CN211779022U - Vacuum valve - Google Patents

Abstract

A vacuum valve has a simple structure, in which the rotating shaft and the valve plate are connected by connecting rods along the length direction of the valve plate, whereby the valve plate can follow the rotating shaft to rotate, and the connecting side of the connecting rod and the valve plate is located on the side near the valve port and on the far side. The connection position between the valve port sides is floating connection, and the floating connection allows slight movement between the valve plate and the connecting rod; an elastic member is also arranged between the connecting rod and the valve plate, and the elastic member exerts elastic force on the valve plate to prevent Forcing the valve plate to move to a limit position in the range of slight movement; the limit position makes the valve plate follow the rotation path of the shaft toward the valve port, and the far side of the valve plate contacts the side wall before the near valve port side, Then, the side near the valve port is a fixed part, and the connecting rod that continues to rotate is slightly moved relative to the valve plate, thereby pushing the valve plate, so that the sealing side of the valve plate seals the valve port.

Description

vacuum valve

technical field

The utility model relates to a vacuum valve.

Background technique

With the rapid development of the national economy, the application of vacuum technology in all walks of life has become increasingly widespread, and new, higher and more comprehensive requirements have also been put forward. Most of the coating equipments now use rectangular plug-in valves. The main problems of this type of valve are high cost, short working life and long single action time. Some customers use a rectangular flap valve on the system, which is not only expensive but also has a long cycle. CN102117734A discloses this type of flap valve.

At present, in order to reduce costs and improve one's own competitiveness is an important issue in the industry. It is expected that a rectangular flap valve with simple structure, high vacuum degree and short single action time can fully meet the application requirements of the coating system for the isolation valve.

Utility model content

The purpose of the utility model is to provide a vacuum valve with a simple structure.

A vacuum valve includes a valve core assembly and a valve body, the valve body includes a side wall provided with a valve port, and the valve core assembly includes a valve plate; wherein

The valve core assembly further includes a rotating shaft, and the rotating shaft is arranged in the valve body and can rotate around its own axis;

The valve plate has a width direction, a length direction and a thickness direction, and has a connection side and a sealing side in the thickness direction; in the width direction, there is a near valve port side adjacent to the valve port and a far valve port side away from the valve port;

The rotating shaft and the valve plate are connected along the length direction of the valve plate through a connecting rod, whereby the valve plate can follow the rotating shaft to rotate, and the connecting side of the connecting rod and the valve plate is at the side of the connecting rod. a floating connection at the connection position between the near valve port side and the far valve port side, the floating connection allows slight movement between the valve plate and the connecting rod;

An elastic member is also arranged between the connecting rod and the valve plate, and the elastic member exerts an elastic force on the valve plate to force the valve plate to move to a limit position of the slight movement range ;

The limit position makes the valve plate follow the rotating shaft to rotate toward the valve port, the far valve port side of the valve plate contacts the side wall earlier than the near valve port side , and then make the side near the valve port a fixed part, and cause the connecting rod that continues to rotate to perform the slight movement relative to the valve plate, thereby pushing and swinging the valve plate to make the valve plate The sealing side of the sealing side seals the valve port.

In one or more embodiments of the vacuum valve, the valve body is a hollow cavity with an open side on one side, and the valve core assembly further includes a cover plate facing the valve. A rotating shaft support is protruded from one side of the body, the rotating shaft is rotatably supported by the rotating shaft support, and the cover plate detachably seals the open side, whereby the cover plate is provided as a support for the valve core assembly Base.

In one or more embodiments of the vacuum valve, the valve core assembly further includes a driving device, the driving device is disposed on the side of the cover plate facing away from the valve body, and the driving device has A linear motion output piece, the linear motion output piece passes through the cover plate, and is connected to the rotating shaft through a crank, so that the rotating shaft can be driven to rotate; a linear motion output piece is provided between the cover plate and the linear motion output piece Seals.

In one or more embodiments of the vacuum valve, the sealing member is a bellows, and one end of the bellows is mounted on the cover plate to form a seal with the cover plate, and the straight line The motion output piece passes out of the bellows and forms a seal with the bellows.

In one or more embodiments of the vacuum valve, corresponding to both ends of the rotating shaft, a support plate is provided on the cover plate, the support plate is inserted into the valve body, and the support plate is inserted into the valve body. A small tolerance clearance fit between the two ends and the wall of the valve body provides support for the wall from the inner side of the valve body.

In one or more embodiments of the vacuum valve, the support plate is the shaft support.

In one or more embodiments of the vacuum valve, a positioning pin is provided on the cover plate, a pin hole is correspondingly provided on the valve body, the positioning pin is inserted into the pin hole, and the positioning pin is arranged on the valve body. The engagement of the pin with the pin hole is arranged to maintain the parallel state between the cavity walls of the valve body.

In one or more embodiments of the vacuum valve, the side of the valve body opposite to the side where the valve core assembly is located is also an open side, and the valve body further includes another cover plate, through which the other side is open. A cover releasable connection is located on the open side of the opposite side.

In one or more embodiments of the vacuum valve, a sealing ring is provided on the sealing side of the valve plate, and the valve port is sealed by means of the sealing ring.

In one or more embodiments of the vacuum valve, the sealing side of the valve plate is provided as a heat shield.

In one or more embodiments of the vacuum valve, the sealing side of the valve plate is provided as a heat shield, and the heat shield is configured to keep the sealing ring of the valve plate in an allowable state within the temperature range.

In one or more embodiments of the described vacuum valve, the vacuum valve is a rectangular vacuum valve.

In one or more embodiments of the vacuum valve, the valve body includes two long side walls and two short side walls, the two long side walls are respectively provided with valve ports, and the valve core The assembly is arranged corresponding to one of the valve ports, and a reinforcing bracket is arranged between the two long side walls.

In one or more embodiments of the vacuum valve, the reinforcing bracket includes a nozzle and flanges at both ends of the nozzle for connecting the long side walls.

In one or more embodiments of the vacuum valve, at least one of the two short side walls or the valve core assembly is provided with an observation window for observing the valve action.

The aforementioned vacuum valve is mainly suitable for high vacuum systems such as semiconductor and vacuum coating, such as solar cell coating, glass coating, etc. The valve is used for the disconnection and connection between the coating process chambers, and the disconnection between the chamber and the atmosphere, and can work stably for a long time at high frequency.

The aforementioned vacuum gate valve not only has a simple structure, a high degree of vacuum, but also has a short single action time, which fully meets the use requirements of a system such as a coating system for the isolation valve.

Description of drawings

The above and other features, properties and advantages of the present invention will become more apparent from the following description in conjunction with the accompanying drawings and embodiments, wherein:

Fig. 1 is a perspective view of a vacuum valve.

Figure 2 is an exploded view of the vacuum valve.

3 is a perspective view of a valve body.

Figure 4 is a perspective view of the valve core assembly.

Figure 5 is a partial view of the spool assembly.

FIG. 6 is a schematic view of a reinforcement bracket.

FIG. 7 is a schematic diagram of the valve core assembly at time T0.

FIG. 8 is a cross-sectional view taken along line II in FIG. 7 .

FIG. 9 is a schematic diagram of the valve core assembly at time T1.

Fig. 10 is a schematic diagram of the valve core assembly at time T2.

FIG. 11 is a cross-sectional view taken along line II-II in FIG. 10 .

FIG. 12 is a cross-sectional view taken along the direction III-III in FIG. 4 .

Detailed ways

The following discloses a variety of different implementations or examples for implementing the described subject technical solutions. In order to simplify the disclosure, specific examples of each element and arrangement are described below. Of course, these are only examples and are not intended to limit the protection scope of the present invention. For example, where a first feature described later in the specification is formed on or above a second feature, it may include embodiments in which the first and second features are formed in a direct relationship, and may also include those formed between the first and second features. Implementation of additional features so that there may be no direct connection between the first and second features. Additionally, reference numerals and/or letters may be repeated in various instances throughout these disclosures. This repetition is for brevity and clarity and does not in itself represent a relationship between the various embodiments and/or structures being discussed. Further, when a first element is described as being connected or combined with a second element, the description includes embodiments in which the first and second elements are directly connected or combined with each other, and also includes the addition of one or more other intervening elements. The first and second elements are indirectly connected or joined to each other.

Fig. 1 shows a vacuum valve, which belongs to the rectangular vacuum valve in the industry, wherein the valve body, the valve and the valve port are in the shape of a rectangle. Although the embodiment of the present invention is described by taking a rectangular vacuum valve as an example, the shape is not limited to a strictly rectangular shape.

2, the vacuum valve includes a valve core assembly 1 and a valve body 2, the valve body 2 includes a side wall 21, the side wall 21 is provided with a valve port 210, and the valve core assembly 1 includes a valve plate 10.

Referring to FIG. 5 , the valve core assembly 1 further includes a rotating shaft 11 , and the rotating shaft 11 is arranged in the valve body 2 to be rotatable around its own axis.

The valve plate 10 has a width direction W, a length direction L and a thickness direction H, a connecting side 101 and a sealing side 102 in the thickness direction H, and a near valve port side 103 adjacent to the valve port 210 in the width direction W and away from the valve port 210 The distal port side 104.

The shaft 11 and the valve plate 10 are connected along the length direction L of the valve plate 10 by connecting rods 14 and 13, whereby the valve plate 10 can follow the rotating shaft 11 to rotate. The connection location 141 between the port side 103 and the distal port side 104 is a floating connection which allows slight movement between the valve plate 10 and the connecting rods 14 , 13 .

An elastic member 12 is also provided between the connecting rod 13 and the valve plate 10, and the elastic member 12 exerts an elastic force on the valve plate 10 to force the valve plate 10 to move to a limit position of a slight movement range. As shown in FIG. 7 , at the moment T0, the valve plate 10 is pressed down by the elastic force exerted by the elastic member 12. Since the valve plate 10 and the connecting rods 14 and 13 are floating connections, the valve plate 10 is slightly moved relative to the elastic member 12. Inclination, an example of the inclination angle is 1°-2°, but it is not limited to this, and can be selected according to the actual situation.

As shown in FIG. 7 , due to the holding effect of the elastic member 12, the valve plate 10 is kept at the limit position at the time T0, so that the valve plate 10 follows the rotation path of the rotating shaft 11 toward the valve port 210, and the distance of the valve plate 10 is The valve port side 104 contacts the side wall 21 first rather than the near valve port side 103. Due to the frictional force caused by the contact, the far valve port side 104 is then a fixed part. As shown in FIG. 7 at time T1, the far valve port side The point corresponding to 104 is basically fixed and will not slide, which causes the connecting rods 13 and 14 that continue to rotate to move slightly relative to the valve plate 10, thereby pushing the valve plate 10 and forcing it to take the far valve port side 104 as the position. The fixed part swings counterclockwise, and finally at time T2 as shown in FIG. 10 and FIG. 11 , the sealing side 102 of the valve plate 10 seals the valve port 210 , and the position corresponding to T2 is also the dead point of the swinging of the connecting rods 13 and 14 .

The floating connection makes the valve plate 10 capable of self-adjustment, and the existing floating connection structure can be used. For example, the connecting rods 14 and 13 have corresponding floating connectors, such as ball joints. Correspondingly, the valve plate 10 has a floating connection. The connecting side 101 has a dimple, for example, a ball dimple, the radius of which is larger than the radius of the ball head. Other floating connection structures are also possible, such as structures that allow the valve plate 10 to swing slightly and move slightly relative to the connecting rods 14 and 13 .

Compared with the rectangular plug-in valve, the aforementioned structure is simple and light in weight, and the opening and closing speed of the valve port is also very fast, which can meet the user's requirements for a single action of ≤5 seconds, for example, it can meet the test test of 3 seconds for a single action. Due to the simple structure, low loss and long maintenance cycle, the operation and performance within 250,000 times of the utility model person's test meet the requirements.

Although one embodiment of the vacuum valve is described above, in other embodiments, there may be more details in many respects relative to the above-described embodiments, and at least some of these details may be varied. These details and at least some of these variations are illustrated below with some examples.

An embodiment of the elastic member 12 is a spring, which is sleeved on the limit bolt connected to the connecting rod 13 to exert pressure on the valve plate 10 .

The rotation angle of the valve plate 10 is set to 90 degrees, but not limited thereto.

The valve body 2 is a hollow cavity, and the upper side shown in the figure is the open side. The valve core assembly 1 also includes a cover plate 15 . The cover plate 15 is rotatably supported by the shaft bracket 16 , and the cover plate 15 detachably seals the open side of the upper portion of the valve body 2 , whereby the cover plate 15 is provided as a support base for the valve core assembly 1 . The valve core assembly 1 can be assembled with the valve body 2 as a whole, so it is convenient for disassembly and maintenance.

2 to 5, the valve core assembly 1 further includes a driving device 17, the driving device 17 is disposed on the side of the cover plate 15 that faces away from the valve body 2, and the driving device 17 has a linear motion output member 171. The linear motion output member 171 passes through the cover plate 15 and is connected to the rotating shaft through a crank, which is the connecting rod 13. In the following description, the crank 13 and the connecting rod 13 have the same meaning. The linear motion output member 171 is also configured to swing to move, so as to push the crank 13 at various positions where the crank 13 rotates, and the crank 13 can drive the rotating shaft 11 to rotate. A sealing member is provided between the cover plate 15 and the linear motion output member 171 .

As shown in FIG. 12 , in a preferred embodiment, the sealing member between the cover plate 15 and the linear motion output member 171 is a bellows 172 . A seal is formed between the linear motion output member 171 and the bellows pipe 171 , and a seal is formed between the bellows pipe 172 . The bellows 172 is used to achieve sealing, and there is no friction at the seal, so the service life is high.

The driving device may use an air cylinder, but is not limited thereto. The embodiment shown in the figure adopts double-cylinder drive and is equipped with a plurality of rotating shaft brackets 16 to support the rotating shaft, and the movement is stable and the sealing performance is good. The cylinder can also be replaced by a servo electric cylinder, which can meet more requirements, and the switching speed is adjustable.

Compared with the general flap valve, the cylinder is set at the end of the rotating shaft, and the cylinder or the driving device is placed on the upper part, the thrust is greatly increased, and the valve sealing is more reliable.

The left end in Figure 5 is a cross section of the valve core assembly. The rotating shaft bracket 16 is inserted into the valve body 2 , and the two ends of the rotating shaft bracket 16 in the width direction W and the walls 21 and 22 of the valve body 2 are clearance-fitted with a small tolerance. The wall bodies 21 and 22 are provided with support to maintain the parallel state of the wall bodies 21 and 22 . In another embodiment, braces may be provided separately to support the opposing walls 21, 22, which keep the cavity from being deformed inwardly due to external atmospheric pressure in a vacuum state.

2 to 5 , the lower side of the cover plate 15 is provided with a positioning pin 153, the upper side of the valve body 2 is correspondingly provided with a pin hole, the positioning pin 153 is inserted into the pin hole, and the positioning pin 153 is matched with the pin hole. The parallel state between the cavity walls 21 and 22 of the valve body 2 is maintained. Combined with the aforementioned support plate or the rotating shaft bracket 16, the holding effect is better, which is beneficial to the valve plate sealing.

As shown in FIG. 2 , the lower side of the valve body 2 , that is, the side opposite to the side where the valve core assembly is located is also an open side. The valve body 2 also includes a lower cover plate 23 , and the open side is detachably connected through the lower cover plate 23 . The upper and lower sides of the valve body 2 are set to be open, so it is convenient for the cleaning and maintenance of the valve. On the other hand, the lower cover plate 23 is also provided with a positioning pin, which cooperates with the pin hole on the lower side of the valve body 2 , and can also be used for positioning and preventing deformation of the walls 21 and 22 of the two long sides of the valve body 2 . effect.

As shown in FIG. 12 , a sealing ring 103 is provided on the sealing side 102 of the valve plate 10 , and the valve port 210 is sealed by the sealing ring. Because the aforementioned floating connection and elastic member help the valve plate 10 to reach a certain angle, the far-port side 104 of the valve plate 10 contacts the side wall 21 first rather than the near-port side 103, so the sealing ring will not be rubbed to avoid It will not damage the sealing ring if it is not tightly closed.

As shown in FIG. 4 , a heat insulating plate 18 is provided on the sealing side of the valve plate 10 . The system using the valve has a high temperature, and the valve core is difficult to be cooled by water cooling. The sealing side of the valve plate 10 is provided with a heat insulation plate 18, so the life of the valve plate can be improved. Especially in the embodiment where the sealing ring is used for sealing, the heat insulating plate 18 is arranged to keep the sealing ring of the valve plate 10 within the allowable temperature range, which can effectively improve the service life of the valve.

As shown in FIG. 3 , the valve body 2 includes two walls 21 , 22 on the long side and two walls 23 , 24 on the short sides, and the two walls 23 , 24 on the two long sides have valve ports respectively. , the valve core assembly 1 is set corresponding to one valve port 210 . The four side walls enclose a rectangular cavity.

As shown in FIG. 2 , a reinforcing bracket 4 is provided between the walls 23 and 24 on the two long sides. The reinforcing bracket 4 can further maintain the parallel state between the two walls 23, 24.

FIG. 6 shows a reinforcing bracket, which includes a nozzle 41 and flanges 42 at both ends of the nozzle 41 for connecting the long side walls. Along the length of the valve body, one or more reinforcing brackets may be provided at the bottom of the valve body. The installation of the bracket can ensure the parallelism of the body cavity, prevent the body cavity from being deformed inwardly and outwardly, ensure the sealing, and it is easy to fold and maintain.

As shown in Figures 2 and 3, at least one of the walls on the two short sides or the valve core assembly is provided with observation windows 240, 150 that can observe the valve action, so that the valve action and working flow can be observed at any time.

In addition, in order to cope with the high temperature environment, the connection surface between the valve body and the cavity in the system can be provided with water circulation cooling. As shown in FIG. 2 , the valve body is provided with a cooling water interface 28 .

As a preferred arrangement, bearings 5 are installed at all rotations of the valve core assembly 1, so as to ensure concentricity and avoid frictional damping.

In the embodiment shown in FIGS. 1 to 5 , the assembly process of the vacuum valve is as follows:

1. Valve body:

Valve body assembly, welding processing:

①Assemble the two body side plates (long side walls) and the two body end plates (short side walls) according to the requirements of the drawing, and fix them by spot welding;

② After confirming that the size meets the requirements, the filler is fully welded;

③Shaping and stress relief;

④Process after welding according to the finishing drawing.

2. Spool assembly:

The parts in the valve core assembly are processed and assembled according to the drawing:

①Fix the heat shield to the valve plate;

② Assemble the spring on the connecting rod, and connect the valve plate and the connecting rod through the floating joint in turn for use;

③Connect the bellows to the cylinder shaft;

④ Assemble the pneumatic actuator/electric actuator with the upper cover;

⑤ Assemble the shaft bracket and the upper cover;

⑥Insert the rotating shaft into the support plate hole of the rotating shaft bracket, install the bearing in sequence and fix it;

⑦ Assemble the connecting rod and rotating shaft;

⑧Fix the bellows shaft and the connection;

The valve core assembly is assembled.

3. General assembly of pneumatic flap valve ():

① Install the reinforcing bracket into the corresponding position of the lower end of the valve body;

② Put the valve core assembly into the valve body smoothly, first fix it with a positioning pin and then lock it with a screw;

③ Assemble the lower cover and the handle 230 on the lower cover;

④ Assemble two observation windows;

⑤ Assemble the cooling water interface on the valve body;

⑥ Assemble the lifting piece 151;

⑦ Assemble the electromagnetic reversing valve and gas path accessories.

Its working principle is:

1. The valve is closed: when the valve is a pneumatic valve, the compressed air is used as the power, the upper cylinder takes in air, drives the piston to move down the cylinder, and pushes the connecting rod downward through the cylinder shaft, so that the valve plate fastened with the connecting rod is at the center of the rotating shaft. Make a circle and rotate to the sealing surface of the valve body, that is, the closed position. At this point the bellows are in a free state.

2. Valve opening: when the valve is a pneumatic valve, the compressed air is used as the power, the lower cylinder takes in air, the piston is driven to move up the cylinder, and the connecting rod is driven upward through the cylinder shaft, so that the valve plate rotates around the center of the rotating shaft to seal with the valve body The position where the face is 90 degrees is the open position. At this point the bellows is in a compressed state.

3. Features: (1) The valve can be used as pneumatic and electric, just need to replace the drive mechanism. When used as a pneumatic valve, the valve can already meet the requirements of the system. If it is replaced with an electric actuator, the valve will have one more function - the switching speed is adjustable from 0 to 125mm/S, and it can be stopped at any position during the process; (2) The valve is set Two observation windows, respectively on the valve body side and the upper cover. The working condition of the valve can be observed at any time; (3) The valve is provided with a cover plate, which is convenient for cleaning and maintenance.

Although the present utility model is disclosed above with preferred embodiments, it is not intended to limit the present utility model. Any person skilled in the art can make possible changes and modifications without departing from the spirit and scope of the present utility model. Therefore, any modifications, equivalent changes and modifications made to the above embodiments according to the technical essence of the present utility model without departing from the content of the technical solutions of the present utility model all fall within the protection scope defined by the claims of the present utility model.

Claims (15)

1. A vacuum valve, comprising a valve core assembly and a valve body, the valve body includes a side wall, the side wall is provided with a valve port, and the valve core assembly includes a valve plate; it is characterized in that, The valve core assembly further includes a rotating shaft, and the rotating shaft is arranged in the valve body and can rotate around its own axis; The valve plate has a width direction, a length direction and a thickness direction, and has a connection side and a sealing side in the thickness direction; in the width direction, there is a near valve port side adjacent to the valve port and a far valve port side away from the valve port; The rotating shaft and the valve plate are connected along the length direction of the valve plate through a connecting rod, whereby the valve plate can follow the rotating shaft to rotate, and the connecting side of the connecting rod and the valve plate is at the side of the connecting rod. a floating connection at the connection position between the near valve port side and the far valve port side, the floating connection allows slight movement between the valve plate and the connecting rod; An elastic member is also arranged between the connecting rod and the valve plate, and the elastic member exerts an elastic force on the valve plate to force the valve plate to move to a limit position of the slight movement range ; The limit position makes the valve plate follow the rotating shaft to rotate toward the valve port, the far valve port side of the valve plate contacts the side wall earlier than the near valve port side , and then make the side near the valve port a fixed part, and cause the connecting rod that continues to rotate to perform the slight movement relative to the valve plate, thereby pushing and swinging the valve plate to make the valve plate The sealing side of the sealing side seals the valve port. 2 . The vacuum valve according to claim 1 , wherein the valve body is a hollow cavity with an open side on one side, and the valve core assembly further comprises a cover plate, the cover plate facing the One side of the valve body is protruded with a rotating shaft bracket, the rotating shaft is rotatably supported by the rotating shaft bracket, and the cover plate detachably seals the open side, whereby the cover plate is set as a part of the valve core assembly. Support foundation. 3 . The vacuum valve according to claim 2 , wherein the valve core assembly further comprises a driving device, the driving device is disposed on the side of the cover plate facing away from the valve body, and the driving device There is a linear motion output piece, the linear motion output piece passes through the cover plate, and is connected to the rotating shaft through a crank, so that the rotating shaft can be driven to rotate; the cover plate and the linear motion output piece are arranged between the cover plate and the linear motion output piece. There are seals. 4 . The vacuum valve according to claim 3 , wherein the sealing member is a bellows tube, and one end of the bellows tube is mounted on the cover plate to form a seal with the cover plate, and the The linear motion output piece passes out of the bellows and forms a seal with the bellows. 5 . The vacuum valve according to claim 2 , wherein corresponding to both ends of the rotating shaft, a support plate is provided on the cover plate, the support plate is inserted into the valve body, and the support plate is inserted into the valve body. 6 . Small tolerance clearance fit between the two ends of the valve body and the wall body of the valve body provides support for the wall body from the inner side of the wall body of the valve body. 6 . The vacuum valve of claim 5 , wherein the support plate is the shaft support. 7 . 7. The vacuum valve according to claim 2 or 5, wherein a positioning pin is provided on the cover plate, a pin hole is correspondingly provided on the valve body, and the positioning pin is inserted into the pin hole, The matching between the positioning pin and the pin hole is set to maintain the parallel state between the cavity walls of the valve body. 8. The vacuum valve according to claim 2, wherein the side of the valve body opposite to the side where the valve core assembly is located is also an open side, and the valve body further comprises another cover plate, Another cover releasable connection is located on the open side of the opposite side. 9 . The vacuum valve according to claim 1 , wherein the sealing side of the valve plate is provided with a sealing ring, and the valve port is sealed by means of the sealing ring. 10 . 10. The vacuum valve of claim 1, wherein the sealing side of the valve plate is configured as a heat shield. 11. The vacuum valve of claim 9, wherein the sealing side of the valve plate is configured as a heat shield, and the heat shield is configured to keep the sealing ring of the valve plate in an allowed position. within the temperature range. 12. The vacuum valve of claim 1, wherein the vacuum valve is a rectangular vacuum valve. 13 . The vacuum valve according to claim 12 , wherein the valve body comprises two long side walls and two short side walls, the two long side walls are respectively provided with valve ports, and the valve 13 . The core assembly is arranged corresponding to one of the valve ports, and a reinforcing bracket is arranged between the two long side walls. 14 . The vacuum valve according to claim 13 , wherein the reinforcing bracket comprises a nozzle and flanges at both ends of the nozzle for connecting the long side walls. 15 . 15 . The vacuum valve according to claim 13 , wherein at least one of the two short side walls or the valve core assembly is provided with an observation window for observing the valve action. 16 .

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