CN115142122A - Feeding device of single crystal furnace - Google Patents
Feeding device of single crystal furnace Download PDFInfo
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- CN115142122A CN115142122A CN202211059672.0A CN202211059672A CN115142122A CN 115142122 A CN115142122 A CN 115142122A CN 202211059672 A CN202211059672 A CN 202211059672A CN 115142122 A CN115142122 A CN 115142122A
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- single crystal
- feeding device
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/02—Single-crystal growth by pulling from a melt, e.g. Czochralski method adding crystallising materials or reactants forming it in situ to the melt
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/20—Controlling or regulating
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
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- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
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- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention discloses a feeding device of a single crystal furnace, which comprises a frame; a furnace body; a feeding device; a drive assembly; the single crystal furnace comprises a feeding port; the driving assembly comprises a driving wheel mechanism, a driven wheel mechanism, a tensioning mechanism and a conveyor belt mechanism, the driven wheel mechanism is at least partially arranged on the front side of the driving wheel mechanism, the tensioning mechanism is at least partially arranged between the driving wheel mechanism and the driven wheel mechanism, the conveyor belt mechanism is arranged around the driving wheel mechanism and the driven wheel mechanism, and the tensioning mechanism comprises a first state abutting against the conveyor belt mechanism and a second state separated from the conveyor belt mechanism; when the single crystal furnace feeding device works normally, the tensioning mechanism is in a first state; when the single crystal furnace feeding device works abnormally, the tensioning mechanism is in the second state, so that the single crystal furnace feeding device is stopped. Through the arrangement, the damage of the single crystal furnace caused by the abnormal working state of the driving assembly is avoided, the service life of the single crystal furnace is prolonged, and the economic loss caused to the single crystal furnace is reduced.
Description
Technical Field
The invention relates to the technical field of monocrystalline silicon manufacturing, in particular to a feeding device of a monocrystalline furnace.
Background
The single crystal furnace is a device for melting polycrystalline materials such as polycrystalline silicon and the like by using a graphite heater in an inert gas (mainly nitrogen and helium) environment and growing dislocation-free single crystals by using a Czochralski method. The single crystal furnace is matched with a feeding device for conveying raw materials into the single crystal furnace, and the feeding device is driven by a displacement driving mechanism, so that when feeding is needed, the feeding device is conveyed to the single crystal furnace by the displacement driving mechanism; when the feeding is finished, the feeding device is conveyed to a position far away from the single crystal furnace through the displacement driving mechanism.
In the prior art, the feeding device is not provided with a corresponding function or device for emergency protection, and when the feeding device breaks down, the single crystal furnace cannot work normally, even the single crystal furnace is stopped due to the fact that the single crystal furnace is covered by a boiler, and great economic loss is caused.
In addition, throw the material device and lack to throw material state monitoring protection, can't accurately detect when throwing the material and throw the material state, can't make timely judgement when throwing the material unusual appearing, with the trouble elimination before further worsening, avoid economic loss.
Disclosure of Invention
In order to overcome the defects in the prior art, the invention aims to provide a single crystal furnace feeding device capable of improving emergency protection capability.
In order to realize the purpose, the invention adopts the following technical scheme:
a single crystal furnace feeding device comprises a frame, a feeding device and a feeding device, wherein the frame is used for supporting the single crystal furnace feeding device; the furnace body is at least partially arranged on the rack; the feeding device is arranged on the lower side of the furnace body and is used for receiving the raw materials conveyed by the furnace body; the driving assembly is connected to the feeding device and used for driving the feeding device to perform linear reciprocating motion along a preset direction; the single crystal furnace comprises a feeding port, and the feeding device conveys the raw materials into the single crystal furnace through the feeding port; the driving assembly comprises a driving wheel mechanism, a driven wheel mechanism, a tensioning mechanism and a conveyor belt mechanism, wherein the driven wheel mechanism is at least partially arranged on the front side of the driving wheel mechanism, the tensioning mechanism is at least partially arranged between the driving wheel mechanism and the driven wheel mechanism, the conveyor belt mechanism is arranged around the driving wheel mechanism and the driven wheel mechanism, and the tensioning mechanism comprises a first state abutting against the conveyor belt mechanism and a second state separated from the conveyor belt mechanism; when the single crystal furnace feeding device works normally, the tensioning mechanism is in a first state; when the single crystal furnace feeding device works abnormally, the tensioning mechanism is in the second state, so that the single crystal furnace feeding device is stopped.
The driving assembly further comprises a first driving piece and a second driving piece, the first driving piece comprises a first working state and a second working state, when the first driving piece is in the first working state, the first driving piece is in transmission connection with the driving wheel mechanism, and the second driving piece and the driving wheel mechanism are in a separation state; when the first driving piece is in the second working state, the first driving piece and the driving wheel mechanism are in a separated state, and the second driving piece is connected to the driving wheel mechanism in a transmission mode.
Furthermore, the driving wheel mechanism comprises a first driving wheel and a second driving wheel, the first driving wheel is in transmission connection with the second driving wheel, and when the first driving piece is in a first working state, the first driving piece drives the first driving wheel to drive the second driving wheel to operate; when the first driving part is in the second working state, the second driving part drives the second driving wheel to drive the first driving wheel to operate.
Further, the conveyor belt mechanism comprises a first conveyor belt and a second conveyor belt, the first drive wheel drives the first conveyor belt, and the second drive wheel drives the second conveyor belt; when the first conveyor belt is in an abnormal state, the first driving piece is in a second working state; when the second conveyor belt is in an abnormal state, the first driving piece is in a first working state.
Further, the driving wheel mechanism further comprises a synchronizing shaft, and the first driving wheel and the second driving wheel are in transmission connection through the synchronizing shaft.
Furthermore, the single crystal furnace feeding device further comprises a detection mechanism and a sensing mechanism, the sensing mechanism is arranged on the conveyor belt mechanism, the detection mechanism is arranged close to the driving wheel mechanism, and the detection mechanism is used for detecting the position of the sensing mechanism on the conveyor belt mechanism so as to detect the rotation direction of the conveyor belt mechanism.
Furthermore, the detection mechanism comprises a first detection unit and a second detection unit, the sensing mechanism comprises a first sensing unit and a second sensing unit, the first detection unit and the first sensing unit are used for detecting the first rotating direction of the conveyor belt mechanism, the second detection unit and the second sensing unit are used for detecting the second rotating direction of the conveyor belt mechanism, and the first rotating direction is opposite to the second rotating direction.
Furthermore, the first sensing unit and the second sensing unit are respectively arranged on the upper side and the lower side of the conveyor belt mechanism, and the first detection unit and the second detection unit are respectively arranged on the upper side and the lower side of the conveyor belt mechanism.
Further, the conveyor belt mechanism is provided with a connecting portion, and when the tensioning mechanism is in the first state, the conveyor belt mechanism is connected to the feeding device through the connecting portion.
Further, the single crystal furnace feeding device also comprises a resetting mechanism, and the feeding device moves to a preset position under the condition that the resetting mechanism is triggered.
The tensioning mechanism is arranged, so that the feeding device of the single crystal furnace still keeps the current running track when the single crystal furnace works abnormally, the damage to the feeding device and the driving assembly is reduced, and the economic loss caused by the shutdown of the feeding device of the single crystal furnace is avoided. In addition, through setting up response mechanism and detection mechanism, promoted the accuracy nature that throws the material device operating condition to single crystal growing furnace and detect, reduced single crystal growing furnace and thrown the material device and make the feedback time of shutting down and sending corresponding alarm when being in abnormal work.
Drawings
FIG. 1 is a schematic view of a first view angle of a feeding device of a single crystal furnace according to an embodiment of the present application.
Fig. 2 is a schematic view of a driving assembly according to an embodiment of the present disclosure.
Fig. 3 is an enlarged view of a portion a of fig. 1 in the embodiment of the present application.
FIG. 4 is a sectional view of a charging device of a single crystal furnace according to an embodiment of the present application.
Fig. 5 is a schematic view of the connection position of the detection mechanism and the sensing mechanism in the embodiment of the present application.
FIG. 6 is a schematic view of a second perspective view of a charging apparatus of the single crystal furnace according to the embodiment of the present application.
Detailed Description
In order to make the technical solution of the present invention better understood, the technical solution of the embodiment of the present invention will be clearly and completely described below with reference to the attached drawings in the embodiment of the present invention.
It will be understood that when an element is referred to as being "disposed on" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "left," "right," and the like as used herein are for illustrative purposes only and do not denote a single embodiment.
In the description of the present invention, it is to be understood that the terms "first", "second", and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or to imply that the number of technical features indicated are in fact significant. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the feature.
As shown in FIG. 1, a feeding device 100 of a single crystal furnace comprises a frame 11, a furnace body 12, a feeding device 13 and a driving assembly 14. Specifically, the furnace body 12 is at least partially disposed on the frame 11. The feeding device 13 is arranged at the lower side of the furnace body 12 and is used for receiving the raw materials conveyed by the furnace body 12; the driving component 14 is connected to the feeding device 13 and is used for driving the feeding device 13 to do linear reciprocating motion; a single crystal furnace (not shown in the figure) comprising a feeding port through which the feeding device 13 delivers the raw material into the single crystal furnace. For clearly explaining the technical scheme of the application, the front side, the rear side, the left side, the right side, the upper side and the lower side shown in figure 1 are also defined as the front side, the rear side, the left side, the right side, the upper side and the lower side of the single crystal furnace feeding device 100.
As shown in fig. 2, the driving assembly 14 includes a driving wheel mechanism 141, a driven wheel mechanism 142, a tension mechanism 143, and a belt mechanism 144 as one implementation. Specifically, the driven wheel mechanism 142 is disposed at least partially in front of the driving wheel mechanism 141, the tension mechanism 143 is disposed at least partially between the driving wheel mechanism 141 and the driven wheel mechanism 142, and the belt mechanism 144 is disposed around the driving wheel mechanism 141 and the driven wheel mechanism 142. On a preset straight line 101 extending along the front and back directions of the feeding device 100 of the single crystal furnace, the extending direction of the conveyor belt mechanism 144 is substantially parallel to the direction of the preset straight line 101, so that the driving assembly 14 drives the feeding device 13 to perform linear reciprocating motion along the direction parallel to the preset straight line 101. Further, along the direction of the preset straight line 101, the length from the center of the driving wheel mechanism 141 to the center of the driven wheel mechanism 142 is set to be L1, the initial position of the feeding device 13 is set to be a first position, the working position of the feeding device 13 connected to the single crystal furnace is set to be a second position, and the distance between the first position and the second position is set to be L2, it can be understood that L1 and L2 are substantially the same. As can be understood, the length of L1 is adjusted to increase or decrease the displacement distance of the feeding device 13, so that the feeding device 13 can be adapted to single crystal furnaces with different distances. Further, the tension mechanism 143 includes a first state abutting to the belt mechanism 144 and a second state separated from the belt mechanism 144. When the single crystal furnace feeding device 100 is in normal operation, the tensioning mechanism 143 is in a first state, at this time, the tensioning mechanism 143 abuts against the conveyor belt mechanism 144, so that the conveyor belt mechanism 144 is in a tensioned state, and the driving wheel mechanism 141 can drive the feeding device 13 to displace through the conveyor belt mechanism 144. When the single crystal furnace feeding device 100 works abnormally, the tensioning mechanism 143 is in the second state, at this time, the tensioning mechanism 143 is separated from the conveyor belt mechanism 144, so that the conveyor belt mechanism 144 is in a loose state, the driving wheel mechanism 141 cannot drive the feeding device 13 to move through the conveyor belt mechanism 144, and the single crystal furnace feeding device 100 is stopped and sends a corresponding alarm. The abnormal operation of the single crystal furnace charging device 100 may be as follows: the feeding device 13 is blocked from running in the moving process of the single crystal furnace, namely, an obstacle which blocks the feeding device 13 from moving along the direction of the preset straight line 101 is arranged between the first position and the second position; or there may be a situation during operation of the drive assembly 14 that prevents the drive assembly 14 from operating properly. Through the arrangement, the feeding device 100 of the single crystal furnace is prevented from still keeping the current running track when the single crystal furnace abnormally works, the damage to the feeding device 13 and the driving assembly 14 is reduced, the economic loss caused by the shutdown of the feeding device 100 of the single crystal furnace is avoided, and the service life of the feeding device 100 of the single crystal furnace is further prolonged.
In the present embodiment, the tensioning mechanism 143 is provided as a guide wheel assembly by which the tensioning effect on the conveyor belt mechanism 144 is achieved. It is understood that the tensioning mechanism 143 may be any component that can apply a force to the belt mechanism 144 to achieve the tensioning effect of the belt mechanism 144, i.e., any structural component that can apply a pressure to the belt mechanism 144 to achieve the tensioning effect, which is within the scope of the present application.
As another implementation, tensioning mechanism 143 is provided as a damped tensioner with a spring structure disposed therein. When the feeding device 13 moves along the direction of the preset straight line 101 and towards the single crystal furnace, if the feeding device 13 is subjected to a force opposite to the moving direction, the current resistance of the conveyor belt mechanism 144 is increased. At this time, the spring mechanism provided in the damping tensioner is deformed, and the damping tensioner does not apply pressure to the conveyor belt mechanism 144, so that the conveyor belt mechanism 144 loosens and slips, and the driving force to the charging device 13 is lost. As can be appreciated, the direction in which the conveyor mechanism 144 drives the batch charging device 13 to move closer to the single crystal furnace is set to a first rotational direction, and the direction in which the conveyor mechanism 144 drives the batch charging device 13 to move away from the single crystal furnace is set to a second rotational direction. If the conveyor belt mechanism 144 is in the second rotation direction, the current resistance of the conveyor belt mechanism 144 is reduced, the tensioning mechanism 143 abuts against the conveyor belt mechanism 144, and at this time, the tensioning mechanism 143 is in the first state, so that the conveyor belt mechanism 144 drives the feeding device 13 to return to the first position.
As an implementation mode, the single crystal furnace feeding device 100 further comprises a control module and a timing module, and the control module is set as a motor encoder. When the conveyor belt mechanism 144 is loosened and slipped, the timing module records the traveling time of the feeding device 13 which is started from the first position, and the failure reason is judged and output according to the ratio of the motor encoder to the traveling time. Through the arrangement, the operator can drive the feeding device 13 to return to the first position by identifying the fault reason, so that the economic loss caused by the shutdown of the single crystal furnace feeding device 100 is avoided, and the service life of the single crystal furnace feeding device 100 is prolonged.
As shown in fig. 3, as an implementation manner, a connection portion 1441 is provided on the conveyor belt mechanism 144, and the conveyor belt mechanism 144 is connected to the feeding device 13 through the connection portion 1441, so that the conveyor belt mechanism 144 drives the feeding device 13 to reciprocate along the direction of the preset straight line 101. Specifically, a tooth-like structure is disposed on an end surface of the connecting portion 1441 near the feeding device 13 and on a side of the feeding device 13, so that the transmission belt mechanism is engaged with the feeding device 13 through the connecting portion 1441. When the tensioning mechanism 143 is in the first state, the conveyor belt mechanism 144 is connected to the dosing device 13 by a connection 1441. When the tensioning mechanism 143 is in the second state, the connecting part 1441 is separated from the feeding device 13, so that the feeding device 13 stops moving towards the single crystal furnace, the feeding device 13 is prevented from being damaged, and the economic loss of the feeding device 100 of the single crystal furnace is reduced.
As shown in fig. 4, as an implementation manner, the driving assembly 14 further includes a first driving member 145 and a second driving member 146, the first driving member 145 may be configured as a driving motor, a power source for operating the driving wheel mechanism 141 is provided by the driving motor, and the second driving member 146 and the first driving member 145 are substantially identical in structure. Specifically, the first driving member 145 includes a first operating state and a second operating state, wherein the first operating state is set to be a case where the driving assembly 14 is in normal operation, and the second operating state is set to be a case where at least a portion of the driving assembly 14 near one side of the first driving member 145 is in abnormal operation. Further, when the first driving element 145 is in the first working state, the first driving element 145 is connected to the driving wheel mechanism 141 in a transmission manner, and the second driving element 146 is separated from the driving wheel mechanism 141. The first drive member 145 now serves as the sole source of power for the drive assembly 14. When the first driving member 145 is in the second working state, the first driving member 145 is separated from the driving wheel assembly, and the second driving member 146 is drivingly connected to the driving wheel mechanism 141, so that the second driving member 146 serves as the only power source of the driving assembly 14. Through the above arrangement, the reset function of the feeding device 13 cannot be realized under the condition that the first driving member 145 is prevented from being damaged, that is, the feeding device 13 cannot return to the first position. Therefore, the influence of high temperature on the feeding device 13 caused by the fact that the feeding device 13 is stopped in the single crystal furnace for a long time is avoided, the service life of the feeding device 13 is prolonged, the emergency protection capability of the feeding device 100 of the single crystal furnace is improved, and the economic loss under the fault condition is reduced. Furthermore, the second driving member 146 further comprises a third operating state, wherein the third operating state is configured such that when the first driving member 145 is in the second operating state, at least a portion of the driving assembly 14 near the second driving member 146 is in an abnormal operating state, and at this time, the second driving member 146 is separated from the driving wheel mechanism 141, and the single crystal furnace charging device 100 is stopped and sends a corresponding alarm. Through the arrangement, the emergency protection capability of the single crystal furnace feeding device 100 is improved, and the economic loss under the fault condition is reduced.
As shown in fig. 5 and 6, the driving wheel mechanism 141 includes a first driving wheel 1411 and a second driving wheel 1412, wherein the first driving wheel 1411 is disposed at the right side of the feeding device 13 and adjacent to the first driving member 145, and the second driving wheel 1412 is disposed at the left side of the feeding device 13 and adjacent to the second driving member 146. A synchronizing shaft 147 is arranged between the first driving wheel 1411 and the second driving wheel 1412, that is, the first driving wheel 1411 is in transmission connection with the second driving wheel 1412 through the synchronizing shaft 147, so that when the first driving member 145 drives the first driving wheel 1411 to rotate, the first driving wheel 1411 drives the second driving wheel 1412 to rotate through the synchronizing shaft 147. Specifically, when the first driving member 145 is in the first working state, the first driving wheel 1411 is driven to rotate by the first driving member 145 to drive the second driving wheel 1412 to rotate, and when the first driving member 145 is in the second working state, the second driving wheel 1412 is driven to rotate by the second driving member 146 to drive the first driving wheel 1411 to rotate. It can be understood that, through the above arrangement, under the condition that the first driving member 145 is damaged, the situation that the reset function of the feeding device 13 cannot be realized is avoided, the emergency protection capability of the single crystal furnace feeding device 100 is improved, and the economic loss under the fault condition is reduced.
As an implementation, the conveyor belt mechanism 144 includes a first conveyor belt 1442 and a second conveyor belt 1443, the first conveyor belt 1442 is disposed on the right side of the feeding device 13, and the second conveyor belt 1443 is disposed on the left side of the feeding device 13. The first drive wheel 1411 drives the first conveyor belt 1442 and the second drive wheel 1412 drives the second conveyor belt 1443. It will be appreciated that the first drive wheel 1411 is drivingly connected to the second drive wheel 1412 such that the rotational speed and rotational direction of the first and second belts 1442, 1443 are substantially identical. Specifically, when the first conveyor belt 1442 is in the abnormal state, the first driving member 145 is in the second operation state. When the second conveyor 1443 is in an abnormal state, the first driving member 145 is still in the first operating state. The abnormal state of the first conveyor belt 1442 at least includes: the first conveyor belt 1442 is broken, or the first conveyor belt 1442 is disconnected from the feeding device 13; the abnormal state of the second conveyor belt 1443 includes at least: the second conveyor belt 1443 is broken, or the connection between the second conveyor belt 1443 and the feeding device 13 is broken. Through the arrangement, under the condition that at least part of the driving assembly 14 is damaged, the single crystal furnace feeding device 100 can still keep a normal working state, the influence of the high temperature of the feeding device 13 in the single crystal furnace after the feeding device 13 stops for a long time is avoided on the feeding device 13, the service life of the feeding device 13 is prolonged, the emergency protection capability of the single crystal furnace feeding device 100 is improved, and the economic loss under the fault condition is reduced.
In this embodiment, since the first driving device 145 and the second driving device 146 are respectively disposed on the first driving wheel 1411 and the second driving wheel 1412 for driving the first driving device 145 and the second driving device 146 to keep working normally, the feeding device 100 of the single crystal furnace can still reset the feeding device 13, that is, the feeding device 13 returns to the first position, even if the first driving device 145 or the second driving device 146 is damaged. It can be understood that the present application provides a way of connecting the driving wheels in the driving wheel mechanism 141 in a transmission manner, and respectively arranging a driving member for directly driving the driving wheels at corresponding positions of the driving wheels, so as to avoid that the feeding device 13 cannot realize the reset function in case of at least part of the driving assembly 14 being damaged, and the embodiments completed by the above structure and method are all within the scope of the present application.
As shown in fig. 6, as an implementation manner, the single crystal furnace charging device 100 further includes a detection mechanism 15 and a sensing mechanism 16, the sensing mechanism 16 is disposed on the conveyor mechanism 144, and the conveyor mechanism 144 drives the sensing mechanism 16 to move. The detection mechanism 15 is disposed near the driving wheel mechanism 141, and the detection mechanism 15 and the sensing mechanism 16 cooperate to detect the rotation direction of the conveyor belt mechanism 144 and the position of the sensing mechanism 16 on the conveyor belt mechanism 144, and determine the displacement distance of the feeding device 13 relative to the first position by the position of the sensing mechanism 16 on the conveyor belt mechanism 144. Specifically, the sensing mechanism 16 includes a first sensing unit 161 and a second sensing unit 162, and the detecting mechanism 15 includes a first detecting unit 151 and a second detecting unit 152. The first detecting unit 151 and the first sensing unit 161 cooperate to detect a first rotating direction of the belt mechanism 144, and the second detecting unit 152 and the second sensing unit 162 cooperate to detect a second rotating direction of the belt mechanism 144, wherein the first rotating direction and the second rotating direction are opposite. More specifically, when the conveyor mechanism 144 is in the first rotation direction, the conveyor mechanism 144 drives the charging device 13 to displace in a direction close to the single crystal furnace; when the conveyor mechanism 144 is in the second rotation direction, the conveyor mechanism 144 drives the feeding device 13 to displace in a direction away from the single crystal furnace. Through the arrangement, the accuracy of detecting the movement direction and the movement position of the feeding device 13 is improved, so that the feedback time of stopping and sending corresponding alarms when the single crystal furnace feeding device 100 works abnormally is shortened.
As one implementation, the first sensing unit 161 is disposed on the first conveyor belt 1442, and the second sensing unit 162 is disposed on the second conveyor belt 1443. In order to detect the first and second rotation directions of the conveyor belt mechanism 144 by the first and second sensing units 161 and 162, respectively, the first sensing unit 161 is disposed on the first conveyor belt 1442, and the first sensing unit 161 is disposed on the upper side of the driving wheel mechanism 141; the second sensing unit 162 is disposed on the second conveyor belt 1443, and the second sensing unit 162 is disposed at a lower side of the driving wheel mechanism 141. It can be understood that when the first sensing unit 161 is far away from the first detecting unit 151, the conveyor mechanism 144 is in the first rotation direction, i.e. the conveyor mechanism 144 drives the feeding device 13 to move in the direction close to the single crystal furnace; when the second sensing unit 162 is far away from the second detecting unit 152, the conveyor mechanism 144 is in the second rotation direction, i.e. the conveyor mechanism 144 drives the feeding device 13 to move in the direction far away from the single crystal furnace. Through the arrangement, the lifting detection mechanism 15 captures the accuracy of the motion state of the feeding device 13, and the economic loss under the fault condition is reduced.
As one implementation manner, the feeding device 100 of the single crystal furnace further includes a reset mechanism (not shown in the figure) and a control module, and the reset mechanism is electrically connected to the control module. In the case that the reset mechanism is triggered, the reset mechanism sends a control signal to the control module, and the control module causes the first driving member 145 or the second driving member 146 to drive the conveyor belt mechanism 144 to rotate in the second rotation direction according to the control signal, so that the feeding device 13 moves to the first position, that is, the feeding device 13 moves to the initial position. Through the setting, the convenience of realizing the reset function of the feeding device 13 is improved.
As can be understood, the tensioning mechanism 143 arranged between the driving wheel mechanism 141 and the driven wheel mechanism 142 prevents the single crystal furnace feeding device 100 from keeping the current running track during abnormal operation, reduces the damage to the feeding device 13 and the driving assembly 14, and avoids economic loss caused by the shutdown of the single crystal furnace feeding device 100. In addition, the first driving part 145 and the second driving part 146 are respectively arranged on one side of the first driving wheel 1411 and one side of the second driving wheel 1412, so that the single crystal furnace feeding device 100 can still keep a normal working state under the condition that at least part of the driving assembly 14 is damaged, the emergency protection capability of the single crystal furnace feeding device 100 is improved, and the economic loss under the fault condition is reduced. Furthermore, the sensing mechanism 16 and the detection mechanism 15 which are matched with each other are arranged at different positions, so that the accuracy of detecting the working condition of the single crystal furnace feeding device 100 is improved, and the feedback time of stopping the single crystal furnace feeding device 100 and sending corresponding alarms when the single crystal furnace feeding device 100 works abnormally is shortened.
It will be appreciated that modifications and variations are possible to those skilled in the art in light of the above teachings, and it is intended to cover all such modifications and variations as fall within the scope of the appended claims.
Claims (10)
1. A single crystal growing furnace charging device comprises:
a frame;
the furnace body is at least partially arranged on the rack;
the feeding device is arranged at the lower side of the furnace body and is used for receiving the raw materials conveyed by the furnace body;
the driving assembly is connected to the feeding device and used for driving the feeding device to perform linear reciprocating motion along a preset direction;
the single crystal furnace comprises a feeding port, and the feeding device conveys raw materials into the single crystal furnace through the feeding port;
it is characterized in that the preparation method is characterized in that,
the driving assembly comprises a driving wheel mechanism, a driven wheel mechanism, a tensioning mechanism and a conveyor belt mechanism, wherein the driven wheel mechanism is at least partially arranged on the front side of the driving wheel mechanism, the tensioning mechanism is at least partially arranged between the driving wheel mechanism and the driven wheel mechanism, the conveyor belt mechanism is arranged around the driving wheel mechanism and the driven wheel mechanism, and the tensioning mechanism comprises a first state of abutting against the conveyor belt mechanism and a second state of separating from the conveyor belt mechanism; when the single crystal furnace feeding device works normally, the tensioning mechanism is in the first state; when the single crystal furnace feeding device works abnormally, the tensioning mechanism is in the second state, so that the single crystal furnace feeding device is stopped.
2. The single crystal furnace charging device according to claim 1, wherein the driving assembly further comprises a first driving member and a second driving member, the first driving member comprises a first working state and a second working state, when the first driving member is in the first working state, the first driving member is in transmission connection with the driving wheel mechanism, and the second driving member is in a separation state from the driving wheel mechanism; when the first driving piece is in the second working state, the first driving piece and the driving wheel mechanism are in a separated state, and the second driving piece is in transmission connection with the driving wheel mechanism.
3. The single crystal furnace feeding device of claim 2, wherein the driving wheel mechanism comprises a first driving wheel and a second driving wheel, the first driving wheel and the second driving wheel are in transmission connection, and when the first driving member is in the first working state, the first driving member drives the first driving wheel to drive the second driving wheel to run; when the first driving part is in the second working state, the second driving part drives the second driving wheel to drive the first driving wheel to operate.
4. The single crystal furnace feeding device according to claim 3, wherein the conveyor belt mechanism comprises a first conveyor belt and a second conveyor belt, the first conveyor belt is driven by the first driving wheel, and the second conveyor belt is driven by the second driving wheel; when the first conveyor belt is in an abnormal state, the first driving piece is in the second working state; when the second conveyor belt is in an abnormal state, the first driving piece is in the first working state.
5. The single crystal furnace charging device according to claim 3,
the driving wheel mechanism further comprises a synchronizing shaft, and the first driving wheel and the second driving wheel are in transmission connection through the synchronizing shaft.
6. The single crystal furnace charging device according to claim 1 or 2,
the single crystal furnace feeding device further comprises a detection mechanism and an induction mechanism, the induction mechanism is arranged on the conveyor belt mechanism, the detection mechanism is arranged close to the driving wheel mechanism, and the detection mechanism is used for detecting the position of the induction mechanism on the conveyor belt mechanism so as to detect the rotation direction of the conveyor belt mechanism.
7. The single crystal furnace charging device according to claim 6,
the detection mechanism comprises a first detection unit and a second detection unit, the sensing mechanism comprises a first sensing unit and a second sensing unit, the first detection unit and the first sensing unit are used for detecting the first rotating direction of the conveyor belt mechanism, the second detection unit and the second sensing unit are used for detecting the second rotating direction of the conveyor belt mechanism, and the first rotating direction is opposite to the second rotating direction.
8. The single crystal furnace charging device according to claim 7,
the first sensing unit and the second sensing unit are respectively arranged on the upper side and the lower side of the conveyor belt mechanism, and the first detection unit and the second detection unit are respectively arranged on the upper side and the lower side of the conveyor belt mechanism.
9. The single crystal furnace charging apparatus according to claim 1, 2 or 4,
the conveying belt mechanism is provided with a connecting part, and when the tensioning mechanism is in the first state, the conveying belt mechanism is connected to the feeding device through the connecting part.
10. The charging device of the single crystal furnace according to claim 1 or 2,
the single crystal furnace feeding device further comprises a reset mechanism, and the feeding device moves to an initial position under the condition that the reset mechanism is triggered.
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