CN215895223U

CN215895223U - Alignment auxiliary jig of sapphire substrate exposure machine

Info

Publication number: CN215895223U
Application number: CN202121676452.3U
Authority: CN
Inventors: 洪文庆
Original assignee: Ruijie Optoelectronic Technology Jiangsu Co ltd
Current assignee: Ruijie Optoelectronic Technology Jiangsu Co ltd
Priority date: 2021-07-22
Filing date: 2021-07-22
Publication date: 2022-02-22
Anticipated expiration: 2031-07-22

Abstract

The utility model relates to a counterpoint auxiliary jig of a sapphire substrate exposure machine, which comprises a bottom plate, wherein a metal fixing frame is arranged above the bottom plate, a slide rail is fixedly connected to the top of the bottom plate, the slide rail is connected with a slide block in a sliding manner, the top of the slide block is fixedly connected with a first driving frame, one side of the first driving frame is fixedly connected with a first servo motor, the output end of the first servo motor is fixedly connected with a first lead screw, the first lead screw is in threaded connection with a first threaded sleeve, the top of the first threaded sleeve is fixedly connected with a sucker plate, an exposure substrate is arranged above the sucker plate, a camera is arranged above the exposure substrate, the top of the camera is fixedly connected with the inner wall of the metal fixing frame, and lighting devices are arranged on two sides of the camera. Meanwhile, the alignment precision is improved.

Description

Alignment auxiliary jig of sapphire substrate exposure machine

Technical Field

The utility model relates to an alignment auxiliary jig, in particular to an alignment auxiliary jig of a sapphire substrate exposure machine, and belongs to the technical field of exposure machines.

Background

An ultraviolet exposure machine, also called a photoetching machine, a mask alignment exposure machine, an exposure system, a photoetching system and the like, is important equipment in a manufacturing process of a printed circuit board, a general photoetching process needs to go through the procedures of cleaning and drying the surface of a silicon wafer, coating a bottom, spinning photoresist, soft drying, alignment exposure, post-drying, developing, hard drying, etching and the like, a dry film or a wet film needs to be pasted on the surface of the silicon wafer in the manufacturing process of the sapphire substrate so as to carry out solder mask exposure, the existing film pasting process is mostly carried out by manual alignment by workers, the manual alignment needs to frequently find an alignment position, time and labor are wasted, the alignment error is large, and the detection condition can be influenced by dark light when the sapphire substrate after film pasting is detected.

SUMMERY OF THE UTILITY MODEL

The present invention is directed to solve the above problems, and an object of the present invention is to provide an alignment auxiliary fixture for a sapphire substrate exposure machine, which can automatically adjust the position of an exposure substrate without manual adjustment by a worker, thereby improving the processing efficiency and the alignment accuracy.

The alignment auxiliary jig comprises a bottom plate, a metal fixing frame is arranged above the bottom plate, a slide rail is fixedly connected to the top of the bottom plate, the slide rail is connected with a slide block in a sliding mode, a first driving frame is fixedly connected to the top of the slide block, a first servo motor is fixedly connected to one side of the first driving frame, the output end of the first servo motor is fixedly connected with a first lead screw, the first lead screw is in threaded connection with a first threaded sleeve, a sucker plate is fixedly connected to the top of the first threaded sleeve, an exposure substrate is arranged above the sucker plate, a camera is arranged above the exposure substrate, the top of the camera is fixedly connected with the inner wall of the metal fixing frame, and lighting devices are arranged on two sides of the camera.

Preferably, the bottom of the first threaded sleeve is slidably connected with a guide rail, the bottom of the guide rail is fixedly connected with the inner wall of the first driving frame, a second driving frame is arranged between the guide rails, a second servo motor is fixedly connected to the front side of the second driving frame, a second lead screw is fixedly connected to the output end of the second servo motor, and a second threaded sleeve is connected to the periphery of the second lead screw in a threaded manner.

Preferably, the top of the second threaded sleeve is fixedly connected with a sliding sleeve, the sliding sleeve is connected with a sliding rod in a sliding manner, two ends of the sliding rod are fixedly connected with the inner wall of the second driving frame, the top of the sliding sleeve is fixedly connected with a positioning block, and the top of the positioning block is fixedly connected with the bottom of the first driving frame.

Preferably, one side of the lighting device is provided with two alignment cameras, and the alignment cameras are symmetrically distributed relative to the center line of the camera.

Preferably, lighting device includes the baffle, the fixed frame inner wall fixed connection of baffle top and metal, fixedly connected with gag lever post between the baffle, gag lever post sliding connection has the stop collar, the stop collar bottom is rotated and is connected with first electric telescopic handle, the end of first electric telescopic handle is rotated and is connected with the fixed plate, fixed plate bottom fixedly connected with exposure lamp, fixed plate top one side is rotated through pedestal and stop collar bottom and is connected, baffle one side fixedly connected with second electric telescopic handle, the terminal and the stop collar top fixed connection of second electric telescopic handle.

Preferably, the fixed frame both sides fixedly connected with telescopic cylinder of metal, the terminal fixedly connected with adjusting plate of telescopic cylinder, adjusting plate one side fixedly connected with rubber tie plate, adjusting plate opposite side fixedly connected with location branch, location branch and the fixed frame sliding connection of metal.

The utility model has the beneficial effects that:

1. according to the utility model, the first screw rod can be driven to rotate by arranging the first servo motor, so that the first thread sleeve can drive the sucker plate and the exposure substrate to displace in an X axis, the second screw rod can be driven to rotate by arranging the second servo motor, so that the second thread sleeve can drive the first driving frame to displace in a Y axis, the sucker plate and the exposure substrate can synchronously displace, the adjusting plate can position and adjust the position of the exposure substrate by arranging the telescopic cylinder, and the first driving frame and the second driving frame are matched for use, so that the exposure substrate can be automatically aligned, the alignment precision is improved, and the frequent manual adjustment of the position of the exposure substrate by workers is not needed;

2. the angle of the fixed plate can be controlled by arranging the first electric telescopic rod, so that the angle of the exposure lamp can be synchronously adjusted, the horizontal position of the exposure lamp can be adjusted by arranging the second electric telescopic rod, the exposure substrate can be conveniently illuminated in all directions, illumination dead angles are avoided, interpretation can not be realized, and the practicability is high.

Drawings

Fig. 1 is a schematic view of the overall structure of the present invention.

Fig. 2 is a schematic diagram of the internal structure of the second driving frame according to the present invention.

Fig. 3 is an enlarged view of the utility model at a.

Reference numbers in the figures: 1. a base plate; 2. a metal fixing frame; 3. a first driving frame; 4. a first servo motor; 5. a first lead screw; 6. a first threaded sleeve; 7. a sucker plate; 8. exposing the substrate; 9. a camera; 10. an illumination device; 11. a second driving frame; 12. a second servo motor; 13. a second lead screw; 14. a second threaded sleeve; 15. aligning a camera; 16. a baffle plate; 17. a limiting rod; 18. a limiting sleeve; 19. a first electric telescopic rod; 20. a fixing plate; 21. an exposure lamp; 22. a second electric telescopic rod; 23. a telescopic cylinder; 24. an adjustment plate; 25. and positioning the supporting rod.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments, and all other embodiments obtained by a person of ordinary skill in the art without creative efforts based on the embodiments of the present invention belong to the protection scope of the present invention.

Embodiment 1, please refer to fig. 1-3, a aligning auxiliary tool of a sapphire substrate exposure machine, comprising a bottom plate 1, a metal fixing frame 2 is disposed above the bottom plate 1, a slide rail is fixedly connected to the top of the bottom plate 1, the slide rail is slidably connected to a slide block, a first driving frame 3 is fixedly connected to the top of the slide block, a first servo motor 4 is fixedly connected to one side of the first driving frame 3, a first lead screw 5 is fixedly connected to an output end of the first servo motor 4, the first lead screw 5 is in threaded connection with a first thread bushing 6, the first lead screw 5 can be driven to rotate by the first servo motor 4, so that the first thread bushing 6 can drive a sucker plate 7 and an exposure substrate 8 to displace in an X axis, the top of the first thread bushing 6 is fixedly connected to a sucker plate 7, and an exposure substrate 8 is disposed above the sucker plate 7, the exposure base plate 8 top is equipped with camera 9, the fixed frame 2 inner wall fixed connection of camera 9 top and metal, camera 9 both sides are equipped with lighting device 10.

Specifically, the bottom of the first threaded sleeve 6 is slidably connected with a guide rail, the bottom of the guide rail is fixedly connected with the inner wall of the first driving frame 3, a second driving frame 11 is arranged between the guide rails, the front side of the second driving frame 11 is fixedly connected with a second servo motor 12, the output end of the second servo motor 12 is fixedly connected with a second lead screw 13, the periphery of the second lead screw 13 is in threaded connection with a second threaded sleeve 14, the top of the second threaded sleeve 14 is fixedly connected with a sliding sleeve, the sliding sleeve is slidably connected with a slide bar, two ends of the slide bar are fixedly connected with the inner wall of the second driving frame 11, the top of the sliding sleeve is fixedly connected with a positioning block, the top of the positioning block is fixedly connected with the bottom of the first driving frame 3, the second lead screw 13 can be driven to rotate by the second servo motor 12, so that the second threaded sleeve 14 can drive the first driving frame 3 to displace in the Y axis, so that the chuck plate 7 and the exposure substrate 8 can be displaced synchronously.

Specifically, the lighting device 10 is provided with two alignment cameras 15 on one side, the alignment cameras 15 are symmetrically distributed relative to the center line of the camera 9, the lighting device 10 comprises a baffle 16, the top of the baffle 16 is fixedly connected with the inner wall of the metal fixing frame 2, a limiting rod 17 is fixedly connected between the baffle 16, the limiting rod 17 is slidably connected with a limiting sleeve 18, the bottom of the limiting sleeve 18 is rotatably connected with a first electric telescopic rod 19, the tail end of the first electric telescopic rod 19 is rotatably connected with a fixing plate 20, the bottom of the fixing plate 20 is fixedly connected with an exposure lamp 21, one side of the top of the fixing plate 20 is rotatably connected with the bottom of the limiting sleeve 18 through a shaft bracket, one side of the baffle 16 is fixedly connected with a second electric telescopic rod 22, and the tail end of the second electric telescopic rod 22 is fixedly connected with the top of the limiting sleeve 18, can control the angle of fixed plate 20 through setting up first electric telescopic handle 19 to make the angle of exposure lamp 21 can carry out the synchronization regulation, can adjust the horizontal position of exposure lamp 21 through setting up second electric telescopic handle 22, be convenient for carry out all-round illumination to exposure base plate 8, avoid the illumination dead angle to appear, lead to unable interpretation, the practicality is stronger.

In embodiment 2, referring to fig. 3, the difference between this embodiment and embodiment 1 is: 2 both sides fixedly connected with telescopic cylinder 23 of the fixed frame of metal, the terminal fixedly connected with adjusting plate 24 of telescopic cylinder 23, 24 one side fixedly connected with rubber tie plate of adjusting plate, 24 opposite side fixedly connected with location branch 25 of adjusting plate, location branch 25 and the fixed frame 2 sliding connection of metal make adjusting plate 24 can fix a position the adjustment to the position of exposure base plate 8 through setting up telescopic cylinder 23, make telescopic cylinder 23 more stable when the motion through setting up location branch 25, difficult emergence is rocked, cooperates first drive frame 3 and second drive frame 11 to use, is convenient for carry out automatic counterpoint to exposure base plate 8, has improved the counterpoint precision, does not need the frequent position to exposure base plate 8 of staff to carry out manual adjustment.

When the utility model is used, the first screw rod 5 can be driven to rotate by arranging the first servo motor 4, so that the first thread bush 6 can drive the sucker plate 7 and the exposure substrate 8 to displace on an X axis, the second screw rod 13 can be driven to rotate by arranging the second servo motor 12, so that the second thread bush 14 can drive the first driving frame 3 to displace on a Y axis, so that the sucker plate 7 and the exposure substrate 8 can synchronously displace, the position of the exposure substrate 8 can be positioned and adjusted by arranging the telescopic cylinder 23 and the adjusting plate 24, the utility model is matched with the first driving frame 3 and the second driving frame 11 for use, thereby being convenient for automatically aligning the exposure substrate 8, improving the alignment precision, avoiding the frequent manual adjustment of the position of the exposure substrate 8 by a worker, and controlling the angle of the fixed plate 20 by arranging the first electric telescopic rod 19, so that the angle of the exposure lamp 21 can be synchronously adjusted, can adjust the horizontal position of exposure lamp 21 through setting up second electric telescopic handle 22, be convenient for carry out all-round illumination to exposure base plate 8, avoid the illumination dead angle to appear, lead to unable interpretation, the practicality is stronger.

It will be evident to those skilled in the art that the utility model is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof, and it is therefore desired that the present embodiments be considered in all respects as illustrative and not restrictive, the scope of the utility model being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein, without any reference thereto being construed as limiting the claim concerned.

Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.

Claims

1. The utility model provides a supplementary tool of counterpoint of sapphire substrate exposure machine, includes bottom plate (1), its characterized in that: a metal fixing frame (2) is arranged above the bottom plate (1), the top of the bottom plate (1) is fixedly connected with a slide rail, the slide rail is connected with a slide block in a sliding way, the top of the slide block is fixedly connected with a first driving frame (3), one side of the first driving frame (3) is fixedly connected with a first servo motor (4), the output end of the first servo motor (4) is fixedly connected with a first screw rod (5), the first screw rod (5) is in threaded connection with a first threaded sleeve (6), the top of the first threaded sleeve (6) is fixedly connected with a sucker plate (7), an exposure substrate (8) is arranged above the sucker plate (7), a camera (9) is arranged above the exposure substrate (8), the top of the camera (9) is fixedly connected with the inner wall of the metal fixing frame (2), and the two sides of the camera (9) are provided with illuminating devices (10).

2. The alignment auxiliary tool of the sapphire substrate exposure machine as claimed in claim 1, wherein: first thread bush (6) bottom sliding connection has the guide rail, guide rail bottom and first drive frame (3) inner wall fixed connection, be equipped with second drive frame (11) between the slide rail, second drive frame (11) front side fixedly connected with second servo motor (12), second servo motor (12) output end fixedly connected with second lead screw (13), second lead screw (13) peripheral threaded connection has second thread bush (14).

3. The alignment auxiliary tool of the sapphire substrate exposure machine as claimed in claim 2, wherein: the top of the second threaded sleeve (14) is fixedly connected with a sliding sleeve, the sliding sleeve is connected with a sliding rod in a sliding mode, two ends of the sliding rod are fixedly connected with the inner wall of the second driving frame (11), a positioning block is fixedly connected to the top of the sliding sleeve, and the top of the positioning block is fixedly connected with the bottom of the first driving frame (3).

4. The alignment auxiliary tool of the sapphire substrate exposure machine as claimed in claim 1, wherein: the utility model discloses a camera, including lighting device (10), lighting device (10) one side is equipped with counterpoint camera (15), the quantity of counterpoint camera (15) is two, counterpoint camera (15) distribute for camera (9) central line symmetry formula.

5. The alignment auxiliary tool of the sapphire substrate exposure machine as set forth in claim 4, wherein: lighting device (10) are including baffle (16), the fixed frame of baffle (16) top and metal (2) inner wall fixed connection, fixedly connected with gag lever post (17) between baffle (16), gag lever post (17) sliding connection has stop collar (18), stop collar (18) bottom is rotated and is connected with first electric telescopic handle (19), first electric telescopic handle (19) end-to-end rotation is connected with fixed plate (20), fixed plate (20) bottom fixedly connected with exposure lamp (21), fixed plate (20) top one side is rotated through pedestal and stop collar (18) bottom and is connected, baffle (16) one side fixedly connected with second electric telescopic handle (22), second electric telescopic handle (22) end and stop collar (18) top fixed connection.

6. The alignment auxiliary tool of the sapphire substrate exposure machine as claimed in claim 1, wherein: the fixed frame of metal (2) both sides fixedly connected with telescopic cylinder (23), telescopic cylinder (23) terminal fixedly connected with adjusting plate (24), adjusting plate (24) one side fixedly connected with rubber backing plate, adjusting plate (24) opposite side fixedly connected with location branch (25), location branch (25) and the fixed frame of metal (2) sliding connection.