CN207210578U - Single crystal growing furnace secondary feeder - Google Patents
Single crystal growing furnace secondary feeder Download PDFInfo
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- CN207210578U CN207210578U CN201721048714.5U CN201721048714U CN207210578U CN 207210578 U CN207210578 U CN 207210578U CN 201721048714 U CN201721048714 U CN 201721048714U CN 207210578 U CN207210578 U CN 207210578U
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- edge
- socket tube
- charging bucket
- quartz socket
- single crystal
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Abstract
An a kind of single crystal growing furnace secondary feeder is the utility model is related to, it includes：Charging bucket；Quartz socket tube, in the charging bucket, the quartz socket tube has the first edge, and first edge is located at the charging bucket bucket wall top；Sheath, between the charging bucket and the quartz socket tube, the sheath has the second edge, and second edge is between the charging bucket and first edge.Sheath is provided between the charging bucket and quartz socket tube of above-mentioned single crystal growing furnace secondary feeder, sheath has the second edge between charging bucket and the first edge, so as to avoid the direct contact of charging bucket and quartz socket tube, it effectively prevent charging bucket and quartz socket tube directly hit, quartz socket tube is hardly damaged, and then avoids the cold stoking accident caused by quartz socket tube damages.
Description
Technical field
Monocrystalline silicon production field is the utility model is related to, more particularly to a kind of single crystal growing furnace secondary feeder.
Background technology
In monocrystalline silicon manufacturing process, carry out continuous charging using secondary feeder and generally carried out.It is secondary to ensure
Feeder it is safe and reliable, most of feeder charging buckets are manufactured using high temperature resistant stainless steel.It so can both meet to feed
Security in journey solves the problem of feeder external component welding again simultaneously.A large amount of uses of stainless steel increase original
The exposure risk of material and metal, quartz socket tube is provided with for this, so as to prevent raw material from directly being contacted with metal in charging bucket.So
And due to quartz and the difference of two kinds of material physicochemical properties of stainless steel, mutually hit the damage for easily causing quartz socket tube.If
Quartz socket tube fragmentation during charging, it will cause stewing stove accident.
Utility model content
Based on this, it is necessary to provide a kind of quartz socket tube non-damageable single crystal growing furnace secondary feeder.
A kind of single crystal growing furnace secondary feeder, including：
Charging bucket；
Quartz socket tube, in the charging bucket, the quartz socket tube has the first edge, and first edge is located at institute
State charging bucket bucket wall top；
Sheath, between the charging bucket and the quartz socket tube, the sheath has the second edge, second side
Along between the charging bucket and first edge.
Sheath is provided between the charging bucket and quartz socket tube of above-mentioned single crystal growing furnace secondary feeder, sheath has positioned at charging
The second edge between bucket and the first edge, so as to avoid the direct contact of charging bucket and quartz socket tube, it effectively prevent and add
Charging basket and quartz socket tube are directly hit, and quartz socket tube is hardly damaged, and then avoid the cold stoking caused by quartz socket tube damages
Accident.
In one of the embodiments, second edge is in annular shape.
In one of the embodiments, the sheath also includes the anti-delinking part being fixedly connected with second edge, described
Anti-delinking part extends downwardly between the charging bucket and the quartz socket tube and along the axial direction of the charging bucket.
In one of the embodiments, the anti-delinking part surround the quartz socket tube one week.
In one of the embodiments, the anti-delinking part and the bottom wall of the charging bucket have interval.
In one of the embodiments, the sheath is polytetrafluoroethylsheath sheath.
In one of the embodiments, second edge and the anti-delinking part are formed in one structure.
In one of the embodiments, the thickness of the anti-delinking part be less than or equal to the charging bucket and the quartz socket tube it
Between gap.
Brief description of the drawings
Fig. 1 is the sectional view of the single crystal growing furnace secondary feeder of the embodiment of the utility model one.
Embodiment
In order that the purpose of this utility model, technical scheme and advantage are more clearly understood, below in conjunction with accompanying drawing and implementation
Example, the utility model is further elaborated.It should be appreciated that specific embodiment described herein is only explaining
The utility model, it is not used to limit the utility model.
It should be noted that when element is referred to as " being arranged at " another element, it can be directly on another element
Or there may also be element placed in the middle.When an element is considered as " connection " another element, it can be directly connected to
To another element or it may be simultaneously present centering elements.Term as used herein " vertical ", " horizontal ", " left side ",
For illustrative purposes only, it is unique embodiment to be not offered as " right side " and similar statement.
Unless otherwise defined, all of technologies and scientific terms used here by the article is led with belonging to technology of the present utility model
The implication that the technical staff in domain is generally understood that is identical.It is simply in term used in the description of the present utility model herein
The purpose of description specific embodiment, it is not intended that in limitation the utility model.Term as used herein " and/or " include
The arbitrary and all combination of one or more related Listed Items.
As shown in figure 1, the single crystal growing furnace secondary feeder 100 that the embodiment of the utility model one provides, including charging bucket
110th, the quartz socket tube 120 in charging bucket 110 and the sheath between charging bucket 110 and quartz socket tube 120 130.
Specifically, charging bucket 110 is in tubbiness.
Quartz socket tube 120 is in tubbiness.Quartz socket tube 120 has the first edge 121, and the first edge 121 is located at charging bucket 110
Bucket wall top.Sheath 130 has the second edge 131, and the second edge 131 is located between the edge 121 of charging bucket 110 and first, kept away
The direct contact of charging bucket 110 and quartz socket tube 120 is exempted from, effectively prevent charging bucket 110 and quartz socket tube 120 is directly hit
Hit, quartz socket tube 120 is hardly damaged, and then avoids the cold stoking accident caused by quartz socket tube 120 damages.
In the present embodiment, the second edge 131 is in annular shape.It should be noted that the second edge 131 is not limited to annular shape,
It can also be several fan annulars etc..
In the present embodiment, sheath 130 also includes the anti-delinking part 133 being fixedly connected with the second edge 131, anti-delinking part 133
Extended downwardly between charging bucket 110 and quartz socket tube 120, and along the axial direction of charging bucket 110, prevent the of sheath 130
Two edges 131 come off because of expanded by heating in use.
In the present embodiment, anti-delinking part 133 surround quartz socket tube 120 1 weeks.It should be noted that it is at the second edge 131
On the premise of annular shape, several regular or irregular windows are offered on anti-delinking part 130.
In the present embodiment, anti-delinking part 133 and the bottom wall of charging bucket 110 have interval.
In the present embodiment, sheath 130 is polytetrafluoroethylsheath sheath, and the second edge 131 and anti-delinking part 133 are formed in one knot
Structure.The toughness of polytetrafluoroethylsheath sheath can buffer quartz socket tube 120 feed when because of tenesmus and caused by downward power, avoid
The mutual shock of quartz sleeve 120 and charging bucket 110.Teflon sleeve intensity is high, is hardly damaged.
In addition, teflon sleeve heat conduction is slow, the speed that charging bucket 110 transmits heat to quartz sleeve 120 is slow down,
Effectively prevent quartz sleeve 120 because high temperature it is soft after with raw material bonding, raw material smooth outflow during so as to ensure that secondary charging, subtract
Lack the phenomenon that got stuck caused by quartz socket tube 120 and raw material bond during secondary charging, improve the effect of secondary charging
Rate.
In the present embodiment, the thickness of anti-delinking part 133 is less than or equal to the gap between charging bucket 110 and quartz socket tube 120.
Sheath is provided between the charging bucket and quartz socket tube of above-mentioned single crystal growing furnace secondary feeder, sheath has positioned at charging
The second edge between bucket and the first edge, so as to avoid the direct contact of charging bucket and quartz socket tube, it effectively prevent and add
Charging basket and quartz socket tube are directly hit, and quartz socket tube is hardly damaged, and then avoid the cold stoking caused by quartz socket tube damages
Accident.
Each technical characteristic of embodiment described above can be combined arbitrarily, to make description succinct, not to above-mentioned reality
Apply all possible combination of each technical characteristic in example to be all described, as long as however, the combination of these technical characteristics is not deposited
In contradiction, the scope that this specification is recorded all is considered to be.
Embodiment described above only expresses several embodiments of the present utility model, and its description is more specific and detailed,
But therefore it can not be interpreted as the limitation to utility model patent scope.It should be pointed out that the common skill for this area
For art personnel, without departing from the concept of the premise utility, various modifications and improvements can be made, these are belonged to
The scope of protection of the utility model.Therefore, the protection domain of the utility model patent should be determined by the appended claims.
Claims (8)
- A kind of 1. single crystal growing furnace secondary feeder, it is characterised in that including：Charging bucket；Quartz socket tube, in the charging bucket, the quartz socket tube has the first edge, and first edge adds positioned at described Charging basket bucket wall top；Sheath, between the charging bucket and the quartz socket tube, the sheath has the second edge, second edge position Between the charging bucket and first edge.
- 2. single crystal growing furnace secondary feeder according to claim 1, it is characterised in that second edge is in annular shape.
- 3. single crystal growing furnace secondary feeder according to claim 1, it is characterised in that the sheath also includes and described the The anti-delinking part that two edges are fixedly connected, the anti-delinking part is between the charging bucket and the quartz socket tube and along the charging The axial direction of bucket extends downwardly.
- 4. single crystal growing furnace secondary feeder according to claim 3, it is characterised in that the anti-delinking part is around the quartz Sleeve pipe one week.
- 5. single crystal growing furnace secondary feeder according to claim 4, it is characterised in that the anti-delinking part and the charging bucket Bottom wall have interval.
- 6. the single crystal growing furnace secondary feeder according to any one of claim 1 to 5, it is characterised in that the sheath is poly- Tetrafluoroethene sheath.
- 7. single crystal growing furnace secondary feeder according to claim 6, it is characterised in that second edge and the anticreep Portion is formed in one structure.
- 8. single crystal growing furnace secondary feeder according to claim 3, it is characterised in that the thickness of the anti-delinking part be less than etc. Gap between the charging bucket and the quartz socket tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721048714.5U CN207210578U (en) | 2017-08-21 | 2017-08-21 | Single crystal growing furnace secondary feeder |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721048714.5U CN207210578U (en) | 2017-08-21 | 2017-08-21 | Single crystal growing furnace secondary feeder |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207210578U true CN207210578U (en) | 2018-04-10 |
Family
ID=61815865
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721048714.5U Active CN207210578U (en) | 2017-08-21 | 2017-08-21 | Single crystal growing furnace secondary feeder |
Country Status (1)
| Country | Link |
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| CN (1) | CN207210578U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115142122A (en) * | 2022-09-01 | 2022-10-04 | 浙江求是半导体设备有限公司 | Feeding device of single crystal furnace |
-
2017
- 2017-08-21 CN CN201721048714.5U patent/CN207210578U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115142122A (en) * | 2022-09-01 | 2022-10-04 | 浙江求是半导体设备有限公司 | Feeding device of single crystal furnace |
| CN115142122B (en) * | 2022-09-01 | 2022-11-22 | 浙江求是半导体设备有限公司 | Feeding device of single crystal furnace |
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