CN113124190A - Pneumatic rotary ball valve - Google Patents

Pneumatic rotary ball valve Download PDF

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Publication number
CN113124190A
CN113124190A CN202110428256.2A CN202110428256A CN113124190A CN 113124190 A CN113124190 A CN 113124190A CN 202110428256 A CN202110428256 A CN 202110428256A CN 113124190 A CN113124190 A CN 113124190A
Authority
CN
China
Prior art keywords
valve
valve body
cylinder barrel
air
rotary ball
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202110428256.2A
Other languages
Chinese (zh)
Inventor
邹亚伟
张魁榜
齐英
陈林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Chuanbei Vacuum Technology Beijing Co ltd
Sichuan Jiutian Vacuum Technology Co ltd
Original Assignee
Chuanbei Vacuum Technology Beijing Co ltd
Sichuan Jiutian Vacuum Technology Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chuanbei Vacuum Technology Beijing Co ltd, Sichuan Jiutian Vacuum Technology Co ltd filed Critical Chuanbei Vacuum Technology Beijing Co ltd
Priority to CN202110428256.2A priority Critical patent/CN113124190A/en
Publication of CN113124190A publication Critical patent/CN113124190A/en
Pending legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K5/00—Plug valves; Taps or cocks comprising only cut-off apparatus having at least one of the sealing faces shaped as a more or less complete surface of a solid of revolution, the opening and closing movement being predominantly rotary
    • F16K5/04—Plug valves; Taps or cocks comprising only cut-off apparatus having at least one of the sealing faces shaped as a more or less complete surface of a solid of revolution, the opening and closing movement being predominantly rotary with plugs having cylindrical surfaces; Packings therefor
    • F16K5/0442—Spindles and actuating means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/06—Construction of housing; Use of materials therefor of taps or cocks
    • F16K27/065—Construction of housing; Use of materials therefor of taps or cocks with cylindrical plugs
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/44—Mechanical actuating means
    • F16K31/50—Mechanical actuating means with screw-spindle or internally threaded actuating means
    • F16K31/502—Mechanical actuating means with screw-spindle or internally threaded actuating means actuating pivotable valve members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K49/00—Means in or on valves for heating or cooling
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K5/00—Plug valves; Taps or cocks comprising only cut-off apparatus having at least one of the sealing faces shaped as a more or less complete surface of a solid of revolution, the opening and closing movement being predominantly rotary
    • F16K5/04—Plug valves; Taps or cocks comprising only cut-off apparatus having at least one of the sealing faces shaped as a more or less complete surface of a solid of revolution, the opening and closing movement being predominantly rotary with plugs having cylindrical surfaces; Packings therefor
    • F16K5/0457—Packings
    • F16K5/0478—Packings on the plug
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K5/00—Plug valves; Taps or cocks comprising only cut-off apparatus having at least one of the sealing faces shaped as a more or less complete surface of a solid of revolution, the opening and closing movement being predominantly rotary
    • F16K5/04—Plug valves; Taps or cocks comprising only cut-off apparatus having at least one of the sealing faces shaped as a more or less complete surface of a solid of revolution, the opening and closing movement being predominantly rotary with plugs having cylindrical surfaces; Packings therefor
    • F16K5/0457—Packings
    • F16K5/0485—Spindle sealing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K5/00—Plug valves; Taps or cocks comprising only cut-off apparatus having at least one of the sealing faces shaped as a more or less complete surface of a solid of revolution, the opening and closing movement being predominantly rotary
    • F16K5/08—Details

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Sliding Valves (AREA)
  • Details Of Valves (AREA)
  • Taps Or Cocks (AREA)

Abstract

The invention discloses a pneumatic rotary ball valve, which comprises a valve body and is characterized in that: the two ends of the valve body are provided with interfaces, the valve body is connected with the cover plate, the valve body is provided with a valve block, and the valve block is provided with through holes matched with the two interfaces; the valve block is fixedly connected with one end of the valve rod, the other end of the valve rod is provided with a pin shaft, two groove guide rails are arranged on the piston, and the pin shaft and the two groove guide rails move in a matched mode; the valve body is provided with a cylinder barrel outside, the valve rod and the piston are arranged inside the cylinder barrel, the bottom of the cylinder barrel is provided with an adapter plate, the bottom of the adapter plate is provided with a cover plate, and the cylinder end cover is arranged at the top end of the cylinder barrel and used for sealing the cylinder barrel. The invention meets the use environment with high requirements on flow conductance and the use requirements on the valve body with heating requirements, has the mechanical locking function, and has small integral size, less friction of internal parts and long service life.

Description

Pneumatic rotary ball valve
Technical Field
The invention relates to the technical field of valves, in particular to a pneumatic rotary ball valve.
Background
With the rapid development of semiconductor technology, the precision of semiconductor manufacturing processes of semiconductor devices is required to be higher, so that high cleanliness and special manufacturing processes are required, and the requirements for production equipment are also higher and higher.
To reduce the potential for contamination of semiconductor wafers, the fabrication process is performed in a vacuum environment and in a specific process gas environment. In order to connect and disconnect the process chamber to the line for the specific gas, a vacuum valve needs to be installed in the line.
The rotary ball valve is used as a straight-through valve, is suitable for a vacuum system with high requirements on convection conductance, and is also suitable for the semiconductor industry with high requirements on equipment cleanliness due to the characteristic of less friction inside the valve body. In addition, a heating module can be integrated on the valve body of the rotary ball valve and used in a vacuum system with a heating requirement on the valve body.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provide a pneumatic rotary ball valve which is used for solving the problems of insufficient tightness and low cleanliness and meeting the use requirement of heating required by work.
The purpose of the invention is realized by the following technical scheme: the valve comprises a valve body, wherein interfaces are arranged at two ends of the valve body, hole sites are arranged on the valve body and used for installing a heating element and a wiring element, the valve body is connected with a cover plate, a valve block is arranged on the valve body, and the valve block is provided with through holes matched with the two interfaces and used for realizing sealing and passage; the valve block is fixedly connected with one end of the valve rod, the other end of the valve rod is provided with a pin shaft, a groove guide rail is arranged on the piston, and the pin shaft and the groove guide rail move in a matched mode; the valve body is provided with a cylinder barrel outside, the valve rod and the piston are arranged inside the cylinder barrel, the bottom of the cylinder barrel is provided with an adapter plate, the bottom of the adapter plate is provided with a cover plate, and the cylinder end cover is arranged at the top end of the cylinder barrel and used for sealing the cylinder barrel.
Preferably, a sealing groove is formed in the periphery of the through hole in the valve block, and a sealing ring is installed in the sealing groove.
Preferably, the upper air port and the lower air port of the cylinder barrel are connected with an air source through air pipes.
Preferably, the valve body is provided with hole sites for installing the heating element and the wiring element, and the heating range of the heating element is as follows: 20-150 ℃.
Preferably, the valve body and the valve block are made of aluminum alloy materials, because the aluminum alloy has good heat conductivity and corrosion resistance.
Preferably, the sealing ring is a perfluoro rubber ring, and perfluoro rubber has elasticity, thermal stability and chemical stability.
Preferably, the valve rod and the connecting piece are made of hastelloy and other materials with fluorine corrosion resistance.
Preferably, the interlude of valve rod is provided with spherical structure, and when the valve rod was rotatory, spherical structure was used for realizing the dynamic seal between valve rod and apron and the cylinder keysets.
Preferably, both ends of the guide rail groove are arranged in a straight line shape, and the middle of the guide rail groove is in a curve shape. The two ends are linear, when the valve is fully opened or in a sealed state, the air source is cut off, and the valve still keeps the original state, so that self-locking is realized.
Compared with the prior art, the invention has the following beneficial effects: in the valve opening process, the air vent admits air under the cylinder, the piston begins upwards to be linear motion in the cylinder, it is spacing through the both ends straightway guide rail of the guide rail groove on the piston, make the valve rod carry out linear motion relative piston earlier, make the valve rod rotatory again, it is rotatory to drive the valve block, thereby make valve block runner and valve body runner parallel, make the valve rod swing at last, the valve block sealing washer hugs closely the valve body inner wall, the valve block runner is coaxial with the valve body runner, at this moment, the valve is in the full open mode, the round pin axle gets into the straightway guide rail in guide rail groove, it.
In the closing process of the valve, air enters an air vent on the air cylinder, a piston in the air cylinder starts to do linear motion downwards, the linear section guide rails at two ends of a guide rail groove on the piston are limited, the valve rod is made to do linear motion relative to the piston at first, then the valve rod is made to rotate, the valve block is driven to rotate, so that the through hole of the valve block is staggered with the flow channel of the valve body, the valve rod is made to swing, the through hole of the valve block is completely staggered with the flow channel of the valve body, at the moment, the valve is in a fully closed state, and the pin.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
FIG. 1 is a schematic diagram of a pneumatic rotary ball valve;
FIG. 2 is a schematic cross-sectional view of a pneumatic rotary ball valve;
1-valve body, 1.1-heating element, 1.2-wiring element, 2-cover plate, 3-valve block, 4-valve rod, 5-piston, 6-adapter plate, 7-cylinder barrel and 8-cylinder end cover.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Example one
As shown in fig. 1 to 2, the embodiment discloses a pneumatic rotary ball valve, which includes a valve body 1, wherein two ends of the valve body 1 are provided with interfaces, the valve body 1 is provided with hole sites, the hole sites are used for installing a heating element 1.1 and a wiring element 1.2, the valve body 1 is connected with a cover plate 2, the valve body 1 is provided with a valve block 3, and the valve block 3 is provided with through holes matched with the two interfaces;
the valve block 3 is fixedly connected with one end of the valve rod 4, the other end of the valve rod 4 is provided with a pin shaft, two groove guide rails are arranged on the piston 5, and the pin shaft and the two groove guide rails move in a matched mode;
the valve comprises a valve body 1 and is characterized in that a cylinder barrel 7 is arranged outside the valve body 1, a valve rod 4 and a piston 5 are arranged inside the cylinder barrel 7, an adapter plate 6 is arranged at the bottom of the cylinder barrel 7, a cover plate 2 is arranged at the bottom of the adapter plate 6, and a cylinder end cover 8 is arranged at the top end of the cylinder barrel 7 and used for sealing the cylinder barrel 7.
The working principle is as follows:
valve 1 opens the in-process, the vent admits air under the cylinder, piston 5 is linear motion in the cylinder, it is spacing through the straightway guide rail of the groove guide rail on the piston 5, make valve rod 4 relative piston carry out linear motion earlier, it is rotatory to make valve rod 4 again, it is rotatory to drive valve block 3, thereby make 3 runners of valve block parallel with 1 runner of valve body, make valve rod 4 swing at last, 1 inner wall of valve body is hugged closely to valve block 3's sealing washer, valve block 3 runners are coaxial with 1 runner of valve body, at this moment, the valve is in the full open mode, the round pin axle gets into the straightway guide rail in guide rail groove, it.
The linear guide rail grooves at the two ends of the groove guide rail realize mechanical self-locking of the device, and the valve still keeps the original state when the air source is cut off in the fully opened or sealed state of the valve. The valve realizes 'real through', meets the use environment with high requirements on convection conductance, the valve still keeps the original state when the air source is cut off under the full-open or sealed state of the valve, and when the valve is in the full-open state, the sealing ring of the valve block 3 is compressed in contact with the inner side of the valve body 1, so that the area of the sealing ring contacting with the air is reduced, and the possibility of corrosion of the air to the sealing ring is reduced.
Example two
This embodiment is substantially similar to the first embodiment, except that: in the valve 1 closing process, the vent admits air on the cylinder, piston 5 is linear motion in the cylinder, it is spacing through the straightway guide rail of the groove guide rail on the piston 5, make valve rod 4 carry out linear motion with the piston earlier, it is rotatory to make valve rod 4 again, it is rotatory to drive valve block 3, thereby make 3 through-holes of valve block and 1 runner of valve body begin to crisscross, make valve rod 4 swing at last, 3 runners of valve block stagger completely with 1 runner of valve body, the realization is closed, at this moment, the valve is in the totally-closed state, the round pin axle gets into the straightway guide rail in guide rail groove, it is.
EXAMPLE III
This embodiment is substantially similar to the first embodiment, except that: the valve body 1 is provided with hole sites for installing a heating element 1.1 and a wiring element 1.2, and the heating range of the heating element is 20-150 ℃. The valve body 1 and the valve block 3 are made of aluminum alloy materials with good heat conductivity, and the sealing ring is a perfluoro rubber ring with thermal stability.
When the equipment is used for carrying out chemical vapor deposition on a PECVD (plasma enhanced chemical vapor deposition) machine, the working temperature is generally 100 ℃, the valve body 1 needs to be heated at the moment, and the heating element 1.1 in the valve body is opened at the moment to meet the heating requirement of the valve body 1.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that changes may be made in the embodiments and/or equivalents thereof without departing from the spirit and scope of the invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (10)

1. A pneumatic rotary ball valve comprises a valve body (1), and is characterized in that: the two ends of the valve body (1) are provided with interfaces, the valve body (1) is connected with the cover plate (2), the valve body (1) is provided with a valve block (3), and the valve block (3) is provided with through holes matched with the two interfaces;
the valve block (3) is fixedly connected with one end of the valve rod (4), the other end of the valve rod (4) is provided with a pin shaft, two groove guide rails are arranged on the piston (5), and the pin shaft and the two groove guide rails move in a matched mode;
the valve is characterized in that a cylinder barrel (7) is arranged outside the valve body (1), the valve rod (4) and the piston (5) are installed inside the cylinder barrel (7), an adapter plate (6) is installed at the bottom of the cylinder barrel (7), a cover plate (2) is installed at the bottom of the adapter plate (6), and a cylinder end cover (8) is installed at the top end of the cylinder barrel (7) and used for sealing the cylinder barrel (7).
2. A pneumatic rotary ball valve according to claim 1, wherein: and a sealing groove is arranged on the periphery of the through hole of the valve block (3), and a sealing ring is arranged on the sealing groove.
3. The seal ring according to claim 2, wherein: the sealing ring is a perfluoro rubber ring.
4. A pneumatic rotary ball valve according to claim 1, wherein: the upper air port and the lower air port of the cylinder barrel (7) are connected with an air source through air pipes.
5. A pneumatic rotary ball valve according to claim 1, wherein: the valve body is provided with hole sites for installing heating elements and wiring elements, and the heating range of the heating elements is as follows: 20-150 ℃.
6. A pneumatic rotary ball valve according to claim 1, wherein: the valve body (1) and the valve block (3) are made of aluminum alloy materials, and the valve rod (4) and the connecting piece are made of Hastelloy materials.
7. A pneumatic rotary ball valve according to claim 1, wherein: the middle section of the valve rod (4) is provided with a spherical structure.
8. A pneumatic rotary ball valve according to claim 1, wherein: the two ends of the guide rail groove are arranged in a linear shape, and the middle of the guide rail groove is in a curve shape.
9. Use of a pneumatic rotary ball valve according to any one of claims 1 to 8, wherein: the valve body (1) is arranged on a vacuum pipeline, an air source is connected to two air ports of an air cylinder barrel (7) through an air pipe, the air source is controlled to enable the upper air port to admit air and the lower air port to discharge air, the piston (5) moves downwards, and the valve block (3) rotates clockwise until the valve is closed; and controlling the air source to enable the lower air port to admit air and the upper air port to discharge air, enabling the piston (5) to move upwards, and enabling the valve block (3) to rotate anticlockwise until the valve is opened.
10. The method of using a pneumatic rotary ball valve as claimed in claim 9, wherein: when the pneumatic rotary ball valve rotates to be fully opened or fully closed, the pin shaft can move to the linear guide rail groove, the valve is in a mechanical limiting state, and when the air path is cut off, the valve can be kept in a fully opened or fully closed state, so that the stability and the safety of operation are ensured.
CN202110428256.2A 2021-04-21 2021-04-21 Pneumatic rotary ball valve Pending CN113124190A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202110428256.2A CN113124190A (en) 2021-04-21 2021-04-21 Pneumatic rotary ball valve

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202110428256.2A CN113124190A (en) 2021-04-21 2021-04-21 Pneumatic rotary ball valve

Publications (1)

Publication Number Publication Date
CN113124190A true CN113124190A (en) 2021-07-16

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ID=76778381

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202110428256.2A Pending CN113124190A (en) 2021-04-21 2021-04-21 Pneumatic rotary ball valve

Country Status (1)

Country Link
CN (1) CN113124190A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113566012A (en) * 2021-07-29 2021-10-29 品孚罗特过滤设备（北京）有限公司 Pneumatic actuator structure of quick switch pulse valve

Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20000054838A (en) * 2000-06-28 2000-09-05 문형렬 Cock valve
CN2489153Y (en) * 2001-06-26 2002-05-01 姜慧 Conical track ball valve
US6793194B1 (en) * 2003-04-29 2004-09-21 Bg Tech Ltd. Rotary valve actuator
CN2651541Y (en) * 2003-06-09 2004-10-27 广东明珠集团股份有限公司 Double contact roller guiding rod ball valve
DE102010002621A1 (en) * 2010-03-05 2011-09-08 Krones Ag actuator
DE102011116627B3 (en) * 2011-10-20 2012-10-18 Gea Tuchenhagen Gmbh Actuating device for a rotatable closure part of a valve
CN104676079A (en) * 2015-03-06 2015-06-03 成都中寰流体控制设备有限公司 Compact valve driving mechanism
CN206984444U (en) * 2016-03-09 2018-02-09 埃沃格尔德股份有限公司 Rotating driving device and beverage filling system
CN109268512A (en) * 2018-11-19 2019-01-25 中国科学院大连化学物理研究所 A kind of device and method of butterfly valve heating
CN109780307A (en) * 2019-01-16 2019-05-21 圣博莱阀门有限公司 A kind of pneumatic rail ball valve with buffering hydraulic damping device
CN213018054U (en) * 2020-08-21 2021-04-20 福建省世阀智能科技有限公司 Novel intelligence accuse temperature ball valve

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20000054838A (en) * 2000-06-28 2000-09-05 문형렬 Cock valve
CN2489153Y (en) * 2001-06-26 2002-05-01 姜慧 Conical track ball valve
US6793194B1 (en) * 2003-04-29 2004-09-21 Bg Tech Ltd. Rotary valve actuator
CN2651541Y (en) * 2003-06-09 2004-10-27 广东明珠集团股份有限公司 Double contact roller guiding rod ball valve
DE102010002621A1 (en) * 2010-03-05 2011-09-08 Krones Ag actuator
DE102011116627B3 (en) * 2011-10-20 2012-10-18 Gea Tuchenhagen Gmbh Actuating device for a rotatable closure part of a valve
CN104676079A (en) * 2015-03-06 2015-06-03 成都中寰流体控制设备有限公司 Compact valve driving mechanism
CN206984444U (en) * 2016-03-09 2018-02-09 埃沃格尔德股份有限公司 Rotating driving device and beverage filling system
CN109268512A (en) * 2018-11-19 2019-01-25 中国科学院大连化学物理研究所 A kind of device and method of butterfly valve heating
CN109780307A (en) * 2019-01-16 2019-05-21 圣博莱阀门有限公司 A kind of pneumatic rail ball valve with buffering hydraulic damping device
CN213018054U (en) * 2020-08-21 2021-04-20 福建省世阀智能科技有限公司 Novel intelligence accuse temperature ball valve

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113566012A (en) * 2021-07-29 2021-10-29 品孚罗特过滤设备（北京）有限公司 Pneumatic actuator structure of quick switch pulse valve
CN113566012B (en) * 2021-07-29 2023-07-14 品孚罗特过滤设备（北京）有限公司 Pneumatic actuator structure of quick switch pulse valve

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Application publication date: 20210716