CN217297992U - Coating material protection device, coating material sealing chamber and vacuum coating equipment - Google Patents
Coating material protection device, coating material sealing chamber and vacuum coating equipment Download PDFInfo
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- CN217297992U CN217297992U CN202123369705.5U CN202123369705U CN217297992U CN 217297992 U CN217297992 U CN 217297992U CN 202123369705 U CN202123369705 U CN 202123369705U CN 217297992 U CN217297992 U CN 217297992U
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Abstract
The application relates to a coating material protection device, a coating material sealing chamber and vacuum coating equipment, wherein the coating material protection device is applied to sealing protection of a coating material of the vacuum coating equipment; the vacuum coating equipment is provided with a vacuum chamber and a coating material chamber connected with the vacuum chamber; the coating material protection device comprises: the sealing chamber is embedded in the coating material chamber, and the partition device is hermetically connected with one side of the sealing chamber, which is close to the vacuum chamber; the sealed chamber is used for placing a coating material; the partition device is respectively communicated with or separates the sealed chamber and the vacuum chamber correspondingly under the two states of opening or closing; according to the technical scheme, the coating materials of the vacuum coating equipment are protected in a sealed chamber in a sealed mode, the coating materials are prevented from reacting or adsorbing pollution due to contact with air, the purity of the coating materials is guaranteed, the coating materials do not need to be cleaned frequently, the coating efficiency is improved, and the coating effect is improved.
Description
Technical Field
The application relates to the technical field of vacuum coating, in particular to a coating material protection device, a coating material sealing chamber and vacuum coating equipment.
Background
The vacuum coating technology is widely used for improving the characteristics of the original workpiece material and enriching the functions of the original workpiece material. The main technology is to deposit functional films such as metal, alloy, oxide or compound on the surface of a material by utilizing the technologies such as magnetron sputtering, resistance evaporation coating, electron beam evaporation coating and the like under the vacuum condition, thereby improving the performance of the material.
In the vacuum coating equipment with a single cavity, generally, a coating material is firstly made into a target material or a coating material and then is placed in a coating material cavity for use; because the vacuum coating equipment needs to open the vacuum chamber to take out the workpiece after the coating process is finished each time, the coating material is easily exposed to the air in the process, and the coating material is extremely easy to generate chemical reaction with substances such as oxygen, carbon dioxide, water vapor and the like in the air or to be adsorbed on the surface of the coating material to cause pollution.
At present, the common technology in the market is to perform a normal coating process after pretreating a coating material, for example, before vacuum sputtering coating starts, the surface of a target is bombarded by ions, pollutants on the surface of the target are cleaned, and then coating is performed. In addition, the technology is also to additionally prepare one or more vacuum chambers as low vacuum chambers for entering and exiting the workpiece to maintain the high vacuum degree of the vacuum chambers, so that the technical scheme increases the floor area and equipment cost of the coating equipment and greatly increases the production cost. In a vacuum coating apparatus equipped with a plurality of coating materials, in order to protect the coating materials in a non-use state, there is also a technique of providing a baffle plate in front of a coating material chamber to reduce contamination.
In the technical scheme, the coating material is protected to a certain extent, but the coating material has the defect of high cost, and the effect of completely avoiding pollution is difficult to achieve.
SUMMERY OF THE UTILITY MODEL
The present application aims to solve one of the above technical defects, and provides a coating material protection device, a vacuum coating apparatus and a vacuum coating method, so as to prevent the coating material from being polluted, improve the coating efficiency and reduce the loss of the coating material.
A coating material protection device is applied to seal and protect the coating material of vacuum coating equipment; the vacuum coating equipment is provided with a vacuum chamber and a coating material chamber connected with the vacuum chamber;
the coating material protection device comprises: the separation device is embedded in the coating material chamber and is connected with one side of the coating material chamber close to the vacuum chamber in a sealing mode; the sealed chamber is used for placing the coating material;
the partition device is respectively communicated with or separates the sealed chamber and the vacuum chamber correspondingly under the two states of opening or closing.
In one embodiment, the protection device for coating material further includes: and the driving device is connected with the partition device and is used for driving the partition device to be opened or closed.
In one embodiment, the protection device for coating material further includes: and the control device is connected with the upper computer and the driving device and used for receiving a control command of the upper computer and controlling the driving device.
In one embodiment, the device for protecting a coating material further includes: the air pumping equipment or the air charging equipment is connected with the sealed cavity, and the vacuum detection device is arranged in the sealed cavity;
the vacuum detection device is used for detecting the vacuum degree of the sealed chamber when the vacuum valve is in a closed state, the air suction equipment is used for sucking air from the sealed chamber, and the inflating equipment is used for injecting inert gas into the sealed chamber.
In one embodiment, the shut-off device comprises a vacuum gate valve, a vacuum flap valve or a vacuum pneumatic valve.
In one embodiment, the driving means is driven electrically or pneumatically.
A coating material seal chamber, comprising: coating material chambers communicated with the inside of the vacuum chamber, and coating material protection devices respectively arranged in the coating material chambers.
In one embodiment, the coating material chamber is provided with a gas supply port for injecting argon gas near a position where the coating material is stored.
A vacuum coating apparatus comprising: a vacuum chamber, a coating material sealing chamber, a vacuum pump and an ion source; the vacuum chamber is internally provided with a hanging structure for placing a coated workpiece, the vacuum chamber is also connected with a vacuum pump, and the ion source is arranged in the vacuum chamber.
In one embodiment, the number of the coating material sealing chambers is multiple;
the driving device of each coating material sealing chamber is connected to a control device, the control device is connected to an upper computer, and the upper computer controls the driving device of each coating material sealing chamber to open/close the partition device through the control device.
The technical scheme of the application has the following technical effects:
the coating material of the vacuum coating equipment is protected in a sealing manner through the sealing chamber, the coating material is prevented from reacting or adsorbing pollution due to contact with air, the purity of the coating material is guaranteed, the coating material does not need to be cleaned frequently in the coating process, the coating efficiency is improved, and the coating effect is improved.
Additional aspects and advantages of the present application will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the present application.
Drawings
The foregoing and/or additional aspects and advantages of the present application will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:
FIG. 1 is a cross-sectional view of an exemplary vacuum coating apparatus;
FIG. 2 is a schematic structural view of a coating material protection device according to an embodiment;
FIG. 3 is a schematic structural view of a coating material protection device according to another embodiment;
FIG. 4 is a schematic structural diagram of a vacuum coating apparatus provided in the present application;
FIG. 5 is an electrical configuration diagram of a vacuum deposition apparatus according to an embodiment.
Detailed Description
Reference will now be made in detail to the embodiments of the present application, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the drawings are exemplary only for the purpose of explaining the present application and are not to be construed as limiting the present application.
As used herein, the singular forms "a", "an", "the" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises" and/or "comprising," when used in this specification, specify the presence of stated features, integers, steps, or operations, but do not preclude the presence or addition of one or more other features, integers, steps, operations, or groups thereof.
It will be understood by those within the art that, unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the prior art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.
Referring to fig. 1, fig. 1 is a cross-sectional view of an exemplary vacuum coating apparatus that can coat a surface of a workpiece using magnetron sputtering, resistive evaporation coating, electron beam evaporation coating, or the like; it should be noted that the vacuum coating apparatus with this structure is an example for convenience of description of the embodiments in the present application, and is not intended to limit the use scenario of the technical solution in the present application.
As shown in fig. 1, the vacuum coating apparatus may include: a vacuum chamber 10, a coating material chamber 20, a vacuum pump 12, an ion source 30, etc., wherein a plurality of coating materials are adopted in the vacuum coating apparatus, and therefore a plurality of coating material chambers 20 are provided, as shown in the figure, the coating material chambers 20a, 20b and 20c are included, a workpiece hanging structure 11 can be provided in the vacuum chamber 10, and for the workpiece hanging structure 11, a rotating frame or a roller, etc., can be used, in this embodiment, the workpiece hanging structure 11 is taken as an example of a roller, and the workpiece hanging structure 11 is used for placing a workpiece to be coated; a plurality of vacuum pumps 12 can be connected to the outside of the vacuum chamber 10, and the vacuum pumps 12 are used for vacuumizing the vacuum chamber 10; the ion source 30 is connected to the vacuum chamber 10, and the ion source 30 mainly performs post-treatment on a film layer formed by coating, and may be used for cleaning a workpiece before coating, and may employ a radio frequency ion source, an inductively coupled ion source, or the like. In the coating process, the workpiece hanging structure 11 rotates, the coating materials such as the target material or the coating material stored in the coating material chamber 20 coat the workpiece rotating to the coating area in a sputtering or evaporation mode, and the workpiece rotates to the post-processing area and is subjected to post-processing flow through the ion source 30.
Because after the coating process is carried out each time, the vacuum chamber door 15 needs to be opened to take out the workpiece and put in a new workpiece, at the moment, substances such as oxygen, carbon dioxide and water vapor in the air are likely to have chemical reaction with the coating material or adsorb on the surface to pollute the coating material, the conventional technology is to carry out the next coating process after the target material is pretreated, time is consumed and the material is wasted, and on the basis, in order to protect the coating material stored in the coating material chamber 20, the application provides the technical scheme of the coating material protection device, the technical scheme is improved on the conventional coating material sealing chamber, and the function of carrying out vacuum protection on the coating material is realized.
Referring to fig. 2, fig. 2 is a schematic structural view of a coating material protection device according to an embodiment, which is applied to seal and protect a coating material of a vacuum coating apparatus, as described above; the vacuum coating equipment is provided with a vacuum chamber 10 and a coating material chamber 20, wherein the coating material chamber 20 is connected to the vacuum chamber 10; the coating material protection device comprises: a sealing chamber 21 embedded in the coating material chamber 20, and a partition device 22 hermetically connected with one side of the sealing chamber 21 close to the vacuum chamber 10; wherein the sealed chamber 21 is used for placing a coating material; the partition device 22 is opened or closed to communicate or partition the sealed chamber 21 with the vacuum chamber 10.
In use, the coating material is placed in the sealed chamber 21. The partition device 22 is matched with the sealing chamber 21 for use, when the partition device 22 is opened, the sealing chamber 21 is communicated with the vacuum chamber 10, and the vacuum coating equipment can use the coating material in the sealing chamber 21 for coating; when the partition device 22 is closed, the sealing chamber 21 is separated from the vacuum chamber 10, and the sealing chamber 21 is in a high vacuum state, so that the coating material in the sealing chamber 21 can be sealed and protected.
The vacuum coating equipment adopts the coating material protection device provided by the application, so that the coating material in the coating material chamber 20 can be well protected; in the coating process, the vacuum chamber 10 is in a vacuum environment, the partition device 22 is in an open state at the moment, the sealing chamber 21 is communicated with the vacuum chamber 10, and at the moment, the coating material in the sealing chamber 21 can be used for coating; after the coating is finished, before the coated workpiece in the vacuum chamber 10 is taken out, in a vacuum environment or an argon-rich environment, the partition device 22 is firstly closed to separate the sealing chamber 21 from the vacuum chamber 10, the coating material in the sealing chamber 21 is firstly sealed and protected, then the vacuum pump 12 of the vacuum coating equipment is closed, the vacuum chamber 10 is restored to an atmospheric pressure state, and then the workpiece is taken out.
According to the above-mentioned coating material protection device, since the closed partition device 22 is closed, the sealed chamber 21 is always in a sealed state, and the coating material in the sealed chamber 21 cannot contact with other atmospheric molecules to react or be adsorbed and polluted under the protection of high vacuum or argon-rich environment; when a new workpiece is placed for the next coating, a cleaning process is not needed before a coating material is used, after the vacuum chamber 10 is vacuumized, the partition device 22 is directly opened to communicate the sealing chamber 21 with the vacuum chamber 10, and the coating material can be used for coating; according to the technical scheme, the purity of the coating material is ensured, the coating efficiency is improved, and the coating effect is also improved.
In one embodiment, as shown in fig. 2, the coating material protecting device of the present application may further include a driving device 23 and a control device 24; wherein, the driving device 23 is connected with the partition device 22, the driving device 23 is connected with the control device 24, and the partition device 22 can be driven to open or close by the driving device 23, so that the sealing chamber 21 is communicated with or separated from the vacuum chamber 10; the control device 24 is mainly used for controlling the driving device 23 to work, opening the partition device 22 in the coating process and closing the partition device 22 after coating, and in addition, the control device 24 can also execute other control functions.
In an embodiment, in order to ensure the vacuum property of the sealed chamber 21, referring to fig. 3, fig. 3 is a schematic structural diagram of a coating material protection apparatus according to another embodiment, an air pumping device or an air inflating device 211 connected to the sealed chamber 21 may be further provided, wherein the air pumping device may be a vacuum pump, and the air inflating device may be an air pump; a vacuum detection device 212 is arranged in the sealed chamber 21; under the vacuum valve 22 is in the closed state, detect the vacuum of sealed cavity 21 through vacuum detection device 212, if adopt the air exhaust equipment, then start the air exhaust equipment to bleed to sealed cavity 21 according to the vacuum that detects, be in the high vacuum state in the messenger sealed cavity 21, thereby guaranteed the isolated of coating material and ambient air, in addition, if adopt the inflation equipment, pour into inert gas (like argon) into through the inflation equipment to the sealed room, be in the inert gas environment in the messenger sealed cavity 21, avoid coating material and other gaseous chemical reaction, perhaps adsorbed the pollutant.
Preferably, as for the structural form of the partition device 22, a vacuum gate valve, a vacuum flap valve, a vacuum pneumatic valve or the like can be adopted; the driving means 23 is driven electrically or pneumatically; it should be noted that which valve structure or which driving method is specifically adopted depends on the requirements of the user in this patent.
An example of a coating material sealing the chamber is set forth below.
The coating material sealing chamber 200 provided by the present application, as shown in fig. 2 and 3, may include: at least one coating material chamber 20 communicated with the inside of the vacuum chamber 10, each coating material chamber 20 being provided with a coating material protection device (including a sealing chamber 21 and a partition device 22); the coating material sealing chamber 200 is mainly technically characterized in that the coating material protection device of the embodiment is adopted, so that the coating material placed inside can be sealed and protected; it should be noted that the coating material sealing chamber 200 according to the embodiment of the present application may be formed by combining a conventional coating material chamber 20 and a coating material protection device provided in the present application, or may be formed by designing and combining the coating material chamber 20, the sealing chamber 21, and the partition device 22 by using the technical principle of the coating material protection device of the present application, so as to implement a protection function on the coating material.
In one embodiment, the coating material chamber 20 is provided with a gas supply port for injecting an inert gas (e.g., argon) near a position where the coating material is stored; because the sputtering coating system needs to work in a stable argon environment, an air supply port can be designed near the coating material to inject argon with a certain flow rate, so that an argon-rich environment is realized.
According to the coating material sealing chamber 200 of the embodiment, the coating material is protected in the sealing chamber 21 in a sealing manner, and is prevented from reacting or adsorbing pollution due to contact with air, so that the purity of the coating material is ensured, frequent cleaning of the coating material is not needed in the coating process, and the coating effect is improved.
An example of the vacuum coating apparatus is explained below.
Referring to fig. 4, fig. 4 is a schematic structural diagram of a vacuum coating apparatus provided in the present application, the vacuum coating apparatus provided in the present application includes: a vacuum chamber 10, a coating material sealing chamber 200, a vacuum pump 12 and an ion source 30; wherein, a hanging structure 11 for placing the coated workpiece is arranged in the vacuum chamber 10, the vacuum chamber 10 is also connected with a vacuum pump, and an ion source 30 is arranged in the vacuum chamber 10 and is used for post-processing the coated workpiece.
In the configuration shown in FIG. 4, a plurality of coating materials may be used to seal the chamber 200, a plurality of vacuum pumps 12 may be used, and a plurality of ion sources 30 may be used; this vacuum coating equipment, owing to adopted the coating material seal chamber 200 that this application embodiment provided, when the coating film, need not frequent clean coating material to have higher coating film efficiency, guaranteed coating film material's purity moreover, can realize better coating film effect.
As described above, the number of the coating material sealing chambers 200 may be plural; the driving device 23 of each coating material sealing chamber 200 is connected to a control device 24, the control device 24 is connected to the upper computer 13, and the upper computer 13 controls the driving device 23 of each coating material sealing chamber 200 to open/close the partition device 22 through the control device 24; as shown in fig. 4, the driving means 23 of the plurality of coating material sealing chambers 200 are collectively controlled by one control means 24.
As an example, the circuit structure of the vacuum coating apparatus provided in the present application may be as shown in fig. 5, and fig. 5 is an electrical structure diagram of the vacuum coating apparatus of an embodiment; the vacuum coating equipment is controlled by an upper computer 13 to carry out coating, and respectively controls a sputtering system 14, a workpiece hanging structure 11, an ion source 30, a control device 24, a vacuum pump 12 and the like; the control device 24 controls the respective drive devices 23 to open and close the vacuum valves 22, respectively. The upper computer 13 also controls a first flow meter 30a on a gas supply pipe connected to the ion source 30 to control the flow rate of the working gas input to the ion source 30, and the upper computer 13 also controls a second flow meter 14a on a gas supply pipe connected to the sputtering system 14 to control the flow rate of the argon gas input to the sputtering system 14. The manner of controlling the sputtering system 14, the workpiece hanging structure 11, the ion source 30, the vacuum pump 12, and the like by the upper computer 13 may be consistent with the conventional control scheme, and will not be described herein again.
For the vacuum coating equipment provided by the application, the following coating process can be adopted during coating:
(1) before the coating material is put into the coating material for coating, the coating material is cleaned.
Specifically, a coating material is put into a sealed cavity of the coating material storage device, and a vacuum cavity door is closed; vacuumizing the vacuum chamber by a vacuum pump; and executing a cleaning process to clean the surface of the coating material.
For example, the sputtering coating system is started to bombard the surface of the target material in the coating material storage device, so as to clean the surface of the target material and remove pollutants generated by contact reaction with air or adsorbed on the surface.
If a plurality of coating material sealing chambers exist, before the cleaning process is executed, the vacuum valves of the coating material storage devices are opened simultaneously, and the sealing chambers are communicated with the vacuum chambers; and cleaning the surfaces of the coating materials in the sealed chambers of all the coating material storage devices in sequence.
After the cleaning procedure is finished, closing a vacuum valve of the coating material storage device, and separating the sealed chamber from the vacuum chamber; in the case of a plurality of coating material storage units, one is cleaned and closed.
(2) And placing a new workpiece into the vacuum chamber, vacuumizing the vacuum chamber through a vacuum pump, opening a vacuum valve of the coating material storage device, communicating the sealed chamber with the vacuum chamber, and coating the workpiece in the vacuum chamber by using the coating material in the sealed chamber.
Before the step, the target is manufactured in advance and fixed in a sealing chamber of a coating material storage device, and cleaning and sealing protection are carried out; or the target material is sealed and protected after the last coating. When coating, the vacuum valve of the coating material storage device is opened, the sealed chamber and the vacuum chamber are communicated, the sputtering coating system is started, the coating material in the sealed chamber is utilized to coat the workpiece in the vacuum chamber, and the ion source is selected to work or not work according to the process requirements in the coating process.
If the number of the coating material storage devices is multiple and films of different coating materials are to be coated on the workpiece, the vacuum valve of the current coating material storage device is opened at first and the vacuum valves of other coating material storage devices are kept closed during coating; performing a film coating process, namely coating a film on the workpiece by using the film coating material in the sealed cavity of the current film coating material storage device; after coating, closing the vacuum valve of the current coating material storage device, then opening the vacuum valve of the next coating material storage device, and coating the workpiece by using the coating material in the sealed chamber; and repeating the steps until all the required coating materials are used for coating the workpiece.
It should be noted that, when the same target material is used in the coating process, the vacuum valves of all the coating material storage devices can be opened simultaneously to perform sputtering coating. In addition, if different targets are required to be used for mixed coating, if a special alloy film layer is required to be prepared, a vacuum valve of a coating material storage device which needs to be mixed can be opened simultaneously, and sputtering coating can be carried out by using different types of targets simultaneously.
(3) And after the coating is finished, closing the vacuum valve to separate the vacuum chamber and the sealing chamber.
Specifically, after the film coating is completed, the upper computer of the vacuum film coating equipment sends an instruction to the control device, and the control drive device closes the vacuum valve, separates the vacuum chamber from the sealed chamber, and performs sealing protection on the target in the sealed chamber. The first method is to open the vacuum pump before closing the vacuum pump, close the vacuum valve in high vacuum state, separate the vacuum chamber and the sealed chamber, and form high vacuum protection for the target. The other method is that a vacuum valve is closed under the condition that the vacuum chamber is rich in argon gas, and the target material is protected under the argon gas environment; because argon is an inert gas, the target material can be protected, and the method is more economical.
(4) And closing the vacuum pump, opening the cavity door of the vacuum chamber in an atmospheric pressure state, and taking out the coated workpiece.
Specifically, each vacuum pump is closed, the vacuum chamber is restored to the atmospheric pressure state, a vacuum chamber door is opened, the coated workpiece is taken out, and at the moment, the sealing chamber is in sealing protection, so that the target material is prevented from being contacted with air to generate reaction or being adsorbed and polluted; when the next batch of workpieces is coated, the target in the sealed chamber can be directly used for coating.
According to the coating process, the coating material is cleaned only once when the coating material is put in, and taking the target as an example, the target is only cleaned when the target is put in, and cleaning is not needed in the subsequent coating process, so that the procedure of cleaning the surface of the target is reduced, the coating time is greatly shortened, and the material loss of the target is reduced; meanwhile, the coating effect is improved by using a clean coating material.
To sum up, the technical scheme of this application has avoided the link of frequent clean coating material at the coating process, has saved coating time consumption, has improved coating efficiency, uses clean coating material to also promote the coating effect simultaneously.
The foregoing is only a partial embodiment of the present application, and it should be noted that, for those skilled in the art, various modifications and decorations can be made without departing from the principle of the present application, and these modifications and decorations should also be regarded as the protection scope of the present application.
Claims (10)
1. A coating material protection device is characterized in that the coating material protection device is applied to seal protection of a coating material of vacuum coating equipment; the vacuum coating equipment is provided with a vacuum chamber and a coating material chamber connected with the vacuum chamber;
the coating material protection device comprises: the separation device is embedded in the coating material chamber and is connected with one side of the coating material chamber close to the vacuum chamber in a sealing mode; the sealed chamber is used for placing the coating material;
the partition device is in an opening state or a closing state and correspondingly communicates or separates the sealed chamber and the vacuum chamber respectively.
2. The coating material protection device of claim 1, further comprising: and the driving device is connected with the partition device and is used for driving the partition device to be opened or closed.
3. The coating material protection device of claim 2, further comprising: and the control device is connected with the upper computer and the driving device and is used for receiving a control instruction of the upper computer and controlling the driving device.
4. The coating material protection device according to claim 1, further comprising: the air pumping equipment or the air charging equipment is connected with the sealed cavity, and the vacuum detection device is arranged in the sealed cavity;
the vacuum detection device is used for detecting the vacuum degree of the sealed chamber when the vacuum valve is in a closed state, the air suction equipment is used for sucking air from the sealed chamber, and the inflating equipment is used for injecting inert gas into the sealed chamber.
5. The coating material protection device according to claim 1, wherein the cut-off device comprises a vacuum gate valve, a vacuum flap valve or a vacuum pneumatic valve.
6. The device for protecting a coated material according to claim 2, wherein the driving means is driven electrically or pneumatically.
7. A coating material seal chamber, comprising: the coating material chamber communicated with the vacuum chamber, the coating material protection device according to any one of claims 1 to 6 respectively arranged in each coating material chamber.
8. The coating material sealing chamber according to claim 7, wherein the coating material chamber is provided with a gas supply port for injecting an inert gas near a position where the coating material is stored.
9. A vacuum coating apparatus, comprising: a vacuum chamber, the coating material sealing chamber of claims 1-7, a vacuum pump, and an ion source;
the vacuum chamber is internally provided with a hanging structure for placing a coated workpiece, the vacuum chamber is connected with a vacuum pump, and the ion source is arranged in the vacuum chamber.
10. The vacuum plating apparatus according to claim 9, wherein the number of the plating material sealed chambers is plural;
the driving device of each coating material sealing cavity is connected to a control device, the control device is connected to an upper computer, and the upper computer controls the driving device of each coating material sealing cavity to open/close the partition device through the control device.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115407432A (en) * | 2022-08-29 | 2022-11-29 | 歌尔光学科技有限公司 | Vacuum coating system |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115407432A (en) * | 2022-08-29 | 2022-11-29 | 歌尔光学科技有限公司 | Vacuum coating system |
| CN115407432B (en) * | 2022-08-29 | 2023-12-22 | 歌尔光学科技有限公司 | Vacuum coating system |
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