CN216830295U - Cooling device of grinding machine and grinding machine - Google Patents
Cooling device of grinding machine and grinding machine Download PDFInfo
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- CN216830295U CN216830295U CN202123347985.XU CN202123347985U CN216830295U CN 216830295 U CN216830295 U CN 216830295U CN 202123347985 U CN202123347985 U CN 202123347985U CN 216830295 U CN216830295 U CN 216830295U
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- cooling device
- driving motor
- waste water
- heat dissipation
- dissipation structure
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Abstract
The utility model provides a cooling device and grinding board of grinding board, wherein cooling device is used for carrying out the physics cooling to the grinding board, the grinding board includes abrasive disc, sets up grinding pad, waste water drainage system, actuating motor and driving belt on the abrasive disc, cooling device's both ends with waste water drainage system intercommunication, just the cooling device laminating is connected actuating motor is last, it is right to be used for the actuating motor cooling. The utility model discloses an add cooling device on the driving motor of grinding board, utilize the continuous waste water that the grinding board during operation produced to cool off driving motor according to local conditions to improve the radiating effect to driving motor, reduce the overheated probability of damaging of driving motor, reduce the manufacturing cost who changes driving motor, increase board work efficiency, and this cooling device simple structure, it is with low costs to reform transform.
Description
Technical Field
The utility model relates to a semiconductor manufacturing technology field, in particular to grinder's cooling device and grinder.
Background
Chemical Mechanical Polishing (CMP) is a process in which a Chemical reaction process and a Mechanical Polishing process work together. The existing CMP grinding machine comprises a grinding disc, a grinding pad arranged on the grinding disc, a driving motor and a transmission belt, wherein in the CMP process, the driving motor drives the grinding disc and the grinding pad to rotate through driving the transmission belt, so that the front surface of a wafer and the grinding pad generate mechanical friction to remove film materials and chemical reactants on the surface of the wafer, and the purpose of flattening the surface of the wafer is achieved.
Therefore, the CMP polishing machine mainly provides operation power for the CMP polishing machine, which results in a huge heat generation of the drive motor, and the CMP polishing machine is provided with a fan to dissipate heat of the drive motor in the prior art. But the life of fan is limited and the radiating effect is not ideal enough, in addition, in case the fan damages not to rotate, the easy overheated damage of driving motor leads to abrasive disc scram, the board is shut down, the product is scrapped to influence the board operating time, increase the manufacturing cost of changing driving motor, and waste time and energy. Therefore, how to improve the heat dissipation effect to the driving motor, reduce the overheated damage probability of driving motor, reduce the manufacturing cost of changing driving motor, increase board work efficiency is the problem that needs to solve at present urgently.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a cooling device and grinding board of grinding board to solve the defect and the not enough of the cooling device of grinding board among the prior art, the utility model discloses can improve the radiating effect to driving motor, reduce the overheated damage probability of driving motor, reduce the manufacturing cost who changes driving motor, increase board work efficiency.
In order to achieve the above object, in a first aspect, the utility model provides a cooling device of grinding machine for carry out the physics cooling to the grinding machine, the grinding machine includes abrasive disc, sets up grinding pad, waste water drainage system, driving motor and driving belt on the abrasive disc, cooling device's both ends with waste water drainage system intercommunication, just the cooling device laminating is connected on the driving motor, it is right to be used for the driving motor cooling.
Optionally, the wastewater discharge system includes a first wastewater discharge pipe, a second wastewater discharge pipe and a wastewater discharge port, which are sequentially communicated, and the first wastewater discharge pipe is communicated with the chamber of the grinder platform;
the cooling device comprises a heat dissipation structure and a wastewater channel pipe connected with the heat dissipation structure, two ends of the wastewater channel pipe are respectively communicated with the first wastewater drainage pipe and the second wastewater drainage pipe, and the heat dissipation structure is attached to and connected with the driving motor.
Optionally, the heat dissipation structure is provided with a through hole for the wastewater channel pipe to pass through, and the wastewater channel pipe is in clearance fit connection with the through hole.
Optionally, the driving motor is packaged into a cuboid shape;
the heat dissipation structure is cuboid, and the length, width and height of the heat dissipation structure are smaller than the length, width and height of the corresponding driving motor.
Optionally, the through hole is formed along an axial direction parallel to the long side of the heat dissipation structure.
Optionally, one side face with the largest area in the side faces of the heat dissipation structure is attached to and connected with one side face with the largest area in the side faces of the driving motor, and the long side of the heat dissipation structure is parallel to the long side of the driving motor.
Optionally, the heat dissipation structure is made of a metal material.
Optionally, the waste water channel is made of metal.
In a second aspect, the present invention provides a grinder station comprising a cooling device as set forth in the first aspect.
Compared with the prior art, the utility model provides a pair of cooling device and grinding board of grinding board has following beneficial effect: wherein cooling device is used for carrying out the physics cooling to the grinding board, the grinding board includes abrasive disc, sets up grinding pad, waste water drainage system, CD-ROM drive motor and driving belt on the abrasive disc, cooling device's both ends with waste water drainage system intercommunication, just the cooling device laminating is connected CD-ROM drive motor is last, be used for right the CD-ROM drive motor cooling. The utility model discloses an add cooling device on the driving motor of grinding board, utilize the continuous waste water that the grinding board during operation produced to cool off driving motor according to local conditions to improve the radiating effect to driving motor, reduce the overheated probability of damaging of driving motor, reduce the manufacturing cost who changes driving motor, increase board work efficiency, and this cooling device simple structure, it is with low costs to reform transform.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 is a schematic structural view of a polishing platen according to an embodiment of the present invention;
fig. 2 is a schematic structural view of a cooling device of a polishing platen according to an embodiment of the present invention;
description of reference numerals:
1-a grinding disc; 2-a drive motor; 3-a conveyor belt; 4-a cooling device; 41-a heat dissipation structure; 42-a waste water passage pipe; 51-a first wastewater drain; 52-a second wastewater drain; 53-wastewater drain.
Detailed Description
The cooling device for a polishing machine and the polishing machine provided by the present invention will be described in detail with reference to the accompanying drawings and specific embodiments. The advantages and features of the present invention will become more apparent from the following description. It should be noted that the drawings are in simplified form and are not to precise scale, and are provided for convenience and clarity in order to facilitate the description of the embodiments of the present invention.
In the description of the present invention, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implying any number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.
The core thought of this application lies in providing a cooling device and grinding board of grinding board, through add cooling device on the driving motor at the grinding board, utilize the continuous waste water that the grinding board during operation produced to cool off driving motor according to local conditions to improve the radiating effect to driving motor, reduce the overheated damage probability of driving motor, reduce the manufacturing cost who changes driving motor, increase board work efficiency, and this cooling device simple structure, it is with low costs to reform transform.
Therefore, the utility model provides a cooling device of grinding machine for carry out the physics cooling to the grinding machine, please refer to fig. 1 and fig. 2, the grinding machine includes grinding disc 1, sets up grinding pad (not shown in the figure), waste water drainage system, driving motor 2 and driving belt 3 on the grinding disc, cooling device 4's both ends with waste water drainage system intercommunication, just cooling device 4 laminating is connected on driving motor 2, be used for right the driving motor cooling.
In the CMP process, the polishing machine will continuously generate wastewater, and the driving motor 2 generates a large amount of heat during operation, and in this embodiment, the driving motor 2 can be cooled by the wastewater according to the circumstances by adding a cooling device to the driving motor 2. The theory of essentials is that waste water is in the in-process of cooling device 4 circulation, because the specific heat capacity of waste water is very big, consequently can be through the thermal conductivity better cooling device 4 absorbs the heat that drive motor 2 operation produced, and waste water can keep the temperature change by a wide margin in the twinkling of an eye after absorbing the heat, can not cause the heat to reverse transmit give drive motor 2 to it is right to utilize waste water sustainably drive motor 2 cools down, reduces drive motor 2 overheat damage probability, reduces to change drive motor 2's manufacturing cost, increases board work efficiency.
Specifically, the wastewater drainage system comprises a first wastewater drainage pipe 51, a second wastewater drainage pipe 52 and a wastewater drainage port 53 which are sequentially communicated, wherein the first wastewater drainage pipe 51 is communicated with a chamber of the grinder. The cooling device 4 includes a heat dissipation structure 41 and a waste water channel tube 42 connected to the heat dissipation structure 41, two ends of the waste water channel tube 42 are respectively communicated with the first waste water drainage tube 51 and the second waste water drainage tube 52, and the heat dissipation structure 41 is attached to the driving motor 2.
In this embodiment, the wastewater generated by the polishing machine during the CMP process is first collected in the chamber of the polishing machine, then flows through the first wastewater drainage pipe 51, the wastewater channel pipe 42 and the second wastewater drainage pipe 52 in sequence, and is finally discharged through the wastewater discharge port 53. In this process, the waste water flowing through the waste water passage pipe 42 absorbs the heat generated by the operation of the driving motor 2 through the heat dissipation structure 41 with good heat conductivity to cool the driving motor 2, so as to ensure the normal operation of the driving motor 2, and compared with the conventional means of cooling by using a fan, the cooling effect of the driving motor 2 in this embodiment is better, and the possibility of overheating and damaging the driving motor 2 can be reduced.
Illustratively, the heat dissipating structure 41 is provided with a through hole for the waste water passage tube 42 to pass through, the waste water passage tube 42 is in clearance fit connection with the through hole, and the outer diameter of the waste water passage tube 42 is the same as the inner diameter of the through hole, so as to ensure the fit between the waste water passage tube 42 and the heat dissipating structure 41, and avoid an air interlayer between the waste water passage tube 42 and the heat dissipating structure 41, so that the heat of the driving motor 2 can be more and more quickly transferred to the waste water in the waste water passage tube 42 through the heat dissipating structure 41.
Illustratively, the driving motor 2 is packaged into a rectangular parallelepiped shape, the heat dissipation structure 41 is also designed into a rectangular parallelepiped shape, and the three dimensions of the length, the width and the height of the heat dissipation structure 41 are all smaller than the three dimensions of the length, the width and the height of the corresponding driving motor 2, so that the installation of the cooling device 4 on the driving motor 2 is facilitated, the assembly space is reduced, and the cooling device is practical and beautiful.
Further, the through holes are formed along an axial direction parallel to the long sides of the heat dissipation structure 41 to increase the contact area between the waste water passage pipe 42 and the heat dissipation structure 41, thereby increasing the heat transfer efficiency between the heat dissipation structure 41 and the waste water passage pipe 42.
Furthermore, one of the side surfaces of the heat dissipation structure 42 with the largest area is attached to and connected with one of the side surfaces of the driving motor 2 with the largest area, and the long side of the heat dissipation structure 41 is parallel to the long side of the driving motor 2, so as to increase the contact area between the heat dissipation structure 41 and the driving motor 2, thereby increasing the heat transfer efficiency between the heat dissipation structure 41 and the driving motor 2.
Illustratively, the heat dissipating structure 41 and the waste water passage pipe 42 are made of metal. Preferably, the heat dissipation structure 41 and the waste water channel pipe 42 are made of copper materials, the price of the copper materials is moderate, the performance is stable, the service life is long, and the copper materials have good heat conductivity.
Based on the same inventive concept, the embodiment further provides a grinding machine table, which includes the cooling device.
To sum up, the utility model provides a pair of cooling device and grinding board of grinding board has following advantage: wherein cooling device is used for carrying out the physics cooling to the grinding board, the grinding board includes abrasive disc, sets up grinding pad, waste water drainage system, CD-ROM drive motor and driving belt on the abrasive disc, cooling device's both ends with waste water drainage system intercommunication, just the cooling device laminating is connected CD-ROM drive motor is last, be used for right the CD-ROM drive motor cooling. The utility model discloses an add cooling device on the driving motor of grinding board, utilize the continuous waste water that the grinding board during operation produced to cool off driving motor according to local conditions to improve the radiating effect to driving motor, reduce the overheated probability of damaging of driving motor, reduce the manufacturing cost who changes driving motor, increase board work efficiency, and this cooling device simple structure, it is with low costs to reform transform.
The above description is only for the preferred embodiment of the present invention and is not intended to limit the scope of the present invention, and any modification and modification made by those skilled in the art according to the above disclosure are all within the scope of the claims.
Claims (9)
1. The utility model provides a cooling device of grinding machine for carry out the physics cooling to the grinding machine, the grinding machine includes abrasive disc, sets up grinding pad, waste water drainage system, actuating motor and driving belt on the abrasive disc, its characterized in that, cooling device's both ends with waste water drainage system intercommunication, just the cooling device laminating is connected actuating motor is last, it is right to be used for the actuating motor cooling.
2. The cooling apparatus of a polishing machine as claimed in claim 1, wherein the wastewater drainage system comprises a first wastewater drainage pipe, a second wastewater drainage pipe and a wastewater drainage port, which are connected in sequence, wherein the first wastewater drainage pipe is connected to the chamber of the polishing machine;
the cooling device comprises a heat dissipation structure and a wastewater channel pipe connected with the heat dissipation structure, two ends of the wastewater channel pipe are respectively communicated with the first wastewater drainage pipe and the second wastewater drainage pipe, and the heat dissipation structure is attached to and connected with the driving motor.
3. The cooling device for a polishing machine as claimed in claim 2, wherein the heat dissipating structure has a through hole for the waste water passage pipe to pass through, and the waste water passage pipe is in clearance fit with the through hole.
4. A cooling device for a polishing machine as claimed in claim 3, wherein said driving motor is packaged in a rectangular parallelepiped shape;
the heat dissipation structure is cuboid, and the length, width and height of the heat dissipation structure are smaller than the length, width and height of the corresponding driving motor.
5. The cooling device of a polishing apparatus as claimed in claim 4, wherein the through hole is formed along an axial direction parallel to the long side of the heat dissipation structure.
6. The cooling device of a polishing machine as claimed in claim 4, wherein one of the side surfaces of the heat dissipation structure with the largest area is attached to and connected to one of the side surfaces of the driving motor, and the long side of the heat dissipation structure is parallel to the long side of the driving motor.
7. The cooling device of a polishing machine as claimed in claim 2, wherein the heat sink is made of metal.
8. The cooling device of a polishing machine as claimed in claim 2, wherein the waste water channel is made of metal.
9. A polishing apparatus comprising the cooling device as claimed in any one of claims 1 to 8.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202123347985.XU CN216830295U (en) | 2021-12-28 | 2021-12-28 | Cooling device of grinding machine and grinding machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202123347985.XU CN216830295U (en) | 2021-12-28 | 2021-12-28 | Cooling device of grinding machine and grinding machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216830295U true CN216830295U (en) | 2022-06-28 |
Family
ID=82112824
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202123347985.XU Active CN216830295U (en) | 2021-12-28 | 2021-12-28 | Cooling device of grinding machine and grinding machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216830295U (en) |
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2021
- 2021-12-28 CN CN202123347985.XU patent/CN216830295U/en active Active
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