CN211700217U - Feeding mechanism of wafer basket cleaning equipment - Google Patents
Feeding mechanism of wafer basket cleaning equipment Download PDFInfo
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- CN211700217U CN211700217U CN202021007230.8U CN202021007230U CN211700217U CN 211700217 U CN211700217 U CN 211700217U CN 202021007230 U CN202021007230 U CN 202021007230U CN 211700217 U CN211700217 U CN 211700217U
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- fixing seat
- wafer basket
- fixing
- wafer
- workbench
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Abstract
The application relates to a wafer basket cleaning equipment feed mechanism includes: the workbench is provided with a first fixed seat, a second fixed seat and a third fixed seat, the first fixed seat, the second fixed seat and the third fixed seat are used for fixing the wafer basket, and a abdicating groove is formed in the workbench between the first fixed seat and the second fixed seat and between the second fixed seat and the third fixed seat, and the width of the abdicating groove is smaller than that of the wafer basket; the first transmission assembly and the second transmission assembly are located below the workbench and used for transporting the wafer basket from the first fixing seat to the second fixing seat and from the second fixing seat to the third fixing seat. The wafer basket moves on the workbench, the moving transmission assembly moves below the workbench, the transmission assembly penetrates through the workbench to move in a mode of supporting the wafer basket, and meanwhile, the width of the abdicating groove is smaller than that of the wafer basket, so that the wafer basket can be completely prevented from falling down from the abdicating groove, and the risk of wafer damage is reduced.
Description
Technical Field
The application belongs to the technical field of cleaning equipment, and particularly relates to a feeding mechanism of wafer basket cleaning equipment.
Background
The wafer cleaning is usually to place the wafer in a wafer basket, and then the wafer basket is conveyed to various cleaning devices by a conveying mechanism for cleaning, and a feeding mechanism of the wafer basket cleaning device is used for conveying the wafer basket to a cleaning station.
The operation of the feeding mechanism of the existing wafer basket cleaning equipment is usually carried out by a hoisting mechanism positioned above a workbench, and the wafer basket acts under the condition that the bottom is not fixed, so that the falling risk is easy to occur, and further the wafer is damaged.
SUMMERY OF THE UTILITY MODEL
The to-be-solved technical problem of the utility model is: for solving the not enough among the prior art to provide a wafer basket cleaning equipment feed mechanism that the risk is low is damaged to the wafer.
The utility model provides a technical scheme that its technical problem adopted is:
a wafer basket cleaning equipment feed mechanism, comprising:
the worktable is provided with a first fixed seat, a second fixed seat and a third fixed seat which are used for fixing the wafer basket, wherein the first fixed seat, the second fixed seat and the third fixed seat are arranged in an L shape, a abdicating groove is formed on the worktable between the first fixed seat and the second fixed seat as well as between the second fixed seat and the third fixed seat, and the width of the abdicating groove is smaller than that of the wafer basket;
the first transmission assembly is positioned below the workbench and used for transmitting the wafer basket from the first fixing seat to the second fixing seat;
and the second transmission assembly is positioned below the workbench and used for transporting the wafer basket from the second fixing seat to the third fixing seat.
Preferably, the utility model discloses a wafer basket cleaning equipment feed mechanism, first fixing base, second fixing base and third fixing base are 4 fixed blocks that the rectangle was arranged, the dog of fixed block for being L shape.
Preferably, the utility model discloses a wafer basket cleaning equipment feed mechanism, the inner wall of dog is the inclined plane.
Preferably, the utility model discloses a wafer basket cleaning equipment feed mechanism, the groove of stepping down include two parallel transverse grooves and with a vertical groove of two parallel transverse groove intercommunications, wherein two first fixing bases are located the one end of transverse groove respectively, the second fixing base is located the junction in transverse groove and vertical groove, the third fixing base is located vertical groove end.
Preferably, the utility model discloses a wafer basket cleaning equipment feed mechanism, first transmission assembly and second transmission assembly all include slide rail, slider, linear motion driving piece, lift driving piece, kicking block, and the slide rail is arranged along the transverse groove or the longitudinal groove in the groove of stepping down, are provided with the slider on the slide rail, and linear motion driving piece drive slider is at the slide rail motion, be provided with the kicking block on the slider, lift driving piece drive kicking block goes up and down in order to jack up or put down first fixing base, the wafer basket on second fixing base and the third fixing base.
Preferably, the utility model discloses a wafer basket cleaning equipment feed mechanism, the both sides limit of wafer basket has the fixed slot of a plurality of parallels, and the wafer is fixed in the fixed slot.
Preferably, the feeding mechanism of the wafer basket cleaning equipment of the present invention further comprises an induction component disposed below the worktable and located at the bottom of the third fixing seat for inducing the number of wafers in the wafer basket;
the sensing assembly comprises an inclined sliding block, a plurality of parallel sensing teeth and guiding teeth, the sensing teeth are located on the top end of the sliding block, when the guiding teeth ascend, the guiding teeth can extend into positioning grooves formed in the bottoms of the inner walls of wafer baskets located on the third fixing seat, wafers placed in the fixing grooves can enter gaps between the two adjacent sensing teeth, and photoelectric sensors are arranged on the side walls of the sensing teeth and used for sensing whether wafers exist in the gaps between the adjacent sensing teeth or not.
Compared with the prior art, the method has the following advantages:
1. the wafer basket moves on the workbench, the moving transmission assembly moves below the workbench, the transmission assembly penetrates through the workbench to move in a mode of supporting the wafer basket, and meanwhile, the width of the abdicating groove is smaller than that of the wafer basket, so that the wafer basket can be completely prevented from falling down from the abdicating groove, and the risk of wafer damage is reduced.
Drawings
The technical solution of the present application is further explained below with reference to the drawings and the embodiments.
FIG. 1 is a schematic view of a one-directional feed mechanism of a wafer basket cleaning apparatus according to an embodiment of the present disclosure;
FIG. 2 is a schematic structural view of another direction of a feeding mechanism of the wafer basket cleaning apparatus according to the embodiment of the present application;
FIG. 3 is a schematic structural diagram of an inductive component according to an embodiment of the present application;
FIG. 4 is a diagram illustrating a wafer basket mounted on a holder according to an embodiment of the present invention;
FIG. 5 is a schematic structural view of a wafer basket according to an embodiment of the present disclosure;
fig. 6 is a schematic structural view of the sensing teeth and the guide teeth in the embodiment of the present application.
The reference numbers in the figures are:
1, a workbench;
2 a first transmission assembly;
3 a second transmission assembly;
4, an induction component;
9 a wafer basket;
11 a first fixed seat;
12 a second fixed seat;
13 a third fixed seat;
14 a yielding slot;
40 a tilt slider;
41 sensing teeth;
42 guide teeth;
44 an adjustment block;
a 51 stop block;
52, a bevel surface;
91 fixing the groove;
92, a wafer;
93 positioning the grooves.
Detailed Description
It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict.
In the description of the present application, it is to be understood that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are used in the orientation or positional relationship indicated in the drawings for convenience in describing the present application and for simplicity in description, and are not intended to indicate or imply that the referenced devices or elements must have a particular orientation, be constructed in a particular orientation, and be operated in a particular manner, and are not to be considered limiting of the scope of the present application. Furthermore, the terms "first", "second", etc. are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature. In the description of the invention, the meaning of "a plurality" is two or more unless otherwise specified.
In the description of the present application, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art through specific situations.
The technical solutions of the present application will be described in detail below with reference to the accompanying drawings in conjunction with embodiments.
Example 1
The present embodiment provides a feeding mechanism of a wafer basket cleaning apparatus, as shown in fig. 1, including:
the wafer basket fixing device comprises a workbench 1, wherein the workbench 1 is provided with a first fixed seat 11, a second fixed seat 12 and a third fixed seat 13 which are used for fixing a wafer basket 9, the first fixed seat 11, the second fixed seat 12 and the third fixed seat 13 are arranged in an L shape, and a abdicating groove 14 is formed in the workbench 1 between the first fixed seat 11 and the second fixed seat 12 and between the second fixed seat 12 and the third fixed seat 13, and the abdicating groove 14 is also arranged in an L shape; the width of the abdicating groove 14 is smaller than the width of the wafer basket;
the first transmission assembly 2 is positioned below the workbench 1 and used for transmitting the wafer basket 9 from the first fixed seat 11 to the second fixed seat 12;
the second transmission assembly 3 is positioned below the workbench 1 and used for transporting the wafer basket 9 from the second fixed seat 12 to the third fixed seat 13;
the sensing component 4, as shown in fig. 5, is disposed below the worktable 1 and located at the third fixing seat 13 for sensing the number of the wafers 92 in the wafer basket 9.
The third fixing seat 13 is a discharging position, the second fixing seat 12 is a temporary storage position, the first fixing seat 11 is a feeding position, the wafer basket 9 is manually conveyed to the first fixing seat 11, the first conveying assembly 2 conveys the wafer basket 9 to the second fixing seat 12 from the first fixing seat 11, the second conveying assembly 3 conveys the wafer basket 9 to the third fixing seat 13 from the second fixing seat 12, and the wafer basket 9 is moved away at the third fixing seat 13.
Further, as shown in fig. 3, the first fixing seat 11, the second fixing seat 12 and the third fixing seat 13 are 4 fixing blocks arranged in a rectangular shape, and each fixing block includes an L-shaped stopper 51.
Further preferably, the inner wall of the stopper 51 is a slope 52. The wafer basket 9 can be conveniently slid into the space formed by the 4 fixing blocks by the inclined surface 52.
The wafer basket 9 has a plurality of parallel fixing grooves 91 on both sides thereof, and the wafers 92 are fixed in the fixing grooves 91.
Further, the abdicating groove 14 comprises two parallel transverse grooves and a longitudinal groove communicated with the two parallel transverse grooves, wherein the two first fixing seats 11 are respectively located at one end of the transverse grooves, the second fixing seat 12 is located at the joint of the transverse grooves and the longitudinal groove, and the third fixing seat 13 is located at the tail end of the longitudinal groove.
The utility model discloses a wafer basket 9, including wafer basket 9 bottom fretwork, inner wall bottom shaping have a constant head tank 93, and constant head tank 93 sets up with the fixed slot 91 one-to-one of fixed wafer, response subassembly 4 includes slope sliding block 40 to and be located the response tooth 41 and the direction tooth 42 of a plurality of parallels on sliding block top, response tooth 41, direction tooth 42 when ascending, can stretch into the constant head tank 93 that is located wafer basket 9 on third fixing base 13, place the wafer in fixed slot 91 this moment and can get into the clearance of two adjacent response teeth 41, be provided with photoelectric sensor on the lateral wall of response tooth 41, can respond to whether there is the wafer, and the position according to the position identification wafer of response tooth 41.
When slope sliding block 40 moved to the bottom, can form the abdicating to second transmission assembly 3, prevent to cause the influence to the motion of second transmission assembly 3 motion, when needs fix a position wafer basket 9 on third fixing base 13, when slope sliding block 40 moved the top, can fix a position through direction tooth 42 earlier, the existence of response tooth 41 response wafer again.
The side of the front end of the guide tooth 42 is a rounded tip to facilitate the guide tooth 42 to slide into the positioning groove 93 in a precise alignment.
The sensing teeth 41 and the guiding teeth 42 are both disposed on the adjusting block 44 (as shown in fig. 3) at the top end of the tilt slider 40, and the adjusting block 44 can slide freely within a certain distance, the free sliding distance is generally one fourth of the distance between two adjacent positioning grooves 93, the adjusting block 44 can tolerate the position error of the wafer cassette within a certain range, and the guiding teeth 42 can conveniently extend into the positioning grooves 93.
In light of the foregoing description of the preferred embodiments according to the present application, it is to be understood that various changes and modifications may be made without departing from the spirit and scope of the invention. The technical scope of the present application is not limited to the contents of the specification, and must be determined according to the scope of the claims.
Claims (7)
1. A wafer basket cleaning equipment feed mechanism, characterized by includes:
the wafer basket structure comprises a workbench (1), wherein the workbench (1) is provided with a first fixing seat (11), a second fixing seat (12) and a third fixing seat (13) which are used for fixing a wafer basket (9), the first fixing seat (11), the second fixing seat (12) and the third fixing seat (13) are arranged in an L shape, a abdicating groove (14) is formed in the workbench (1) between the first fixing seat (11) and the second fixing seat (12) and between the second fixing seat (12) and the third fixing seat (13), and the width of the abdicating groove (14) is smaller than that of the wafer basket;
the first transmission assembly (2) is positioned below the workbench (1) and used for transporting the wafer basket (9) from the first fixing seat (11) to the second fixing seat (12);
and the second transmission assembly (3) is positioned below the workbench (1) and is used for transporting the wafer basket (9) from the second fixed seat (12) to the third fixed seat (13).
2. The feeding mechanism of the wafer basket cleaning device according to claim 1, wherein the first fixing seat (11), the second fixing seat (12) and the third fixing seat (13) are 4 fixing blocks which are arranged in a rectangular shape, and the fixing blocks are L-shaped stoppers (51).
3. The wafer basket cleaning apparatus feed mechanism of claim 2 wherein the inner wall of the stop (51) is a ramp (52).
4. The feeding mechanism of wafer basket cleaning equipment according to claim 1, characterized in that the receding groove (14) comprises two parallel transverse grooves and a longitudinal groove communicated with the two parallel transverse grooves, wherein two first fixing seats (11) are respectively located at one end of the transverse grooves, a second fixing seat (12) is located at the joint of the transverse grooves and the longitudinal groove, and a third fixing seat (13) is located at the tail end of the longitudinal groove.
5. The feeding mechanism of the wafer basket cleaning device according to claim 1, wherein the first conveying assembly (2) and the second conveying assembly (3) each comprise a slide rail, a slide block, a linear motion driving member, a lifting driving member and a top block, the slide rail is arranged along a transverse groove or a longitudinal groove of the abdicating groove (14), the slide rail is provided with the slide block, the linear motion driving member drives the slide block to move on the slide rail, the slide block is provided with the top block, and the lifting driving member drives the top block to lift so as to jack up or put down the wafer basket (9) on the first fixing seat (11), the second fixing seat (12) and the third fixing seat (13).
6. The wafer basket cleaning apparatus feeding mechanism according to claim 1, wherein the wafer basket (9) has a plurality of parallel fixing grooves (91) on both sides, and the wafers (92) are fixed in the fixing grooves (91).
7. The feeding mechanism of the wafer basket cleaning equipment according to claim 1, characterized by further comprising a sensing assembly (4) arranged below the worktable (1) and at the bottom of the third fixed seat (13) for sensing the number of wafers (92) in the wafer basket (9);
the sensing assembly (4) comprises an inclined sliding block (40), a plurality of parallel sensing teeth (41) and guide teeth (42) which are positioned at the top end of the sliding block, when the guide teeth (42) ascend, the guide teeth can extend into positioning grooves (93) which are positioned at the bottom of the inner wall of a wafer basket (9) on a third fixing seat (13), at the moment, a wafer placed in a fixing groove (91) can enter a gap between every two adjacent sensing teeth (41), and a photoelectric sensor is arranged on the side wall of each sensing tooth (41) and used for sensing whether a wafer exists in the gap between every two adjacent sensing teeth (41).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021007230.8U CN211700217U (en) | 2020-06-04 | 2020-06-04 | Feeding mechanism of wafer basket cleaning equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021007230.8U CN211700217U (en) | 2020-06-04 | 2020-06-04 | Feeding mechanism of wafer basket cleaning equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211700217U true CN211700217U (en) | 2020-10-16 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202021007230.8U Active CN211700217U (en) | 2020-06-04 | 2020-06-04 | Feeding mechanism of wafer basket cleaning equipment |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113171933A (en) * | 2021-03-08 | 2021-07-27 | 厦门普诚科技有限公司 | Move a set mechanism and go up unloading point gum machine automatically |
| CN113257730A (en) * | 2021-03-29 | 2021-08-13 | 无锡亚电智能装备有限公司 | Semiconductor wafer cleaning device |
-
2020
- 2020-06-04 CN CN202021007230.8U patent/CN211700217U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113171933A (en) * | 2021-03-08 | 2021-07-27 | 厦门普诚科技有限公司 | Move a set mechanism and go up unloading point gum machine automatically |
| CN113257730A (en) * | 2021-03-29 | 2021-08-13 | 无锡亚电智能装备有限公司 | Semiconductor wafer cleaning device |
| CN113257730B (en) * | 2021-03-29 | 2022-10-18 | 无锡亚电智能装备有限公司 | Semiconductor wafer cleaning device |
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