CN217147788U

CN217147788U - Gravity separation feeding device of single crystal furnace

Info

Publication number: CN217147788U
Application number: CN202220119303.5U
Authority: CN
Inventors: 王晓明; 宋涛
Original assignee: Xuzhou Jingrui Semiconductor Equipment Technology Co ltd
Current assignee: Xuzhou Jingrui Semiconductor Equipment Technology Co ltd
Priority date: 2022-01-17
Filing date: 2022-01-17
Publication date: 2022-08-09
Anticipated expiration: 2032-01-17

Abstract

The utility model discloses a gravity separation feeding device of a single crystal furnace, which is communicated with a feeding mechanism and comprises a box body, the bottom of the box body is detachably fixed on a furnace cover of a main chamber of the single crystal furnace, and a discharging pipe of the feeding mechanism extends into the box body from the top of the box body; the gravity separation bin is used for buffering the blanking speed of the silicon material transmitted by the feeding mechanism, a feeding hole I of the gravity separation bin is positioned right below the discharging pipe, and the inner diameter of the feeding hole I is larger than the outer diameter of the discharging pipe; the vibrating feeder is used for conveying silicon materials in the gravity separation bin into a main chamber of the single crystal furnace at a set speed, the gravity separation bin and the vibrating feeder are arranged in the box body from top to bottom, a discharge port at the bottom of the gravity separation bin is located in a feeding bin of the vibrating feeder, and the feeding bin is communicated with a feed port on a furnace cover of the main chamber of the single crystal furnace.

Description

Gravity separation feeding device of single crystal furnace

Technical Field

The utility model relates to a single crystal growing furnace technical field that feeds in raw material specifically is a single crystal growing furnace gravity separation feeder.

Background

The rapid development of the semiconductor industry promotes the production of single crystal furnaces to have continuity and high efficiency, and the cost of crystal pulling production needs to be saved. After the silicon material is melted into liquid, the silicon material is continuously added after the multiple feeding, so that the silicon liquid in the quartz crucible is filled as much as possible, and thus, the long silicon rod can be pulled out at one time by fully utilizing the volume of the quartz crucible; because the one-time service life of the quartz crucible is about 200 hours, the quartz crucible can be charged for many times and a plurality of crystal bars can be pulled out as far as possible in the service life.

In the prior art, silicon materials directly enter a crucible of a furnace chamber of a single crystal furnace through a feeding mechanism, and silicon liquid is easy to splash due to too fast movement of the silicon materials, so that the silicon materials are wasted, and the environment in the furnace is influenced.

SUMMERY OF THE UTILITY MODEL

The technical insufficiency that exists to the above-mentioned, the utility model aims at providing a single crystal growing furnace gravity separation feeder to solve the problem that proposes in the background art.

In order to solve the technical problem, the utility model adopts the following technical scheme:

the utility model provides a single crystal growing furnace gravity separation feeder, single crystal growing furnace gravity separation feeder and feeding mechanism intercommunication, single crystal growing furnace gravity separation feeder includes

The bottom of the box body is detachably fixed on a furnace cover of a main chamber of the single crystal furnace, and a discharge pipe of the feeding mechanism extends into the box body from the top of the box body;

the gravity separation bin is used for buffering the blanking speed of the silicon material transmitted by the feeding mechanism, a feeding hole I of the gravity separation bin is positioned right below the discharging pipe, and the inner diameter of the feeding hole I is larger than the outer diameter of the discharging pipe;

the vibrating feeder is used for conveying silicon materials in the gravity separation bin into the main chamber of the single crystal furnace at a set speed, the gravity separation bin and the vibrating feeder are arranged in the box body from top to bottom, a discharge hole in the bottom of the gravity separation bin is located in a feeding bin of the vibrating feeder, and the feeding bin is communicated with a feed hole in a furnace cover of the main chamber of the single crystal furnace.

The bottom in gravity separation storehouse is the lou hopper-shaped that declines gradually in aperture, the gravity separation storehouse is fixed on the lateral wall of box through the feed bin backup pad that the level set up, furtherly, the circumference sets up a plurality of bracing pieces between feed bin backup pad and the gravity separation storehouse, bracing piece perpendicular to feed bin backup pad, gravity separation storehouse cup joint in the feed bin backup pad, and the feed bin backup pad plays the supporting role, and simultaneously through setting up a plurality of bracing pieces, the multiple spot supports for the gravity separation storehouse is more firm. Further, the discharge port is an inclined discharge port, and an opening of the inclined discharge port faces to the flowing direction of the silicon material in the feeding bin.

Vibrating feeder includes vibrating motor, converter, linking bridge, feed bin, lower feed bin and transmission shaft, vibrating motor is located the box lower part outside, vibrating motor passes through the transmission shaft and is connected with the converter, the converter is connected with linking bridge, the upper end fixed connection feed bin of linking bridge, the during operation, vibrating motor drive transmission shaft rotate, and the converter is used for converting the rotary motion of transmission shaft into linking bridge's straight reciprocating motion, and the reciprocating motion of the straight line of linking bridge drives feed bin and carries out straight reciprocating motion, and then realizes the unloading process.

Be equipped with bent axle link mechanism in the converter, bent axle link mechanism includes bevel gear one, bent axle, connecting rod and slider, the one end of transmission shaft stretches into in the converter, bevel gear two is installed to the tip of transmission shaft, bevel gear one is installed to the tip of bent axle, bevel gear one and bevel gear two-phase meshing, the bent axle passes through the connecting rod and is connected with the slider, the slider is located straight section of thick bamboo, the inner space of straight section of thick bamboo forms the linear motion passageway of slider, straight section of thick bamboo is kept away from the one end of connecting rod and is contacted with linking bridge, one side that the converter bottom is close to linking bridge extends the formation base left, the base is located linking bridge under, connect through the spring leaf between base and the linking bridge.

It can be understood that, when the bent axle rotated to being close to straight section of thick bamboo one end, the slider produced thrust to the linking bridge, promoted the linking bridge and moved forward, and the spring leaf is stretched, and the bent axle continues to rotate, and thrust disappears, and the spring leaf shrink drives the linking bridge and resets, feeds the storehouse owing to with linking bridge fixed connection, feeds the storehouse and follows the linking bridge and carry out straight reciprocating motion, and silicon material in it moves to the blanking storehouse unloading along with it left simultaneously.

The pan feeding mouth and the linking bridge that feed the storehouse are located the upper and lower both ends that feed the storehouse with one side, the internal diameter of pan feeding mouth is greater than the external diameter of the discharge gate in gravity separation storehouse, so, can allow the relative discharge gate motion of feed storehouse.

Preferably, the feed bin is kept away from the one end of pan feeding mouth and is gone down feed bin of body coupling perpendicularly, the lower part of feed bin stretches into in the feeder hopper down, the internal diameter of feeder hopper is greater than the external diameter of feed bin down, so, leaves the clearance between feeder hopper and the feed bin down, can allow the relative discharge gate motion of feed bin down.

Preferably, the support plates are symmetrically arranged on two sides of the gravity separation bin of the bin support plates, and the bottoms of the two support plates are vertically welded at the bottom of the box body and used for supporting the bin support plates. The lower parts of the two supporting plates are horizontally fixed with supporting frames, and the converter is installed on the supporting frames through a base. Furthermore, the blanking bin is fixed on the supporting plate through a horizontally arranged mounting frame.

Preferably, the top of box can be dismantled and connect the case lid, the feed inlet has been seted up on the case lid, the laser charge level indicator is installed to the case lid in the top in gravity separation storehouse for detect the height of the silicon material in the gravity separation storehouse.

Preferably, the vibration motor is a variable frequency motor, so that the frequency can be adjusted according to the feeding speed requirement of the process, and the blanking speed of the silicon material is further controlled.

Preferably, a mounting plate is sleeved at the lower end of the discharge pipe, and the discharge pipe penetrates through the mounting plate through a bolt and is fixed on the box cover. Further, the pan feeding mouth can be dismantled in the outside of discharge gate and connect the dust cover, the dust cover adopts soft materials such as rubber, latex or silica gel. The setting of dust cover can prevent that at the vibration in-process, the silicon material shakes out from the pan feeding mouth, influences box internal environment, in addition, because the dust cover is owing to adopt soft material, can not produce the damage to the discharge gate at the in-process of feeding the storehouse vibration.

The beneficial effects of the utility model reside in that:

(1) the utility model discloses a single crystal growing furnace gravity separation feeder is mainly applicable to pneumatic conveying's feeding mechanism, and inert gas (for example argon gas) drives silicon material and gets into the box through the discharging pipe promptly, and silicon material directly gets into gravity separation storehouse, because leaves the gap between the feed inlet on the lateral wall of feeder hopper and the bell, and argon gas mainly gets into the single crystal growing furnace main chamber from the outside of gravity separation storehouse and is taken away by the main pump, and silicon material gets into gravity separation storehouse, and the unloading speed of silicon material can be cushioned, has realized gas-material separation simultaneously; a vibrating feeder is arranged below the gravity separation bin, silicon falls into a quartz crucible in the main chamber under the action of the vibrating feeder, and the vibrating feeder can adjust the frequency according to the feeding speed requirement of the process. The utility model discloses a setting, the speed that can effectively solve the unloading of silicon material removes too fast, causes the problem that silicon liquid splashes easily, and it is extravagant to reduce the silicon material, environment in the protection furnace. The utility model discloses a single crystal growing furnace gravity separation feeder also is applicable to the feeding mechanism of mechanical conveying silicon material, cushions through gravity separation storehouse, and vibrating feeder controls feed rate.

(2) The utility model discloses a vibrating feeder includes vibrating motor, converter, linking bridge, gives feed bin, lower feed bin and transmission shaft, and vibrating motor drives the transmission shaft and rotates, and the converter is used for converting the rotary motion of transmission shaft into linking bridge's straight reciprocating motion, and the reciprocating motion of the straight line of linking bridge drives and gives the feed bin and carry out straight reciprocating motion, and then realizes the vibration unloading process. Meanwhile, the vibration motor adopts a variable frequency motor, so that the frequency can be adjusted according to the feeding speed requirement of the process, and the blanking speed of the silicon material is further controlled.

(3) The utility model discloses in, the pan feeding mouth of feeding storehouse can be dismantled in the outside of the discharge gate in gravity separation storehouse and connect the dust cover, and the dust cover adopts soft materials such as rubber, latex or silica gel. The setting of dust cover can prevent that at the vibration in-process, the silicon material shakes out from the pan feeding mouth, influences box internal environment, in addition, because the dust cover is owing to adopt soft material, can not produce the damage to the discharge gate at the in-process of feeding the storehouse vibration.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.

FIG. 1 is a cross-sectional view of a gravity separation feeding device of a single crystal furnace according to an embodiment of the present invention;

fig. 2 is a schematic structural diagram of a vibrating feeder of the present invention;

fig. 3 is a schematic structural diagram of the converter of the present invention.

Description of reference numerals:

comprises a box body 1, a gravity separation bin 2, a vibrating feeder 3, a bin supporting plate 5, a flange 6 and a furnace cover 7;

a box cover 11, a discharge pipe 12, a laser level indicator 13 and an installation plate 14;

a first feeding hole 21 and a discharging hole 22;

the device comprises a vibration motor 31, a converter 32, a connecting bracket 33, a feeding bin 34, a discharging bin 35, a transmission shaft 36, a mounting frame 37, a supporting frame 38, a first conical gear 321, a crankshaft 322, a connecting rod 323, a sliding block 324, a straight cylinder 325, a base 326, a spring plate 331, a feeding port 341, a dust cover 342 and a second conical gear 361;

a support rod 51 and a support plate 52.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

In the description of the present invention, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention.

The embodiment is as follows:

as shown in figures 1-3, the utility model provides a gravity separation feeding device of a single crystal furnace, which comprises a box body 1, a gravity separation bin 2 and a vibrating feeder 3.

The bottom of the box body 1 is fixed on a furnace cover 7 of a main chamber of the single crystal furnace through a flange 6, the top of the box body 1 is detachably connected with a box cover 11, a feed inlet is formed in the box cover 11, a discharge pipe 12 of the feeding mechanism extends into the box body 1 through the feed inlet of the box cover 11, a mounting plate 14 is sleeved at the lower end of the discharge pipe 12, and the discharge pipe 12 penetrates through the mounting plate 14 through a bolt and is fixed on the box cover 11.

The utility model discloses a silicon material separator, including box 1, gravity separation bin 2, discharging pipe 12, vibrating feeder 3, gravity separation bin 2, discharge pipe 12, and the aperture of feed inlet 21 is 2-4 times of discharge pipe 12 external diameter, so set up, prevent that the silicon material from spilling the outside of feed inlet 21, and the inert gas that conveniently carries the silicon material is taken out outside gravity separation bin 2 when the single crystal growing furnace main pump is bled, and then is taken away by the single crystal growing furnace main pump, realizes the separation of gas material, and the material is fed back to the box from the top down and is provided with gravity separation bin 2 and vibrating feeder 3, and gravity separation bin 2 is used for buffering the unloading speed of the silicon material that feeding mechanism conveys, one 21 of feed inlet of gravity separation bin is located discharging pipe 12 under, and the aperture of feed inlet 21 is 2-4 times of discharging pipe 12 external diameter. The bottom of gravity separation storehouse 2 is the funnel shaped that leaks that the aperture dwindles gradually, gravity separation storehouse 2 is fixed on the lateral wall of box 1 through the feed bin backup pad 5 that the level set up, furtherly, the circumference sets up a plurality of bracing pieces 51 between feed bin backup pad 5 and the gravity separation storehouse 2, bracing piece 51 perpendicular to feed bin backup pad 5, gravity separation storehouse 2 cup joint on feed bin backup pad 5, and feed bin backup pad 5 plays the supporting role, and simultaneously through setting up a plurality of bracing pieces 51, the multiple spot supports for gravity separation storehouse 2 is more firm. The bottom of gravity separation storehouse 2 is equipped with discharge gate 22, discharge gate 22 is arranged in the feed bin 34 of vibrating feeder 3, and further, discharge gate 22 is the bevel connection discharge gate, the opening of bevel connection discharge gate sets up towards feed bin 35 one side down.

Vibrating feeder 3 includes vibrating motor 31, converter 32, linking bridge 33, feeds storehouse 34, feed bin 35 and transmission shaft 36, vibrating motor 31 is located the 1 lower part outside of box, vibrating motor 31 passes through transmission shaft 36 and is connected with converter 32, converter 32 is connected with linking bridge 33, linking bridge 33's upper end fixed connection feeds storehouse 34, and the during operation, vibrating motor 31 drive transmission shaft 36 and rotate, and converter 32 is used for converting the rotary motion of transmission shaft 36 into linking bridge 33's linear reciprocating motion, and linking bridge 33's linear reciprocating motion drives and feeds storehouse 34 and carry out linear reciprocating motion, and then realizes the unloading process.

In some embodiments of the present invention, referring to fig. 2 and 3, a crankshaft connecting rod mechanism (not labeled) is disposed in the converter 32, the crankshaft connecting rod mechanism includes a first conical gear 321, a crankshaft 322, a connecting rod 323, and a slider 324, one end of the transmission shaft 36 extends into the converter 32, a second conical gear 361 is mounted at an end of the transmission shaft 36, the first conical gear 321 is mounted at an end of the crankshaft 322, the first conical gear 321 and the second conical gear 361 are engaged, the crankshaft 322 is connected to the slider 324 through the connecting rod 323, the slider 324 is located in the straight cylinder 325, an inner space of the straight cylinder 325 forms a linear movement channel of the slider 324, one end of the straight cylinder 325, which is far away from the connecting rod 323, contacts the connecting bracket 33, one side of the bottom of the converter 32, which is close to the connecting bracket 33, extends leftward to form a base 326, the base 326 is located right below the connecting bracket 33, the base 326 and the connecting bracket 33 are connected by a spring plate 331.

It can be understood that, when the crankshaft 322 rotates to be close to one end of the straight cylinder 325, the sliding block 324 generates a thrust force on the connecting support 33 to push the connecting support 33 to move forward, the spring leaf 331 is stretched, the crankshaft 322 continues to rotate, the thrust force disappears, the spring leaf 331 contracts to drive the connecting support 33 to reset, the feeding bin 34 is fixedly connected with the connecting support 33, the feeding bin 34 and the connecting support 33 perform linear reciprocating motion, and meanwhile, silicon materials in the feeding bin move leftwards to the discharging bin 35 to discharge materials.

The utility model discloses an in some embodiments, vibrating motor 31 adopts inverter motor, so, can require to carry out the adjustment of frequency according to the input speed of technology, and then the unloading speed of control silicon material.

In some embodiments of the present invention, referring to fig. 1 and 2, the feeding port 341 and the connecting bracket 33 of the feeding bin 34 are located at the upper end and the lower end of the same side of the feeding bin 34, the aperture of the feeding port 341 is larger than the outer diameter of the discharging port 22 of the gravity separation bin 2, so that, when vibrating, the gap between the feeding port 341 and the discharging port 22 can allow the feeding bin 34 to move relative to the discharging port 22. Further, pan feeding mouth 341 can dismantle in the outside of discharge gate 22 and connect dust cover 342, dust cover 342 adopts soft materials such as rubber, latex or silica gel. The dust cover 342 is arranged to prevent the silicon material from vibrating out from the feeding port 341 in the vibration process to affect the internal environment of the box body 1, and in addition, the dust cover 342 is made of soft material, so that the discharge port 22 is not damaged in the vibration process of the feeding bin 34.

Further, the feeding bin 34 is vertically and downwards integrally connected with the discharging bin 35 at one end far away from the feeding port 341, the lower part of the discharging bin 35 extends into the feeding bin 4, the feeding bin 4 is communicated with the feeding port on the furnace cover 7 of the main chamber of the single crystal furnace through the flange 6, and the inner diameter of the feeding bin 4 is larger than the outer diameter of the discharging bin 35, so that a gap is reserved between the feeding bin 4 and the discharging bin 35, and the discharging bin 35 can be allowed to move relative to the discharging port 22.

In some embodiments of the present invention, referring to fig. 1, the bin supporting plate 5 has supporting plates 52, two, installed symmetrically on two sides of the gravity separation bin 2, the bottom of the supporting plates 52 is welded vertically on the bottom of the box body 1 for supporting the bin supporting plate 5. The lower parts of the two support plates 52 are horizontally fixed with a support frame 38, and the converter 32 is mounted on the support frame 38 through a base 326. Further, the lower bin 35 is fixed to the support plate 52 by a horizontally disposed mounting bracket 37.

In some embodiments of the present invention, referring to fig. 1, the case cover 11 is provided with a laser level indicator 13 above the gravity separation chamber 2 for detecting the height of the silicon material in the gravity separation chamber 2.

The working principle is as follows:

the utility model discloses a single crystal growing furnace gravity separation feeder mainly is applicable to pneumatic conveying's feeding mechanism, through inert gas (for example argon) under the negative pressure condition promptly, send silicon material to single crystal growing furnace main chamber, if through pneumatic conveying silicon material, inert gas (for example argon) drive silicon material and pass through discharging pipe 12 and get into in the box 1, silicon material directly gets into gravity separation storehouse 2, because leave the gap between the lateral wall of feeder hopper 4 and the feed inlet on the bell 7, and argon mainly gets into single crystal growing furnace main chamber 7 from the outside of gravity separation storehouse 2 and is taken away by the main pump, silicon material gets into gravity separation storehouse 2, the unloading speed of silicon material can cushion, gas-material separation has been realized simultaneously;

a vibrating feeder 3 is arranged below the gravity separation bin 2, silicon falls into a quartz crucible in a main chamber 7 under the action of the vibrating feeder 3, and the vibrating feeder 3 can adjust the frequency according to the feeding speed requirement of the process.

Of course, the utility model discloses a single crystal growing furnace gravity separation feeder also is applicable to other material feeding unit that need adjust feed rate, for example the feeding mechanism of mechanical conveying silicon material cushions through gravity separation storehouse 2, and vibrating feeder 3 controls feed rate.

It will be apparent to those skilled in the art that various changes and modifications may be made without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims and their equivalents, the present invention is also intended to include such modifications and variations.

Claims

1. The gravity separation feeding device of the single crystal furnace is characterized by being communicated with a feeding mechanism and comprising

2. The gravity separation feeding device of the single crystal furnace as claimed in claim 1, wherein the bottom of the gravity separation bin is in a funnel shape with a gradually reduced aperture, the gravity separation bin is fixed on the side wall of the box body through a horizontally arranged bin supporting plate, a plurality of supporting rods are circumferentially arranged between the bin supporting plate and the gravity separation bin, the supporting rods are perpendicular to the bin supporting plate, and the gravity separation bin is sleeved on the bin supporting plate.

3. The gravity separation feeding device of the single crystal furnace as claimed in claim 2, wherein the vibrating feeder comprises a vibrating motor, a converter, a connecting bracket, a feeding bin, a discharging bin and a transmission shaft, the vibrating motor is located on the outer side of the lower portion of the box body, the vibrating motor is connected with the converter through the transmission shaft, the converter is connected with the connecting bracket, the feeding bin is fixedly connected to the upper end of the connecting bracket, the vibrating motor drives the transmission shaft to rotate, and the converter is used for converting the rotating motion of the transmission shaft into the linear reciprocating motion of the connecting bracket.

4. The gravity separation feeding device of a single crystal furnace as claimed in claim 3, a crankshaft connecting rod mechanism is arranged in the converter, the crankshaft connecting rod mechanism comprises a first conical gear, a crankshaft, a connecting rod and a sliding block, one end of the transmission shaft extends into the converter, a second conical gear is mounted at the end part of the transmission shaft, the end part of the crankshaft is provided with a first conical gear, the first conical gear is meshed with a second conical gear, the crankshaft is connected with a slide block through a connecting rod, the slide block is positioned in the straight cylinder, the inner space of the straight cylinder forms a linear motion channel of the slide block, one end of the straight cylinder, which is far away from the connecting rod, is contacted with the connecting bracket, one side of the bottom of the converter, which is close to the connecting bracket, extends leftwards to form a base, the base is located under the connecting support, and the base is connected with the connecting support through the spring leaf.

5. The gravity separation feeding device of the single crystal furnace as claimed in claim 3, wherein the feeding port of the feeding bin and the connecting bracket are located at the upper end and the lower end of the same side of the feeding bin, and the inner diameter of the feeding port is larger than the outer diameter of the discharging port of the gravity separation bin.

6. The gravity separation feeding device of the single crystal furnace as claimed in any one of claims 3 to 5, wherein one end of the feeding bin, which is far away from the feeding port, is vertically and downwardly integrally connected with a lower bin, the lower part of the lower bin extends into a feeding hopper, and the inner diameter of the feeding hopper is larger than the outer diameter of the lower bin.

7. The gravity separation feeding device of a single crystal furnace as claimed in claim 3, wherein the bin supporting plates are symmetrically provided with supporting plates at two sides of the gravity separation bin, the bottoms of the two supporting plates are vertically fixed at the bottom of the box body, the lower parts of the two supporting plates are horizontally fixed with the supporting frame, the converter is arranged on the supporting frame through the base, and the lower bin is fixed on the supporting plates through the horizontally arranged mounting frame.

8. The gravity separation feeding device of the single crystal furnace as claimed in any one of claims 1 to 5, wherein a box cover is detachably connected to the top of the box body, a feeding hole is formed in the box cover, and a laser level indicator is installed on the box cover above the gravity separation bin.

9. A single crystal furnace gravity separation feeding device according to any one of claims 3 to 5, characterized in that the vibration motor is a variable frequency motor.

10. The gravity separation feeding device of a single crystal furnace according to claim 1, wherein a mounting plate is sleeved on the lower end of the discharging pipe, and the discharging pipe is fixed on the box cover by passing through the mounting plate through a bolt.