CN219263229U - Semiconductor vacuum gate valve - Google Patents

Abstract

The utility model discloses a semiconductor vacuum gate valve, wherein a valve rod comprises an outer valve rod and an inner valve rod, and the outer valve rod is sleeved on the outer side of the inner valve rod and is movably and hermetically connected with a valve body; the inner valve rod and the outer valve rod are both connected with a driving device; the inner cavity of the valve body is positioned at the outer side of the valve rod and is provided with a bellows group, one side of the bellows group is connected with the valve body, and the other side of the bellows group is connected with a connecting plate on the outer valve rod; the valve core component comprises a valve plate and a valve core frame, and the valve plate is not contacted with the bottom of the inner cavity of the valve body; a movement cavity is arranged in the valve core frame, and openings are arranged at two sides of the movement cavity; a connecting rod is fixedly connected to one side of the valve plate, the connecting rod is movably and hermetically connected with the opening, one side of the connecting rod penetrates through the opening and is positioned in the moving cavity, and a disc spring is arranged on one side of the connecting rod positioned in the moving cavity; one side of the inner valve rod is positioned in the movement cavity; and a clamping plate is further arranged in the movement cavity, one side of the clamping plate is connected with the connecting rod, and the other side of the clamping plate is connected with the inner valve rod. By the design, the wafer can be prevented from being polluted by the gate valve.

Description

Semiconductor vacuum gate valve

Technical Field

The utility model belongs to the technical field of gate valves, and particularly relates to a semiconductor vacuum gate valve.

Background

The vacuum gate valve is driven by an actuating mechanism to lift and lower by a valve core assembly (consisting of a driving frame, a push rod and a sealing plate), so that the vacuum gate valve is opened and closed. When the vacuum gate valve is closed, the sealing plate stops moving after moving to a sealing position, the driving frame continues to move, the ejector rod connected between the sealing plate and the driving frame pushes the sealing plate to be away from the driving body along with the movement of the driving frame, the sealing surface of the valve body is pressed, when the ejector rod is horizontal, the pressing force reaches the maximum, and the vacuum gate valve is completely closed. When the vacuum gate valve is opened, the driving frame is far away from the sealing area, the sealing plate moves backwards under the action of the ejector rod and moves along with the driving body after being separated from the sealing surface of the valve body until the vacuum gate valve is completely opened. The vacuum gate valve has the characteristics of large circulation capacity, compact structure, small volume, light weight, thin thickness and the like, and is widely applied to the high-tech fields such as electronics, chemical industry, metallurgy, nuclear industry, aviation, aerospace, materials, biological medicine, atomic energy, universe detection and the like.

In the semiconductor production in the electronic field, the generation of fine particles is required to be strictly prevented in the whole wafer conveying process, and the parts involved in the wafer conveying process mainly comprise a transfer system, a vacuum valve and a planetary motion disc below the wafer. Wherein the handling system robot is located below the wafer, there is less likelihood of falling directly onto the wafer even if contaminating particles are generated. The wafers in the wafer cassette for transporting the wafers need to directly pass through the vacuum valve when moving to the processing equipment station with vacuum environment, if fine particles are generated by friction or collision during the movement of the vacuum valve or the particles are attached to the surface of the valve port above the wafers, the particles are likely to directly fall on the surface of the wafers during the process of passing through the valve, so that the yield is reduced.

A semiconductor vacuum gate valve is disclosed in the patent of application number CN202122325756.1, comprising a valve body, a cover plate, a support frame, a driving mechanism, a valve rod and a valve plate; the side wall of the valve body is provided with a valve opening, the cover plate sealing cover is arranged on the top opening of the valve body in the non-passage direction, the supporting frame is connected above the cover plate, and the driving mechanism is connected on the supporting frame; the cover plate is provided with a through hole, one end of the valve rod is connected with the output end of the driving mechanism, the other end of the valve rod penetrates through the through hole on the cover plate and stretches into the inner cavity of the valve body, and the valve plate is used for closing the valve opening; the corrugated pipe sleeved on the periphery of the valve rod is connected between the valve rod and the cover plate in a sealing way. The gate valve adopting the structure cannot effectively ensure the cleanliness of the vacuum environment.

Disclosure of Invention

The utility model aims to provide a semiconductor vacuum gate valve, which aims to solve the problem that particles generated in the motion process of the existing vacuum gate valve are easy to fall onto a wafer in the background art.

In order to solve the technical problems, the utility model adopts the following technical scheme:

the semiconductor vacuum gate valve comprises a valve body, a valve rod and a valve core assembly, wherein an air inlet and an air outlet are arranged on the valve body, the valve rod is used for pushing the valve core assembly to block the air inlet and the air outlet, the valve rod comprises an outer valve rod and an inner valve rod, and the outer valve rod is sleeved on the outer side of the inner valve rod and is movably connected with the valve body in a sealing manner; the inner valve rod and the outer valve rod are both connected with a driving device;

the inner cavity of the valve body is positioned at the outer side of the valve rod and is provided with a bellows group, one side of the bellows group is connected with the valve body, and the other side of the bellows group is connected with a connecting plate on the outer valve rod; the valve core component comprises a valve plate and a valve core frame, and the valve plate is not contacted with the bottom of the inner cavity of the valve body; the valve core frame is fixedly connected with a connecting plate on the outer valve rod, a movement cavity is arranged in the valve core frame, and openings are arranged at two sides of the movement cavity;

a connecting rod is fixedly connected to one side of the valve plate, the connecting rod is movably and hermetically connected with the opening, one side of the connecting rod penetrates through the opening and is positioned in the moving cavity, and a disc spring is arranged on one side of the connecting rod positioned in the moving cavity; one side of the inner valve rod is positioned in the movement cavity; and a clamping plate is further arranged in the movement cavity, one side of the clamping plate is connected with the connecting rod, and the other side of the clamping plate is connected with the inner valve rod.

Further, a return cavity is arranged in the outer valve rod, a spring is arranged in the return cavity, one side of the spring is connected with the bottom of the return cavity, and the other side of the spring is connected with the inner valve rod.

Further, the driving device adopts a cylinder, a large piston and a small piston are arranged in the cylinder, wherein the large piston is connected with an outer valve rod, and the small piston is connected with an inner valve rod.

Further, one side of the valve plate is provided with a first sealing groove, and a sealing ring is arranged in the first sealing groove.

Further, a guide cylinder is arranged on the outer side of the valve core frame, which is positioned at the opening position.

Further, a second sealing groove is formed in the position, close to the bottom, of the inner portion of the outer valve rod, and a sealing ring is arranged in the second sealing groove.

Further, the position that the inner valve pole is close to the bottom is provided with the draw-in groove that the cross-section is right triangle-shaped, and cardboard one side joint is in the draw-in groove.

Compared with the prior art, the utility model has the following beneficial effects:

the driving device is used for pushing the inner valve rod and the outer valve rod to move downwards, the clamping plate is extruded when the inner valve rod moves downwards, the connecting rod is pushed after the clamping plate is extruded, the connecting rod is subjected to the pretightening force of the disc spring, the inner valve rod cannot move relative to the outer valve rod in the initial stage, and the inner valve rod and the outer valve rod move downwards simultaneously. When the outer valve stem moves to the extension limit of the bellows set, the outer valve stem is stuck. The driving device continues to push the inner valve rod, the inner valve rod starts to move downwards and extrudes the clamping plate, the clamping plate pushes the connecting rod, the connecting rod overcomes the pretightening force of the disc spring and then moves outwards, and the connecting rod drives the valve plate to move outwards to seal the air inlet and the air outlet.

The inner valve rod and the outer valve rod are driven to move upwards through the driving device, the connecting rod is driven to reset by the disc spring under the action of the spring force of the disc spring in the initial stage, so that the valve plate is separated from the air inlet and the air outlet, and then the inner valve rod and the outer valve rod move upwards together.

The valve plate can not rub with the inner wall of the valve body in the whole process of closing or opening the valve. The valve plate is designed not to contact the bottom of the valve body, and also to prevent friction between the valve plate and the valve body. The design of case frame makes and has formed a sealed space between interior valve rod, cardboard and the connecting rod, produces the particle when interior valve rod and outer valve rod friction take place or the particle all can drop in this sealed space when the cardboard extrudees. The bellows group wraps the outer valve rod to form a sealing space, and particles generated when the outer valve rod rubs can fall into the sealing space. Through the various designs, particles generated in the mechanical movement of the gate valve can be effectively prevented from polluting the wafer.

Drawings

FIG. 1 is a schematic view of the overall structure of the present utility model;

FIG. 2 is an enlarged schematic view of a portion of FIG. 1;

fig. 3 is a partially enlarged schematic view at B of fig. 1.

The marks in the figure: the valve comprises a valve body 1, an air inlet 2, a valve plate 3, an inner valve rod 4, an outer valve rod 5, a bellows group 6, a connecting plate 7, a sealing ring 8, an air outlet 9, a connecting rod 10, a valve core frame 11, a moving cavity 12, a clamping plate 14, a guiding cylinder 15, a disc spring 16, a sealing ring 17, a return cavity 18, a spring 19, a large piston 20, a cylinder 21 and a small piston 22.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

Examples

The semiconductor vacuum gate valve comprises a valve body 1, a valve rod and a valve core assembly, wherein an air inlet 2 and an air outlet 9 are arranged on the valve body 1, the valve rod is used for pushing the valve core assembly to block the air inlet 2 and the air outlet 9, the valve rod comprises an outer valve rod 5 and an inner valve rod 4, and the outer valve rod 5 is sleeved on the outer side of the inner valve rod 4 and is movably and hermetically connected with the valve body 1; the inner valve rod 4 and the outer valve rod 5 are both connected with a driving device;

the inner cavity of the valve body 1 is positioned at the outer side of the valve rod and is provided with a bellows group 6, one side of the bellows group 6 is connected with the valve body 1, and the other side is connected with a connecting plate 7 on the outer valve rod 5; the valve core assembly comprises a valve plate 3 and a valve core frame 11, and the valve plate 3 is not contacted with the bottom of the inner cavity of the valve body 1; the valve core frame 11 is fixedly connected with the connecting plate 7 on the outer valve rod 5, a movement cavity 12 is arranged in the valve core frame 11, and openings are formed in two sides of the movement cavity 12;

a connecting rod 10 is fixedly connected to one side of the valve plate 3, the connecting rod 10 is movably and hermetically connected with the opening, one side of the connecting rod 10 penetrates through the opening and is positioned in the moving cavity 12, and a disc spring 16 is arranged on one side of the connecting rod 10 positioned in the moving cavity 12; one side of the inner valve rod 4 is positioned in the movement cavity 12; a clamping plate 14 is further arranged in the movement cavity 12, one side of the clamping plate 14 is connected with the connecting rod 10, and the other side of the clamping plate is connected with the inner valve rod 4.

When in actual use, when the valve needs to be closed, the driving device is used for pushing the inner valve rod 4 and the outer valve rod 5 to move downwards, the clamping plate 14 is extruded when the inner valve rod 4 moves downwards, the connecting rod 10 is pushed after the clamping plate 14 is extruded, the connecting rod 10 is subjected to the pretightening force of the disc spring 16, the inner valve rod 4 cannot move relative to the outer valve rod 5 in the initial stage, and the inner valve rod 4 and the outer valve rod 5 move downwards simultaneously. When the outer valve stem 5 moves to the elongation limit of the bellows set 6, the outer valve stem 5 is caught. The driving device continues to push the inner valve rod 4, the inner valve rod 4 starts to move downwards and extrudes the clamping plate 14, the clamping plate 14 pushes the connecting rod 10, the connecting rod 10 overcomes the pretightening force of the disc spring 16 and then moves outwards, and the connecting rod 10 drives the valve plate 3 to move outwards to seal the air inlet 2 and the air outlet 9.

When the valve needs to be opened, the driving device drives the inner valve rod 4 and the outer valve rod 5 to move upwards, and in the initial stage, the disc spring 16 drives the connecting rod 10 to reset under the action of the spring 19 of the disc spring 16, so that the valve plate 3 is separated from the air inlet 2 and the air outlet 9, and then the inner valve rod 4 and the outer valve rod 5 move upwards together. By this design, the valve plate 3 will not rub against the inner wall of the valve body 1 during the whole closing or opening of the valve. The valve plate 3 is designed not to contact the bottom of the valve body 1, and also to prevent friction between the valve plate 3 and the valve body 1. The valve core frame 11 is designed to form a sealed space between the inner valve rod 4, the clamping plate 14 and the connecting rod 10, and particles generated when the inner valve rod 4 rubs with the outer valve rod 5 or particles generated when the clamping plate 14 presses can fall into the sealed space. The bellows group 6 wraps the outer valve rod 5 to form a sealed space, and particles generated when the outer valve rod 5 rubs can fall into the sealed space. Through the various designs, particles generated in the mechanical movement of the gate valve can be effectively prevented from polluting the wafer.

In a preferred embodiment, a return cavity 18 is arranged in the outer valve rod 5, a spring 19 is arranged in the return cavity 18, one side of the spring 19 is connected with the bottom of the return cavity 18, and the other side is connected with the inner valve rod 4. The spring 19 can be based on the certain pretightening force of the inner valve rod 4, so that the inner valve rod 4 cannot move downwards in the initial stage of descending, and can be sprung up in the initial stage of ascending of the inner valve rod 4, and the valve plate 3 and the valve body 1 can be effectively prevented from rubbing.

In a preferred embodiment, the driving means is a cylinder 21, a large piston 20 and a small piston 22 are arranged in the cylinder 21, wherein the large piston 20 is connected with the outer valve rod 5 and the small piston 22 is connected with the inner valve rod 4. Through the design of the large piston 20 and the small piston 22, the inner valve rod 4 and the outer valve rod 5 can be driven by one air cylinder 21, high-pressure air is introduced into the air cylinder 21, the air in the initial stage can push the large piston 20 and the outer valve rod 5 to move, and the high-pressure air drives the small piston 22 and the inner valve rod 4 to move after the movement of the outer valve rod 5 and the large piston 20 is completed.

In a preferred embodiment, a first sealing groove is provided in one side of the valve plate 3, and a sealing ring 8 is provided in the first sealing groove. The sealing ring 8 adopts the rubber sealing ring 8, and the sealing performance of the valve plate 3 can be improved by arranging the sealing ring 8, so that the air inlet 2 and the air outlet 9 are effectively plugged.

In a preferred embodiment, the cartridge holder 11 is provided with a guide cylinder 15 on the outside at the opening position. The guide cylinder 15 is designed to facilitate the movement of the connecting rod 10 so that the connecting rod 10 moves more smoothly.

In a preferred embodiment, the inner part of the outer valve stem 5 is provided with a second sealing groove near the bottom, in which a sealing ring 17 is provided. The sealing ring 17 adopts a rubber sealing ring 17, and the sealing performance of the inner valve rod 4 and the outer valve rod 5 can be improved due to the design of the sealing ring 17.

In a preferred embodiment, a clamping groove with a right triangle cross section is arranged at the position of the inner valve rod 4 close to the bottom, and one side of the clamping plate 14 is clamped in the clamping groove. When the connecting rod 10 is not pushed, the clamping plate 14 is attached to the right-angle side in the clamping groove, and when the connecting rod 10 is pushed, namely the inner valve rod 4 presses the clamping plate 14, the clamping plate 14 is attached to the inclined side of the clamping groove. By the design, the position of the clamping plate 14 is limited, and the stability of the movement of the clamping plate 14 is ensured.

In the description of the present utility model, it should be understood that the terms "coaxial," "bottom," "one end," "top," "middle," "another end," "upper," "one side," "top," "inner," "front," "center," "two ends," etc. indicate orientations or positional relationships based on the orientation or positional relationships shown in the drawings, are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model.

In the present utility model, unless explicitly specified and limited otherwise, the terms "mounted," "configured," "connected," "secured," "screwed," and the like are to be construed broadly and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; either directly or indirectly through intermediaries, or in communication with each other or in interaction with each other, unless explicitly defined otherwise, the meaning of the terms described above in this application will be understood by those of ordinary skill in the art in view of the specific circumstances.

Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.

Claims (7)

1. The utility model provides a semiconductor vacuum push-pull valve, includes valve body (1), valve rod and case subassembly, wherein is provided with air inlet (2) and gas outlet (9) on valve body (1), and the valve rod is used for promoting case subassembly shutoff air inlet (2) and gas outlet (9), its characterized in that: the valve rod comprises an outer valve rod (5) and an inner valve rod (4), and the outer valve rod (5) is sleeved on the outer side of the inner valve rod (4) and is movably and hermetically connected with the valve body (1); the inner valve rod (4) and the outer valve rod (5) are connected with a driving device;

the inner cavity of the valve body (1) is positioned at the outer side of the valve rod and is provided with a bellows group (6), one side of the bellows group (6) is connected with the valve body (1) and the other side is connected with a connecting plate (7) on the outer valve rod (5); the valve core assembly comprises a valve plate (3) and a valve core frame (11), and the valve plate (3) is not contacted with the bottom of the inner cavity of the valve body (1); the valve core frame (11) is fixedly connected with the connecting plate (7) on the outer valve rod (5), a moving cavity (12) is arranged in the valve core frame (11), and openings are formed in two sides of the moving cavity (12);

a connecting rod (10) is fixedly connected to one side of the valve plate (3), the connecting rod (10) is movably and hermetically connected with the opening, one side of the connecting rod (10) penetrates through the opening and is positioned in the moving cavity (12), and a disc spring (16) is arranged on one side of the connecting rod (10) positioned in the moving cavity (12); one side of the inner valve rod (4) is positioned in the movement cavity (12); a clamping plate (14) is further arranged in the movement cavity (12), one side of the clamping plate (14) is connected with the connecting rod (10), and the other side is connected with the inner valve rod (4).

2. A semiconductor vacuum gate valve as defined in claim 1, wherein: a return cavity (18) is arranged in the outer valve rod (5), a spring (19) is arranged in the return cavity (18), one side of the spring (19) is connected with the bottom of the return cavity (18), and the other side is connected with the inner valve rod (4).

3. A semiconductor vacuum gate valve as defined in claim 1, wherein: the driving device adopts a cylinder (21), a large piston (20) and a small piston (22) are arranged in the cylinder (21), wherein the large piston (20) is connected with an outer valve rod (5), and the small piston (22) is connected with an inner valve rod (4).

4. A semiconductor vacuum gate valve as defined in claim 1, wherein: one side of the valve plate (3) is provided with a first sealing groove, and a sealing ring (8) is arranged in the first sealing groove.

5. A semiconductor vacuum gate valve as defined in claim 1, wherein: a guide cylinder (15) is arranged on the outer side of the valve core frame (11) at the opening position.

6. A semiconductor vacuum gate valve as defined in claim 1, wherein: a second sealing groove is arranged at the position, close to the bottom, of the inner part of the outer valve rod (5), and a sealing ring (17) is arranged in the second sealing groove.

7. A semiconductor vacuum gate valve as defined in claim 1, wherein: the position of the inner valve rod (4) close to the bottom is provided with a clamping groove with a right triangle section, and one side of the clamping plate (14) is clamped in the clamping groove.

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