CN114395795A

CN114395795A - Feeding device for single crystal furnace

Info

Publication number: CN114395795A
Application number: CN202210054322.9A
Authority: CN
Inventors: 赵京通; 李润飞; 贾世涛
Original assignee: Hebei Jing Long Sun Equipment Co ltd
Current assignee: Jing'ao Wuxi Photovoltaic Technology Co ltd
Priority date: 2022-01-18
Filing date: 2022-01-18
Publication date: 2022-04-26
Anticipated expiration: 2042-01-18
Also published as: CN114395795B

Abstract

The invention provides a feeding device for a single crystal furnace, which comprises a base and a feeder main body arranged on the base, wherein the feeder main body comprises a feeding mechanism and an upper plate which is in sliding connection with the base; and a vibrator feeding mechanism comprising: second drive assembly, sliding connection be in pay-off subassembly on the upper plate, with synchronous pulley, force sensor that second drive assembly connects and with the alarm that force sensor electricity is connected, wherein, install the hold-in range on the synchronous pulley, the hold-in range passes through force sensor with the pay-off subassembly is connected, if the hold-in range with the not synchronous motion of pay-off subassembly, alarm signal is sent. The device provided by the embodiment of the invention can effectively reduce the occupied space of the whole machine and can avoid serious consequences caused by collision.

Description

Feeding device for single crystal furnace

Technical Field

The invention relates to a feeding device for a single crystal furnace.

Background

When the single crystal furnace is used for pulling, silicon materials need to be added into the single crystal furnace, when the feeding device on the side of the furnace cylinder feeds materials into the single crystal furnace, the feeding time is long due to structural reasons, the material pipe can be damaged by high temperature in the furnace, and in addition, when the feeding device in the prior art feeds materials, the feeding device inevitably collides with parts in the single crystal furnace, so that the feeding device and the single crystal furnace are easily damaged, and even serious consequences such as furnace stewing are caused.

Disclosure of Invention

In view of the above, the present invention provides a feeding device for a single crystal furnace, which is used to solve the technical problem that the feeding device and the single crystal furnace are easily damaged due to collision of a charging barrel with a component in the single crystal furnace during crystal pulling and feeding.

In order to solve the technical problems, the invention adopts the following technical scheme:

the feeding device for the single crystal furnace comprises a base and a feeder main body arranged on the base, wherein the feeder main body comprises:

the feeding mechanism comprises an upper plate which is connected with the base in a sliding way; and

vibrator feeding mechanism includes: the device comprises a second driving assembly, a feeding assembly, a synchronous belt wheel and a tension sensor, wherein the feeding assembly is connected to the surface, away from the base, of the upper plate in a sliding manner; and

and the alarm is electrically connected with the tension sensor and responds to the tension signal acquired by the tension sensor to send an alarm signal.

According to one embodiment of the invention, the feed mechanism further comprises: and the first driving assembly is fixed on the base and is connected with the upper plate and drives the upper plate to slide.

According to an embodiment of the present invention, the apparatus further includes a control cabinet, a touch screen is disposed on the control cabinet, the control cabinet is electrically connected to the first driving assembly, the second driving assembly, the tension sensor and the alarm, and the control cabinet is configured to: and receiving the tension signal acquired by the tension sensor, and controlling the alarm to send out the alarm signal according to the tension signal.

According to one embodiment of the invention, two limiting pieces are arranged on the upper plate at intervals, a limiting rod is arranged on the feeding assembly, and the limiting rod is positioned between the two limiting pieces.

According to one embodiment of the invention, the base comprises:

the bottom plate, be equipped with on the bottom plate and be used for adjusting the height control screw of bottom plate height, and be used for right the bottom plate advances line location's locating pin, the height control screw with the locating pin sets up deviate from on the bottom plate one side of charging means main part.

According to an embodiment of the invention, the feeder body further comprises: the bin body is assembled on the base and comprises a bin wall and an upper cover, a cavity is formed inside the bin wall, the upper end of the bin wall is provided with an opening, a pneumatic controller is assembled on the outer wall of the bin wall and connected with the upper cover to control the upper cover to open or close the opening.

According to one embodiment of the invention, the wall of the bin is provided with an air inlet pipe communicated with the cavity, and the air inlet pipe is provided with a float flowmeter; and/or the device further comprises a vacuum gauge, and a probe of the vacuum gauge is arranged in the cavity of the bin body.

According to an embodiment of the invention, the device further comprises an isolation valve assembled outside the bin body, wherein the isolation valve is provided with a feeding port arranged opposite to the feeding assembly, and an argon gas control interface, an evacuation control interface, a corrugated pipe connecting port, a cooling pipe and a collecting tank which are communicated with the feeding port.

According to one embodiment of the invention, the chamber is divided into a charging zone and a feeding zone, the feeding zone being located between the base and the charging zone, the vibrator feed mechanism being located in the feeding zone, the device further comprising a cartridge disposed in the charging zone, the cartridge comprising:

the charging barrel comprises a charging barrel body, a charging opening and a discharging opening, wherein a cavity for containing materials is formed inside the charging barrel body;

a dual board mechanism comprising: with the mounting panel of discharge gate intercommunication, assemble in first picture peg on the mounting panel, assemble in just drive on the mounting panel first picture peg is closed or is opened the third drive assembly of discharge gate, assemble in second picture peg on the mounting panel, assemble in on the mounting panel and drive the second picture peg is closed or is opened the fourth drive assembly of discharge gate, first picture peg is located the top of second picture peg.

According to one embodiment of the invention, the mounting plate is provided with a mounting hole, the double-inserting plate mechanism further comprises a conveying pipe, one end of the conveying pipe is communicated with the mounting hole, the other end of the conveying pipe is communicated with the discharge hole, the conveying pipe is provided with a first elongated hole and a second elongated hole which are communicated with each other at intervals, the first elongated hole and the second elongated hole extend along the circumferential direction of the conveying pipe, the third driving assembly drives the first inserting plate to be inserted into or extend out of the first elongated hole, and the fourth driving assembly drives the second inserting plate to be inserted into or extend out of the second elongated hole.

According to one embodiment of the invention, the mounting plate is provided with a first shaft hole, and the third drive assembly includes:

the first plug board cylinder is fixed on the mounting plate;

the first bearing is fixed in the first shaft hole of the mounting plate;

the first rotating shaft penetrates through the first bearing, and one end of the first rotating shaft is connected with the driving end of the first plate inserting cylinder;

and one end of the first rotating arm is rotatably connected with the other end of the first rotating shaft, and the other end of the first rotating arm is fixedly connected with the first inserting plate.

According to an embodiment of the present invention, a second shaft hole is formed on the mounting plate, and the fourth driving assembly includes:

the second plug board cylinder is fixed on the mounting plate;

the second bearing is fixed in the second shaft hole of the mounting plate;

the second rotating shaft penetrates through the second bearing, and one end of the second rotating shaft is connected with the driving end of the second plug board cylinder;

and one end of the second rotating arm is rotatably connected with the other end of the second rotating shaft, and the other end of the second rotating arm is fixedly connected with the second inserting plate.

According to one embodiment of the invention, further comprising a dredging assembly for dredging material, the dredging assembly comprising:

the fifth driving assembly is fixed on the outer side wall of the charging barrel body;

and one end of the dredging rod is connected with the driving end of the fifth driving assembly, and the other end of the dredging rod extends into the charging barrel body or extends out of the charging barrel body under the driving of the fifth driving assembly.

According to one embodiment of the invention, the deoccluding assembly further comprises:

the mounting seat is fixed on the outer side wall of the charging barrel body, and the fifth driving assembly is fixed on the outer side wall of the charging barrel body through the mounting seat;

one end of the guide sleeve is fixedly connected with the mounting seat, and the dredging rod is axially movably positioned in the guide sleeve.

According to one embodiment of the invention, the apparatus further comprises a rapping assembly for assisting in the dredging of material, said rapping assembly comprising:

the sixth driving assembly is fixed on the outer side wall of the charging barrel body;

and one end of the knocking rod is connected with the sixth driving assembly, and the other end of the knocking rod is used for knocking the side wall of the charging barrel body.

According to an embodiment of the invention, the bottom of the cartridge body is funnel shaped and/or the top end of the cartridge body is provided with a lifting flange.

According to one embodiment of the invention, a quartz lining layer is arranged on the inner side wall of the charging barrel body, and a buffer layer is arranged between the inner side wall of the charging barrel body and the quartz lining layer.

According to one embodiment of the invention, the cartridge further comprises a first weigher for weighing the material in the cartridge body, the first weigher being provided on the cartridge body.

According to an embodiment of the present invention, the base is slidably connected to the upper plate through a first linear guideway, and the feeding assembly includes:

the vibrator is connected with the upper plate in a sliding mode through a second linear sliding rail, and the second linear sliding rail is arranged in parallel with the first linear sliding rail;

the first end of the material pipe is assembled on the vibrator and connected with the vibrator, the second end of the material pipe extends to one side departing from the vibrator, and the axis of the material pipe is parallel to the second linear sliding rail;

the material groove is communicated with the material pipe, and the material groove is opened upwards and used for receiving materials.

According to one embodiment of the invention, the feed assembly further comprises:

the material pipe fixing frame is assembled on the vibrator, and the material pipe is assembled on the material pipe fixing frame;

the buffer piece is arranged between the material pipe fixing frame and the material pipe.

According to one embodiment of the invention, the port of the first end of the material pipe is provided with a rear blocking plate, and/or the rear blocking plate is a quartz material piece.

The technical scheme of the invention at least has one of the following beneficial effects:

according to the feeding device for the single crystal furnace, the upper plate of the feeding mechanism is in sliding connection with the base, and the feeding assembly of the vibrator feeding mechanism is in sliding connection with the upper plate, so that the feeding mechanism and the vibrator feeding mechanism form an upper feeding structure and a lower feeding structure, the length of the whole machine can be effectively shortened, and the occupied space of the feeding device for the single crystal furnace is reduced. Based on the hold-in range passes through force sensor and is connected with the pay-off subassembly, when the pay-off subassembly meets the hindrance, force sensor can gather the pulling force signal and can pass to the alarm, and alarm can send alarm signal, avoids haring feeding device and single crystal growing furnace.

Drawings

FIG. 1 is a schematic perspective view of a feeding device for a single crystal furnace at an angle according to an embodiment of the present invention;

FIG. 2 is a schematic perspective view of a feeding device for a single crystal furnace at another angle according to an embodiment of the present invention;

FIG. 3 is a schematic sectional view showing the structure of a charging device for a single crystal furnace according to an embodiment of the present invention;

FIG. 4 is a schematic structural view of a feed mechanism and a vibrator feed mechanism in accordance with an embodiment of the present invention;

FIG. 5 is a schematic view of another angle feed mechanism and vibrator feed mechanism in accordance with an embodiment of the present invention;

FIG. 6 is a schematic structural diagram of a base according to an embodiment of the present invention;

FIG. 7 is a front view of a charging device for a single crystal furnace according to an embodiment of the present invention;

FIG. 8 is a schematic diagram of an isolation valve according to an embodiment of the present invention;

FIG. 9 is a schematic perspective view of a charging barrel for a single crystal furnace charger according to an embodiment of the present invention;

FIG. 10 is a schematic cross-sectional view of a charging barrel for a single crystal furnace charger according to an embodiment of the present invention;

FIG. 11 is a schematic structural view of a deoccluding assembly and a knocking assembly of the charging barrel for the single crystal furnace charger according to an embodiment of the present invention;

FIG. 12 is a front view of a dual blade mechanism of a cartridge for a single crystal furnace charger in accordance with one embodiment of the present invention;

FIG. 13 is a reverse side view of the dual blade mechanism of the cartridge for the single crystal furnace charger in accordance with one embodiment of the present invention;

FIG. 14 is a sectional view schematically showing a part of a charging device for a single crystal furnace according to an embodiment of the present invention.

Reference numerals:

a feeder main body 100;

a cartridge body 110; a maintenance window 1101; a viewing window 1102; a first weigher 1103; a chamber 111; an upper cover 112; a reserved opening 1121; a cylinder 113; a guide post 114; a linear bearing 115; an upper cover fixing plate 116; a float flow meter 117; a vacuum gauge 118; a shackle hole 119;

a cartridge 120; a cartridge body 1210; an accommodation chamber 1211; a discharge port 1212; a quartz inner liner 1213; a buffer layer 1214;

a feeding mechanism 130; an electric push rod 131; a connecting plate 132; an upper plate 133; a second linear slide 1331; a stopper 134;

a vibrator feeding mechanism 140; a motor 141; a vibrator 142; left and right connecting plates 1421; a feed pipe 143; a trough 144; a second scale 1441; a material tube fixing frame 145; a rear blocking plate 1451; a spring 146; a timing pulley 147; a synchronous belt 1471; a coupling 1472; a decelerator 1473; a tension sensor 148; a stopper rod 149;

an alarm 150;

a control cabinet 160; a touch screen 161;

an isolation valve 170; an argon control port 171; an evacuation control interface 172; a bellows connection port 173; a cooling tube 174; a holding tank 175; a bellows support mechanism 176; a bellows 177;

a dual board mechanism 180; a mounting plate 181; a first plate cylinder 1821; a first rotation shaft 1822; a first rotating arm 1823; a first interposer 1824; a second plate cylinder 1831; a second bearing 1832; a second rotating shaft 1833; a second rotating arm 1834; a second board 1835; a delivery pipe 184; the hollow cavity 1841; the first elongated hole 1842; a second elongated hole 1843;

a pull through assembly 190; a fifth drive assembly 191; a dredge rod 192; a mount 193; a guide sleeve 194;

a rapper assembly 195; a sixth drive assembly 196;

a base 200; a base plate 210; a height adjusting screw 211; the positioning pins 212; a first linear slide 213; a ground mounting 214.

Detailed Description

First, a charging device for a single crystal furnace according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings.

As shown in fig. 1 and 2, the charging device for a single crystal furnace according to an embodiment of the present invention includes a base 200 and a feeder body 100 assembled to the base 200.

As shown in fig. 1, 3 and 4, the feeder body 100 may include a feed mechanism 130, a vibrator feed mechanism 140 and an alarm 150. Wherein, the feeding mechanism 130 may include an upper plate 133 slidably coupled with the base 200. The vibrator feed mechanism 140 may include: the second driving assembly, the feeding assembly slidably connected to the surface of the upper plate 133 facing away from the base 200, the synchronous pulley 147 connected to the second driving assembly, and the tension sensor 148, wherein the synchronous pulley 147 is provided with a synchronous belt 1471, and the synchronous belt 1471 is connected to the feeding assembly through the tension sensor 148. The alarm 150 is electrically connected to the tension sensor 148, and the alarm 150 sends out an alarm signal in response to the tension signal collected by the tension sensor 148.

According to the feeding device for the single crystal furnace provided by the invention, the upper plate 133 based on the feeding mechanism 130 is in sliding connection with the base 200, and the feeding component of the vibrator feeding mechanism 140 is in sliding connection with the upper plate 133, so that the feeding mechanism 130 and the vibrator feeding mechanism 140 form an upper and lower two-stage feeding structure, the length of the whole machine can be effectively shortened, and the occupied space of the feeding device for the single crystal furnace is reduced. Based on synchronous belt 1471 is connected with the feeding assembly through tension sensor 148, when the feeding assembly is obstructed, tension sensor 148 can transmit the collected tension signal to alarm 150, and alarm 150 can send out an alarm signal, thereby avoiding damaging the feeding device and the single crystal furnace.

For a more detailed understanding of the charging device for a single crystal furnace provided in the present application, the following detailed description is given:

as shown in fig. 1-3, the feeder body 100 may include a cartridge body 110, a cartridge 120, a feed mechanism 130, a vibrator feed mechanism 140, and an alarm 150.

The cartridge body 110 may be assembled on the base 200, the cartridge body 110 and the base 200 may form a sealed chamber 111, the chamber 111 is divided into a charging area and a feeding area, the feeding area is located between the base 200 and the charging area, and the cartridge 120 is disposed in the charging area of the chamber 111 for storing and adding materials. When feeding, the pneumatic controller is driven to open the upper cover, and when feeding is finished, the pneumatic controller is driven to close the upper cover. In one embodiment of the present invention, the bin body 110 can be divided into an upper bin body and a lower bin body, and the upper bin body and the lower bin body are detachably connected, so as to facilitate the replacement and maintenance of each component inside the bin body.

As shown in fig. 3, 4 and 5, the feeding mechanism 130 may further include a first driving assembly fixed on the base 200 and located outside the cartridge body 110, and the first driving assembly is connected with the upper plate 133 and drives the upper plate 133 to slide. Two stoppers 134 may be spaced apart from each other on the upper plate 133. As shown in fig. 4, the first driving assembly may include an electric push rod 131 and a connecting plate 132, wherein one end of the electric push rod 131 is fixedly connected with the base 200, and the other end is fixedly connected with the upper plate 133 through the connecting plate 132. When the material needs to be fed, the electric push rod 131 starts and drives the upper plate 133 to slide on the base 200, for example, the base 200 and the upper plate 133 may be slidably connected through a sliding rail, for example, the base is slidably connected with the upper plate 133 through a first linear sliding rail, or may be slidably connected through other structures, so that the feeding mechanism 130 drives the feeding assembly of the upper plate 133 and the vibrator 142 disposed on the upper plate 133 to move along a specified direction, thereby facilitating the feeding.

As shown in fig. 3, 4 and 5, the vibrator feeding mechanism 140 includes a second driving assembly, a feeding assembly, a synchronous pulley 147 and a tension sensor 148, the second driving assembly may be disposed outside the bin body 110, the feeding assembly is slidably connected to a surface of the upper plate 133 facing away from the base and disposed in a feeding area of the chamber 111, and the feeding assembly is configured to receive the material flowing out of the barrel 120. The feeding assembly can be provided with a limiting rod 149, the limiting rod 149 is positioned between the two limiting members 134, the synchronous pulley 147 is connected with the second driving assembly through a coupler 1472, the synchronous pulley 147 is provided with a synchronous belt 1471, and the tension sensor 148 is connected with the feeding assembly through the synchronous pulley 147 and is used for monitoring whether the feeding assembly and the synchronous belt 1471 are synchronous.

For example, as shown in fig. 1 and 4, the second driving assembly may include a motor 141 and a reducer 1473, and the motor 141 may be connected to the timing pulley 147 through a coupling 1472. When feeding, the motor 141 is started to drive the synchronous pulley 147 to rotate, and the synchronous pulley 147 drives the synchronous belt 1471 and the feeding assembly to slide on the upper plate 133. During the sliding process, the sliding direction of the feeding assembly on the upper plate 133 can be limited by a rail, for example. In the sliding process of the feeding assembly, the stroke of the feeding assembly is limited by the two limiting members 134 arranged on the upper plate 133 and the limiting rod 149 arranged on the feeding assembly, so that the feeding assembly is prevented from moving out of the designated stroke. When the feeding assembly is blocked, the feeding assembly and the synchronous belt 1471 are dislocated, the tension sensor 148 is under certain tension, when the tension exceeds a set tension value, the tension sensor 148 collects tension signals, the alarm 150 directly processes the tension signals and sends alarm signals, and the alarm signals are sent out to give an alarm in time so that an operator can stop feeding operation in time.

In some embodiments, the tension sensor 148 may also send a tension signal to the control cabinet, which automatically turns off the power to the first and second drive assemblies of the feeding mechanism 130, and stops the feeding operation. Or, after the tension sensor 148 directly transmits the tension signal to the control cabinet, the control cabinet processes the tension signal and controls the alarm 150 to send out an alarm signal, and controls the first driving assembly and the second driving assembly to stop the feeding operation.

As shown in fig. 1 and 4, the alarm 150 is installed outside the bin body 110 and electrically connected to the tension sensor 148, when the feeding assembly is out of synchronization with the synchronous belt 1471, the tension sensor collects a tension signal, the alarm 150 gives an alarm to prompt an operator to stop the feeding operation.

According to the feeding device for the single crystal furnace, disclosed by the embodiment of the invention, an alarm can be given in time when the vibrator feeding mechanism 140 is blocked. And an upper feeding structure and a lower feeding structure are adopted, so that the occupied space of the whole machine can be effectively reduced.

According to an embodiment of the present invention, as shown in fig. 4 and 6, the base 200 may include a bottom plate 210, and the bottom plate 210 is slidably connected to the upper plate 133 by a first linear guide 213. The bottom plate 210 can be provided with a height adjusting screw 211 for adjusting the height of the bottom plate 210 and a positioning pin 212 for positioning the bottom plate 210, the height adjusting screw 211 and the positioning pin 212 are arranged on one side of the bottom plate deviating from the feeder main body 100, fine adjustment of the height of the whole feeder main body 100 can be realized through the height adjusting screw 211, and the positioning pin 212 is used for positioning the bottom plate. In addition, the bottom plate 210 may further be provided with a ground fixing seat 214 to ensure the stability of the whole device.

According to an embodiment of the present invention, as shown in fig. 2 and 3, the cartridge body 110 may include a cartridge wall and an upper cover 112, the cartridge wall forms a chamber 111 therein and has an open upper end, and a pneumatic controller is assembled on an outer wall of the cartridge wall, and is connected to the upper cover 112 and controls the upper cover to open or close the opening.

In an embodiment of the present invention, as shown in fig. 2, the pneumatic controller may include a cylinder 113, a guide pillar 114, a linear bearing 115, and an upper cover fixing plate 116, the upper cover fixing plate 116 is fixed on the upper cover 112, the cylinder 113 is fixed on the side wall, a driving end of the cylinder 113 is connected to one end of the guide pillar 114, the linear bearing 115 is fixed on the side wall by a fixing member, and the other end of the guide pillar 114 penetrates through a central hole of the linear bearing 115 and is fixedly connected to the upper cover fixing plate 116. The guide post 114 is driven by the air cylinder 113 to open or close the upper cover 112.

In an embodiment of the present invention, as shown in fig. 2, a reserved opening 1121 may be further disposed on the upper cover 112, so as to facilitate observing the condition inside the bin body 110, and also serve as a window for automatically loading silicon material.

In an embodiment of the present invention, as shown in fig. 3 and 7, an air inlet pipe communicated with the chamber 111 is provided on the bin body 110, a float flowmeter 117 is installed on the air inlet pipe, and the amount and speed of air introduced into the chamber can be realized by controlling the flow rate of the float flowmeter 117, so that the gas environment in the chamber during charging is improved, and the mixing of other gases is avoided. In addition, the bin body 110 is further provided with a hanging ring hole 119, which is convenient for lifting the feeder main body 100.

As shown in fig. 1, the charging device for the single crystal furnace may further include a vacuum gauge 118, and a probe of the vacuum gauge 118 is disposed in the cavity of the bin body 110, so as to facilitate detection of a vacuum degree in the cavity 111.

In addition, in some embodiments, as shown in fig. 1 and 2, the chamber body 110 may further be provided with a maintenance window 1101 and an observation window 1102, which are made of quartz glass, so as to facilitate observation of the inside of the chamber body 110.

As shown in fig. 4 and 5, the feeding assembly may include a vibrator 142, a material pipe 143, and a trough 144, wherein the material pipe 143 may be made of quartz material, the vibrator 142 is slidably connected to the upper plate 133 through a second linear slide rail 1331, the second linear slide rail 1331 is parallel to the first linear slide rail 213, a first end of the material pipe 143 is assembled on the vibrator 142, a second end of the material pipe 143 extends to a side away from the vibrator 142, and an axis of the material pipe 143 is parallel to the second linear slide rail 1331, so that the material pipe 143 can be precisely fed along the second linear slide rail 1331 during feeding. A material flow passage is formed inside the material pipe 143, and the material groove 144 is opened upward to receive the material left by the material barrel 120.

In another embodiment of the present invention, as shown in fig. 4, the feeding assembly may further include a tube holder 145 and a buffer member, the tube holder 145 is assembled on the vibrator 142, the tube 143 is assembled on the tube holder 145, and the buffer member is disposed between the tube holder 145 and the tube 143. Specifically, left and right connection plates 1421 may be installed on both sides of the vibrator 142 to make the vibrator 142 move smoothly, the buffer may be a spring 146, the material pipe 143 is fixed on the material pipe fixing frame 145 by the spring 146, and the spring 146 has a buffering function, so that the material pipe 143 is prevented from being broken due to an excessive stress.

In some embodiments, the feeding assembly may further include a second scale 1441, and the second scale 1441 is used for weighing the material in the material barrel 120 and the material groove 144, so as to achieve the purpose of accurate feeding. As shown in fig. 5, a rear blocking plate 1451 is disposed at a port of the first end of the material pipe 143, and the rear blocking plate 1451 is made of quartz material, so that an operator can observe the material inside the barrel 120 conveniently.

In some embodiments, as shown in fig. 1, 4 and 5, the charging device for the single crystal furnace may further include a control cabinet 160, a touch screen 161 is disposed on the control cabinet 160 for human-computer interaction, and the control cabinet 160 is electrically connected to the first driving assembly, the second driving assembly, the tension sensor 148, the alarm 150 and the two stoppers 134. When the vibrator 142 and the synchronous belt 1471 are out of synchronization, the control cabinet 160 receives the tension signal collected by the tension sensor 148, and the control cabinet 160 processes the tension signal and then controls the alarm 150 to send an alarm signal. Meanwhile, the control cabinet 160 may control the first driving assembly and the second driving assembly to stop operating.

In one embodiment, as shown in fig. 1, the feeding device for the single crystal furnace further comprises an isolation valve 170, and the isolation valve 170 is assembled outside the bin body 110. As shown in fig. 8, the isolation valve 170 is provided with a feed port disposed opposite the feed assembly and an argon gas control port 171, an evacuation control port 172, a bellows connection port 173, a cooling pipe 174, and a collection tank 175 communicating with the feed port and with the feed port. Referring to fig. 3, during charging, the isolation valve 170 may be installed on the single crystal furnace, and the bellows connection port 173 may be connected to the bellows 177 of the chamber body 110, and the charging port may be opened and closed at ordinary times. Wherein the bellows 177 may be supported by the bellows support mechanism 176. The negative pressure in the chamber 111 is achieved by evacuation control port 172 and the purging of the gas in the chamber 111 is achieved by argon control port 171. While removing moisture from the air through the cooling pipe 174 and the collection tank 175.

In an embodiment of the present invention, as shown in fig. 3, the vibrator feeding mechanism is located in the feeding zone, and the charging device for a single crystal furnace may further include a charging barrel 120 disposed in the charging zone. As shown in fig. 9, cartridge 120 includes a cartridge body 1210 and a dual blade mechanism 180 disposed at an outlet end of cartridge body 1210. Dual deck mechanism 180 is used to control the flow of material from within cartridge 120.

According to one embodiment of the present invention, as shown with reference to fig. 13, dual board mechanism 180 may include a mounting plate 181, a delivery tube 184, a first board 1824, a third drive assembly, a second board 1835, and a fourth drive assembly. Referring to fig. 10, the mounting plate 181 is in communication with the outlet 1212, and the first insertion plate 1824, the third driving assembly, the second insertion plate 1835 and the fourth driving assembly are assembled on the mounting plate 181, the third driving assembly drives the first insertion plate 1824 to close or open the outlet 1212, and the fourth driving assembly drives the second insertion plate 1835 to close or open the outlet 1212. When the first and

second insertion plates

1824 and 1835 close the discharging port 1212, the first insertion plate 1824 is located above the second insertion plate 1835. The first insert plate 1824 is controlled to close or open the discharge port 1212 of the cartridge body 1210 by the third driving assembly of the dual insert plate mechanism 180, and the second insert plate 1835 is controlled to close or open the discharge port 1212 of the cartridge body 1210 by the fourth driving assembly, so that silicon material can be cut off by the cooperation of the first insert plate 1824 and the second insert plate 1835, intermittent feeding of the feeder is realized, and the problem of material leakage can be effectively avoided.

In some embodiments, the mounting plate 181 is provided with mounting holes, and as shown in fig. 12 and 13, one end of the delivery tube 184 of the dual-insertion plate mechanism 180 is in communication with the mounting holes of the mounting plate 181, and the other end is in communication with the discharge port 1212 of the cartridge body 1210. Wherein, a hollow cavity 1841 is formed inside the delivery pipe 184, and the hollow cavity 1841 and the mounting hole form a discharge passage. Referring to fig. 9, the discharge passage communicates with the receiving cavity 1211 through the discharge port 1212, and the delivery pipe 184 is provided with a first elongated hole 1842 and a second elongated hole 1843 which penetrate inside and outside at intervals, and the first elongated hole 1842 and the second elongated hole 1843 extend along the circumferential direction of the delivery pipe 184. Third drive assembly drive first plate 1824 may be inserted into or extend from first elongated aperture 1842 and fourth drive assembly drive second plate 1835 may be inserted into or extend from second elongated aperture 1843. The outlet 1212 of the cartridge body 1210 is closed after the first insert plate 1842 and the second insert plate 1835 are inserted into the first elongated aperture 1842 and the second elongated aperture 1843, respectively. The outlet 1212 of the cartridge body 1210 is opened after the first insert plate 1842 and the second insert plate 1835 protrude through the first elongated aperture 1842 and the second elongated aperture 1843, respectively. Specifically, a first end of the first insert plate 1842 may be rotatably coupled to the mounting plate 181, a second end disposed opposite the first elongated aperture 1842, and a second end of the first insert plate 1824 sized to match the cross-sectional area of the hollow cavity. One end of the third driving assembly is fixedly connected to the mounting plate 181, and the other end is used to drive the first inserting plate 1824 to rotate, so that the second end of the first inserting plate 1824 extends into the hollow cavity 1841 from the first elongated hole 1842 or exits the hollow cavity 1841. A first end of the second plate 1835 is rotatably coupled to the mounting plate 181, a second end is disposed opposite the second elongated hole 1843, and a second end of the second plate 1835 is sized to match the cross-sectional area of the hollow cavity 1841. one end of the second driving assembly is fixedly coupled to the mounting plate 181, and the other end is configured to drive the second plate 1835 to rotate such that the second end of the second plate 1835 extends from the second elongated hole 1843 into the hollow cavity 1841 or exits the hollow cavity 1841.

When materials are added, for example, silicon materials are added, the third driving assembly drives the first inserting plate 1824 to exit from the hollow cavity 1841 of the conveying pipe, the fourth driving assembly drives the second inserting plate 1835 to exit from the hollow cavity 1841 of the conveying pipe 184, so that the discharging passage is smooth, and the silicon materials in the charging barrel body 1210 can fall into the hollow cavity 1841 of the conveying pipe 184 from the discharging port 1212 to enter the single crystal furnace. When the charging is stopped, the third driving assembly may drive the first insert plate 1824 to be inserted into the hollow cavity 1841 through the first elongated hole 1842, thereby cutting off the silicon material. Thereafter, the fourth driving assembly may drive the second plug board 1835 to be inserted into the hollow cavity 1841 through the second elongated hole 1843, so as to further cut off the silicon material, thereby allowing the silicon material falling from the gap of the first plug board 1824 to be trapped by the second plug board 1835, and effectively avoiding the problem of material leakage.

As shown in fig. 12 and 13, the third driving assembly may include a first inserter cylinder 1821, a first bearing, a first rotation shaft 1822, and a first rotation arm 1823 according to an embodiment of the present invention. The first plate inserting cylinder 1821 is fixed on the mounting plate 181, the mounting plate 21 may be provided with a first shaft hole, a first bearing is fixed in the first shaft hole of the mounting plate 181, the first rotating shaft 1822 penetrates through the first bearing, one end of the first rotating shaft 1822 is connected with the driving end of the first plate inserting cylinder 1821, one end of the first rotating arm 1823 is rotatably connected with the other end of the first rotating shaft 1822, and the other end of the first rotating arm 1823 is fixedly connected with the first plate inserting cylinder 1824. It can be appreciated that since the first vision cylinder 1821 and the first rotating arm 1823 are coupled to both ends of the first rotating shaft 1822, respectively, the first rotating shaft 1822 passes through a first bearing, which is located in a first shaft hole, such that the first vision cylinder 1821 and the first rotating arm 1823 are located on both sides of the mounting plate 181. The structure is simple, and the charging or stopping of the charging is realized by controlling the extension or retraction of the first inserting plate 1824.

In another embodiment of the present invention, the fourth driving assembly may include a second board cylinder 1831, a second bearing 1832, a second rotating shaft 1833, and a second rotating arm 1834. The second board cylinder 1831 is fixed on the mounting plate 181, the mounting plate 181 may have a second shaft hole, the second bearing 1832 is fixed on the second shaft hole of the mounting plate 181, the second rotating shaft 1833 passes through the second bearing 1832, and one end of the second rotating shaft 1833 is connected to the driving end of the second board cylinder 1831, one end of the second rotating arm 1834 is rotatably connected to the other end of the second rotating shaft 1833, and the other end of the second rotating arm 1834 is fixedly connected to the second board 1835. Similarly, a second board cylinder 1831 and a second rotating arm 1834 are located on both sides of the mounting plate 181. This simple structure, and realized two picture peg structures 180 with the cooperation of third drive assembly, and then can effectual control material leak material.

In the embodiment of the invention, a dredging component 190, a knocking component 195 and the like can be further arranged on the charging barrel and used for dredging the materials when the materials are jammed.

Referring to fig. 9, 10 and 11, the clearing assembly 190 may comprise a fifth drive assembly 191 and a clearing bar 192. The fifth driving assembly 191 can be fixed on the outer side wall of the cartridge body 1210, one end of the dredging rod 192 is connected with the driving end of the fifth driving assembly 191, and the other end of the dredging rod extends into the cartridge body 1210 or extends out of the cartridge body 1210 under the driving of the fifth driving assembly 191 so as to dredge the material at the discharge port 1212. Further, the dredging assembly 190 may further include a mounting seat 193 and a guide sleeve 194, the mounting seat 193 is fixed on the outer side wall of the cartridge body 1210, the fifth driving assembly 191 is fixed on the outer side wall of the cartridge body 1210 through the mounting seat 193, one end of the guide sleeve 194 is fixedly connected with the mounting seat 193, the dredging rod 192 is axially movably located in the guide sleeve 194, and the guide sleeve 194 is used for guiding the movement of the dredging rod 192. When the card material appears, fifth drive assembly 191, for example the cylinder, can drive dredge pole 192 and stretch into feed cylinder body 1210 along uide bushing 194 in, alternate the material near discharge gate 1212 to the effect of mediation material is realized. In some embodiments, the dredging rod 192 may be made of a material such as ceramic or tungsten-cobalt alloy that does not contaminate the silicon material, so as to ensure the purity of the silicon material.

In some embodiments, as shown in fig. 9, the tapping assembly 195 may be mounted on an outer sidewall of the cartridge body 1210, and the tapping assembly 195 may include a sixth driving assembly 196 and a tapping rod (not shown), the sixth driving assembly 196 being fixed to the outer sidewall of the cartridge body 1210, one end of the tapping rod being connected to the sixth driving assembly 196, and the other end being used for tapping the sidewall of the cartridge body 1210. The sidewalls of the cartridge body 1210 are knocked under the drive of the sixth drive assembly 196 to assist material flow by way of vibration. This strike subassembly 195 and mediation material cooperation, the lateral wall through striking feed cylinder body 1210 produces the vibration, loosens the material, and the material of being convenient for flows fast avoids the card material.

According to one embodiment of the invention, the bottom of the cartridge body 1210 is formed in a funnel shape. This structure is favorable to the material to concentrate in the discharge gate department of feed cylinder body 1210 to flow through the discharge gate.

In some embodiments, as shown in fig. 10, the inside wall of the cartridge body 1210 is provided with a quartz lining layer 1213, and a buffer layer 1214 is provided between the inside wall of the cartridge body 1210 and the quartz lining layer 1213. The quartz material is used as the lining, so that metal pollution can be avoided, no residue powder falls off when the quartz is in contact with the silicon material, the cleanliness of the silicon material is ensured, and the service life of the crystal bar is favorably ensured. The material of the buffer layer 1214 may be Polypropylene (PP) material, which gives the buffer layer 1214 a good buffer effect.

As shown in fig. 14, a first weighing device 1103 is disposed on the charging barrel 120, and is used for weighing the material in the charging barrel 120, and double weighing is performed with a second weighing device 1441 of the feeding assembly before and after charging, so as to form closed-loop control of the weight before and after charging, which is convenient for accurately calculating the weight of the silicon material charged into the single crystal furnace.

In the invention, each part contacting with the silicon material is made of quartz as much as possible, and the part which cannot be made of quartz can be made of ceramic, tetrafluoro and other materials which do not pollute the silicon material, so that the silicon material is prevented from being polluted by other materials and the purity is prevented from being influenced.

According to one embodiment of the present invention, referring to fig. 1, the top end of the cartridge body 1210 is provided with a hanging flange to facilitate the lifting of the cartridge, weighing and charging. The function of each component will be described below in connection with the working process of the device during charging.

During charging, the upper lid 112 is opened, silicon material is charged, the upper lid 112 is closed, the evacuation control port 172 is opened to suck the gas inside the chamber 111, the inside of the chamber 111 becomes a negative pressure, and during this period, the argon control port 171 is opened several times to fill nitrogen gas, thereby purging the gas inside. After the purification is completed, when the air pressure in the chamber 111 is consistent with the air pressure in the single crystal furnace, the isolation valve 170 is opened, the electric push rod 131 and the motor 141 are started to drive the feeder main body 100 and the feeding device of the vibrator 142 to advance, so that the material groove 144 is aligned with the discharge hole of the material barrel 120, and the second end of the material pipe 143 enters the single crystal furnace through the isolation valve 170 to feed materials into the single crystal furnace. When the feeding process is performed, the second end of the material pipe 143 encounters a hindrance, such as collision with the inner wall of the single crystal furnace, a draft tube, and the like, at this time, the tension sensor 148 sends a tension signal due to asynchronization of the material pipe 143 and the synchronous belt 1471, and transmits the tension signal to the control cabinet 160, the control cabinet 160 controls the alarm 150 to send an alarm signal according to the tension signal, and the control cabinet 160 controls the motor 141 and the electric push rod 131 to stop feeding. The alarm 150 may sound an alarm whistle or a warning light may flash. After the material groove 144 is aligned with the material cylinder, the double-inserting-plate structure 180 is opened, silicon material enters the material groove 144 from the material cylinder 120, the vibrator 142 is opened to send the silicon material into the furnace, and the feeding amount is controlled by the first weighing device 1103 in the process. After the feeding is completed, the electric push rod 131 and the motor 141 are started reversely to drive the feeder main body 100 and the feeding device of the vibrator 142 to retreat to the initial position, the argon control interface 171 is opened to be flushed, and the feeding is completed.

According to the feeding device for the single crystal furnace, disclosed by the embodiment of the invention, during feeding, the silicon material can be weighed in real time, the weight of the silicon material entering the furnace is calculated, an operator can conveniently judge the liquid level, continuous feeding is conveniently realized through a weighing mode, the time of the material pipe 143 in the furnace is shortened, and the feeding efficiency is improved. Through pulling and pressing the sensor and the alarm, the alarm is given immediately when the material pipe 143 touches the obstacle, the operator is reminded to confirm, and serious consequences such as damage to a thermal field or the material pipe 143 of the feeder or braising caused by jacking to a guide cylinder or a crucible are avoided. Can avoid the pollution to the silicon material. And the device adopts two-stage feed structure from top to bottom, shortens complete machine length, and area is little.

The invention also provides the following technical schemes:

technical scheme 1. a feeding device for single crystal growing furnace, including the base with install the charging means main part on the base, the charging means main part includes:

vibrator feeding mechanism includes: the second driving assembly, sliding connection are in the upper plate is kept away from the pay-off subassembly on the surface of base, with synchronous pulley, force sensor that the second driving assembly is connected and with the alarm that force sensor electricity is connected, wherein, install the hold-in range on the synchronous pulley, the hold-in range passes through force sensor with the pay-off subassembly is connected, the alarm responds to force signal that force sensor gathered sends alarm signal.

Technical solution 2. according to the charging device for the single crystal furnace of technical solution 1, the feeding mechanism further includes: and the first driving assembly is fixed on the base and is connected with the upper plate and drives the upper plate to slide.

Technical solution 3. according to the feeding device for the single crystal furnace of the technical solution 2, the device further includes a control cabinet, a touch screen is disposed on the control cabinet, the control cabinet is electrically connected to the first driving assembly, the second driving assembly, the tension sensor and the alarm, and the control cabinet is configured to: and receiving the tension signal acquired by the tension sensor, and controlling the alarm to send out the alarm signal according to the tension signal.

Technical scheme 4. according to the feeding device for the single crystal furnace of technical scheme 1, two limiting parts are arranged on the upper plate at intervals, a limiting rod is arranged on the feeding assembly, and the limiting rod is positioned between the two limiting parts.

Technical solution 5. according to the charging device for the single crystal furnace of technical solution 1, the base includes:

Technical solution 6 according to the charging device for the single crystal furnace of technical solution 1, the charger main body further includes: the bin body is assembled on the base and comprises a bin wall and an upper cover, a cavity is formed inside the bin wall, the upper end of the bin wall is provided with an opening, a pneumatic controller is assembled on the outer wall of the bin wall and connected with the upper cover to control the upper cover to open or close the opening.

According to the feeding device for the single crystal furnace in the technical scheme 6, an air inlet pipe communicated with the cavity is arranged on the wall of the bin, and a float flowmeter is mounted on the air inlet pipe; and/or the device further comprises a vacuum gauge, and a probe of the vacuum gauge is arranged in the cavity of the bin body.

Technical scheme 8. according to the feeding device for the single crystal furnace of the technical scheme 6, the device further comprises an isolation valve assembled outside the bin body, wherein the isolation valve is provided with a feeding port arranged opposite to the feeding component, and an argon gas control interface, an evacuation control interface, a corrugated pipe connecting port, a cooling pipe and a collecting tank which are communicated with the feeding port.

Technical solution 9. according to the feeding device for the single crystal furnace of technical solution 6, the chamber is divided into a feeding area and a feeding area, the feeding area is located between the base and the feeding area, the vibrator feeding mechanism is located in the feeding area, the device further includes a charging barrel disposed in the feeding area, the charging barrel includes:

Technical scheme 10 according to technical scheme 9 feeding device for single crystal growing furnace, be equipped with the mounting hole on the mounting panel, two picture peg mechanisms still include the conveyer pipe, the one end of conveyer pipe with the mounting hole intercommunication, the other end with the discharge gate intercommunication, the interval is equipped with first elongated hole and the second elongated hole that link up inside and outside the conveyer pipe, first elongated hole with the second elongated hole is followed the circumference of conveyer pipe is extended, the drive of third drive assembly first picture peg can insert first elongated hole or by first elongated hole stretches out, the drive of fourth drive assembly the second picture peg can insert the second elongated hole or by the second elongated hole stretches out.

Technical solution 11. according to the feeding device for the single crystal furnace of technical solution 9, the mounting plate is provided with a first shaft hole, and the third driving assembly includes:

the first plug board cylinder is fixed on the mounting plate;

the first bearing is fixed in the first shaft hole of the mounting plate;

Technical solution 12. according to the feeding device for the single crystal furnace of technical solution 9, a second shaft hole is provided on the mounting plate, and the fourth driving assembly includes:

the second plug board cylinder is fixed on the mounting plate;

the second bearing is fixed in the second shaft hole of the mounting plate;

Technical scheme 13 the charging device for the single crystal furnace of technical scheme 9 further comprises a dredging component for dredging materials, wherein the dredging component comprises:

Technical scheme 14 according to the feeding device for the single crystal furnace of technical scheme 13, the mediation subassembly still includes:

Technical scheme 15, according to technical scheme 9 the feeding device for single crystal growing furnace still includes the subassembly of strikeing that is used for the mediation of supplementary material, the subassembly of strikeing includes:

Technical solution 16. according to the feeding device for the single crystal furnace of the technical solution 9, the bottom of the charging barrel body is formed into a funnel shape, and/or a hanging flange is provided at the top end of the charging barrel body.

Technical scheme 17. according to the feeding device for the single crystal furnace of technical scheme 9, the inside wall of the charging barrel body is provided with a quartz lining layer, and a buffer layer is arranged between the inside wall of the charging barrel body and the quartz lining layer.

Technical scheme 18 the feeding device for the single crystal furnace according to the technical scheme 9, further comprising a first weigher for weighing the material in the cylinder body, wherein the first weigher is arranged on the cylinder body.

Technical solution 19 according to the feeding device for the single crystal furnace of technical solution 1, the bottom plate is slidably connected to the upper plate through a first linear slide rail, and the feeding assembly includes:

the first end of the material pipe is assembled on the vibrator, the second end of the material pipe extends to one side away from the vibrator, and the axis of the material pipe is parallel to the second linear sliding rail;

Technical solution 20. according to the charging device for the single crystal furnace of technical solution 19, the charging assembly further includes:

Technical scheme 21. according to the feeding device for the single crystal furnace of the technical scheme 19, a port at the first end of the material pipe is provided with a rear blocking plate, and/or the rear blocking plate is a quartz material piece.

While the foregoing is directed to the preferred embodiment of the present invention, it will be understood by those skilled in the art that various changes and modifications may be made without departing from the spirit and scope of the invention as defined in the appended claims.

Claims

1. The feeding device for the single crystal furnace is characterized by comprising a base and a feeder main body assembled on the base, wherein the feeder main body comprises:

vibrator feeding mechanism includes: the device comprises a second driving assembly, a feeding assembly, a synchronous belt wheel and a tension sensor, wherein the feeding assembly is connected to the surface, away from the base, of the upper plate in a sliding manner, and the synchronous belt wheel and the tension sensor are connected with the second driving assembly; and

2. The charging device for the single crystal furnace as set forth in claim 1, wherein the feeding mechanism further comprises: the first driving assembly is fixed on the base and connected with the upper plate and drives the upper plate to slide;

preferably, the device further comprises a control cabinet, a touch screen is arranged on the control cabinet, the control cabinet is electrically connected with the first driving assembly, the second driving assembly, the tension sensor and the alarm, and the control cabinet is configured to: and receiving the tension signal acquired by the tension sensor, and controlling the alarm to send out the alarm signal according to the tension signal.

3. The feeding device for the single crystal furnace according to claim 1, wherein two limiting members are arranged on the upper plate at intervals, a limiting rod is arranged on the feeding assembly, and the limiting rod is positioned between the two limiting members;

and/or, the base comprises:

4. The charging device for a single crystal furnace as set forth in claim 1, wherein the charger body further comprises: the bin body is assembled on the base and comprises a bin wall and an upper cover, a cavity is formed in the bin wall, the upper end of the bin wall is provided with an opening, a pneumatic controller is assembled on the outer wall of the bin wall, and the pneumatic controller is connected with the upper cover and controls the upper cover to open or close the opening;

preferably, an air inlet pipe communicated with the cavity is arranged on the bin body, and a float flowmeter is mounted on the air inlet pipe; and/or the device further comprises a vacuum gauge, wherein a probe of the vacuum gauge is arranged in the cavity of the bin body;

preferably, the device further comprises an isolation valve assembled outside the bin body, wherein the isolation valve is provided with a feed inlet arranged opposite to the feeding assembly, and an argon control interface, an evacuation control interface, a corrugated pipe connecting port, a cooling pipe and a collecting tank which are communicated with the feed inlet.

5. The charging device for a single crystal furnace according to claim 4, wherein the chamber is divided into a charging zone and a feeding zone, the feeding zone is located between the base and the charging zone, the vibrator feeding mechanism is located in the feeding zone, the device further comprises a charging barrel provided in the charging zone, the charging barrel comprising:

a dual board mechanism comprising: the device comprises a mounting plate communicated with a discharge hole, a first plug board assembled on the mounting plate, a third driving assembly assembled on the mounting plate and driving the first plug board to close or open the discharge hole, a second plug board assembled on the mounting plate, and a fourth driving assembly assembled on the mounting plate and driving the second plug board to close or open the discharge hole, wherein the first plug board is positioned above the second plug board;

preferably, the mounting plate is provided with a mounting hole, the double-inserting plate mechanism further comprises a conveying pipe, one end of the conveying pipe is communicated with the mounting hole, the other end of the conveying pipe is communicated with the discharge hole, a first elongated hole and a second elongated hole which are communicated with the inside and the outside are arranged on the conveying pipe at intervals, the first elongated hole and the second elongated hole extend along the circumferential direction of the conveying pipe, the third driving assembly drives the first inserting plate to be inserted into the first elongated hole or extend out of the first elongated hole, and the fourth driving assembly drives the second inserting plate to be inserted into the second elongated hole or extend out of the second elongated hole;

preferably, the mounting plate is provided with a first shaft hole, and the third driving assembly includes:

the first plug board cylinder is fixed on the mounting plate;

the first bearing is fixed in the first shaft hole of the mounting plate;

one end of the first rotating arm is rotatably connected with the other end of the first rotating shaft, and the other end of the first rotating arm is fixedly connected with the first inserting plate;

preferably, a second shaft hole is formed in the mounting plate, and the fourth driving assembly includes:

the second plug board cylinder is fixed on the mounting plate;

the second bearing is fixed in the second shaft hole of the mounting plate;

6. The charging device for the single crystal furnace as claimed in claim 5, further comprising a dredging assembly for dredging the material, wherein the dredging assembly comprises:

one end of the dredging rod is connected with the driving end of the fifth driving assembly, and the other end of the dredging rod extends into the charging barrel body or extends out of the charging barrel body under the driving of the fifth driving assembly;

preferably, the pull through assembly further comprises:

7. The charging device for the single crystal furnace as claimed in claim 5, further comprising a knocking assembly for assisting in the dredging of the material, the knocking assembly comprising:

one end of the knocking rod is connected with the sixth driving assembly, and the other end of the knocking rod is used for knocking the side wall of the charging barrel body;

and/or the bottom of the charging barrel body forms a funnel shape, and/or the top end of the charging barrel body is provided with a hoisting flange;

and/or a quartz lining layer is arranged on the inner side wall of the charging barrel body, and a buffer layer is arranged between the inner side wall of the charging barrel body and the quartz lining layer;

and/or the material weighing device further comprises a first weighing device used for weighing the material in the material barrel body, and the first weighing device is arranged on the material barrel body.

8. The charging device for the single crystal furnace as claimed in claim 1, wherein the base is slidably connected to the upper plate via a first linear slide rail, and the feeding assembly comprises:

9. The charging device for the single crystal furnace as set forth in claim 8, wherein the feeding assembly further comprises:

10. The charging device for the single crystal furnace according to claim 8, wherein a port of the first end of the material pipe is provided with a rear blanking plate, and/or the rear blanking plate is a quartz material piece.