CN217275474U - Bearing assembly and drying device - Google Patents

Abstract

The application discloses carrier assembly and drying device belongs to photovoltaic cell and makes the equipment field. A bearing assembly for bearing a flower basket with silicon wafers mounted thereon, the bearing assembly comprising: drying the groove body and the grid plate; the grid plate is arranged in the drying groove body, and the grid plate, the bottom wall of the drying groove body and at least part of the side wall of the drying groove body are respectively arranged at intervals so as to form an inflation cavity between the grid plate and the bottom wall of the drying groove body and between the grid plate and at least part of the side wall of the drying groove body; the grid plate is provided with a containing cavity for containing the flower basket; the drying groove body is provided with an air inlet which is communicated with the inflation cavity; and a plurality of air blowing holes are distributed in at least partial area of the grid plate and are communicated with the air inflation cavity and the accommodating cavity. A drying device comprises the bearing assembly. The problem of drying tank interior uneven temperature distribution everywhere can be solved at least to this application.

Description

Bearing assembly and drying device

Technical Field

The application belongs to the technical field of photovoltaic cell manufacturing equipment, and particularly relates to a bearing assembly and a drying device.

Background

With the gradual enhancement of energy conservation, environmental protection and sustainable development concepts, the solar photovoltaic cell becomes an indispensable part of green power generation. The first step of solar photovoltaic cell preparation is to clean the silicon wafer, and after cleaning, the silicon wafer needs to be dried so that no water stain exists on the surface of the silicon wafer.

Some current drying methods are to put the basket of flowers that is equipped with the silicon chip into the drying bath and realize hot drying, and the drying bath both sides are equipped with infrared heating pipe, and the tank bottom of drying bath is equipped with circulating fan, makes hot-air at the drying bath inner loop through circulating fan to the stoving of realization basket of flowers and silicon chip in the groove.

However, in the drying process, local ponding is serious in the drying groove, unable rapid drying, and the heating source leads to the temperature inhomogeneous everywhere in the drying groove inside the drying groove, and the whole temperature resistant requirement to the drying groove is higher, leads to manufacturing cost higher.

SUMMERY OF THE UTILITY MODEL

The purpose of the embodiment of the application is to provide a bearing assembly and drying device, can solve the uneven problem of drying inslot temperature distribution everywhere at least.

In order to solve the technical problem, the present application is implemented as follows:

the embodiment of the application provides a bearing assembly for bear the weight of the basket of flowers of installing the silicon chip, bearing assembly includes: drying the groove body and the grid plate;

the grid plate is arranged in the drying groove body, and the grid plate and the bottom wall and at least part of the side wall of the drying groove body are respectively arranged at intervals so as to form an inflatable cavity between the grid plate and the bottom wall and at least part of the side wall of the drying groove body;

the grid plate is provided with a containing cavity for containing the flower basket;

the drying groove body is provided with an air inlet which is communicated with the inflation cavity;

and a plurality of air blowing holes are distributed in at least partial area of the grid plate and are communicated with the air inflation cavity and the accommodating cavity.

Furthermore, the grid plate comprises a plurality of grid plate units which are arranged in sequence, and each grid plate unit is provided with the accommodating cavity;

the side surfaces of two adjacent grid plate units are mutually spaced to form a first cavity unit, the side surface of the grid plate unit positioned at the edge and the side wall of the drying groove body are mutually spaced to form a second cavity unit, the bottom surface of each grid plate unit and the bottom wall of the drying groove body are mutually spaced to form a third cavity unit, and the first cavity unit, the second cavity unit and the third cavity unit are mutually communicated;

the side surface of the grid plate unit is distributed with the air blowing holes, the air blowing holes are communicated with the first cavity unit or the second cavity unit, the bottom surface of the grid plate unit is distributed with the air blowing holes, and the air blowing holes are communicated with the third cavity unit;

the air inlet is arranged on the bottom wall of the drying groove body and communicated with the third cavity unit.

Further, the grid plate unit comprises a first side panel, a second side panel, a bottom panel, a first connecting panel and a second connecting panel which are arranged in a surrounding manner to form the accommodating cavity;

the first side panel and the second side panel are arranged at intervals, the first connecting panel is connected with the first side panel and the bottom panel, and the second connecting panel is connected with the second side panel and the bottom panel;

the first connecting panel and the first side panel and the included angle between the bottom panels are obtuse angles, and the second connecting panel and the second side panel and the included angle between the bottom panels are obtuse angles.

Furthermore, the first side panel, the second side panel, the bottom panel, the first connecting panel and the second connecting panel are distributed with the air blowing holes.

Further, the second side panel of one of the grid plate units is parallel to the first side panel of the adjacent grid plate unit, and the second side panel is connected with the respective end of the first side panel, which is far away from the bottom panel;

the first side panel or the second side panel of the grid plate unit positioned at the edge is parallel to the side wall of the drying trough body, and the end part of the first side panel or the second side panel, which deviates from the bottom panel, is connected with the side wall of the drying trough body.

Further, the bearing assembly further comprises a cover body and a cover body;

the cover body covers the outer side of the drying groove body and is provided with an opening, and the cover body can be arranged at the opening of the cover body in an opening and closing mode.

The embodiment of the application also provides a drying device, which comprises a gas conveying assembly, a heating element and the bearing assembly; the gas conveying assembly is provided with a gas outlet end, and the gas outlet end is connected to the gas inlet hole of the drying groove body; the heating element is arranged on the gas delivery assembly to heat the gas delivered by the gas delivery assembly.

Further, the gas conveying assembly comprises a wind guide pipeline, a fan and a flow dividing pipeline; the fan and the heating element are both connected to the air guide pipeline; the diversion pipeline comprises a main pipe and a plurality of branch pipes connected with the main pipe, the branch pipes are correspondingly connected to the air inlet holes, and the main pipe is connected with the air guide pipeline.

Further, the drying device also comprises a first filtering component; the first filter component is connected to the air guide pipeline and is positioned in the area adjacent to the diversion pipeline.

Further, the drying device also comprises a shell; the bearing assembly, the gas delivery assembly and the heating element are all arranged in the shell;

the casing is equipped with the intercommunication the inner chamber of casing and the air intake of external environment, air intake department is equipped with second filter element.

In the application, the grid plate is provided with the accommodating cavity, and the flower basket provided with the silicon wafer can be accommodated through the accommodating cavity, so that an installation space is provided for the flower basket; the grid plate is arranged in the drying groove body, an air inflation cavity is formed between the grid plate and the drying groove body, a plurality of air blowing holes are distributed in at least partial area of the grid plate, and heated air in the air inflation cavity can be blown to the flower basket and the silicon wafer in the accommodating cavity through the air blowing holes, so that the flower basket and the silicon wafer can be dried, and the drying speed of the flower basket and the silicon wafer is increased; in addition, the containing cavity can be filled with heated gas through the air inlet hole, so that the heated gas is ensured to be blown continuously. Compared with the mode that the heating pipe and the circulating fan are arranged in the groove body of the drying groove of the current drying equipment, the heating pipe is not required to be arranged in the drying groove body, heating gas is blown to the accommodating cavity body through the plurality of air blowing holes, so that the temperature in the accommodating cavity body is more uniform, the drying groove body is not directly heated by the heating pipe, the requirement on the integral temperature resistance of the drying groove body is relatively low, and the manufacturing cost of the drying groove body is reduced; in addition, a plurality of gas holes distribute in at least partial region of grid tray, can increase the stoving area to can also reduce the required time of stoving to a certain extent to the regional gas hole that distributes that is difficult for drying, improve drying efficiency.

Drawings

FIG. 1 is a schematic view of a first structure of a load bearing assembly disclosed in an embodiment of the present application;

FIG. 2 is a second structural schematic diagram of a load bearing assembly disclosed in an embodiment of the present application;

FIG. 3 is a third structural schematic view of a load bearing assembly according to an embodiment of the present disclosure;

FIG. 4 is a schematic structural diagram of components such as a carrying assembly, a flower basket and a flower basket support disclosed in the embodiments of the present application;

fig. 5 is a schematic structural diagram of a drying device disclosed in the embodiment of the present application.

Description of reference numerals:

100-a carrier assembly; 110-drying the trough body; 111-a bottom wall; 1111-air inlet hole; 112-a first side wall; 113-a second sidewall; 120-grid plate; 121-a grid plate unit; 1211-first side panel; 1212-second side panel; 1213-bottom panel; 1214-a first connection panel; 1215-a second connection panel; 122-air blowing holes; 130-a cover body; 140-a housing;

200-a housing;

300-a gas delivery assembly; 310-a wind-guiding duct; 320-a fan; 330-a shunt pipe; 331-main tube; 332-branch pipes;

400-a heating element;

510-a first filter element; 520-a second filter element;

600-flower basket: 610-gaily decorated basket pole; 620-limiting plate:

700-flower basket support:

a-an inflatable cavity; a 1-first cavity unit: a2 — second cavity unit; a 3-third cavity unit; b-containing cavity.

Detailed Description

The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are some, but not all, embodiments of the present application. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.

The terms first, second and the like in the description and in the claims of the present application are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It will be appreciated that the data so used may be interchanged under appropriate circumstances such that embodiments of the application may be practiced in sequences other than those illustrated or described herein, and that the terms "first," "second," and the like are generally used herein in a generic sense and do not limit the number of terms, e.g., the first term can be one or more than one.

The embodiments of the present application are described in detail below with reference to the accompanying drawings through specific embodiments and application scenarios thereof.

Referring to fig. 1 to 5, an embodiment of the present application provides a carrier assembly 100 for carrying a basket 600 with silicon wafers, where the carrier assembly 100 may be applied to a drying device, and the basket 600 and the silicon wafers may be dried by the drying device.

In some embodiments, the flower basket 600 may include two limiting plates 620 arranged at intervals and a plurality of flower basket rods 610 connected between the two limiting plates 620, wherein the flower basket rods 610 are provided with a plurality of limiting grooves along the axial direction of the flower basket rods, and the silicon wafer may be clamped and limited by the limiting grooves, so that the silicon wafer may be stably mounted by the limiting grooves formed in the plurality of flower basket rods 610. In addition, the flower basket 600 may be installed by the basket support 700, and optionally, the limiting plate 620 may be snapped to the basket support 700.

In addition, in other embodiments, the flower basket 600 may also adopt other flower basket structures that are common in the related art, and this embodiment does not limit this. The basket 600 may be used to carry half or whole silicon wafers.

When the basket 600 and the silicon wafers mounted on the basket 600 are dried, the basket support 700, the basket rod 610 and the limiting plate 620 can be also dried by the drying device, so that the drying of the silicon wafers, the basket support 700, the basket rod 610, the limiting plate 620 and other components can be realized.

The bearing assembly 100 comprises a drying trough body 110 and a grid plate 120, wherein the grid plate 120 is arranged in the drying trough body 110. Specifically, the drying trough body 110 has an inner cavity, the grid plate 120 is located in the inner cavity, and the grid plate 120 is connected with the drying trough body 110, so as to ensure the relative fixation of the grid plate 120 and the drying trough body 110. Moreover, the grid plate 120 and the bottom wall 111 and at least part of the side wall of the drying trough body 110 are arranged at intervals, so that an air-filled cavity A is formed between the grid plate 120 and the bottom wall 111 and at least part of the side wall of the drying trough body 110.

Optionally, the drying trough body 110 may include a first side wall 112 and a second side wall 113 spaced apart from each other along a first direction, a third side wall and a fourth side wall spaced apart from each other along a second direction, and a bottom wall 111, the first direction is perpendicular to the second direction, the first side wall 112, the second side wall 113, the third side wall and the fourth side wall are connected end to end, and the four are connected to the bottom wall 111, so that the four side walls and the bottom wall 111 jointly enclose an inner cavity of the drying trough body 110, so as to accommodate the grid plate 120.

In some embodiments, two sides of the louver 120 along the first direction are spaced apart from the first sidewall 112 and the second sidewall 113, respectively, and the bottom of the louver 120 is spaced apart from the bottom wall 111 to form the inflation cavity a.

In other embodiments, two sides of the louver 120 along the first direction may be spaced apart from the first sidewall 112 and the second sidewall 113, two sides of the louver 120 along the second direction may be spaced apart from the third sidewall and the fourth sidewall, and the bottom of the louver 120 may be spaced apart from the bottom wall 111 to form the inflation cavity a.

It should be understood that, besides the two embodiments described above, other embodiments are also possible, and the examples of the present application do not limit this.

Above-mentioned inflation cavity A is used for holding heated gas, certainly, considers along with drying process's going on, and the heated gas volume in the inflation cavity A reduces gradually, in order to guarantee that heated gas is enough to dry components such as silicon chip, basket 600, and stoving cell body 110 is equipped with inlet port 1111, and this inlet port 1111 communicates with inflation cavity A. Based on this, the heating gas can be filled into the gas-filled cavity A through the gas inlet 1111, so as to ensure the required amount of the heating gas for the drying process.

The grid plate 120 has a receiving cavity B for receiving the flower basket 600, so as to place the flower basket 600 and the silicon wafer mounted on the flower basket 600. Before the drying process is performed, the basket 600 with the silicon wafers mounted thereon is placed in the accommodating chamber B.

The grid plate 120 is provided with a basket support 700 for fixing the basket 600. For example, the basket holder 700 may be fixed to the wall of the accommodating cavity B, and the basket 600 may be fixed by the basket holder 700 to prevent the basket 600 and silicon chips thereon from moving during the drying process. It should be noted that, regarding the specific structure of the flower basket support 700 and the installation manner thereof, reference may be made to the prior art, and details thereof are not described herein.

The grid plate 120 is provided with a plurality of air blowing holes 122 for drying components such as silicon wafers and flower baskets 600, and the air blowing holes 122 are communicated with the air inflation cavity A and the accommodating cavity B. Based on this, the heated air in the inflation cavity a can be blown to the accommodation cavity B along the air blowing holes 122, and the flower basket 600 in the accommodation cavity B and the silicon wafer thereon are blown, so as to accelerate the drying speed and improve the drying efficiency.

Optionally, the distribution positions of the plurality of air blowing holes 122 on the louver 120 may be set according to actual conditions, specifically, the air blowing holes 122 are arranged at the bottom, the side, and the like of the louver 120, so as to increase the area of the air blowing region and improve the drying efficiency. Of course, the blowing hole 122 may be separately disposed at a position where water is likely to accumulate, and specifically, the blowing hole 122 may be disposed at a position opposite to the ground-facing side of the basket rod 610 to blow the ground-facing side of the basket rod 610, so that water accumulation on the ground-facing side of the basket rod 610 may be prevented.

Thus, the blowing direction of the heating gas can be controlled through the distribution of the blowing holes 122 at each position, so that the region which is not easy to dry can be pertinently dried.

Compared with the mode that the heating pipes and the circulating fan 320 are arranged in the groove body of the drying groove of the current drying equipment, the heating pipes are not required to be arranged in the drying groove body 110, and the heating gas is blown to the accommodating cavity B through the blowing holes 122, so that the temperature in the accommodating cavity B is uniform, the drying groove body 110 cannot be directly heated by the heating pipes, the requirement on the overall temperature resistance of the drying groove body 110 is relatively low, and the manufacturing cost of the drying groove body 100 is reduced; in addition, a plurality of gas blowing holes 122 are distributed in at least partial region of grid plate 120, so that the drying area can be increased, and gas blowing holes can be distributed in the region which is not easy to dry, so that the time required by drying can be reduced to a certain extent, and the drying efficiency is improved.

In the embodiment of the present application, the grid plate 120 includes a plurality of grid plate units 121 connected in sequence, and each grid plate unit 121 is provided with an accommodating cavity B. Based on this, through disposing a plurality of grid plate units 121, can hold more basket of flowers 600 to can dry more baskets of flowers 600 and the silicon chip on it simultaneously, can realize drying more silicon chips simultaneously, and then can improve drying efficiency. In this application, the shape of the receiving cavity B corresponds to the shape of the flower basket 600, so that the receiving cavity B and the grid plate unit 121 may be designed according to the shape of the flower basket 600.

In the embodiment of the application, the respective side surfaces of two adjacent grid plate units 121 are spaced from each other to form a first cavity unit a1, and the side surfaces of the grid plate units 121 are distributed with air blowing holes 122, and the air blowing holes 122 are communicated with the first cavity unit a1, so that the drying area can be increased. Based on this, the heated gas in the first chamber unit a1 can be blown into the receiving chamber B through the gas blowing holes 122 on the side of the grill unit 121, so that the basket 600 and the silicon wafer thereon can be blown from the side.

It should be noted here that the blowing holes 122 are distributed on the side of each louver board unit 121, and at this time, the heating gas in the first cavity unit a1 can be blown into the accommodating cavities B of two adjacent louver board units 121 from the blowing holes 122 on both sides, so that the blowing area can be increased, and the drying efficiency can be improved.

In addition, the side of the grid plate unit 121 at the edge is spaced from the side wall of the drying trough body 110 to form a second cavity unit a2, and the side of the grid plate unit 121 is distributed with air blowing holes 122, and the air blowing holes 122 are communicated with the second cavity unit a 2. Based on this, the heated gas in the second chamber unit a2 may be blown into the receiving chamber B through the blowing holes 122 on the side of the grill unit 121, so that the flower basket 600 and the silicon wafer thereon may be blown from the side.

It should be noted here that since the side wall of the drying container 110 is not provided with the blowing holes 122, the heated gas in the second cavity unit a2 is blown into the accommodating cavity B through the blowing holes 122 on the side of the grid plate unit 121 at the edge, so that the flower basket 600 and the silicon wafer thereon can be blown laterally.

Besides, the bottom surface of each grid plate unit 121 and the bottom wall 111 of the drying trough body 110 are spaced from each other to form a third cavity unit A3, and the bottom surface of the grid plate unit 121 is distributed with air blowing holes 122, and the air blowing holes 122 are communicated with the third cavity unit A3. Based on this, the heated gas in the third cavity unit a3 can be blown into the accommodating cavity B through the gas blowing holes 122 on the bottom surface of the grid plate unit 121, so that the flower basket 600 and the silicon wafer thereon can be blown from bottom to top.

In summary, the distribution positions of the air blowing holes 122 can be selected according to actual conditions, so that partial areas can be dried in a targeted manner, the drying efficiency can be improved, and the energy consumption required by drying can be reduced; in addition, the drying area can be increased by distributing the air blowing holes 122 in a plurality of areas, so that the temperature in the bearing assembly 100 is more uniform, and the problem of uneven temperature is solved.

In order to enable the heating gas to enter the first cavity unit A1, the second cavity unit A2 and the third cavity unit A3 respectively, the three can be communicated with each other, so that the heating gas is only required to be introduced into one of the three, the use number of pipelines for introducing the heating gas can be reduced, the pipelines are not required to be arranged, and the structure is simpler.

In some embodiments, the air inlet 1111 opens at the bottom wall 111 of the drying trough body 110, and the air inlet 1111 communicates with the third cavity unit a 3. Based on this, the heating gas can be preferentially charged into the third chamber unit A3 and flows and diffuses to the first chamber unit a1 and the second chamber unit a2 through the third chamber unit A3, respectively, so that the heating gas can be blown to the accommodating chamber B from a plurality of directions to improve the drying efficiency.

In the embodiment of the present application, the grid plate unit 121 may include a first side panel 1211, a second side panel 1212, a bottom panel 1213, a first connecting panel 1214 and a second connecting panel 1215, which together enclose a receiving cavity B. The first side panel 1211 and the second side panel 1212 are disposed in parallel, the first connecting panel 1214 connects the first side panel 1211 and the bottom panel 1213, the second connecting panel 1215 connects the second side panel 1212 and the bottom panel 1213, an included angle between the first connecting panel 1214 and the first side panel 1211, an included angle between the first connecting panel 1214 and the bottom panel 1213 are obtuse, and an included angle between the second connecting panel 1215 and the second side panel 1212 and the bottom panel 1213 are obtuse.

Based on the above arrangement, a U-shaped plate can be enclosed by the first side panel 1211, the first connecting panel 1214, the bottom panel 1213, the second connecting panel 1215 and the second side panel 1212, and the inside of the U-shaped plate is the receiving cavity B.

It should be noted here that the grid plate unit 121 may be an integrally formed structure. Specifically, be, with a slice dull and stereotyped first obtuse angle of buckling along first fold line, then buckle the second obtuse angle along second fold line to same direction again, then buckle the third obtuse angle along third fold line to same direction, at last buckle the fourth obtuse angle along the fourth fold line to same direction, above-mentioned first fold line, the second fold line, third fold line and fourth fold line are all parallel, and first obtuse angle, the second obtuse angle, third obtuse angle and fourth obtuse angle all can equal or be unequal, for example, first obtuse angle and fourth obtuse angle are 120, second obtuse angle and third obtuse angle are 150. Thus, a U-shaped plate member is formed so as to be used as the louver unit 121.

In addition, a plurality of air blowing holes 122 are formed in the first side panel 1211, the first connection panel 1214, the bottom panel 1213, the second connection panel 1215 and the second side panel 1212, so that the air blowing area can be increased and the drying efficiency can be improved.

Considering that the side of the basket shaft 610 facing the ground is easily accumulated with water, the side is disposed opposite to the bottom panel 1213, and thus, the heated air can be blown to the side of the basket shaft 610 facing the ground by providing the blowing holes 122 on the bottom panel 1213, so that the drying speed can be increased.

In the embodiment of the present application, the second side panel 1212 of one of the grid plate units 121 is parallel to the first side panel 1211 of the adjacent grid plate unit 121, and the second side panel 1212 and the first side panel 1211 are connected to each other at the end portion away from the bottom panel 1213, so that a plurality of grid plate units 121 can be connected in sequence. It is understood that the open end of one of the louver units 121 is correspondingly connected to the open end of the other louver unit 121, and the openings of the two louver units face the same direction. Accordingly, the volume of the first chamber unit a1 can be maximized to some extent, and accordingly, the distribution area of the blowing holes 122 can be enlarged, thereby improving the drying efficiency.

Similarly, the first side panel 1211 or the second side panel 1212 of the grid panel unit 121 at the edge is parallel to the sidewall of the drying trough body 110, and the end of the first side panel 1211 or the second side panel 1212, which is away from the bottom panel 1213, is connected to the sidewall of the drying trough body 110. It is understood that the open end of the grid plate unit 121 at the edge is connected to the side wall of the drying chute 110. Based on this, the volume of the second cavity unit a2 can be maximized to some extent, and accordingly, the distribution area of the blowing holes 122 can be maximized, so that the drying efficiency can be improved.

Based on the above arrangement, when the grid plate 120 is manufactured, a plurality of grid plate units 121 may be manufactured separately, and then the plurality of grid plate units 121 are sequentially and fixedly connected to form the whole grid plate 120, wherein the fixed connection manner may be welding, bonding, riveting, screwing, and the like, and is not limited specifically. Thus, the difficulty of manufacturing the louver 120 can be reduced.

In a more specific embodiment, the louver 120 may include two louver units 121. Of course, the method is not limited to the above, and other numbers are also possible, and the embodiment of the present application is not limited to this.

In other embodiments, grid plate 120 may also be of a one-piece construction. Specifically, a flat plate is bent for multiple times to form an integral structure with a preset shape; of course, it is also possible to form a flat plate at a time by stamping. Therefore, the manufacturing efficiency can be improved, and the manufacturing period can be shortened.

Further, in order to place basket of flowers 600 in holding cavity B, can set up the chamfer structure in the junction of two adjacent grid tray units 121 to set up the chamfer structure in the junction of grid tray unit 121 and stoving cell body 110, so, can form flaring structure or open structure at the opening part that holds cavity B, so that place basket of flowers 600.

In this embodiment, the bearing assembly 100 may further include a cover body 140 and a cover body 130, wherein the cover body 140 is covered on the outer side of the drying groove body 110 and is provided with an opening, and the cover body 130 is openably and closably disposed at the opening of the cover body 140.

In some embodiments, the cover body 140 may include a bottom plate and a plurality of side plates disposed at an edge of the bottom plate, bottom ends of the side plates are all fixedly connected to the bottom plate, so that a cavity with an opening is formed, the drying tank 110 is disposed in the cavity, a bottom wall of the drying tank 110 is fixedly connected to the bottom plate of the cover body 140, a notch of the drying tank 110 is disposed toward the opening of the cover body 140, and the cover body 130 is mounted at the opening of the cover body 140 and can be opened or closed, so as to place the flower basket 600 and other members.

In other embodiments, the cover 140 may include a plurality of side plates, and bottom ends of the side plates are all fixedly connected to the bottom wall of the drying trough 110. Thus, the bottom walls of the plurality of side plates and the drying groove body 110 jointly enclose a cavity with an opening, the notch of the drying groove body 110 is arranged towards the opening of the cover body 140, and the cover body 130 is installed at the opening of the cover body 140 and can be opened or closed, so as to place the components such as the flower basket 600.

Alternatively, the cover 130 may be connected to the opening of the cover 140 by a hinge to enable the cover 130 to be opened or closed.

Before the drying process begins, the cover body 130 is closed, so that the inner cavity of the cover body 140 can be closed, heated gas flows in the accommodating cavity B and the cover body 140, the temperature inside the cover body 140 can be kept, the temperature inside the accommodating cavity B can be guaranteed, and the drying effect is promoted.

In addition, a hole may be formed in the cover 130, or a gap may exist between the cover 130 and the cover 140, so that the moist air is normally discharged through the hole or the gap, thereby providing a better drying effect for the basket 600 and the silicon wafer.

In some embodiments, the cover 130 may be automatically opened or closed. Specifically, a telescopic driving element, including an air cylinder, a hydraulic cylinder, an electric cylinder, etc., is connected between the cover 130 and the cover 140, so that the cover 130 is driven to be automatically opened or closed by the telescopic driving element.

Of course, it is also possible to connect the turning shaft of the cover 130 with a rotary driving member to drive the cover 130 to open or close by the rotary driving member.

The application also provides a drying device, which comprises a gas conveying assembly 300, a heating assembly and the bearing assembly 100. Wherein, the gas delivery assembly 300 has a gas outlet end, and the gas outlet end is connected to the gas inlet 1111 of the drying tank body 110; the heating element 400 is disposed on the gas delivery assembly 300 to heat the gas delivered by the gas delivery assembly 300.

The gas delivery assembly 300 may be used to deliver gas to the gas-filled cavity a in the bearing assembly 100, and the gas is heated when passing through the heating element 400, so that the heated gas with higher temperature is delivered to the gas-filled cavity a in the bearing assembly 100 to be blown to the flower basket 600, the silicon wafers and other components through the gas blowing holes 122, thereby achieving drying.

Alternatively, the heating element 400 may be provided with a gas passage connected to the pipe of the gas delivery module 300 and a heating part disposed outside the gas passage, and the gas is heated by the heating part while passing through the gas passage, thereby forming a heated gas.

It should be noted here that the specific structure of the heating element 400 can also refer to the prior art, as long as the heating of the gas can be realized, and the specific structure is not limited.

In order to adjust the temperature of the heated gas, a thermocouple or a temperature sensor may be further disposed inside the heating element 400, and the temperature of the heated gas is monitored in real time through the thermocouple or the temperature sensor; also, a thermocouple or temperature sensor may be in signal connection with the heating element 400 to achieve automatic regulation of the gas temperature. It should be noted here that the principle of automatic regulation of the temperature of the heated gas can also be referred to the prior art.

Of course, in order to monitor the temperature inside the accommodation cavity B, a thermocouple or a temperature sensor may also be provided inside the accommodation cavity B to accurately monitor the temperature inside the accommodation cavity B.

In some embodiments, the gas delivery assembly 300 includes a wind guide duct 310, a fan 320, and a branch duct 330, wherein the fan 320 and the heating element 400 are both connected to the wind guide duct 310, the branch duct 330 includes a main duct 331 and a plurality of branch ducts 332 connected to the main duct 331, the plurality of branch ducts 332 are correspondingly connected to the plurality of air inlet holes 1111, and the main duct 331 is connected to the wind guide duct 310.

In order to adjust the gas flow rate, the gas pressure, and the like, a control valve may be further disposed on the air guiding duct 310, and the gas flow rate and the gas pressure in the air guiding duct 310 are adjusted by adjusting the opening degree of the control valve, so as to meet the actual requirement.

Based on the above arrangement, under the action of the fan 320, the gas can flow to the main pipe 331 along the air guiding duct 310, and is distributed to the plurality of branch pipes 332 by the main pipe 331, and finally is filled into the inflation cavity a through the plurality of air inlet holes 1111 by the plurality of branch pipes 332. So, increased the distribution area of heated gas in aerifing cavity A, be favorable to heated gas to spread in aerifing cavity A, can guarantee to a certain extent each regional homogeneity of department heated gas in aerifing cavity A, and then can make each region blow in to holding the heated gas in the cavity B more even.

Alternatively, the fan 320 may be an axial fan, a centrifugal fan, or the like, and the specific type is not limited.

Further, in order to prevent the silicon wafers from being contaminated by impurities in the air, the drying apparatus may further include a first filter 510, and the first filter 510 is disposed in the air guiding duct 310 and located in a region close to the diversion duct 330. Based on this, the heated gas that can make the guide duct 310 transmission filters when passing through first filter component 510 and purifies to get rid of the impurity in the heated gas, with the cleanliness factor of guaranteeing the heated gas, thereby can avoid impurity to get into and hold cavity B and pollute the silicon chip, and then guaranteed the yield of silicon chip.

In addition, the first filter member 510 may have a low wind resistance and a uniform wind speed, so that the heated gas may stably flow.

It should be noted that, the specific structure of the first filter element 510 and the operation principle thereof can refer to the prior art, and are not described herein again.

In this application, the drying apparatus may further include a housing 200, and the bearing assembly 100, the gas delivery assembly 300 and the heating element 400 are all disposed in the housing 200, so as to be covered by the housing 200, so as to isolate the internal environment of the housing 200 from the external environment.

The housing 200 is provided with an air inlet for communicating the inner cavity of the housing 200 with the external environment, so that the air in the external environment can enter the housing 200. Also, in order to prevent foreign substances in the external air from entering the case 200, a second filter member 520 may be provided at the air inlet. Based on this, the gas entering through the air inlet may be filtered by the second filtering part 520 to remove impurities, such as particulate matters, dust, etc., in the gas, so as to ensure the cleanliness of the gas inside the housing 200.

Alternatively, the air inlet may be opened at the top of the housing 200, and accordingly, the second filter member 520 is positioned at the top of the housing 200 to diffuse the incoming gas from the top of the housing 200, which is advantageous to some extent.

In addition, the outlet of the second filter element 520 is designed, for example, to be a strip-shaped outlet or a plurality of outlets arranged side by side, so that the air can enter the housing 200 more uniformly.

In addition, the second filter component 520 may be self-powered, such as with a blower element or the like, to facilitate the entry of gas from the external environment into the housing 200.

It should be noted that, the specific structure of the second filter element 520 and the operation principle thereof can refer to the prior art, and are not described herein again.

Because the gas conveying assembly 300 is located inside the casing 200, the inlet of the air guide pipeline 310 is located inside the casing 200, so that the gas filtered by the second filtering component 520 in the casing 200 can enter the air guide pipeline 310 under the action of the fan 320, and when the gas flows in the air guide pipeline 310, the gas is heated by the heating element 400 and filtered by the first filtering component 510, so that clean heating gas can be provided for the bearing assembly 100, the drying effect on the flower basket 600 and the silicon wafer can be realized, the silicon wafer can be prevented from being polluted by the heating gas, and the yield of the silicon wafer is ensured.

The main process of the drying process in the application is as follows:

under the action of the fan 320, the gas primarily filtered by the second filter component 520 flows along the air guide pipeline 310, sequentially passes through the heating element 400, the first filter component 510 and the diversion pipeline 330, flows into the inflation cavity a through the diversion pipeline 330, and is distributed into the accommodating cavity B through the air blowing holes 122 on the grid plate 120, so that the components such as the limiting plate 620, the basket rod 610, the basket support 700, the silicon wafers and the like are dried, and the drying efficiency can be improved. In addition, the flow direction of the heating gas can be accurately controlled by correspondingly arranging the blowholes, so that the heating gas can be controlled in regions which are difficult to dry emphatically, and the regions can be dried in a targeted manner.

Specifically, after the basket 600 with silicon wafers is placed on the basket holder 700 in the carrier assembly 100, the cover 130 is closed, the fan 320 and the heating element 400 start to operate, the air in the housing 200 is sucked into the air guiding duct 310 and heated (about 120 ℃) by the heating element 400, and the heating power can be 10-15 KW; the heated gas is conveyed to pass through the first filtering part 510 for filtering, and is shunted to the inflating cavity A through the shunting pipeline 330, and finally the heated gas is blown out to a silicon wafer area in the accommodating cavity B and a bottom area of the basket rod 610 (the area is an area with most water in the whole basket 600) through a plurality of blowing holes 122 on the grid plate 120, so that the drying speed of the silicon wafer area and the bottom area of the basket rod 610 can be increased, the normal working time is about 3 minutes, and the temperature in the whole accommodating cavity B is about 70 ℃ to ensure the drying effect.

While the present embodiments have been described with reference to the accompanying drawings, it is to be understood that the invention is not limited to the precise embodiments described above, which are meant to be illustrative and not restrictive, and that various changes may be made therein by those skilled in the art without departing from the spirit and scope of the invention as defined by the appended claims.

Claims (10)

1. The utility model provides a carrier assembly for bear the weight of the basket of flowers of installing the silicon chip, its characterized in that, carrier assembly includes: drying the groove body and the grid plate;

the grid plate is arranged in the drying groove body, and the grid plate, the bottom wall of the drying groove body and at least part of the side wall of the drying groove body are respectively arranged at intervals so as to form an inflation cavity between the grid plate and the bottom wall of the drying groove body and between the grid plate and at least part of the side wall of the drying groove body;

the grid plate is provided with a containing cavity for containing the flower basket;

the drying groove body is provided with an air inlet which is communicated with the inflation cavity;

and a plurality of air blowing holes are distributed in at least partial area of the grid plate and are communicated with the air inflation cavity and the accommodating cavity.

2. The load bearing assembly of claim 1, wherein said grid comprises a plurality of sequentially arranged grid elements;

the side surfaces of two adjacent grid plate units are mutually spaced to form a first cavity unit, the side surface of the grid plate unit positioned at the edge and the side wall of the drying groove body are mutually spaced to form a second cavity unit, the bottom surface of each grid plate unit and the bottom wall of the drying groove body are mutually spaced to form a third cavity unit, and the first cavity unit, the second cavity unit and the third cavity unit are mutually communicated;

the side surface of the grid plate unit is distributed with the air blowing holes, the air blowing holes are communicated with the first cavity unit or the second cavity unit, the bottom surface of the grid plate unit is distributed with the air blowing holes, and the air blowing holes are communicated with the third cavity unit;

the air inlet is arranged on the bottom wall of the drying groove body and communicated with the third cavity unit.

3. The load bearing assembly of claim 2, wherein said grid panel unit includes a first side panel, a second side panel, a bottom panel, a first connection panel and a second connection panel enclosed in said receiving cavity;

the first side panel and the second side panel are arranged at intervals, the first connecting panel is connected with the first side panel and the bottom panel, and the second connecting panel is connected with the second side panel and the bottom panel;

the first connecting panel and the first side panel and the bottom panel are both obtuse angles, and the second connecting panel and the second side panel and the bottom panel are both obtuse angles.

4. The load bearing assembly of claim 3, wherein said first side panel, said second side panel, said bottom panel, said first connecting panel, and said second connecting panel are each distributed with said blow holes.

5. The load bearing assembly of claim 3, wherein the second side panel of one of the grid plate units is parallel to the first side panel of an adjacent grid plate unit, and the second side panel is connected to the respective end of the first side panel facing away from the bottom panel, and the first side panel or the second side panel of the grid plate unit at the edge is parallel to the side wall of the drying chute, and the end of the first side panel or the second side panel facing away from the bottom panel is connected to the side wall of the drying chute.

6. The carrier assembly of claim 1, further comprising a cover and a lid;

the cover body covers the outer side of the drying groove body and is provided with an opening, and the cover body can be arranged at the opening of the cover body in an opening and closing mode.

7. A drying apparatus, comprising: a gas delivery assembly, a heating element, and the carrier assembly of any of claims 1-6;

the gas conveying assembly is provided with a gas outlet end, and the gas outlet end is connected to the gas inlet hole of the drying groove body;

the heating element is arranged on the gas delivery assembly to heat the gas delivered by the gas delivery assembly.

8. The drying apparatus of claim 7, wherein the gas delivery assembly comprises a wind guide duct, a fan, and a diversion duct;

the fan and the heating element are both connected to the air guide pipeline;

the flow dividing pipeline comprises a main pipe and a plurality of branch pipes connected with the main pipe, the branch pipes are correspondingly connected to the air inlet holes, and the main pipe is connected with the air guide pipeline.

9. The drying apparatus of claim 8, further comprising a first filter member;

the first filter component is connected to the air guide pipeline and is positioned in the area adjacent to the diversion pipeline.

10. The drying apparatus of any one of claims 7-9, further comprising a housing;

the bearing assembly, the gas delivery assembly and the heating element are all arranged in the shell;

the casing is equipped with the intercommunication the inner chamber of casing and the air intake of external environment, air intake department is equipped with second filter element.

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