CN215856297U - Novel vacuum deposition device - Google Patents
Novel vacuum deposition device Download PDFInfo
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- CN215856297U CN215856297U CN202122134705.0U CN202122134705U CN215856297U CN 215856297 U CN215856297 U CN 215856297U CN 202122134705 U CN202122134705 U CN 202122134705U CN 215856297 U CN215856297 U CN 215856297U
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Abstract
The utility model relates to a novel vacuum deposition device, which comprises: the accommodating cavity comprises a cavity body and an openable cavity door; the vacuumizing assembly is communicated with the inner cavity of the accommodating cavity; the sealed medicine chamber is fixedly arranged on the inner side wall of the cavity door; the medicine room comprises a medicine storage assembly, a medicine heating assembly and an openable and closable medicine evaporation window; the medicine storage assembly is used for storing liquid functional medicines, and the medicine heating assembly is used for heating the liquid functional medicines to generate gaseous functional medicines; the medicine evaporation window is communicated with the medicine storage assembly and faces the inner cavity and is used for evaporating the gaseous functional medicine to the inner cavity; and the main control device is in signal connection with the medicine evaporation window and is used for controlling the opening or closing of the medicine evaporation window. Through the arrangement, the problem that the external pipeline for conveying gaseous functional medicines in the existing vacuum deposition device is easily polluted to influence the deposition effect of a sample and cause the quality reduction of the sample product can be solved.
Description
Technical Field
The utility model relates to the technical field of micro-nano processing, in particular to a novel vacuum deposition device.
Background
The nanometer stamping technology is an important technology in the manufacturing process of the micro-nanometer device.
Currently, in the nanoimprint technology, a layer of functional medicine needs to be coated on the surface of many samples or sample wafers before processing, so as to reduce various characteristics of the surface.
The traditional film coating method is to directly coat a sample or a sample wafer, and the film forming mode has poor uniformity and low efficiency.
In the prior art, a partial vacuum deposition apparatus generally adopts an external pipeline to input gaseous functional medicines, so as to perform surface deposition on a sample or a sample wafer in the vacuum deposition apparatus. In such devices, the external tubing is easily contaminated, thereby affecting the final deposition result, resulting in a reduced quality of the sample or coupon.
SUMMERY OF THE UTILITY MODEL
In order to solve the above technical problems, an object of the present invention is to provide a novel vacuum deposition apparatus, so as to solve the problem that an external pipeline for conveying a gaseous functional drug in the conventional vacuum deposition apparatus is easily contaminated, thereby affecting a sample deposition effect and reducing a sample quality.
In order to achieve one of the above objects of the present invention, an embodiment of the present invention provides a novel vacuum deposition apparatus, including:
the accommodating cavity comprises a cavity body and an openable and closable cavity door and is used for accommodating a sample to be deposited;
the vacuumizing assembly is communicated with the inner cavity of the accommodating cavity;
the sealed medicine chamber is fixedly arranged on the inner side wall of the cavity door; the medicine room comprises a medicine storage assembly, a medicine heating assembly and an openable and closable medicine evaporation window; the medicine storage assembly is used for storing liquid functional medicines, and the medicine heating assembly is used for heating the liquid functional medicines to generate gaseous functional medicines; the medicine evaporation window is communicated with the medicine storage assembly and faces the inner cavity, and is used for evaporating the gaseous functional medicines to the inner cavity;
and the main control device is in signal connection with the medicine evaporation window and is used for controlling the opening or closing of the medicine evaporation window.
As a further improvement of an embodiment of the present invention, the novel vacuum deposition apparatus further includes a vacuum detection table, which is disposed on an outer sidewall of the rear end of the cavity, is in signal connection with the main control apparatus, and is configured to detect an actual vacuum value of the inner cavity;
the vacuumizing assembly comprises a vacuumizing hole which can be opened and closed, is arranged on the side wall of the rear end of the cavity and is communicated with the inner cavity; when the actual vacuum value reaches a preset vacuum value, the vacuumizing hole is in a closed state.
As a further improvement of an embodiment of the present invention, the vacuum-pumping assembly further comprises a vacuum pump connected to the vacuum-pumping hole; the main control device is in signal connection with the vacuumizing assembly and is used for controlling the vacuumizing hole to be closed.
As a further improvement of an embodiment of the present invention, the novel vacuum deposition apparatus further comprises a gas pressure balancing assembly; the air pressure balancing component comprises an openable air inlet hole, is arranged on the side wall of the rear end of the cavity body, is communicated with the inner cavity and is used for filling external air into the inner cavity.
As a further improvement of an embodiment of the present invention, the air pressure balancing assembly further includes an air pressure sensor disposed in the inner cavity.
As a further improvement of one embodiment of the utility model, the novel vacuum deposition device further comprises a sample carrying platform which is arranged in the inner cavity and used for horizontally placing the sample.
As a further improvement of an embodiment of the present invention, the sample stage includes a rotating component for driving the sample stage to rotate in a horizontal plane.
As a further improvement of an embodiment of the present invention, the sample stage includes a heating assembly for heating a gas around the sample stage.
As a further improvement of an embodiment of the present invention, the sample stage is an inverted T-shaped horizontal stage.
As a further improvement of one embodiment of the present invention, the novel vacuum deposition apparatus further comprises a concentration sensor for detecting an actual concentration value of the gaseous functional drug in the inner cavity; and when the actual concentration value reaches a preset concentration value, the medicine evaporation window is in a closed state.
Compared with the prior art, the utility model has the beneficial effects that:
in the vacuum deposition device, a medicine chamber is fixedly arranged on the inner wall of a cavity door of a containing cavity and is used for storing and heating liquid functional medicines, the liquid functional medicines can be evaporated into gaseous functional medicines and are input into the inner cavity of the containing cavity through a medicine evaporation window, so that a sample in the inner cavity is subjected to gaseous deposition, and a uniform functional medicine layer is formed on the surface of the sample;
the opening and closing of the medicine evaporation window are controlled by the main control device, so that the medicine evaporation window can be controlled to be opened after the inner cavity is vacuumized, and the gaseous functional medicine is evaporated into the inner cavity;
compared with the prior art in which gaseous functional medicines are input through an external pipeline, the problem that the medicines are polluted can be effectively solved by the built-in medicine chamber, and the gaseous functional medicines can be uniformly evaporated into the inner cavity, so that high-efficiency and high-quality gaseous deposition is carried out on the sample in the inner cavity, and a uniform functional medicine layer is formed on the surface of the sample.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings used in the embodiments or the description of the prior art will be briefly described below. It is obvious that the drawings in the following description are only some embodiments of the utility model, and that for a person skilled in the art, other drawings can be derived from them without inventive effort.
FIG. 1 is a schematic structural view of a novel vacuum deposition apparatus according to an embodiment of the present invention with the chamber door open;
FIG. 2 is a schematic rear view of a novel vacuum deposition apparatus in accordance with an embodiment of the present invention;
fig. 3 is a schematic front view of a novel vacuum deposition apparatus according to an embodiment of the present invention.
Wherein the reference numbers referred to in the figures are as follows:
the device comprises a vacuumizing hole 1, a vacuum detection table 2, an air inlet 3, an inner cavity 4, a cavity door 5, a medicine room 6 and a sample carrying platform 7.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the technical solutions of the present invention will be described in detail and completely with reference to the following detailed description of the utility model and the accompanying drawings. It is to be understood that the described embodiments are merely exemplary of the utility model, and not restrictive of the full scope of the utility model. All other embodiments, which can be obtained by a person skilled in the art without any inventive step based on the embodiments of the present invention, are within the scope of the present invention.
The embodiments described below with reference to the accompanying drawings are illustrative only for the purpose of explaining the present invention, and are not to be construed as limiting the present invention.
As shown in fig. 1 to 3, an embodiment of the present invention provides a novel vacuum deposition apparatus, including:
an accommodation chamber including a chamber body and an openable and closable chamber door 5 for accommodating a sample to be deposited;
the vacuumizing assembly is communicated with the inner cavity 4 of the accommodating cavity;
the sealed medicine chamber 6 is fixedly arranged on the inner side wall of the cavity door 5; the medicine chamber 6 comprises a medicine storage component, a medicine heating component and an openable and closable medicine evaporation window; the medicine storage assembly is used for storing liquid functional medicines, and the medicine heating assembly is used for heating the liquid functional medicines to generate gaseous functional medicines; the medicine evaporation window is communicated with the medicine storage assembly and faces the inner cavity 4 and is used for evaporating the gaseous functional medicine to the inner cavity 4;
and the main control device is in signal connection with the medicine evaporation window and is used for controlling the opening or closing of the medicine evaporation window.
Specifically, in the vacuum deposition device, a medicine chamber 6 is fixedly arranged on the inner wall of a cavity door 5 of a containing cavity, the medicine chamber 6 is used for storing and heating liquid functional medicines, the liquid functional medicines can be evaporated into gaseous functional medicines and are input into an inner cavity 4 of the containing cavity through a medicine evaporation window, so that a sample in the inner cavity 4 is subjected to gaseous deposition, and a uniform functional medicine layer is formed on the surface of the sample;
the opening and closing of the medicine evaporation window are controlled by the main control device, so that the medicine evaporation window can be controlled to be opened after the inner cavity 4 is vacuumized, and the gaseous functional medicine is evaporated into the inner cavity 4;
compared with the prior art in which gaseous functional medicines are input through an external pipeline, the problem that the medicines are polluted can be effectively solved by the built-in medicine chamber 6, and the gaseous functional medicines can be uniformly evaporated into the inner cavity 4, so that high-efficiency and high-quality gaseous deposition is carried out on the sample in the inner cavity 4, and a uniform functional medicine layer is formed on the surface of the sample.
Furthermore, the novel vacuum deposition device also comprises a vacuum detection table 2 which is arranged on the outer side wall of the rear end of the cavity, is in signal connection with the main control device and is used for detecting the actual vacuum value of the inner cavity 4;
the vacuumizing assembly comprises a openable vacuumizing hole 1 which is arranged on the side wall of the rear end of the cavity and communicated with the inner cavity 4; when the actual vacuum value reaches the predetermined vacuum value, the vacuuming hole 1 is in a closed state.
In operation, the cavity 4 is evacuated to a predetermined value through the evacuation holes 1. In the process, the actual vacuum value is displayed in real time through the vacuum detection table 2 and fed back to the control center.
Further, the vacuum-pumping assembly also comprises a vacuum pump which is connected with the vacuum-pumping hole 1; the main control device is in signal connection with the vacuumizing assembly and is used for controlling the vacuumizing hole 1 to be closed.
In actual use, a vacuum pump is connected to the vacuuming hole 1. After the vacuum deposition device is started, the vacuum pump can vacuumize the inner cavity 4 of the accommodating cavity.
When the actual vacuum value in the inner cavity 4 reaches the set value, the vacuumizing hole 1 is closed, so that the subsequent medicine evaporation process is carried out.
Furthermore, the novel vacuum deposition device also comprises a gas pressure balance assembly; the air pressure balancing component comprises an air inlet hole 3 which can be opened and closed, is arranged on the side wall of the rear end of the cavity body, is communicated with the inner cavity 4 and is used for filling the outer air into the inner cavity 4.
In practical operation, after the evaporation process and the deposition process of the medicine are completed, in order to open the cavity door 5 smoothly and take out the sample, the air inlet 3 can be opened firstly, and air is filled into the inner cavity 4, so that the inner cavity 4 and the outside reach a state of internal and external air pressure balance, and the cavity door 5 can be opened conveniently and the sample can be taken out.
Further, the air pressure balancing assembly further comprises an air pressure sensor arranged in the inner cavity 4.
Therefore, the personnel can observe the internal air pressure and the pressure intensity state conveniently and judge whether the sample can be taken out or not.
Furthermore, the novel vacuum deposition device also comprises a sample carrying platform 7 which is arranged in the inner cavity 4 and used for horizontally placing a sample.
In practical use, the sample is horizontally placed on the carrying platform in the inner cavity 4, so that gaseous deposition can be conveniently carried out, and a single-molecule functional medicine layer is formed on the surface.
Further, the sample stage 7 includes a rotation component for driving the sample stage 7 to rotate in a horizontal plane.
Therefore, the sample carrier 7 drives the sample to rotate horizontally, so that the gaseous functional medicine can be more uniformly deposited on the surface of the sample.
Further, sample stage 7 comprises a heating assembly for heating the gas surrounding sample stage 7.
Therefore, the temperature of the gas around the sample is increased after the gas is heated, the circulation is accelerated, the concentration of the gaseous functional medicine in the inner cavity 4 is effectively adjusted and reaches a proper value, and the uniform deposition is ensured.
Further, the sample stage 7 is an inverted T-shaped horizontal stage.
Furthermore, the novel vacuum deposition device also comprises a concentration sensor for detecting the actual concentration value of the gaseous functional medicine in the inner cavity 4; and when the actual concentration value reaches the preset concentration value, the medicine evaporation window is in a closed state.
In actual use, when the medicine is evaporated to a set concentration, the medicine evaporation window in the medicine chamber 6 can be closed and the liquid functional medicine is stopped being heated, so that the evaporation of the gaseous functional medicine is blocked, the concentration in the inner cavity 4 is ensured, and the expected deposition effect is finally achieved.
In the specific embodiment provided by the utility model, the vacuumizing hole 1 is provided with an automatic switch and can be automatically opened and closed; the air inlet 3 is provided with an automatic switch and can be automatically opened and closed; the medicine compartment 6 has a function of automatically opening the compartment door and heating; the sample stage 7 in the cavity has the functions of rotation and heating, and can be determined according to actual requirements.
In the actual process, the whole deposition process is as follows:
the vacuum pump is connected with the vacuumizing hole 1, liquid functional medicines are placed in the medicine chamber 6, a sample is placed on the carrying platform 7, the cavity door 5 is closed, the machine is started, the vacuum pump can vacuumize the inner cavity 4 to a certain value, and the actual vacuum value can be displayed in real time through the vacuum detection meter 2 and fed back to the control center;
when the actual vacuum value reaches a set value, the vacuumizing hole 1 is closed, and meanwhile, a medicine evaporation window of the medicine chamber 6 is opened and the medicine is heated, so that the gaseous medicine is evaporated onto the surface of the sample on the sample carrying platform 7; at this time, the sample carrying platform 7 can be rotated or heated according to actual requirements;
when the actual concentration of the medicine is evaporated to reach the set concentration (the actual concentration value can also be read through the vacuum detection table 2), the medicine evaporation window of the medicine chamber 6 is closed, the medicine is stopped being heated, then the air hole 3 is opened to fill air into the inner cavity 4, so that the inner cavity 4 is balanced with the external internal and external air pressure, and then the cavity door 5 is opened to take out the sample.
It should be understood that although the present description refers to embodiments, not every embodiment contains only a single technical solution, and such description is for clarity only, and those skilled in the art should make the description as a whole, and the technical solutions in the embodiments can also be combined appropriately to form other embodiments understood by those skilled in the art.
The above-listed detailed description is only a specific description of a possible embodiment of the present invention and is not intended to limit the scope of the present invention, and equivalent embodiments or modifications made without departing from the technical spirit of the present invention are included in the scope of the present invention.
Claims (10)
1. A novel vacuum deposition apparatus, comprising:
the accommodating cavity comprises a cavity body and an openable and closable cavity door and is used for accommodating a sample to be deposited;
the vacuumizing assembly is communicated with the inner cavity of the accommodating cavity;
the sealed medicine chamber is fixedly arranged on the inner side wall of the cavity door; the medicine room comprises a medicine storage assembly, a medicine heating assembly and an openable and closable medicine evaporation window; the medicine storage assembly is used for storing liquid functional medicines, and the medicine heating assembly is used for heating the liquid functional medicines to generate gaseous functional medicines; the medicine evaporation window is communicated with the medicine storage assembly and faces the inner cavity, and is used for evaporating the gaseous functional medicines to the inner cavity;
and the main control device is in signal connection with the medicine evaporation window and is used for controlling the opening or closing of the medicine evaporation window.
2. The novel vacuum deposition device according to claim 1, further comprising a vacuum detection meter, which is disposed on the outer sidewall of the rear end of the chamber and is in signal connection with the main control device, and is used for detecting the actual vacuum value of the inner chamber;
the vacuumizing assembly comprises a vacuumizing hole which can be opened and closed, is arranged on the side wall of the rear end of the cavity and is communicated with the inner cavity; when the actual vacuum value reaches a preset vacuum value, the vacuumizing hole is in a closed state.
3. The novel vacuum deposition apparatus of claim 2, wherein the evacuation assembly further comprises a vacuum pump connected to the evacuation aperture; the main control device is in signal connection with the vacuumizing assembly and is used for controlling the vacuumizing hole to be closed.
4. The novel vacuum deposition apparatus of claim 2, further comprising a gas pressure balancing assembly; the air pressure balancing component comprises an openable air inlet hole, is arranged on the side wall of the rear end of the cavity body, is communicated with the inner cavity and is used for filling external air into the inner cavity.
5. The novel vacuum deposition apparatus of claim 4, wherein the pressure equalization assembly further comprises a pressure sensor disposed within the interior chamber.
6. The novel vacuum deposition apparatus of claim 4, further comprising a sample stage disposed in the inner chamber for horizontally positioning the sample.
7. The novel vacuum deposition apparatus of claim 6, wherein the sample stage comprises a rotation assembly for rotating the sample stage in a horizontal plane.
8. The novel vacuum deposition apparatus of claim 6, wherein the sample stage comprises a heating assembly for heating the gas surrounding the sample stage.
9. The novel vacuum deposition apparatus of claim 6, wherein the sample stage is an inverted T-shaped horizontal stage.
10. The novel vacuum deposition apparatus of claim 1, further comprising a concentration sensor for detecting an actual concentration value of the gaseous functional drug in the inner chamber; and when the actual concentration value reaches a preset concentration value, the medicine evaporation window is in a closed state.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122134705.0U CN215856297U (en) | 2021-09-06 | 2021-09-06 | Novel vacuum deposition device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122134705.0U CN215856297U (en) | 2021-09-06 | 2021-09-06 | Novel vacuum deposition device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215856297U true CN215856297U (en) | 2022-02-18 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202122134705.0U Active CN215856297U (en) | 2021-09-06 | 2021-09-06 | Novel vacuum deposition device |
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| CN (1) | CN215856297U (en) |
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2021
- 2021-09-06 CN CN202122134705.0U patent/CN215856297U/en active Active
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Address after: No. 19 # 101, No. 200 Xingpu Road, Industrial Park, Suzhou City, Jiangsu Province, 215000 Patentee after: SUZHOU GUANGYUE MICRO-NANO TECHNOLOGY Co.,Ltd. Address before: Room 302, building 13, Suzhou nano City, 99 Jinjihu Avenue, Suzhou Industrial Park, 215000, Jiangsu Province Patentee before: SUZHOU GUANGYUE MICRO-NANO TECHNOLOGY Co.,Ltd. |