CN216900246U - Detection device and dust removal equipment - Google Patents
Detection device and dust removal equipment Download PDFInfo
- Publication number
- CN216900246U CN216900246U CN202122854042.XU CN202122854042U CN216900246U CN 216900246 U CN216900246 U CN 216900246U CN 202122854042 U CN202122854042 U CN 202122854042U CN 216900246 U CN216900246 U CN 216900246U
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- jacking
- plate
- vertical driving
- driving piece
- detecting
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- 238000001514 detection method Methods 0.000 title claims abstract description 78
- 239000000428 dust Substances 0.000 title abstract description 7
- 239000000463 material Substances 0.000 claims abstract description 16
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 13
- 238000007689 inspection Methods 0.000 claims description 10
- 230000006698 induction Effects 0.000 claims description 3
- 238000009434 installation Methods 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 230000000007 visual effect Effects 0.000 abstract description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
- 238000001179 sorption measurement Methods 0.000 description 6
- 241000218202 Coptis Species 0.000 description 5
- 235000002991 Coptis groenlandica Nutrition 0.000 description 5
- 230000007246 mechanism Effects 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000007790 scraping Methods 0.000 description 1
- 238000006748 scratching Methods 0.000 description 1
- 230000002393 scratching effect Effects 0.000 description 1
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
The utility model belongs to the technical field of chip detection, and particularly relates to a detection device and dust removal equipment. The detection device comprises a detection assembly, a jacking assembly and a conveying assembly line for conveying the material tray, wherein the conveying assembly line is used for driving the material tray to move along the X-axis direction; the detection assembly comprises a visual camera for detecting a piece to be detected on the feeding plate, the jacking assembly comprises a jacking transverse driving piece, a jacking vertical driving piece and a jacking plate arranged opposite to the feeding plate, the output end of the jacking transverse driving piece is connected with the jacking vertical driving piece, and the jacking transverse driving piece is used for driving the jacking vertical driving piece to move along the X-axis direction; the output end of the jacking vertical driving piece is connected with the jacking plate, and the jacking vertical driving piece is used for driving the jacking plate to move along the Z-axis direction. The detection device has the advantages of simple structure, low manufacturing cost and high detection efficiency.
Description
Technical Field
The utility model belongs to the technical field of chip detection, and particularly relates to a detection device and dust removal equipment.
Background
The chip is widely applied to electronic equipment such as mobile phones, computers and tablet computers, a gold thread on the chip plays a role in wire connection, the gold thread can connect a motor on the surface of the chip with a support, and when current passes through the gold thread and then the chip, the chip can emit light. In the production process of the chip, the gold wire is easy to have the problems of wire collapse, scratching, wire leakage, wire misbonding, wire flying, poor wire arc, falling, residue and the like, so that the chip with unqualified gold wire detection is removed after the gold wire on the chip is detected, and the quality of the chip is ensured. In the prior art, a visual camera is usually adopted to detect a gold wire of a chip, but the existing gold wire detection device has the problems of complex structure, low detection efficiency and the like.
SUMMERY OF THE UTILITY MODEL
The utility model provides a detection device and dust removal equipment, aiming at the technical problem that a gold thread detection device in the prior art is low in detection efficiency.
In view of the above technical problems, an embodiment of the present invention provides a detection apparatus, including a detection assembly, a jacking assembly, and a conveying line for conveying a tray, where the conveying line is used to drive the tray to move along an X-axis direction; the detection assembly comprises a visual camera for detecting a piece to be detected on the feeding plate, the jacking assembly comprises a jacking transverse driving piece, a jacking vertical driving piece and a jacking plate arranged opposite to the feeding plate, the output end of the jacking transverse driving piece is connected with the jacking vertical driving piece, and the jacking transverse driving piece is used for driving the jacking vertical driving piece to move along the X-axis direction; the output end of the jacking vertical driving piece is connected with the jacking plate, and the jacking vertical driving piece is used for driving the jacking plate to move along the Z-axis direction.
Optionally, the detection device further comprises a running water seat, and the conveying line is mounted on the running water seat;
jacking transverse driving spare include first rotation motor, first lead screw and with first lead screw threaded connection's first nut, the output of first rotation motor is connected first lead screw, first lead screw is installed on the running water seat, first nut is connected the vertical driving piece of jacking, just first rotation motor is used for passing through first lead screw with first nut drives the vertical driving piece of jacking removes along X axle direction.
Optionally, the jacking assembly further comprises a first guide rail and a first sliding block connected with the first guide rail in a sliding manner, the first guide rail is installed on the running water seat, the central line of the first guide rail is parallel to the central line of the first screw rod, and the first sliding block is connected with the jacking vertical driving piece.
Optionally, the lifting plate is provided with an adsorption hole for adsorbing the tray.
Optionally, the detection assembly further comprises a detection vertical driving member for driving the vision camera to move along the Z-axis direction, and an output end of the detection vertical driving member is connected to the vision camera.
Optionally, the detection assembly further comprises a mounting bracket and a detection transverse driving piece mounted on the mounting bracket, the output end of the detection transverse driving piece is connected with the detection vertical driving piece, and the detection transverse driving piece is used for driving the detection vertical driving piece to move along the Y-axis direction.
Optionally, the detection assembly further comprises a connecting plate and a mounting plate, and the detection vertical driving member comprises a second rotating motor, a second screw rod and a second nut in threaded connection with the second screw rod; the output end of the detection transverse driving piece is connected with the connecting plate, the second screw rod is rotatably installed on the connecting plate, the second nut is connected with the mounting plate, and the vision camera is installed on the mounting plate.
Optionally, the detection assembly further includes a second guide rail and a second slider slidably connected to the second guide rail, the second guide rail is mounted on the connecting plate, and a center line of the second guide rail is parallel to a center line of the second lead screw; the second slider is connected with the mounting plate.
Optionally, the detection assembly further comprises a sensing piece and a first emitter and a second emitter which are both arranged opposite to the sensing piece; the first emitter and the second emitter are installed on the connecting plate at intervals, and the induction sheet is installed on the installation plate.
The utility model further provides dust removing equipment which comprises the detection device.
According to the utility model, when the conveying assembly line conveys the material tray to the gold wire detection station, the jacking vertical driving piece drives the jacking plate to jack the material tray from the conveying assembly line, so that the vision camera can perform vision detection on the to-be-detected piece in the material tray on the jacking plate, the stability of the vision camera for detecting the to-be-detected piece is ensured, and the detection device is simple in structure and low in manufacturing cost. In addition, install a plurality ofly on the charging tray the piece that awaits measuring, jacking transverse driving spare passes through jacking vertical driving spare can drive the jacking board removes along Y axle direction, thereby vision camera detectable it is a plurality of along Y axle direction distribution on the charging tray the piece that awaits measuring has improved this detection device's detection efficiency.
Drawings
The utility model is further illustrated with reference to the following figures and examples.
Fig. 1 is a schematic structural diagram of a detection apparatus according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of a detecting assembly of the detecting device according to an embodiment of the present invention;
fig. 3 is a schematic partial structural diagram of a detecting assembly of the detecting device according to an embodiment of the present invention;
FIG. 4 is a schematic structural diagram of a conveying line and a jacking assembly of the detection apparatus according to an embodiment of the present invention;
FIG. 5 is a schematic view of a part of the structure of a conveying line and a jacking assembly of the detection apparatus provided in an embodiment of the present invention;
fig. 6 is a schematic structural diagram of a jacking assembly of the detection apparatus according to an embodiment of the present invention;
fig. 7 is a schematic structural diagram of a lifting plate of the detection apparatus according to an embodiment of the present invention;
fig. 8 is a schematic structural diagram of a tray of the detection apparatus according to an embodiment of the present invention.
The reference numerals in the specification are as follows:
1. a detection component; 11. a vision camera; 12. detecting a vertical driving member; 121. a second rotating electric machine; 122. a second lead screw; 123. a second nut; 13. mounting a bracket; 14. detecting a transverse driving member; 15. a connecting plate; 16. mounting a plate; 17. a second guide rail; 18. a second slider; 19. an induction sheet; 101. a first transmitter; 102. a second transmitter; 2. a jacking assembly; 21. jacking the transverse driving piece; 211. a first rotating electric machine; 212. a first lead screw; 213. a first nut; 22. jacking a vertical driving piece; 23. a jacking plate; 231. an adsorption hole; 24. a first guide rail; 25. a first slider; 3. a conveying line; 4. a running water seat; 5. and (7) a material tray.
Detailed Description
In order to make the technical problems, technical solutions and advantageous effects solved by the present invention more clearly apparent, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the utility model and are not intended to limit the utility model.
It is to be understood that the terms "upper", "lower", "left", "right", "front", "rear", "middle", and the like, as used herein, refer to an orientation or positional relationship based on that shown in the drawings, which is for convenience in describing and simplifying the present invention, and do not indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be considered as limiting the present invention.
As shown in fig. 1 and 5, an embodiment of the present invention provides a detection apparatus, including a detection assembly 1, a jacking assembly 2, and a conveying line 3 for conveying a tray 5, where the conveying line 3 is used to drive the tray 5 to move along an X-axis direction; the detection assembly 1 comprises a vision camera 11 for detecting a piece to be detected on the feeding tray 5, the jacking assembly 2 comprises a jacking transverse driving piece 21, a jacking vertical driving piece 22 and a jacking plate 23 arranged opposite to the feeding tray 5, the output end of the jacking transverse driving piece 21 is connected with the jacking vertical driving piece 22, and the jacking transverse driving piece 21 is used for driving the jacking vertical driving piece 22 to move along the X-axis direction; the output end of the jacking vertical driving piece 22 is connected with the jacking plate 23, and the jacking vertical driving piece 22 is used for driving the jacking plate 23 to move along the Z-axis direction. It is understood that the object to be tested includes, but is not limited to, a chip, and the like, and the jacking transverse driving part 21 and the jacking vertical driving part 22 include, but are not limited to, a linear motor, a pneumatic cylinder, a hydraulic cylinder, a lead screw and nut mechanism, and the like. Furthermore, a plurality of mounting grooves for mounting the piece to be tested are arranged on the material tray 5.
Specifically, the vision camera 11 will take a picture of the gold wire of the piece to be tested on the tray 5 and obtain an image to be tested; and comparing the image to be detected with a preset image to obtain whether the gold wire on the part to be detected has the problems of wire collapse, scratch, wire leakage, wrong wire bonding, wire flying, poor wire arc, falling, residue and the like.
In the utility model, when the conveying assembly line 3 conveys the material tray 5 to the gold thread detection station, the jacking vertical driving part 22 drives the jacking plate 23 to jack the material tray 5 from the conveying assembly line 3, so that the vision camera 11 can perform vision detection on the to-be-detected piece in the material tray 5 on the jacking plate 23, the stability of the vision camera 11 in detecting the to-be-detected piece is ensured, and the detection device has simple structure and low manufacturing cost. In addition, install a plurality ofly on the charging tray 5 the piece that awaits measuring, jacking transverse driving spare 21 passes through jacking vertical driving spare 22 can drive jacking board 23 removes along the Y axle direction, thereby vision camera 11 detectable it is a plurality of along Y axle direction distribution on the charging tray 5 the piece that awaits measuring has improved this detection device's detection efficiency.
In an embodiment, as shown in fig. 4 and 5, the detection device further comprises a running water seat 4, and the conveying line 3 is mounted on the running water seat 4; specifically, the conveying assembly line 3 comprises a flow driving piece and a first conveying belt assembly and a second conveying belt assembly which are arranged on a flow seat 4 in parallel and at intervals, the flow driving piece is used for driving the material tray 5 along the X-axis direction through the first conveying belt assembly and the second conveying belt assembly, and the jacking assembly 2 is positioned between the first conveying assembly and the second conveying assembly; be equipped with the holding tank on the flowing water seat 4, jacking subassembly 2 first transmission subassembly and second transmission subassembly all is located in the holding tank, first transmission subassembly with second transmission subassembly is installed respectively on two relative inside walls of holding tank.
As shown in fig. 5 and 6, the jacking lateral driving member 21 includes a first rotating motor 211, a first screw rod 212, and a first nut 213 in threaded connection with the first screw rod 212, an output end of the first rotating motor 211 is connected to the first screw rod 212, the first screw rod 212 is installed on the running water seat 4, the first nut 213 is connected to the jacking vertical driving member, and the first rotating motor 211 is configured to drive the jacking vertical driving member to move along the X-axis direction through the first screw rod 212 and the first nut 213. It is to be understood that the first lead screw 212 and the first nut 213 constitute a lead screw-nut mechanism; the first rotating motor 211 drives the first lead screw 212 to rotate, and the first lead screw 212 drives the lifting plate 23 to move along the X-axis direction through the first slider 25. In the embodiment, the detection device is simple in structure and low in manufacturing cost.
Preferably, the first rotating motor 211 is a servo motor, and the servo motor is convenient for accurately controlling the number of rotation turns of the first lead screw 212, so that the moving distance of the tray 5 along the X-axis direction can be accurately controlled, and the vision camera 11 can detect the to-be-detected pieces at different positions along the X-axis direction.
In an embodiment, as shown in fig. 1, the jacking assembly 2 further includes a first guide rail 24 and a first slider 25 slidably connected to the first guide rail 24, the first guide rail 24 is mounted on the running water base 4, a center line of the first guide rail 24 is parallel to a center line of the first lead screw 212, and the first slider 25 is connected to the jacking vertical driving member 22. It is understood that the first guide rail 24 and the first lead screw 212 are both arranged along the X-axis direction. Specifically, in the process that the jacking transverse driving piece 21 drives the jacking vertical driving piece 22 to move along the X-axis direction, the jacking vertical driving piece 22 moves along the first guide rail 24 through the first sliding block 25, so that the stability of the movement of the jacking plate 23 along the X-axis direction is improved; and, the jacking vertical driving piece 22 is slidably mounted on the first guide rail 24 through the first sliding block 25, so that the bearing capacity of the jacking plate 23 is improved.
In an embodiment, as shown in fig. 8, the lifting plate 23 is provided with an adsorption hole 231 for adsorbing the tray 5. Understandably, according to the actual requirement, a plurality of adsorption holes 231 can be designed on the lifting plate 23, the charging tray 5 is installed on the lifting plate 23 through the adsorption holes 231, so that the stability of the charging tray 5 when the lifting plate 23 moves is improved, and meanwhile, the adsorption holes 231 also avoid the scraping of the lifting plate 23 on the charging tray 5.
In an embodiment, as shown in fig. 2, the inspection assembly 1 further includes an inspection vertical driving unit 12 for driving the vision camera 11 to move along the Z-axis direction, and an output end of the inspection vertical driving unit 12 is connected to the vision camera 11. It will be appreciated that the sensing vertical drive 12 includes, but is not limited to, linear motors, pneumatic cylinders, hydraulic cylinders, and lead screw and nut mechanisms, among others. Specifically, the detection vertical driving part 12 can drive the vision camera 11 to move along the Z-axis direction, so that the vision camera 11 can be controlled to detect the to-be-detected piece for multiple times at different heights, preferably, the detection vertical driving part 12 drives the vision camera 11 to detect the to-be-detected piece for two times at different heights, and thus, the detection precision of the detection device is improved.
In an embodiment, as shown in fig. 2, the detecting assembly 1 further includes a mounting bracket 13 and a detecting transverse driving member 14 mounted on the mounting bracket 13, an output end of the detecting transverse driving member 14 is connected to the detecting vertical driving member 12, and the detecting transverse driving member 14 is configured to drive the detecting vertical driving member 12 to move along the Y-axis direction. It will be appreciated that the mounting bracket 13 spans the conveyor line 3, the sensing transverse drive 14 is mounted above the mounting bracket 13, and the sensing transverse drive 14 includes, but is not limited to, linear motors, pneumatic cylinders, hydraulic cylinders, and screw-nut mechanisms, among others. Specifically, the detecting transverse driving member 14 can drive the vision camera 11 to move along the Y-axis direction, so that the vision camera 11 can detect a plurality of pieces to be detected distributed along the Y-axis direction on the material tray 5, and in combination with the detecting transverse driving member 14, the vision camera 11 can detect a plurality of pieces to be detected (shown in fig. 7) distributed along the X-axis direction and the Y-axis direction on the material tray 5, thereby further improving the detection efficiency of the detecting device.
In an embodiment, as shown in fig. 2 and 3, the detecting assembly 1 further includes a connecting plate 15 and a mounting plate 16, and the detecting vertical driving member 12 includes a second rotating motor 121, a second lead screw 122 and a second nut 123 in threaded connection with the second lead screw 122; the output end of the detection transverse driving piece 14 is connected with the connecting plate 15, the second screw rod 122 is rotatably installed on the connecting plate 15, the second nut 123 is connected with the mounting plate 16, and the vision camera 11 is installed on the mounting plate 16. It is to be understood that the second lead screw 122 and the second nut 123 constitute a lead screw-nut mechanism; specifically, the second rotating motor 121 drives the second screw rod 122 to rotate, and the second screw rod 122 drives the mounting plate 16 to move along the Z-axis direction through the second nut 123, so as to drive the vision camera 11 mounted on the mounting plate 16 to move along the Z-axis direction. In this embodiment, the detection assembly 1 has a simple structure and low manufacturing cost.
In an embodiment, as shown in fig. 3, the detecting assembly 1 further includes a second guide rail 17 and a second slider 18 slidably connected to the second guide rail 17, the second guide rail 17 is mounted on the connecting plate 15, and a center line of the second guide rail 17 is parallel to a center line of the second lead screw 122; the second slider 18 is attached to the mounting plate 16. It can be understood that, in the process that the second screw 122 drives the mounting plate 16 to move along the Z-axis direction through the second nut 123, the mounting plate 16 slides on the second guide rail 17 through the second slider 18, so as to improve the stability that the detection vertical driving part 12 drives the vision camera 11 to move along the Z-axis direction.
In one embodiment, as shown in fig. 2 and 3, the detecting assembly 1 further comprises a sensing sheet 19 and a first emitter 101 and a second emitter 102 both disposed opposite to the sensing sheet 19; the first emitter 101 and the second emitter 102 are mounted on the connection board 15 at intervals, and the sensing piece 19 is mounted on the mounting board 16. It is understood that the first emitter 101 and the second emitter 102 are both groove laser emitters. Specifically, when the vertical detection driving element 12 drives the mounting plate 16 to move along the Z-axis direction until the sensing piece 19 is inserted into the groove of the first emitter 101, the vision camera 11 performs one-time vision detection on the to-be-detected piece on the tray 5; when the vertical driving part 12 drives the vision camera 11 to move along the Z-axis direction until the sensing piece 19 is inserted into the second emitter 102, the vision camera 11 performs a second vision inspection on the piece to be inspected on the tray 5, and then judges whether the piece to be inspected is qualified or not through the effect of the vision inspection on both sides. In this embodiment, the automation degree of the detection device is high.
The utility model further provides dust removing equipment which comprises the detection device.
The above description is only exemplary of the detecting device and is not intended to limit the present invention, and any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. The detection device is characterized by comprising a detection assembly, a jacking assembly and a conveying assembly line for conveying a material tray, wherein the conveying assembly line is used for driving the material tray to move along the X-axis direction; the detection assembly comprises a vision camera for detecting a piece to be detected on the feeding plate, the jacking assembly comprises a jacking transverse driving piece, a jacking vertical driving piece and a jacking plate arranged opposite to the feeding plate, the output end of the jacking transverse driving piece is connected with the jacking vertical driving piece, and the jacking transverse driving piece is used for driving the jacking vertical driving piece to move along the X-axis direction; the output end of the jacking vertical driving piece is connected with the jacking plate, and the jacking vertical driving piece is used for driving the jacking plate to move along the Z-axis direction.
2. The inspection device of claim 1, further comprising a running water base on which the conveyance line is mounted;
jacking transverse driving spare include first rotation motor, first lead screw and with first lead screw threaded connection's first nut, the output of first rotation motor is connected first lead screw, first lead screw is installed on the running water seat, first nut is connected the vertical driving piece of jacking, just first rotation motor is used for passing through first lead screw with first nut drives the vertical driving piece of jacking removes along X axle direction.
3. The detection device of claim 2, wherein the jacking assembly further comprises a first guide rail and a first slider slidably connected with the first guide rail, the first guide rail is mounted on the running water seat, a center line of the first guide rail is parallel to a center line of the first screw rod, and the first slider is connected with the jacking vertical driving member.
4. The detecting device for detecting the rotation of the motor rotor according to the claim 1, wherein the lifting plate is provided with an absorbing hole for absorbing the material tray.
5. The inspection device of claim 1, wherein the inspection assembly further comprises an inspection vertical driving member for driving the vision camera to move along the Z-axis direction, and an output end of the inspection vertical driving member is connected to the vision camera.
6. The detecting device according to claim 5, wherein the detecting assembly further includes a mounting bracket and a detecting transverse driving member mounted on the mounting bracket, an output end of the detecting transverse driving member is connected to the detecting vertical driving member, and the detecting transverse driving member is used for driving the detecting vertical driving member to move along the Y-axis direction.
7. The detection device according to claim 6, wherein the detection assembly further comprises a connecting plate and a mounting plate, and the detection vertical driving member comprises a second rotating motor, a second screw rod and a second nut in threaded connection with the second screw rod; the output end of the detection transverse driving piece is connected with the connecting plate, the second screw rod is rotatably installed on the connecting plate, the second nut is connected with the mounting plate, and the vision camera is installed on the mounting plate.
8. The detecting device according to claim 7, wherein the detecting assembly further comprises a second guide rail and a second slider slidably connected with the second guide rail, the second guide rail is mounted on the connecting plate, and a center line of the second guide rail is parallel to a center line of the second screw rod; the second slider is connected with the mounting plate.
9. The sensing device of claim 8, wherein the sensing assembly further comprises a sensing plate and a first emitter and a second emitter both disposed opposite the sensing plate; the first emitter and the second emitter are installed on the connecting plate at intervals, and the induction sheet is installed on the installation plate.
10. A dust-removing apparatus comprising a detecting device as claimed in any one of claims 1 to 9.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202122854042.XU CN216900246U (en) | 2021-11-19 | 2021-11-19 | Detection device and dust removal equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202122854042.XU CN216900246U (en) | 2021-11-19 | 2021-11-19 | Detection device and dust removal equipment |
Publications (1)
Publication Number | Publication Date |
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CN216900246U true CN216900246U (en) | 2022-07-05 |
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ID=82200446
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN202122854042.XU Expired - Fee Related CN216900246U (en) | 2021-11-19 | 2021-11-19 | Detection device and dust removal equipment |
Country Status (1)
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CN (1) | CN216900246U (en) |
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2021
- 2021-11-19 CN CN202122854042.XU patent/CN216900246U/en not_active Expired - Fee Related
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Granted publication date: 20220705 |