CN216835956U - Material basket adjusting device and silicon wafer collecting system - Google Patents

Material basket adjusting device and silicon wafer collecting system Download PDF

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Publication number
CN216835956U
CN216835956U CN202220157842.8U CN202220157842U CN216835956U CN 216835956 U CN216835956 U CN 216835956U CN 202220157842 U CN202220157842 U CN 202220157842U CN 216835956 U CN216835956 U CN 216835956U
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China
Prior art keywords
basket
material basket
silicon wafer
driving
accommodating
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CN202220157842.8U
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Chinese (zh)
Inventor
卞海峰
李昶
刘世挺
薛冬冬
徐飞
韩杰
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Wuxi Autowell Technology Co Ltd
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Wuxi Autowell Technology Co Ltd
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Abstract

The utility model relates to a material basket adjusting device and silicon chip receive piece system, including elevating system, material basket holding mechanism and material basket jacking translation mechanism, wherein: the material basket accommodating mechanism is connected to a movable part of the lifting mechanism, the material basket accommodating mechanism is used for accommodating a material basket, and the lifting mechanism is used for driving the material basket accommodating mechanism to lift so as to drive the material basket in the material basket accommodating mechanism to lift; the material basket jacking translation mechanism is arranged on the material basket accommodating mechanism and used for jacking the material basket in the material basket accommodating mechanism upwards and driving the material basket to translate. Through being provided with material basket jacking translation mechanism, the utility model provides a material basket adjusting device can drive the material basket translation on the horizontal direction to make each silicon chip in the material basket hold the chamber and realize the automatic butt joint with silicon chip conveying mechanism, finally promoted and received piece efficiency.

Description

Material basket adjusting device and silicon wafer collecting system
Technical Field
The utility model relates to a solar cell production facility, specifically speaking are a material basket adjusting device and silicon chip receive piece system.
Background
In the silicon wafer manufacturing process, silicon wafers are sometimes required to be collected in a basket. A silicon chip holding cavity is only formed in the common material basket for containing the whole silicon chip, and in the process of receiving the silicon chip, the material basket adjusting device only needs to drive the material basket to descend, so that the silicon chips output by the silicon chip conveying mechanism can be inserted into the silicon chip holding cavity one by one.
The material basket is used for containing silicon slices such as half silicon slices, quarter silicon slices and the like, and more than two silicon slice containing cavities are arranged in the material basket side by side. As shown in fig. 1, a material basket 100 for receiving half silicon wafers is shown, and two silicon wafer accommodating cavities, namely a first silicon wafer accommodating cavity 101 and a second silicon wafer accommodating cavity 102, are arranged in the material basket 100 side by side.
The traditional material basket adjusting device cannot adjust the horizontal position of the material basket, so that the silicon wafer conveying mechanism cannot continuously and automatically receive silicon wafer fragments into each silicon wafer containing cavity of the silicon wafer material basket.
SUMMERY OF THE UTILITY MODEL
In order to solve the technical problem, the utility model discloses the first aspect provides a basket adjusting device, its concrete technical scheme as follows:
the utility model provides a basket adjusting device, includes elevating system, basket holding mechanism and basket jacking translation mechanism, wherein:
the material basket accommodating mechanism is connected to a movable part of the lifting mechanism, the material basket accommodating mechanism is used for accommodating a material basket, and the lifting mechanism is used for driving the material basket accommodating mechanism to lift so as to drive the material basket in the material basket accommodating mechanism to lift;
the material basket jacking translation mechanism is arranged on the material basket accommodating mechanism and used for jacking the material basket positioned in the material basket accommodating mechanism upwards and driving the material basket to translate.
Through setting up material basket jacking translation mechanism, the utility model provides a material basket adjusting device can drive the material basket translation on the horizontal direction to make each silicon chip in the material basket hold the chamber and realize the automatic butt joint with silicon chip conveying mechanism, finally promoted the receipts piece efficiency to the silicon chip.
In some embodiments, the basket receiving mechanism includes a base, a top plate, and a biasing assembly, wherein: the top plate is connected to the base through a support rod and is positioned above the base, and a basket accommodating cavity for accommodating a basket is formed between the top plate and the base; the pressing component is arranged on one surface of the top plate, which is opposite to the base, and is used for pressing the material basket downwards.
Through the cooperation of base, roof and pressure subassembly, material basket holding mechanism has realized the holding and the pressure to the material basket, prevents the landing of material basket.
In some embodiments, the pressing assembly comprises a guide shaft and a first pressing plate, wherein: the guide shaft penetrates through the top plate along the vertical direction and can move up and down relative to the top plate, the first pressing plate is fixedly connected to the lower end of the guide shaft, and the bottom of the first pressing plate is provided with a ball; or, the pressing component comprises a cylinder and a second pressing plate, wherein: the cylinder sets up on the roof, and the second clamp plate is connected on the piston rod of cylinder, and the cylinder drive second clamp plate reciprocates.
Two simple structure's pressure subassembly is provided, and it can realize pressing to the basket.
In some embodiments, the biasing assembly further comprises a platen stop fixedly attached to the top plate.
Through setting up the locating part, realized spacing to the clamp plate.
In some embodiments, the base is provided with a basket conveying mechanism, the basket conveying mechanism comprises two conveying belts arranged in parallel and a driving member, and the driving member drives the two conveying belts to rotate synchronously, so that baskets borne on the conveying belts are conveyed into and out of the basket accommodating cavity.
Through set up material basket conveying mechanism on the base, realized sending into and seeing off the automation of material basket.
In some embodiments, the basket jacking translation mechanism comprises a translation driving mechanism, a sliding mounting plate, a jacking driving mechanism and a supporting plate, wherein: the translation driving mechanism is arranged on the base, the sliding mounting plate is connected to the base in a sliding mode and is connected with the driving end of the translation driving mechanism, the jacking driving mechanism is arranged on the sliding mounting plate, and the supporting plate is connected to the driving end of the jacking driving mechanism; the jacking driving mechanism is used for driving the supporting plate to jack upwards to bear on the conveying belt and is positioned on the material basket in the material basket accommodating cavity, and the translation driving mechanism is used for driving the sliding mounting plate to translate so as to drive the material basket to translate.
The utility model provides a simple structure's material basket jacking translation mechanism, it has implemented jacking and translation drive to the material basket through the cooperation of translation actuating mechanism, sliding mounting board, jacking actuating mechanism and backup pad.
In some embodiments, the translational drive mechanism includes a drive pulley, a driven pulley, and a timing belt, wherein: the driving belt wheel and the driven belt wheel are arranged on the base, the synchronous belt is sleeved on the driving belt wheel and the driven belt wheel, and the sliding mounting plate is fixedly connected with one side belt body of the driven belt wheel.
The translation driving mechanism is simple in structure, and translation driving of the sliding mounting plate is implemented through the synchronous belt, so that the material basket is driven to translate finally.
In some embodiments, the basket adjusting device further includes a basket rotating mechanism for driving the support plate to rotate so as to rotate the basket supported on the support plate.
Through setting up basket rotary mechanism, realized the rotatory steering to the basket.
The utility model discloses the second aspect provides a piece system is received to silicon chip for in receiving piece to material basket with the silicon chip, be provided with two at least silicon chips side by side in the material basket and hold the chamber, this silicon chip receive the piece system include as aforementioned arbitrary any material basket adjusting device and silicon chip conveying mechanism, wherein:
the material basket adjusting device is used for accommodating the material basket and driving the material basket to translate in a first horizontal direction, so that each silicon wafer accommodating cavity in the material basket is sequentially butted with the discharge end of the silicon wafer conveying mechanism;
the silicon wafer conveying mechanism conveys the silicon wafers along a second horizontal direction perpendicular to the first horizontal direction so as to insert the silicon wafers into the silicon wafer containing cavity butted with the discharge end of the silicon wafer conveying mechanism, and after each silicon wafer is inserted into the silicon wafer containing cavity by the silicon wafer conveying mechanism, the material basket adjusting device drives the material basket to ascend by a preset distance, wherein the preset distance is equal to the thickness of one silicon wafer.
Through the cooperation of material basket adjusting device and silicon chip conveying mechanism, the utility model provides a piece system is received to silicon chip can be in succession, automatically receive the silicon chip and hold the intracavity to each silicon chip of material basket to promoted the receipts piece efficiency to the silicon chip by a wide margin.
In some embodiments, after each silicon wafer accommodating cavity in the material basket is full of silicon wafers, the material basket is driven to rotate by the material basket rotating mechanism so that the material basket is connected with the subsequent station.
The material basket is driven to rotate and turn, so that the connection between the material basket and a subsequent station is realized.
Drawings
FIG. 1 is a schematic structural view of a material basket with two silicon wafer accommodating cavities;
fig. 2 is a schematic structural view of a basket adjusting device according to an embodiment of the present invention at a first viewing angle;
fig. 3 is a schematic partial structural view of a basket adjusting device according to an embodiment of the present invention at a first viewing angle;
fig. 4 is a schematic structural diagram of a basket adjusting device according to an embodiment of the present invention at a second viewing angle;
fig. 5 is a schematic structural view of a pressing component in the basket adjusting device according to the embodiment of the present invention;
fig. 1 to 5 include:
the lifting mechanism 10:
basket receiving mechanism 20: the device comprises a base 21, a top plate 22, a pressing component 23, a support rod 24, a channel 211, a guide shaft 231, a first pressing plate 232, a ball 233 and a pressing plate limiting piece 234;
basket jacking translation mechanism 30: the translation driving mechanism 31, the sliding mounting plate 32, the jacking driving mechanism 33, the support plate 34, the driving pulley 311, the driven pulley 312 and the synchronous belt 313;
a basket rotating mechanism 40;
the silicon wafer loading device comprises a material basket 100, a first silicon wafer containing cavity 101 and a second silicon wafer containing cavity 102.
Detailed Description
In order to make the above objects, features and advantages of the present invention more comprehensible, the present invention is described in detail with reference to the accompanying drawings and the detailed description.
The traditional material basket adjusting device cannot adjust the horizontal position of the material basket, so that the silicon wafer conveying mechanism cannot continuously and automatically receive silicon wafer fragments into each silicon wafer containing cavity of the silicon wafer material basket.
In view of the above, the invention provides a material basket adjusting device, which can drive a material basket to horizontally translate, so that silicon wafer accommodating cavities in the material basket are automatically butted with a silicon wafer conveying mechanism one by one, and finally, the silicon wafer collecting efficiency is improved.
As shown in fig. 2 to 4, the basket adjusting device provided in the embodiment of the present invention includes a lifting mechanism 10, a basket accommodating mechanism 20, and a basket lifting and translating mechanism 30, wherein:
the basket accommodating mechanism 20 is connected to a movable part of the lifting mechanism 10, the basket accommodating mechanism 20 is used for accommodating the basket 100, and the lifting mechanism 10 is used for driving the basket accommodating mechanism 20 to lift so as to drive the basket 100 in the basket accommodating mechanism 20 to lift.
The material basket jacking translation mechanism 30 is arranged on the material basket accommodating mechanism 20, and the material basket jacking translation mechanism 30 is used for jacking the material basket 100 positioned in the material basket accommodating mechanism upwards and driving the material basket 100 to translate.
Taking the material basket 100 with two material basket accommodating cavities mentioned in the background art as an example, the adjustment process of the material basket 100 by the material basket adjusting device in the embodiment of the invention is as follows:
first, the lifting mechanism 10 drives the basket receiving mechanism 20 to a predetermined position, where the bottom of the basket receiving mechanism 20 is flush with the conveying plane of the basket feeding conveyor mechanism.
The basket feeding conveyor mechanism feeds the empty basket 100 into the basket receiving mechanism 20.
Then, the lifting mechanism 10 drives the basket accommodating mechanism 20 to descend, so that the basket in the basket accommodating mechanism 20 descends to: a first silicon wafer bearing groove (which refers to a first silicon wafer bearing groove of the first silicon wafer accommodating cavity 101) at the top of the material basket is flush with a conveying plane of the sheet inserting mechanism (such as a silicon wafer conveying mechanism); the material basket jacking translation mechanism 30 jacks the material basket 100 upwards and drives the material basket 100 to translate, so that the first silicon wafer accommodating cavity 101 of the material basket 100 is butted with the inserting piece mechanism (such as a silicon wafer conveying mechanism), and the inserting piece of the silicon wafer accommodating cavity is started. When each silicon wafer is inserted into the first silicon wafer accommodating cavity 101 by the inserting mechanism, the lifting mechanism 10 drives the material basket accommodating mechanism 20 to ascend by a predetermined distance, and the predetermined distance is equal to the thickness of one silicon wafer.
Treat that first silicon chip holds chamber 101 and receives full silicon chip after, material basket jacking translation mechanism 30 drives material basket 100 translation immediately for the second silicon chip of material basket 100 holds chamber 102 and the butt joint of inserted sheet mechanism, and elevating system 10 drives material basket receiving mechanism 20 and descends, makes the material basket in the material basket receiving mechanism 20 descend to: a first silicon wafer bearing groove (referring to a first silicon wafer bearing groove of the second silicon wafer accommodating cavity 102) at the top of the material basket is flush with a conveying plane of the sheet inserting mechanism (such as a silicon wafer conveying mechanism); the inserting mechanism inserts the second silicon wafer accommodating cavity 102 until the second silicon wafer accommodating cavity 102 is full of silicon wafers.
Optionally, as shown in fig. 2, the basket receiving mechanism 20 includes a base 21, a top plate 22 and a pressing component 23, wherein: the top plate 22 is connected to the base 21 through a support rod 24 and located above the base 21, and a basket accommodating cavity for accommodating a basket is formed between the top plate 22 and the base 21. The pressing component 23 is arranged on the surface of the top plate 22 opposite to the base 21, and the pressing component 23 is used for pressing the material basket in the material basket accommodating cavity downwards.
When the basket jacking translation mechanism 30 jacks the basket 100 upwards to the target position, the pressing component 23 presses against the top of the basket 100, so that the pressing positioning of the basket 100 is realized. Thus, the basket 100 can be stably held in the basket accommodating cavity without tilting or slipping.
As an alternative embodiment, as shown in fig. 5, the pressing assembly 23 includes a guide shaft 231 and a first pressing plate 232, wherein: the guide shaft 231 is vertically inserted into the top plate 22 and can move up and down relative to the top plate 22, the first pressing plate 232 is fixedly connected to the lower end of the guide shaft 231, and the bottom of the first pressing plate 232 is provided with a ball 233.
The operation of the pressing assembly 23 in the embodiment of fig. 5 is as follows:
in the initial state, that is, when the basket lifting translation mechanism 30 does not lift the basket 100 upwards, the guide shaft 231 naturally sags under the action of its own weight. When the basket jacking translation mechanism 30 jacks the basket 100 upwards to the target high position, the first pressing plate 232 drives the guide shaft to move upwards under the pressing of the basket 100, and the first pressing plate 232 is finally pressed on the top of the basket 100. That is, the material basket jacking translation mechanism 30 and the first pressing plate 232 are used for compressing and positioning the material basket 100 from the upper side and the lower side, so that the material basket can be fixed in the material basket accommodating cavity, and the material basket is prevented from sliding down.
Since the balls 233 are disposed at the bottom of the first pressing plate 232, the first pressing plate 232 does not cause a horizontal obstruction to the basket 100. That is, the basket jacking translation mechanism 30 can still drive the basket 100 to translate smoothly.
With continued reference to FIG. 5, the pressing assembly 23 may optionally further include a pressing plate stop 234 fixedly attached to the top plate 22 and positioned above the first pressing plate 232. When the first pressing plate 232 ascends to the predetermined position, it is blocked and limited by the pressing plate limiting member 234, so as to prevent the first pressing plate 232 from excessively ascending to touch the top plate 22.
In another embodiment, the pressing assembly 23 includes a cylinder and a second pressing plate, wherein: the cylinder is arranged on the top plate 22, the second pressing plate is connected to a piston rod of the cylinder, and the cylinder drives the second pressing plate to move up and down so as to press and release the material basket 100.
The operation of the pressing module 23 in this embodiment is as follows:
in the initial state, the piston rod of the cylinder is retracted and the second presser plate is in the initial position close to the top plate 22. After the material basket jacking translation mechanism 30 jacks the material basket 100 upwards to a target high position, a gap is still kept between the second pressing plate and the top of the material basket 100, namely, the material basket jacking translation mechanism 30 can drive the material basket 100 to translate smoothly.
After the material basket 100 is translated in place, in order to improve the stability of the material basket 100 and prevent the material basket 100 from inclining in the sheet collecting process, the air cylinder can drive the second pressing plate to press downwards to press the material basket 100, that is, the material basket jacking translation mechanism 30 and the second pressing plate press and position the material basket 100 from the upper side and the lower side.
As shown in fig. 3 to 4, optionally, a channel 211 is provided on the base 21 for passing the feeding basket jacking translation mechanism 30, the basket jacking translation mechanism 30 jacks up the basket 100 in the basket accommodating cavity through the channel 211, and translates along the channel 211 to perform translation driving on the basket 100.
Optionally, in order to automatically send the material basket 100 to be received into the material basket accommodating cavity and automatically send the material basket 100 out of the material basket accommodating cavity, a material basket conveying mechanism is further disposed on the base 21.
Optionally, basket conveying mechanism includes two parallel arrangement's conveyer belt and driving piece, and two synchronous rotations of conveyer belt of driving piece drive, and then will bear the basket on the conveyer belt and send into the basket and hold the chamber to and will bear and send out the basket in the conveyer belt and hold the intracavity.
Optionally, as shown in fig. 3, the basket jacking translation mechanism 30 includes a translation driving mechanism 31, a sliding mounting plate 32, a jacking driving mechanism 33, and a supporting plate 34, wherein: translation actuating mechanism 31 sets up on base 21, and sliding mounting board 32 is through sliding connection on base 21 and connect the drive end of translation actuating mechanism 31, and jacking actuating mechanism 33 sets up on sliding mounting board 32, and backup pad 34 is connected on jacking actuating mechanism 33's drive end.
The jacking driving mechanism 33 is used for driving the supporting plate 34 to jack up the material basket 100 which is loaded on the conveyor belt and located in the material basket accommodating cavity, and the translation driving mechanism 31 is used for driving the sliding mounting plate 32 to translate so as to drive the material basket 100 supported on the supporting plate 34 to translate.
Optionally, the sliding mounting plate 32 is of a substantially U-shaped structure, two arms of the sliding mounting plate 32 are slidably connected to the bottom of the base 21 through sliders, and the two arms of the sliding mounting plate 32 are located at two sides of the channel 211.
As shown in fig. 3 to 4, optionally, the translational driving mechanism 31 includes a driving pulley 311, a driven pulley 312 and a timing belt 313, wherein: the driving pulley 311 and the driven pulley 312 are disposed on the base 21, the timing belt 313 is sleeved on the driving pulley 311 and the driven pulley 312, and the sliding mounting plate 32 is fixedly connected with a belt body (such as an upper belt body) on one side of the driven pulley 312.
When the driving pulley 311 and the driven pulley 312 drive the timing belt 313 to move, the slide mounting plate 32 is driven by the timing belt 313 to slide along the base 21.
As shown in fig. 3, optionally, the basket adjusting device in the embodiment of the present invention further includes a basket rotating mechanism 40 disposed on the sliding mounting plate 32, and the basket rotating mechanism 40 is used for driving the supporting plate 34 to rotate, thereby driving the basket supported on the supporting plate 34 to rotate, so as to implement the rotation reversing of the basket, and facilitate the joining of the basket and the next process.
Of course, when reversing the rotation of the basket, the basket rotating mechanism 40 needs to position the basket in the basket receiving cavity, for example, the pressing and positioning of the basket are performed from the upper and lower sides by the mutual cooperation of the pressing component 23 and the supporting plate 34 as described above.
The utility model also provides a piece system is received to silicon chip, this piece system is received to silicon chip includes basket adjusting device and silicon chip conveying mechanism in aforementioned arbitrary embodiment, wherein:
the material basket adjusting device is used for accommodating the material basket and driving the material basket to translate in a first horizontal direction (such as an X-axis direction) so that the silicon wafer accommodating cavities in the material basket are sequentially butted with the discharge end of the silicon wafer conveying mechanism.
The silicon wafer conveying mechanism conveys the silicon wafers along a second horizontal direction (such as the Y-axis direction) perpendicular to the first horizontal direction so as to insert the silicon wafers into the silicon wafer containing cavity butted with the discharge end of the silicon wafer conveying mechanism, and after each silicon wafer conveying mechanism inserts one silicon wafer into the silicon wafer containing cavity, the material basket adjusting device drives the material basket to descend for a preset distance, wherein the preset distance is equal to the thickness of one silicon wafer.
It is visible, through material basket adjusting device and silicon chip conveying mechanism's cooperation, the utility model provides a silicon chip is received the piece device and can be in succession, automatically receive the silicon chip and hold the intracavity to each silicon chip of material basket to promoted the receipts piece efficiency to the silicon chip by a wide margin.
Optionally, after each silicon chip accommodating cavity in the material basket is full of silicon chips, the material basket is driven by the material basket rotating mechanism to rotate so that the material basket is connected with the subsequent station.
Still taking the material basket 100 with two material basket accommodating cavities mentioned in the background art as an example, with reference to fig. 1 to 4, the specific wafer collecting process of the silicon wafer collecting system in an embodiment of the present invention is as follows:
firstly, the lifting mechanism 10 drives the basket accommodating mechanism 20 to the high position, and then an empty basket 100 is placed on the conveyor belt on the base 21, and the basket 100 is conveyed into the basket accommodating cavity by the conveyor belt.
Then, the jacking driving mechanism 33 drives the supporting plate 34 to move upwards, and the supporting plate 34 jacks the material basket 100 away from the conveying belt. After the basket 100 is lifted to the proper position, the first pressing plate 232 of the pressing assembly 23 presses against the top of the basket 100.
Subsequently, the translation driving mechanism 31 drives the sliding mounting plate 32 to translate along a first horizontal direction (such as the X-axis direction), so as to drive the material basket 100 to translate synchronously until the first silicon wafer accommodating cavity 101 of the material basket 100 is butted with the output end of the silicon wafer conveying mechanism.
The silicon wafer conveying mechanism inserts the silicon wafers into the first silicon wafer accommodating cavity 101 one by one along a second horizontal direction (such as a Y-axis direction), and when each silicon wafer is inserted, the lifting mechanism 10 drives the material basket accommodating mechanism 20 to ascend by a preset distance, where the preset distance is equal to the thickness of one silicon wafer.
After the first silicon wafer accommodating cavity 101 is full of silicon wafers, the lifting mechanism 10 drives the material basket accommodating mechanism 20 to descend, so that the material basket in the material basket accommodating mechanism 20 descends to: a first silicon wafer bearing groove (referring to a first silicon wafer bearing groove of the second silicon wafer accommodating cavity 102) at the top of the material basket is flush with a conveying plane of the sheet inserting mechanism (such as a silicon wafer conveying mechanism);
the translation driving mechanism 31 drives the sliding mounting plate 32 to translate along the first horizontal direction again, so that the second silicon wafer accommodating cavity 102 of the material basket 100 is in butt joint with the output end of the silicon wafer conveying mechanism, and the silicon wafer conveying mechanism continues to insert the silicon wafer into the second silicon wafer accommodating cavity 102. Until the second wafer receiving cavity 102 is full of wafers.
Then, the basket rotating mechanism 40 drives the supporting plate 34 to rotate, so as to drive the basket to rotate and reverse, so that the basket 100 is connected with the next station. For example, the opening direction of the material basket 100 is driven to engage with the subsequent material taking station.
Certainly, the material basket may not be rotated and reversed, after all the silicon wafer accommodating cavities in the material basket 100 are full of silicon wafers, the jacking driving mechanism 33 immediately drives the supporting plate 34 to descend, so as to drive the material basket 100 full of silicon wafers to descend and reset, so that the material basket 100 returns to the conveying belt on the bottom plate again, and the material basket 100 is directly conveyed out from the material basket accommodating cavities by the conveying belt.
The invention has been described above with a certain degree of particularity and detail. It will be understood by those of ordinary skill in the art that the description of the embodiments is merely exemplary and that all changes that may be made without departing from the true spirit and scope of the present invention are intended to be within the scope of the present invention. The scope of the invention is defined by the appended claims rather than by the foregoing description of the embodiments.

Claims (10)

1. The utility model provides a basket adjusting device, its characterized in that, basket adjusting device includes elevating system, basket holding mechanism and basket jacking translation mechanism, wherein:
the material basket accommodating mechanism is connected to a movable part of the lifting mechanism, the material basket accommodating mechanism is used for accommodating a material basket, and the lifting mechanism is used for driving the material basket accommodating mechanism to lift so as to drive the material basket in the material basket accommodating mechanism to lift;
the material basket jacking translation mechanism is arranged on the material basket accommodating mechanism and used for jacking upwards to be located in the material basket accommodating mechanism and driving the material basket to translate.
2. The basket adjusting device according to claim 1, wherein the basket receiving mechanism comprises a base, a top plate and a pressing member, wherein:
the top plate is connected to the base through a support rod and is positioned above the base, and a basket accommodating cavity for accommodating the basket is formed between the top plate and the base;
the pressing component is arranged on one surface of the top plate, which is opposite to the base, and is used for pressing the material basket downwards.
3. The basket adjusting apparatus according to claim 2, wherein the pressing member comprises a guide shaft and a first pressing plate, wherein: the guide shaft penetrates through the top plate along the vertical direction and can move up and down relative to the top plate, the first pressing plate is fixedly connected to the lower end of the guide shaft, and a ball is arranged at the bottom of the first pressing plate;
or,
the pressing component comprises an air cylinder and a second pressing plate, wherein: the air cylinder is arranged on the top plate, the second pressing plate is connected to a piston rod of the air cylinder, and the air cylinder drives the second pressing plate to move up and down.
4. The apparatus of claim 3, wherein the biasing assembly further comprises a pressure plate stop fixedly attached to the top plate.
5. The apparatus according to claim 2, wherein the base is provided with a basket conveying mechanism, the basket conveying mechanism comprises two parallel conveying belts and a driving member, the driving member drives the two conveying belts to rotate synchronously, so as to convey the baskets carried on the conveying belts into and out of the basket accommodating cavities.
6. The basket adjusting apparatus according to claim 5, wherein the basket jacking translation mechanism comprises a translation driving mechanism, a sliding mounting plate, a jacking driving mechanism and a supporting plate, wherein:
the translation driving mechanism is arranged on the base, the sliding mounting plate is connected to the base in a sliding mode and is connected with the driving end of the translation driving mechanism, the jacking driving mechanism is arranged on the sliding mounting plate, and the supporting plate is connected to the driving end of the jacking driving mechanism;
the jacking driving mechanism is used for driving the supporting plate to jack upwards to bear on the conveying belt and be located the material basket in the material basket accommodating cavity, and the translation driving mechanism is used for driving the sliding mounting plate to translate so as to drive the material basket to translate.
7. The basket adjusting apparatus of claim 6, wherein the translational drive mechanism comprises a driving pulley, a driven pulley, and a timing belt, wherein:
the driving pulley with driven pulley sets up on the base, the hold-in range suit is in driving pulley with on the driven pulley, sliding mounting board with one side area body fixed connection of driven pulley.
8. The basket adjusting device according to claim 6, further comprising a basket rotating mechanism for driving the support plate to rotate so as to rotate the basket supported on the support plate.
9. A silicon wafer collecting system for collecting silicon wafers into a material basket, wherein at least two silicon wafer accommodating cavities are arranged in the material basket side by side, the silicon wafer collecting system is characterized by comprising the material basket adjusting device and a silicon wafer conveying mechanism as claimed in any one of claims 1 to 7, wherein:
the material basket adjusting device is used for accommodating the material basket and driving the material basket to translate in a first horizontal direction, so that the silicon wafer accommodating cavities in the material basket are sequentially butted with the discharge end of the silicon wafer conveying mechanism;
the silicon wafer conveying mechanism conveys silicon wafers along a second horizontal direction perpendicular to the first horizontal direction so as to insert the silicon wafers into the silicon wafer containing cavity in butt joint with the discharge end of the silicon wafer conveying mechanism, and after each silicon wafer conveying mechanism inserts one silicon wafer into the silicon wafer containing cavity, the material basket adjusting device drives the material basket to ascend by a preset distance, wherein the preset distance is equal to the thickness of one silicon wafer.
10. A silicon wafer collecting system is used for collecting silicon wafers into a material basket, at least two silicon wafer accommodating cavities are arranged in the material basket side by side, the silicon wafer collecting system is characterized by comprising the material basket adjusting device and a silicon wafer conveying mechanism according to claim 8, wherein:
the material basket adjusting device is used for accommodating the material basket and driving the material basket to translate in a first horizontal direction, so that the silicon wafer accommodating cavities in the material basket are sequentially butted with the discharge end of the silicon wafer conveying mechanism;
the silicon wafer conveying mechanism conveys silicon wafers along a second horizontal direction perpendicular to the first horizontal direction so as to insert the silicon wafers into the silicon wafer containing cavity butted with the discharge end of the silicon wafer conveying mechanism, and after each silicon wafer is inserted into the silicon wafer containing cavity by the silicon wafer conveying mechanism, the material basket adjusting device drives the material basket to ascend by a preset distance, wherein the preset distance is equal to the thickness of one silicon wafer;
after all the silicon wafer containing cavities in the material basket are fully filled with silicon wafers, the material basket is driven by the material basket rotating mechanism to rotate so that the material basket is connected with a subsequent station.
CN202220157842.8U 2022-01-21 2022-01-21 Material basket adjusting device and silicon wafer collecting system Active CN216835956U (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116873508A (en) * 2023-08-28 2023-10-13 东莞市鼎力自动化科技有限公司 Automatic feeding mechanism based on silicon wafer cleaning
FR3143844A1 (en) * 2022-12-19 2024-06-21 Commissariat A L'energie Atomique Et Aux Energies Alternatives SYSTEM AND METHOD FOR INSERTING A BAR INTO A SLOT OF A BASKET

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3143844A1 (en) * 2022-12-19 2024-06-21 Commissariat A L'energie Atomique Et Aux Energies Alternatives SYSTEM AND METHOD FOR INSERTING A BAR INTO A SLOT OF A BASKET
WO2024134070A1 (en) * 2022-12-19 2024-06-27 Commissariat A L'energie Atomique Et Aux Energies Alternatives System and method for inserting a bar into a slot of a basket
CN116873508A (en) * 2023-08-28 2023-10-13 东莞市鼎力自动化科技有限公司 Automatic feeding mechanism based on silicon wafer cleaning
CN116873508B (en) * 2023-08-28 2024-01-26 东莞市鼎力自动化科技有限公司 Automatic feeding mechanism based on silicon wafer cleaning

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