CN216487959U

CN216487959U - Silicon wafer back defect tester

Info

Publication number: CN216487959U
Application number: CN202122245035.XU
Authority: CN
Inventors: 乔晓丹; 王建安; 徐兆存
Original assignee: Shanghai Moyu Semiconductor Technology Co ltd
Current assignee: Shanghai Moyu Semiconductor Technology Co ltd
Priority date: 2021-09-16
Filing date: 2021-09-16
Publication date: 2022-05-10
Anticipated expiration: 2031-09-16

Abstract

The utility model discloses a silicon wafer back defect tester, wherein a front cover is arranged on the front end face, a wafer pause device and a wafer back reversal device are arranged behind the front cover, a rectangular bin is arranged behind the front cover, a screen is arranged on the right side of the front cover, and a vacuum chuck of the wafer pause device is connected by a shaft sleeve and driven by a rotary motor. The crystal back stays in the angle required by the customer, so that the observation and detection are more convenient and the photographing is clearer; the wafer and the accurate counterpoint of crystal back reverser is realized, and accidents such as accidental wafer falling are prevented.

Description

Silicon wafer back defect tester

Technical Field

The utility model relates to the technical field of testers, in particular to a silicon wafer back defect tester.

Background

The wafer back measuring instrument is commonly used for detecting whether the edge and the back of a base body after an outer layer semi-finished product is developed and etched (before being coated with green oil) have defects, including process defects, pollutants, photoresist residues, photoresist dripping back, error side lines and the like; meanwhile, the method can be expanded and applied to macroscopic measurement occasions such as measurement of back defects of LED wafer silicon chips, positive and negative measurement of photomasks, measurement of LCD circuit boards and the like, and after the wafer back measuring instrument is used for a long time, the wafer pause device and the wafer back inverter can possibly generate faults.

However, the existing wafer pause device and the existing wafer back inverter have complicated disassembly and assembly steps, and are inconvenient to overhaul and replace, so that the maintenance cost of equipment is increased; therefore, the existing requirements are not met, and a silicon wafer back defect tester is provided for the requirements.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide a silicon wafer back defect tester, which solves the problems that the existing wafer pause device and the existing wafer back reversal device in the background technology are complicated in disassembly and assembly steps, inconvenient to overhaul and replace, and accordingly maintenance cost of equipment is increased.

In order to achieve the purpose, the utility model provides the following technical scheme: the utility model provides a silicon chip back defect tester, preceding terminal surface is provided with the protecgulum, the rear of protecgulum is provided with wafer pause ware and crystal back of the body reverser, the rear of protecgulum is provided with the rectangle storehouse, the right side of protecgulum is the screen, the vacuum chuck of wafer pause ware is by the shaft liner connection, by the rotating motor drive. The inside of the rectangular bin is provided with a machine power supply and a factory interface. The right side of the front cover is provided with a screen, and finally, images are displayed to a customer for the customer to grab the images and record results.

Preferably, the wafer pause device is provided with a circuit interface, so that the wafer pause device can be quickly plugged and unplugged, is convenient to maintain and is more quickly replaced.

Preferably, the wafer pause device is provided with a lifting cam which drives the vacuum chuck to move up and down.

Preferably, the wafer pause device is provided with a tilt motor for driving the vacuum chuck to tilt.

Preferably, the wafer back inverter is provided with a double sensor, so that the wafer is prevented from falling.

Preferably, the crystal back inverter is provided with a precision air valve, and the opening and closing speed of the clamp is controlled by regulating the pressure through a program.

Preferably, the back-of-wafer inverter is provided with a circuit interface, so that the back-of-wafer inverter is convenient and quick to disassemble and assemble, and the convenience in maintenance and replacement is brought.

Compared with the prior art, the utility model has the beneficial effects that:

the crystal back stays in the angle required by the customer, so that the observation and detection are more convenient and the photographing is clearer;

the wafer and the accurate counterpoint of crystal back reverser is realized, and accidents such as accidental wafer falling are prevented.

Drawings

Fig. 1 is an external structural view of the present invention.

FIG. 2 is a schematic diagram of an overall wafer back inverter configuration according to the present invention;

FIG. 3 is a schematic view of an overall wafer-pause configuration according to the present invention;

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.

A silicon wafer back defect tester is characterized in that a front cover 10 is arranged on the front end face, a wafer pause device is arranged behind the front cover as shown in figure 3, a wafer back reversal device is arranged behind the front cover 10 as shown in figure 1, a rectangular bin 30 is arranged behind the front cover 10, and a machine power supply and a factory interface are arranged inside the rectangular bin 30. On the right side of the front cover 10 is a screen 20 that ultimately displays images to the customer for the customer to capture the images and record the results.

The wafer pause device comprises: a rotary motor 201, a vacuum chuck 202, a shaft sleeve 203, a locking screw 204, a tilting motor 205, a precision lifting sensor 206, a lifting motor 207, a circuit interface 208, a lifting cam 209, a rotary encoder 210 and an adjusting jackscrew 211. The vacuum chuck 202 of the wafer suspension is connected with the shaft sleeve 203 and driven by the rotating motor 201 to realize synchronous rotation. The locking screw 204 of the wafer stopper is used to prevent the elevation height from being too high, and prevent the wafer from falling off accidentally. The wafer pause device is provided with the adjusting jackscrew 211, and the adjustable level is in the same plane with the wafer back inverter. The wafer-hold-down is configured with the precision lift sensor 206 to ensure that the lift position is at the customer-programmed setting.

The crystal back reverser is provided with damping rubber 113, so that external vibration interference is reduced, and a customer sample is protected. The back crystal inverter is provided with the lifting motor 108, and the lifting motor 108 is driven by the precision screw 102. And the bottom of the crystal back reverser is provided with damping rubber. And a lifting motor is arranged on the crystal back reverser and drives a precise screw rod to transmit, and the precise screw rod drives the clamp to move up and down. The crystal back reverser also comprises a tilting motor which can drive the clamp to tilt a certain angle. The crystal back reverser also comprises a rotating motor which can drive the clamp to rotate for a certain angle.

According to the utility model, the crystal back reverser is provided with the lifting motor 108, the rotating motor 111 and the tilting motor 106, so that the crystal back stays in an angle required by a customer, the observation and detection are more convenient and faster, and the photographing is clearer; through wafer pause ware device lift motor 207, tilt motor 205, rotary motor 201, realize the wafer with accurate counterpoint of back of the wafer reverser prevents unexpected emergence such as unexpected piece that falls.

The wafer is placed on the vacuum chuck 202 and rotated 360 degrees by the rotary motor to find the wafer reference pattern. The lift motor 207 is operated and the silicon wafer is transferred to the wafer back inverter position. The clamp 103 clamps the wafer, the sensor a104 and the sensor B105 must sense the wafer together, and at this time, the precision guide rod 102 is driven by the lifting motor 108 to rotate, so as to drive the clamp 103 to move, the rotating motor 111 works to rotate the wafer reversely, and the tilting motor 106 works to tilt the wafer. At this time, the customer can see the crystal back, observe and take a picture.

The computer display 20 on the upper part of the front cover 10 provides a client-friendly interface, and simultaneously displays real-time images, thereby facilitating the client to check the crystal back and take pictures.

The crystal back inverter is provided with a damping rubber 113, and the damping rubber isolates the vibration of the outside with certain frequency, so that a customer sample is protected from being interfered by the outside, and the probability of fragments is reduced.

Through adopting above-mentioned technical scheme, make equipment at the operation process, even there is vibrations in the surrounding environment, can not cause the piece that falls yet, stopped the production of particulate matter simultaneously, protected customer's product.

The crystal back inverter is provided with a circuit interface 110 for fast plugging and unplugging, provides power for the motor through the interface, and simultaneously feeds back to the current state of the computer to realize real-time control and monitoring.

Through adopting above-mentioned technical scheme, can realize equipment initialization through pulling out and inserting circuit interface 110, conveniently take off the back of the wafer converter simultaneously for the customer can be rapid maintain maintenance and maintenance inspection, it is convenient fast to change.

The back-side inverter is provided with a lift motor 108, a tilt motor 106, and a rotation motor 111, and realizes three-coordinate movement.

Through adopting above-mentioned technical scheme, make customer's sample can be in the scope of being greater than 180 degrees left and right rotations, the scope front and back slope that is greater than 90 degrees is greater than 30 cm's distance lift, conveniently observes the back of a crystal, back of a crystal edge, back of a crystal center, because clip 103 is little with back of a crystal area of contact to make the customer can observe the back of a crystal wholly, it is bigger than traditional vacuum adsorption formula back of a crystal reverser observable area, thereby more swift convenient in time discover the problem, improve the product yield.

The wafer-pausing machine is equipped with a rotation motor 201, a tilt motor 205, and a lift motor 207, which realize three coordinate precision movements.

Through adopting above-mentioned technical scheme, make the silicon chip can accurate counterpoint with the back of the wafer reversal ware on the wafer pause ware, guarantee to press from both sides and get the silicon chip and just in time fall in the centre of wafer pause ware clip 103, sensor A4, sensor B5 can sense the silicon chip simultaneously, guarantee the safe reversal of customer's sample.

Further, the wafer pause is equipped with a vacuum chuck 202 that holds the wafer during the pause.

By adopting the technical scheme, the wafer pause device can not fall off when moving in three coordinates of rising, inclining and rotating, thereby protecting a customer sample.

Further, the wafer stopper realizes the silicon wafer lifting by using the lifting cam 209.

By adopting the technical scheme, the silicon wafer is more stable in the rising stage, and even if the silicon wafer is broken and clamped in the falling stage, the silicon wafer of the vacuum chuck 202 can be prevented from being damaged by jacking because the lifting cam 209 and the upper mechanical part only have one contact surface, and the samples of customers are protected.

The working principle is as follows: when the wafer back reverser is used, a power supply is switched on, whether the silicon wafer back measuring instrument can work normally or not is checked, the front cover 10 is opened, a sample to be detected is placed at a proper position on the upper surface of the vacuum chuck 202 of the wafer pause reverser, the wafer pause reverser moves through three coordinates and transmits the wafer to the wafer back reverser, the wafer back reverser displays the wafer back to a customer through the movement of the three coordinates, and the customer reversely transmits the wafer after finishing checking.

It will be evident to those skilled in the art that the utility model is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the utility model being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Claims

1. The utility model provides a silicon chip back defect tester which characterized in that: the front end face is provided with a front cover, a wafer pause device and a wafer back reversing device are arranged behind the front cover, a rectangular bin is arranged behind the front cover, a screen is arranged on the right side of the front cover, and a vacuum sucker of the wafer pause device is connected through a shaft sleeve and driven by a rotary motor.

2. The silicon wafer back defect tester of claim 1, wherein: the locking screw of the wafer pause device is used for preventing the rising height from being too high, and preventing the wafer from accidentally falling.

3. The silicon wafer back defect tester of claim 1, wherein: the wafer pause device is provided with an adjusting jackscrew which can rotate and adjust the inclination angle of the wafer back reverser.

4. The silicon wafer back defect tester of claim 1, wherein: and a precise lifting sensor is arranged on the wafer pause device.

5. The silicon wafer back defect tester of claim 1, wherein: and the bottom of the crystal back reverser is provided with damping rubber.

6. The silicon wafer back defect tester of claim 5, wherein: and a lifting motor is arranged on the crystal back reverser and drives a precise screw rod to transmit, and the precise screw rod drives the clamp to move up and down.

7. The silicon wafer back defect tester of claim 6, wherein: the crystal back reverser also comprises a tilting motor which can drive the clamp to tilt a certain angle.

8. The silicon wafer back defect tester of claim 7, wherein: the crystal back reverser also comprises a rotating motor which can drive the clamp to rotate for a certain angle.