixed blades, passive rotating blades, active rotating blades; or

Each stage of the swirl tuyere is provided with at least one of the following blades: fixed blades, passive rotating blades, and active rotating blades, and each swirling tuyere is equipped with swirl blades at the air inlet.
The temperature control device according to claim 4, further comprising a flow stabilizing device arranged in the gas circulation channel, and the flow stabilizing device is arranged between the swirling flow device and the outlet to reduce The velocity of the passing gas fluctuates.
The temperature control device according to claim 6, characterized in that: said flow stabilizing device comprises one or more stages of screens, or said flow stabilizing device comprises one or more stages of orifice plates.
The temperature control device according to claim 1, further comprising a primary mixing device arranged in the gas circulation channel, the primary mixing device is arranged between the cooling device and the swirl device to Create a vortex in the passing gas.
The temperature control device according to claim 8, characterized in that: the primary mixing device comprises at least one of the following: an orifice plate, a hollow swirl plate, a flat plate component composed of a matrix of several axial flows or centrifugal blades.
The temperature control device according to any one of claims 1 to 9, characterized in that: the housing is enclosed by heat-insulating materials, and the inlet and the outlet are both opened on the top of the housing.
The temperature control device according to any one of claims 1 to 9, wherein an inner partition is provided in the housing to divide the inner space of the housing into the U-shaped gas circulation channel.