CN215983613U - Drying groove and drying equipment - Google Patents

Abstract

The utility model discloses a drying groove and drying equipment, and relates to the technical field of photovoltaics, so that the air quantity entering a drying cavity is more uniform, air leakage is reduced, and the drying effect and the drying efficiency are improved. The drying tank includes: a tank body having a chamber; the groove body is provided with an opening communicated with the cavity; the isolation structure is arranged in the groove body and divides the cavity into a drying cavity and a first air duct; the side surface of the isolation structure adjacent to the opening is provided with at least one first air outlet part which is communicated with the drying cavity and the first air duct; the groove cover is used for controlling the opening and closing of the opening, and a second air duct and at least one second air outlet part communicated with the second air duct are arranged inside the groove cover; when the slot cover closes the opening, the first air duct is communicated with the second air duct, and the at least one second air outlet part is communicated with the drying cavity and the second air duct. The drying equipment comprises the drying groove provided by the technical scheme. The drying groove provided by the utility model is used in the photovoltaic field.

Description

Drying groove and drying equipment

Technical Field

The utility model relates to the technical field of photovoltaics, in particular to a drying groove and drying equipment.

Background

At present, in the process of processing silicon wafers, the cleaned silicon wafers need to be placed in a drying tank to be dried. The drying groove comprises a groove body and a groove cover covering the groove body. The groove body comprises a drying cavity, an air duct and an air supply device arranged in the air duct. The air duct is communicated with the drying cavity, and the air supply device is used for supplying hot air to the air duct and the drying cavity.

In the prior art, the air outlet in wind channel is located the lateral part in stoving chamber, and not only the amount of wind that not only makes the entering stoving intracavity is inhomogeneous, leads to the unable whole by the stoving of silicon chip, and the wind in the wind channel can also spill from the gap between cell body and the capping moreover, influences stoving effect and drying efficiency.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide a drying groove and drying equipment, which enable the air quantity entering a drying cavity to be more uniform, reduce air leakage and improve the drying effect and the drying efficiency.

In a first aspect, the present invention provides a drying tub comprising: the groove body is provided with a cavity, and the groove body is provided with an opening communicated with the cavity. And the isolation structure is arranged in the groove body and divides the cavity into a drying cavity and a first air duct. The side face of the isolation structure adjacent to the opening is provided with at least one first air outlet part for communicating the drying cavity with the first air duct, and a slot cover for controlling the opening to be opened and closed. The groove cover is internally provided with a second air duct and at least one second air outlet part communicated with the second air duct. When the slot cover closes the opening, the first air duct is communicated with the second air duct, and the at least one second air outlet part is communicated with the drying cavity and the second air duct.

Under the condition of adopting above-mentioned technical scheme, after the slot lid closed the opening, first wind channel and second wind channel intercommunication, at least one second air-out portion intercommunication stoving chamber and second wind channel, the wind in the first wind channel can get into the stoving intracavity through at least one first air-out portion, can also flow to the second wind channel from first wind channel, then get into the stoving chamber through at least one second air-out portion. Compared with the prior art that the air outlet parts are arranged on the side parts only, the upper part of the groove body is not provided with a sealing structure, so that the air quantity of the side parts is uneven, and the air in the drying groove can leak from the upper part of the groove body, the upper part of the groove body of the drying groove provided by the utility model is provided with the groove cover, the groove cover is provided with at least one second air outlet part, so that the surplus air of the first air channel is guided to the second air channel at the top part, and then the air is discharged through the at least one second air outlet part, thereby avoiding air leakage, forming the simultaneous air outlet at the top part and the side surface, fully utilizing the air quantity, enabling the air outlet to be more even, accelerating the drying speed of the silicon wafer, improving the drying effect, reducing the generation of the silicon wafer with poor quality, avoiding the occurrence of wet wafers, dirty wafers, fragments and the like, and effectively improving the production efficiency and the yield.

In a possible implementation manner, the drying slot further comprises an air duct switch structure for controlling the on-off of the first air duct and the second air duct. The on-off of the first air channel and the second air channel can be controlled through the air channel switch structure, and then the silicon wafer double-air field or single-air field in the drying cavity is dried.

As one example, the air duct opening and closing structure includes a removable air baffle disposed within the first air duct or the second air duct.

As another example, the air duct opening and closing structure includes a valve disposed in the first air duct or the second air duct.

In a possible implementation manner, the air outlet area of the at least one first air outlet portion is larger than the air outlet area of the at least one second air outlet portion.

Under the condition of adopting the technical scheme, the air entering the drying cavity from the at least one second air outlet part is the residual air in the first air channel. Based on this, the amount of wind that gets into the stoving intracavity from at least one first air-out portion is greater than the amount of wind that gets into the stoving intracavity from at least one second air-out portion, and the amount of wind of lateral part is greater than the amount of wind of top promptly for the wind that utilizes when drying the silicon chip uses the lateral part as the owner, and the top is for assisting, make full use of the current amount of wind in the stoving inslot, accelerated the stoving speed of silicon chip, improved drying efficiency.

In a possible implementation manner, the number of the first air outlet parts is multiple. The plurality of first air outlet parts are distributed along the groove depth extending direction vertical to the groove body.

Under the condition of adopting above-mentioned technical scheme, a plurality of first air-out portions are arranged in sending the wind in the first wind channel to the stoving intracavity, and a plurality of first air-out portions distribute along the groove depth extending direction of perpendicular to cell body for the wind that sends out from first air-out portion can follow the height entering stoving intracavity of difference, and dry the silicon chip simultaneously, improved drying efficiency, can also avoid because of the local dirty or wet piece etc. of silicon chip that the wind direction is single leads to, improved the silicon chip yield.

In one possible implementation, the at least one first air outlet portion is a stepped air outlet portion. The air outlet area of the stepped air outlet part along the groove depth increasing direction of the groove body is reduced.

Adopt under the circumstances of above-mentioned technical scheme, the air-out area of cascaded air-out portion reduces along the groove depth increase direction of cell body for along with the direction of groove depth increase, the air output reduces gradually, not only can give the second wind channel wind-guiding, can also make the air-out even, improves the circulation of wind, and then improves drying efficiency.

In a possible implementation manner, the at least one first air outlet portion includes a plurality of first air outlets distributed at intervals along the groove depth extending direction of the groove body. Along the groove depth increasing direction of the groove body, the air outlet area of the first air outlets is reduced.

In one possible implementation, the at least one first air outlet is a strip-shaped air outlet. The extending direction of the strip-shaped air outlet is vertical to the extending direction of the groove depth of the groove body; or, at least one first air outlet is a through hole.

Under the condition of adopting above-mentioned technical scheme, when at least one first air outlet is the bar air outlet, the extending direction of bar air outlet perpendicular to groove depth extending direction of cell body for the wind direction of the wind of seeing off from first air outlet is parallel with the plane at silicon chip place, under the condition that does not cause the silicon chip piece, has improved the efficiency that the silicon chip was dried.

In a possible realization, the side of the insulation structure opposite the opening is provided with at least one return. At least one air return part is detachably connected with the tank body. At least one air return part is provided with at least one air return opening which is communicated with the drying cavity and the first air channel.

Under the condition of adopting above-mentioned technical scheme, the gas in the stoving intracavity can carry out the return air through at least one return air inlet on the return air portion, then gets into first wind channel again and dries the silicon chip. The air return opening is arranged, so that air in the drying groove can flow circularly, and the production cost is reduced. At least one air return portion is detachably connected with the groove body, so that the air return portion is convenient to replace.

In one possible implementation, the isolation structure comprises a bottom wall and at least one side wall connected to each other. The bottom wall and at least one side wall enclose a drying cavity. At least one first air outlet part is arranged on at least one side wall. The side wall also has at least one adjustment portion. At least one adjusting portion is used for adjusting the position of the corresponding side wall in the vertical direction. At least one side wall is detachably connected with the groove body. The position of the side wall in the vertical direction can be adjusted through at least one adjusting part, and then the position of at least one first air outlet part in the vertical direction is adjusted, so that the up-middle-down adjustment of the wind direction is realized, and the output position of the wind sent out from the side wall in the vertical direction is convenient to adjust according to specific conditions. At least one side wall can be dismantled with the cell body and be connected, the change of the side wall of being convenient for.

In a possible implementation manner, the isolation structure further comprises at least one wind-isolating plate detachably connected with the tank body. The isolation structure includes a first state and a second state. When the isolation structure is in the first state, at least one isolation plate is separated from the groove body, at least one side wall is detachably connected with the groove body, and a drying cavity is enclosed by the at least one side wall and the bottom wall. When the isolation structure is in the second state, at least one side wall is separated from the groove body, at least one wind isolation plate is detachably connected with the groove body, and a drying cavity is enclosed by the at least one wind isolation plate and the bottom wall.

Adopt under the condition of above-mentioned technical scheme, the lateral wall has first air-out portion, and the air baffle does not have the air outlet. When isolation structure was in first state, at least one lateral wall and cell body can be dismantled and link together, and the wind in the stoving inslot can be dried the silicon chip of stoving intracavity in step through at least one first air-out portion on the lateral wall and at least one second air-out portion on the capping this moment, forms stable two wind fields, has improved stoving speed and stoving effect. When the isolation structure is in the second state, at least one wind isolation plate is detachably connected with the groove body, and at the moment, the wind in the drying groove can carry out single wind field drying on the silicon wafers in the drying cavity through at least one second wind outlet part on the groove cover. The side wall and the wind isolation plate are detachably connected with the groove body and can be replaced between the side wall and the wind isolation plate according to different conditions.

In a second aspect, the present invention further provides a drying apparatus, including the drying slot described in the first aspect or any one of the possible implementation manners of the first aspect.

The beneficial effects of the drying apparatus provided by the second aspect are the same as the beneficial effects of the drying tub described in the first aspect or any possible implementation manner of the first aspect, and are not described herein again.

In a possible implementation manner, the drying device further comprises an air supply device positioned in the first air duct; and/or the drying equipment further comprises a heating device positioned in the first air duct.

Drawings

The accompanying drawings, which are included to provide a further understanding of the utility model and are incorporated in and constitute a part of this specification, illustrate embodiments of the utility model and together with the description serve to explain the utility model and not to limit the utility model. In the drawings:

fig. 1 is a left side view of a drying apparatus provided in an embodiment of the present invention;

fig. 2 is a front view of a drying apparatus according to an embodiment of the present invention;

FIG. 3 is a schematic view of a sidewall provided in accordance with an embodiment of the present invention;

fig. 4 is a perspective view of a drying apparatus according to an embodiment of the present invention.

Reference numerals:

10-a drying groove, 100-an isolation structure,

101-a drying chamber, 102-a first air duct,

103-a first air outlet part, 104-a groove cover,

105-a second air duct, 106-a vent,

1030-a first air outlet, 107-an air return part,

108-a support frame, 1080-a positioning piece,

109-a filter screen, 1000-a bottom wall,

1001-side wall, 1-drying equipment,

11-an air supply device, 12-a heating device,

13-drive means, 14-slot cover frame,

15-cylinder, 16-cylinder mounting bracket,

17-in-place sensor, 2-silicon chip,

3-flower basket, 10010-regulating part.

Detailed Description

In order to make the technical problems, technical solutions and advantageous effects to be solved by the present invention more clearly apparent, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the utility model and are not intended to limit the utility model.

It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or be indirectly connected to the other element.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise. The meaning of "a number" is one or more unless specifically limited otherwise.

In the description of the present invention, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention.

In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.

With the continuous development of world economy, the demand of modern construction for high-efficiency energy is continuously increased. Photovoltaic power generation is increasingly valued by countries in the world and is vigorously developed as a green energy source and one of the main energy sources for sustainable development of human beings. The monocrystalline silicon wafer is used as a basic material for photovoltaic power generation, the production of the silicon wafer is an important link in a solar photovoltaic industry chain due to wide market demands, strict quality inspection needs to be carried out on the silicon wafer product, and the appearance shape of the silicon wafer directly influences the quality of a solar cell.

The insert cleaning is an important link in the production of silicon wafers, and the silicon wafers are required to be separated and inserted into a flower basket during cleaning. After the solution is cleaned and dried, the finished product is required to be conveyed to a rear working section for detection. Most of liquid is remained on the cleaned silicon wafer, and the silicon wafer needs to be dried and then flows into the post-process. When drying, the cleaned silicon wafer needs to be placed in a drying groove in drying equipment to be dried. Due to the design problem of the drying groove body, the problems of air leakage, non-uniform air quantity inside the groove body and the like can occur in the drying groove, so that the cleaned silicon wafer cannot be completely dried. The normal production of the silicon wafer is seriously influenced, and the silicon wafer is not cleaned completely and is greatly lost.

Fig. 1 illustrates a left side view of a drying apparatus provided in an embodiment of the present invention.

Fig. 2 illustrates a front view of a drying apparatus provided in an embodiment of the present invention.

As shown in fig. 1 and 2, an embodiment of the present invention provides a drying tub 10, including: the groove body is provided with a cavity, and the groove body is provided with an opening communicated with the cavity. An isolation structure 100 is arranged in the groove body, and the isolation structure 100 divides the chamber into a drying cavity 101 and a first air duct 102. The side of the isolation structure 100 adjacent to the opening has at least one first air outlet 103 for communicating the drying cavity 101 with the first air duct 102, and a slot cover 104 for controlling the opening and closing of the opening. The slot cover 104 has a second air duct 105 and at least one second air outlet portion communicated with the second air duct 105. When the slot cover 104 closes the opening, the first air duct 102 is communicated with the second air duct 105, and at least one second air outlet portion is communicated with the drying cavity 101 and the second air duct 105.

In specific implementation, as shown in fig. 1 and 2, after the flower basket 3 carrying the silicon wafers 2 is put into the drying chamber 101 from the opening, the opening is closed by closing the slot cover 104. A part of air in the cavity enters the drying cavity 101 from the first air duct 102 through at least one first air outlet portion 103 on the side surface to dry the silicon wafer 2, and the other part of air passes through the first air duct 102 to enter the second air duct 105 and enters the drying cavity 101 from the slot cover 104 through at least one second air outlet portion on the slot cover 104 to dry the silicon wafer 2. After the drying is finished, the slot cover 104 is opened, and the flower basket 3 is taken out through the opening.

As can be seen from the above composition structure and the specific implementation process of the drying slot 10, as shown in fig. 1 and fig. 2, after the slot cover 104 closes the opening, the first air duct 102 is communicated with the second air duct 105, the at least one second air outlet portion is communicated with the drying cavity 101 and the second air duct 105, and the air in the first air duct 102 can enter the drying cavity 101 through the at least one first air outlet portion 103, and can also flow from the first air duct 102 to the second air duct 105, and then enter the drying cavity 101 through the at least one second air outlet portion. Compared with the prior art that the air outlet parts are arranged on the side parts only, the upper part of the groove body is not provided with a sealing structure, so that the air quantity of the side parts is uneven, and the air in the drying groove 10 can leak from the upper part of the groove body, the groove cover 104 is arranged on the upper part of the groove body of the drying groove 10 provided by the utility model, and at least one second air outlet part is arranged on the groove cover 104, so that the surplus of the air in the first air channel 102 is guided to the second air channel 105 and then exhausted through the at least one second air outlet part, thereby avoiding air leakage, forming a double air field for simultaneously exhausting air from the top and the two sides of the side surface, fully utilizing the air quantity, leading the air quantity entering the drying cavity 101 to be more even, accelerating the drying speed of the silicon wafer 2, improving the drying effect, reducing the generation of the silicon wafer 2 with poor quality, avoiding the occurrence of wet wafers, dirty wafers, fragments and the like, and effectively improving the production efficiency and the yield.

In some examples, as shown in fig. 1 and 2, through holes for communicating the first air duct 102 and the second air duct 105 are respectively formed at two ends of the slot cover 104, and the air in the first air duct 102 can enter the second air duct 105 in the slot cover 104 through the through holes and then enter the drying cavity 101 through at least one second air outlet portion.

In some examples, drying tub 10 also includes at least one vent 106, as shown in fig. 1. After a part of air in the cavity enters the second air duct 105 from the first air duct 102, the part of air can synchronously enter the drying cavity 101 through the at least one ventilation hole 106 and the at least one second air outlet part, and the ventilation hole 106 can increase the air outlet quantity at the top to accelerate the drying speed of the silicon wafer 2.

Illustratively, as shown in fig. 1, the drying tub 10 includes 10 ventilation holes 106.

In some examples, the number of the first wind outlet portions 103 may be 10, and the number of the second wind outlet portions may be 5.

As a possible implementation manner, the air outlet area of the at least one first air outlet portion 103 is larger than the air outlet area of the at least one second air outlet portion. The air entering the drying cavity 101 from the at least one second air outlet portion is the residual air in the first air duct 102. Based on this, the air volume entering the drying cavity 101 from the at least one first air outlet part 103 is larger than the air volume entering the drying cavity 101 from the at least one second air outlet part, that is, the air volume of the side part is larger than the air volume of the top part, so that the air used for drying the silicon wafer 2 is mainly used by the side part and assisted by the top part, the existing air volume in the drying groove 10 is fully utilized, the drying speed of the silicon wafer 2 is accelerated, and the drying efficiency is improved.

Fig. 3 illustrates a schematic view of a sidewall provided by an embodiment of the present invention.

As a possible implementation manner, as shown in fig. 2 and fig. 3, the number of the first wind outlet portions 103 is plural. The first air outlet portions 103 are distributed along the direction perpendicular to the groove depth extension direction of the groove body. A plurality of first air-out portions 103 are arranged in sending the wind in the first air duct 102 to the drying cavity 101, and a plurality of first air-out portions 103 are distributed along the groove depth extending direction perpendicular to the groove body, so that the wind sent out from the first air-out portions 103 can enter the drying cavity 101 from different heights, and simultaneously dries the silicon wafer 2, thereby improving the drying efficiency, avoiding local dirtiness or wet wafers and the like of the silicon wafer 2 caused by single wind direction, and improving the yield of the silicon wafer 2.

Exemplarily, as shown in fig. 3, the number of the first wind outlet portions 103 is 6, and the 6 first wind outlet portions 103 are symmetrically distributed about the central axis.

In some examples, as shown in fig. 2 and 3, the at least one first air outlet portion 103 is a stepped air outlet portion. The air outlet area of the stepped air outlet part along the groove depth increasing direction of the groove body is reduced. The air-out area of cascaded air-out portion reduces along the groove depth increase direction of cell body for along with the direction of groove depth increase, the air output reduces gradually, not only can give the wind-guiding of second wind channel 105, can also make the air-out even, improves the circulation of wind, and then improves drying efficiency.

In some examples, as shown in fig. 2 and 3, the at least one first wind outlet 103 includes a plurality of first wind outlets 1030 spaced apart along the groove depth extension direction of the groove body. Along the groove depth increasing direction of the groove body, the air outlet area of the first air outlets 1030 is reduced. For example, as shown in fig. 3, each first wind outlet 103 includes 6 first wind outlets 1030 spaced apart along the groove depth extending direction of the slot, and the wind outlet area of each first wind outlet 1030 decreases along the groove depth increasing direction of the slot.

Illustratively, as shown in fig. 2 and 3, the at least one first air outlet 1030 is a strip-shaped air outlet. The extending direction of the strip-shaped air outlet is vertical to the extending direction of the groove depth of the groove body; alternatively, at least one of the first outlets 1030 is a through hole. As shown in fig. 3, when the at least one first air outlet 1030 is a bar-shaped air outlet, the extending direction of the bar-shaped air outlet is perpendicular to the groove depth extending direction of the groove body, so that the wind direction of the wind sent out from the first air outlet 1030 is parallel to the plane where the silicon wafer 2 is located, and the drying efficiency of the silicon wafer 2 is improved without causing fragments of the silicon wafer 2.

As a possible realization, the side of the insulation structure 100 opposite the opening is provided with at least one return 107. At least one return air portion 107 is detachably connected to the tank body. The at least one air return portion 107 has at least one air return opening communicating the drying chamber 101 with the first air duct 102. The air in the drying chamber 101 can be returned through at least one air return opening of the air return part 107 and then enter the first air duct 102 to dry the silicon wafer 2. The arrangement of the air return opening enables air in the drying groove 10 to flow circularly, and production cost is reduced. At least one air return part 107 is detachably connected with the tank body, so that the air return part 107 can be replaced conveniently.

In some examples, as shown in fig. 1, the side of the insulation structure 100 opposite the opening is provided with 2 return ducts 107. 2 air return portions 107 are detachably connected with the tank body. Each of the air return portions 107 has 5 air return openings communicating the drying chamber 101 with the first air passage 102.

As a possible implementation manner, as shown in fig. 1 and fig. 2, the drying slot 10 includes a supporting rack 108 for carrying the flower basket 3, and a positioning member 1080 for positioning and guiding the flower basket 3 is disposed on a surface of the supporting rack 108, and the positioning member 1080 may be an inclined plate-shaped positioning member 1080. In addition, a filter screen 109 can be arranged below the supporting frame 108 and used for stabilizing an air field in the drying cavity 101 and preventing the air in the drying cavity 101 from disturbing each other to generate air field disorder and filtering the air needing return air.

As a possible implementation, as shown in fig. 1 to 3, the isolation structure 100 includes a bottom wall 1000 and at least one side wall 1001 connected to each other. The bottom wall 1000 and the at least one side wall 1001 enclose a drying chamber 101. At least one first air outlet 103 is provided on at least one side wall 1001. The sidewall 1001 also has at least one adjustment 10010. The at least one adjustment portion 10010 is used to adjust the position of the corresponding side wall 1001 in the vertical direction. At least one side wall 1001 is removably connected to the tank. The position of the sidewall 1001 in the vertical direction can be adjusted by the at least one adjusting portion 10010, and then the position of the at least one first air outlet portion 103 in the vertical direction is adjusted, so that the up-middle-down adjustment of the wind direction is realized, and the output position of the wind sent out from the sidewall 1001 in the vertical direction is convenient to adjust for specific situations. At least one side wall 1001 is detachably connected with the tank body, so that the side wall 1001 can be replaced conveniently. For example, two side walls 1001 are removably attached to the tank.

In some examples, as shown in fig. 1 and 3, the isolation structure 100 includes a bottom wall 1000 and two sidewalls 1001 connected to each other. The bottom wall 1000 and the two side walls 1001 enclose a drying chamber 101. Each sidewall 1001 is provided with 6 first air outlet portions 103. The sidewall 1001 also has 4 regulating portions 10010. The 4 adjustment portions 10010 are used to adjust the position of the corresponding side wall 1001 in the vertical direction. As shown in fig. 3, the 4 adjustment portions 10010 are grouped two by two and symmetrically distributed on the left and right ends of the corresponding side wall 1001 with respect to the central axis of the side wall 1001. Regulation portion 10010 can be for the bar regulation hole, can be fixed through connecting pieces such as bolts during the use, and the connecting piece can reciprocate in bar regulation downthehole portion, adjusts lateral wall 1001 position in vertical side in proper order, and then adjusts at least one first air-out portion 103 position in vertical side, realizes adjusting the up-and-down regulation of wind direction.

In some examples, at least one sidewall 1001 is removably connected to the tank. At least one side wall 1001 is detachably connected with the tank body, so that the side wall 1001 can be replaced conveniently. For example, the two side walls 1001 and the trough body are detachably connected.

As a possible implementation manner, as shown in fig. 1 to 3, the isolation structure 100 further includes at least one wind-proof plate detachably connected to the tank body. The isolation structure 100 includes a first state and a second state. When the isolation structure 100 is in the first state, the at least one isolation plate is separated from the tank body, the at least one sidewall 1001 is detachably connected with the tank body, and the at least one sidewall 1001 and the bottom wall 1000 enclose the drying cavity 101. When the isolation structure 100 is in the second state, the at least one sidewall 1001 is separated from the tank body, the at least one wind-isolating plate is detachably connected to the tank body, and the at least one wind-isolating plate and the bottom wall 1000 enclose the drying cavity 101.

It can be seen that the side wall 1001 has the first air outlet portion 103, and the air-separating plate has no air outlet. When the isolation structure 100 is in the first state, at least one sidewall 1001 is detachably connected to the slot body, at this time, the wind in the drying slot 10 can synchronously dry the silicon wafer 2 in the drying cavity 101 through at least one first wind outlet part 103 on the sidewall 1001 and at least one second wind outlet part on the slot cover 104, so that a stable double wind field is formed, and the drying speed and the drying effect are improved. When the isolation structure 100 is in the second state, the at least one wind-isolating plate is detachably connected with the slot body, at this time, the wind in the drying slot 10 can perform single-wind field drying on the silicon wafer 2 in the drying cavity 101 through the at least one second wind outlet portion on the slot cover 104 and the at least one ventilation hole 106, and the wind sent out from the top is parallel to the plane where the silicon wafer 2 is located. The side wall 1001 and the wind isolation plate are detachably connected with the groove body, and can be replaced between the side wall 1001 and the wind isolation plate according to different conditions.

As a possible implementation manner, the drying slot 10 further includes a duct opening and closing structure for controlling the opening and closing of the first duct 102 and the second duct 105. The air duct switch structure is disposed at a connection position of the first air duct 102 and the second air duct 105. The on-off of the first air duct 102 and the second air duct 105 can be controlled through the air duct switch structure, so that the silicon wafer 2 in the drying cavity 101 can be dried in a double-air-field or single-air-field manner. When the air duct opening and closing mechanism controls the communication between the first air duct 102 and the second air duct 105, the drying cavity 101 is filled with air which is sent out from the first air duct 102 through the first air outlet portion 103 and is also filled with air which is sent out from the second air duct 105 through the second air outlet portion, and at the moment, the drying cavity 101 is filled with double air fields for drying. When the air duct opening and closing mechanism controls the first air duct 102 and the second air duct 105 not to be communicated, only the air sent out from the first air duct 102 through the first air outlet portion 103 is in the drying cavity 101, and at the moment, the drying cavity 101 is dried in a single air field.

In some examples, the air duct switch structure includes a removable air deflector disposed within the first air duct 102 or the second air duct 105; alternatively, the air duct opening and closing structure includes a valve disposed in the first air duct 102 or the second air duct 105. In specific implementation, the on-off between the first air duct 102 and the second air duct 105 can be controlled by adjusting the switch of the detachable baffle at the connection position of the first air duct 102 and the air duct, or adjusting the switch of the valve.

Fig. 4 illustrates a perspective view of a drying apparatus according to an embodiment of the present invention.

As shown in fig. 4, an embodiment of the present invention further provides a drying apparatus 1, including the drying slot 10.

Compared with the prior art, the beneficial effects of the drying device 1 provided by the embodiment of the present invention are the same as the beneficial effects of the drying tank 10, and are not described herein again.

As a possible implementation manner, as shown in fig. 1 to 4, the drying apparatus 1 further includes an air supply device 11 located in the first air duct 102; and/or, drying apparatus 1 further includes heating device 12 located within first air duct 102.

In some examples, as shown in fig. 1 to 4, the drying apparatus 1 further includes a driving device 13 located below the respective air supply device 11 to drive the air supply device 11. The number of air supply devices 11 may be two, and correspondingly, the number of driving devices 13 is also two. For example, the air supply 11 may be a 2.2KW high temperature impeller and the drive 13 may be a high speed fan with a power of 2.2KW/2840 r/min. Because the power of the fan of the existing drying equipment 1 is 1.5KW/1800r/min, the wind speed is not enough, the wind stability is not enough, the wind speed is suddenly high or suddenly low, the fan motor is frequently damaged, the production cost is lost, and the normal operation of the subsequent process is influenced. The air supply device 11 provided by the embodiment of the utility model can be a high-speed fan with the power of 2.2KW/2840 r/min. Compared with the prior art, the drying groove 10 provided by the embodiment of the utility model has the advantages that the air outlets are increased, so that the air outlet quantity can be increased by using the high-speed fan, and the drying effect on the silicon wafer 2 is further improved. And the air outlet is less among the prior art, and increase fan power can lead to the amount of wind too big, appears the piece easily. The 2.2KW/2840r/min high-speed fan is matched with the 2.2KW high-temperature resistant impeller, so that the air output of the air supply equipment provided by the embodiment of the utility model is increased by more than 50% compared with the prior art.

In some examples, the heating device 12 may be a heating wire, a heating tube, or the like. For example, as shown in fig. 1 to 4, the heating device 12 may be a U-shaped heating pipe, and 6U-shaped heating pipes are symmetrically distributed on both sides of the first air duct 102. After the gas in the cavity is heated, the silicon wafer 2 can be dried simultaneously through the flowing of wind and the heat contained in the wind, so that the drying speed is accelerated.

As a possible implementation, as shown in fig. 4, drying apparatus 1 further includes a chute cover frame 14 located above drying chute 10, and chute cover 104 is movable back and forth in a horizontal direction close to and away from the upper surface of drying chute 10 within chute cover frame 14. In specific implementation, when the silicon wafer 2 needs to be dried, after the flower basket 3 carrying the silicon wafer 2 is placed, the slot cover 104 can be moved to the upper surface of the drying slot 10; when the drying of the silicon wafers 2 is finished, the slot cover 104 can be moved to the end of the slot cover 104 frame far away from the drying slot 10, and then the flower basket 3 is taken out.

In some examples, the manner of movement of the slot cover 104 within the slot cover frame 14 may be driven electrically, pneumatically, or hydraulically, among others. Illustratively, when the moving manner of the slot cover 104 in the slot cover frame 14 is pneumatic, the drying apparatus 1 further includes a cylinder 15 and a cylinder mounting rack 16 disposed above the slot cover frame 14, and the slot cover 104 can move back and forth in a horizontal direction close to and away from the upper surface of the drying slot 10 along the direction of the cylinder mounting rack 16 under the driving of the cylinder 15. When the moving manner of the slot cover 104 in the slot cover frame 14 is pneumatic, the drying apparatus 1 may further include an in-position sensor 17 provided at an end of the slot cover frame 14 away from the drying slot 10, and the in-position sensor 17 may limit and assist the slot cover 104 when the slot cover 104 is moved to a position away from the drying slot 10.

In the foregoing description of embodiments, the particular features, structures, materials, or characteristics may be combined in any suitable manner in any one or more embodiments or examples.

The above description is only for the specific embodiments of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art can easily conceive of the changes or substitutions within the technical scope of the present invention, and all the changes or substitutions should be covered within the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the appended claims.

Claims (10)

1. A drying tub, comprising:

a tank body having a chamber; the groove body is provided with an opening communicated with the cavity;

the isolation structure is arranged in the groove body and divides the cavity into a drying cavity and a first air channel; the side face of the isolation structure adjacent to the opening is provided with at least one first air outlet part which is communicated with the drying cavity and the first air duct;

the groove cover is used for controlling the opening and closing of the opening, and a second air duct and at least one second air outlet part communicated with the second air duct are arranged inside the groove cover;

when the slot cover closes the opening, the first air duct is communicated with the second air duct, and the at least one second air outlet portion is communicated with the drying cavity and the second air duct.

2. The drying tub according to claim 1, further comprising a duct opening/closing structure for controlling the opening/closing of the first duct and the second duct;

the air duct switch structure comprises a detachable air baffle arranged in the first air duct or the second air duct; or the like, or, alternatively,

the air duct switch structure comprises a valve arranged in the first air duct or the second air duct.

3. The drying slot according to claim 1, wherein an air outlet area of the at least one first air outlet portion is larger than an air outlet area of the at least one second air outlet portion.

4. The drying slot according to claim 1, wherein the number of the first air outlet portions is plural, and the plural first air outlet portions are distributed along a slot depth extending direction perpendicular to the slot body.

5. The drying slot according to claim 1, wherein at least one of the first air outlet portions is a stepped air outlet portion, and an air outlet area of the stepped air outlet portion in a slot depth increasing direction of the slot body is reduced.

6. The drying slot as claimed in claim 5, wherein at least one of the first air outlet portions comprises a plurality of first air outlets distributed at intervals along the slot depth extending direction of the slot body;

and along the groove depth increasing direction of the groove body, the air outlet area of the first air outlets is reduced.

7. The drying slot according to claim 6, wherein at least one of the first air outlets is a strip-shaped air outlet, and the extension direction of the strip-shaped air outlet is perpendicular to the extension direction of the slot depth of the slot body; or the like, or, alternatively,

at least one first air outlet is a through hole.

8. The drying slot according to any one of claims 1 to 7, wherein at least one air return portion is arranged on a side surface of the isolation structure opposite to the opening, the at least one air return portion is detachably connected with the slot body, and the at least one air return portion is provided with at least one air return opening communicating the drying cavity with the first air duct.

9. The drying slot according to any one of claims 1 to 7, wherein the isolation structure comprises a bottom wall and at least one side wall connected with each other, the bottom wall and the at least one side wall define the drying cavity, and the at least one first air outlet portion is arranged on the at least one side wall; the side walls are also provided with at least one adjusting part which is used for adjusting the position of the corresponding side wall in the vertical direction; the at least one side wall is detachably connected with the groove body.

10. A drying apparatus comprising the drying tub according to any one of claims 1 to 9.

Images