CN216382643U

CN216382643U - Gate valve

Info

Publication number: CN216382643U
Application number: CN202123141070.3U
Authority: CN
Inventors: 刘泽宁; 孙围华; 张魁榜; 陈林; 齐英
Original assignee: Chuanbei Vacuum Technology Beijing Co ltd
Current assignee: Chuanbei Vacuum Technology Beijing Co ltd
Priority date: 2021-12-14
Filing date: 2021-12-14
Publication date: 2022-04-26
Anticipated expiration: 2031-12-14

Abstract

The utility model provides a gate valve, which belongs to the technical field of valves and comprises the following components: the shell is provided with a flange opening for fluid circulation; the shell is internally provided with a cavity; the valve plate is arranged in the cavity of the shell in a sliding mode; the valve plate has a sealing state of sealing the flange opening under the driving of the driving device and also has a circulating state of avoiding the flange opening; the driving device comprises a first driving piece and a second driving piece; the first driving piece drives the valve plate to move towards the direction perpendicular to the flowing direction of the fluid; the second driving piece drives the valve plate to move towards the direction parallel to the flowing direction of the fluid; according to the gate valve, the first driving piece and the second driving piece are arranged, so that the movement mechanism in the shell is reduced, and the generation of metal particles is reduced.

Description

Gate valve

Technical Field

The utility model relates to the technical field of valves, in particular to a gate valve.

Background

The gate valve is an important part for isolating two adjacent spaces, and is widely applied to various vacuum equipment in the vacuum industry to isolate two different vacuum degree areas or isolate a vacuum environment from other gas environments.

With the vigorous development of the semiconductor industry, the vacuum gate valve is also increasingly applied to the semiconductor vacuum process. The traditional vacuum gate valve motion mechanism and the guide mechanism are positioned inside a gate valve shell; in the process of driving the valve plate to move, metal particles are generated by collision, friction and the like between parts in the moving mechanism and the guide mechanism and are introduced into a semiconductor manufacturing process to further pollute a wafer.

SUMMERY OF THE UTILITY MODEL

Therefore, the technical problem to be solved by the utility model is to overcome the defect that in the process of driving the valve plate to move, metal particles are generated by collision, friction and the like between parts in the moving mechanism and the guide mechanism and are introduced into a semiconductor manufacturing process to further pollute a wafer in the prior art, thereby providing the gate valve.

In order to solve the technical problem, the utility model provides a gate valve, which comprises:

the shell is provided with a flange opening for fluid circulation; the shell is internally provided with a cavity;

the valve plate is arranged in the cavity of the shell in a sliding mode; the valve plate has a sealing state of sealing the flange opening under the driving of the driving device and also has a circulating state of avoiding the flange opening;

the driving device comprises a first driving piece and a second driving piece; the first driving piece drives the valve plate to move towards the direction perpendicular to the flowing direction of the fluid; the second driving piece drives the valve plate to move towards the direction parallel to the flowing direction of the fluid.

Preferably, the driving device further includes:

and the driving plate is connected with one side surface of the valve plate through the guide assembly.

Preferably, the first driving member is a cylinder; the body of the first driving piece is arranged on the outer side of the shell; the driving end of the first driving piece extends into the cavity of the shell to be connected with the driving plate.

Preferably, the second driving element is a horizontal pushing cylinder; the body of the second driving piece is arranged on the driving plate; the driving end of the second driving piece is connected with the valve plate.

As a preferred scheme, a placing cavity is arranged on the driving plate; the first driving piece is arranged in the placing cavity; the driving end of the first driving piece extends out of the placing cavity to be connected with the valve plate.

Preferably, the number of the second driving members is two; two placing cavities are arranged on two sides of the driving plate; the second driving pieces are respectively arranged in the placing cavities.

Preferably, the method further comprises the following steps: the guide wheels are at least two and are symmetrically arranged on two sides of the driving plate; the axis of the guide wheel is parallel to the driving plate; the side surfaces of the guide wheels are in contact with the front side wall and the rear side wall of the shell.

Preferably, the guide assembly includes:

the guide ring is embedded in the driving plate; a guide cavity is formed in the guide ring;

and one end of the guide rod is connected with the valve plate, and the other end of the guide rod is arranged in the guide cavity in a sliding manner.

Preferably, one of the guide rod and the guide ring is made of a metal material, and the other is made of a non-metal material.

Preferably, the method further comprises the following steps: and the position sensor is arranged at one end of the flange opening of the shell, which is far away from the driving device.

The technical scheme of the utility model has the following advantages:

1. the utility model provides a gate valve, comprising: a housing and a valve plate; the valve plate moves under the driving of the driving device; the driving device includes: a first driving member and a second driving member; first driving piece drives the whole up-and-down motion of valve plate, is close to, keeps away from flange mouth position, and the second driving piece drives valve plate seesaw, presses close to, keeps away from the sealed face of casing, realizes the "L" shape motion of valve plate, through the setting of first driving piece and second driving piece, has reduced the motion in the casing, reduces metal particle's production, prevents to introduce metal particle in the semiconductor processing procedure, pollutes the wafer.

2. According to the gate valve provided by the utility model, the second driving piece is arranged in the placing cavity, so that the generation of metal particles in the use process is reduced.

3. According to the gate valve provided by the utility model, the guide wheels are symmetrically arranged on the two sides of the valve plate, and can play a role in guiding and supporting, so that the valve plate can be more stable in moving.

4. The utility model provides a gate valve, the guide assembly comprises: a guide ring and a guide rod; one of the metal materials is a metal material, and the other is a non-metal material; the metal particles are avoided by the contact mode of the metal material and the nonmetal material.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.

Fig. 1 is a schematic view of a gate valve according to the present invention.

Fig. 2 is a schematic view of the internal structure of the gate valve of the present invention.

Fig. 3 is a schematic structural view of a driving plate of the present invention.

Fig. 4 is a schematic view of the structure of the valve plate of the present invention.

Fig. 5 is a schematic view of the movement process of the valve plate of the present invention.

Description of reference numerals:

1. a housing; 2. a flange opening; 3. a valve plate; 4. a drive plate; 5. a first driving member; 6. placing the cavity; 7. a gas source pipeline; 8. a guide ring; 9. a guide bar; 10. a guide wheel; 11. and (7) a cover plate.

Detailed Description

The technical solutions of the present invention will be described clearly and completely with reference to the accompanying drawings, and it should be understood that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention.

In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.

In addition, the technical features involved in the different embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.

The embodiment provides a gate valve, as shown in fig. 1, includes: a housing 1; a flange port 2 for fluid circulation is formed on the shell 1, and a cavity is formed in the shell 1; a valve plate 3 is arranged in a cavity of the shell 1 in a sliding manner, the valve plate 3 is driven by a driving device, when the valve plate 3 covers the flange port 2, fluid cannot pass through the flange port 2, and the valve plate 3 is in a sealing state; when the valve plate 3 avoids the flange port 2, fluid can pass through the flange port 2, and the valve plate 3 is in a circulating state.

Specifically, the valve plate 3 needs to undergo two movement processes to realize the conversion between the sealing state and the flow state of the valve plate 3, and therefore, the driving device comprises a first driving part 5 and a second driving part;

taking an example of converting the valve plate 3 from a circulation state to a sealing state, when the valve plate 3 is in the circulation state, the valve plate 3 is positioned above the shell 1, and when the valve plate needs to be adjusted to the sealing state; driven by the first driver 5, the valve plate 3 moves downward (in the Y direction) so that the valve plate 3 is aligned with the flange port 2; and starting the second driving part, and driving the valve plate 3 to move forwards (along the Z direction) to be attached to the flange port 2 on the shell 1 under the driving of the second driving part, so that the valve plate 3 is in a sealing state. When the valve plate 3 needs to be converted from a sealing state to a circulating state, the movement process can be reversed.

As shown in fig. 2, a driving plate 4 is connected to one side surface of the valve plate 3, and the driving plate 4 is fixedly connected to the valve plate 3 in the vertical direction and slidably connected in the horizontal direction; the upper cover of the shell 1 is provided with a cover plate 11, the upper end of the cover plate 11 is provided with a body of the first driving part 5, the driving end of the first driving part 5 penetrates through the upper end fixed connection of the cover plate 11 and the driving part, and under the action of the first driving part 5, the valve plate 3 is driven to move through the driving part, and the first driving part 5 is a cylinder.

As shown in fig. 3 and 4, two placing cavities 6 arranged side by side are formed in the driving plate 4, bodies of the second driving parts are respectively placed in the placing cavities 6, and driving ends of the second driving parts extend out of the placing cavities 6 and are connected with the valve plate 3. The second driving piece is arranged in the placing cavity 6, so that metal particles generated in the using process can be prevented from entering the using environment of the gate valve to cause pollution. The second driving piece is a horizontal pushing cylinder; the air source of the horizontal pushing cylinder is introduced from the outside through an air source pipeline 7.

A guide assembly is arranged between the driving plate 4 and the valve plate 3; further, the guide assembly comprises a guide ring 8 embedded in the drive plate 4 and a guide rod 9 matched with the guide ring 8; the number of the guide rings 8 is four, the guide rings are respectively embedded at four corners of the driving plate 4, and guide cavities are formed in the guide rings 8; one end of the guide rod 9 is connected with the valve plate 3, and the other end of the guide rod is slidably arranged in the guide cavity in a penetrating mode.

When the second driving piece pushes the valve plate 3 to move, the guide ring 8 and the guide rod 9 play a role in guiding, so that the valve plate 3 can stably move horizontally; one of the guide ring 8 and the guide rod 9 is made of metal material, and the other one of the guide ring 8 and the guide rod 9 is made of non-metal material.

Four tip at drive plate 4 are provided with leading wheel 10 respectively, the axis of leading wheel 10 with drive plate 4 parallel arrangement, the side of leading wheel 10 can contact with the rear side of push-pull valve (keeping away from promptly one side of valve plate 3) for in-process at drive plate 4 drive valve plate 3 motion can play the effect of direction and support, guarantees that valve plate 3 and drive plate 4 are more stable when removing.

The lower end of the flange port 2 of the shell 1 is provided with a position sensor, specifically, the position sensor comprises a first position sensor and a second position sensor, and the first position sensor and the second position sensor are used for sensing different positions of the valve plate 3.

Method of use and principles

As shown in fig. 5, the closing process: when the valve plate 3 is located at the first position, the valve receives a closing signal at the moment, the driving end of the first driving piece 5 extends out to drive the driving plate 4, the valve plate 3 and the like to move downwards, and when the first position sensor detects that the valve plate 3 reaches the second position, the first driving piece 5 stops moving; at the moment, the second driving piece starts to move, the valve plate 3 is pushed to lean against the direction of the shell 1 in the horizontal direction, and when the second position sensor detects that the valve plate 3 reaches a third position, a complete closing signal is sent out, and the valve is closed.

In the opening process, the valve is in the third position, the valve receives an opening signal at the moment, the second driving piece horizontally pushes the valve plate 3 to be far away from the direction of the shell 1, and the second driving piece stops moving after the first position sensor detects that the valve plate 3 reaches the second position; at this moment, the first driving part 5 starts to move, the driving end of the first driving part 5 retracts to drive the driving plate 4, the valve plate 3 and the like to move upwards, the valve plate 3 reaches the first position, the movement is stopped, and the valve is opened.

It should be understood that the above examples are only for clarity of illustration and are not intended to limit the embodiments. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. And obvious variations or modifications therefrom are within the scope of the utility model.

Claims

1. A gate valve, comprising:

the shell (1) is provided with a flange port (2) for fluid circulation; the shell (1) is internally provided with a cavity;

the valve plate (3) is arranged in a cavity of the shell (1) in a sliding mode; the valve plate (3) has a sealing state of sealing the flange port (2) under the driving of the driving device and also has a circulating state of avoiding the flange port (2);

the driving device comprises a first driving piece (5) and a second driving piece; the first driving piece (5) drives the valve plate (3) to move towards the direction perpendicular to the flowing direction of the fluid; the second driving piece drives the valve plate (3) to move towards the direction parallel to the flowing direction of the fluid.

2. The gate valve of claim 1, wherein the drive means further comprises:

and the driving plate (4) is connected with one side surface of the valve plate (3) through a guide assembly.

3. A gate valve according to claim 2, characterised in that the first drive member (5) is a cylinder; the body of the first driving piece (5) is arranged on the outer side of the shell (1); the driving end of the first driving piece (5) extends into the cavity of the shell (1) and is connected with the driving board (4).

4. The gate valve of claim 3, wherein the second drive member is a thrust cylinder; the body of the second driving piece is arranged on the driving plate (4); the driving end of the second driving piece is connected with the valve plate (3).

5. A gate valve according to claim 4, characterised in that the drive plate (4) is provided with a placement cavity (6); the first driving piece (5) is arranged in the placing cavity (6); the driving end of the first driving piece (5) extends out of the placing cavity (6) to be connected with the valve plate (3).

6. The gate valve set forth in claim 5 wherein said second drive member has two; two placing cavities (6) are arranged on two sides of the driving plate (4); the second driving pieces are respectively arranged in the placing cavities (6).

7. The gate valve according to any one of claims 2-6, further comprising: the guide wheels (10) are at least two and are symmetrically arranged on two sides of the driving plate (4); the axis of the guide wheel (10) is arranged in parallel with the driving plate (4); the side surfaces of the guide wheels (10) are in contact with the front side wall and the rear side wall of the shell (1).

8. The gate valve according to any one of claims 2-6, wherein the guide assembly includes:

a guide ring (8) embedded in the drive plate (4); a guide cavity is formed in the guide ring (8);

and one end of the guide rod (9) is connected with the valve plate (3), and the other end of the guide rod is arranged in the guide cavity in a sliding manner.

9. A gate valve according to claim 8, characterised in that one of the guide rod (9) and the guide ring (8) is of a metallic material and the other is of a non-metallic material.

10. The gate valve of claim 1, further comprising: and the position sensor is arranged at one end of the flange opening (2) of the shell (1) far away from the driving device.