CN215806419U - Semiconductor vacuum gate valve - Google Patents
Semiconductor vacuum gate valve Download PDFInfo
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- CN215806419U CN215806419U CN202122325756.1U CN202122325756U CN215806419U CN 215806419 U CN215806419 U CN 215806419U CN 202122325756 U CN202122325756 U CN 202122325756U CN 215806419 U CN215806419 U CN 215806419U
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 29
- 238000007789 sealing Methods 0.000 claims abstract description 36
- 230000007246 mechanism Effects 0.000 claims abstract description 23
- 230000002093 peripheral effect Effects 0.000 claims abstract description 9
- 238000000034 method Methods 0.000 claims description 11
- 230000008569 process Effects 0.000 claims description 11
- 239000002245 particle Substances 0.000 abstract description 12
- 230000009471 action Effects 0.000 abstract description 5
- 230000003749 cleanliness Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000009286 beneficial effect Effects 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 230000010355 oscillation Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000011109 contamination Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
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Abstract
The utility model discloses a semiconductor vacuum gate valve which comprises a valve body, a cover plate, a supporting frame, a driving mechanism, a valve rod and a valve plate, wherein the valve body is arranged on the valve body; the side wall of the valve body is provided with a valve opening, a cover plate sealing cover is arranged on the top opening of the valve body in the non-passage direction, a support frame is connected above the cover plate, and a driving mechanism is connected on the support frame; the cover plate is provided with a through hole, one end of the valve rod is connected with the output end of the driving mechanism, the other end of the valve rod penetrates through the through hole in the cover plate and extends into the inner cavity of the valve body, and the valve plate is used for sealing the opening of the valve; the corrugated pipe sleeved on the periphery of the valve rod is connected between the valve rod and the cover plate in a sealing manner. The valve rod drives the valve plate to move under the action of the driving mechanism so as to seal or open the opening of the valve, the dynamic friction between the valve rod and peripheral parts is small, the particle number generated by the dynamic friction can be effectively reduced, the corrugated pipe does telescopic motion along with the movement of the valve rod, external particles can be prevented from entering the inner cavity of the valve body, and the inner cavity of the valve body can be favorably kept in higher vacuum degree.
Description
Technical Field
The utility model relates to the technical field of vacuum valves, in particular to a semiconductor vacuum gate valve.
Background
With the rapid development of semiconductor technology, the precision of semiconductor manufacturing processes of semiconductor devices is required to be higher, so that high cleanliness and special manufacturing processes are required, and the requirements for production equipment are also higher and higher.
To reduce the potential for contamination of semiconductor wafers, the fabrication process is performed in a vacuum environment and in a specific process gas environment. In order to connect and disconnect the process chamber to the line for the specific gas, a vacuum valve needs to be installed in the line.
In the prior art, a valve rod is driven by a vacuum valve through a driving mechanism to move, and the valve rod drives a valve plate to move so as to seal a valve opening on a valve body. However, the dynamic friction inside the valve body of the existing vacuum valve is large, the number of particles generated by the dynamic friction is large, and the requirement of the vacuum valve on the vacuum degree is difficult to meet.
SUMMERY OF THE UTILITY MODEL
Therefore, the technical problem to be solved by the utility model is to overcome the defects that the dynamic friction inside the valve body is large, the generated particle number is large, and the requirement on the vacuum degree of the valve is difficult to meet in the prior art, thereby providing the semiconductor vacuum gate valve.
In order to solve the technical problems, the technical scheme of the utility model is as follows:
a semiconductor vacuum gate valve comprises a valve body, a cover plate, a supporting frame, a driving mechanism, a valve rod and a valve plate; the side wall of the valve body is provided with a valve opening, the cover plate sealing cover is arranged on the top opening of the valve body in the non-passage direction, the supporting frame is connected above the cover plate, and the driving mechanism is connected on the supporting frame; the cover plate is provided with a through hole, one end of the valve rod is connected with the output end of the driving mechanism, the other end of the valve rod penetrates through the through hole in the cover plate and extends into the inner cavity of the valve body, and the valve plate is connected to the valve rod, positioned in the inner cavity of the valve body and used for sealing the valve opening; the valve rod with sealing connection has the cover to establish between the apron bellows in the valve rod periphery.
Furthermore, the periphery wall of the valve rod is provided with a limiting step protruding outwards, an upper connecting ring sleeved on the periphery of the valve rod is arranged above the limiting step, and the upper end of the corrugated pipe is connected to the lower end face of the upper connecting ring in a sealing mode.
Further, a first sealing ring is arranged on the contact surface of the upper connecting ring and the valve rod in a sealing mode.
Furthermore, the upper end surface of the cover plate is provided with an installation groove, a lower connection ring positioned on the periphery of the valve rod is arranged in the installation groove, a gap is formed between the lower connection ring and the valve rod, and the lower end of the corrugated pipe is connected to the upper end surface of the lower connection ring in a sealing mode.
Further, a second sealing ring is arranged on the contact surface of the lower connecting ring and the cover plate in a sealing mode.
Further, be connected with on the apron with the bracing piece of valve rod syntropy extension, fixed cover is equipped with and is located on the valve rod go up the motion guide rail of go up the go-between top, be equipped with on the motion guide rail with the straight line track groove that the bracing piece set up with the axial, straight line track groove orientation the one end of bracing piece is equipped with the opening, the bracing piece is close to the tip of motion guide rail one end is equipped with can certainly the opening stretches into the support wheel of straight line track inslot.
Furthermore, the supporting wheel is rotatably connected to a fixed shaft, and one end of the fixed shaft penetrates through the supporting rod and is fixed on the supporting frame.
Furthermore, an adapter plate is arranged at the top of the supporting frame; the driving mechanism is an air cylinder arranged on the adapter plate, and the valve rod is connected to a piston rod of the air cylinder and driven by the piston rod to move.
Furthermore, a limit groove rod is arranged at one end of the piston rod, which is connected with the valve rod, a limit groove is arranged in the limit groove rod, an eccentric balance wheel which can swing in the limit groove is arranged in the limit groove, an eccentric shaft is connected to the eccentric balance wheel, and the valve rod is connected to the eccentric shaft.
Furthermore, the peripheral wall of the limiting groove comprises an arc section, a first V-shaped arc section and a second V-shaped arc section which are positioned at two ends of the arc section and extend towards the inner part of the circular ring where the arc section is positioned in the turning direction, and a straight line section positioned between the first V-shaped arc section and the second V-shaped arc section; one end of the eccentric balance wheel is provided with a first limiting bulge matched with the first V-shaped arc section, and the other end of the eccentric balance wheel is provided with a second limiting bulge matched with the second V-shaped arc section; the eccentric balance wheel has a first swing position enabling the first limiting bulge to be matched with the first V-shaped arc section and a second swing position enabling the second limiting bulge to be matched with the second V-shaped arc section in the process of swinging along the arc section.
The technical scheme of the utility model has the following advantages:
1. the cover plate is arranged on the opening of the valve body in the non-access direction in a sealing mode, the cover plate is provided with a through hole, one end, connected with the valve plate, of the valve rod penetrates through the through hole in the cover plate and extends into the inner cavity of the valve body, and a corrugated pipe sleeved on the periphery of the valve rod is connected between the valve rod and the cover plate in a sealing mode; the valve rod drives the valve plate to move under the action of the driving mechanism so as to seal or open the opening of the valve, the dynamic friction between the valve rod and peripheral parts is small, the particle number generated by the dynamic friction can be effectively reduced, the corrugated pipe does telescopic motion along with the movement of the valve rod, external particles can be prevented from entering an inner cavity of the valve body from a gap between the valve rod and the cover plate, the inner cavity of the valve body can be favorably kept in higher vacuum degree, and the valve is suitable for application environments with high requirements on equipment cleanliness.
2. According to the semiconductor vacuum gate valve provided by the utility model, the arrangement of the first sealing ring and the second sealing ring can increase the sealing property of the connecting position of the corrugated pipe and the valve rod or the cover plate, so that the inner cavity of the valve body can be further favorably kept in higher vacuum degree.
3. According to the semiconductor vacuum gate valve provided by the utility model, the support wheel on the support rod plays a role in guiding the motion direction of the motion guide rail and the valve rod fixed on the motion guide rail through the linear track groove, the drive mechanism drives the valve rod to do linear motion firstly in the process of closing the valve, the motion guide rail also makes linear motion along with the valve rod, when the motion guide rail moves to a position where the groove bottom of the linear track groove on the motion guide rail is abutted against the support wheel, the motion guide rail and the valve rod can not continue to do linear motion at the moment, the drive mechanism drives the valve rod and the motion guide rail to do swinging motion integrally by taking the support wheel as a center, the valve plate connected to the valve plate swings to the position of a valve opening, the sealing between the valve plate and the valve body is realized, and the valve is completely closed at the moment; the process of opening the valve and the process of closing the valve are performed in reverse order. The valve opening and closing mode has less particles generated by friction, and is beneficial to keeping higher vacuum degree in the inner cavity of the valve body.
4. According to the semiconductor vacuum gate valve provided by the utility model, the end, connected with the valve rod, of the piston rod is provided with the limiting groove rod, the limiting groove is arranged in the limiting groove rod, the eccentric balance wheel capable of swinging in the limiting groove is arranged in the limiting groove, and the valve rod is connected to the eccentric shaft of the eccentric balance wheel, so that the end, connected with the piston rod, of the valve rod can also swing, and a valve plate at the other end of the valve rod can conveniently seal a valve opening on the valve body.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.
Fig. 1 is a schematic overall structure diagram of a semiconductor vacuum gate valve according to an embodiment of the present invention;
fig. 2 is a schematic view of the overall structure of a semiconductor vacuum gate valve according to an embodiment of the present invention, wherein a side plate and a panel on a support frame are hidden to show the internal structure thereof;
FIG. 3 is a schematic diagram of a half-section structure of a semiconductor vacuum gate valve according to an embodiment of the present invention;
FIG. 4 is a schematic view showing the connection relationship between the piston rod and the valve plate in the embodiment of the present invention;
fig. 5 is a schematic view of the installation structure of the eccentric balance wheel on the limiting rod groove in the embodiment of the utility model.
Description of reference numerals: 1. a valve body; 101. a valve body opening; 2. a cover plate; 201. a through hole; 202. mounting grooves; 3. a support frame; 301. a side plate; 302. a panel; 303. an adapter plate; 4. a valve stem; 401. a limiting step; 5. a valve plate; 6. a bellows; 7. a cylinder barrel; 8. a cylinder cover plate; 9. a cylinder block; 10. an upper connecting ring; 11. a first seal ring; 12. a lower connecting ring; 13. a second seal ring; 14. a support bar; 15. a moving guide rail; 151. a linear track groove; 16. a support wheel; 17. a fixed shaft; 18. a piston rod; 19. a limit slot rod; 191. a limiting groove; 1911. a circular arc section; 1912. a first V-shaped arc section; 1903. a second V-shaped arc section; 1904. a straight line segment; 20. an eccentric balance wheel; 201. a first limit protrusion; 202. a second limit bulge; 21. an eccentric shaft; 22. and a friction reducing member.
Detailed Description
The technical solutions of the present invention will be described clearly and completely with reference to the accompanying drawings, and it should be understood that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
A semiconductor vacuum gate valve as shown in fig. 1-5 comprises a valve body 1, a cover plate 2, a support frame 3, a valve rod 4, a valve plate 5 and a driving mechanism. Wherein, the opposite both sides wall of valve body 1 is seted up the coaxial valve opening that arranges, and the line direction of two valve openings is the route direction of valve body 1. The cover plate 2 is arranged on the opening at the top of the valve body 1 in the non-passage direction in a sealing manner, and a sealing ring is arranged at the connecting position of the cover plate 2 and the top of the valve body 1. The support frame 3 includes a pair of side plates 301 fixedly coupled above the cover plate 2, two panels 302 coupled between the pair of side plates 301, and an adapter plate 303 fixed on top of the pair of side plates 301. The driving mechanism comprises a cylinder barrel 7 fixed above the adapter plate 303, a cylinder cover covering the top of the cylinder barrel 7, a cylinder body 9 fixedly connected to the cylinder cover and located inside the cylinder barrel 7, and a piston rod 18 movably connected to the cylinder rod body and moving linearly.
In this embodiment, a through hole 201 is opened in the middle of the cover plate 2, one end of the valve rod 4 is connected to the piston rod 18, and the other end of the valve rod 4 passes through the through hole 201 on the cover plate 2 and extends into the inner cavity of the valve body 1. The valve plate 5 is fixedly connected to the valve rod 4 and is positioned in the inner cavity of the valve body 1, and the valve plate 5 moves under the action of the driving mechanism and the valve rod 4 to close or open the valve opening. A corrugated pipe 6 sleeved on the periphery of the valve rod 4 is connected between the valve rod 4 and the cover plate 2 in a sealing way.
In the semiconductor vacuum gate valve, one end of a valve rod 4 connected with a valve plate 5 penetrates through a through hole 201 on a cover plate 2 and extends into an inner cavity of a valve body 1, and a corrugated pipe 6 sleeved on the periphery of the valve rod 4 is connected between the valve rod 4 and the cover plate 2 in a sealing manner; the valve rod 4 drives the valve plate 5 to move under the action of the driving mechanism so as to seal or open the opening of the valve, the dynamic friction between the valve rod 4 and peripheral parts is small, the particle number generated by the dynamic friction can be effectively reduced, the corrugated pipe 6 does telescopic motion along with the movement of the valve rod 4, external particles can be prevented from entering the inner cavity of the valve body 1 from a gap between the valve rod 4 and the cover plate 2, the inner cavity of the valve body 1 can be favorably kept in higher vacuum degree, and the valve is suitable for application environments with high requirements on equipment cleanliness.
In this embodiment, the outer peripheral wall of the valve stem 4 is provided with a limiting step 401 protruding outwards, an upper connecting ring 10 sleeved on the outer periphery of the valve stem 4 is arranged above the limiting step 401, and the upper end of the corrugated pipe 6 is connected to the lower end face of the upper connecting ring 10 in a sealing manner. The contact surface of the upper connecting ring 10 and the valve rod 4 is provided with a first sealing ring 11 in a sealing way. The upper end face of the cover plate 2 is provided with a mounting groove 202, a lower connecting ring 12 positioned on the periphery of the valve rod 4 is arranged in the mounting groove 202, a gap is reserved between the lower connecting ring 12 and the valve rod 4, and the lower end of the corrugated pipe 6 is hermetically connected to the upper end face of the lower connecting ring 12. And a second sealing ring 13 is hermetically arranged on the contact surface of the lower connecting ring 12 and the cover plate 2. The arrangement of the first sealing ring 11 and the second sealing ring 13 can increase the sealing performance at the connecting position of the corrugated pipe 6 and the valve rod 4 or the cover plate 2, and further is beneficial to maintaining higher vacuum degree in the inner cavity of the valve body 1.
In this embodiment, a support rod 14 extending in the same direction as the valve rod 4 is connected to the cover plate 2, a moving guide 15 located above the upper connecting ring 10 is fixedly sleeved on the valve rod 4, a linear track groove 151 arranged in the same direction as the support rod 14 is arranged on the moving guide 15, an opening is arranged at one end of the linear track groove 151 facing the support rod 14, and a support wheel 16 extending into the linear track groove 151 from the opening is arranged at an end of the support rod 14 close to one end of the moving guide 15. The support wheel 16 is rotatably connected to a fixed shaft 17, and one end of the fixed shaft 17 passes through the support bar 14 and is fixed to the support frame 3. The support wheel 16 on the support rod 14 plays a role in guiding the motion direction of the motion guide rail 15 and the valve rod 4 fixed on the motion guide rail 15 through the linear track groove 151, in the process of closing the valve, the drive mechanism drives the valve rod 4 to do linear motion, the motion guide rail 15 also makes linear motion along with the valve rod 4, when the motion guide rail 15 moves to a position where the groove bottom of the linear track groove 151 on the motion guide rail 15 is abutted against the support wheel 16, the motion guide rail 15 and the valve rod 4 can not continue to do linear motion at the moment, the drive mechanism drives the valve rod 4 and the motion guide rail 15 to do swinging motion integrally by taking the support wheel 16 as the center, the valve plate 5 connected on the valve plate 5 swings to the position of the opening of the valve, the sealing between the valve plate 5 and the valve body 1 is realized, and the valve is completely closed at the moment; the process of opening the valve and the process of closing the valve are performed in reverse order. The valve opening and closing mode has less particles generated by friction, and is beneficial to keeping higher vacuum degree in the inner cavity of the valve body 1.
In the present embodiment, a limit groove rod 19 is provided at one end of the piston rod 18 connected to the valve rod 4, a limit groove 191 is provided in the limit groove rod 19, an eccentric balance 20 swingable in the limit groove 191 is provided in the limit groove 191, an eccentric shaft 21 is connected to the eccentric balance 20, and the valve rod 4 is connected to the eccentric shaft 21. The peripheral wall of the limiting groove 191 comprises an arc section 1911, a first V-shaped arc section 1912 and a second V-shaped arc section 1903 which are positioned at two ends of the arc section 1911 and extend towards the inner part of the circular ring where the arc section 1911 is positioned in the turning direction, and a straight line section 1904 positioned between the first V-shaped arc section 1912 and the second V-shaped arc section 1903; the eccentric balance 20 has a first limit protrusion 201 matched with the first V-shaped arc 1912 at one end and a second limit protrusion 202 matched with the second V-shaped arc 1903 at the other end; the eccentric balance 20 has a first oscillation position in which the first limit projection 201 is engaged with the first V-shaped arc 1912 and a second oscillation position in which the second limit projection 202 is engaged with the second V-shaped arc 1903 during oscillation along the arc 1911. So set up, the one end that valve rod 4 and piston rod 18 are connected also can realize the swing, and the valve plate 5 of the valve rod 4 other end of being convenient for seals the valve opening on the valve body 1.
In summary, in the semiconductor vacuum gate valve provided by the embodiment of the present invention, the cover plate 2 is hermetically disposed on the opening of the valve body 1 in the non-passage direction, the cover plate 2 is provided with the through hole 201, one end of the valve rod 4 connected to the valve plate 5 passes through the through hole 201 on the cover plate 2 and extends into the inner cavity of the valve body 1, and the bellows 6 sleeved on the periphery of the valve rod 4 is hermetically connected between the valve rod 4 and the cover plate 2; the valve rod 4 drives the valve plate 5 to move under the action of the driving mechanism so as to seal or open the opening of the valve, the dynamic friction between the valve rod 4 and peripheral parts is small, the particle number generated by the dynamic friction can be effectively reduced, the corrugated pipe 6 does telescopic motion along with the movement of the valve rod 4, external particles can be prevented from entering the inner cavity of the valve body 1 from a gap between the valve rod 4 and the cover plate 2, the inner cavity of the valve body 1 can be favorably kept in higher vacuum degree, and the valve is suitable for application environments with high requirements on equipment cleanliness.
It should be understood that the above examples are only for clarity of illustration and are not intended to limit the embodiments. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. And obvious variations or modifications therefrom are within the scope of the utility model.
Claims (10)
1. A semiconductor vacuum gate valve is characterized by comprising a valve body (1), a cover plate (2), a supporting frame (3), a driving mechanism, a valve rod (4) and a valve plate (5); the side wall of the valve body (1) is provided with a valve opening, the cover plate (2) is arranged on the top opening of the valve body (1) in the non-passage direction in a sealing manner, the supporting frame (3) is connected above the cover plate (2), and the driving mechanism is connected to the supporting frame (3); a through hole (201) is formed in the cover plate (2), one end of the valve rod (4) is connected with the output end of the driving mechanism, the other end of the valve rod (4) penetrates through the through hole (201) in the cover plate (2) and extends into the inner cavity of the valve body (1), and the valve plate (5) is connected to the valve rod (4), is positioned in the inner cavity of the valve body (1) and is used for sealing the valve opening; the valve rod (4) and the cover plate (2) are connected in a sealing mode, and the corrugated pipe (6) is sleeved on the periphery of the valve rod (4).
2. The semiconductor vacuum gate valve according to claim 1, wherein the outer peripheral wall of the valve stem (4) is provided with a limiting step (401) protruding outwards, an upper connecting ring (10) sleeved on the outer periphery of the valve stem (4) is arranged above the limiting step (401), and the upper end of the corrugated pipe (6) is connected to the lower end face of the upper connecting ring (10) in a sealing mode.
3. A semiconductor vacuum gate valve according to claim 2, characterized in that the upper connecting ring (10) is sealingly provided with a first sealing ring (11) at the contact surface with the valve stem (4).
4. The semiconductor vacuum gate valve according to claim 1, wherein the cover plate (2) is provided with a mounting groove (202) at an upper end surface thereof, a lower connecting ring (12) located at the periphery of the valve stem (4) is arranged in the mounting groove (202), a gap is formed between the lower connecting ring (12) and the valve stem (4), and a lower end of the corrugated pipe (6) is hermetically connected to the upper end surface of the lower connecting ring (12).
5. A semiconductor vacuum gate valve according to claim 4, characterized in that a second sealing ring (13) is sealingly arranged on the contact surface of the lower connection ring (12) and the cover plate (2).
6. The semiconductor vacuum gate valve according to claim 2, wherein a support rod (14) extending in the same direction as the valve rod (4) is connected to the cover plate (2), a moving guide rail (15) located above the upper connecting ring (10) is fixedly sleeved on the valve rod (4), a linear track groove (151) arranged in the same direction as the support rod (14) is formed in the moving guide rail (15), an opening is formed in one end, facing the support rod (14), of the linear track groove (151), and a support wheel (16) capable of extending into the linear track groove (151) from the opening is arranged at the end, close to one end of the moving guide rail (15), of the support rod (14).
7. A semiconductor vacuum gate valve according to claim 6, characterized in that the support wheel (16) is rotatably connected to a fixed shaft (17), one end of the fixed shaft (17) passing through the support bar (14) and being fixed to the support frame (3).
8. A semiconductor vacuum gate valve according to claim 1, characterized in that an adapter plate (303) is provided on top of the support frame (3); the driving mechanism is an air cylinder arranged on the adapter plate (303), and the valve rod (4) is connected to a piston rod (18) of the air cylinder and driven by the piston rod (18) to move.
9. The semiconductor vacuum gate valve according to claim 8, wherein a limiting groove rod (19) is arranged at one end of the piston rod (18) connected with the valve rod (4), a limiting groove (191) is arranged in the limiting groove rod (19), an eccentric balance wheel (20) capable of swinging in the limiting groove (191) is arranged in the limiting groove (191), an eccentric shaft (21) is connected to the eccentric balance wheel (20), and the valve rod (4) is connected to the eccentric shaft (21).
10. The semiconductor vacuum gate valve according to claim 9, wherein the peripheral wall of the limiting groove (191) comprises an arc segment (1911), a first V-shaped arc segment (1912) and a second V-shaped arc segment (1903) which are positioned at both ends of the arc segment (1911) and turn in a direction extending towards the inside of the ring where the arc segment (1911) is positioned, and a straight line segment (1904) positioned between the first V-shaped arc segment (1912) and the second V-shaped arc segment (1903); one end of the eccentric balance wheel (20) is provided with a first limit bulge (201) matched with the first V-shaped arc section (1912), and the other end is provided with a second limit bulge (202) matched with the second V-shaped arc section (1903); the eccentric balance wheel (20) has a first swing position enabling the first limit protrusion (201) to be matched with the first V-shaped arc section (1912) and a second swing position enabling the second limit protrusion (202) to be matched with the second V-shaped arc section (1903) in the process of swinging along the arc section (1911).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122325756.1U CN215806419U (en) | 2021-09-24 | 2021-09-24 | Semiconductor vacuum gate valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122325756.1U CN215806419U (en) | 2021-09-24 | 2021-09-24 | Semiconductor vacuum gate valve |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215806419U true CN215806419U (en) | 2022-02-11 |
Family
ID=80166276
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202122325756.1U Active CN215806419U (en) | 2021-09-24 | 2021-09-24 | Semiconductor vacuum gate valve |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN215806419U (en) |
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2021
- 2021-09-24 CN CN202122325756.1U patent/CN215806419U/en active Active
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| GR01 | Patent grant | ||
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Address after: 637000 Duofu Industrial Park, Xichong County, Nanchong City, Sichuan Province Patentee after: SICHUAN JIUTIAN VACUUM TECHNOLOGY CO.,LTD. Country or region after: China Address before: 637000 Duofu Industrial Park, Xichong County, Nanchong City, Sichuan Province Patentee before: SICHUAN JIUTIAN VACUUM TECHNOLOGY Co.,Ltd. Country or region before: China |