CN216719901U - Linear lateral conveying mechanism of quartz boat - Google Patents
Linear lateral conveying mechanism of quartz boat Download PDFInfo
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- CN216719901U CN216719901U CN202122954915.4U CN202122954915U CN216719901U CN 216719901 U CN216719901 U CN 216719901U CN 202122954915 U CN202122954915 U CN 202122954915U CN 216719901 U CN216719901 U CN 216719901U
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Abstract
The utility model discloses a linear lateral transmission mechanism of a quartz boat, which comprises a lateral transmission device, a quartz boat positioning device, a boat support positioning device, a movable support, a linear transmission device and a fixed support, wherein the lateral transmission device is used for bearing and driving a quartz boat assembly to horizontally move along the width direction of the quartz boat, the quartz boat positioning device is connected with a vertical end plate in a positioning mode so as to position the quartz boat assembly at a parking position, the boat support positioning device is connected with a horizontal bottom plate in a positioning mode so as to position the quartz boat assembly at the parking position, the movable support is used for installing the lateral transmission device, the quartz boat positioning device and the boat support positioning device, the linear transmission device is used for installing and driving the movable support to horizontally move along the length direction of the quartz boat, and the fixed support is used for installing the linear transmission device. The utility model can carry out omnibearing positioning on the quartz boat and the boat support in the transmission process of the quartz boat, the quartz boat can not be displaced in the transmission process, and the stable reliability of the transmission of the quartz boat is ensured.
Description
Technical Field
The utility model belongs to the field of quartz boat transmission, and particularly relates to a linear lateral transmission mechanism of a quartz boat.
Background
In the solar cell manufacturing process, the silicon wafer needs to be subjected to diffusion, annealing, thermal oxidation and other treatments, and the silicon wafer needs to be carried by a quartz boat to be subjected to process treatment in a diffusion device, an annealing device, a thermal oxidation device and other process devices. The silicon wafers before and after treatment are generally stored in the basket, so that the silicon wafers are carried by a quartz boat and transferred between the process device and the basket. The quartz boats often need to be transported to different heights due to the height differences between the individual process devices and the flower basket. The utility model discloses a chinese utility model patent that the publication number of authorizing is CN207967028U discloses a quartz boat transmission device, including inserting the mascerating machine, a plurality of diffusion stove, detection device and manipulator, above-mentioned manipulator sets up between above-mentioned mascerating machine and a plurality of above-mentioned diffusion stove, be provided with first buffer station and second buffer station between above-mentioned manipulator and the above-mentioned diffusion stove, above-mentioned detection device and the corresponding setting of above-mentioned diffusion stove, above-mentioned detection device includes the slip table, determine module and processing assembly, above-mentioned utility model discloses in grab the slip table of diffusion stove mouth with the quartz boat through the manipulator on, the manipulator is fit for snatching the less part of volume and weight, quartz boat size and weight are great, it has unreliability to snatch the quartz boat through the manipulator.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide a linear lateral transmission mechanism of a quartz boat, which can stably and reliably transmit the quartz boat.
In order to achieve the above purpose, the present invention provides the following technical solutions: the utility model provides a sharp lateral transfer mechanism of quartz boat, quartz boat locates to constitute quartz boat subassembly on the boat holds in the palm, quartz boat erects the end plate including two that are located its both ends and relative setting, the boat holds in the palm including the horizontal bottom plate that is located its bottom, sharp lateral transfer mechanism includes:
the lateral transmission device is used for bearing and driving the quartz boat assembly to horizontally move between an input/output position and a parking position along the width direction of the quartz boat;
the quartz boat positioning device is connected with the vertical end plate in a positioning mode so as to position the quartz boat assembly at the parking position;
the boat support positioning device is connected with the horizontal bottom plate in a positioning mode so as to position the quartz boat assembly at the parking position;
the movable support is used for mounting the lateral conveying device, the quartz boat positioning device and the boat support positioning device;
the linear transmission device is used for mounting and driving the movable support to horizontally move along the length direction of the quartz boat;
and the fixed support is used for installing the linear transmission device.
In an embodiment of the utility model, the quartz boat positioning devices are respectively arranged at two ends of the quartz boat assembly, each quartz boat positioning device comprises a first telescopic part for abutting against the plate surface of the vertical end plate and two second telescopic parts for abutting against two side surfaces of the vertical end plate respectively, the first telescopic part can be telescopic along the length direction of the quartz boat assembly, and the second telescopic part can be telescopic along the width direction of the quartz boat assembly.
In an embodiment of the utility model, the first telescopic part comprises a first motor and an E-shaped bracket, the first motor drives the E-shaped bracket to move through a screw-nut device, a free end of a middle rod of the E-shaped bracket is used as a supporting part, and the two second telescopic parts are respectively installed on free ends of two side rods of the E-shaped bracket.
In one embodiment of the utility model, the length of the middle rod of the E-shaped bracket is smaller than the lengths of the two side rods of the E-shaped bracket.
In one embodiment of the utility model, the second telescopic member is a multi-shaft cylinder.
In one embodiment of the utility model, the side transmission device is arranged to transmit two quartz boat assemblies in parallel, the lateral transmission device also comprises two guide barrier strips which are used for guiding the boat support to move along the width direction of the quartz boat, the two boat support positioning devices are respectively arranged at two sides of the quartz boat assembly and respectively comprise a boat support positioning device A far away from the input and output position and a boat support positioning device B close to the input and output position, the boat support positioning device A comprises a baffle plate used for supporting one side surface of the horizontal bottom plate, the boat support positioning device B comprises a third telescopic part used for supporting the other side surface of the horizontal bottom plate and a lifting part connected with the third telescopic part, the third telescopic component is telescopic along the width direction of the quartz boat assembly, and the lifting component is lifted along the vertical direction.
In one embodiment of the utility model, the lateral transfer device is a belt transfer device.
In one embodiment of the utility model, the third telescopic member is a multi-shaft cylinder.
In one embodiment of the utility model, the lifting member is a multi-axis cylinder.
In an embodiment of the present invention, the linear transmission device includes a slide rail mounted on the fixed bracket and a second motor driving the moving bracket to move linearly, and the second motor drives the moving bracket to move through a lead screw nut device.
Due to the application of the technical scheme, compared with the prior art, the utility model has the following advantages:
1) according to the linear lateral transmission mechanism of the quartz boat, disclosed by the utility model, the quartz boat and the boat support can be positioned in all directions in the process of linear transmission of the quartz boat, the quartz boat cannot be displaced in the process of linear transmission, and the stable reliability of quartz boat transmission is ensured;
2) according to the linear lateral transmission mechanism of the quartz boat, disclosed by the utility model, the quartz boat is positioned through the first telescopic part and the second telescopic part, and the movement of the quartz boat along the length direction and the width direction of the quartz boat is limited;
3) the utility model discloses a linear lateral transmission mechanism of a quartz boat, wherein a first telescopic part comprises a first motor and an E-shaped bracket, and the E-shaped bracket not only can position the quartz boat, but also can be used for installing a second telescopic part;
4) the utility model discloses a linear lateral transmission mechanism of a quartz boat.A middle rod of an E-shaped bracket is shorter than the rods at two sides of the E-shaped bracket, and when the middle rod abuts against a vertical end plate, a second telescopic part just abuts against the side surface of the vertical end plate;
5) according to the linear lateral transmission mechanism of the quartz boat, disclosed by the utility model, the second telescopic part is the multi-shaft cylinder, so that the structure is compact, and the whole size of the whole positioning device of the quartz boat is favorably reduced;
6) according to the linear lateral transmission mechanism of the quartz boat, the boat support is positioned through the guide barrier strip, the baffle plate and the third telescopic part, and the lifting of the boat support positioning device can be realized through the lifting part, so that the quartz boat is avoided when the quartz boat is laterally transmitted;
7) according to the linear lateral transmission mechanism of the quartz boat, disclosed by the utility model, the lateral transmission device is a belt transmission device, the operation is stable and reliable, and the linear lateral transmission mechanism is suitable for transmitting the quartz boat.
8) According to the linear lateral transmission mechanism of the quartz boat, disclosed by the utility model, the third telescopic part and the lifting part are the multi-shaft cylinders, so that the structure is compact, and the whole size of the whole boat support positioning device B is favorably reduced;
9) the linear lateral transmission mechanism of the quartz boat disclosed by the utility model has the advantages that the transmission distance of the linear transmission device is long, and the operation is stable.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this application, illustrate embodiments of the application and, together with the description, serve to explain the application and are not intended to limit the application.
FIG. 1 is a schematic view of an angle of a linear lateral transport mechanism for a quartz boat according to the present disclosure;
FIG. 2 is a partial enlarged view of FIG. 1A;
FIG. 3 is a schematic view of another angle of the linear lateral transport mechanism of the quartz boat of the present disclosure;
fig. 4 is a partial enlarged view of fig. 3B.
Wherein, 1, quartz boat component; 11. a quartz boat; 111. erecting an end plate; 12. a boat support; 121. a horizontal floor; 2. a lateral transfer device; 21. a guide barrier strip; 3. a quartz boat positioning device; 31. a first telescopic member; 311. a first motor; 312. e-shaped brackets; 32. a second telescopic member; 4. a boat support positioning device; 41. A baffle plate; 42. a third telescopic member; 43. a lifting member; 5. moving the support; 6. a linear transmission device; 61. A slide rail; 7. and (3) a silicon wafer.
Detailed Description
The following detailed description of embodiments of the present invention is provided in connection with the accompanying drawings and examples.
It should be noted that the following detailed description is exemplary and is intended to provide further explanation of the disclosure. Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments according to the present application. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, and it should be understood that when the terms "comprises" and/or "comprising" are used in this specification, they specify the presence of stated features, steps, operations, devices, means, and/or combinations thereof, unless the context clearly indicates otherwise. In the present disclosure, terms such as "upper", "lower", "left", "right", "front", "rear", "vertical", "horizontal", "side", "bottom", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only relational terms determined for convenience in describing structural relationships of the parts or elements of the present disclosure, and do not refer to any parts or elements of the present disclosure, and are not to be construed as limiting the present disclosure. In the present disclosure, terms such as "fixedly connected", "connected", and the like are to be understood in a broad sense, and mean either a fixed connection or an integrally connected or detachable connection; may be directly connected or indirectly connected through an intermediate. The specific meanings of the above terms in the present disclosure can be determined on a case-by-case basis by persons skilled in the relevant art or technicians, and are not to be construed as limitations of the present disclosure.
The following is a preferred embodiment of the present invention, but is not intended to limit the scope of the present invention.
Referring to fig. 1 to 4, as shown in the drawings, a linear lateral transfer mechanism for quartz boats, the quartz boat 11 is disposed on a boat support 12 to form a quartz boat assembly 1, the quartz boat 11 includes two vertical end plates 111 disposed at two ends thereof and disposed opposite to each other, the boat support 12 includes a horizontal bottom plate 121 disposed at a bottom thereof, the linear lateral transfer mechanism includes:
the lateral transmission device 2 is used for bearing and driving the quartz boat assembly 1 to horizontally move between an input/output position and a parking position along the width direction of the quartz boat;
a quartz boat positioning device 3, wherein the quartz boat positioning device 3 is positioned and connected with the upright end plate 111 to position the quartz boat assembly 1 at the parking position;
a boat support positioning device 4, wherein the boat support positioning device 4 is connected with the horizontal bottom plate 121 in a positioning manner so as to position the quartz boat assembly 1 at the parking position;
a movable support 5, wherein the movable support 5 is used for mounting the lateral conveying device 2, the quartz boat positioning device 3 and the boat support positioning device 4;
the linear transmission device 6 is used for installing and driving the movable support 5 to horizontally move along the length direction of the quartz boat by the linear transmission device 6;
and a fixing bracket (not shown) for mounting the linear transporter.
Among the above-mentioned technical scheme, can receive the quartz boat subassembly through side direction transmission device on the straight line side direction transmission mechanism along quartz boat width direction, shift the quartz boat through straight line transmission device along quartz boat length direction and carry, the rethread side direction transmission device exports the quartz boat subassembly along quartz boat width direction from straight line side direction transmission mechanism. The quartz boat is positioned by the quartz boat positioning device, and the boat support is positioned by the boat support positioning device. In the quartz boat transmission process, the quartz boat and the boat support can be positioned in all directions, the quartz boat cannot be displaced in the transmission process, and the transmission stability and reliability of the quartz boat are guaranteed.
In a preferred embodiment of the present invention, the two quartz boat positioning devices 3 are respectively disposed at two sides of the lateral conveying device 2, each of the quartz boat positioning devices 3 includes a first telescopic member 31 for abutting against the plate surface of the vertical end plate 111 and two second telescopic members 32 for abutting against two side surfaces of the vertical end plate 111, the first telescopic member 31 can be telescopic along the length direction of the quartz boat assembly, and the second telescopic members 32 can be telescopic along the width direction of the quartz boat assembly. In the foregoing, because it is less to erect the size of end plate, every quartz boat locating component includes a quartz boat locating component, and quartz boat locating component sets up in lateral transmission device's the outside, and quartz boat locating component only needs to have flexible function, can realize can be to the location of erectting the end plate, can dodge the quartz boat subassembly when lateral transmission again. In other embodiments it may also be: only set up first flexible part or only set up the flexible part of second, first flexible part supports with the flexible part of second and holds when erectting the end plate, and first flexible part and the flexible part of second are inlayed and are located in the recess of erectting the end plate, perhaps the recess of first flexible part and the flexible part of second inlays each other with the arch of erectting on the end plate and establishes to play the effect of restriction quartz boat along quartz boat length direction motion and along quartz boat width direction motion.
In a preferred embodiment of this embodiment, the first telescopic member 31 includes a first motor 311 and an E-shaped bracket 312, the first motor 311 drives the E-shaped bracket 312 to move through a screw nut device, a free end of a middle rod of the E-shaped bracket 312 serves as a butting portion, and the two second telescopic members 32 are respectively mounted on free ends of two side rods of the E-shaped bracket 312. In the foregoing, by arranging the first telescopic member to include the E-shaped bracket, both the vertical end plate can be supported, and the second telescopic member can be installed, so that the structure of the whole quartz boat positioning assembly is simplified. When the quartz boat assembly needs to be moved, the first telescopic part is far away from the vertical end plate, and the second telescopic part can be driven to avoid the vertical end plate moving in the lateral direction. In other embodiments it may also be: first flexible part sets up with the flexible part of second separately, and the end plate is erect in order to press from both sides tightly and loosen in the flexible part of second except that needs stretch out and draw back, and the flexible part of second still needs to remove along quartz boat length direction to can dodge lateral motion's the end plate of erectting.
In a preferred embodiment of the present invention, the length of the middle bar of the E-shaped bracket 312 is shorter than the lengths of the both side bars of the E-shaped bracket. In the above, the free end of the intermediate rod is provided with a flexible body to prevent damage caused by hard contact between the first telescopic member and the upright end plate. The length of the middle rod of the E-shaped support is smaller than that of the two side rods of the E-shaped support, and when the middle rod abuts against the vertical end plate, the second telescopic part just abuts against the side face of the vertical end plate. In other embodiments it may also be: the free ends of the E-shaped supports are flush, or the length of the middle rod of the E-shaped supports is larger than that of the two side rods of the E-shaped supports. By changing the shape or concealed installation mode of the second telescopic component, when the middle rod is abutted against the vertical end plate, the second telescopic component is just abutted against the side face of the vertical end plate.
In a preferred embodiment of the present invention, the second telescopic member 32 is a multi-axis cylinder. In the above, the second telescopic part is set to be the multiaxis cylinder, and the multiaxis cylinder is small, and weight is little, and quartz boat locating component compact structure. In other embodiments it may also be: the second telescopic part comprises power equipment and a collision part connected with the power equipment, and the collision part is contacted with the vertical end plate.
In a preferred embodiment of the present invention, the lateral transfer devices 2 are configured to transfer two quartz boat assemblies in parallel, each lateral transfer device 2 is further provided with two guide bars 21 for guiding the boat support 12 to move along the width direction of the quartz boat, the boat support positioning devices 4 are configured as two boat support positioning devices a and B respectively located at two sides of the quartz boat assembly 1, each boat support positioning device a includes a baffle 41 for abutting against one side of the horizontal bottom plate 121, each boat support positioning device B includes a third telescopic member 42 for abutting against the other side of the horizontal bottom plate 121 and a lifting member 43 connected to the third telescopic member 42, the third telescopic member 42 is telescopic along the width direction of the quartz boat assembly, and the lifting member 43 is lifted along the vertical direction. In the above, since the length of the quartz boat assembly is long, the boat support positioning device a is provided in plurality arranged in sequence along the length direction of the quartz boat, and the boat support positioning device B is provided in plurality arranged in sequence along the length direction of the quartz boat. The quartz boat subassembly that both can lead to the blend stop removes, can restrict the quartz boat subassembly again and remove along quartz boat length direction, and above-mentioned baffle is fixed on moving movable support, because the quartz boat subassembly is close to the baffle gradually along quartz boat width direction, so above-mentioned baffle need not stretch out and draw back, and above-mentioned third extensible member is used for loosening and presss from both sides tight horizontal bottom plate, and above-mentioned lifting unit is used for driving the rising of above-mentioned third extensible member and descends, can realize that boat holds in the palm positioner B and dodge the quartz boat subassembly in the lateral shifting. In other embodiments it may also be: the structure of the boat support positioning device A is changed to be the same as that of the boat support positioning device B.
In a preferred embodiment of the present embodiment, the lateral transfer device 2 is a belt transfer device. The belt transmission device in the above is stable in operation, and cannot cause the jolt of the quartz boat assembly. In other embodiments it may also be: the lateral transfer device in the above is a chain transfer assembly.
In a preferred embodiment of the present invention, the third telescopic member 42 is a multi-axis cylinder. The lifting member 43 is a multi-axis cylinder. In the above, a multi-shaft cylinder is adopted, the multi-shaft cylinder has small volume and light weight, and the whole boat support positioning device A has compact structure. In other embodiments it may also be: the third telescopic component comprises a collision component and power equipment for driving the collision component to move, and the collision component is in contact with the horizontal bottom plate. The lifting component is other power equipment, such as a motor.
In an embodiment of the present invention, the linear transmission device 6 includes a slide rail 61 mounted on the fixed bracket and a second motor (not shown) mounted on the fixed bracket and driving the moving bracket 5 to move linearly, and the second motor drives the moving bracket to move through a screw nut device. In the above, long-distance transmission is realized through the motor and the screw rod, and the transmission distance is large. In other embodiments it may also be: the linear transmission device adopts a sliding table cylinder.
The operation of the preferred embodiment of the present invention is described below:
1) the quartz boat assembly is conveyed out from a certain process equipment (such as a diffusion furnace) or other conveying mechanisms along the width direction of the quartz boat, the quartz boat 11 is placed on a boat support 12, and the silicon wafers 7 are placed in the quartz boat 11;
2) the lifting component drives the third telescopic component to descend, the quartz boat assembly is conveyed to the lateral conveying device along the width direction of the quartz boat, and the quartz boat assembly moves from the input and output position to the parking position;
3) the first telescopic component extends out to abut against the vertical end plate, the second telescopic component extends out to abut against the vertical end plate, the lifting component drives the third telescopic component to ascend, and the third telescopic component extends out to abut against the horizontal bottom plate;
4) the linear transmission device drives the lateral transmission device to move along the length direction of the quartz boat.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention, and is provided in the accompanying drawings. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the utility model. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (10)
1. The utility model provides a sharp lateral transfer mechanism of quartz boat, quartz boat locates to constitute quartz boat subassembly on the boat holds in the palm, the quartz boat is including two vertical end plates that are located its both ends and relative setting, the boat holds in the palm including the horizontal bottom plate that is located its bottom, its characterized in that, sharp lateral transfer mechanism includes:
the lateral transmission device is used for bearing and driving the quartz boat assembly to horizontally move between an input/output position and a parking position along the width direction of the quartz boat;
the quartz boat positioning device is connected with the vertical end plate in a positioning mode so as to position the quartz boat assembly at the parking position;
the boat support positioning device is connected with the horizontal bottom plate in a positioning mode so as to position the quartz boat assembly at the parking position;
the movable support is used for mounting the lateral conveying device, the quartz boat positioning device and the boat support positioning device;
the linear transmission device is used for mounting and driving the movable support to horizontally move along the length direction of the quartz boat;
and the fixed support is used for installing the linear transmission device.
2. The linear lateral transport mechanism for quartz boats of claim 1, wherein the quartz boat positioning devices are provided in two numbers respectively located at both ends of the quartz boat assembly, each of the quartz boat positioning devices comprises a first retractable member for abutting against the plate surface of the vertical end plate and two second retractable members for abutting against both side surfaces of the vertical end plate, respectively, the first retractable member being retractable in a length direction of the quartz boat assembly, and the second retractable member being retractable in a width direction of the quartz boat assembly.
3. The linear lateral conveying mechanism of quartz boat of claim 2, wherein the first retractable member comprises a first motor and an E-shaped bracket, the first motor drives the E-shaped bracket to move through a screw nut device, the free end of the middle rod of the E-shaped bracket is used as a holding part, and the two second retractable members are respectively installed on the free ends of the two side rods of the E-shaped bracket.
4. The linear lateral transport mechanism for quartz boats of claim 3 wherein the length of the middle bar of the E-shaped rack is less than the length of the two side bars of the E-shaped rack.
5. The linear lateral transport mechanism for quartz boats of claim 2 wherein the second telescoping member is a multi-axis cylinder.
6. The linear lateral transport mechanism for quartz boats of claim 1, wherein the lateral transport device is configured to transport two of the quartz boat assemblies in parallel, the lateral transport device further comprises two guide bars for guiding the boat support to move along the width direction of the quartz boat, the boat support positioning device is configured as two on two sides of the quartz boat assemblies, respectively, a boat support positioning device A far away from the input/output position and a boat support positioning device B near the input/output position, the boat support positioning device A comprises a baffle for supporting one side of the horizontal bottom plate, the boat support positioning device B comprises a third telescopic member for supporting the other side of the horizontal bottom plate and a lifting member connected with the third telescopic member, the third telescopic member is telescopic along the width direction of the quartz boat assemblies, the lifting component lifts along the vertical direction.
7. The linear lateral transport mechanism for quartz boats of claim 6 wherein the lateral transport device is a belt transport device.
8. The linear lateral transport mechanism for quartz boats of claim 6 wherein the third telescoping member is a multi-axis cylinder.
9. The linear lateral transport mechanism for quartz boats of claim 6 wherein the lifting member is a multi-axis cylinder.
10. The linear lateral conveying mechanism for quartz boats of claim 1, wherein the linear conveying device comprises a slide rail mounted on the fixed support and a second motor mounted on the fixed support and driving the movable support to move linearly, the second motor driving the movable support to move through a screw nut device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122954915.4U CN216719901U (en) | 2021-11-29 | 2021-11-29 | Linear lateral conveying mechanism of quartz boat |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122954915.4U CN216719901U (en) | 2021-11-29 | 2021-11-29 | Linear lateral conveying mechanism of quartz boat |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216719901U true CN216719901U (en) | 2022-06-10 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202122954915.4U Active CN216719901U (en) | 2021-11-29 | 2021-11-29 | Linear lateral conveying mechanism of quartz boat |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216719901U (en) |
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2021
- 2021-11-29 CN CN202122954915.4U patent/CN216719901U/en active Active
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