CN215811460U - A tool for rotating target helium leak testing - Google Patents
A tool for rotating target helium leak testing Download PDFInfo
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- CN215811460U CN215811460U CN202121701984.8U CN202121701984U CN215811460U CN 215811460 U CN215811460 U CN 215811460U CN 202121701984 U CN202121701984 U CN 202121701984U CN 215811460 U CN215811460 U CN 215811460U
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Abstract
The utility model provides a jig for detecting helium leakage of a rotary target, which comprises a flange, a connecting pipe and an adapter which are sequentially connected; a pressure gauge is arranged on the plane of the flange; the structure of the flange is adapted to the end head of the rotary target material; the structure of adapter suits with the gas outlet of helium leakage detection equipment. The jig provided by the utility model is convenient for connecting the helium leakage equipment and the target end, and improves the accuracy and the detection efficiency of target welding defect detection.
Description
Technical Field
The utility model belongs to the technical field of sputtering targets, relates to a jig, and particularly relates to a jig for helium leakage detection of a rotary target.
Background
Magnetron sputtering coating is a coating deposition process widely applied in the coating industry at present. The principle of sputtering coating is that under the vacuum condition, the argon ion of an electron gun bombards the surface of a target material, and the surface material of the target material is sputtered in the forms of molecules, atoms, ions or electrons and the like and splashed onto a substrate to deposit and form a film.
In order to improve the utilization of the target, attempts have been made to form the target into a cylindrical shape, in which a stationary magnet is installed. During sputtering, the tube target rotates at a certain speed, and is therefore called a rotating target. Because the relative motion occurs between the rotating tube target and the static magnet, the sputtering uniformly occurs on the whole tube target surface, and the utilization rate of the tube target is up to more than 70%. Compared with a planar target, the rotary target has the advantages of high utilization rate, good coating continuity, uniform coating components and the like, is a more ideal sputtering target, and has huge market demand. With the change of the coating industry from using a planar target to using a rotary target, the rotary target gradually becomes a standard material for magnetron sputtering.
Since the rotating target material needs to be subjected to a welding procedure during the manufacturing process, and the sealing performance of the welding part is crucial to the normal use of the target material. Helium leakage equipment is generally adopted to carry out tightness test on the end head of the rotating target material, but the connection part of the equipment and the end head has the problem of unmatched shape and size, and an intermediate transition part is required to connect the equipment and the end head.
Therefore, how to provide a tool for detecting helium leakage of a rotary target, which is convenient for connecting helium leakage equipment and a target end, improves the accuracy and the detection efficiency of target welding defect detection, and becomes a problem to be solved urgently by technical personnel in the field at present.
SUMMERY OF THE UTILITY MODEL
Aiming at the defects in the prior art, the utility model aims to provide a jig for detecting helium leakage of a rotary target, which is convenient for connecting helium leakage equipment and a target end, and improves the accuracy and the detection efficiency of target welding defect detection.
In order to achieve the purpose, the utility model adopts the following technical scheme:
the utility model provides a jig for detecting helium leakage of a rotary target, which comprises a flange, a connecting pipe and an adapter which are sequentially connected.
And a pressure gauge is arranged on the plane of the flange.
The structure of the flange is matched with the end head of the rotary target.
The structure of adapter suits with the gas outlet of helium leakage detection equipment.
According to the utility model, the flange adaptive to the end of the rotary target and the adapter adaptive to the gas outlet of the helium leakage detection equipment are arranged on the jig, so that the end of the rotary target is indirectly connected with the gas outlet of the helium leakage detection equipment, the problem that the end of the rotary target and the gas outlet of the helium leakage detection equipment are not adaptive to each other in shape and size is solved, the accuracy and the detection efficiency of target welding defect detection are improved, and the jig is simple in structure, convenient to process and low in cost.
According to the utility model, the pressure gauge is arranged to facilitate real-time monitoring of pressure change inside the rotary target, and when obvious helium leakage occurs, the pressure gauge can be timely known and necessary measures are taken to terminate detection, so that unnecessary waste of helium is avoided.
Preferably, the flange has 4-8 bolt holes uniformly distributed around the center of the circle on the plane, for example, 4, 5, 6, 7 or 8 bolt holes are distributed on the plane.
According to the utility model, the bolt holes are used for connecting the flange and the target end through bolts, and the bolt holes are uniformly distributed, so that the connection stability and the connection tightness of the flange and the target end are ensured.
Preferably, the bolt holes are spaced from the center of the circle by a distance 1/2-4/5 of the flange diameter, such as 1/2, 3/5, 7/10 or 4/5, but not limited to the values recited, and other values not recited in the range of values are equally applicable.
Preferably, a sealing groove is formed at the joint of the flange and the end of the rotary target.
According to the utility model, the sealing groove is used for placing the rubber ring, so that the sealing property of the connection between the flange and the target end is improved, and the excessive abrasion of the flange and the target end in the loading and unloading process is prevented.
Preferably, the depth of the sealing groove is 1-3cm, and may be, for example, 1cm, 1.2cm, 1.4cm, 1.6cm, 1.8cm, 2cm, 2.2cm, 2.4cm, 2.6cm, 2.8cm or 3cm, but is not limited to the recited values, and other values not recited in the range of values are equally applicable.
Preferably, the pressure gauge is arranged in a region between the sealing groove and the center of the flange.
Preferably, the inner diameter of the connecting tube is 0.5-2cm, and may be, for example, 0.5cm, 0.6cm, 0.8cm, 1cm, 1.2cm, 1.4cm, 1.6cm, 1.8cm or 2cm, but is not limited to the values recited, and other values not recited in the range of values are equally applicable.
Preferably, the adapter comprises a gas buffering end head and a limiting ring which are connected in sequence.
In the utility model, the gas buffer end is of a cylindrical structure with the inner diameter larger than that of the connecting pipe, and is used for buffering helium at the position of the adapter in the helium leakage detection process, so that the sealing property of the connecting part is improved; the structure of the limiting ring is matched with a lock catch of an air outlet of the helium leakage detection equipment.
Preferably, the gas cushion tip has an internal diameter of 1 to 3cm, and may be, for example, 1cm, 1.2cm, 1.4cm, 1.6cm, 1.8cm, 2cm, 2.2cm, 2.4cm, 2.6cm, 2.8cm or 3cm, but is not limited to the recited values, and other values not recited within the range of values are equally applicable.
Preferably, the stop collar has an outer diameter of 3 to 5cm, and may be, for example, 3cm, 3.2cm, 3.4cm, 3.6cm, 3.8cm, 4cm, 4.2cm, 4.4cm, 4.6cm, 4.8cm or 5cm, but is not limited to the values recited, and other values not recited within the range of values are equally applicable.
Preferably, the flange has a diameter of 20-30cm, and may be, for example, 20cm, 21cm, 22cm, 23cm, 24cm, 25cm, 26cm, 27cm, 28cm, 29cm or 30cm, but is not limited to the recited values, and other values not recited in the range of values are also applicable.
Compared with the prior art, the utility model has the beneficial effects that:
according to the utility model, the flange adaptive to the end of the rotary target and the adapter adaptive to the gas outlet of the helium leakage detection equipment are arranged on the jig, so that the end of the rotary target is indirectly connected with the gas outlet of the helium leakage detection equipment, the problem that the end of the rotary target and the gas outlet of the helium leakage detection equipment are not adaptive to each other in shape and size is solved, the accuracy and the detection efficiency of target welding defect detection are improved, and the jig is simple in structure, convenient to process and low in cost. In addition, the pressure gauge is arranged, so that the pressure change in the rotary target can be monitored in real time, and when obvious helium leakage occurs, the pressure gauge can be timely known through the numerical value of the pressure gauge and necessary measures are taken to terminate detection, so that unnecessary waste of helium is avoided.
Drawings
Fig. 1 is a schematic structural view of a jig for detecting helium leakage of a rotary target according to the present invention;
FIG. 2 is a bottom structure view of a tool for helium leak detection of a rotating target according to the present invention;
fig. 3 is a schematic structural diagram of a jig for helium leakage detection of a rotating target according to embodiment 4;
fig. 4 is a bottom structure diagram of a tool for helium leakage detection of a rotating target provided in embodiment 5.
Wherein: 10-a flange; 11-bolt holes; 12-a seal groove; 20-connecting pipe; 30-an adapter; 31-gas buffer end; 32-a stop collar; 40-pressure gauge.
Detailed Description
It is to be understood that in the description of the present invention, the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate orientations or positional relationships based on those shown in the drawings, and are used only for convenience in describing the present invention and for simplicity in description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be taken as limiting the present invention.
It should be noted that, in the description of the present invention, unless otherwise explicitly specified or limited, the terms "disposed," "connected" and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art through specific situations.
The technical scheme of the utility model is further explained by the specific implementation mode in combination with the attached drawings.
Example 1
The present embodiment provides a jig for detecting helium leakage of a rotary target, as shown in fig. 1, the jig for detecting helium leakage of a rotary target includes a flange 10, a connecting pipe 20, and an adapter 30, which are connected in sequence; a pressure gauge 40 is arranged on the plane of the flange 10; the structure of the flange 10 is adapted to the end of the rotary target; the adapter 30 is configured to fit the outlet of the helium leak detection device.
As shown in fig. 2, 6 bolt holes 11 are uniformly distributed on the plane of the flange 10 around the circle center, and the distance between each bolt hole 11 and the circle center is 4/5 of the diameter of the flange 10; a sealing groove 12 is formed in the joint of the flange 10 and the end of the rotary target, and the depth of the sealing groove is 2 cm; the pressure gauge 40 is disposed in a region between the seal groove 12 and the center of the flange 10.
In this embodiment, the inner diameter of the connecting pipe 20 is 1 cm; the adapter 30 comprises a gas buffering end head 31 and a limiting ring 32 which are sequentially connected, wherein the inner diameter of the gas buffering end head 31 is 2cm, and the outer diameter of the limiting ring 32 is 4 cm; the diameter of the flange is 25 cm.
This embodiment has realized that the end of rotatory target and the gas outlet of helium leakage detection equipment are indirect continuous through set up the flange 10 that suits with the end of rotatory target and the adapter 30 that suits with the gas outlet of helium leakage detection equipment on the tool, has solved the problem that both shapes and size are not adapted, has promoted target welding defect detection's accuracy and detection efficiency, just tool simple structure, processing is convenient, low cost. In addition, the pressure gauge 40 is arranged to facilitate real-time monitoring of pressure changes inside the rotary target, and when obvious helium leakage occurs, the pressure can be known in time through the value of the pressure gauge 40 and detection can be stopped by taking necessary measures, so that unnecessary waste of helium is avoided.
Example 2
The present embodiment provides a jig for detecting helium leakage of a rotary target, as shown in fig. 1, the jig for detecting helium leakage of a rotary target includes a flange 10, a connecting pipe 20, and an adapter 30, which are connected in sequence; a pressure gauge 40 is arranged on the plane of the flange 10; the structure of the flange 10 is adapted to the end of the rotary target; the adapter 30 is configured to fit the outlet of the helium leak detection device.
As shown in fig. 2, 4 bolt holes 11 are uniformly distributed on the plane of the flange 10 around the circle center, and the distance between each bolt hole 11 and the circle center is 3/5 of the diameter of the flange 10; a sealing groove 12 is formed at the joint of the flange 10 and the end of the rotary target, and the depth of the sealing groove is 1 cm; the pressure gauge 40 is disposed in a region between the seal groove 12 and the center of the flange 10.
In this embodiment, the inner diameter of the connecting pipe 20 is 0.5 cm; the adapter 30 comprises a gas buffering end head 31 and a limiting ring 32 which are sequentially connected, wherein the inner diameter of the gas buffering end head 31 is 1cm, and the outer diameter of the limiting ring 32 is 3 cm; the diameter of the flange is 20 cm.
This embodiment has realized that the end of rotatory target and the gas outlet of helium leakage detection equipment are indirect continuous through set up the flange 10 that suits with the end of rotatory target and the adapter 30 that suits with the gas outlet of helium leakage detection equipment on the tool, has solved the problem that both shapes and size are not adapted, has promoted target welding defect detection's accuracy and detection efficiency, just tool simple structure, processing is convenient, low cost. In addition, the pressure gauge 40 is arranged to facilitate real-time monitoring of pressure changes inside the rotary target, and when obvious helium leakage occurs, the pressure can be known in time through the value of the pressure gauge 40 and detection can be stopped by taking necessary measures, so that unnecessary waste of helium is avoided.
Example 3
The present embodiment provides a jig for detecting helium leakage of a rotary target, as shown in fig. 1, the jig for detecting helium leakage of a rotary target includes a flange 10, a connecting pipe 20, and an adapter 30, which are connected in sequence; a pressure gauge 40 is arranged on the plane of the flange 10; the structure of the flange 10 is adapted to the end of the rotary target; the adapter 30 is configured to fit the outlet of the helium leak detection device.
As shown in fig. 2, 8 bolt holes 11 are uniformly distributed on the plane of the flange 10 around the circle center, and the distance between each bolt hole 11 and the circle center is 1/2 of the diameter of the flange 10; a sealing groove 12 is formed in the joint of the flange 10 and the end of the rotary target, and the depth of the sealing groove is 3 cm; the pressure gauge 40 is disposed in a region between the seal groove 12 and the center of the flange 10.
In this embodiment, the inner diameter of the connecting pipe 20 is 2 cm; the adapter 30 comprises a gas buffering end head 31 and a limiting ring 32 which are sequentially connected, wherein the inner diameter of the gas buffering end head 31 is 3cm, and the outer diameter of the limiting ring 32 is 5 cm; the diameter of the flange is 30 cm.
This embodiment has realized that the end of rotatory target and the gas outlet of helium leakage detection equipment are indirect continuous through set up the flange 10 that suits with the end of rotatory target and the adapter 30 that suits with the gas outlet of helium leakage detection equipment on the tool, has solved the problem that both shapes and size are not adapted, has promoted target welding defect detection's accuracy and detection efficiency, just tool simple structure, processing is convenient, low cost. In addition, the pressure gauge 40 is arranged to facilitate real-time monitoring of pressure changes inside the rotary target, and when obvious helium leakage occurs, the pressure can be known in time through the value of the pressure gauge 40 and detection can be stopped by taking necessary measures, so that unnecessary waste of helium is avoided.
Example 4
In this embodiment, as shown in fig. 3, the jig for detecting helium leakage of a rotary target includes a flange 10, a connecting pipe 20, and an adapter 30, which are connected in sequence; a pressure gauge 40 is arranged on the plane of the flange 10; the structure of the flange 10 is adapted to the end of the rotary target; the adapter 30 is configured to fit the outlet of the helium leak detection device.
In this embodiment, the structure of the flange 10 is the same as that of embodiment 1, and therefore, the description thereof is omitted. The inner diameter of the connecting pipe 20 is 1 cm; the adapter 30 is a limit ring, and the outer diameter of the limit ring is 4 cm.
This embodiment has realized that the end of rotatory target and the gas outlet of helium leakage detection equipment are indirect continuous through set up the flange 10 that suits with the end of rotatory target and the adapter 30 that suits with the gas outlet of helium leakage detection equipment on the tool, has solved the problem that both shapes and size are not adapted, has promoted target welding defect detection's accuracy and detection efficiency, just tool simple structure, processing is convenient, low cost. In addition, the pressure gauge 40 is arranged to facilitate real-time monitoring of pressure changes inside the rotary target, and when obvious helium leakage occurs, the pressure can be known in time through the value of the pressure gauge 40 and detection can be stopped by taking necessary measures, so that unnecessary waste of helium is avoided.
Example 5
The present embodiment provides a jig for detecting helium leakage of a rotary target, as shown in fig. 1, the jig for detecting helium leakage of a rotary target includes a flange 10, a connecting pipe 20, and an adapter 30, which are connected in sequence; a pressure gauge 40 is arranged on the plane of the flange 10; the structure of the flange 10 is adapted to the end of the rotary target; the adapter 30 is configured to fit the outlet of the helium leak detection device.
As shown in fig. 4, 6 bolt holes 11 are uniformly distributed on the plane of the flange 10 around the center of the circle, and the distance between the bolt holes 11 and the center of the circle is 4/5 of the diameter of the flange 10.
In this embodiment, the inner diameter of the connecting pipe 20 is 1 cm; the adapter 30 comprises a gas buffering end head 31 and a limiting ring 32 which are sequentially connected, wherein the inner diameter of the gas buffering end head 31 is 2cm, and the outer diameter of the limiting ring 32 is 4 cm; the diameter of the flange is 25 cm.
This embodiment has realized that the end of rotatory target and the gas outlet of helium leakage detection equipment are indirect continuous through set up the flange 10 that suits with the end of rotatory target and the adapter 30 that suits with the gas outlet of helium leakage detection equipment on the tool, has solved the problem that both shapes and size are not adapted, has promoted target welding defect detection's accuracy and detection efficiency, just tool simple structure, processing is convenient, low cost. In addition, the pressure gauge 40 is arranged to facilitate real-time monitoring of pressure changes inside the rotary target, and when obvious helium leakage occurs, the pressure can be known in time through the value of the pressure gauge 40 and detection can be stopped by taking necessary measures, so that unnecessary waste of helium is avoided.
The applicant declares that the above description is only a specific embodiment of the present invention, but the scope of the present invention is not limited thereto, and it should be understood by those skilled in the art that any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are within the scope and disclosure of the present invention.
Claims (10)
1. A jig for detecting helium leakage of a rotary target is characterized by comprising a flange, a connecting pipe and an adapter which are sequentially connected;
a pressure gauge is arranged on the plane of the flange;
the structure of the flange is adapted to the end head of the rotary target material;
the structure of adapter suits with the gas outlet of helium leakage detection equipment.
2. The tool for helium leakage detection of a rotary target according to claim 1, wherein 4-8 bolt holes are uniformly distributed around the center of the circle on the plane of the flange.
3. The tool of claim 2, wherein the bolt hole is spaced from the center of the circle by 1/2-4/5 of the diameter of the flange.
4. The tool for helium leakage detection of a rotary target according to claim 1, wherein a sealing groove is formed at a joint of the flange and the end of the rotary target;
the depth of the sealing groove is 1-3 cm.
5. The tool of claim 4, wherein the pressure gauge is disposed in a region between the sealing groove and a center of the flange.
6. The tool for helium leak detection of a rotary target according to claim 1, wherein the inner diameter of the connecting tube is 0.5-2 cm.
7. The tool for helium leak detection of a rotary target according to claim 1, wherein the adapter comprises a gas buffer end and a limiting ring connected in sequence.
8. The tool of claim 7, wherein the inner diameter of the gas buffer tip is 1-3 cm.
9. The tool for helium leak detection of a rotary target according to claim 7, wherein the outer diameter of the limiting ring is 3-5 cm.
10. The tool for helium leak detection of a rotary target according to claim 1, wherein the diameter of the flange is 20-30 cm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121701984.8U CN215811460U (en) | 2021-07-26 | 2021-07-26 | A tool for rotating target helium leak testing |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121701984.8U CN215811460U (en) | 2021-07-26 | 2021-07-26 | A tool for rotating target helium leak testing |
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| CN215811460U true CN215811460U (en) | 2022-02-11 |
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| CN202121701984.8U Active CN215811460U (en) | 2021-07-26 | 2021-07-26 | A tool for rotating target helium leak testing |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114636524A (en) * | 2022-03-11 | 2022-06-17 | 宁波江丰电子材料股份有限公司 | Sealing detection jig and detection method for tube target back tube |
-
2021
- 2021-07-26 CN CN202121701984.8U patent/CN215811460U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114636524A (en) * | 2022-03-11 | 2022-06-17 | 宁波江丰电子材料股份有限公司 | Sealing detection jig and detection method for tube target back tube |
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