CN216804013U - Automatic crystal cutting device - Google Patents

Abstract

The application discloses automatic cutting device of crystal belongs to semiconductor cutting technical field. The device includes: the crystal fixing mechanism comprises a clamping assembly, and the clamping assembly is arranged on the workbench and is used for clamping the crystal; cutting mechanism, cutting mechanism can through first translation mechanism to the crystal motion, cutting mechanism is including the cutting piece, first driving piece and the swinging boom that connect gradually, first driving piece drive the cutting piece cuts, the swinging boom is connected in the end of first telescopic link, and can drive cutting piece and first driving piece for first telescopic link is rotatory, the other end of first telescopic link with first translation mechanism connects. Through the device can be automatic cut the crystal, reduce manual operation, greatly reduced the operation risk to the flexibility of crystal cutting has been improved, can be used to cut the crystal in batches.

Description

Automatic crystal cutting device

Technical Field

The application relates to an automatic crystal cutting device, and belongs to the technical field of semiconductor cutting.

Background

In the production of crystals, it is often necessary to cut the crystal for subsequent processing to produce or observe defects within the crystal, such as silicon carbide crystals, which are now commonly found to include: the defects of the microtube, the polytype or the granular inclusion are macroscopically visible on the surface, but the output position of the microtube, the polytype or the granular inclusion cannot be observed, so that the microtube, the polytype or the granular inclusion needs to be cut at a specific position to observe a source site of the defects so as to solve the source problem and radically reduce the defects of the crystal.

However, the PVT method produces silicon carbide ingots with a Mohs hardness of 9.5, which is only on the diamond side, and thus the cutting process is difficult. At present, no protection device is used for the instant cutting of crystals such as silicon carbide and the like, only a gear driven by a motor rotates, and the crystals are manually cut, but the risk of manual operation is very high, operators are easily scratched, powder is generated in the cutting process, the operating environment is poor, and great potential safety hazards exist.

SUMMERY OF THE UTILITY MODEL

In order to solve the problem, the application provides an automatic cutting device of crystal, the device passes through the centre gripping subassembly with the crystal centre gripping on the workstation, it carries out automatic cutting to the crystal to drive cutting mechanism through first translation mechanism to the crystal removal, and cutting mechanism's swinging boom can drive cutting piece and first driving piece rotatory for first flexible arm, thereby can change the cutting direction of cutting piece, can select cutting angle wantonly according to the actual conditions of crystal, can automize and cut the crystal, reduce manual operation, greatly reduced the operational risk, and the flexibility of crystal cutting has been improved, can be used to cut the crystal in batches.

According to one aspect of the application, an automatic crystal cutting device is provided, which comprises:

the crystal fixing mechanism comprises a clamping assembly, and the clamping assembly is arranged on the workbench and is used for clamping the crystal;

cutting mechanism, cutting mechanism can through first translation mechanism to the crystal motion, cutting mechanism is including the cutting piece, first driving piece and the swinging boom that connect gradually, first driving piece drive the cutting piece cuts, the swinging boom is connected in the end of first telescopic link, and can drive cutting piece and first driving piece for first telescopic link is rotatory, the other end of first telescopic link with first translation mechanism connects.

Optionally, the clamping assembly comprises a first clamping arm and a second clamping arm which are oppositely arranged, and the first clamping arm and the second clamping arm can stretch and retract.

Optionally, the cooling device further comprises a cooling mechanism, and cooling liquid flowing out of the cooling mechanism can flow to the crystal.

Optionally, a liquid receiving groove is formed in the workbench, and the liquid receiving groove is arranged below the first clamping arm and the second clamping arm.

Optionally, the cooling mechanism includes a first cooling spray head and a second cooling spray head, and the first cooling spray head and the second cooling spray head are arranged oppositely.

Optionally, the crystal fixing mechanism further comprises a rotary supporting rod and a clamping panel, and the first clamping arm and the second clamping arm are arranged on the clamping panel;

one end of the rotary supporting rod is connected to the bottom of the liquid receiving groove, the other end of the rotary supporting rod is connected with the clamping panel, and the rotary supporting rod can drive the clamping panel to rotate.

Optionally, the cutting member is connected to the first driving member by a fixing screw;

the loading and unloading mechanism can move towards the cutting mechanism through the second translation mechanism, the loading and unloading mechanism comprises a loading and unloading piece and a second driving piece which are connected, the loading and unloading piece can be clamped with the fixed screw rod, and the second driving piece is used for driving the loading and unloading piece to rotate so as to screw the fixed screw rod.

Optionally, the loading and unloading mechanism further includes a second telescopic rod, the second driving member is connected to one end of the second telescopic rod, the other end of the second telescopic rod is connected to the second translation mechanism, and the second telescopic rod extends or retracts to drive the second driving member to ascend or descend.

Optionally, the handling mechanism further includes a manipulator disposed at one side of the cutting mechanism, and configured to take out or put back the cutting element from the first driving element.

Optionally, the first translation mechanism is disposed on one side of the workbench, the first translation mechanism includes a first translation platform, the first translation platform is disposed above or below the workbench and can move horizontally relative to the workbench, and the first telescopic rod is disposed on the first translation platform.

Optionally, the second translation mechanism is disposed on the other side of the workbench and is disposed opposite to the first translation mechanism, the second translation mechanism includes a second translation platform, the second translation platform is disposed above or below the workbench and can move horizontally relative to the workbench, and the second telescopic rod is disposed on the second translation platform.

Optionally, the first translation mechanism further comprises a first translation gear engaged with the first translation platform, and the first translation gear rotates to drive the first translation platform to move horizontally relative to the work table.

Optionally, the second translation mechanism further comprises a second translation gear engaged with the second translation platform, and the second translation gear rotates to drive the second translation platform to move horizontally relative to the working table.

Benefits that can be produced by the present application include, but are not limited to:

1. the application provides an automatic cutting device of crystal, swinging boom are used for adjusting the cutting angle between cutting piece and the crystal, can multi-directionally cut the crystal, through the device, need not under the condition of manual operation, can automize and cut the crystal, and the material resources of using manpower sparingly reduce operational risk and potential safety hazard, improve the flexibility of crystal cutting simultaneously, are applicable to cutting the crystal in batches.

2. The application provides an automatic cutting device of crystal can spout the coolant liquid to the crystal at the in-process of cutting through setting up cooling body, cools down to the crystal, further reduces the operational risk, can wash away the powder that produces thereupon simultaneously, reduces dust pollution, improves the security of cutting.

3. The application provides an automatic cutting device of crystal, through the setting of centre gripping panel and rotation support pole, rotation support pole drives the centre gripping panel rotation, then the crystal rotates thereupon, can accomplish the horizontal cutting that runs through of crystal, further improves the device's degree of automation to satisfy different cutting needs.

4. The application provides an automatic cutting device of crystal, loading and unloading piece can with the clamping of clamping screw, and the second driving piece is used for driving loading and unloading piece rotatory to twist clamping screw, can automize the change that cuts the piece, further improve the device's degree of automation.

Drawings

The accompanying drawings, which are included to provide a further understanding of the application and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the application and together with the description serve to explain the application and not to limit the application. In the drawings:

FIG. 1 is a schematic longitudinal cutting diagram of an automated crystal cutting apparatus according to an embodiment of the present disclosure;

FIG. 2 is a schematic diagram of a lateral cutting of an automated crystal cutting apparatus according to an embodiment of the present disclosure;

FIG. 3 is an enlarged view of a portion A of FIG. 2;

list of parts and reference numerals:

1. a central control system; 2. a crystal; 3. a work table; 11. cutting the piece; 12. a first driving member; 13. a first telescopic rod; 14. a rotating arm; 15. fixing the screw rod; 21. a first clamp arm; 22. a second clamp arm; 23. rotating the support rod; 24. clamping the panel; 31. a first cooling spray head; 32. a second cooling spray head; 33. a liquid receiving tank; 41. loading and unloading the parts; 42. a second driving member; 43. a second telescopic rod; 51. a first translation stage; 52. a first translation gear; 53. a second translation platform, 54, a second translation gear.

Detailed Description

In order to more clearly explain the overall concept of the present application, the following detailed description is given by way of example in conjunction with the accompanying drawings.

In order that the above objects, features and advantages of the present application can be more clearly understood, the present application will be described in further detail with reference to the accompanying drawings and detailed description. It should be noted that the embodiments and features of the embodiments of the present application may be combined with each other without conflict.

In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application, however, the present application may be practiced in other ways than those described herein, and therefore the scope of the present application is not limited by the specific embodiments disclosed below.

In addition, in the description of the present application, it is to be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "axial", "radial", "circumferential", and the like, indicate orientations and positional relationships based on those shown in the drawings, are only for convenience of description and simplicity of description, and do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be construed as limiting the present application.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present application, "a plurality" means two or more unless specifically limited otherwise.

In this application, unless expressly stated or limited otherwise, the terms "mounted," "connected," and "secured" are to be construed broadly, e.g., as meaning permanently connected, removably connected, or integral to one another; the connection can be mechanical connection, electrical connection or communication; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as the case may be.

In this application, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through intervening media. In the description of the present specification, reference to the description of "one embodiment," "some embodiments," "an example," "a specific example," or "some examples" or the like means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present application. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

As shown in fig. 1-2, embodiments of the present application disclose an automated crystal 2 cutting apparatus, comprising: the crystal 2 fixing mechanism comprises a clamping assembly, and the clamping assembly is arranged on the workbench 3 and is used for clamping the crystal 2; cutting mechanism, cutting mechanism can move to crystal 2 through first translation mechanism, and cutting mechanism is including the cutting piece 11, first driving piece 12 and the swinging boom 14 that connect gradually, and the cutting of first driving piece 12 drive cutting piece 11 cuts, and swinging boom 14 is connected in the end of first telescopic link 13 to can drive cutting piece 11 and first driving piece 12 rotatory for first telescopic link 13, the other end and the first translation mechanism of first telescopic link 13 are connected. 2 fixture of crystal fixes crystal 2, cutting mechanism's first telescopic link 13 drives cutting piece 11 and moves in the vertical direction, a vertical distance for adjusting between cutting piece 11 and crystal 2, first translation mechanism drives cutting piece 11 and moves at the horizontal direction, a horizontal distance for adjusting between cutting piece 11 and crystal 2, swinging boom 14 is used for adjusting the cutting angle between cutting piece 11 and crystal 2 in addition, can multi-directionally cut crystal 2, through the device, under the condition that need not manual operation, can automize and cut crystal 2, manpower and materials are saved, reduce operational risk and potential safety hazard, improve the flexibility of crystal 2 cutting simultaneously, be applicable to cutting crystal 2 in batches.

Specifically, the cutting member 11 may be a cutting knife, a cutting wire or a cutting hacksaw, etc., the cutting hacksaw may also be a bar-shaped or a circular shape, it is not particularly limited as long as the cutting of the crystal 2 can be achieved, and when the cutting member 11 is a cutter, a cutting wire or a bar-type cutting hacksaw, the first driving member 12 can drive the cutting knife, the cutting wire or the strip-shaped cutting steel saw to horizontally move along the vertical direction of cutting, when the cutting member 11 is a circular cutting hacksaw, the first driving member 12 can drive the circular cutting hacksaw to rotate, the first driving member 12 is driven in a manner to drive the cutting member 11 to perform a small-scale cutting relative to the crystal 2 during the cutting process, can improve cutting efficiency, reduce cutting stress, avoid the crystal 2 fracture appearing in the cutting process, easily obtain the source of ideal crystal 2 shape or be convenient for observe defect in the crystal 2.

As an embodiment, the clamping assembly includes a first clamping arm 21 and a second clamping arm 22 which are oppositely arranged, and the first clamping arm 21 and the second clamping arm 22 can be extended and contracted. Can use first centre gripping arm 21 and second centre gripping arm 22 to carry out the centre gripping to crystal 2 simultaneously, also use first centre gripping arm 21 or second centre gripping arm 22 alone to carry out the centre gripping to crystal 2, can be according to the first centre gripping arm 21 of the nimble joining in marriage and the centre gripping mode of adjusting of the cutting direction of cutting piece 11 and second centre gripping arm 22 to first centre gripping arm 21 and second centre gripping arm 22 can stretch out and draw back, and the position of adjustable crystal 2 on workstation 3 improves the flexibility of cutting.

Specifically, the movement distances of the first translation mechanism, the first telescopic rod 13, the first clamping arm 21 and the second clamping arm 22 are all controlled by the central control system 1, and parameter setting is performed according to actual conditions, and the movement of the components in the following embodiment is also controlled by the central control system 1, which is not described in detail.

Specifically, referring to fig. 1, when the crystal 2 is cut in the longitudinal direction, since the cutting tool 11 is generally larger than the diameter of the crystal 2, and the first holding arm 21 and the second holding arm 22 hold the crystal 2 at the same time, the cutting of the crystal 2 is hindered, and therefore, the first holding arm 21 or the second holding arm 22 may be used alone for holding, and the following description will be given by taking the example that the first holding arm 21 holds alone: fixing the crystal 2 on a first clamping arm 21, wherein the rotating arm 14 and the first telescopic rod 13 are positioned on the same straight line at the moment, and driving the cutting mechanism to move towards the crystal 2 to be close to the crystal 2 through a first translation mechanism, the first translation mechanism can drive the cutting mechanism to move in the X direction and can drive the cutting mechanism to move in the Y direction, meanwhile, the first telescopic rod 13 stretches to be close to a cutting edge point of the crystal 2, starting a first driving piece 12 to drive a cutting piece 11 to perform cutting movement, meanwhile, the first clamping arm 21 extends out to push the crystal 2 towards the cutting piece 11, and longitudinal cutting of the crystal 2 is started; referring to fig. 2, for the transverse cutting of the crystal 2, the rotating arm 14 rotates relative to the first telescopic rod 13 to be perpendicular to the first telescopic rod 13, the cutting part 11 performs horizontal cutting, the crystal 2 can be fixed by the cooperation of the first clamping arm 21 and the second clamping arm 22, the first telescopic rod 13 stretches to determine the cutting height of the cutting part 11, and the first translation mechanism drives the cutting part 11 to move towards the crystal 2, so as to start the longitudinal cutting of the crystal 2. The cutting directions of the longitudinal cutting and the transverse cutting are only examples, and the rotating arm 14 can rotate relative to the first telescopic rod 13, so that the angle between the rotating arm 14 and the first telescopic rod 13 is 0-180 degrees, the angle between the rotating arm 14 and the first telescopic rod 13 can be adjusted freely according to the shape of the crystal 2 to be cut, personalized cutting is performed, the crystal 2 can be cut into any shape, and the universality and the practicability of the device are improved.

Specifically, the cutting thickness of the cutting member 11 in any direction can be adjusted according to actual conditions, i.e. through cutting can be performed, for example, when the crystal 2 needs to be cut into a specific shape; the crystal 2 can be cut to about half of the thickness of the crystal 2, the crystal 2 is cut to stop cutting when the source of the internal defect of the crystal 2 needs to be observed, the crystal 2 after the cutting is finished is taken down at the moment, the crystal 2 can be knocked to obtain the bright crystal 2 with certain thickness, the source of the defect of the crystal 2 can be observed more visually, when the crystal 2 needs to be cut only by partial thickness, under the condition of longitudinal cutting of the crystal 2, the first clamping arm 21 and the second clamping arm 22 can be used independently or jointly, and the crystal 2 can be determined according to the thickness needing to be cut and the size of the cutting piece 11.

As an embodiment, the apparatus further comprises a cooling mechanism, and the cooling liquid flowing out of the cooling mechanism can flow to the crystal 2. Because the cutting process of crystal 2 can produce heat and powder, can spout the coolant liquid to crystal 2 at the in-process of cutting through setting up cooling body, cool down crystal 2, further reduce the operational risk, can wash away the powder that produces thereupon simultaneously, reduce dust pollution, improve the security of cutting.

As an embodiment, a liquid receiving tank 33 is opened on the worktable 3, the liquid receiving tank 33 is arranged below the first clamping arm 21 and the second clamping arm 22, and the cooling liquid flowing to the crystal 2 flows into the liquid receiving tank 33 for collecting the cooling liquid, thereby improving the convenience of the device. Specifically, the bottom of the liquid receiving tank 33 is provided with an outlet, and the cooling liquid collected by the liquid receiving tank 33 flows out from the outlet to the next recovery mechanism to be recovered, so that the cooling liquid can be reused, and the operation cost of the device is reduced.

As an implementation mode, the cooling mechanism comprises a first cooling spray head 31 and a second cooling spray head 32, the first cooling spray head 31 and the second cooling spray head 32 are arranged oppositely, cooling liquid flows onto the crystal 2 from the first cooling spray head 31 and the second cooling spray head 32, and the first cooling spray head 31 and the second cooling spray head 32 which are arranged oppositely can uniformly cool the crystal 2 and reduce the stress generated by the crystal 2 in the cutting process.

As an embodiment, the crystal 2 fixing mechanism further includes a rotation support rod 23 and a holding panel 24, and the first holding arm 21 and the second holding arm 22 are disposed on the holding panel 24; one end of the rotary supporting rod 23 is connected to the bottom of the liquid receiving tank 33, the other end is connected to the clamping panel 24, and the rotary supporting rod 23 can drive the clamping panel 24 to rotate. The height of grip block 24 is not less than the upper surface of workstation 3, in the horizontal cutting process of crystal 2, because first grip block 21 and second grip block 22 set up relatively, when first grip block 21 and second grip block 22 centre gripping crystal 2 simultaneously, cutting member 11 only can accomplish half cutting, if the cutting requirement of crystal 2 is when transversely running through the cutting, need the manual work to carry out the rotation of crystal 2, through grip block 24 and rotation support bar 23's setting, can be when crystal 2 accomplishes half cutting, rotation support bar 23 drives grip block 24 and rotates 180, cutting member 11 can accomplish half cutting automatically, can accomplish the horizontal running through cutting of crystal 2, further improve the degree of automation of the device, in order to satisfy different cutting needs.

As an embodiment, the cutting member 11 is connected to the first driving member 12 by a fixing screw 15; the device further comprises a loading and unloading mechanism which can move towards the cutting mechanism through a second translation mechanism, the loading and unloading mechanism comprises a loading and unloading piece 41 and a second driving piece 42 which are connected, the loading and unloading piece 41 can be clamped with the fixed screw 15, and the second driving piece 42 is used for driving the loading and unloading piece 41 to rotate so as to screw the fixed screw 15. Because the hardness of crystal 2 is great, consequently, the life of cutting member 11 is low, so the change frequency of cutting member 11 is higher, if use artifical change, cutting member 11 is sharp easily to cause the accidental injury and change inefficiency, through the cooperation of loading and unloading piece 41 and clamping screw 15, can screw up clamping screw 15 rotation and connect cutting member 11 on first driving piece 12, also can unscrew clamping screw 15 and take off cutting member 11 from first driving piece 12, can automize and carry out the change of cutting member 11, further improve the degree of automation of the device.

Specifically, taking the cutting member 11 as a circular cutting hacksaw for example to assemble and disassemble the cutting member 11, the first driving member 12 may be a rotating motor for driving the circular cutting hacksaw to rotate, and when loading the cutting member 11: the circular cutting hacksaw is placed on a rotating motor manually or by a manipulator, a second translation mechanism drives the loading and unloading part 41 and the second driving part 42 to move to a specified position towards the cutting part 11, the loading and unloading part 41 and the fixed screw 15 can be ensured to be at the same height through the extension and retraction of the first telescopic rod 13, the fixed screw 15 can be fixed on the rotating motor in advance and can also be clamped on the loading and unloading part 41 in advance, the second driving part 42 drives the loading and unloading part 41 to rotate so as to screw down the fixed screw 15, and the fixed loading of the cutting part 11 is completed; when the cutting part 11 needs to be disassembled, the second translation mechanism drives the assembling and disassembling part 41 to move until the assembling and disassembling part 41 is clamped with the fixed screw rod 15, the assembling and disassembling part 41 rotates reversely, the fixed screw rod 15 is unscrewed and taken down, an old circular cutting hacksaw is taken down by a worker or a mechanical arm, a new circular cutting hacksaw is put on the old circular cutting hacksaw, and the assembling and disassembling part 41 can be used again to load the cutting part 11. After the assembling and disassembling member 41 is engaged with the cutting member 11, the assembling and disassembling member 41 can be realized by the first driving member 12 driving the cutting member 11 to rotate, the second driving member 42 driving the assembling and disassembling member 41 to rotate, or the cutting member 11 and the assembling and disassembling member 41 can be rotated reversely, as long as the assembling and disassembling member 41 can be ensured to screw the fixing screw 15.

Specifically, when the cutting element 11 is a cutting knife, a cutting wire or a strip cutting hacksaw, the cutting element 11 can be kept stationary, and only the second driving element 42 is used for driving the assembling and disassembling element 41 to rotate to complete the screwing and unscrewing of the fixing screw 15.

In a preferred embodiment, the detachable member 41 is provided with a suction cup or a magnetic material, which can suck the fixing screw 15, thereby preventing the fixing screw 15 from being lost and improving the convenience of the process of detaching the cutting member 11. Specifically, the second driving member 42 is a rotating motor, and the rotating motor is started to drive the loading and unloading member 41 to rotate, and the rotating motor is used to control the forward or reverse rotation of the loading and unloading member 41.

In one embodiment, the assembly and disassembly mechanism further includes a second telescopic rod 43, the second driving member 42 is connected to one end of the second telescopic rod 43, the other end of the second telescopic rod 43 is connected to the second translation mechanism, and the second telescopic rod 43 extends or retracts to drive the second driving member 42 to ascend or descend. The second telescopic rod 43 is used for adjusting the vertical height of the loading and unloading member 41, and the first telescopic rod 13 and the second telescopic rod 43 are matched to enable the fixing screw 15 and the loading and unloading member 41 to be located at the same height.

As an embodiment, the loading and unloading mechanism further includes a manipulator, not shown in the figure, the manipulator is disposed at one side of the cutting mechanism and used for taking out or replacing the cutting element 11 from the first driving element 12, the manipulator is disposed to automatically take off the old cutting element 11 from the first driving element 12 and place a new cutting element 11 on the first driving element 12, thereby further reducing manual operation and improving automation degree of the device.

As an embodiment, the first translation mechanism is arranged at one side of the workbench 3, the first translation mechanism comprises a first translation platform 51, the first translation platform 51 is arranged above or below the workbench 3 and can move horizontally relative to the workbench 3, and the first telescopic rod 13 is arranged on the first translation platform 51; the second translation mechanism is arranged on the other side of the workbench 3 and is opposite to the first translation mechanism, the second translation mechanism comprises a second translation platform 53, the second translation platform 53 is arranged above or below the workbench 3 and can move horizontally relative to the workbench 3, and the second telescopic rod 43 is arranged on the second translation platform 53. The horizontal movement of the first and/or second translation stages 51 and 53 with respect to the table 3 includes both horizontal movement in the X direction and horizontal movement in the Y direction, and the horizontal movement of the first and/or second translation stages 51 and 53 may be controlled by a magnetic force or a gear as long as smooth movement of the first and/or second translation stages 53 is ensured.

As an embodiment, the first translation mechanism further includes a first translation gear 52 engaged with the first translation platform 51, and the first translation gear 52 rotates to drive the first translation platform 51 to move horizontally relative to the workbench 3; the second translation mechanism further includes a second translation gear 54 engaged with the second translation stage 53, and the second translation gear 54 rotates to horizontally move the second translation stage 53 with respect to the table 3. The first translation gear 52 and/or the second translation gear 54 may be disposed at the edge of the table 3, and the number of the first translation gears 52 of the first translation stage 51 in the X direction or the Y direction is at least one, and similarly, the number of the second translation gears 54 of the second translation stage 53 in the X direction or the Y direction is at least one, which ensures smooth movement of the first translation stage 51 and the second translation stage 53 in the X direction and/or the Y direction.

The embodiments in the present specification are described in a progressive manner, and the same and similar parts among the embodiments are referred to each other, and each embodiment focuses on the differences from the other embodiments. In particular, for the system embodiment, since it is substantially similar to the method embodiment, the description is simple, and for the relevant points, reference may be made to the partial description of the method embodiment.

The above description is only an example of the present application and is not intended to limit the present application. Various modifications and changes may occur to those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application should be included in the scope of the claims of the present application.

Claims (10)

1. An automatic crystal cutting device, comprising:

the crystal fixing mechanism comprises a clamping assembly, and the clamping assembly is arranged on the workbench and is used for clamping the crystal;

cutting mechanism, cutting mechanism can through first translation mechanism to the crystal motion, cutting mechanism is including the cutting piece, first driving piece and the swinging boom that connect gradually, first driving piece drive the cutting piece cuts, the swinging boom is connected in the end of first telescopic link, and can drive cutting piece and first driving piece for first telescopic link is rotatory, the other end of first telescopic link with first translation mechanism connects.

2. The automated crystal cutting apparatus of claim 1, wherein the clamp assembly comprises first and second clamp arms disposed in opposition, the first and second clamp arms being retractable.

3. The automatic crystal cutting device according to claim 2, characterized by further comprising a cooling mechanism, wherein cooling liquid flowing out of the cooling mechanism can flow to the crystal.

4. The automatic crystal cutting device according to claim 3, wherein a liquid receiving groove is formed in the worktable, and the liquid receiving groove is arranged below the first clamping arm and the second clamping arm; and/or

The cooling mechanism comprises a first cooling spray head and a second cooling spray head, and the first cooling spray head and the second cooling spray head are arranged oppositely.

5. The automatic crystal cutting device according to claim 4, wherein the crystal fixing mechanism further comprises a rotary support rod and a clamping panel, and the first clamping arm and the second clamping arm are arranged on the clamping panel;

one end of the rotary supporting rod is connected to the bottom of the liquid receiving groove, the other end of the rotary supporting rod is connected with the clamping panel, and the rotary supporting rod can drive the clamping panel to rotate.

6. The automated crystal cutting apparatus of any one of claims 1-5, wherein the cutting member is coupled to the first drive member by a set screw;

the loading and unloading mechanism can move towards the cutting mechanism through the second translation mechanism, the loading and unloading mechanism comprises a loading and unloading piece and a second driving piece which are connected, the loading and unloading piece can be clamped with the fixed screw rod, and the second driving piece is used for driving the loading and unloading piece to rotate so as to screw the fixed screw rod.

7. The automatic crystal cutting device according to claim 6, wherein the loading and unloading mechanism further comprises a second telescopic rod, the second driving member is connected to one end of the second telescopic rod, the other end of the second telescopic rod is connected to the second translation mechanism, and the second telescopic rod extends or retracts to drive the second driving member to ascend or descend.

8. The automated crystal cutting apparatus of claim 7, wherein the handling mechanism further comprises a robot disposed on a side of the cutting mechanism for removing or replacing the cutting member from the first drive member.

9. The automatic crystal cutting device according to claim 6, wherein the first translation mechanism is arranged on one side of the workbench, the first translation mechanism comprises a first translation platform which is arranged above or below the workbench and can move horizontally relative to the workbench, and the first telescopic rod is arranged on the first translation platform; and/or

The second translation mechanism is arranged on the other side of the workbench and is opposite to the first translation mechanism, the second translation mechanism comprises a second translation platform, and the second translation platform is arranged above or below the workbench and can horizontally move relative to the workbench.

10. The automated crystal slicing apparatus of claim 9, wherein the first translation mechanism further comprises a first translation gear engaged with the first translation stage, the first translation gear rotating to cause the first translation stage to move horizontally relative to the work table; and/or

The second translation mechanism further comprises a second translation gear meshed with the second translation platform, and the second translation gear rotates to drive the second translation platform to horizontally move relative to the workbench.

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