CN216698310U

CN216698310U - Flower basket support for semiconductor diffusion furnace

Info

Publication number: CN216698310U
Application number: CN202122879392.1U
Authority: CN
Inventors: 程宪良
Original assignee: Wuxi Nuolaid Intelligent Technology Co ltd
Current assignee: Wuxi Nuolaid Intelligent Technology Co ltd
Priority date: 2021-11-23
Filing date: 2021-11-23
Publication date: 2022-06-07
Anticipated expiration: 2031-11-23

Abstract

The utility model provides a flower basket support for a semiconductor diffusion furnace, which is used for adapting to the conditions that 6-inch and 8-inch wafer production can be carried out simultaneously; comprises a lower fixed bracket 1, a central bracket 2 and a sensor bracket 3; the lower fixing support 1 is provided with a T-shaped groove 11 for matching and fixing the first flower basket 4 or the second flower basket 5; the first flower basket 4 is 6 inches; the second flower basket is 8 inches; the sensor supports 3 are arranged at the edges of two sides of the T-shaped groove 11 and used for detecting whether a flower basket is arranged above the sensor supports; the central support 4 is arranged at the folding angles on the two sides of the T-shaped groove 11 and used for positioning dots of a 6-inch flower basket; the utility model has the beneficial effects that: this basket of flowers support body adopts PTFE to make, and the cleanliness factor is high, and the sensor response is sensitive, and the mounted position matches with former factory, and the inside aluminium preparation that adopts of center support, intensity is high, and outside spraying PTFE to prevent basket of flowers and metal support direct contact.

Description

Flower basket support for semiconductor diffusion furnace

Technical Field

The utility model mainly relates to the technical field of semiconductor diffusion furnaces, in particular to a flower basket support for a semiconductor diffusion furnace.

Background

With the rapid development of science and technology, customers have diversified demands for products, and in a diffusion furnace, one machine is also required to produce wafers with various sizes.

The flower basket support plays a role in serving as a flower basket working platform and monitoring in the equipment. The existing diffusion furnace TEL 853V can only produce wafers (wafers) of 8 inches, and when the wafers (wafers) of 6 inches need to be produced, the original flower basket support cannot be used.

SUMMERY OF THE UTILITY MODEL

In view of the above-mentioned drawbacks of the prior art, the present invention provides a basket support for a semiconductor diffusion furnace, which is adapted to the situation where 6-inch and 8-inch wafer production can be performed simultaneously.

The utility model provides a flower basket support for a semiconductor diffusion furnace, which comprises a lower fixing support 1, a central support 2 and a sensor support 3, wherein the lower fixing support is fixedly connected with the lower fixing support;

the lower fixing support 1 is provided with a T-shaped groove 11 for matching and fixing the first basket of flowers 4 or the second basket of flowers 5; the first flower basket 4 is 6 inches; the second flower basket is 8 inches;

the sensor supports 3 are arranged at the edges of two sides of the T-shaped groove 11 and used for detecting whether a flower basket is arranged above the sensor supports; and the folding corners on two sides of the T-shaped groove 11 are provided with a central support 2 for positioning dots on a 6-inch flower basket.

Preferably, the sensor bracket 3 is provided with three groups which are respectively arranged at two sides of the three T-shaped grooves; the sensor bracket 3 is strip-shaped; two ends are used for fixing with the lower fixing frame 1.

Preferably, the two sensor holders 3 located at both ends of the lower fixing frame 1 are block-shaped.

Preferably, the central support 2 is arranged symmetrically.

Preferably, the material of the central support 2 is aluminum.

Preferably, the outer surface of the lower fixing support 1 is coated with a PTFE material.

The utility model has the beneficial effects that: this basket of flowers support body adopts PTFE to make, and the cleanliness factor is high, and the sensor response is sensitive, and the mounted position matches with former factory, and the inside aluminium preparation that adopts of center support, intensity is high, and outside spraying PTFE to prevent basket of flowers and metal support direct contact, specially for 6 very little basket of flowers designs of TEL 853V board.

Drawings

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is a schematic view of a lower fixing frame;

FIG. 3 is a top view of the lower fixing frame;

in the figure, the position of the upper end of the main shaft,

1. a lower fixed bracket 11 and a T-shaped groove; 2. a central support; 3. a sensor holder; 4. A first flower basket; 5. a second flower basket.

Detailed Description

The present invention will now be described in detail with reference to the drawings, which are given by way of illustration and explanation only and should not be construed to limit the scope of the present invention in any way.

the sensor supports 3 are arranged at the edges of two sides of the T-shaped groove 11 and used for detecting whether a flower basket is arranged above the sensor supports; and the folding angles at the two sides of the T-shaped groove 11 are provided with a central support 2 lower fixing support for positioning dots of a 6-inch flower basket.

The flower basket is placed on the flower basket support, namely the lower fixing frame 1 after being grabbed by a mechanical hand, and needs to be accurately positioned. 8 cun basket of flowers utilizes central point to fix a position, and 6 cun baskets of flowers need the dot location, so set up central support 2 and fix a position 6 cun baskets of flowers.

In this embodiment, preferably, the sensor bracket 3 is provided with three groups, which are respectively arranged on two sides of the three T-shaped grooves; the sensor bracket 3 is strip-shaped; two ends are used for fixing with the lower fixing frame 1.

In the present embodiment, it is preferable that the two sensor holders 3 located at both ends of the lower fixing frame 1 have a block shape.

Set up above-mentioned structure, on the one hand the convenience is fixed, and on the other hand practices thrift the space.

In the present embodiment, the central support 2 is preferably arranged symmetrically.

Set up above-mentioned structure, the convenience is carried out accurate location to 6 cun baskets.

In this embodiment, the material of the central support 2 is preferably aluminum.

Set up above-mentioned structure, intensity is high and the precision, and there is not metal ion in the surface to spill over.

In the embodiment, preferably, the outer surface of the lower fixing support 1 is coated with PTFE material.

The structure is arranged to protect the flower basket so as to prevent the flower basket from directly contacting the metal bracket.

The working principle is as follows: after the flower basket is grabbed by robotic arm, put on lower fixed bolster 1, equipment just begins to detect whether have the flower basket on the tool. The sensor bracket 4 is provided with a sensor probe for detecting whether a flower basket is arranged above the sensor bracket.

It should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience in describing the present invention and simplifying the description, but do not indicate or imply that the referred devices or elements must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

The above-described embodiments of the present invention do not limit the scope of the present invention. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the scope of the claims of the present invention.

Claims

1. A flower basket support for a semiconductor diffusion furnace comprises a lower fixing support (1), a central support (2) and a sensor support (3);

it is characterized in that the preparation method is characterized in that,

the lower fixing support (1) is provided with a T-shaped groove (11) for matching and fixing the first basket (4) or the second basket (5); the size of the first flower basket (4) is 6 inches; the second flower basket is (8) inch;

the sensor supports (3) are arranged at the edges of two sides of the T-shaped groove (11) and used for detecting whether a flower basket is arranged above the sensor supports; and the folding corners on the two sides of the T-shaped groove (11) are provided with a central support (2) for positioning dots of a 6-inch flower basket.

2. The basket support for a semiconductor diffusion furnace according to claim 1, wherein: the sensor bracket (3) is provided with three groups which are respectively arranged at two sides of the three T-shaped grooves; the sensor support (3) is strip-shaped, and two ends of the sensor support are used for being fixed with the lower fixing support (1).

3. The basket support for a semiconductor diffusion furnace according to claim 2, wherein: the two sensor brackets (3) positioned at the two ends of the lower fixed bracket (1) are in a block shape.

4. The basket support for a semiconductor diffusion furnace as claimed in claim 3, wherein: the central support (2) is symmetrically arranged.

5. The basket support for a semiconductor diffusion furnace according to claim 4, wherein: the central support (2) is made of aluminum.

6. The basket support for a semiconductor diffusion furnace as claimed in claim 5, wherein: the outer surface of the lower fixing support (1) is coated with PTFE material.