CN216747961U - Wafer check out test set - Google Patents
Wafer check out test set Download PDFInfo
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- CN216747961U CN216747961U CN202122409625.1U CN202122409625U CN216747961U CN 216747961 U CN216747961 U CN 216747961U CN 202122409625 U CN202122409625 U CN 202122409625U CN 216747961 U CN216747961 U CN 216747961U
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Abstract
The utility model discloses a crystal element detection device, which comprises a rack, a controller, a sliding frame, a detection carrying platform, a pressing plate and a detection device, wherein the controller is connected with the sliding frame; the detection device comprises a transverse sliding seat, a vertical sliding seat, a first camera, a second camera, a fourth driving mechanism and a fifth driving mechanism, wherein the first camera and the second camera are arranged on the vertical sliding seat; the third driving mechanism is used for driving the pressing plate to move, and the second driving mechanism is used for driving the detection platform deck to move, so that the pressing plate fixes the crystal support plate on the detection platform deck and lights the wafer; the lighting state of the wafer is detected through the detection device, and an NG result and a position are given, so that the equipment can check the packaged wafer, accurate position information can be given during repair of the NG wafer, the reject ratio of products is reduced, and the production efficiency is improved.
Description
Technical Field
The utility model relates to the technical field of detection equipment, in particular to a crystal element detection equipment.
Background
In recent years, LED (light emitting diode) products have been rapidly developed for illumination. Compared with the traditional light source, the LED has the advantages of long service life, small volume, energy conservation, high efficiency, high response speed, shock resistance, no pollution and the like, and is considered as a green illumination light source which can enter the field of common illumination.
With the continuous development of high lighting efficiency, power, high reliability and low cost of LED products, the requirement on packaging is higher and higher, after the packaging of the conventional wafer is completed, the wafer cannot be lightened due to the possibility of damage to the wafer caused by poor packaging process, and the production efficiency is low due to the fact that the wafer cannot be completely lightened to check whether the packaged wafer is completely lightened or not and cannot meet the requirement of giving accurate position information for repairing NG (natural killer) wafers; therefore, a solution to the above problem is desired.
SUMMERY OF THE UTILITY MODEL
In view of the above, the present invention is directed to the defects in the prior art, and a primary object of the present invention is to provide a die inspection apparatus, which can effectively solve the problem of low production efficiency caused by the fact that the conventional apparatus cannot provide accurate position information for the NG die rework after the die is packaged.
In order to achieve the purpose, the utility model adopts the following technical scheme:
a wafer detection device comprises a rack, a controller, a sliding frame, a detection carrying platform, a pressing plate and a detection device; the controller is arranged on the frame; the sliding frame can be longitudinally and movably arranged on the rack back and forth, the sliding frame is driven by a first driving mechanism to longitudinally move back and forth, and the first driving mechanism is connected with the controller; the detection carrying platform can be vertically movably arranged on the sliding frame back and forth, the detection carrying platform is driven by a second driving mechanism to vertically move back and forth, and the second driving mechanism is arranged on the sliding frame and connected with the controller; the pressing plate can be transversely movably arranged on the sliding frame back and forth and positioned above the detection carrying platform, the pressing plate is driven by a third driving mechanism to transversely move back and forth, and the third driving mechanism is arranged on the sliding frame and connected with the controller; this detection device sets up in the frame and is located the top of pressfitting board, detection device is including horizontal slide, vertical slide, first camera, the second camera, fourth actuating mechanism and fifth actuating mechanism, this horizontal slide can transversely make a round trip to movably set up in the frame, this vertical slide can vertically make a round trip to movably set up on horizontal slide, this first camera and second camera all set up on vertical slide and connect the controller, this fourth actuating mechanism sets up in the frame and drives the horizontal activity of making a round trip of horizontal slide, fourth actuating mechanism connection director, this fifth actuating mechanism sets up on horizontal slide and drives the vertical activity of making a round trip of vertical slide, fifth actuating mechanism connection director.
As a preferred scheme, the frame comprises a workbench and a portal frame arranged on the workbench, the sliding frame and the first driving mechanism are arranged on the workbench, and the detection device is arranged on the portal frame.
As a preferred scheme, two longitudinal slide rails are arranged on the workbench, and the sliding frame is arranged on the two longitudinal slide rails and moves back and forth along the longitudinal slide rails.
Preferably, the first driving mechanism is a linear motor motion module.
Preferably, the second driving mechanism is a motor driving mechanism.
As a preferred scheme, both sides of the top of the sliding frame are provided with two transverse sliding rails, and the laminated board is arranged on the two transverse sliding rails and moves back and forth along the transverse sliding rails.
Preferably, the third driving mechanism is an air cylinder, and is located beside the transverse slide rail.
Preferably, the fourth driving mechanism is a servo motor screw driving mechanism.
Preferably, the fifth driving mechanism is a motor driving mechanism.
As a preferable scheme, the first camera is a MARK point inspection camera, and the second camera is a wafer inspection camera.
Compared with the prior art, the utility model has obvious advantages and beneficial effects, and specifically, the technical scheme includes that:
the pressing plate fixes the crystal support plate on the detection platform deck and lights the wafer by utilizing the third driving mechanism to drive the pressing plate to move and the second driving mechanism to drive the detection platform deck to move; the lighting state of the wafer is detected through the detection device, and an NG result and a position are given, so that the equipment can check the packaged wafer, accurate position information can be given during repair of the NG wafer, the reject ratio of products is reduced, and the production efficiency is improved.
To more clearly illustrate the structural features and effects of the present invention, the present invention will be described in detail below with reference to the accompanying drawings and specific embodiments.
Drawings
FIG. 1 is an assembled perspective view of the preferred embodiment of the present invention;
FIG. 2 is a partially assembled view of the housing of the preferred embodiment of the present invention;
FIG. 3 is an assembled perspective view of the inspection device according to the preferred embodiment of the present invention;
FIG. 4 is an assembled top view of the inspection apparatus according to the preferred embodiment of the present invention;
FIG. 5 is a partially assembled perspective view of the preferred embodiment of the present invention;
FIG. 6 is a partially assembled elevational view of the preferred embodiment of the utility model.
Description of the figures:
10. frame 11, workstation
12. Portal frame 13, longitudinal slide rail
20. Controller 30 and carriage
31. First driving mechanism 32 and transverse slide rail
40. Detection stage 41 and second drive mechanism
50. Laminated board 51 and third driving mechanism
60. Detection device 61, lateral sliding seat
62. Vertical slide 63, first camera
64. Second camera 65 and fourth driving mechanism
66. And a fifth drive mechanism.
Detailed Description
Referring to fig. 1 to 6, a specific structure of a preferred embodiment of the present invention is shown, which includes a frame 10, a controller 20, a carriage 30, a detection stage 40, a pressing plate 50, and a detection device 60.
The controller 20 is disposed on the frame 10; the sliding frame 30 is longitudinally and reciprocally movably arranged on the frame 10, the sliding frame 30 is driven by a first driving mechanism 31 to longitudinally and reciprocally move, and the first driving mechanism 31 is connected with the controller 20; in this embodiment, the rack 10 includes a worktable 11 and a gantry 12 disposed on the worktable 11, and the carriage 30 and the first driving mechanism 31 are both disposed on the worktable 11; the workbench 11 is provided with two longitudinal slide rails 13, and the sliding frame 30 is arranged on the two longitudinal slide rails 13 and moves back and forth along the longitudinal slide rails 13; the first driving mechanism 31 is a linear motor module, and two lateral sliding rails 32 are disposed on two sides of the top of the sliding frame 30.
The detection carrying platform 40 can be vertically and movably arranged on the sliding frame 30 back and forth, the detection carrying platform 40 is driven by a second driving mechanism 41 to vertically move back and forth, and the second driving mechanism 41 is arranged on the sliding frame 30 and connected with the controller 20; in the present embodiment, the second driving mechanism 41 is a motor driving mechanism.
The pressing plate 50 can be transversely and movably arranged on the sliding frame 30 back and forth and positioned above the detection carrying platform 40, the pressing plate 50 is driven by a third driving mechanism 51 to transversely move back and forth, and the third driving mechanism 51 is arranged on the sliding frame 30 and connected with the controller 20; in this embodiment, the pressing plate 50 is mounted on the two lateral sliding rails 32 and moves back and forth along the lateral sliding rails 32; the third driving mechanism 51 is a cylinder, and is located beside the transverse slide rail 32.
The detection device 60 is arranged on the rack 10 and located above the laminated board 50, the detection device 60 comprises a transverse sliding base 61, a vertical sliding base 62, a first camera 63, a second camera 64, a fourth driving mechanism 65 and a fifth driving mechanism 66, the transverse sliding base 61 can be transversely movably arranged on the rack 10 back and forth, the vertical sliding base 62 can be vertically movably arranged on the transverse sliding base 61 back and forth, the first camera 63 and the second camera 64 are both arranged on the vertical sliding base 62 and connected with the controller 20, the fourth driving mechanism 65 is arranged on the rack 10 and drives the transverse sliding base 61 to transversely move back and forth, the fourth driving mechanism 65 is connected with the controller 20, the fifth driving mechanism 66 is arranged on the transverse sliding base 61 and drives the vertical sliding base 62 to vertically move back and forth, and the fifth driving mechanism 66 is connected with the controller 20; in the present embodiment, the detecting device 60 is disposed on the gantry 12; the first camera 63 is a MARK point inspection camera, and the second camera 64 is a wafer inspection camera; the fourth driving mechanism 65 is a servo motor screw driving mechanism; the fifth drive mechanism 66 is a motor drive mechanism.
The working process of the embodiment is detailed as follows:
firstly, manually placing a PCB or other carrier board with a packaged wafer on a detection carrier 40; then, the pressing plate 50 is driven by the third driving mechanism 51 to move above the detection carrying platform 40, and then the detection carrying platform 40 is driven by the second driving mechanism 41 to move upwards, so that the carrier plate placed on the detection carrying platform 40 is pressed with the pressing plate 50, and the wafer on the carrier plate is lightened; then, the first driving mechanism 31 drives the carriage 30 to move the detection stage 40 under the detection device 60, and finally; a first camera 63 (MARK point inspection camera) is used to position the wafer carrier, and a second camera 64 (wafer inspection camera) is used to inspect the lighting state of the wafer and give NG results and positions.
The design of the utility model is characterized in that: the third driving mechanism is used for driving the pressing plate to move, and the second driving mechanism is used for driving the detection platform deck to move, so that the pressing plate fixes the crystal support plate on the detection platform deck and lights the wafer; the lighting state of the wafer is detected through the detection device, and an NG result and a position are given, so that the equipment can check the packaged wafer, accurate position information can be given during repair of the NG wafer, the reject ratio of products is reduced, and the production efficiency is improved.
The above description is only a preferred embodiment of the present invention, and is not intended to limit the technical scope of the present invention, so that any minor modifications, equivalent changes and modifications made to the above embodiment according to the technical spirit of the present invention are within the technical scope of the present invention.
Claims (10)
1. A kind of crystal element detection equipment, characterized by that: the device comprises a rack, a controller, a sliding frame, a detection carrying platform, a pressing plate and a detection device; the controller is arranged on the frame; the sliding frame can be longitudinally and movably arranged on the rack back and forth, the sliding frame is driven by a first driving mechanism to longitudinally move back and forth, and the first driving mechanism is connected with the controller; the detection carrying platform can be vertically movably arranged on the sliding frame back and forth, the detection carrying platform is driven by a second driving mechanism to vertically move back and forth, and the second driving mechanism is arranged on the sliding frame and connected with the controller; the pressing plate can be transversely movably arranged on the sliding frame back and forth and positioned above the detection carrying platform, the pressing plate is driven by a third driving mechanism to transversely move back and forth, and the third driving mechanism is arranged on the sliding frame and connected with the controller; this detection device sets up in the frame and is located the top of pressfitting board, detection device is including horizontal slide, vertical slide, first camera, the second camera, fourth actuating mechanism and fifth actuating mechanism, this horizontal slide can transversely make a round trip to movably set up in the frame, this vertical slide can vertically make a round trip to movably set up on horizontal slide, this first camera and second camera all set up on vertical slide and connect the controller, this fourth actuating mechanism sets up in the frame and drives the horizontal activity of making a round trip of horizontal slide, fourth actuating mechanism connection director, this fifth actuating mechanism sets up on horizontal slide and drives the vertical activity of making a round trip of vertical slide, fifth actuating mechanism connection director.
2. The wafer inspection apparatus of claim 1, wherein: the frame is including workstation and the portal frame that sets up on the workstation, and this balladeur train and first actuating mechanism all set up on the workstation, and this detection device sets up on the portal frame.
3. The wafer inspection apparatus of claim 2, wherein: the workbench is provided with two longitudinal slide rails, and the sliding frame is arranged on the two longitudinal slide rails and moves back and forth along the longitudinal slide rails.
4. The wafer inspection apparatus of claim 1, wherein: the first driving mechanism is a linear motor motion module.
5. The wafer inspection apparatus of claim 1, wherein: the second driving mechanism is a motor driving mechanism.
6. The wafer inspection apparatus of claim 1, wherein: the top both sides of balladeur train all are provided with two horizontal slide rails, and this pressfitting board is installed and is gone back and forth the activity along horizontal slide rail on two horizontal slide rails.
7. The wafer inspection apparatus of claim 6, wherein: the third driving mechanism is an air cylinder and is positioned beside the transverse sliding rail.
8. The wafer inspection apparatus of claim 1, wherein: the fourth driving mechanism is a servo motor lead screw driving mechanism.
9. The wafer inspection apparatus of claim 1, wherein: the fifth driving mechanism is a motor driving mechanism.
10. The wafer inspection apparatus of claim 1, wherein: the first camera is a MARK point inspection camera and the second camera is a wafer inspection camera.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122409625.1U CN216747961U (en) | 2021-09-30 | 2021-09-30 | Wafer check out test set |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122409625.1U CN216747961U (en) | 2021-09-30 | 2021-09-30 | Wafer check out test set |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216747961U true CN216747961U (en) | 2022-06-14 |
Family
ID=81922615
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202122409625.1U Active CN216747961U (en) | 2021-09-30 | 2021-09-30 | Wafer check out test set |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216747961U (en) |
-
2021
- 2021-09-30 CN CN202122409625.1U patent/CN216747961U/en active Active
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