CN216904649U - Two-dimensional motion platform - Google Patents
Two-dimensional motion platform Download PDFInfo
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- CN216904649U CN216904649U CN202220252372.3U CN202220252372U CN216904649U CN 216904649 U CN216904649 U CN 216904649U CN 202220252372 U CN202220252372 U CN 202220252372U CN 216904649 U CN216904649 U CN 216904649U
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Abstract
The utility model relates to the technical field of semiconductor packaging and manufacturing, and provides a two-dimensional motion platform which comprises a base, an X-direction motion platform, a Y-direction motion platform, a working motion platform, an X-direction driving linear motor and a Y-direction driving linear motor. The linear motor stator of the two-dimensional motion platform is arranged on the motion platform base through a flexible device, so that the impact force of the linear motor stator on the motion platform base is reduced, the vibration of the motion platform is reduced, and the operation stability and the positioning precision of the motion platform are improved; the utility model can obviously reduce the impact of the motor stator on the base of the motion platform, reduce the vibration of the motion platform and the base, ensure that the motion platform runs more stably, obviously accelerate the stabilization time when the motion platform stops, shorten the vibration time and improve the positioning precision.
Description
Technical Field
The utility model relates to the technical field of semiconductor package manufacturing, in particular to a motion platform of lead bonding equipment, and specifically relates to a two-dimensional motion platform.
Background
Because the requirements of machining speed and precision in the field of mechanical machining, particularly semiconductor packaging are continuously improved, at present, a high-speed two-dimensional motion platform is generally driven by a high-thrust linear motor and adopts lighter motion parts to realize high-speed high-acceleration motion. But as the speed and acceleration of the motion platform increase to a certain extent, the mechanical vibrations of the motion platform begin to become apparent. Particularly, a two-dimensional linear motion platform used in the field of semiconductor packaging usually needs high acceleration, frequent starting and stopping and reversing and short-stroke reciprocating motion, and at the moment, the motion platform vibrates remarkably, so that the positioning precision of the platform and the time for positioning and entering the platform to be stable are directly influenced.
The analysis is that when the motor applies power to drive the motion platform to move, the motion platform generates reaction force on the stator of the motor. The motor stator of the current two-dimensional motion platform is generally fixed on the motion platform base through rigid connection, the reaction force received by the motor stator can be directly transmitted to the motion platform base, so that the motion platform base vibrates, and the vibration of the motion platform base can be transmitted to the motion platform, so that the motion platform vibrates, and finally the positioning precision and the stable speed of the motion platform are influenced. Particularly, when the speed and the acceleration of the motion platform are continuously improved, the reaction force transmitted to the base of the motion platform by the motor is increased, the vibration is more violent, and the positioning precision of the motion platform is further reduced.
Therefore, the vibration caused by the reaction force of the motor to the base of the motion platform severely restricts the further speed increase of the motion platform, and the problem of platform vibration caused by the reaction force transmitted to the base of the motion platform by the motor needs to be solved when the high-speed high-acceleration motion platform is developed.
SUMMERY OF THE UTILITY MODEL
Aiming at the defects of the prior art, the utility model provides the two-dimensional motion platform, which reduces the vibration caused by the impact of the motor stator on the base, ensures that the base and the whole motion platform are more stable in motion, shortens the vibration time of the motion platform and improves the positioning precision.
The technical scheme adopted by the utility model is as follows:
in a first aspect, in an embodiment provided by the present invention, a two-dimensional motion platform is provided, which includes a base, an X-direction motion platform, a Y-direction motion platform, a working motion platform, an X-direction driving linear motor, and a Y-direction driving linear motor; the X-direction moving platform is mounted on the base through an X-direction guide rail and used for moving linearly along the X direction relative to the base; the Y-direction moving platform is mounted on the base through a Y-direction guide rail and used for linearly moving along the Y direction relative to the base; the working motion platform is arranged on the X-direction motion platform through a motion platform guide rail, the working motion platform is connected with the Y-direction motion platform through a decoupling guide rail, and the working motion platform is used for making linear motion in an XY plane under the drive of the X-direction motion platform and the Y-direction motion platform; the X-direction driving linear motor is used for driving the X-direction moving platform to move; and the Y-direction driving linear motor is used for driving the Y-direction motion platform to move.
As a further scheme of the utility model, the X-direction driving linear motor comprises an X-direction linear motor stator and an X-direction linear motor rotor, and the X-direction linear motor rotor is installed on the X-direction moving platform through an X-direction motor installation clamping jaw.
As a further scheme of the utility model, X-direction driving balancing weights are further installed at two ends of the stator of the X-direction linear motor.
As a further scheme of the utility model, the Y-direction driving linear motor comprises a Y-direction linear motor stator and a Y-direction linear motor rotor, and the Y-direction linear motor rotor is installed on the Y-direction motion platform through a Y-direction motor installation clamping jaw.
In a further aspect of the present invention, the X-direction linear motor stator is mounted on the base through an X-direction motor mounting plate and an X-direction drive rail, and the Y-direction linear motor stator is mounted on the base through a Y-direction motor mounting plate and a Y-direction drive rail.
As a further scheme of the utility model, the two-dimensional motion platform also comprises a pair of first springs arranged between two end faces of the stator of the X-direction linear motor and the base in the X direction; and the pair of first buffers are arranged and installed between the two end faces of the X-direction linear motor stator and the base in the X direction.
As a further aspect of the present invention, the two-dimensional motion platform further includes: the second spring is arranged between the rear end face of the Y-direction linear motor stator and the base and is used for applying forward thrust to the Y-direction linear motor stator; the second buffer is arranged between the rear end face of the Y-direction linear motor stator and the base and is used for applying forward damping force to the Y-direction linear motor stator when the Y-direction linear motor stator moves backwards; the third spring is arranged between the rear end face of the Y-direction linear motor stator and the base and is used for applying backward thrust to the Y-direction linear motor stator; and the third buffer is arranged between the rear end surface of the Y-direction linear motor stator and the base and is used for applying backward damping force to the Y-direction linear motor stator when the Y-direction linear motor stator moves forwards.
In a further aspect of the present invention, the X-direction linear motor stator is mounted on the base through an X-direction flexible rubber vibration damping device, and the Y-direction linear motor stator is mounted on the base through a Y-direction flexible rubber vibration damping device.
As a further scheme of the utility model, the X-direction flexible rubber vibration damper comprises an upper layer steel plate, vibration damping rubber and a bottom layer steel plate, wherein a hole site which is connected with the X-direction driving linear motor in an installing mode is arranged on the upper layer steel plate, a hole site which is connected with a motion platform base in an installing mode is arranged on the bottom layer steel plate, the upper layer steel plate and the bottom layer steel plate are connected with the vibration damping rubber, the steel plates and the rubber bonding surfaces are connected in an embedded tooth form, and holes are formed in the vibration damping rubber along the direction vertical to the cross section.
As a further aspect of the present invention, the two-dimensional motion platform further includes: the X-direction position feedback device comprises an X-direction grating ruler and an X-direction reading head, the X-direction grating ruler is installed on the X-direction moving platform, and the X-direction reading head is installed on the base; and the motion platform position feedback device comprises a motion platform grating ruler and a motion platform reading head, the motion platform grating ruler is arranged on the working motion platform, and the motion platform reading head is arranged on the X-direction motion platform.
Compared with the prior art, the utility model has the beneficial effects that:
compared with the existing laminated two-dimensional motion platform, the two-dimensional motion platform has the advantages that the linear motor stator for driving the motion platform to move is installed on the motion platform base through the flexible device, when the motor stator receives the reaction force of the motion platform, the motor stator does not directly transmit the reaction force to the motion platform base, but flexibly transmits the reaction force to the motion platform base through the flexible device installed between the motor stator and the motion platform base. Due to the adoption of flexible connection, when the motor stator receives the reaction force, on one hand, the energy consumption of the interior of the flexible device and the motor stator can absorb a part of the reaction force, so that the size of the reaction force transmitted to the motion platform base is reduced, and on the other hand, the flexible device can homogenize the sharp change of the reaction force, so that the fluctuation of the size of the reaction force transmitted to the motion platform base is obviously smooth. Therefore, the impact of the motor stator on the motion platform base can be obviously reduced, the vibration of the motion platform and the base is reduced, the motion platform is more stable to operate, the stabilization time is obviously accelerated when the motion platform stops, the vibration time is shortened, and the positioning precision is improved.
These and other aspects of the utility model are apparent from and will be elucidated with reference to the embodiments described hereinafter. It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the utility model, as claimed.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention.
Fig. 1 is a schematic perspective view of a two-dimensional motion platform according to a first preferred embodiment of the present invention;
FIG. 2 is an exploded view of a two-dimensional motion platform according to a first preferred embodiment of the present invention;
FIG. 3 is a top view of a two-dimensional motion platform according to a first preferred embodiment of the present invention;
FIG. 4 is a cross-sectional view of a two-dimensional motion stage along the X-direction in accordance with a first preferred embodiment of the present invention;
FIG. 5 is a cross-sectional view of a two-dimensional motion stage along the Y-direction in accordance with a first preferred embodiment of the present invention;
fig. 6 is a schematic perspective view of a two-dimensional motion platform according to a second preferred embodiment of the present invention;
fig. 7 is an exploded view of a two-dimensional motion platform according to a second preferred embodiment of the present invention;
FIG. 8 is a cross-sectional view of a two-dimensional motion stage along the X-direction in accordance with a second preferred embodiment of the present invention;
FIG. 9 is a cross-sectional view of a two-dimensional motion stage along the Y-direction in accordance with a second preferred embodiment of the present invention;
FIG. 10 is a schematic perspective view of a flexible rubber vibration damper according to a second preferred embodiment of the present invention;
fig. 11 is a transverse cross-sectional view of a flexible rubber vibration damper in accordance with a second preferred embodiment of the present invention.
Description of reference numerals:
10. a base;
20. an X-direction motion platform; 21. an X-direction guide rail; 22. an X-direction position feedback device; 220. an X-direction grating ruler; 221. an X-direction reading head;
30. a Y-direction motion platform; 31. a Y-direction guide rail; 32. a decoupling guide rail; 320. decoupling the guide rail slide rail; 321. Decoupling the guide rail slide block;
40. a working motion platform; 41. a motion platform guide rail; 42. a motion platform position feedback device; 420. a moving platform grating ruler; 421. a motion platform reading head;
50. driving the linear motor in the X direction; 500. an X-direction linear motor stator; 501. an X-direction linear motor rotor; 51. An X-direction driving guide rail; 52. an X-direction motor mounting plate; 53. a clamping jaw is arranged on the X-direction motor; 54. driving a balancing weight in the X direction;
60. a linear motor is driven in the Y direction; 600. a Y-direction linear motor stator; 601. a Y-direction linear motor rotor; 61. A Y-direction drive guide rail; 62. a Y-direction motor mounting plate; 63. a clamping jaw is arranged on the Y-direction motor;
70. a first spring; 71. a first buffer;
80. a second spring; 81. a second buffer;
82. a third spring; 83. a third buffer;
90. an X-direction flexible rubber vibration damper; 91. a Y-direction flexible rubber vibration damper; 900. an upper steel plate; 901. Damping rubber; 902. and a bottom steel plate.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the utility model and are not intended to limit the utility model.
The technical scheme of the utility model is further explained by the specific implementation mode in combination with the attached drawings.
The utility model provides a two-dimensional motion platform which comprises a base 10, an X-direction motion platform 20, a Y-direction motion platform 30, a working motion platform 40, an X-direction driving linear motor 50 and a Y-direction driving linear motor 60, wherein the X-direction driving linear motor 50 and the Y-direction driving linear motor 60 can respectively drive the X-direction motion platform 20 and the Y-direction motion platform 30 to move linearly and finally drive the working motion platform 40 to do two-dimensional linear motion in an XY plane. Particularly, the linear motor stator of the two-dimensional motion platform is arranged on the motion platform base through the flexible device, so that the impact force of the linear motor stator on the motion platform base is reduced, the vibration of the motion platform is reduced, and the operation stability and the positioning precision of the motion platform are improved.
The technical solutions in the exemplary embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the exemplary embodiments of the present invention, and it is apparent that the described exemplary embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Example one
As shown in fig. 1 to 5, in one embodiment provided by the present invention, there is provided a two-dimensional motion platform, including:
a base 10;
an X-direction moving platform 20 which is installed on the base 10 through an X-direction guide rail 21 and can move linearly along the X direction relative to the base 10;
a Y-direction moving platform 30 mounted on the base 10 through a Y-direction guide 31 and capable of moving linearly along the Y-direction with respect to the base 10;
the working motion platform 40 is installed on the X-direction motion platform 20 through a motion platform guide rail 41 and connected with the Y-direction motion platform 30 through a decoupling guide rail 32, and the working motion platform 40 can make linear motion in the XY plane under the driving of the X-direction motion platform 20 and the Y-direction motion platform 30;
the X-direction driving linear motor 50 is used for driving the X-direction motion platform 20 to move; and
the Y-direction driving linear motor 60 is used for driving the Y-direction moving platform 30 to move.
In the embodiment of the present invention, the X-direction driving linear motor 50 includes an X-direction linear motor stator 500 and an X-direction linear motor mover 501. The X-direction linear motor mover 501 is mounted on the X-direction moving platform 20 through the X-direction motor mounting jaw 53, and the X-direction linear motor stator 500 is mounted on the base 10 through the X-direction motor mounting plate 52 and the X-direction driving guide rail 51.
In an embodiment of the present invention, the two-dimensional motion platform further includes:
a pair of first springs 70 arranged in the X direction between the two end surfaces of the X direction linear motor stator 500 and the base 10; and
a pair of first dampers 71 are disposed in the X direction between the base 10 and both end surfaces of the X-direction linear motor stator 500.
When the linear motor mover 501 applies thrust to the X-direction linear motor to drive the X-direction motion platform 20 to move, the X-direction motion platform 20 also generates reaction force to be applied to the X-direction linear motor stator 500 through the X-direction linear motor mover 501, so that the X-direction linear motor stator 500 generates displacement opposite to that of the X-direction motion platform and deviates from the initial position.
At this time, the first spring 70 applies an elastic force to the linear motor stator in a direction opposite to the offset displacement thereof, and the first damper 71 applies a damping force to the linear motor stator in a direction opposite to the moving speed thereof. The first spring 70 and the first buffer 71 work together to keep the X-direction linear motor stator 500 within a certain range of its initial position without generating a large offset, and finally, they tend to be stable.
In the embodiment of the present invention, the X-direction driving weight block 54 is further installed at two ends of the X-direction linear motor stator 500, and the X-direction driving weight block 54 can reduce the offset stroke of the X-direction linear motor stator 500 when the X-direction linear motor stator 500 receives a certain amount of reaction force, which is beneficial to maintaining the position of the X-direction linear motor stator stable.
In the embodiment of the present invention, the Y-direction driving linear motor 60 includes a Y-direction linear motor stator 600 and a Y-direction linear motor mover 601. The Y-direction linear motor mover 601 is mounted on the Y-direction moving platform 30 through the Y-direction motor mounting jaw 63, and the Y-direction linear motor stator 600 is mounted on the base 10 through the Y-direction motor mounting plate 62 and the Y-direction driving guide rail 61.
In an embodiment of the present invention, the two-dimensional motion platform further includes:
the second spring 80 is installed between the rear end surface of the Y-direction linear motor stator 600 and the base, and applies forward thrust to the Y-direction linear motor stator 600;
a second buffer 81, wherein the second buffer 81 is installed between the rear end surface of the Y-direction linear motor stator 600 and the base, and applies a forward damping force to the Y-direction linear motor stator 600 when the Y-direction linear motor stator moves backward;
the third spring 82, the third spring 82 is installed between the rear end face of the Y-direction linear motor stator 600 and the base 10, and applies backward thrust to the Y-direction linear motor stator 600; and
and a third damper 83, wherein the third damper 83 is installed between the rear end surface of the Y-direction linear motor stator 600 and the base 10, and applies a backward damping force to the Y-direction linear motor stator 600 when it moves forward.
When the Y-direction linear motor rotor 601 applies thrust to drive the Y-direction motion platform 30 to move, the Y-direction motion platform 30 also generates reaction force to apply to the Y-direction linear motor stator 600 through the Y-direction linear motor rotor 601, so that the Y-direction linear motor stator 600 generates displacement opposite to that of the Y-direction motion platform, and deviates from the initial position.
At this time, the second spring 80 and the third spring 82 exert an elastic force opposite to the offset displacement of the linear motor stator, and the second damper 81 and the third damper 83 exert a damping force opposite to the movement speed of the linear motor stator. The second and third springs 80 and 82 and the second and third dampers 81 and 83 work together to maintain the Y-direction linear motor stator 600 within a certain range of its initial position without a large deviation and finally, tend to be stable.
In the embodiment of the utility model, the two-dimensional motion platform adopts the Y-direction motor mounting plate 62 with larger mass, which is equivalent to adding a balancing weight to the Y-direction linear motor stator 600, so that the offset stroke of the Y-direction linear motor stator 600 can be reduced when the Y-direction linear motor stator 600 is subjected to a certain amount of reaction force, and the position of the Y-direction linear motor stator is kept stable.
In an embodiment of the present invention, the two-dimensional motion platform further includes:
the X-direction position feedback device 22, the X-direction position feedback device 22 comprises an X-direction grating scale 220 and an X-direction reading head 221, the X-direction grating scale 220 is installed on the X-direction moving platform 20, and the X-direction reading head 221 is installed on the base 10; and
the motion platform position feedback device 42, the motion platform position feedback device 42 includes a motion platform grating scale 420 and a motion platform reading head 421, the motion platform grating scale 420 is installed on the working motion platform 40, and the motion platform reading head 421 is installed on the X-direction motion platform 20. The X-direction position feedback device 22 and the motion platform position feedback device 42 can respectively feed back the positions of the work motion platform in the X direction and the Y direction, and then the control system controls the motion of the X-direction motor and the Y-direction motor, so that the work motion platform 40 can precisely move in a two-dimensional plane.
Example two
As shown in fig. 6 to 11, in one embodiment provided by the present invention, there is provided a two-dimensional motion platform, including:
a base 10;
an X-direction moving platform 20 which is installed on the base 10 through an X-direction guide rail 21 and can move linearly along the X direction relative to the base 10;
a Y-direction moving platform 30 mounted on the base 10 through a Y-direction guide 31 and capable of moving linearly along the Y-direction with respect to the base 10;
the working motion platform 40 is installed on the X-direction motion platform 20 through a motion platform guide rail 41 and connected with the Y-direction motion platform 30 through a decoupling guide rail 32, and the working motion platform 40 can make linear motion in an XY plane under the driving of the X-direction motion platform 20 and the Y-direction motion platform 30;
the X-direction driving linear motor 50 is used for driving the X-direction motion platform 20 to move; and
the Y-direction driving linear motor 60 is used for driving the Y-direction moving platform 30 to move.
In the embodiment of the present invention, the X-direction driving linear motor 50 includes an X-direction linear motor stator 500 and an X-direction linear motor mover 501. An X-direction linear motor rotor 501 is arranged on the X-direction motion platform 20 through an X-direction motor mounting clamping jaw 53, and an X-direction linear motor stator 500 is arranged on the base 10 through an X-direction flexible rubber vibration damper 90.
When the linear motor mover 501 applies thrust to the X-direction motion platform 20 to move, the X-direction motion platform 20 also generates reaction force to be applied to the linear motor stator 500 through the linear motor mover 501. When the X-direction linear motor stator 500 receives the reaction force, it will not be rigidly transferred to the base, and it will cause the X-direction flexible rubber vibration damping device 90 to generate micro-displacement deformation. The X-direction flexible rubber vibration damper 90 absorbs a part of the force applied to the stator 500 of the linear motor by the X-direction deformation, and the rest is transmitted to the base 10.
In the embodiment of the present invention, the force transmitted to the base 10 through the X-direction flexible rubber vibration damper 90 and the X-direction linear motor stator 500 is greatly reduced, and since the transmission of the force is changed from rigid transmission to flexible transmission, the fluctuation of the transmitted force becomes gentle, so that the impact of the X-direction linear motor stator 500 on the base is significantly reduced. Especially, when the motion platform does short-stroke high-acceleration frequent reversing reciprocating motion, the vibration damping effect of the X-direction flexible rubber vibration damping device 90 is more prominent.
In the embodiment of the present invention, the X-direction driving weight 54 is further installed at two ends of the X-direction linear motor stator 500, so that the offset stroke of the X-direction linear motor stator 500 can be reduced when the X-direction linear motor stator receives a certain amount of reaction force, which is beneficial to maintaining the position of the X-direction linear motor stator stable.
In the embodiment of the present invention, the Y-direction driving linear motor 60 includes a Y-direction linear motor stator 600 and a Y-direction linear motor mover 601. The Y-direction linear motor rotor 601 is installed on the Y-direction motion platform 30 through the Y-direction motor installation clamping jaw 63, and the Y-direction linear motor stator 600 is installed on the base 10 through the Y-direction flexible rubber vibration damping device 91.
The vibration reduction principle of the Y-direction flexible rubber vibration reduction device 91 is the same as that of the X-direction flexible rubber vibration reduction device 90. The two-dimensional motion platform also adopts the great Y of quality to motor mounting panel 62, is equivalent to increasing the balancing weight for Y to linear electric motor stator 600, and it can make Y reduce the stroke of its skew when receiving the reaction force of certain size to linear electric motor stator 600, is favorable to its position to remain stable.
In the embodiment of the present invention, the X-direction flexible rubber vibration damping device 90 includes an upper steel plate 900, a vibration damping rubber 901, and a bottom steel plate 902. The upper steel plate 900 is provided with a hole site for mounting and connecting the X-direction driving linear motor 50, and the bottom steel plate 902 is provided with a hole site for mounting the motion platform base 10. The upper layer steel plate 900 and the bottom layer steel plate 902 are connected with the vibration damping rubber through a vulcanization process, and the bonding surfaces of the steel plates and the rubber adopt a mutual embedded tooth shape design, so that bonding is firm and stable. The damping rubber 901 is provided with holes for reducing rubber material in the direction perpendicular to the cross section thereof, so that the shearing flexibility of the damping rubber in the direction along the longer side line thereof is enhanced, but the rigidity in the vertical direction thereof is not greatly reduced. The flexible rubber vibration damper has the characteristics of simple structure, easy manufacture and installation and obvious vibration damping effect.
In the embodiment of the present invention, the two-dimensional motion platform further comprises an X-direction position feedback device 22 and a motion platform position feedback device 42. The X-direction position feedback device 22 includes an X-direction grating scale 220 and an X-direction reading head 221, the X-direction grating scale 220 is installed on the X-direction moving platform 20, and the X-direction reading head 221 is installed on the base 10.
The motion platform position feedback device 42 includes a motion platform grating scale 420 and a motion platform reading head 421, the motion platform grating scale 420 is installed on the working motion platform 40, and the motion platform reading head 421 is installed on the X-direction motion platform 20.
In the embodiment of the present invention, the X-direction position feedback device 22 and the motion platform position feedback device 42 can respectively feed back the positions of the work motion platform in the X direction and the Y direction, and then the control system controls the motion of the X-direction motor and the Y-direction motor, so that the work motion platform 40 precisely moves in a two-dimensional plane.
Compared with the existing laminated two-dimensional motion platform, the two-dimensional motion platform has the advantages that the linear motor stator for driving the motion platform to move is installed on the motion platform base through the flexible device, when the motor stator receives the reaction force of the motion platform, the motor stator does not directly transmit the reaction force to the motion platform base, but flexibly transmits the reaction force to the motion platform base through the flexible device installed between the motor stator and the motion platform base. Due to the adoption of flexible connection, when the motor stator receives the reaction force, on one hand, the energy consumption of the interior of the flexible device and the motor stator can absorb a part of the reaction force, so that the size of the reaction force transmitted to the motion platform base is reduced, and on the other hand, the flexible device can homogenize the sharp change of the reaction force, so that the fluctuation of the size of the reaction force transmitted to the motion platform base is obviously smooth. Therefore, the impact of the motor stator on the motion platform base can be obviously reduced, the vibration of the motion platform and the base is reduced, the motion platform is more stable to operate, the stabilization time is obviously accelerated when the motion platform stops, the vibration time is shortened, and the positioning precision is improved. In the first preferred embodiment of the utility model, the guide rail for installing the motor, the spring and the buffer form a flexible device together, the structure has stronger flexibility, and the vibration reduction effect of the motion platform is obvious. In the second preferred embodiment of the utility model, the flexible device is a flexible damping rubber device consisting of a steel plate and damping rubber, and the structure has the advantages of simple manufacture and installation, lower cost and good damping effect.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the utility model, and any modifications, equivalents and improvements made within the spirit and principle of the present invention are intended to be included within the scope of the present invention.
Claims (10)
1. A two-dimensional motion platform is characterized by comprising a base (10), an X-direction motion platform (20), a Y-direction motion platform (30), a working motion platform (40), an X-direction driving linear motor (50) and a Y-direction driving linear motor (60);
the X-direction moving platform (20) is mounted on the base (10) through an X-direction guide rail (21), and the X-direction moving platform (20) is used for moving linearly along the X direction relative to the base (10);
the Y-direction moving platform (30) is mounted on the base (10) through a Y-direction guide rail (31), and the Y-direction moving platform (30) is used for moving linearly along the Y direction relative to the base (10);
the working motion platform (40) is arranged on the X-direction motion platform (20) through a motion platform guide rail (41), the working motion platform (40) is connected with the Y-direction motion platform (30) through a decoupling guide rail (32), and the working motion platform (40) is driven by the X-direction motion platform (20) and the Y-direction motion platform (30) to do linear motion in an XY plane;
the X-direction driving linear motor (50) is used for driving the X-direction moving platform (20) to move; the Y-direction driving linear motor (60) is used for driving the Y-direction moving platform (30) to move.
2. A two-dimensional motion platform according to claim 1, wherein: the X-direction driving linear motor (50) comprises an X-direction linear motor stator (500) and an X-direction linear motor rotor (501), and the X-direction linear motor rotor (501) is installed on the X-direction motion platform (20) through an X-direction motor installation clamping jaw (53).
3. A two-dimensional motion platform according to claim 2, wherein: and X-direction driving balancing weights (54) are further mounted at two ends of the X-direction linear motor stator (500).
4. A two-dimensional motion platform according to claim 3, wherein: the Y-direction driving linear motor (60) comprises a Y-direction linear motor stator (600) and a Y-direction linear motor rotor (601), and the Y-direction linear motor rotor (601) is installed on the Y-direction motion platform (30) through a Y-direction motor installation clamping jaw (63).
5. A two dimensional motion platform, as defined in claim 4, wherein: the X-direction linear motor stator (500) is installed on the base (10) through an X-direction motor installation plate (52) and an X-direction drive guide rail (51), and the Y-direction linear motor stator (600) is installed on the base (10) through a Y-direction motor installation plate (62) and a Y-direction drive guide rail (61).
6. A two-dimensional motion platform according to claim 5, wherein: the two-dimensional motion platform further comprises:
a pair of first springs (70) arranged between the two end faces of the X-direction linear motor stator (500) and the base (10) in the X direction; and
and a pair of first dampers (71) which are arranged in the X direction and are installed between the two end faces of the X direction linear motor stator (500) and the base (10).
7. A two-dimensional motion platform according to claim 5, wherein: the two-dimensional motion platform further comprises:
the second spring (80) is arranged between the rear end face of the Y-direction linear motor stator (600) and the base and is used for applying forward thrust to the Y-direction linear motor stator (600);
the second buffer (81), the second buffer (81) is installed between the rear end face of the Y-direction linear motor stator (600) and the base, and is used for applying forward damping force to the Y-direction linear motor stator (600) when the Y-direction linear motor stator (600) moves backwards;
the third spring (82), the third spring (82) is installed between the rear end face of the Y-direction linear motor stator (600) and the base (10), and is used for applying backward thrust to the Y-direction linear motor stator (600); and
and the third buffer (83), the third buffer (83) is arranged between the rear end surface of the Y-direction linear motor stator (600) and the base (10) and is used for applying a backward damping force to the Y-direction linear motor stator (600) when the Y-direction linear motor stator (600) moves forwards.
8. A two dimensional motion platform, as defined in claim 4, wherein: the X-direction linear motor stator (500) is installed on the base (10) through the X-direction flexible rubber vibration damper (90), and the Y-direction linear motor stator (600) is installed on the base (10) through the Y-direction flexible rubber vibration damper (91).
9. A two-dimensional motion platform according to claim 8, wherein: the X-direction flexible rubber vibration damper (90) comprises an upper steel plate (900), vibration damping rubber (901) and a bottom steel plate (902), hole sites which are connected with the X-direction driving linear motor (50) in an installing mode are arranged on the upper steel plate (900), hole sites which are installed on a moving platform base (10) are arranged on the bottom steel plate (902), the upper steel plate (900) and the bottom steel plate (902) are connected with the vibration damping rubber, the steel plates and rubber bonding surfaces are connected in an embedded tooth form, and holes are formed in the vibration damping rubber (901) along the vertical direction of the cross section.
10. A two-dimensional motion platform according to claim 1, wherein: the two-dimensional motion platform further comprises:
the X-direction position feedback device (22), the X-direction position feedback device (22) comprises an X-direction grating scale (220) and an X-direction reading head (221), the X-direction grating scale (220) is installed on the X-direction moving platform (20), and the X-direction reading head (221) is installed on the base (10); and
the device comprises a motion platform position feedback device (42), wherein the motion platform position feedback device (42) comprises a motion platform grating ruler (420) and a motion platform reading head (421), the motion platform grating ruler (420) is installed on a working motion platform (40), and the motion platform reading head (421) is installed on an X-direction motion platform (20).
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| CN202220252372.3U CN216904649U (en) | 2022-02-07 | 2022-02-07 | Two-dimensional motion platform |
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| CN202220252372.3U CN216904649U (en) | 2022-02-07 | 2022-02-07 | Two-dimensional motion platform |
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