CN216511458U

CN216511458U - Air-float platform device

Info

Publication number: CN216511458U
Application number: CN202123233124.9U
Authority: CN
Inventors: 朱建华; 曹爱文; 鲁国涛
Original assignee: Beijing Boshi Electronic Technology Co ltd
Current assignee: Hefei Boshi Electronic Technology Co.,Ltd.
Priority date: 2021-12-21
Filing date: 2021-12-21
Publication date: 2022-05-13
Anticipated expiration: 2031-12-21

Abstract

The utility model relates to the technical field of conveying devices, in particular to an air-floating platform device. The air-bearing platform device comprises: the workbench is arranged below the workpiece, and an air supply hole is formed in the workbench; the gas supply main pipe extends along the conveying path direction of the workpiece and is formed below the workbench, and a branch hole is formed in the side wall of the gas supply main pipe; and the gas supply branch pipe is provided with a gas inlet communicated with the branch hole and a gas outlet communicated with the gas supply hole, and gas can be conveyed to the bottom end of the workpiece through the workbench so as to suspend the workpiece. The gas supply pipeline disclosed by the utility model is simple in layout, small in size, uniform in gas supply, low in preparation cost, good in sealing property and strong in applicability, and can improve the stability and safety reliability of workpieces in a suspension state.

Description

Air-float platform device

Technical Field

The utility model relates to the technical field of conveying devices, in particular to an air floating platform device.

Background

In some product manufacturing industries, such as display screen or semiconductor manufacturing industries, due to the characteristics of precision and the like of products, the requirements on cleanliness and stability of the conveying process are high, and therefore a non-contact conveying mode, such as an air floating platform, is generally adopted. When the suspension force is balanced with the gravity of the workpiece, the workpiece can be in a stable suspension state. The air floatation conveying mode can avoid direct contact with the workpiece, scratch is avoided, and the cleanliness of the workpiece can be ensured. The existing air floatation conveying mechanism has the problems of large volume, high preparation cost, complex layout of an air supply pipeline, uneven air supply and the like. Therefore, the stability and reliability of the air floatation conveying mechanism are improved, the cost is saved, and the problem to be solved urgently is solved.

SUMMERY OF THE UTILITY MODEL

In view of this, an object of the present application is to provide an air floating platform device for making a workpiece in a floating state, so as to solve the problems of large volume, complex layout of an air supply pipeline, uneven air supply, and the like of the conventional air floating conveying mechanism.

The utility model provides an air-floating platform device, which is used for enabling a workpiece to be in a suspension state, wherein the air-floating platform device comprises:

the workbench is arranged below the workpiece, and an air supply hole is formed in the workbench;

the gas supply main pipe extends along the conveying path direction of the workpiece and is formed below the workbench, and a branch hole is formed in the side wall of the gas supply main pipe;

and the gas supply branch pipe is provided with a gas inlet communicated with the branch hole and a gas outlet communicated with the gas supply hole, and gas can be conveyed to the bottom end of the workpiece through the workbench so as to suspend the workpiece.

Preferably, the inside of the work table forms a hollow structure;

the air supply hole is correspondingly formed in the upper surface of the workbench and penetrates through the hollow structure; and the air supply hole is correspondingly formed on the lower surface of the workbench and penetrates through the hollow structure, so that the upper air supply hole is communicated with the lower air supply hole.

Preferably, the tail end of the main gas supply pipe is formed into a closed end, and the initial end is formed into a gas inlet.

Preferably, the branch holes are symmetrically arranged on two sides of the main gas supply pipe along the extension direction of the main gas supply pipe;

the penetrating directions of the symmetrically arranged branch holes are parallel to the workbench;

the symmetrically arranged branch holes are arranged in multiple groups at equal intervals along the extension direction of the gas supply main pipe.

Preferably, the gas supply branch pipes are arranged in one-to-one correspondence with the branch holes;

the two gas outlets of the two gas supply branch pipes in pair are arranged symmetrically to the gas supply main pipe.

Preferably, the air supply branch pipe is formed by sequentially connecting a plurality of branch pipe parts, and an adapter part with a bending structure is formed between every two adjacent branch pipe parts; the adaptor can communicate in the air feed divides the pipe to change gaseous direction of delivery.

Preferably, the air supporting platform device is further including extending and forming in the temperature detection pipe portion on the lateral wall of the air supply main pipe, the temperature detection pipe portion is connected with the temperature detection device to realize the detection of the gas temperature of the pipeline.

Preferably, the air supporting platform device further comprises a pressure detection pipe part formed by extending on the side wall of the air supply main pipe, and the pressure detection pipe part is connected with the pressure detection device so as to realize the detection of the gas pressure of the pipeline.

Preferably, the air floating platform device further comprises a sealing member formed at the pipeline connection position.

Preferably, the air floating platform device further comprises a regulating member installed at the air inlet to regulate the air flow.

Compared with the prior art, the utility model has the beneficial effects that:

the air floating platform device has the advantages of small occupied space, simple pipeline layout, capability of realizing uniform air supply, cost saving, and certain stability and reliability.

In order to make the aforementioned objects, features and advantages of the present application more comprehensible, preferred embodiments accompanied with figures are described in detail below.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.

FIG. 1 is a schematic structural diagram of an air bearing platform assembly according to an embodiment of the present invention;

FIG. 2 is a schematic structural diagram of an air bearing stage apparatus according to an embodiment of the present invention from another perspective.

Icon:

10-a workbench, 11-a gas supply hole, 111-an upper gas supply hole, 112-a lower gas supply hole, 20-a main gas supply pipe, 21-a branch hole, 22-a closed end, 23-a gas inlet, 30-a branch gas supply pipe, 31-a gas inlet, 32-a gas outlet, 33-a branch pipe, 34-a connector, 40-a temperature detection pipe, 50-a pressure detection pipe, 60-a sealing element and 70-a regulating element.

Detailed Description

The following detailed description is provided to assist the reader in obtaining a thorough understanding of the methods, devices, and/or systems described herein. However, various changes, modifications, and equivalents of the methods, apparatus, and/or systems described herein will be apparent to those skilled in the art in view of the disclosure of the present application. For example, the order of operations described herein is merely an example, which is not limited to the order set forth herein, but rather, variations may be made in addition to operations which must occur in a particular order, which will be apparent upon understanding the disclosure of the present application. Moreover, descriptions of features known in the art may be omitted for the sake of clarity and conciseness.

The features described herein may be embodied in different forms and should not be construed as limited to the examples described herein. Rather, the examples described herein have been provided merely to illustrate some of the many possible ways to implement the methods, devices, and/or systems described herein that will be apparent after understanding the disclosure of the present application.

Throughout the specification, when an element (such as a layer, region, or substrate) is described as being "on," "connected to," coupled to, "over," or "overlying" another element, it may be directly "on," "connected to," coupled to, "over," or "overlying" the other element, or one or more other elements may be present therebetween. In contrast, when an element is referred to as being "directly on," "directly connected to," directly coupled to, "directly over" or "directly overlying" another element, there may be no intervening elements present.

As used herein, the term "and/or" includes any one of the associated listed items and any combination of any two or more of the items.

Although terms such as "first", "second", and "third" may be used herein to describe various elements, components, regions, layers or sections, these elements, components, regions, layers or sections should not be limited by these terms. Rather, these terms are only used to distinguish one element, component, region, layer or section from another element, component, region, layer or section. Thus, a first element, component, region, layer or section referred to in the examples described herein may be termed a second element, component, region, layer or section without departing from the teachings of the examples.

For ease of description, spatial relationship terms such as "above … …," "upper," "below … …," and "lower" may be used herein to describe one element's relationship to another element as illustrated in the figures. Such spatial relationship terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, elements described as "above" or "upper" relative to other elements would then be oriented "below" or "lower" relative to the other elements. Thus, the term "above … …" includes both an orientation of "above … …" and "below … …" depending on the spatial orientation of the device. The device may also be otherwise oriented (e.g., rotated 90 degrees or at other orientations) and the spatially relative terms used herein should be interpreted accordingly.

The terminology used herein is for the purpose of describing various examples only and is not intended to be limiting of the disclosure. The singular forms also are intended to include the plural forms as well, unless the context clearly indicates otherwise. The terms "comprises," "comprising," and "having" specify the presence of stated features, quantities, operations, elements, components, and/or combinations thereof, but do not preclude the presence or addition of one or more other features, quantities, operations, components, elements, and/or combinations thereof.

Variations from the shapes of the illustrations as a result, for example, of manufacturing techniques and/or tolerances, may be expected. Thus, the examples described herein are not limited to the particular shapes shown in the drawings, but include changes in shape that occur during manufacturing.

The features of the examples described herein may be combined in various ways that will be apparent after understanding the disclosure of the present application. Further, while the examples described herein have a variety of configurations, other configurations are possible, as will be apparent after understanding the disclosure of the present application.

FIG. 1 is a schematic structural diagram of an air bearing platform assembly according to an embodiment of the present invention; FIG. 2 is a schematic structural diagram of an air bearing stage apparatus according to an embodiment of the present invention from another perspective.

The air floating platform device of the present embodiment includes a working platform 10, a main air supply pipe 20, and a branch air supply pipe 30.

Hereinafter, specific structures of the above-described components of the air floating platform device according to the present embodiment will be described.

In some product manufacturing processes, such as glass substrates, the product itself has high requirements for cleanliness and stability of the conveying process, so that a non-contact conveying manner is generally adopted. Generally, an air floatation conveying mode with a simple principle is adopted, and when the suspension force is balanced with the gravity of the workpiece, the workpiece can be in a stable suspension state. The existing air floatation conveying mechanism has the problems of large volume, high preparation cost, complex layout of an air supply pipeline, uneven air supply and the like.

In order to solve the above problem, an air floating platform device is designed to realize uniform air supply, and the structural scheme of this embodiment will be described in detail below.

In the present embodiment, as shown in fig. 1 and 2, the air floating platform device includes a work table 10, a main air supply pipe 20, and a branch air supply pipe 30. The workbench 10 is arranged below the workpiece and can be used for conveying gas to the workpiece so as to enable the workpiece to be in a suspension state, and the size of the workbench 10 is matched with that of the workpiece so as to enable the gas to be distributed to the whole workpiece and improve the suspension stability. The table 10 is formed with a gas supply hole 11, and the gas supply hole 11 may be configured as a circular hole, a square hole, or the like, as long as it is ensured that gas can be supplied to the workpiece so that the workpiece is in a floating state. The axis of the air supply hole 11 is preferably arranged perpendicular to the table 10 for the convenience of machining and determining the position of the workpiece, but depending on the actual requirements, the air supply hole 11 may be arranged obliquely with respect to the table 10 as long as the workpiece is suspended.

The gas supply main pipe 20 is formed below the table 10 so as to extend in the conveying path direction of the workpiece. In order to save space and reduce floor space, the main gas supply pipe 20 is disposed below the work table 10. The main gas supply pipe 20 is connected to a gas supply system as a main pipe of the gas supply pipe, and branch holes 21 for dispersedly outputting the gas in the main gas supply pipe 20 to the branch gas supply pipes 30 are formed in a side wall of the main gas supply pipe 20. In order to reduce the length of the branch pipes and to simplify the overall layout of the gas supply pipe, the gas supply main pipe 20 is preferably formed to extend in the direction of the conveying path of the workpiece, i.e., in the longitudinal direction of the table 10, but it should be noted that the gas supply main pipe 20 may be provided in other manners as long as the capability of conveying gas is ensured.

The gas supply branch pipe 30 has a gas inlet 31 communicating with the branch hole 21 and a gas outlet 32 communicating with the gas supply hole 11, and gas can be delivered to the bottom end of the workpiece via the table 10 to levitate the workpiece. The branch hole 21 may be disposed at any position on the sidewall of the main gas supply pipe 20, and the corresponding sub gas supply pipe 30 may be disposed as a straight pipe or a bent pipe, so that the gas delivery path is transferred from the position of the branch hole 21 to the position of the gas supply hole 11 of the work table 10 and delivered to the bottom end of the workpiece, thereby achieving workpiece levitation.

It should be noted that, two pipes connected to any position of the air supply pipeline, generally speaking, the shape or size of the connection between the two pipes needs to be adapted to each other, so as to improve the sealing performance of the whole structure; the connection mode of the connection part can be detachable threaded connection and the like, non-detachable welding and the like, or the main air supply pipe 20 and the branch air supply pipes 30 are arranged into an integrated structure; however, the pipe members may have any structure, size or connection method as long as the sealing performance of the whole gas supply pipeline and the capability of the gas supply pipeline for delivering gas are ensured.

It should be further noted that the gas supplied from the gas supply line is typically CDA or nitrogen for economic reasons, but other gases may be supplied as long as the working requirements are met. In addition, the structural shape of the pipe used for the gas supply pipeline, whether it is a round pipe or a square pipe, or an equal-diameter pipe or a reducer pipe, can be designed according to the actual application requirements as long as it has the capability of conveying gas.

In this embodiment, in order to improve the stability of the workpiece suspension process while ensuring the simplicity of the overall layout of the gas supply pipeline, a hollow structure is formed inside the worktable 10, the worktable 10 can be divided into two independent end surfaces by the hollow structure, and the formed hollow part can enable gas to flow through. The air supply hole 11 is formed at the upper surface of the table 10 to correspond to an upper air supply hole 111 and penetrates to the hollow structure to achieve communication; the air supply holes 11 are formed corresponding to the lower air supply holes 112 on the lower surface of the table 10 and penetrate to the hollow structure so that the upper air supply holes 111 and the lower air supply holes 112 communicate with each other. The lower air supply holes 112 are arranged in a manner matched with the layout of the air supply pipeline, and the stability of the workpiece suspension process can be improved by relatively increasing the number of the upper air supply holes 111 and/or relatively densely distributing the upper air supply holes.

The hollow structure of the table 10 only means that the gas to be supplied can pass through the table 10 and be supplied to the upper surface of the table 10, and the structure inside the table 10 is not particularly limited as long as the gas supplied from the bottom of the table 10 can be dispersed to the gas holes on the upper surface of the table 10. In addition, the layout position, the size, the number and other parameters of the upper air supply holes 111 can be set and adjusted according to the actual air supply requirement, and the requirement that the workpiece is in a stable suspension state can be met.

It should be further noted that the worktable 10 and the air supply hole 11 may be configured in other structures as long as improvements are made on the premise of improving the stability of the workpiece levitation process.

In the present embodiment, for convenience of installation and maintenance and to meet the use requirement, as shown in fig. 1 and fig. 2, the main gas supply pipe 20 is an integrated pipe, the tail end of the main gas supply pipe 20 is formed as a closed end 22, the start end is formed as a gas inlet 23, the gas inlet 23 is connected to the gas supply system so that gas can enter the whole gas supply pipeline from the gas inlet 23, the closed end 22 may be integrated with the main gas supply pipe 20, or an end cover or other means may be used as long as the sealing performance of the main gas supply pipe 20 is ensured.

The main gas supply pipe 20 may be provided in other manners, for example, a structure in which the middle portion of the main gas supply pipe 20 is provided with the gas inlet 23 and both end portions are provided with the closed ends 22 may be adopted, as long as the use requirement of the main gas supply pipe 20 is met.

In the present embodiment, in order to improve the uniformity of the gas supplied from the main gas supply pipe 20 to the branch gas supply pipes 30, as shown in fig. 1 and 2, the branch holes 21 are preferably symmetrically arranged, and in particular, the branch holes 21 are symmetrically arranged on both sides of the main gas supply pipe 20 along the extending direction of the main gas supply pipe 20.

To save space and optimize the piping layout, the gas supply branch pipes 30 are preferably arranged symmetrically to the gas supply main pipe 20 and extend parallel to the work table 10. Therefore, the penetration direction of the symmetrically arranged branch holes 21 is parallel to the table 10; the symmetrically arranged branch holes 21 are arranged in multiple groups at equal intervals along the extending direction of the gas supply main pipe.

The branch hole 21 may be provided in any other manner as long as it has an air supply function and suspends the workpiece above the table 10.

In this embodiment, in order to improve the uniformity of the gas delivered to the working platform 10 by the gas supply branch pipes 30 and further to make the gas supply of the whole air-floating platform device uniform, the gas supply branch pipes 30 are arranged in one-to-one correspondence with the branch holes 21; the two gas outlets 32 of the two gas supply branch pipes 30 in pairs are arranged symmetrically to the main gas supply pipe 20 so that the flow paths of the gas in the two gas supply branch pipes 30 symmetrical along the main gas supply pipe 20 are equal to ensure uniform gas supply.

It should be noted that, in order to ensure the uniformity of air supply of the air supply pipeline, the pipe diameters of the air supply branch pipes 30 should be the same, and the pipe diameter of the main air supply pipe 20 is larger than the pipe diameter of the air supply branch pipes 30. Generally, the pipe diameter of the main supply pipe 20 is not less than 38mm, and the pipe diameter of the branch supply pipe 30 is not less than 13 mm. However, the size of the main air supply pipe 20 and the branch air supply pipe 30 is not limited in any way, depending on the actual conditions of the air floating platform device and the size or structure of the required floating workpiece.

In this embodiment, if the air supply branch pipe 30 is a straight pipe or a bent pipe according to the position of the branch hole 21, when the air supply branch pipe 30 is a bent pipe, the air supply branch pipe 30 with a bent structure can be processed by a direct forming method; in order to simplify the complexity of the processing technology, as shown in fig. 1 and 2, the air supply branch pipe 30 may be designed to be formed by connecting a plurality of branch pipe parts 33 in sequence, the branch pipe parts 33 are straight pipes, and an adapter 34 with a bending structure is formed between the adjacent branch pipe parts 33; the adaptor 34 can communicate with the gas supply branch 30 to change the direction of delivery of the gas.

The connection mode of the adaptor 34 and the branch pipe portion 33 may be detachable screw connection or non-detachable welding, as long as the adaptor 34 can have a function of changing the gas conveying direction. In addition, the bending angle of the adaptor 34 can be a right angle or other angle according to the arrangement of the actual pipeline, or the adaptor 34 can be set to be adjustable in angle.

In this embodiment, to ensure the safety of the air floating platform device, as shown in fig. 1 and 2, the air floating platform device further includes a temperature detecting pipe portion 40 formed to extend on the side wall of the main air supply pipe 20. The temperature detection pipe part 40 is connected with a temperature detection device to realize the detection of the temperature of the pipeline gas. The temperature detection device can be a temperature transmitter and the like, and can detect the temperature of the gas in the pipeline as long as the temperature detection device can detect the temperature of the gas in the pipeline.

Similarly, in the present embodiment, in order to ensure the safety of the air floating platform device, as shown in fig. 1 and 2, the air floating platform device further includes a pressure detection pipe portion 50 formed to extend on the side wall of the main air supply pipe 20. The pressure detection pipe portion 50 is connected to a pressure detection device to realize pipeline gas pressure detection. The pressure detection device can be a pressure transmitter and the like, and can be used for detecting the pressure of the gas in the pipeline.

In this embodiment, when the position of the whole air supply pipeline to be connected is a detachable connection manner, in order to further improve the sealing performance of the whole air supply pipeline, as shown in fig. 1 and fig. 2, the air floating platform device further includes a sealing element 60 formed at the connection position of the pipeline. The sealing member 60 may be a sealing ring or a sealant, as long as the sealing property of the air supply line can be improved.

In this embodiment, the sizes and structures of different types of workpieces to be levitated by the air floating platform device or similar workpieces may vary, which results in different weights of the workpieces, and thus the required levitation force may also vary. In order to improve the applicability of the air floating platform device, the air floating platform device further comprises an adjusting piece 70 installed at the air inlet 23 to adjust the air flow, so that the air floating platform device can be suitable for various workpieces and meet the suspension requirements of different workpieces. The adjusting member 70 may be a speed adjusting valve or a hand valve, etc., as long as it can adjust the gas flow rate, thereby improving the applicability of the air floating platform device.

To sum up, this embodiment air supply line overall arrangement is simple, and the volume is less, and the air feed is even, and the preparation is with low costs, and the leakproofness is good, and the suitability is strong, can promote stability and fail safe nature when the work piece is in the suspended state.

Finally, it should be noted that: the above-mentioned embodiments are only specific embodiments of the present application, and are used to illustrate the technical solutions of the present application, but not to limit the technical solutions, and the scope of the present application is not limited to the above-mentioned embodiments, although the present application is described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: any person skilled in the art can modify or easily conceive the technical solutions described in the foregoing embodiments or equivalent substitutes for some technical features within the technical scope disclosed in the present application; such modifications, changes or substitutions do not depart from the spirit and scope of the exemplary embodiments of the present application, and are intended to be covered by the scope of the present application. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.

Claims

1. An air-bearing stage apparatus for levitating a workpiece, the air-bearing stage apparatus comprising:

and the gas supply branch pipe is provided with a gas inlet communicated with the branch hole and a gas outlet communicated with the gas supply hole, and gas can be conveyed to the bottom end of the workpiece through the workbench to enable the workpiece to be suspended.

2. The air-bearing platform device according to claim 1, wherein the interior of the working platform is formed as a hollow structure;

3. The air floating platform device according to claim 1, wherein the trailing end of the main gas supply pipe is formed as a closed end and the leading end is formed as an air inlet.

4. The air-floating platform device according to claim 1, wherein said branch holes are symmetrically arranged on two sides of said main air supply pipe along the extending direction of said main air supply pipe;

5. The air-bearing platform device according to claim 4, wherein said air supply branch pipes are arranged in one-to-one correspondence with said branch holes;

and the two gas outlets of the two gas supply branch pipes in pair are arranged symmetrically to the gas supply main pipe.

6. The air-floating platform device according to claim 5, wherein said air supply branch pipe is formed by connecting a plurality of branch pipe portions in sequence, and an adapter piece with a bending structure is formed between adjacent branch pipe portions; the adaptor can communicate with the gas supply branch pipe to change the gas conveying direction.

7. The air-floating platform device as claimed in claim 1, further comprising a temperature detection pipe portion extending from the side wall of the main gas supply pipe, wherein the temperature detection pipe portion is connected to a temperature detection device for detecting the temperature of the pipeline gas.

8. The air-floating platform device as claimed in claim 1, further comprising a pressure detection pipe portion formed on the side wall of the main gas supply pipe in an extending manner, wherein the pressure detection pipe portion is connected to a pressure detection device for detecting the pressure of the gas in the pipeline.

9. The air platen device of claim 1, further comprising a seal formed at the tube connection.

10. The air platen device as claimed in claim 3, further comprising a regulating member mounted at the air inlet to regulate the flow of gas.