CN216347788U

CN216347788U - Heating ion nitriding furnace for bipolar triode and insulated gate field effect tube composite device

Info

Publication number: CN216347788U
Application number: CN202122108130.5U
Authority: CN
Inventors: 林燕; 刘欣杰; 刘有为
Original assignee: Wuhan Ion Nitriding Furnace Co ltd; Wuhan Shuanghui Heat Treatment Research Institute; Wuhan Plasma Nitriding Furnace Co ltd
Current assignee: Wuhan Ion Nitriding Furnace Co ltd; Wuhan Shuanghui Heat Treatment Research Institute; Wuhan Plasma Nitriding Furnace Co ltd
Priority date: 2021-09-02
Filing date: 2021-09-02
Publication date: 2022-04-19
Anticipated expiration: 2031-09-02

Abstract

The utility model discloses an ion nitriding furnace with a bipolar triode and insulated gate field effect transistor composite device heating function in the technical field of nitriding furnaces, which comprises a furnace body, wherein an anode liner is fixedly arranged on the inner wall of the furnace body, a first box body is fixedly arranged at the top of the furnace body, and a second box body is fixedly arranged on the left side of the furnace body. So as to improve the universality of the equipment and be very worthy of popularization.

Description

Heating ion nitriding furnace for bipolar triode and insulated gate field effect tube composite device

Technical Field

The utility model relates to the technical field of nitriding furnaces, in particular to an ion nitriding furnace heated by a bipolar triode and insulated gate field effect transistor composite device.

Background

There are many types of insulated gate field effect transistors, including PMOS, NMOS, and VMOS power transistors, but MOS transistors are most widely used. A MOS insulated gate field effect transistor, i.e., a metal oxide semiconductor field effect transistor, is generally denoted by MOS and is simply referred to as a MOS transistor. It has higher input impedance (up to more than 1012 omega) than the junction field effect transistor, and the manufacturing process is simpler, and the use is flexible and convenient, is very favorable to high integration.

The bipolar transistor is a current control device, electrons and holes participate in conduction at the same time, compared with a field effect transistor, the bipolar transistor has the advantages of low switching speed, small input impedance, large power consumption, small size, light weight, low power consumption, long service life and high reliability, is widely applied to the fields of broadcasting, televisions, communication, radars, computers, automatic control devices, electronic instruments, household appliances and the like, and plays the roles of amplification, oscillation, switching and the like, and is characterized in that: three doped regions are manufactured on the same silicon chip by different doping modes, and two PN junctions are formed, so that the transistor is formed.

The nitriding treatment refers to a chemical heat treatment process for making nitrogen atoms penetrate into the surface layer of a workpiece in a certain medium at a certain temperature. The product subjected to nitriding treatment has excellent wear resistance, fatigue resistance, corrosion resistance and high temperature resistance, a field effect transistor and a bipolar transistor need to be used in a composite device in the assembling process, in order to improve the characteristics of the composite device, nitriding treatment needs to be carried out in the production process of the composite device, the mainstream nitriding equipment in the market is a nitriding furnace, but the existing nitriding furnace has certain defects, in the nitriding process, a workpiece is mainly placed on a net-shaped support, and because the nitriding process needs gas to bombard the surface of the workpiece for nitriding, the contact area between the workpiece and the net-shaped support is too large, the bombarding effect at the contact surface is poor, and the integral nitriding quality of the product is reduced.

Based on the above, the utility model designs the heating ion nitriding furnace of the bipolar triode and insulated gate field effect transistor composite device to solve the problems.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide a heating ion nitriding furnace for a bipolar triode and insulated gate field effect transistor composite device, which aims to solve the problems in the background technology.

In order to achieve the purpose, the utility model provides the following technical scheme: the heating ion nitriding furnace comprises a furnace body, wherein an anode liner is fixedly arranged on the inner wall of the furnace body, a first box body is fixedly arranged at the top of the furnace body, a second box body is fixedly arranged on the left side of the furnace body, and a distribution box is fixedly arranged at the bottom of the furnace body;

a feeding assembly is fixedly mounted on the inner wall of the furnace body, a vacuumizing mechanism is arranged inside the first box body, an air inlet mechanism is arranged inside the second box body, and a door opening and closing mechanism is arranged on the front side of the furnace body;

and a heater is fixedly arranged at the bottom of the inner cavity of the furnace body.

Preferably, the material loading subassembly includes the box body, the crossbeam has all been welded to the both sides of box body, the one end fixed mounting of crossbeam is in the inside of furnace body, the inside of box body is rotated and is connected with the worm, the bottom meshing of worm has the worm wheel, the inner wall welding of worm wheel has the bull stick, the inside of crossbeam is all run through at the both ends of bull stick, the lead screw has all been welded at the both ends of bull stick, the other end of lead screw is connected with the inner wall rotation of crossbeam, the surperficial threaded connection of lead screw has the sleeve, telescopic bottom welding has splint, the fixed surface of splint installs ceramic mount pad, the fixed surface of ceramic mount pad installs the clamping bar, the inner wall fixed mounting of clamping bar has the negative pole to lead electrical pillar.

Preferably, the vacuum pumping mechanism comprises a vacuum pump, the vacuum pump is fixedly installed inside the first box body, an air inlet end of the vacuum pump is communicated with an air exhaust pipe, the air exhaust pipe penetrates through the furnace body, a first electromagnetic valve is fixedly installed on the surface of the air exhaust pipe, and an air exhaust end of the vacuum pump penetrates through the outside of the first box body.

Preferably, the air inlet mechanism comprises an air pump, the air pump is fixedly installed inside the second box body, an air inlet end of the air pump is communicated with an air distribution pipe, a left side of the air distribution pipe is communicated with an air inlet pipe, the left end of the air inlet pipe penetrates through the outside of the second box body, a second electromagnetic valve is fixedly installed on the surface of the air inlet pipe, an air outlet end of the air pump is communicated with an air outlet pipe, the other end of the air outlet pipe penetrates through the inside of the furnace body, and a third electromagnetic valve is fixedly installed on the surface of the air outlet pipe.

Preferably, the mechanism of opening and shutting includes the seal groove, seal groove fixed mounting is in the front of furnace body, the inside sliding connection of seal groove has the dodge gate, the top welding of dodge gate has the connecting plate, the connecting block has all been welded at the both ends of connecting plate, the equal fixed mounting in both sides of furnace body has electronic jar, electronic jar flexible end and connecting block fixed mounting.

Preferably, the bearing is all overlapped on the both sides on bull stick surface, the bull stick passes through the bearing and is connected with the box body rotation, the positive fixed mounting of worm has the crank.

Preferably, a limiting plate is fixedly mounted at the top of the inner cavity of the cross beam, a limiting groove is formed in the top of the sleeve, and the sleeve slides on the surface of the limiting plate through the limiting groove.

Compared with the prior art, the utility model has the beneficial effects that: when a workpiece is placed, the crank is shaken to separate the clamping rods, then the workpiece is placed on the inner sides of the clamping rods, then the crank is rotated reversely, and the workpiece is clamped and fixed through the clamping action of the clamping rods, so that the workpiece is installed.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without creative efforts.

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is a front sectional view of the furnace body of the present invention;

FIG. 3 is a perspective view of a clamping bar according to the present invention;

FIG. 4 is an elevational, cross-sectional view of the beam and cassette of the present invention;

FIG. 5 is a partial left side view of the worm and worm gear of the present invention;

FIG. 6 is a left side view of the sleeve of the present invention;

FIG. 7 is an enlarged view of a portion of FIG. 2 according to the present invention.

In the drawings, the components represented by the respective reference numerals are listed below:

1. a furnace body; 2. an anode liner; 3. a first case; 4. a second case; 5. a distribution box; 6. a feeding assembly; 61. a box body; 62. a cross beam; 63. a worm; 64. a worm gear; 65. a rotating rod; 66. a screw rod; 67. a sleeve; 68. a splint; 69. a ceramic mount; 610. a clamping bar; 611. a cathode conductive post; 7. a vacuum pumping mechanism; 71. a vacuum pump; 72. an air exhaust pipe; 73. a first solenoid valve; 8. an air intake mechanism; 81. an air extractor; 82. a gas distributing pipe; 83. an air inlet pipe; 84. a second solenoid valve; 85. an air outlet pipe; 86. a third electromagnetic valve; 9. a door opening and closing mechanism; 91. a sealing groove; 92. a movable door; 93. a connecting plate; 94. connecting blocks; 95. an electric cylinder; 10. a heater; 11. and a limiting plate.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments, and all other embodiments obtained by a person of ordinary skill in the art without any creative work based on the embodiments of the present invention belong to the protection scope of the present invention.

Example one

Referring to the drawings, the present invention provides a technical solution: the heating ion nitriding furnace comprises a furnace body 1, wherein an anode liner 2 is fixedly arranged on the inner wall of the furnace body 1, a first box body 3 is fixedly arranged at the top of the furnace body 1, a second box body 4 is fixedly arranged on the left side of the furnace body 1, and a distribution box 5 is fixedly arranged at the bottom of the furnace body 1;

a feeding assembly 6 is fixedly arranged on the inner wall of the furnace body 1, a vacuumizing mechanism 7 is arranged inside the first box body 3, an air inlet mechanism 8 is arranged inside the second box body 4, and a door opening and closing mechanism 9 is arranged on the front side of the furnace body 1;

the heater 10 is fixedly arranged at the bottom of the inner cavity of the furnace body 1.

Specifically, the feeding assembly 6 comprises a box body 61, the two sides of the box body 61 are welded with cross beams 62, one end of each cross beam 62 is fixedly installed inside the furnace body 1, the inside of the box body 61 is rotatably connected with a worm 63, the bottom of the worm 63 is meshed with a worm wheel 64, the inner wall of each worm wheel 64 is welded with a rotating rod 65, two ends of each rotating rod 65 penetrate through the inside of the corresponding cross beam 62, two ends of each rotating rod 65 are welded with a lead screw 66, the other end of each lead screw 66 is rotatably connected with the inner wall of the corresponding cross beam 62, the surface of each lead screw 66 is connected with a sleeve 67 in a threaded manner, the bottom of each sleeve 67 is welded with a clamping plate 68, the surface of each clamping plate 68 is fixedly provided with a ceramic mounting seat 69, the surface of each ceramic mounting seat 69 is fixedly provided with a clamping rod 610, the inner wall of each clamping rod 610 is fixedly provided with a cathode conductive column 611, the rocking handle is firstly used for separating the clamping rods 610, then a workpiece is placed on the inner side of the clamping rods 610, and then the rocking handle reversely rotates, the worm 63 is driven to rotate through the crank, the worm 63 drives the worm wheel 64 to rotate, the worm wheel 64 drives the rotating rod 65 to rotate, the rotating rod 65 drives the screw rod 66 to rotate, the screw rod 66 drives the sleeve 67, the clamping plate 68 and the clamping rod 610 to be close to each other, therefore, the workpiece is clamped and fixed through the clamping action of the clamping rod 610, after the workpiece is fixed, the cathode conductive column 611 and the anode liner 2 are electrified, the surface of the workpiece is subjected to nitriding treatment through the glow discharge principle, the service performance of the workpiece is improved, and in the workpiece nitriding process, the heater 10 can perform auxiliary heating.

Specifically, the vacuum pumping mechanism 7 comprises a vacuum pump 71, the vacuum pump 71 is fixedly installed inside the first box 3, an air inlet end of the vacuum pump 71 is communicated with an air pumping pipe 72, the air pumping pipe 72 penetrates through the inside of the furnace body 1, a first electromagnetic valve 73 is fixedly installed on the surface of the air pumping pipe 72, an air outlet end of the vacuum pump 71 penetrates through the outside of the first box 3, after the workpiece is placed, the vacuum pump 71 vacuumizes the inside of the furnace body 1, and the first electromagnetic valve 73 is closed after the vacuumization is finished.

Specifically, air inlet mechanism 8 includes air extractor 81, air extractor 81 fixed mounting is in the inside of second box 4, the inlet end intercommunication of air extractor 81 has gas distribution pipe 82, the left side intercommunication of gas distribution pipe 82 has intake pipe 83, the left end of intake pipe 83 runs through the outside of second box 4, the fixed surface of intake pipe 83 installs second solenoid valve 84, the exhaust end intercommunication of air extractor 81 has outlet duct 85, the other end of outlet duct 85 runs through the inside of furnace body 1, the fixed surface of outlet duct 85 installs third solenoid valve 86, after the evacuation is accomplished, the inside of furnace body 1 is taken out with the required gas of nitrogenization to air extractor 81, and at the in-process of extraction, second solenoid valve 84 and third solenoid valve 86 are the open mode, after the extraction, second solenoid valve 84 and third solenoid valve 86 close.

Specifically, door mechanism 9 opens and shuts includes seal groove 91, seal groove 91 fixed mounting is in the front of furnace body 1, the inside sliding connection of seal groove 91 has dodge gate 92, the top welding of dodge gate 92 has connecting plate 93, connecting block 94 has all been welded at the both ends of connecting plate 93, the equal fixed mounting in both sides of furnace body 1 has electronic jar 95, electronic jar 95 flexible end and connecting block 94 fixed mounting, when placing the work piece and the work piece of taking, electronic jar 95 drives connecting block 94 rebound, connecting block 94 drives connecting plate 93 rebound, connecting plate 93 drives dodge gate 92 and shifts up, can place and take the work piece this moment.

Example two

The structure of this embodiment is the same basically as embodiment one, and the difference lies in, the both sides on bull stick 65 surface all overlap and are equipped with the bearing, and bull stick 65 passes through the bearing and rotates with box body 61 to be connected, and the positive fixed mounting of worm 63 has the crank, and the crank can conveniently rotate worm 63 to through the setting of bearing, can make bull stick 65 possess the pivoted function, thereby make bull stick 65 drive lead screw 66 rotatory.

EXAMPLE III

The structure of this embodiment is the same basically as embodiment one, and the difference lies in, the top fixed mounting of crossbeam 62 inner chamber has limiting plate 11, and the spacing groove has been seted up at the top of sleeve 67, and sleeve 67 passes through the spacing groove and slides on the surface of limiting plate 11, through the setting of limiting plate 11 and spacing groove, can carry on spacingly to sleeve 67, makes it can not follow lead screw 66 rotatoryly to can promote the stability when sleeve 67 removes.

In the description herein, references to the description of "one embodiment," "an example," "a specific example" or the like are intended to mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the utility model. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

The preferred embodiments of the utility model disclosed above are intended to be illustrative only. The preferred embodiments are not exhaustive and do not limit the utility model to the precise embodiments disclosed. Obviously, many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the utility model and the practical application, to thereby enable others skilled in the art to best utilize the utility model. The utility model is limited only by the claims and their full scope and equivalents.

Claims

1. Bipolar transistor and insulated gate field effect transistor composite member heating ion nitriding furnace, including furnace body (1), its characterized in that: an anode liner (2) is fixedly installed on the inner wall of the furnace body (1), a first box body (3) is fixedly installed at the top of the furnace body (1), a second box body (4) is fixedly installed on the left side of the furnace body (1), and a distribution box (5) is fixedly installed at the bottom of the furnace body (1);

a feeding assembly (6) is fixedly mounted on the inner wall of the furnace body (1), a vacuumizing mechanism (7) is arranged inside the first box body (3), an air inlet mechanism (8) is arranged inside the second box body (4), and a door opening and closing mechanism (9) is arranged on the front side of the furnace body (1);

the bottom of the inner cavity of the furnace body (1) is fixedly provided with a heater (10).

2. The heating ion nitriding furnace for the bipolar triode and insulated gate field effect transistor composite device according to claim 1, characterized in that: the feeding assembly (6) comprises a box body (61), cross beams (62) are welded on two sides of the box body (61), one end of each cross beam (62) is fixedly installed inside the furnace body (1), a worm (63) is connected to the box body (61) in a rotating mode, a worm wheel (64) is meshed at the bottom of the worm (63), a rotating rod (65) is welded on the inner wall of the worm wheel (64), two ends of the rotating rod (65) penetrate through the cross beams (62), lead screws (66) are welded on two ends of each rotating rod (65), the other ends of the lead screws (66) are rotatably connected with the inner wall of the cross beams (62), sleeves (67) are connected to surface threads of the lead screws (66), clamping plates (68) are welded at the bottoms of the sleeves (67), ceramic mounting seats (69) are fixedly installed on the surfaces of the clamping plates (68), and clamping rods (610) are fixedly installed on the surfaces of the ceramic mounting seats (69), and a cathode conductive column (611) is fixedly arranged on the inner wall of the clamping rod (610).

3. The heating ion nitriding furnace for the bipolar triode and insulated gate field effect transistor composite device according to claim 1, characterized in that: the vacuumizing mechanism (7) comprises a vacuum pump (71), the vacuum pump (71) is fixedly installed inside the first box body (3), an air inlet end of the vacuum pump (71) is communicated with an air exhaust pipe (72), the air exhaust pipe (72) penetrates through the inside of the furnace body (1), a first electromagnetic valve (73) is fixedly installed on the surface of the air exhaust pipe (72), and an air exhaust end of the vacuum pump (71) penetrates through the outside of the first box body (3).

4. The heating ion nitriding furnace for the bipolar triode and insulated gate field effect transistor composite device according to claim 1, characterized in that: air inlet mechanism (8) include air extractor (81), air extractor (81) fixed mounting is in the inside of second box (4), the inlet end intercommunication of air extractor (81) has gas-distributing pipe (82), the left side intercommunication of gas-distributing pipe (82) has intake pipe (83), the left end of intake pipe (83) runs through the outside of second box (4), the fixed surface of intake pipe (83) installs second solenoid valve (84), the exhaust end intercommunication of air extractor (81) has outlet duct (85), the other end of outlet duct (85) runs through the inside of furnace body (1), the fixed surface of outlet duct (85) installs third solenoid valve (86).

5. The heating ion nitriding furnace for the bipolar triode and insulated gate field effect transistor composite device according to claim 1, characterized in that: the door opening and closing mechanism (9) comprises a sealing groove (91), the sealing groove (91) is fixedly installed on the front of the furnace body (1), the inner sliding connection of the sealing groove (91) is provided with a movable door (92), a connecting plate (93) is welded at the top of the movable door (92), connecting blocks (94) are welded at the two ends of the connecting plate (93), electric cylinders (95) are fixedly installed on the two sides of the furnace body (1), and the telescopic ends of the electric cylinders (95) are fixedly installed with the connecting blocks (94).

6. The heating ion nitriding furnace for the bipolar triode and insulated gate field effect transistor composite device according to claim 2, characterized in that: the both sides on bull stick (65) surface all are equipped with the bearing, bull stick (65) are rotated through bearing and box body (61) and are connected, the positive fixed mounting of worm (63) has the crank.

7. The heating ion nitriding furnace for the bipolar triode and insulated gate field effect transistor composite device according to claim 2, characterized in that: the top fixed mounting of crossbeam (62) inner chamber has limiting plate (11), the spacing groove has been seted up at the top of sleeve (67), sleeve (67) pass through the spacing groove and slide on the surface of limiting plate (11).