CN215496652U - Work or material rest and cleaning equipment - Google Patents

Abstract

The application discloses work or material rest and cleaning equipment, the work or material rest includes: the first supporting plate component is provided with a first groove; the second supporting plate assembly is provided with a second groove; one end of each supporting rod is detachably connected with the first supporting plate component, and the other end of each supporting rod is detachably connected with the second supporting plate component; wherein, the work or material rest is used for placing a plurality of depression bars, and first recess is used for holding the one end of depression bar, and the second recess is used for holding the other end of depression bar. This application sets up first recess and second recess on through the work or material rest, can cooperate the clamp to get the device and get and put the depression bar to and set up location guider, still can be used to cooperate transfer device and automatic conveyer to transport the depression bar in batches, improve degree of automation and production efficiency, reduce manual operation, and occupation space is little, has improved the clean and tidy nature in equipment shop.

Description

Work or material rest and cleaning equipment

Technical Field

The application belongs to the cleaning equipment field, concretely relates to work or material rest and cleaning equipment.

Background

Solar photovoltaic washs and drying device when carrying out technology processing to the silicon chip, need place the silicon chip on the carrier, the carrier that will load a plurality of silicon chips is placed in washing and drying device, in the course of the treatment, appear the phenomenon of gluing the piece or floating the piece when preventing the silicon chip on the carrier in the liquid medicine reaction tank, need place the depression bar at the inserted hole that inserts the silicon chip, at present, in the equipment workshop, there is not special placer, the depression bar is often put at will, occupation space is big, influence the clean and tidy nature of equipment workshop, simultaneously also be convenient for snatch.

SUMMERY OF THE UTILITY MODEL

This application aims at providing a work or material rest and cleaning equipment, solves at least in the equipment shop, does not have special placer, and the depression bar is often put at will, and occupation space is big, influences the clean and tidy nature of equipment shop, one of the problem of also being convenient for snatch simultaneously.

To this end, a first object of the present application is to provide a stack.

A second object of the present application is to provide a cleaning apparatus.

For realizing the first purpose of this application, the technical scheme of this application provides a work or material rest, includes: the first supporting plate component is provided with a first groove; the second supporting plate assembly is provided with a second groove; one end of each supporting rod is connected with the first supporting plate component, and the other end of each supporting rod is connected with the second supporting plate component; wherein, the work or material rest is used for placing a plurality of depression bars, and first recess is used for holding the one end of depression bar, and the second recess is used for holding the other end of depression bar.

According to the application, the material rack comprises a first supporting plate component, a second supporting plate component and a plurality of supporting rods. The first supporting plate component and the second supporting plate component are connected through a plurality of supporting rods. The press rods can be stacked in batches through the first grooves in the first supporting plate assembly and the second grooves in the second supporting plate assembly, so that the press rods can be matched with the clamping device to take and place in the height of the automatic placing area, the positioning guide device is arranged, the press rods can also be used for matching with the transfer device and the automatic conveying device to transfer in batches, the automation degree and the production efficiency are improved, and the manual operation is reduced. It is little not only to stack the depression bar through the work or material rest, has still improved the clean and tidy nature in equipment shop, is convenient for snatch the depression bar simultaneously.

In addition, the technical scheme provided by the application can also have the following additional technical characteristics:

among the above-mentioned technical scheme, first backup pad subassembly includes: the first supporting plate is provided with a first groove; the second back-up plate assembly includes: the second supporting plate is provided with a second groove; the number of the first grooves and the number of the second grooves are multiple, and each first groove and one second groove are symmetrically arranged.

In this technical scheme, first recess and second recess are used for placing the depression bar, and when first backup pad and second backup pad correspond and are provided with a plurality of first recesses and second recess, a plurality of first recesses and a plurality of second recess can further promote the quantity that the depression bar was placed, and then has reduced the space that stacks the depression bar and occupy, has improved the clean and tidy nature in equipment shop. Because the first grooves are used for accommodating one end of the compression bar, the second grooves are used for accommodating the other end of the compression bar, and each first groove and one second groove are symmetrically arranged, the compression bar can be conveniently placed into the first grooves and the second grooves, and the side surfaces of the compression bar are prevented from being scratched.

In the above technical solution, the first groove includes: the guide groove is arranged at the opening of the first groove; the placing groove is arranged below the guide groove; the guide groove is a Y-shaped groove, the width of the Y-shaped groove along the first direction is gradually narrowed until the width of the Y-shaped groove is equal to that of the placing groove, and the guide groove is used for guiding one end of the pressure lever to enter the placing groove; and/or the second groove comprises: the guide groove is arranged at the opening of the first groove; the placing groove is arranged below the guide groove; the guide way is the Y-shaped groove, and the Y-shaped groove narrows gradually until equal with the standing groove width along the groove width of first direction, and the guide way is used for guiding the one end entering standing groove of depression bar.

In this technical scheme, the opening part of first recess is equipped with the guide way to and set up the standing groove in the guide way below. The guide way is the Y-shaped groove, and the Y-shaped groove narrows gradually until equal with the standing groove width along the groove width of first direction, and the guide way is used for guiding the one end entering standing groove of depression bar. The opening part of the second groove is provided with a guide groove and a placing groove arranged below the guide groove. The guide way is the Y-shaped groove, and the Y-shaped groove narrows gradually until equal with the standing groove width along the groove width of first direction, and the guide way is used for guiding the one end entering standing groove of depression bar.

In the technical scheme, the placing groove of the first groove is matched with the size of the pressing rod, and the placing groove is used for limiting the arrangement of the pressing rod in the first direction; and/or the placing groove of the second groove is matched with the end part of the pressing rod, and the placing groove is used for limiting the pressing rod to be arranged in the first direction.

In this technical scheme, the standing groove of first recess and the tip looks adaptation of depression bar for the restriction depression bar is arranged in first direction. The placing groove of the second groove is matched with the size of the pressing rod and used for limiting the pressing rod to be arranged along the first direction. The end part of the pressure lever is flat, one end of the pressure lever is matched with the first groove, and the other end of the pressure lever is matched with the second groove. The rotation of the pressing rod is limited through the side wall opposite to the first groove, the rotation of the pressing rod is limited through the side wall opposite to the second groove, the pressing rod is limited to be arranged in the first direction, the end part of the pressing rod is guaranteed to be always kept at a uniform angle when the pressing rod is placed or taken from the material rack, and therefore the pressing rod is taken and placed by the clamping device in a matched mode.

Among the above-mentioned technical scheme, first backup pad subassembly still includes: the first reinforcing plate is connected with the first supporting plate; the second back-up plate assembly includes: and the second reinforcing plate is connected with the second supporting plate.

In this embodiment, the first support plate assembly further includes a first stiffener. The first reinforcing plate is connected with the first supporting plate. The second brace panel assembly includes a second stiffening panel. The second reinforcing plate is connected with the second supporting plate. The first reinforcing plate and the second reinforcing plate are used for fixing and reinforcing the first supporting plate and the second supporting plate, and the first supporting plate and the second supporting plate can be prevented from deforming.

In the technical scheme, a third groove is formed in the first reinforcing plate along the periphery of the first groove, the width of the third groove is larger than that of the first groove, and the third groove is used for avoiding one end of the compression bar; and/or a fourth groove is formed in the second reinforcing plate along the peripheral side of the second groove, the width of the fourth groove is larger than that of the second groove, and the fourth groove is used for avoiding the other end of the compression bar.

In this technical scheme, be equipped with the third recess on the first stiffening plate, the third recess is used for dodging the one end of depression bar. And a fourth groove is formed in the second reinforcing plate and used for avoiding the other end of the pressing rod. It can be understood that because first backup pad and second backup pad are strengthened to having set up first stiffening plate and second stiffening plate, strengthen the effect for promoting, first stiffening plate and second stiffening plate are big and first backup pad, area such as second backup pad. The third groove is used for avoiding one end of the pressing rod, so that the pressing rod can be placed in the first groove. The fourth groove is used for avoiding the other end of the pressing rod, so that the pressing rod can be placed in the second groove. The width of the third groove is larger than that of the first groove, and the width of the fourth groove is larger than that of the second groove. The first supporting plate and the second supporting plate are kept to be in direct contact with the surface of the pressing rod all the time, and the first reinforcing plate and the second reinforcing plate are prevented from being in direct contact with the pressing rod.

Among the above-mentioned technical scheme, the work or material rest still includes: the bottom support is fixedly connected with the first supporting plate component and the second supporting plate component respectively; and/or the surrounding side of the surrounding plate is fixed on the bottom support.

In this technical scheme, the work or material rest includes the collet. The bottom support is fixedly connected with the first supporting plate component and the second supporting plate component respectively. The work or material rest still includes the bounding wall. The periphery of the coaming is fixed on the bottom support. The bounding wall is used for providing the protection for first backup pad subassembly, second backup pad subassembly, prevents that foreign object from colliding first backup pad subassembly, second backup pad subassembly.

Among the above-mentioned technical scheme, the work or material rest still includes: the positioning guide device is arranged on the bottom support; the positioning and guiding device comprises: the positioning guide port is arranged on the positioning plate; the positioning guide port is suitable for being matched with a positioning piece on the transportation mechanism.

In this technical scheme, the work or material rest still includes location guider. The positioning guide device is arranged on the bottom support. The positioning guide device comprises a positioning plate and a positioning guide opening. The positioning guide port is arranged on the positioning plate and is suitable for being matched with a positioning piece on the transportation mechanism. The positioning guide device is used for positioning equipment such as a transfer device and a clamping device, and the clamping device can take and place the pressure lever in the height of the automatic placing area through the positioning guide port.

In the technical scheme, one end of the supporting rod is detachably connected with the first supporting plate component, and the other end of the supporting rod is detachably connected with the second supporting plate component; and/or the first supporting plate is detachably connected with the first reinforcing plate, and the second supporting plate is detachably connected with the second reinforcing plate.

In this technical scheme, one end of the support rod is detachably connected with the first support plate assembly, and the other end of the support rod is detachably connected with the second support plate assembly. Through the bracing piece of changing different length, adjust the interval of first recess and second recess to make the depression bar run through first backup pad subassembly and second backup pad subassembly, thereby make the clamp get the both ends that the device can press from both sides the clamp and get the depression bar. The first supporting plate is detachably connected with the first reinforcing plate, and the second supporting plate is detachably connected with the second reinforcing plate. Through the thickness that changes first backup pad thickness and second backup pad part or whole thickness to make the depression bar run through first backup pad subassembly and second backup pad subassembly, thereby make to press from both sides the both ends that the device can press from both sides the clamp and get the depression bar.

To achieve the second object of the present application, a technical solution of the present application provides a cleaning apparatus, including: a transfer device; a gripping device; a stack as in any one of the embodiments of the first aspect above, removably connected to a transfer device for transfer of the stack; the pressing rod penetrates through the first supporting plate component and the second supporting plate component, and the clamping device is used for clamping two ends of the pressing rod.

According to the cleaning device provided by the embodiment of the second aspect of the present application, by using the material rest of any one of the embodiments of the first aspect, all the beneficial effects of the above embodiments are achieved, and details are not repeated herein. Specifically, the pressing rods in batches are intensively put on the material rest of the pressing rods, the transfer device is conveyed to an appointed position through a positioning guide port in the lower portion of the material rest, and the pressing rods are automatically taken and placed in a butt joint mode.

Additional aspects and advantages of the present application will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the present application.

Drawings

The above and/or additional aspects and advantages of the present application will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:

fig. 1 is a perspective view of a stack according to one embodiment of the present application;

fig. 2 is a schematic partial perspective view of a stack according to one embodiment of the present application;

fig. 3 is a schematic partial perspective view of a stack according to one embodiment of the present application;

FIG. 4 is a perspective view of a shroud according to one embodiment of the present application;

FIG. 5 is a perspective view of a strut according to one embodiment of the present application;

fig. 6 is a schematic top view of a stack according to an embodiment of the present application;

fig. 7 is a rear view schematic diagram of a stack according to one embodiment of the present application;

FIG. 8 is an enlarged schematic view of FIG. 7A;

fig. 9 is a left side view schematic of a stack according to one embodiment of the present application;

FIG. 10 is a schematic partial perspective view of a cleaning apparatus according to one embodiment of the present application;

FIG. 11 is a block diagram illustrating the structure of a cleaning apparatus according to one embodiment of the present application.

Reference numerals: 10: a material rack; 110: a first support plate assembly; 112: a first support plate; 114: a first groove; 116: a first reinforcing plate; 118: a third groove; 120: a second support plate assembly; 122: a second support plate; 124: a second groove; 126: a second reinforcing plate; 128: a fourth groove; 130: a support bar; 140: a guide groove; 150: a bottom support; 152: positioning a plate; 154: positioning the guide port; 160: enclosing plates; 20: cleaning equipment; 200: a transfer device; 300: a pressure lever; 310: an end portion; 400: a gripping device.

Detailed Description

In order that the above objects, features and advantages of the present application can be more clearly understood, the present application will be described in further detail with reference to the accompanying drawings and detailed description. It should be noted that the embodiments and features of the embodiments of the present application may be combined with each other without conflict.

In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application, however, the present application may be practiced in other ways than those described herein, and therefore the scope of the present application is not limited by the specific embodiments disclosed below.

It should be noted that the first direction in this application refers to a direction from the top to the bottom of the stack 10 in fig. 8, specifically: in a vertically downward direction from the top to the bottom of the stack 10.

A rack and a cleaning apparatus according to an embodiment of the present application are described below with reference to fig. 1 to 11.

As shown in fig. 1, a stack 10 according to some embodiments of the present application includes a first support plate assembly 110, a second support plate assembly 120, and a plurality of support rods 130.

Specifically, as shown in fig. 2, the first support plate assembly 110 is provided with a first groove 114. The second supporting plate assembly 120 is provided with a second groove 124. One end of each support rod 130 is detachably connected to the first support plate assembly 110, and the other end of each support rod 130 is detachably connected to the second support plate assembly 120. The rack 10 is used for placing a plurality of compression rods 300, the first groove 114 is used for accommodating one end of the compression rod 300, and the second groove 124 is used for accommodating the other end of the compression rod 300.

According to the stack 10 provided in this embodiment, the stack 10 includes a first support plate assembly 110, a second support plate assembly 120, and a plurality of support rods 130. The first and second support plate assemblies 110 and 120 are detachably connected by a plurality of support rods 130. Through the first recess 114 on the first supporting plate subassembly 110 and the second recess 124 on the second supporting plate subassembly 120, depression bar 300 can be stacked in batches to can cooperate the clamp to get device 400 and put depression bar 300 in the automation is placed the district height, it is little not only to stack the depression bar through the work or material rest, has still improved the neatness in equipment workshop, is convenient for snatch depression bar 300 simultaneously.

As shown in fig. 2 and 3, in the above embodiment, the first support plate assembly 110 includes a first support plate 112, and a first groove 114 is formed on the first support plate 112. The second supporting plate assembly 120 includes a second supporting plate 122, and a second groove 124 is formed on the second supporting plate 122. The number of the first grooves 114 and the number of the second grooves 124 are plural. First recess 114 and second recess 124 are used for placing depression bar 300, and when first backup pad and second backup pad correspond and are provided with a plurality of first recesses and second recess, a plurality of first recesses 114 and a plurality of second recess 124 can further promote the quantity that depression bar 300 placed, and then have reduced the space that stacks the depression bar and occupy, have improved the clean and tidy nature in equipment shop.

Further, each first groove 114 is symmetrically disposed with respect to one second groove 124. Because the first grooves 114 are used for accommodating one end of the pressing rod 300, the second grooves 124 are used for accommodating the other end of the pressing rod 300, and each first groove 114 and one second groove 124 are symmetrically arranged, the pressing rod 300 can be conveniently placed into the first grooves 114 and the second grooves 124, and the side surfaces of the pressing rod 300 are prevented from being scratched.

As shown in fig. 2 and 3, in the above embodiment, the first support plate assembly 110 further includes the first reinforcing plate 116. The first reinforcing plate 116 is connected to the first support plate 112. The second buttress plate assembly 120 includes a second stiffener 126. The second reinforcing plate 126 is connected to the second support plate 122. The first and second reinforcing plates 116 and 126 are used to fix and reinforce the first and second support plates 112 and 122, and prevent the first and second support plates 112 and 122 from being deformed.

Further, a third groove 118 is provided on the first reinforcing plate 116. The number of the third grooves 118 is plural, and each of the third grooves 118 is used for avoiding one end of the pressing rod 300.

Further, a fourth groove 128 is provided on the second reinforcing plate 126. The number of the fourth grooves 128 is plural, and each of the fourth grooves 128 is used for avoiding the other end of the pressing rod 300.

It is understood that since the first reinforcing plate 116 and the second reinforcing plate 126 are provided to reinforce the first support plate 112 and the second support plate 122, the first reinforcing plate 116 and the second reinforcing plate 126 have substantially the same area as the first support plate 112 and the second support plate 122 in order to enhance the reinforcing effect. The third groove 118 is configured to clear an end of the plunger 300, allowing the plunger 300 to be placed in the first groove 114. The fourth groove 128 is used to clear the other end of the plunger 300 so that the plunger 300 can be placed in the second groove 124.

In the above embodiment, the width of the third groove 118 is greater than the width of the first groove 114, and the width of the fourth groove 128 is greater than the width of the second groove 124. That is, the first support plate 112 and the second support plate 122 are always kept in direct contact with the surface of the strut 300, and the first reinforcing plate 116 and the second reinforcing plate 126 are prevented from being in direct contact with the strut 300. Generally, the first support plate 112 and the second support plate 122 are made of non-metal plates, and the first reinforcing plate 116 and the second reinforcing plate 126 are made of metal plates, so as to prevent the metal plates from directly contacting the pressing rod 300, and prevent metal ions in the metal plates from attaching to the pressing rod 300, and then the surface of the silicon wafer is secondarily contaminated by the metal ions due to the contact between the pressing rod 300 and the silicon wafer carrier.

As shown in fig. 9, in some embodiments, a guide groove 140 is formed at an opening of the first groove 114, and a placement groove is formed below the guide groove 140. The guide groove 140 is a Y-shaped groove, the width of the Y-shaped groove gradually narrows along the first direction until the width is equal to the width of the placement groove, and the guide groove 140 is used for guiding one end of the pressing rod 300 to enter the placement groove. Wherein, the placing slot of the first groove 114 is matched with the size of the press rod 300 and used for limiting the arrangement of the press rod 300 in the first direction.

In other embodiments, a guide groove 140 is formed at an opening of the second groove 124, and a placement groove is formed below the guide groove 140. The guide groove 140 is a Y-shaped groove, the width of the Y-shaped groove gradually narrows along the first direction until the width is equal to the width of the placement groove, and the guide groove 140 is used for guiding one end of the pressing rod 300 to enter the placement groove. The placing groove of the second groove 124 is matched with the size of the press rod 300 and used for limiting the press rod 300 to be arranged along the first direction.

As shown in fig. 5, the end 310 of the plunger 300 is flat, and has one end fitting into the first groove 114 and the other end fitting into the second groove 124. The rotation of the pressing rod 300 is limited by the side wall opposite to the first groove 114, the rotation of the pressing rod 300 is limited by the side wall opposite to the second groove 124, the pressing rod 300 is limited to be arranged in the first direction, and the end part 310 of the pressing rod 300 is ensured to always keep a uniform angle when the pressing rod 300 is placed or taken away from the material rack 10, so that the pressing rod 300 is taken and placed by matching with the clamping device 400.

As shown in fig. 6, in some embodiments, the stack 10 further includes a shoe 150. The base 150 is fixedly connected to the first support plate assembly 110 and the second support plate assembly 120. Specifically, the bottom bracket 150 may be formed by splicing a plurality of cross bars. 4 horizontal poles end to end in proper order constitute the frame board, 2 horizontal poles set up in the frame board on 2 relative horizontal poles in addition, first backup pad subassembly 110, second backup pad subassembly 120 and 2 horizontal poles adopt mounting fixed connection, can be the mode connection of screw, screw thread locking.

As shown in fig. 6, in the above embodiment, the stack 10 further includes a positioning guide. The positioning guide is provided on the shoe 150. The positioning guide includes a positioning plate 152 and a positioning guide opening 154. A positioning guide opening 154 is provided in the positioning plate 152, the positioning guide opening 154 being adapted to engage a positioning member on the transport mechanism. The positioning guide device is used for positioning the transfer device 200, the clamping device 400 and other equipment, and the clamping device 400 can take and place the pressing rod 300 in the height of the automatic placing area through the positioning guide port 154.

As shown in fig. 4, in the above embodiment, the stack 10 further includes an enclosure 160. The periphery of shroud 160 is secured to shoe 150. The shroud 160 is used to provide protection for the first and second support plate assemblies 110, 120 from foreign objects impacting the first and second support plate assemblies 110, 120.

In some embodiments, one end of the support rod is removably connected to the first support plate assembly and the other end of the support rod is removably connected to the second support plate assembly. The distance between the first groove 114 and the second groove 124 is adjusted by replacing the support rods 130 with different lengths, so that the pressing rod 300 penetrates through the first support plate assembly 110 and the second support plate assembly 120, thereby enabling the clamping device 400 to clamp both ends of the pressing rod 300.

In other embodiments, the first support plate is detachably connected to the first reinforcing plate, and the second support plate is detachably connected to the second reinforcing plate. The thickness of the first support plate 112 and the thickness of the second support plate 122 are partially or entirely changed so that the pressing rod 300 penetrates through the first support plate assembly 110 and the second support plate assembly 120, thereby enabling the clamping device 400 to clamp both ends of the pressing rod 300.

For example, as shown in fig. 7 and 8, in the guide groove region of the material rack, the sum of the thickness of the first support plate and the thickness of the first reinforcing plate in the first support plate assembly is a along the horizontal direction, in the placement groove region of the material rack, the sum of the thickness of the first support plate and the thickness of the first reinforcing plate in the first support plate assembly is b along the horizontal direction, two ends of the pressure rod in the placement groove are placed in the groove, and a is smaller than b, so that the pressure rod can penetrate through the material rack.

As shown in fig. 11, an embodiment according to the second aspect of the present application provides a cleaning apparatus 20, which includes a transfer device 200, a gripping device 400, and a rack 10 as described in any one of the embodiments of the first aspect. The stacks 10 as described in any of the above embodiments of the first aspect are removably connected to a transfer device 200, the transfer device 200 being for transfer of the stacks 10. The pressing rod 300 penetrates the first supporting plate assembly 110 and the second supporting plate assembly 120, and the clamping device 400 is used for clamping both ends of the pressing rod 300.

As shown in fig. 10, specifically, the press rods 300 in a batch are collectively arranged on the rack 10 of the press rods 300, the transfer device 200 is delivered to a designated position through the positioning guide opening 154 at the lower part of the rack 10, and the press rods 300 are automatically taken and placed in a butt joint mode.

According to the cleaning apparatus 20 provided in the embodiment of the second aspect of the present application, by using the rack 10 of any one of the embodiments of the first aspect, all the advantages of the above embodiments are achieved, and details are not repeated here.

As shown in fig. 1 to 10, a cleaning apparatus 20 according to an embodiment of the present disclosure includes a gripping device 400, a transferring device 200, and a stack 10. The stack 10 includes a first support plate assembly 110, a second support plate assembly 120, a plurality of support rods 130, a shoe 150, and an enclosure 160.

As shown in fig. 1 and 2, the end corners of the first supporting plate assembly 110 and the second supporting plate assembly 120 are fixedly connected by 4 supporting rods 130. Along the height direction of the first supporting plate assembly 110 and the second supporting plate assembly 120, a first groove 114 and a second groove 124 are respectively arranged on the first supporting plate assembly 110 and the second supporting plate assembly 120, and the first groove 114 and the second groove 124 are used for vertically stacking a plurality of pressing rods 300; preferably, the first and second grooves 114 and 124 are symmetrically formed on the first and second support plate assemblies 110 and 120, so as to prevent the side surface of the pressing rod 300 from being scratched. The first supporting plate assembly 110 includes a first supporting plate 112 and a first reinforcing plate 116 connected to the first supporting plate 112, the first supporting plate 112 is provided with a plurality of first grooves 114, the first reinforcing plate 116 is provided with a plurality of third grooves 118, wherein the first supporting plate 112 is a non-metal plate, and the first reinforcing plate 116 is a metal plate; the second supporting plate assembly 120 includes a second supporting plate 122 and a second reinforcing plate 126 connected to the second supporting plate 122, the second supporting plate 122 is provided with a plurality of second grooves 124, the second reinforcing plate 126 is provided with a plurality of fourth grooves 128, wherein the second supporting plate 122 is a non-metal plate, and the second reinforcing plate 126 is a metal plate; the metal plate is fixedly connected with the nonmetal plate (for example, the metal plate is connected with the nonmetal plate by screws) to play roles of fixing and preventing deformation; the width of the first groove 114 is smaller than the width of the third groove 118, and the width of the second groove 124 is smaller than the width of the fourth groove 128, so that the non-metal plate is always in direct contact with the surface of the pressing rod 300, and the metal plate is prevented from being in direct contact with the pressing rod 300, so that metal ions in the metal plate are prevented from being attached to the pressing rod 300, and the surface of the silicon wafer is secondarily polluted by the metal ions through the subsequent contact between the pressing rod 300 and the silicon wafer carrier.

The third groove 118 and the fourth groove 128 are through grooves in the horizontal direction, and the first groove 114 and the second groove 124 may be through grooves as a whole or only the top is a through groove in the horizontal direction, and the bottom is a blind groove. The through groove can be understood as partially dividing a non-metal plate or a metal plate; the blind slot may be understood as not dividing the non-metallic plate. Preferably, the top of the first groove 114 and the second groove 124 is a through groove, and the bottom is a blind groove, so that the preferable non-metal plate can not only meet the requirement of placing the compression bar 300, but also keep the integrity of the whole non-metal plate, and avoid deformation.

In addition, as shown in fig. 9, the inlet ends of the grooves 114 and 124 are Y-shaped grooves, and the top of the grooves is formed with a tapered guide groove 140 for guiding the plunger 300 into the first and second grooves 114 and 124. Specifically, the method comprises the following steps: as shown in fig. 4, the end of the pressing rod 300 is flat and is adapted to the lower portion of the Y-shaped groove to prevent the pressing rod 300 from rotating in the first groove 114 and the second groove 124, so as to ensure that the card on the side of the pressing rod 300 always keeps a uniform angle when the pressing rod 300 is placed in or taken out of the first groove 114 and the second groove 124.

The thickness of the Y-shaped grooves at the entrance ends of the first and second grooves 114, 124 is smaller than the thickness of the bottom ends of the first and second grooves 114, 124, and the pressure rod 300 is exposed to the outside for the clamping device 400 to clamp the pressure rod 300. As shown in fig. 6, the nonmetal plate is bent at the boundary between the feeding end and the bottom end to achieve the above purpose.

The first supporting plate assembly 110 and the second supporting plate assembly 120 may be formed by connecting a metal plate to the inside and a non-metal plate to the outside, or by connecting a metal plate to the inside and a non-metal plate to the outside. When the purpose that the thickness of the Y-shaped grooves at the inlet ends of the first groove 114 and the second groove 124 is smaller than the thickness of the bottom ends of the first groove 114 and the second groove 124 and the pressing rod 300 can be exposed is achieved, the arrangement mode of the non-metal plate is preferred because the processing technology of the non-metal plate is simple and the cost is low.

As shown in fig. 6 and 7, the platens are shown fully populated on the stack 10. The first supporting plate assembly 110 and the second supporting plate assembly 120 are disposed on the bottom base 150, and the bottom base 150 may be formed by splicing a plurality of cross rods or may be a single plate. Collet 150 forms for the horizontal pole concatenation, specifically, four horizontal poles end to end in proper order constitute the frame board, and two other horizontal poles set up in the frame board on two relative horizontal poles, and first backup pad subassembly 110 and second backup pad subassembly 120 adopt mounting fixed connection with two horizontal poles, can adopt to set up the connecting piece, then adopt screw, thread locking's mode to connect.

As shown in fig. 4, the stack 10 further includes a surrounding plate 160, and the surrounding side of the surrounding plate 160 is fixed on the frame plate, so as to protect the supporting portion of the stack 10 from being hit by foreign objects.

As shown in fig. 1, the stack 10 further includes a positioning guide device, which includes a positioning plate 152 and a positioning guide opening 154, wherein the positioning guide opening 154 is disposed on the positioning plate 152.

A cleaning device 20 can be used for cleaning silicon wafers, namely the silicon wafer cleaning device for cleaning and drying the silicon wafers, and particularly the cleaning device 20 comprises a clamping device 400 (such as a six-axis manipulator), an automatic rack conveying device, a cleaning and drying device and a transfer device 200 (such as an AGV trolley).

The cleaning and drying device comprises a feeding end and a discharging end, and the setting mode of the silicon wafer processing system comprises the following steps: one of the gripping devices 400 and one of the automated rack transport devices are disposed near a loading end of the cleaning and drying device, and the other of the gripping devices 400 and the other automated rack transport device are disposed near a unloading end of the cleaning and drying device. The at least one transfer device 200 is matched with the silicon wafer cleaning and drying device to take, place and transport the pressing rod at the feeding end and the discharging end.

The specific working mode is as follows: the material rack 10 provided with the pressing rod 300 is placed on the transferring device 200 and transferred to the automatic material rack conveying device, the automatic material rack conveying device is matched with the clamping device 400, the clamping device 400 sequentially clamps the material rack 10 and places the material rack on a carrier provided with silicon wafers and placed on the material loading end of the cleaning and drying device, the cleaning and drying device carries out process treatment on the carrier provided with the pressing rod 300, the clamping device 400 at the material unloading end of the cleaning and drying device takes away the pressing rod 300 again, the material rack 10 is placed on the no-load material rack 10, the material rack 10 is placed on the transferring device 200 at the moment, after the material rack 10 is loaded, the transferring device 200 conveys the material rack to the material rack 10 conveying device at the material loading end of the cleaning and drying device, and the process is repeated.

The material rack 10 is in butt joint with an automatic material rack conveying device to pick and place the pressing rod 300, the clamping device 400 (a six-axis manipulator) picks and places the pressing rod 300 in the height of an automatic placing area through the positioning guide port 154, and the guide groove arranged on the material rack 10 limits the pressing rod 300 by utilizing the special shapes (flat shapes) of the two ends of the pressing rod 300, so that the state consistency of the pressing rod 300 can be realized when the pressing rod 300 is mechanically grabbed at each time. After the transfer device 200 grabs the pressing rod 300 (avoiding both ends), the pressing rod 300 can slide down or lift along the guide groove of the material frame 10. The groove can be understood as a guide groove for the plunger 300.

The material rack 10 is in butt joint with an automatic pressure lever 300, the six-axis manipulator takes and places the pressure lever 300 in the height of an automatic placing area through the positioning guide opening 154, the pressure lever placing guide groove is limited by utilizing the special shapes of two ends of the pressure lever 300 and keeps consistent with the placing state of the six-axis manipulator, and the pressure lever 300 can slide down or lift along the pressure lever placing guide groove to ensure that the state of the pressure lever 300 is consistent when the mechanical grabbing is carried out each time.

As shown in fig. 10, the mass of pressing rods 300 are collectively arranged on the rack 10 of the pressing rods 300, and the transfer device 200 is carried to a designated position through the positioning guide opening 154 at the lower part of the rack 10, and the pressing rods 300 are automatically taken and placed in a butt joint mode.

The beneficial effects of this embodiment are: through the first groove 114 on the first supporting plate component 110 and the second groove 124 on the second supporting plate component 120, the pressing rods 300 can be stacked in batches, so that the pressing rods 300 can be taken and placed in the height of the automatic placing area by matching with the clamping device 400, the pressing rods 300 can also be transferred in batches by matching with the transfer device 200 and the automatic conveying device, the automation degree and the production efficiency are improved, and the manual operation is reduced.

In this application, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance; the term "plurality" means two or more unless expressly limited otherwise. The terms "mounted," "connected," "fixed," and the like are to be construed broadly, and for example, "connected" may be a fixed connection, a removable connection, or an integral connection; "coupled" may be direct or indirect through an intermediary. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as appropriate.

In the description of the present application, it is to be understood that the terms "upper", "lower", "left", "front", "rear", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the referred device or unit must have a specific direction, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present application.

In the description herein, the description of the terms "one embodiment," "some embodiments," "specific embodiments," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the application. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

The above description is only a preferred embodiment of the present application and is not intended to limit the present application, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims (10)

1. A rack, comprising:

the first support plate component (110), wherein a first groove (114) is arranged on the first support plate component (110);

a second supporting plate component (120), wherein a second groove (124) is formed in the second supporting plate component (120);

a plurality of support rods (130), one end of each support rod (130) being connected to the first support plate assembly (110), and the other end of each support rod (130) being connected to the second support plate assembly (120);

the rack is used for placing a plurality of pressing rods (300), the first groove (114) is used for accommodating one end of each pressing rod (300), and the second groove (124) is used for accommodating the other end of each pressing rod (300).

2. The stack of claim 1, wherein the first support plate assembly (110) comprises:

the first supporting plate (112), the first groove (114) is arranged on the first supporting plate (112);

the second backer plate assembly (120) includes: the second supporting plate (122), the second groove (124) is arranged on the second supporting plate (122);

the number of the first grooves (114) and the number of the second grooves (124) are multiple, and each first groove (114) and one second groove (124) are symmetrically arranged.

3. The stack of claim 1 or 2,

the first groove (114) comprises: a guide groove (140), the guide groove (140) being disposed at an opening of the first groove (114); a placement groove disposed below the guide groove (140); the guide groove (140) is a Y-shaped groove, the width of the Y-shaped groove in the first direction gradually narrows until the width of the Y-shaped groove is equal to that of the placing groove, and the guide groove (140) is used for guiding one end of the pressing rod (300) to enter the placing groove; and/or

The second groove (124) comprises: a guide groove (140), the guide groove (140) being disposed at an opening of the first groove (114); a placement groove disposed below the guide groove (140); the guide groove (140) is a Y-shaped groove, the width of the Y-shaped groove in the first direction gradually narrows until the width of the Y-shaped groove is equal to the width of the placing groove, and the guide groove (140) is used for guiding one end of the pressing rod (300) to enter the placing groove.

4. The stack of claim 3,

the placing groove of the first groove (114) is matched with the end part (310) of the press rod (300), and the placing groove is used for limiting the press rod (300) to be arranged in a first direction; and/or

The placing groove of the second groove (124) is matched with the end part (310) of the press rod (300), and the placing groove is used for limiting the press rod (300) to be arranged in the first direction.

5. The stack of claim 3,

the first support plate assembly (110) further comprises: a first reinforcing plate (116), the first reinforcing plate (116) being connected to the first support plate (112);

the second backer plate assembly (120) includes: a second reinforcing plate (126), the second reinforcing plate (126) being connected to the second support plate (122).

6. The stack of claim 5,

along the peripheral side of the first groove (114), a third groove (118) is arranged on the first reinforcing plate (116), the width of the third groove (118) is larger than that of the first groove (114), and the third groove (118) is used for avoiding one end of the compression bar (300); and/or

And a fourth groove (128) is formed in the second reinforcing plate (126) along the peripheral side of the second groove (124), the width of the fourth groove (128) is larger than that of the second groove (124), and the fourth groove (128) is used for avoiding the other end of the compression bar (300).

7. The stack of claim 1, further comprising:

the bottom support (150), the bottom support (150) is fixedly connected with the first supporting plate component (110) and the second supporting plate component (120) respectively; and/or

And the periphery of the coaming (160) is fixed on the bottom support (150).

8. The stack of claim 7, further comprising:

the positioning guide device is arranged on the bottom support (150);

the positioning and guiding device comprises: the positioning device comprises a positioning plate (152) and a positioning guide opening (154), wherein the positioning guide opening (154) is arranged on the positioning plate (152);

the positioning guide opening (154) is adapted to engage a positioning member on the transport mechanism.

9. The stack of claim 5,

one end of the supporting rod (130) is detachably connected with the first supporting plate component (110), and the other end of the supporting rod (130) is detachably connected with the second supporting plate component (120);

and/or

The first support plate (112) and the first reinforcing plate (116) are detachably connected, and the second support plate (122) and the second reinforcing plate (126) are detachably connected.

10. A cleaning apparatus, comprising:

a transfer device (200);

a gripping device (400);

the stack according to any one of claims 1 to 9, removably connected to said transfer device (200), said transfer device (200) being used for the transfer of said stack;

the pressing rod (300) penetrates through the first supporting plate assembly (110) and the second supporting plate assembly (120), and the clamping device (400) is used for clamping two ends of the pressing rod (300).

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