CN217158143U - Rotary taking and placing device suitable for substrate - Google Patents
Rotary taking and placing device suitable for substrate Download PDFInfo
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- CN217158143U CN217158143U CN202220211982.9U CN202220211982U CN217158143U CN 217158143 U CN217158143 U CN 217158143U CN 202220211982 U CN202220211982 U CN 202220211982U CN 217158143 U CN217158143 U CN 217158143U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
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Abstract
The utility model relates to a semiconductor manufacturing equipment field specifically provides a rotatory device of getting is put suitable for base plate, include: the rotary motor, the transmission assembly, the rotating shaft assembly and the adsorption assembly can adsorb the substrate; the rotary motor is in driving connection with the transmission assembly, one end of the rotating shaft assembly is connected with the transmission assembly, the other end of the rotating shaft assembly is provided with a connecting part, and the two ends of the connecting part are respectively and symmetrically provided with the adsorption assemblies; the adsorption assembly comprises a Z-axis driving piece fixed on the connecting part, an adsorption bottom plate fixedly connected with the Z-axis driving piece and a plurality of suction nozzles arranged on the adsorption bottom plate, and the suction nozzles can adsorb the substrate; the rotating motor drives the rotating shaft assembly to rotate, so that the connecting part and the adsorption assembly are driven to rotate around the axis of the rotating shaft assembly; the Z-axis driving part drives the suction nozzle to move linearly in the Z-axis direction to be close to or far away from the Z-axis driving part. The utility model discloses can realize material loading and unloading simultaneously.
Description
Technical Field
The utility model relates to a semiconductor manufacturing equipment field especially relates to a rotatory device of getting is put suitable for base plate.
Background
With the continuous development of modern industry, the automation level of the semiconductor industry is gradually improved. In a semiconductor manufacturing apparatus, a substrate needs to be transferred from a magazine to a work table for processing after being transferred many times, and therefore a substrate pick-and-place device needs to be provided. Most of the existing substrate taking and placing devices can only carry out feeding or discharging in one motion process, the feeding and discharging cannot be carried out simultaneously, and the middle of the existing substrate taking and placing devices has longer waiting time, so that the processing efficiency of the whole system is lower.
In view of the above, there is a need in the art for a new solution to solve the above technical problems.
SUMMERY OF THE UTILITY MODEL
The utility model provides a rotatory device of getting suitable for base plate to solve the problem that exists among the prior art.
The utility model provides a rotatory device of getting is put suitable for base plate, include: the rotary motor, the transmission assembly, the rotating shaft assembly and the adsorption assembly can adsorb the substrate; the rotary motor is in driving connection with the transmission assembly, the axis of the rotating shaft assembly is arranged along the Z axis, one end of the rotating shaft assembly is connected with the transmission assembly, the other end of the rotating shaft assembly is provided with a connecting part, and the two ends of the connecting part are respectively and symmetrically provided with the adsorption assemblies;
the adsorption assembly comprises a Z-axis driving piece fixed on the connecting part, an adsorption bottom plate fixedly connected with the Z-axis driving piece and a plurality of suction nozzles arranged on the adsorption bottom plate, and the suction nozzles can adsorb the substrate;
the rotating motor drives the rotating shaft assembly to rotate through the transmission assembly, so that the connecting part and the adsorption assembly are driven to rotate around the axis of the rotating shaft assembly; the Z-axis driving piece drives the adsorption bottom plate and the suction nozzle to move linearly along the Z-axis direction so as to be close to or far away from the Z-axis driving piece.
Preferably, the adsorption component further comprises a plurality of guide rods, one ends of the guide rods are fixedly connected with the connecting portions, the other ends of the guide rods penetrate through the adsorption bottom plate, and the adsorption bottom plate can slide along the Z-axis direction relative to the guide rods.
Preferably, the guide rod is kept away from the one end of connecting portion is equipped with first stopper, first stopper is located adsorb the bottom plate and keep away from one side of Z axle driving piece, first stopper with it still is equipped with the spring to adsorb between the bottom plate, first stopper is used for restricting adsorb the bottom plate along the biggest decline displacement of Z axle.
Preferably, the adsorption assembly further comprises a buffer arranged on the adsorption bottom plate, and the buffer is used for buffering when the adsorption bottom plate moves along the Z axis.
Preferably, the rotating shaft assembly includes a rotating shaft, a sleeve located outside the rotating shaft, and a bearing located between the rotating shaft and the sleeve, one end of the rotating shaft is connected to the connecting portion, the other end of the rotating shaft is connected to the transmission assembly, and the rotating shaft is rotatable relative to the sleeve.
Preferably, the rotary taking and placing device suitable for the substrate further comprises a positioning assembly, wherein the positioning assembly comprises a second limiting block fixed outside the rotating shaft, an installation block positioned outside the second limiting block and a limiting screw installed on the installation block; the mounting block with sleeve fixed connection, the mounting block with there is the clearance between the second stopper, the second stopper can be relative the mounting block is rotatory, the stop screw stretches out in the clearance, the second stopper rotatory to when the position of stop screw with the stop screw contact, with the restriction the rotation angle of rotation axis.
Preferably, the positioning assembly further comprises a sensor mounted on the mounting block, and the sensor is used for sensing the position of the second limiting block.
Preferably, the transmission assembly includes a first pulley provided on an output shaft of the rotating electrical machine, a second pulley provided on the rotating shaft, and a transmission belt wound around the outside of the first pulley and the second pulley.
Preferably, the rotary pick-and-place device for the substrate further comprises a vacuum generator connected with the suction nozzle.
Preferably, a plurality of the suction nozzles are individually connected to the vacuum generator.
The utility model has the advantages that: the rotary taking and placing device suitable for the substrate realizes the motion of two degrees of freedom by arranging the rotary motor and the Z-axis driving piece, one rotary motor controls two groups of adsorption components simultaneously, the structure is simple, and the control difficulty is lower; through set up connecting portion at the pivot subassembly, the two sets of adsorption component of symmetry setting on connecting portion can realize getting the base plate of putting the device both sides to the rotation that is applicable to the base plate and put simultaneously, go on when having realized material loading and unloading, this system of processing's that has significantly reduced waits to expect the time, has improved production efficiency, and simple structure.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the description of the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.
Fig. 1 is a schematic structural view of a rotary pick-and-place device for a substrate according to an embodiment of the present invention;
fig. 2 is a schematic structural view of another angle of the rotary pick-and-place device for the substrate according to the embodiment of the present invention;
fig. 3 is a schematic structural diagram of an adsorption assembly according to an embodiment of the present invention;
fig. 4 is a schematic structural view of a rotating shaft assembly according to an embodiment of the present invention;
fig. 5 is a schematic structural diagram of a positioning assembly according to an embodiment of the present invention;
fig. 6 is a schematic structural diagram of a substrate according to an embodiment of the present invention.
Detailed Description
In order to facilitate understanding of the present invention, the present invention will be described more fully hereinafter with reference to the accompanying drawings. The preferred embodiments of the present invention are shown in the drawings. The invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.
It will be understood that when an element is referred to as being "secured to" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention.
Referring to fig. 1-2, a schematic structural diagram of a rotary pick-and-place device 60 according to an embodiment of the present invention is shown for picking and placing a substrate 201. The rotary pick-and-place device 60 of the present embodiment includes: a rotating motor 61, a transmission assembly 62, a rotating shaft assembly 63 and an adsorption assembly 64 capable of adsorbing the substrate. It should be noted that, as shown in fig. 6, the substrate 201 is a carrier for a material, the material to be processed is attached to the substrate 201, and the substrate 201 may be glass.
Specifically, the rotating motor 61 is in driving connection with the transmission assembly 62, the axis Z axis of the rotating shaft assembly 63 is arranged, one end of the rotating shaft assembly 63 is connected with the transmission assembly 62, the other end of the rotating shaft assembly 63 is provided with a connecting portion 65, and the two ends of the connecting portion 65 are symmetrically provided with the adsorption assemblies 64. More specifically, the output shaft of the rotating electrical machine 61 is disposed downward. Connecting portion 65 is the rectangular form of level setting, and adsorption component 64 sets up to two sets of, is located the both ends of connecting portion 65 respectively, and pivot subassembly 63 is connected with the mid point position of connecting portion 65, and two sets of adsorption component 64 are about the mid point symmetry setting of connecting portion 65.
Referring to fig. 3, the suction assembly 64 includes a Z-axis driving member 641, a suction base plate 642 and a plurality of suction nozzles 643. The Z-axis driver 641 is fixed to the connecting portion 65, the suction base plate 642 is fixedly connected to an output shaft of the Z-axis driver 641, the suction nozzle 643 is provided on the suction base plate 642, the suction nozzle 643 is provided along the Z-axis direction, an upward end of the suction nozzle 643 is connected to the vacuum generator, and a downward end of the suction nozzle 643 is used for sucking the substrate 201. The downward end of the nozzle 643 is further provided with a rubber layer to prevent the substrate 201 from being damaged. In the present embodiment, the suction nozzle 643 is provided in plural, and a plurality of the suction nozzles 643 are individually connected to the vacuum generator to achieve individual control. More specifically, the suction base plate 642 is "i" shaped, the number of the nozzles 643 is 8, 1 nozzle 643 is provided at each of four end points of the suction base plate 642, and 4 nozzles 643 are provided inside the suction base plate 642. In operation, the two nozzles 643 form a set and respectively suck the two ends of the substrate 201. The Z-axis driving member 641 may be a linear motor, a linear cylinder, or a structure in which the rotary motor 61 cooperates with the screw rod assembly to realize linear motion. In this embodiment, the Z-axis driving member 641 is an air cylinder.
When the rotary pick-and-place device 60 of the present embodiment is mounted on a processing system, the rotary pick-and-place device 60 is provided with a device for supporting the substrate 201 on each of the left and right sides, and may be a buffer stage and a work stage.
The utility model discloses rotatory device 60 of getting is put work flow as follows: the rotating motor 61 drives the rotating shaft assembly 63 to rotate through the transmission assembly 62, so that the connecting part 65 and the adsorption assemblies 64 are driven to rotate around the axis of the rotating shaft assembly 63 until the two groups of adsorption assemblies 64 are respectively positioned right above the buffer platform and the workbench; the Z-axis driver 641 drives the adsorption base plate 642 and the nozzle 643 to move linearly downward along the Z-axis direction to approach the substrate 201 until the nozzle 643 contacts the substrate 201; the vacuum generator extracts air in the nozzle 643, and the nozzle 643 and the substrate 201 are fixed by suction; the Z-axis driver 641 drives the adsorption base plate 642 and the suction nozzle 643 to move linearly upward in the Z-axis direction to approach the Z-axis driver 641; the rotating motor 61 works again to rotate the connecting part 65 by 180 degrees, and the two groups of adsorption assemblies 64 rotate to the other side respectively, namely, are positioned right above the workbench and the buffer platform; the Z-axis driver 641 drives the suction nozzle 643 to move linearly downward along the Z-axis direction until the substrate 201 contacts the worktable and the buffer table; the vacuum generator stops working and the rotary pick-and-place device 60 is reset.
The rotary taking and placing device 60 of the embodiment of the present invention realizes the movement of two degrees of freedom by arranging the rotary motor 61 and the Z-axis driving member 641, and one rotary motor 61 controls two sets of adsorption assemblies 64 simultaneously, so that the structure is simple and the control difficulty is low; through set up connecting portion 65 at pivot subassembly 63, two sets of adsorption component 64 of symmetry setting on connecting portion 65 can realize that the base plate 201 of putting device 60 both sides is put to the pairing rotation and gets to put simultaneously, has realized going on when material loading and unloading, and the processing system's that has significantly reduced waits to expect the time, has improved production efficiency, and simple structure.
Furthermore, the suction assembly 64 further includes a plurality of guide rods 644, one end of each guide rod 644 is fixedly connected to the connecting portion 65, the other end of each guide rod 644 penetrates through the suction base plate 642, and the suction base plate 642 can slide along the Z-axis direction relative to the guide rods 644. Specifically, guide rods 644 are provided on both sides of the Z-axis driver 641, respectively. The movement of the adsorption base plate 642 is guided by the arrangement of the guide rod 644, and the reliability of the whole device is improved.
Further, a first stop block 645 is disposed at an end of the guide rod 644 away from the connecting portion 65, the first stop block 645 is disposed at a side of the adsorption base plate 642 away from the Z-axis driving member 641, a spring is disposed between the first stop block 645 and the adsorption base plate 642 for buffering when the adsorption base plate 642 moves along the Z-axis, and the first stop block 645 is configured for limiting a maximum descending displacement of the adsorption base plate 642 along the Z-axis. Through the arrangement of the first limiting block 645, the Z-axis driving member 641 can be effectively prevented from being excessively lowered, and the absorption bottom plate 642 can be prevented from falling off from the Z-axis driving member 641, which causes damage to the substrate 201, and further improves the reliability of the device.
Further, the suction assembly 64 further includes a buffer 646 provided on the suction base plate 642, the buffer 646 being used for buffering when the suction base plate 642 moves along the Z-axis. By providing the buffer, damage to the substrate 201 due to an excessively fast speed of the Z-axis driver 641 can be further prevented, and excessive displacement of the Z-axis driver 641 can be prevented.
Further, referring to fig. 4, the rotating shaft assembly 63 includes a rotating shaft 631, a sleeve 632 located outside the rotating shaft 631, and a bearing located between the rotating shaft 631 and the sleeve 632, one end of the rotating shaft 631 is connected to the connecting portion 65, the other end of the rotating shaft 631 is connected to the transmission assembly 62, and the rotating shaft 631 can rotate relative to the sleeve 632. Through the setting of rotation axis 631 and sleeve 632, can avoid rotary part direct exposure outside, increase the life of rotatory device 60 of putting, can increase the intensity of pivot subassembly 63 simultaneously.
Further, please refer to fig. 1, fig. 2, and fig. 5, the rotating pick-and-place device 60 further includes a positioning assembly 66, wherein the positioning assembly 66 includes a second limiting block 661 fixed to the outer portion of the rotating shaft 631, an installing block 662 located at the outer portion of the second limiting block 661, and a limiting screw 663 installed on the installing block 662. The mounting block 662 is fixedly connected with the sleeve 632, a gap exists between the mounting block 662 and the second limiting block 661, the second limiting block 661 can rotate relative to the mounting block 662, the limiting screw 663 extends out of the gap, and the second limiting block 661 rotates to the position of the limiting screw 663 and contacts with the limiting screw 663 to limit the rotation angle of the rotation shaft 631. That is, the rotation shaft 631 cannot always rotate in the same direction, and the rotation shaft 631 can only rotate in the forward or reverse direction by an angle smaller than 360 °. Through the above arrangement, it can be avoided that the rotating shaft assembly 63 only rotates in the same direction, because the suction nozzle 643 of the rotating pick-and-place device 60 needs to be connected with the air tube, if the rotating shaft assembly rotates in the same direction all the time, the air tube is wound together, and finally the rotating shaft assembly cannot work. During the actual assembly process, the mounting block 662 is assembled to other devices to achieve fixation.
Further, in order to identify the position of the absorption assembly 64, the positioning assembly 66 further includes a sensor 664 mounted on the mounting block 662, and the sensor 664 is used for sensing the position of the second stopper 661. The position of the adsorption member 64 can be further determined by determining the position of the second stopper 661. The accuracy of the rotary pick-and-place device 60 is further improved by the provision of the sensor 664.
Further, in order to realize the power connection between the rotating motor 61 and the rotating shaft assembly 63, the transmission assembly 62 includes a first pulley 621 disposed on the output shaft of the rotating motor 61, a second pulley 622 disposed on the rotating shaft 631, and a transmission belt 623 wound around the first pulley 621 and the second pulley 622. The power connection between the rotating motor 61 and the rotating shaft assembly 63 can be realized through the arrangement. It should be noted that in other embodiments, the power connection may also be realized by directly adopting a gear transmission or a direct driving manner.
The above only is the partial embodiment of the utility model discloses a not therefore restriction the utility model discloses a protection scope, all utilize the utility model discloses equivalent device or equivalent flow transform that the content of description and drawing was done, or direct or indirect application in other relevant technical field, all the same reason is included in the patent protection scope of the utility model.
Claims (10)
1. A rotary pick-and-place device suitable for a substrate is characterized by comprising: the rotary motor, the transmission assembly, the rotating shaft assembly and the adsorption assembly can adsorb the substrate; the rotary motor is in driving connection with the transmission assembly, the axis of the rotating shaft assembly is arranged along the Z axis, one end of the rotating shaft assembly is connected with the transmission assembly, the other end of the rotating shaft assembly is provided with a connecting part, and the two ends of the connecting part are respectively and symmetrically provided with the adsorption assemblies;
the adsorption assembly comprises a Z-axis driving piece fixed on the connecting part, an adsorption bottom plate fixedly connected with the Z-axis driving piece and a plurality of suction nozzles arranged on the adsorption bottom plate, and the suction nozzles can adsorb the substrate;
the rotating motor drives the rotating shaft assembly to rotate through the transmission assembly, so that the connecting part and the adsorption assembly are driven to rotate around the axis of the rotating shaft assembly; the Z-axis driving piece drives the adsorption bottom plate and the suction nozzle to move linearly along the Z-axis direction so as to be close to or far away from the Z-axis driving piece.
2. The device of claim 1, wherein the suction assembly further comprises a plurality of guide rods, one end of each guide rod is fixedly connected to the connecting portion, the other end of each guide rod passes through the suction base plate, and the suction base plate can slide along the Z-axis direction relative to the guide rods.
3. The device according to claim 2, wherein a first stopper is disposed at an end of the guide rod away from the connecting portion, the first stopper is disposed at a side of the adsorption bottom plate away from the Z-axis driving member, a spring is disposed between the first stopper and the adsorption bottom plate, and the first stopper is used for limiting a maximum lowering displacement of the adsorption bottom plate along the Z-axis.
4. The device of claim 1, wherein the suction assembly further comprises a buffer disposed on the suction base plate, and the buffer is used for buffering when the suction base plate moves along the Z-axis.
5. The rotary pick-and-place device for the substrate as claimed in claim 1, wherein the rotation shaft assembly comprises a rotation shaft, a sleeve located outside the rotation shaft, and a bearing located between the rotation shaft and the sleeve, one end of the rotation shaft is connected to the connecting portion, the other end of the rotation shaft is connected to the transmission assembly, and the rotation shaft can rotate relative to the sleeve.
6. The device according to claim 5, further comprising a positioning assembly, wherein the positioning assembly comprises a second stopper fixed to the outside of the rotating shaft, a mounting block located outside the second stopper, and a stopper screw mounted on the mounting block; the mounting block with sleeve fixed connection, the mounting block with there is the clearance between the second stopper, the second stopper can be relative the mounting block is rotatory, the stop screw stretches out in the clearance, the second stopper rotatory to when the position of stop screw with the stop screw contact, with the restriction the rotation angle of rotation axis.
7. The device of claim 6, wherein the positioning assembly further comprises a sensor mounted on the mounting block, the sensor sensing the position of the second stopper.
8. The device of claim 5, wherein the transmission assembly comprises a first pulley disposed on an output shaft of the rotating motor, a second pulley disposed on the rotating shaft, and a transmission belt wound around the first pulley and the second pulley.
9. The device of claim 1, further comprising a vacuum generator coupled to the suction nozzle.
10. The rotary pick and place device for substrates as claimed in claim 9, wherein a plurality of the suction nozzles are individually connected to the vacuum generator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220211982.9U CN217158143U (en) | 2022-01-25 | 2022-01-25 | Rotary taking and placing device suitable for substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220211982.9U CN217158143U (en) | 2022-01-25 | 2022-01-25 | Rotary taking and placing device suitable for substrate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217158143U true CN217158143U (en) | 2022-08-09 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220211982.9U Active CN217158143U (en) | 2022-01-25 | 2022-01-25 | Rotary taking and placing device suitable for substrate |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217158143U (en) |
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2022
- 2022-01-25 CN CN202220211982.9U patent/CN217158143U/en active Active
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