CN216206402U - Compact atomic interferometer integrates device - Google Patents

Abstract

The utility model discloses a compact atomic interferometer integration device which comprises a cold atomic interferometer physical system, a cooling optical module, a Raman optical module, a fluorescence detection and collection device and the like. The utility model utilizes the structure of a single decahedron vacuum glass cavity and combines the collimation beam expander, the magnetic field coil and the like to be effectively integrated. The decahedral vacuum glass cavity body avoids the defects of induced current, induced magnetic field and the like in a metal vacuum cavity, and has larger light-passing area and smaller volume; the cooling optical module and the Raman optical module are simpler than the existing optical system for realizing atomic interference, the optical path structure is simplified, and the optical path cost is reduced; the cube vacuum cavity of the whole device is independent from peripheral devices, the cooling optical module and the Raman optical module can be independently debugged and then assembled and integrated, and the device is suitable for glass cavity devices with different structures. The utility model can be applied to the high-precision atomic inertia sensing technology and improves the integration level of the sensor.

Description

A compact atom interferometer integrated device

technical field

The utility model relates to a high-precision atomic inertial sensing technology, in particular to a compact integrated device of a cold atom interferometer, which is suitable for the field of precise measurement of atomic interference.

Background technique

Atomic interferometers are gradually being used in inertial navigation, geological exploration, resource exploration and basic scientific research. Usually, the atom interferometer system built on the optical platform based on the laboratory is bulky and has poor transportability. In order to meet the engineering and space applications, it is necessary to develop a miniaturized and transportable atom interferometer device.

The atomic interferometer device includes a vacuum cavity, a collimated laser module, a detection module, etc. The atomic interference process includes the trapping and cooling of the atomic group, the whereabouts, the interference, the detection and other processes. In order to meet the atomic interference conditions, it is necessary to integrate vacuum chambers, fiber collimators, light-transmitting glass windows, anti-Helmholtz coils and Helmholtz coils, fluorescence detection and collection devices, etc., so how to meet the physical principles of atomic interferometers? On the basis of , the efficient integration of the above unit modules is an important problem faced by atomic interferometer devices. At present, most atomic interferometers use a metal vacuum cavity structure, and glass windows are sealed on the metal cavity for clear light use. Due to the need to seal the position of the knife edge and the fixing screw during the sealing process, the conditions for achieving the same clear aperture are The volume and weight of the metal cavity is much larger than that of the glass cavity; the induced current, induced magnetic field and other factors in the metal vacuum cavity will interfere with the atomic interference process, which should be avoided as much as possible; the anti-Helmholtz coil The size of the Helmholtz coil and the Helmholtz coil is limited by the size of the vacuum cavity. The glass cavity can effectively reduce the size of the vacuum sealing part, reduce the volume of the vacuum cavity, and reduce the anti-Helmholtz through reasonable design. Due to the size of the Z coil and the Helmholtz coil, there is still room for improvement in response to the demand for miniaturized atomic interferometers in practical applications.

Utility model content

The purpose of the utility model is to provide a compact cold atom interferometer integrated device in response to the demand for miniaturized atom interferometer in the prior art. The utility model utilizes the structure of a single decahedral vacuum glass cavity, combined with the effective integration of optical fiber collimators and magnetic field coils and other devices, the light-transmitting cooling light and the Raman optical modules are independently debugged, and then assembled with the glass cavity. Independent of each other, a miniaturized atomic interferometer system is realized, which can be used in the field of precise measurement of atomic interference.

The above-mentioned purpose of the present utility model is achieved through the following technical solutions:

A compact atomic interferometer integrated device, comprising a physical system, the physical system comprises a decahedral vacuum glass cavity, and the decahedral vacuum glass cavity comprises a first side circular glass window, a second side circular glass window uniformly and sequentially distributed in the circumferential direction Round glass window, third side round glass window, fourth side round glass window, fifth side round glass window, sixth side round glass window, seventh side round glass window, and the eighth side circular glass window, the decahedral vacuum glass cavity also includes a front circular light-transmitting window and a rear circular light-transmitting window,

Outside the first side round glass window, outside the second side round glass window, outside the third side round glass window, outside the fourth side round glass window, outside the fifth side round glass window, The outer side of the sixth side circular glass window and the outer side of the seventh side circular glass window are respectively provided with a first collimating beam expander, a beam expanding shaper, a second collimating beam expander, a fluorescence detection collecting device, a first collimating beam expander, a Three collimating beam expanders, a first reflecting device, and a fourth collimating beam expander, a fifth collimating beam expander is arranged on the outside of the front circular light-passing window, and a fifth collimating beam expander is arranged on the outside of the rear circular light-passing window. Two reflectors,

The eighth side circular glass window is connected to one end of the glass tube, the other end of the glass tube is connected to the base, the base is sealed with the metal flange, the right window of the cube vacuum chamber is sealed with the metal flange, and the right window of the cube vacuum chamber is connected to the metal flange. The alkali metal release agent is also welded through the vacuum connector, and the ion pump is fixed in the front side window of the cube vacuum chamber.

An anti-Helmholtz coil and a Helmholtz coil are arranged outside the decahedral vacuum glass chamber.

As mentioned above, the exit optical axes of the first collimating beam expander and the third collimating beam expander are collinear, and the exit optical axes of the second collimating beam expander and the fourth collimating beam expander are collinear, and the beam expands The outgoing optical axis of the shaper is collinear with the reflected light of the first reflecting device, and the outgoing optical axis of the fifth collimating beam expander is collinear with the reflected light of the second reflecting device.

The above-mentioned first reflection device includes a first external quarter wave plate and a first external reflection mirror, and the exit optical axis of the beam expander is in sequence with the second side circular glass window and the sixth side circular glass window. The glass window and the first external mirror are vertical, and the first external quarter-wave plate is located between the sixth side circular glass window and the first external mirror outside the sixth side circular glass window;

The second reflecting device includes a second external quarter-wave plate and a second external reflecting mirror, and the exit optical axis of the fifth collimating beam expander is sequentially connected to the front circular light-passing window, the rear circular light-passing window, And the second external mirror is vertical, and the second external quarter wave plate is located between the rear circular light clear window and the second external mirror outside the rear circular light clear window.

A compact atom interferometer integrated device, further comprising an optical system, the optical system comprising a cooling optical module,

The cooling light module includes a cooling light laser. The single-frequency laser generated by the cooling light laser is divided into two single-frequency lasers after passing through the first light splitting unit. One of the single-frequency lasers is output to the first frequency stabilization unit, and the other single-frequency laser is output. The cooling light is obtained through the first laser power amplifying unit and the first acousto-optic modulator unit, and the cooling light is divided into the first cooling light ~ the fifth cooling light by the beam splitting shaping unit and enter the first collimating beam expander ~ the first collimating beam expanding beamer.

The above optical system further includes a Raman optical module, the Raman optical module includes a first Raman laser and a second Raman laser, and the first Raman light output by the first Raman laser passes through the second light splitting unit. It is then divided into two beams, a part of the first Raman light is output to the second frequency stabilization unit, and the remaining first Raman light is input to the second laser power amplifying unit and the second Raman laser output is combined with the second Raman light. The combined Raman light is obtained by the bundle, and part of the combined Raman light is input to the beat-frequency locking unit, and the remaining combined Raman light passes through the second acousto-optic modulator unit to obtain the output Raman light, and the output Raman light passes through the combined Raman light. The beam shaping unit is transmitted to the beam expander shaper.

Compared with the prior art, the utility model has the following beneficial effects:

The utility model proposes a compact atom interferometer integrated device, which utilizes the structure of a single decahedral vacuum glass cavity, and is effectively integrated with a collimating beam expander, a magnetic field coil, a fluorescence detection and collection device, etc., which can realize the three-dimensional atomic Magneto-optical traps, cooling, manipulation of atoms, etc. Compared with the traditional metal cavity solution, the decahedral vacuum glass cavity avoids the defects of induced current, induced magnetic field, gas penetration, etc. existing in the metal vacuum cavity, and has a larger light-passing area and a smaller volume; the optical module includes 8 units, which is simpler than the existing optical system for atomic interference, simplifies the optical path structure, and reduces the cost of the optical path; the vacuum cavity and peripheral devices of the entire device are independent of each other, and modules such as cooling light and Raman light can be debugged separately before proceeding Assembled and integrated, suitable for glass cavity devices of different structures. The utility model can be applied to the high-precision atomic inertial sensing technology to improve the level of sensor integration.

Description of drawings

Figure 1 is a schematic diagram of a decahedral vacuum glass cavity of a compact cold atom interferometer;

Figure 2 is a schematic diagram of the physical system structure of a compact cold atom interferometer;

3 is a front view (y-z) and a side view (x-z) of the optical path structure of a compact cold atom interferometer, wherein (a) is a front view; (b) is a side view;

4 is a schematic diagram of a cooled optical module and a Raman optical module of a compact cold atom interferometer, wherein (a) is a schematic diagram of a cooled optical module; (b) is a schematic diagram of a Raman optical module;

Figure 5 shows the co-directional interference fringes of a compact cold atom interferometer;

In the picture: 100-decahedral vacuum glass chamber, 101-glass window, 102-window, 103-alkali metal release agent, 104-glass tube, 105-copper spacer, 106-base, 201-first collimating expansion Beamer, 202-Second Collimating Beam Expander, 203-Third Collimating Beam Expander, 204- Fourth Collimating Beam Expander, 205-Fifth Collimating Beam Expander, 3-Anti-Helmholtz Coil, 4-Helmholtz coil, 501-first reflection device, 502-second reflection device, 6-fluorescence detection collection device; 7-beam expander shaper, 800-support fixing module, 801-metal flange, 802-right side window of cube vacuum chamber, 803-front side window of cube vacuum chamber, 804- cube vacuum chamber, 9- ion pump, C1-first cooling light, C2-second cooling light, C3-third cooling light, C4-fourth cooling light, C5-fifth cooling light, R-Raman light.

Detailed ways

In order to facilitate the understanding and implementation of the present invention by those of ordinary skill in the art, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the embodiments described herein are only used to illustrate and explain the present invention, and It is not intended to limit the present invention.

Implementation case:

In this embodiment, the compact atom interferometer integrated device includes a physical system and an optical system, and the compact atom interferometer physical system includes a decahedral vacuum glass cavity 100, an alkali metal release agent 103, and a collimation through which the cooling light C1-C5 passes. Beam expanders 201-204, Helmholtz coils 3, anti-Helmholtz coils 4, first reflection device, second reflection device, fluorescence detection collection device 6, beam expander shaper 7 through which Raman light R passes, The fixed module 800 and the ion pump 9 and the like are supported.

As shown in FIG. 1 , the decahedral vacuum glass chamber 100 includes eight side circular glass windows 101 and front and rear circular light-transmitting windows 102 uniformly distributed in the circumferential direction, and eight side circular glass windows 101 The surfaces of the front and rear circular light-transmitting windows 102 are both coated with an anti-reflection film to prevent the laser beam from causing unnecessary reflection in the cavity to affect the measurement. The eight side circular glass windows 101 are sequentially a first side circular glass window, a second side circular glass window, and a third side circular glass window in a unidirectional circumferential order (clockwise in FIG. 2 ). Window, fourth side round glass window, fifth side round glass window, sixth side round glass window, seventh side round glass window, and eighth side round glass window, front and rear round The shaped light-transmitting windows 102 are respectively a front circular light-transmitting window and a rear circular light-transmitting window. The eighth side circular glass window is connected to one end of the glass tube 104, the other end of the glass tube 104 is connected to the base 106, and the base 106 is sealed with the metal flange 801. As a preferred solution, the copper gasket 105 on the right side of the base 106 is connected to The metal flange 801 on the left side of the base 106 is vacuum sealed to the cube vacuum chamber 804 by welding, the right window 802 of the cube vacuum chamber 804 is sealed with the metal flange 801, and the right window 802 of the cube vacuum chamber 804 also passes through The alkali metal release agent 103 is welded to the vacuum connector to provide an alkali metal atom source for the atom interferometer, and the ion pump 9 is fixed on the front side window 803 of the cube vacuum chamber 804 to maintain the vacuum of the vacuum chamber.

Outside the first side round glass window, outside the second side round glass window, outside the third side round glass window, outside the fourth side round glass window, outside the fifth side round glass window, A first collimating beam expander 201 , a beam expander shaper 7 , a second collimating beam expander 202 , and a fluorescence detection collection device are respectively disposed outside the sixth side circular glass window and the seventh side circular glass window. Device 6, the third collimating beam expander 203, the first reflecting device 501, and the fourth collimating beam expander 204, a fifth collimating beam expander 205 is arranged on the outside of the front circular light-passing window, and the rear circular A second reflection device 502 is disposed on the outside of the light-transmitting window.

As shown in Figures 2 and 3, the first collimating beam expander 201, the second collimating beam expander 202, the third collimating beam expander 203, the fourth collimating beam expander 204, and the fifth collimating beam expander The devices 205 are respectively used to generate the first cooling light C1, the second cooling light C2, the third cooling light C3, the fourth cooling light C4 and the fifth cooling light C5, and all include optical fiber collimators arranged in sequence to expand the beam. , internal quarter wave plate and internal mirror. Among them, the fiber collimator and beam expander in the collimating beam expander (201-205) are fixed in front of the internal quarter-wave plate and the internal reflection mirror in the collimating beam expander (201-205). To adjust the collimation and spot size of the cooled light (C1-C5), the internal quarter-wave plate and internal mirror adjust the polarization and direction of the cooled light (C1-C5). Each collimating beam expander (201-205) is fixed on the rear panel through the supporting and fixing base 800, wherein the exit optical axis of the first collimating beam expander 201 is perpendicular to the circular glass window on the first side, and the second collimating beam expander 201 is perpendicular to the first side circular glass window. The exit optical axis of the straight beam expander 202 is perpendicular to the third side circular glass window, the exit optical axis of the third collimating beam expander 203 is perpendicular to the fifth side circular glass window, and the fourth collimating beam expander The outgoing optical axis of 204 is perpendicular to the seventh side circular glass window.

The second reflecting device 502 includes a second external quarter-wave plate and a second external reflecting mirror. The exit optical axis of the fifth collimating beam expander 205 is sequentially connected to the front circular light-transmitting window of the decahedral vacuum cavity 100, The rear circular clear window and the second external mirror are vertical, and the second external quarter wave plate is located between the rear circular clear window and the second external mirror outside the rear circular clear window .

The outgoing optical axes of the first collimating beam expander 201 , the second collimating beam expander 202 , the third collimating beam expander 203 , the fourth collimating beam expander 204 , and the fifth collimating beam expander 205 are the same as The distance between the first side circular glass window, the third side circular glass window, the fifth side circular glass window, the seventh side circular glass window, and the rear circular light-transmitting window is about 4cm, less than 4cm. The propagation distance and optical power loss of each beam are small.

The beam expander shaper 7 includes a fiber collimator, a beam expander and a shaper. The fiber collimator, the beam expander and the shaper are sequentially fixed in the beam expander shaper 7. The beam expander shaper 7 is vertically fixed on the upper end of the rear panel by the supporting and fixing base 800. The first reflection device 501 includes a first outer quarter A wave plate and a first external reflection mirror, the exit optical axis of the beam expander 7 is perpendicular to the second side circular glass window, the sixth side circular glass window, and the first external reflection mirror in sequence, and the beam expander is shaped The distance between the device 7 and the second side circular glass window is about 2cm, and the first external quarter-wave plate is located between the sixth side circular glass window and the first external mirror outside the sixth side circular glass window. between.

The fluorescence detection and collection device 6 includes a photodetector and a signal amplification circuit. The detection optical axis of the front photodetector is perpendicular to the circular glass window on the fourth side of the decahedral vacuum glass cavity 100, and the distance is 2 cm. The device 6 is fixed on the rear panel. Since the fluorescence signal is very weak, the post-amplifying circuit converts the current signal output by the photodetector into a voltage signal and amplifies it by 10 ⁷ times. The response time is 1.8ms and the detection noise is 10mV, which meets the experimental conditions. to collect the fluorescence signal of the atomic stimulated emission.

The optical path structure of the space includes: the beam expanded and collimated by the first collimating beam expander 201, the second collimating beam expander 202, the third collimating beam expander 203, and the fourth collimating beam expander 204. The first cooling light C1 to the fourth cooling light C4 are respectively perpendicular to the first side circular glass window, the third side circular glass window, the fifth side circular glass window, and the seventh side circular glass window , respectively enter the decahedral vacuum glass cavity 100 at 90°, and the fifth cooling light C5 after beam expansion and collimation by the fifth collimating beam expander 205 is perpendicular to the front circular light-transmitting window and the decahedral vacuum cavity 100 The rear circular light-transmitting window is vertically incident on the second external quarter-wave plate and the second external mirror 502, and the second external mirror 502 is adjusted to allow the fifth cooling light C5 to return to the fifth collimating beam. In the beamer 205, the optical paths of the first cooling light C1 and the third cooling light C3 in the decahedral vacuum glass cavity 100 coincide, and the second cooling light C2 and the fourth cooling light C4 in the decahedral vacuum glass cavity 100. The optical path trajectories are coincident, and the optical path trajectories of the fifth cooling light C5 and the original reflected light are coincident, and the cooling light of 3 pairs of circularly polarized light required by the second external quarter-wave plate to form the magneto-optical trap is adjusted. The Raman light R passing through the beam expander 7 is incident at 90° perpendicular to the second side circular glass window and enters the decahedral vacuum glass cavity 100, and then exits to the first side at 90° perpendicular to the sixth side circular glass window. On the external quarter-wave plate and the first external mirror 5, adjust the first external mirror to let the Raman light R return to the beam expander 7, and generate the opposite Raman light required for the Raman transition .

A magnetic field coil is arranged outside 100 of the decahedral vacuum glass chamber, and the magnetic field coil includes an anti-Helmholtz coil 3 and a Helmholtz coil 4 . The Helmholtz coil 4 includes an x-direction compensation magnetic field coil, a y-direction compensation magnetic field coil, and a z-direction compensation magnetic field coil. The anti-Helmholtz coil 3 and the compensation magnetic field coil in the x direction are circular coils, and the compensation magnetic field coil in the y direction and the compensation magnetic field coil in the z direction are rectangular coils. The axis of the anti-Helmholtz coil 3 is fixed perpendicular to the front circular clear window and the rear circular clear window, the axis y of the compensation magnetic field coil in the x direction is fixed parallel to the axis of the anti-Helmholtz coil 3, y The vertical central axis of the direction compensation magnetic field coil is fixed parallel to the front circular light-passing window and the rear circular light-passing window, and the vertical central axis of the z-direction compensation magnetic field coil is perpendicular to the front circular light-passing window and the rear circular light-passing window. The optical window is fixed, and the ratio of the radius of each coil to the coil spacing is restricted by the geometric size of the vacuum device to ensure that the space is minimized and the magnetic field conditions are still met to generate gradient magnetic fields and compensation magnetic fields, without additional magnetic shielding equipment.

As shown in FIG. 4 , the optical system includes a cooling optical module and a Raman optical module.

The cooling light module includes a cooling light laser, the cooling light laser generates a single-frequency laser, and the single-frequency laser generated by the cooling light laser 10 is divided into two single-frequency lasers after passing through the first beam splitting unit, and one single-frequency laser is output to the cooling light laser. The corresponding first frequency stabilization unit, the first frequency stabilization unit controls the single-frequency laser generated by the cooling light laser to lock on the cooling light transition frequency of the alkali metal D2 line, and the other single-frequency laser passes through the first laser power amplifier unit and the second beam. The acoustic light modulator unit obtains the cooling light required for the experiment, and finally the cooling light is divided into the first cooling light ~ the fifth cooling light through the beam splitting shaping unit and enters the first collimating beam expander 201 ~ the fifth collimating beam of the physical system of the atom interferometer. Straight beam expander 205.

The Raman light module includes a first Raman light laser and a second Raman light laser. The first Raman light output by the first Raman light laser is divided into two beams after passing through the second light splitting unit, and part of the first Raman light is divided into two beams. Output to the second frequency stabilization unit corresponding to the first Raman laser unit, the second frequency stabilization unit is used to control the frequency stabilization of the first Raman light, and the remaining first Raman light is input to the second laser power amplifier The unit and the second Raman laser output the second Raman light to obtain the combined Raman light, and a small part of the combined Raman light is input to the beat-locked unit to control the intensity of the first Raman light and the second Raman light. The frequency is locked at a fixed frequency difference, and most of the remaining combined Raman light passes through the second acousto-optic modulator unit to obtain the output Raman light, and finally the output Raman light is connected to the high-power polarization-maintaining fiber through the beam combining shaping unit and transmitted to In the beam expander shaper 7 of the physical system of the atomic interferometer;

Implementation Effect:

In this embodiment, the length, width and height of the physical system are 266mm×180mm×270mm. In a single decahedral vacuum glass cavity, the atomic cooling temperature is lower than 10 μK, and the number of trapped and trapped atoms is not less than 10 ⁷ /s. The surface of the decahedral vacuum glass cavity is coated with anti-reflection film, the cooling light transmittance is better than 99.9%, the optical power loss is better than 3%, and the beam power stability is 1.1%, which can greatly improve the stability and anti-vibration characteristics of the vacuum system; The optical module is output through each unit fiber, and the number of lasers is reduced by the beat-frequency phase-locked unit. In the frequency spectrum range of 10-100Hz, the phase noise of the Raman light is less than -80dBc@60Hz. The output power of the second Raman light is higher than 500mw, the power stability is 2.8%, and the fringe contrast of the co-directional interferometer is 83%. At the same time, the system is more compact and the optical path is highly stable, which improves the resistance of the optical path system to temperature changes and ambient airflow changes. The utility model can meet the engineering requirements of miniaturized cold atom inertial devices.

Laser cooling of atoms in atomic interferometer, vacuum technology, and atomic interference are general technologies, which are not discussed in detail in this patent.

The specific embodiments described herein are merely illustrative of the spirit of the present invention. Those skilled in the art of the present invention can make various modifications or supplements to the described specific embodiments or replace them in similar ways, but will not deviate from the spirit of the present invention or go beyond the appended claims the defined range.

Claims (5)

1. A compact atom interferometer integrated device, comprising a physical system, characterized in that the physical system comprises a decahedral vacuum glass cavity (100), and the decahedral vacuum glass cavity (100) includes a decahedral vacuum glass cavity (100) that is uniformly distributed in the circumferential direction. One side round glass window, second side round glass window, third side round glass window, fourth side round glass window, fifth side round glass window, sixth side round glass window The glass window, the seventh side circular glass window, and the eighth side circular glass window, the decahedral vacuum glass chamber (100) further includes a front circular light-transmitting window and a rear circular light-transmitting window, Outside the first side round glass window, outside the second side round glass window, outside the third side round glass window, outside the fourth side round glass window, outside the fifth side round glass window, A first collimating beam expander (201), a beam expander shaper (7), and a second collimating beam expander ( 202), a fluorescence detection and collection device (6), a third collimating beam expander (203), a first reflecting device (501), and a fourth collimating beam expander (204), outside the front circular light-transmitting window A fifth collimating beam expander (205) is provided, and a second reflecting device (502) is provided on the outside of the rear circular light-transmitting window, The eighth side circular glass window is connected to one end of the glass tube (104), the other end of the glass tube (104) is connected to the base (106), the base (106) is sealedly connected to the metal flange (801), and the cube vacuum chamber (804) The right window (802) of the square body vacuum chamber (804) is sealed with the metal flange (801), and the right window (802) of the cube vacuum chamber (804) is also welded with an alkali metal release agent (103) through a vacuum connector, and the cube body vacuum chamber (804) The front side window (803) of the fixed ion pump (9), An anti-Helmholtz coil (3) and a Helmholtz coil (4) are arranged outside the decahedral vacuum glass cavity (100). 2. A compact atom interferometer integrated device according to claim 1, wherein the output of the first collimating beam expander (201) and the third collimating beam expander (203) The outgoing optical axes are collinear, the outgoing optical axes of the second collimating beam expander (202) and the fourth collimating beam expander (204) are collinear, and the outgoing optical axis of the beam expander (7) is collinear with the first reflecting device ( The reflected light of 501) is collinear, and the exit optical axis of the fifth collimating beam expander (205) and the reflected light of the second reflecting device (502) are collinear. 3. A compact atom interferometer integrated device according to claim 1, characterized in that, the first reflection device (501) comprises a first external quarter-wave plate and a first external mirror , the outgoing optical axis of the beam expander (7) is perpendicular to the second side circular glass window, the sixth side circular glass window, and the first external mirror, and the first external quarter-wave plate is located at between the sixth side circular glass window and the first external mirror outside the sixth side circular glass window; The second reflection device (502) includes a second external quarter-wave plate and a second external reflection mirror, and the exit optical axis of the fifth collimating beam expander (205) is in sequence with the front circular light-transmitting window, the back circular The circular light-transmitting window and the second external reflecting mirror are vertical, and the second external quarter-wave plate is located between the rear circular light-transmitting window and the second external reflecting mirror outside the rear circular light-transmitting window. 4. A compact atom interferometer integrated device according to claim 1, characterized in that, further comprising an optical system, the optical system comprising a cooling optical module, The cooling light module includes a cooling light laser. The single-frequency laser generated by the cooling light laser is divided into two single-frequency lasers after passing through the first light splitting unit. One of the single-frequency lasers is output to the first frequency stabilization unit, and the other single-frequency laser is output. The cooling light is obtained through the first laser power amplifying unit and the first acousto-optic modulator unit, and the cooling light is divided into the first cooling light ~ the fifth cooling light by the beam splitting shaping unit and enter the first collimating beam expander (201) ~ the fifth cooling light respectively Collimating beam expander (205). 5 . The compact atom interferometer integrated device according to claim 4 , wherein the optical system further comprises a Raman optical module, and the Raman optical module comprises a first Raman optical laser and a second Raman optical laser. 6 . Raman light laser, the first Raman light output by the first Raman light laser is divided into two beams after passing through the second light splitting unit, part of the first Raman light is output to the second frequency stabilization unit, and the rest of the first Raman light is output to the second frequency stabilization unit. The Raman light is input to the second laser power amplifying unit and the second Raman light laser outputs the second Raman light to combine the beam to obtain the combined Raman light. Part of the combined Raman light is input to the beat lock unit, and the rest is combined. The Raman light passes through the second acousto-optic modulator unit to obtain the output Raman light, and the output Raman light is transmitted to the beam expander shaper (7) through the beam combining shaping unit.

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