CN111188913A

CN111188913A - Vacuum valve

Info

Publication number: CN111188913A
Application number: CN201911334744.6A
Authority: CN
Inventors: 陈桂英
Original assignee: Shanghai Feifan Intelligent Technology Co Ltd
Current assignee: Shanghai Feifan Intelligent Technology Co Ltd
Priority date: 2019-12-23
Filing date: 2019-12-23
Publication date: 2020-05-22

Abstract

A vacuum valve is simple in structure, in which a rotary shaft and a valve plate are connected by a connecting rod in the length direction of the valve plate, whereby the valve plate can rotate along with the rotary shaft, the connecting side of the connecting rod and the valve plate is floatingly connected at a connecting position between a near valve port side and a far valve port side, the floating connection allowing slight movement between the valve plate and the connecting rod; an elastic piece is arranged between the connecting rod and the valve plate and applies elastic force to the valve plate so as to force the valve plate to move to one limit position of a slight movement range; in the path that the valve plate rotates towards the valve port along with the rotating shaft, the far valve port side of the valve plate contacts the side wall earlier than the near valve port side, then the near valve port side is made to be a fixed part, and the connecting rod which rotates continuously is caused to move slightly relative to the valve plate, so that the valve plate is pushed and swung, and the sealing side of the valve plate seals the valve port.

Description

Vacuum valve

Technical Field

The invention relates to a vacuum valve.

Background

With the rapid development of national economy, the application of various industries to vacuum technology is increasingly wide, and new higher and more comprehensive requirements are also provided. The most of the existing coating equipment is a rectangular plate valve, and the valve of the type has the main problems of high manufacturing cost, short service life and long single-action time. The rectangular flap valve used by some customers in the system is high in cost and long in cycle, and CN102117734A discloses the flap valve.

Currently, it is an important subject in the industry to reduce the cost and improve the competitiveness. A rectangular flap valve which is simple in structure, high in vacuum degree and short in single action time is expected to fully meet the use requirement of a coating system on an isolating valve.

Disclosure of Invention

The invention aims to provide a vacuum valve which is simple in structure.

A vacuum valve comprising a valve core assembly and a valve body, the valve body comprising a side wall provided with a valve port, the valve core assembly comprising a valve plate; wherein

The valve core assembly also comprises a rotating shaft, and the rotating shaft is arranged in the valve body and can rotate around the axis of the rotating shaft;

the valve plate has a width direction, a length direction and a thickness direction, and has a connection side and a sealing side in the thickness direction; a valve body having a valve port proximal side adjacent to the valve port and a valve port distal side away from the valve port in the width direction;

the rotary shaft and the valve plate are connected by a connecting rod along the length direction of the valve plate, whereby the valve plate can rotate along with the rotary shaft, the connecting rod and the connecting side of the valve plate are in floating connection at the connecting position between the near valve port side and the far valve port side, and the floating connection allows slight movement between the valve plate and the connecting rod;

an elastic piece is arranged between the connecting rod and the valve plate and applies elastic force to the valve plate so as to force the valve plate to move to one limit position of the slight movement range;

the limit position causes the valve plate to rotate along the rotating shaft towards the valve port, the far valve port side of the valve plate contacts the side wall before the near valve port side, then the near valve port side is a fixed part, and the connecting rod which rotates continuously is caused to slightly move relative to the valve plate, so that the valve plate is pushed and swung, and the sealing side of the valve plate seals the valve port.

In one or more embodiments of the vacuum valve, the valve body is a hollow cavity, and one side of the valve body is an open side, the valve core assembly further includes a cover plate, a rotating shaft bracket is protruded from one side of the cover plate facing the inside of the valve body, the rotating shaft is rotatably supported by the rotating shaft bracket, and the cover plate detachably seals the open side, so that the cover plate is configured as a supporting base of the valve core assembly.

In one or more embodiments of the vacuum valve, the valve core assembly further includes a driving device, the driving device is disposed on a side of the cover plate facing away from the valve body, and the driving device has a linear motion output member, the linear motion output member penetrates through the cover plate and is connected to the rotating shaft through a crank, so that the rotating shaft can be driven to rotate; and a sealing element is arranged between the cover plate and the linear motion output element.

In one or more embodiments of the vacuum valve, the sealing member is a bellows, one end of the bellows is mounted on the cover plate to form a seal with the cover plate, and the linear motion output member penetrates through the bellows to form a seal with the bellows.

In one or more embodiments of the vacuum valve, a supporting plate is disposed on the cover plate corresponding to two ends of the rotating shaft, the supporting plate is inserted into the valve body, and the two ends of the supporting plate are in clearance fit with the wall body of the valve body with a small tolerance, so that the wall body is supported from the inner side of the wall body of the valve body.

In one or more embodiments of the vacuum valve, the bracing plate is the shaft support.

In one or more embodiments of the vacuum valve, the cover plate is provided with a positioning pin, the valve body is correspondingly provided with a pin hole, the positioning pin and the pin hole are inserted into the pin hole, and the positioning pin and the positioning hole are matched to maintain a parallel state between cavity walls of the valve body.

In one or more embodiments of the vacuum valve, a side of the valve body opposite to the side of the valve core assembly is also an open side, and the valve body further includes another cover plate, and the open side on the opposite side is detachably connected through the other cover plate.

In one or more embodiments of the vacuum valve, the sealing side of the valve plate is provided with a sealing ring, by means of which the valve port is sealed.

In one or more embodiments of the vacuum valve, the sealing side of the valve plate is provided as a heat shield.

In one or more embodiments of the vacuum valve, the sealing side of the valve plate is provided as a heat shield configured to maintain the sealing ring of the valve plate within a permissible temperature range.

In one or more embodiments of the vacuum valve described, the vacuum valve is a rectangular vacuum valve.

In one or more embodiments of the vacuum valve, the valve body includes two long-side walls and two short-side walls, the two long-side walls have a valve port respectively, the valve core assembly is disposed corresponding to one of the valve ports, and a reinforcing bracket is disposed between the two long-side walls.

In one or more embodiments of the vacuum valve, the reinforcing bracket includes a connection pipe and flanges at two ends of the connection pipe for connecting the long-side walls.

In one or more embodiments of the vacuum valve, an observation window for observing the valve action is installed on at least one of the two short-side walls or the valve core assembly.

The vacuum valve is mainly suitable for high vacuum systems such as semiconductors, vacuum coating and the like, such as solar cell film coating, glass film coating and the like. The valve is used for switching off and switching on the coating process chambers and switching off the chambers from atmosphere, and can work stably for a long time at high frequency.

The vacuum gate valve has the advantages of simple structure, high vacuum degree and short single-action time, and fully meets the use requirements of systems such as a coating system on the isolating valve.

Drawings

The above and other features, properties and advantages of the present invention will become more apparent from the following description of the embodiments with reference to the accompanying drawings, in which:

fig. 1 is a perspective view of a vacuum valve.

Fig. 2 is an exploded view of the vacuum valve.

Fig. 3 is a perspective view of the valve body.

Fig. 4 is a perspective view of the valve core assembly.

Fig. 5 is a partial view of the valve core assembly.

Fig. 6 is a schematic view of a reinforcing brace.

Fig. 7 is a schematic view of the valve core assembly at time T0.

Fig. 8 is a sectional view taken along line I-I of fig. 7.

Fig. 9 is a schematic view of the valve core assembly at time T1.

Fig. 10 is a schematic view of the valve cartridge assembly at time T2.

Fig. 11 is a sectional view taken along line II-II of fig. 10.

Fig. 12 is a sectional view taken along the direction III-III in fig. 4.

Detailed Description

The following discloses many different embodiments or examples for implementing the subject technology described. Specific examples of components and arrangements are described below to simplify the present disclosure, but these are merely examples and do not limit the scope of the invention. For example, if a first feature is formed over or on a second feature described later in the specification, this may include embodiments in which the first and second features are formed in direct contact, and may also include embodiments in which additional features are formed between the first and second features, such that the first and second features may not be in direct contact. Additionally, reference numerals and/or letters may be repeated among the various examples throughout this disclosure. This repetition is for the purpose of simplicity and clarity and does not in itself dictate a relationship between the various embodiments and/or configurations discussed. Further, when a first element is described as being coupled to or associated with a second element, the description includes embodiments in which the first and second elements are directly coupled or associated with each other, as well as embodiments in which one or more additional intervening elements are added to indirectly couple or associate the first and second elements with each other.

Fig. 1 shows a vacuum valve, which belongs to the industry of rectangular vacuum valves, wherein a valve body, a valve and a valve port are rectangular. Although the embodiment of the present invention has been described by taking a rectangular vacuum valve as an example, the shape is not limited to a strictly rectangular shape.

Referring to fig. 2, the vacuum valve includes a valve core assembly 1 and a valve body 2, the valve body 2 includes a side wall 21, the side wall 21 is provided with a valve port 210, and the valve core assembly 1 includes a valve plate 10.

Referring to fig. 5, the valve core assembly 1 further includes a rotating shaft 11, and the rotating shaft 11 is disposed in the valve body 2 to rotate around its axis.

The valve plate 10 has a width direction W, a length direction L, and a thickness direction H, with a connecting side 101 and a sealing side 102 in the thickness direction H, and a proximal valve port side 103 proximal to the valve port 210 and a distal valve port side 104 distal from the valve port 210 in the width direction W.

The rotary shaft 11 and the valve plate 10 are connected by the

links

14, 13 in the length direction L of the valve plate 10, whereby the valve plate 10 can rotate following the rotary shaft 11, and the connecting sides 101 of the

links

14, 13 and the valve plate 10 are floatingly connected at a connecting position 141 between the proximal valve port side 103 and the distal valve port side 104, the floating connection allowing a slight movement between the valve plate 10 and the

links

14, 13.

An elastic member 12 is further disposed between the connecting rod 13 and the valve plate 10, and the elastic member 12 applies an elastic force to the valve plate 10 to force the valve plate 10 to move to one limit position of a slight movement range. As shown in fig. 7, at time T0, the valve plate 10 is pressed downward by the elastic force exerted by the elastic member 12, and since the valve plate 10 is in floating connection with the connecting

rods

14 and 13, the valve plate 10 is slightly inclined with respect to the elastic member 12, wherein the inclination angle is 1 ° to 2 ° as an example, but not limited thereto, and can be selected according to practical situations.

As shown in fig. 7, due to the holding action of the elastic member 12, the valve plate 10 is held at the limit position at time T0, so that in the path of the valve plate 10 rotating toward the valve port 210 along the rotating shaft 11, the far valve port side 104 of the valve plate 10 contacts the side wall 21 before the near valve port side 103, and then the far valve port side 104 is a fixed part due to the friction force caused by the contact, and at time T1 shown in fig. 7, the point corresponding to the far valve port side 104 is substantially fixed and does not slide, so that the

links

13 and 14 which continue to rotate slightly move relative to the valve plate 10, thereby pushing and swinging the valve plate 10, forcing it to swing counterclockwise with the far valve port side 104 as the fixed part, and finally, at time T2 shown in fig. 10 and 11, the position corresponding to the sealing side 102 of the valve plate 10 and the T2 are also the dead point of the swinging of the

links

13 and 14.

The floating connection is such that the valve plate 10 has self-adjusting capability, and can be implemented by using the existing floating connection structure, for example, the connecting

rods

14 and 13 are provided with floating connectors, such as ball heads, and correspondingly, the connecting side 101 of the valve plate 10 is provided with pits, such as ball pits, the radius of which is larger than that of the ball heads. Other floating connections are possible, such as a structure that allows slight oscillation and movement of valve plate 10 relative to

links

14, 13.

Compared with a rectangular gate valve, the gate valve has the advantages of simple structure, light weight and very high switching speed of a valve port, and can meet the requirement of a user that the single action is less than or equal to 5 seconds, for example, the test of 3 seconds per single action. Because the structure is simple, the generated loss is low, the maintenance period is long, and the action and the performance in 25 ten thousand times of tests of the inventor meet the requirements.

While one embodiment of a vacuum valve is described above, in other embodiments, there may be many more details, and at least some of these details may vary widely, relative to the embodiments described above. At least some of these details and variations are described below in several embodiments.

One embodiment of the elastic member 12 is a spring which is fitted over a limit bolt connected to the link 13 to apply pressure to the valve plate 10.

The rotation angle of the valve plate 10 is set to 90 degrees, but is not limited thereto.

The valve body 2 is a hollow cavity, the upper side shown in the figure is an open side, the valve core assembly 1 further comprises a cover plate 15, a rotating shaft support 16 is arranged on one side, facing the inside of the valve body 2, of the cover plate 15 in a protruding mode, the rotating shaft 11 is rotatably supported by the rotating shaft support 16, and the cover plate 15 detachably seals the open side of the upper portion of the valve body 2, so that the cover plate 15 is arranged to serve as a supporting base of the valve core assembly 1. The valve core assembly 1 can be assembled with the valve body 2 as a whole, so that the valve core assembly is convenient to disassemble, assemble and maintain.

With continued reference to fig. 2 to 5, the valve core assembly 1 further includes a driving device 17, the driving device 17 is disposed on a side of the cover plate 15 facing away from the inside of the valve body 2, the driving device 17 has a linear motion output member 171, the linear motion output member 171 penetrates through the cover plate 15 and is connected with a rotating shaft through a crank, the crank is a connecting rod 13, and in the following description, the crank 13 has the same meaning as the connecting rod 13. The linear motion output member 171 is arranged to be movable in a swinging motion to push the crank 13 at each position where the crank 13 is rotated, and the crank 13 rotates the rotary shaft 11. A sealing member is provided between the cover plate 15 and the linear motion output member 171.

As shown in fig. 12, a preferred embodiment is to provide the sealing member between the cover plate 15 and the linear motion output member 171 as a bellows 172, one end of the bellows 172 being mounted on the cover plate 15 to form a seal with the cover plate 15, and the linear motion output member 171 extending out of the bellows to form a seal with the bellows 172. The bellows 172 is used for sealing, and the sealing position has no friction, so the service life is long.

The driving device may employ a cylinder, but is not limited thereto. The embodiment shown in the figure adopts double-cylinder driving and is provided with a plurality of rotating shaft supports 16 to support the rotating shaft, so that the action is stable and the sealing performance is good. The air cylinder can be replaced by a servo electric cylinder, so that more requirements can be met, and the switching speed can be adjusted.

Compared with a common flap valve, the air cylinder is arranged at the end part of the rotating shaft, and the air cylinder or the driving device is arranged at the upper part, so that the thrust is greatly increased, and the valve is more reliable in sealing.

The left end in fig. 5 is the cross section of the valve core assembly. The shaft holder 16 is inserted into the valve body 2, and both ends of the shaft holder 16 in the width direction W are fitted with the

wall bodies

21, 22 of the valve body 2 with a small tolerance gap therebetween, and the

wall bodies

21, 22 are supported from the inner sides of the

wall bodies

21, 22 of the valve body 2, so that the parallel state of the

wall bodies

21, 22 can be maintained. In another embodiment, bracing plates may be provided separately to support the opposing

walls

21, 22, which keep the chamber from deforming inwardly under vacuum due to external atmospheric pressure.

With continued reference to fig. 2 to 5, the lower side of the cover plate 15 is provided with a positioning pin 153, the upper side of the valve body 2 is correspondingly provided with a pin hole, the positioning pin 153 is inserted into the pin hole, and the positioning pin 153 is matched with the positioning hole to maintain the parallel state between the

cavity walls

21 and 22 of the valve body 2. The combination of the supporting plate or the rotating shaft support 16 has better holding effect, and is beneficial to sealing the valve plate.

As shown in fig. 2, the lower side of the valve body 2, i.e., the side opposite to the side where the spool assembly is located, is also an open side, and the valve body 2 further includes a lower cover plate 23, and the open side is detachably connected by the lower cover plate 23. Both the upper and lower sides of the valve body 2 are arranged to be open, thereby facilitating cleaning and maintenance of the valve. On the other hand, the lower cover plate 23 is also provided with positioning pins which engage with positioning holes on the lower side of the valve body 2, and also functions to position and prevent deformation of the

wall bodies

21 and 22 on both long sides of the valve body 2.

As shown in fig. 12, the sealing side 102 of the valve plate 10 is provided with a seal 103, and the valve port 210 is sealed by the seal. Due to the floating connection and the elastic piece, the valve plate 10 is assisted to reach a certain angle, and the far valve port side 104 of the valve plate 10 contacts the side wall 21 earlier than the near valve port side 103, so that the sealing ring cannot be twisted, the problem of untight closing is avoided, and the sealing ring cannot be damaged.

As shown in fig. 4, the sealing side of the valve plate 10 is provided with a heat insulating plate 18. The system using the valve has a high temperature, the valve core is difficult to cool by water cooling, and the sealing side of the valve plate 10 is provided with the heat insulating plate 18, so that the life of the valve plate can be improved. Especially in the embodiment using the sealing ring for sealing, the heat insulation plate 18 is configured to keep the sealing ring of the valve plate 10 within the allowable temperature range, which can effectively improve the service life of the valve.

As shown in fig. 3, the valve body 2 includes two long-

side walls

21 and 22 and two short-

side walls

23 and 24, the two long-

side walls

23 and 24 respectively have valve ports, and the valve core assembly 1 is disposed corresponding to one of the valve ports 210. The four side walls enclose a rectangular cavity.

As shown in fig. 2, a reinforcing brace 4 is provided between the two long-

side walls

23 and 24. The reinforcing brace 4 further maintains the parallel state between the two

walls

23, 24.

Fig. 6 shows a reinforcing brace comprising a nozzle 41 and flanges 42 at both ends of the nozzle 41 for connecting the long-side walls. One or more reinforcing brackets may be provided at the bottom of the valve body along the length of the valve body. The bracket is arranged to ensure the parallelism of the body cavity, prevent the body cavity from deforming inwards and outwards, ensure the sealing performance and be convenient to maintain by folding and assembling.

As shown in fig. 2 and 3, at least one of the two short-side wall bodies or the spool assembly is provided with

observation windows

240 and 150 through which the valve operation can be observed, so that the valve operation and the operation flow can be observed at any time.

In addition, in order to deal with the high temperature environment, the connection surface of the valve body and the cavity in the system can be provided with water circulation cooling, and as shown in fig. 2, the valve body is provided with a cooling water interface 28.

Preferably, bearings 5 are installed at all rotation positions of the valve core assembly 1, so that concentricity can be guaranteed and friction damping can be avoided.

In the embodiment shown in fig. 1 to 5, the assembly process of the vacuum valve is as follows:

1. a valve body:

assembling and welding the valve body:

① assembling the two side plates (long side wall) and the two end plates (short side wall) according to the requirement of the drawing, and fixing by spot welding;

② performing full-filling welding after the size is determined to meet the requirement;

③ shaping and stress relieving;

④ the welded work is performed according to the finishing drawing.

2. The valve core assembly:

parts in the valve core assembly are assembled after being processed according to the drawing:

① fixing the thermal baffle on the valve plate;

② assembling spring on the connecting rod, sequentially connecting the valve plate and the connecting rod via floating joint for use;

③ connecting the bellows to the cylinder shaft;

④ assembling the pneumatic/electric actuator with the upper cover plate;

⑤ assembling the pivot bracket with the upper cover plate;

⑥ the rotating shaft penetrates into the supporting plate hole of the rotating shaft bracket, and the bearings are sequentially arranged and fixed;

⑦ assembling the connecting rod and the rotating shaft;

⑧ fixing the bellows shaft and the connection;

and finishing the assembly of the valve core assembly.

3. And (3) general assembly of a pneumatic flap valve:

① installing the reinforcing bracket at the corresponding position of the lower end of the valve body;

② the valve core component is stably put into the valve body, fixed by the locating pin and locked by the screw;

③ handles 230 on the lower cover plate and the lower cover plate;

④ fitting two viewing windows;

⑤ cooling water interface on the valve body;

⑥ assembling lifting elements 151;

⑦ is provided with a solenoid directional valve and an air passage fitting.

The working principle is as follows:

1. closing a valve: when the valve is a pneumatic valve, compressed air is used as power, the upper air cylinder is used for air intake, the piston is driven to move towards the lower air cylinder, the connecting rod is pushed downwards through the air cylinder shaft, and the valve plate fastened with the connecting rod rotates to the sealing surface of the valve body by taking the center of the rotating shaft as the center of a circle, namely the closing position. The bellows is now free.

2. Opening a valve: when the valve is a pneumatic valve, compressed air is used as power, the lower air cylinder is used for air intake, the piston is driven to move towards the upper air cylinder, the connecting rod is driven to move upwards through the air cylinder shaft, and the valve plate rotates to a position which forms 90 degrees with the sealing surface of the valve body by taking the center of the rotating shaft as the center of a circle, namely the opening position. The bellows is now in compression.

3. The method is characterized in that: (1) the valve can be used for pneumatic and electric operation, and only the driving mechanism needs to be replaced. The valve can meet the use requirement of the system when being used as pneumatic, if the valve is replaced by an electric actuator, the valve has one more function, namely the switching speed is 0-125 mm/S adjustable, and the valve can be stopped at any position in the process; (2) the valve is provided with two observation windows which are respectively arranged on the valve body side and the upper cover plate. The working condition of the valve can be observed at any time; (3) the valve is provided with the lower cover plate, so that the valve is convenient to clean and maintain.

Although the present invention has been described with reference to the preferred embodiments, it is not intended to limit the present invention, and those skilled in the art may make modifications and alterations without departing from the spirit and scope of the present invention. Therefore, any modification, equivalent change and modification of the above embodiments according to the technical spirit of the present invention are within the protection scope defined by the claims of the present invention, unless the technical spirit of the present invention departs from the content of the technical solution of the present invention.

Claims

1. The vacuum valve comprises a valve core assembly and a valve body, wherein the valve body comprises a side wall, the side wall is provided with a valve port, and the valve core assembly comprises a valve plate; it is characterized in that the preparation method is characterized in that,

the valve plate has a width direction, a length direction and a thickness direction, and has a connection side and a sealing side in the thickness direction; a valve body having a proximal valve port side adjacent to the valve port and a distal valve port side remote from the valve port in the width direction;

2. The vacuum valve according to claim 1, wherein the valve body is a hollow cavity and has an open side at one side, the valve core assembly further comprises a cover plate, a shaft support is protruded from the side of the cover plate facing the inside of the valve body, the shaft is rotatably supported by the shaft support, and the cover plate detachably seals the open side, whereby the cover plate is provided as a support base of the valve core assembly.

3. The vacuum valve according to claim 2, wherein the valve core assembly further comprises a driving device, the driving device is arranged on one side of the cover plate, which faces away from the valve body, and the driving device is provided with a linear motion output piece, the linear motion output piece penetrates through the cover plate and is connected with the rotating shaft through a crank, so that the rotating shaft can be driven to rotate; and a sealing element is arranged between the cover plate and the linear motion output piece.

4. The vacuum valve of claim 3, wherein the sealing member is a bellows, one end of the bellows is mounted on the cover plate to form a seal with the cover plate, and the linear motion output member extends out of the bellows to form a seal with the bellows.

5. The vacuum valve according to claim 2, wherein the cover plate is provided with a supporting plate corresponding to both ends of the rotating shaft, the supporting plate is inserted into the valve body, and the both ends of the supporting plate are in close tolerance clearance fit with the wall of the valve body to provide support to the wall of the valve body from the inner side of the wall.

6. The vacuum valve according to claim 5, wherein the supporting plate is the shaft support.

7. The vacuum valve according to claim 2 or 5, wherein the cover plate is provided with a positioning pin, the valve body is correspondingly provided with a pin hole, the positioning pin is inserted into the pin hole, and the positioning pin and the positioning hole are matched to maintain a parallel state between the cavity walls of the valve body.

8. The vacuum valve of claim 2, wherein the side of the valve body opposite the side of the valve core assembly is also an open side, the valve body further comprising another cover plate by which the open side on the opposite side is removably attached.

9. The vacuum valve according to claim 1, wherein the sealing side of the valve plate is provided with a sealing ring by means of which the valve port is sealed.

10. The vacuum valve of claim 1, wherein said sealing side of said valve plate is configured as a thermally insulating plate.

11. The vacuum valve of claim 9, wherein said sealing side of said valve plate is configured as a heat shield configured to maintain said sealing ring of said valve plate within a permissible temperature range.

12. The vacuum valve of claim 1, wherein the vacuum valve is a rectangular vacuum valve.

13. The vacuum valve according to claim 12, wherein the valve body comprises two long side walls and two short side walls, the two long side walls respectively have a valve port, the valve core assembly is disposed corresponding to one of the valve ports, and a reinforcing bracket is disposed between the two long side walls.

14. The vacuum valve according to claim 13, wherein the reinforcing bracket comprises a nozzle and flanges at both ends of the nozzle for connecting the long side walls.

15. The vacuum valve according to claim 13, wherein at least one of the two short side walls or the valve core assembly is provided with a viewing window for viewing the valve action.