CN215449029U - Visual positioning and detecting device - Google Patents
Visual positioning and detecting device Download PDFInfo
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- CN215449029U CN215449029U CN202121758917.XU CN202121758917U CN215449029U CN 215449029 U CN215449029 U CN 215449029U CN 202121758917 U CN202121758917 U CN 202121758917U CN 215449029 U CN215449029 U CN 215449029U
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Abstract
The application provides a visual positioning and detection device, includes: a mounting seat; the photographing component is arranged on the mounting seat and is used for photographing a workpiece before marking so as to position the workpiece and photographing the workpiece after marking so as to detect whether the workpiece is qualified or not; the first polishing assembly is arranged on the mounting seat and used for polishing the workpiece before marking, a phase forming hole for enabling the photographing assembly to form a phase on the workpiece is formed in the first polishing assembly, and the photographing assembly is opposite to the phase forming hole; and the second polishing component is arranged on the mounting seat and used for polishing the workpiece after marking. The application provides a visual positioning and detection device possesses location and detection function simultaneously, and the function is diversified, and has effectively reduced the cost expense, and the subassembly is made a photograph to the subassembly sharing with the second simultaneously to first subassembly of polishing, and its structure is compacter, and occupation space is littleer, is favorable to miniaturized development.
Description
Technical Field
The application belongs to the technical field of positioning detection, and particularly relates to a visual positioning and detecting device.
Background
In the production and manufacturing of IC products, due to the complicated process steps, in order to ensure the traceability of the whole process chain and not damage components, a laser marking machine is used to mark specific character strings corresponding to information such as clear serial numbers, product names, manufacturers and the like at specific positions on the plastic-sealed IC chip. Before laser marking, in order to mark the position accuracy, need carry out visual positioning to the product, and laser marking back still need detect the product of marking to distinguish the product of marking badly. However, the existing visual positioning device and the detection device are usually separately arranged, and have single functions and higher cost.
SUMMERY OF THE UTILITY MODEL
An object of the application is to provide a visual positioning and detection device, solve the visual positioning device among the prior art and product detection device and set up the function singleness and the higher technical problem of cost that exist alone.
In order to achieve the purpose, the technical scheme adopted by the application is as follows: there is provided a visual positioning and detection device comprising:
a mounting seat;
the photographing component is arranged on the mounting seat and is used for photographing a workpiece before marking so as to position the workpiece and photographing the workpiece after marking so as to detect whether the workpiece is qualified or not;
the first polishing assembly is arranged on the mounting seat and used for polishing the workpiece before marking, a phase forming hole for enabling the photographing assembly to form a phase on the workpiece is formed in the first polishing assembly, and the photographing assembly is opposite to the phase forming hole; and the number of the first and second groups,
and the second polishing component is arranged on the mounting seat and used for polishing the workpiece after marking.
Furthermore, the first lighting assembly comprises a first adjusting plate, a first mounting plate, a first light source, a first fastener and a second fastener, the first adjusting plate is provided with a first adjusting groove extending along the Z-axis direction, the mounting base is provided with a first fixing hole, the first fastener penetrates through any position of the first adjusting groove and is fixedly connected with the first fixing hole,
offer the second adjustment tank that extends the setting along the X axle direction on the first regulating plate, be provided with the second fixed orifices on the first mounting panel, the second fastener passes the optional position of second adjustment tank and with the second fixed orifices is connected fixedly, first light source set up in on the first mounting panel.
Furthermore, the second polishing assembly comprises a second adjusting plate, a second mounting plate, a second light source, a third fastener and a fourth fastener, a third adjusting groove extending along the Z-axis direction is formed in the second adjusting plate, a third fixing hole is formed in the mounting seat, the third fastener penetrates through any position of the third adjusting groove and is fixedly connected with the third fixing hole,
offer the fourth adjustment tank that extends the setting along the X axle direction on the second regulating plate, be provided with the fourth fixed orifices on the second mounting panel, the fourth fastener passes the optional position of fourth adjustment tank and with the fourth fixed orifices is connected fixedly, the second light source set up in on the second mounting panel.
Furthermore, the second light source is arranged on the second mounting plate in a turnover mode, an arc-shaped groove is formed in the second mounting plate, a fifth fixing hole is formed in the second light source, and a fifth fastener penetrates through any position of the arc-shaped groove and is fixedly connected with the fifth fixing hole.
Furthermore, the second polishing assemblies comprise two second polishing assemblies, and the two second polishing assemblies are arranged on two opposite sides of the first polishing assembly at intervals along the X-axis direction.
Furthermore, the visual positioning and detecting device further comprises a moving mechanism, the moving mechanism comprises a support frame and a first driving mechanism, the mounting seat is movably arranged on the support frame along the X-axis direction, and the first driving mechanism is used for driving the mounting seat to move along the X-axis direction.
Further, visual positioning and detection device still includes focus adjustment mechanism, focus adjustment mechanism includes first base and second actuating mechanism, first base set up in on the mount pad, the subassembly of shooing can follow Z axle direction set up movably in on the first base, second actuating mechanism is used for the drive the subassembly of shooing removes the focus in order to adjust the subassembly of shooing along Z axle direction.
Further, visual positioning and detection device still includes coaxial adjustment mechanism, coaxial adjustment mechanism includes second base and third actuating mechanism, the second base can follow Z axle direction set up with moving about on the first base, the subassembly of shooing can follow X axle direction set up with moving about on the second base, third actuating mechanism is used for the drive the subassembly of shooing moves so that the subassembly of shooing is just right become the center in looks hole along X axle direction.
Further, the photographing assembly comprises a camera arranged on the mounting seat and a lens arranged on the camera.
Further, be provided with the protection casing on the mount pad, the protection casing cover is located outside the subassembly of shooing.
The application provides a visual positioning and detection device's beneficial effect lies in: through setting up the subassembly of shooing, and cooperate first subassembly of polishing and the subassembly is polished to the second, utilize first subassembly of polishing to polish to the work piece before the mark of beating, thereby realize carrying out the accurate positioning to the work piece before the mark of beating, and utilize the second to polish the subassembly and polish to the work piece after the mark of beating, thereby realize carrying out the accurate detection to the work piece after the mark of beating, for setting up vision positioner and detection device alone, the vision positioning and detection device of this application possess location and detection function simultaneously, the function is diversified, and effectively reduce the cost expense, the subassembly is polished to the subassembly and the second and is used same subassembly of shooing in common simultaneously, its structure is compacter, occupation space is littleer, be favorable to the miniaturization development.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the embodiments or the prior art descriptions will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without inventive exercise.
Fig. 1 is a schematic perspective view of a visual positioning and detecting device according to an embodiment of the present disclosure;
FIG. 2 is a schematic perspective view of FIG. 1 at another angle;
fig. 3 is a schematic assembled perspective structure diagram of the photographing assembly, the first lighting assembly and the second lighting assembly adopted in the embodiment of the present application;
fig. 4 is an exploded view of fig. 3.
Wherein, in the figures, the respective reference numerals:
10. a mounting seat; 11. a first fixing hole; 12. a third fixing hole; 20. a photographing component; 21. a camera; 22. a lens; 30. a first lighting assembly; 31. a phase forming hole; 32. a first adjusting plate; 321. a first regulating groove; 322. a second regulating groove; 33. a first mounting plate; 331. a second fixing hole; 34. a first light source; 40. a second polishing assembly; 41. a second adjusting plate; 411. a third regulating groove; 412. a fourth adjustment groove; 42. a second mounting plate; 421. a fourth fixing hole; 422. an arc-shaped slot; 43. a second light source; 50. a moving mechanism; 51. a support frame; 52. a first drive mechanism; 60. a first base; 70. a second base; 80. a shield.
Detailed Description
In order to make the technical problems, technical solutions and advantageous effects to be solved by the present application clearer, the present application is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present application and are not intended to limit the present application.
It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or be indirectly connected to the other element.
It will be understood that the terms "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like, refer to an orientation or positional relationship illustrated in the drawings for convenience in describing the present application and to simplify description, and do not indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the present application.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present application, "a plurality" means two or more unless specifically limited otherwise.
Referring to fig. 1 and fig. 3 together, the visual positioning and detecting device provided in the present application will now be described. The visual positioning and detecting device provided by the application comprises a mounting seat 10, a photographing assembly 20, a first lighting assembly 30 and a second lighting assembly 40. The photographing component 20 is disposed on the mounting base 10 and is used for photographing a workpiece before marking, so as to position the workpiece. The photographing component 20 is also used for photographing the marked workpiece, so that whether the marking of the workpiece is qualified or not is detected, and the yield of the product is ensured. The first polishing assembly 30 is disposed on the mounting base 10 and is used for polishing a workpiece before marking, so as to improve positioning accuracy. The first lighting assembly 30 is provided with a photo forming hole 31 for the photographing assembly 20 to form a phase on the workpiece, and the photographing assembly 20 is opposite to the photo forming hole 31. Through the setting of the photo forming hole 31, the workpiece can be conveniently photographed by the photographing component 20. The second polishing assembly 40 is arranged on the mounting base 10 and used for polishing the workpiece after marking, so that the product detection precision can be improved.
Before marking, the first lighting assembly 30 works, at the moment, the first lighting assembly 30 lights the workpiece, and the photographing assembly 20 photographs the workpiece before marking through the imaging hole 31, so that the workpiece can be positioned. After the workpiece marking is completed, the second polishing assembly 40 works, the workpiece is polished by the second polishing assembly 40 at the moment, and the workpiece marked by the photographing assembly 20 is photographed again, so that whether the workpiece marking is qualified or not can be detected, and the product detection precision is improved.
The utility model provides a visual positioning and detection device, through setting up the subassembly 20 of shooing, and cooperate first subassembly 30 and the second of polishing to polish subassembly 40, utilize first subassembly 30 of polishing to polish the work piece before marking, thereby realize carrying out the accurate positioning to the work piece before marking, and utilize the second to polish subassembly 40 and polish the work piece after marking, thereby realize carrying out the accurate detection to the work piece after marking, for setting up visual positioning device and detection device alone, the visual positioning and detection device of this application possess simultaneously location and detection function, the function is diversified, and effectively reduce the cost, the subassembly 20 of shooing is beaten with the second to subassembly 40 sharing to first subassembly 30 of polishing simultaneously, its structure is compacter, occupation space is littleer, be favorable to the miniaturization development.
Further, referring to fig. 3 to 4, as an embodiment of the visual positioning and detecting device provided by the present application, the first lighting assembly 30 includes a first adjusting plate 32, a first mounting plate 33, a first light source 34, a first fastening member (not shown) and a second fastening member (not shown). First adjusting plate 32 is provided with a first adjusting groove 321 extending along the Z-axis direction, mounting base 10 is provided with a first fixing hole 11, and a first fastener passes through any position of first adjusting groove 321 and is connected and fixed with first fixing hole 11, so that first adjusting plate 32 can be adjustably arranged on mounting base 10 along the Z-axis direction. The first adjusting plate 32 is provided with a second adjusting groove 322 extending along the X-axis direction, the first mounting plate 33 is provided with a second fixing hole 331, and the second fastener passes through any position of the second adjusting groove 322 and is fixedly connected with the second fixing hole 331, so that the first mounting plate 33 can be adjustably arranged on the first adjusting plate 32 along the X-axis direction, and the first light source 34 is arranged on the first mounting plate 33. Through the setting of first regulating plate 32, first mounting panel 33 to make first light source 34 can adjust along Z axle X axle direction, through the distance of adjusting first light source 34 apart from the work piece to and the position of polishing of first light source 34, guarantee the best effect that the light source polished, and then improve the positioning accuracy in fact. And the adjustment is very simple and convenient.
Further, referring to fig. 3 to 4, as an embodiment of the visual positioning and detecting device provided by the present application, the second lighting assembly 40 includes a second adjusting plate 41, a second mounting plate 42, a second light source 43, a third fastening member (not shown) and a fourth fastening member (not shown). The second adjusting plate 41 is provided with a third adjusting slot 411 extending along the Z-axis direction, the mounting base 10 is provided with a third fixing hole 12, and a third fastener passes through any position of the third adjusting slot 411 and is fixedly connected with the third fixing hole 12, so that the second adjusting plate 41 can be adjustably arranged on the mounting base 10 along the Z-axis direction. The second adjusting plate 41 is provided with a fourth adjusting groove 412 extending along the X-axis direction, the second mounting plate 42 is provided with a fourth fixing hole 421, and the fourth fastener passes through any position of the fourth adjusting groove 412 and is fixedly connected with the fourth fixing hole 421, so that the second mounting plate 42 can be adjustably arranged on the second adjusting plate 41 along the X-axis direction, and the second light source 43 is arranged on the second mounting plate 42. Through the setting of second regulating plate 41, second mounting panel 42 to make second light source 43 can adjust along Z axle X axle direction, through the distance of adjusting second light source 43 distance work piece to and the position of polishing of second light source 43, guarantee the best effect that the light source polished, and then improve and detect the precision. And the adjustment is very simple and convenient.
Further, referring to fig. 3 to 4, as a specific embodiment of the visual positioning and detecting device provided by the present application, the second light source 43 is disposed on the second mounting plate 42 in a rotatable manner, the second mounting plate 42 is provided with an arc-shaped slot 422, the second light source 43 is provided with a fifth fixing hole (not shown), and a fifth fastening member (not shown) passes through any position of the arc-shaped slot 422 and is connected and fixed with the fifth fixing hole. Through the arrangement of the arc-shaped slot 422, the second light source 43 can be arranged on the second mounting plate 42 in a turnover manner, so that the light-emitting angle of the second light source 43 can be adjusted, and the optimal effect of polishing is realized.
Further, referring to fig. 3 to 4, as an embodiment of the visual positioning and detecting device provided by the present application, the second polishing assembly 40 includes two second polishing assemblies 40, and the two second polishing assemblies 40 are disposed at two opposite sides of the first polishing assembly 30 at intervals along the X-axis direction. By providing two second polishing assemblies 40, both sides of the workpiece can be polished without interfering with the first polishing assembly 30.
Further, referring to fig. 1 to fig. 2, as an embodiment of the visual positioning and detecting device provided by the present application, the visual positioning and detecting device further includes a moving mechanism 50, the moving mechanism 50 includes a supporting frame 51 and a first driving mechanism 52, the mounting base 10 is movably disposed on the supporting frame 51 along the X-axis direction, and the first driving mechanism 52 is used for driving the mounting base 10 to move along the X-axis direction. When a workpiece on the marking station needs to be positioned, the first driving mechanism 52 drives the mounting base 10 to move along the X-axis direction, so that the photographing component 20, the first polishing component 30 and the second polishing component 40 on the mounting base 10 move synchronously, thereby positioning all workpieces on the marking station and effectively improving the working efficiency. When the positioning is completed, the first driving mechanism 52 drives the mounting base 10 to leave the marking station, so as to avoid interfering the marking operation. After marking operation is completed, the workpiece moves to the detection station, at the moment, the first driving mechanism 52 drives the mounting seat 10 to move to the position above the detection station, the first driving mechanism 52 drives the mounting seat 10 to move along the X-axis direction, all the workpieces on the detection station are detected, and detection efficiency is effectively improved.
Through setting up moving mechanism 50, utilize first actuating mechanism 52 drive mount 10 to remove along the X axle direction to make the subassembly 20 of shooing, the first subassembly 30 of polishing and the synchronous motion of second subassembly 40 of polishing that lie in on mount 10, thereby can realize the location of a plurality of work pieces and detect, effectively improve work efficiency.
Further, referring to fig. 1 to 2, as a specific embodiment of the visual positioning and detecting device provided in the present application, the supporting frame 51 is a gantry structure, which can be erected on various occasions for use, and is flexible in installation and strong in versatility.
Further, referring to fig. 3 to 4, as an embodiment of the visual positioning and detecting device provided by the present application, the visual positioning and detecting device further includes a focus adjusting mechanism, the focus adjusting mechanism includes a first base 60 and a second driving mechanism (not shown), the first base 60 is disposed on the mounting base 10, and the photographing assembly 20 is movably disposed on the first base 60 along the Z-axis direction. The second driving mechanism is used for driving the photographing component 20 to move along the Z-axis direction, so that the focal length of the photographing component 20 can be adjusted, and the adjustment is very simple and convenient.
Further, referring to fig. 3 to 4, as an embodiment of the visual positioning and detecting device provided by the present application, the visual positioning and detecting device further includes a coaxial adjusting mechanism, and the coaxial adjusting mechanism includes a second base 70 and a third driving mechanism (not shown). The second base 70 is movably disposed on the first base 60 in the Z-axis direction. The photographing component 20 can be movably disposed on the second base 70 along the X-axis direction, and the third driving mechanism is used for driving the photographing component 20 to move along the X-axis direction, so that the position of the photographing component 20 can be adjusted, and the photographing component 20 is directly opposite to the center of the imaging hole 31.
Further, referring to fig. 3 to 4, as an embodiment of the visual positioning and detecting device provided by the present application, the photographing assembly 20 includes a camera 21 disposed on the mounting base 10 and a lens 22 disposed on the camera 21. The camera 21 adopts an 8K line scanning camera 21, a line scanning lens 22 is added, the view field width can reach 150mm, a plurality of workpieces can be scanned at one time, and the efficiency of positioning and detection is effectively improved.
Further, referring to fig. 1 to fig. 2, as an embodiment of the visual positioning and detecting device provided in the present application, a protective cover 80 is disposed on the mounting base 10, and the protective cover 80 is disposed outside the photographing assembly 20. The camera 21 and the lens 22 can be well protected by the protective cover 80.
The working process of one embodiment of the visual positioning and detecting device of the present application is as follows:
firstly, when a tray provided with a plurality of workpieces is conveyed to a marking station by a production line, the moving mechanism 50 drives the mounting base 10 to move along the X-axis direction, so that the photographing component 20, the first polishing component 30 and the second polishing component 40 on the mounting base 10 move synchronously, and at the moment, the photographing component 20 and the first polishing component 30 work, so that all the workpieces on the marking station are scanned, and the workpieces are positioned.
After the positioning is completed, the moving mechanism 50 drives the mounting seat 10 to leave the marking station, so that the interference of marking operation is avoided.
After marking operation is completed, a material tray provided with a plurality of workpieces is transmitted to a detection station through a production line, at the moment, the moving mechanism 50 drives the mounting seat 10 to move above the detection station, the moving mechanism 50 drives the mounting seat 10 to move along the X-axis direction, the photographing component 20 and the second polishing component 40 work, scanning of all the workpieces on the detection station is achieved, and detection of the workpieces after marking is achieved.
The above description is only exemplary of the present application and should not be taken as limiting the present application, as any modification, equivalent replacement, or improvement made within the spirit and principle of the present application should be included in the protection scope of the present application.
Claims (10)
1. A visual positioning and detection device, comprising:
a mounting seat;
the photographing component is arranged on the mounting seat and is used for photographing a workpiece before marking so as to position the workpiece and photographing the workpiece after marking so as to detect whether the workpiece is qualified or not;
the first polishing assembly is arranged on the mounting seat and used for polishing the workpiece before marking, a phase forming hole for enabling the photographing assembly to form a phase on the workpiece is formed in the first polishing assembly, and the photographing assembly is opposite to the phase forming hole; and the number of the first and second groups,
and the second polishing component is arranged on the mounting seat and used for polishing the workpiece after marking.
2. The visual positioning and inspection device of claim 1, wherein: the first lighting assembly comprises a first adjusting plate, a first mounting plate, a first light source, a first fastener and a second fastener, a first adjusting groove extending along the Z-axis direction is formed in the first adjusting plate, a first fixing hole is formed in the mounting base, the first fastener penetrates through any position of the first adjusting groove and is fixedly connected with the first fixing hole,
offer the second adjustment tank that extends the setting along the X axle direction on the first regulating plate, be provided with the second fixed orifices on the first mounting panel, the second fastener passes the optional position of second adjustment tank and with the second fixed orifices is connected fixedly, first light source set up in on the first mounting panel.
3. The visual positioning and inspection device of claim 1, wherein: the second polishing component comprises a second adjusting plate, a second mounting plate, a second light source, a third fastener and a fourth fastener, a third adjusting groove extending along the Z-axis direction is formed in the second adjusting plate, a third fixing hole is formed in the mounting seat, the third fastener penetrates through any position of the third adjusting groove and is fixedly connected with the third fixing hole,
offer the fourth adjustment tank that extends the setting along the X axle direction on the second regulating plate, be provided with the fourth fixed orifices on the second mounting panel, the fourth fastener passes the optional position of fourth adjustment tank and with the fourth fixed orifices is connected fixedly, the second light source set up in on the second mounting panel.
4. The visual positioning and inspection device of claim 3, wherein: the second light source is arranged on the second mounting plate in a turnover mode, an arc-shaped groove is formed in the second mounting plate, a fifth fixing hole is formed in the second light source, and a fifth fastener penetrates through any position of the arc-shaped groove and is fixedly connected with the fifth fixing hole.
5. The visual positioning and inspection device of claim 1, wherein: the second polishing assemblies comprise two second polishing assemblies, and the two second polishing assemblies are arranged on two opposite sides of the first polishing assembly at intervals along the X-axis direction.
6. The visual positioning and inspection device of claim 1, wherein: the visual positioning and detecting device further comprises a moving mechanism, the moving mechanism comprises a support frame and a first driving mechanism, the mounting seat can be movably arranged on the support frame along the X-axis direction, and the first driving mechanism is used for driving the mounting seat to move along the X-axis direction.
7. The visual positioning and inspection device of claim 1, wherein: visual positioning and detection device still includes focus adjustment mechanism, focus adjustment mechanism includes first base and second actuating mechanism, first base set up in on the mount pad, the subassembly of shooing can follow Z axle direction set up with moving about on the first base, second actuating mechanism is used for the drive the subassembly of shooing removes the focus in order to adjust the subassembly of shooing along Z axle direction.
8. The visual positioning and inspection device of claim 7, wherein: visual positioning and detection device still includes coaxial adjustment mechanism, coaxial adjustment mechanism includes second base and third actuating mechanism, the second base can follow Z axle direction set up with moving about on the first base, the subassembly of shooing can follow X axle direction set up with moving about on the second base, third actuating mechanism is used for the drive the subassembly of shooing removes so that the subassembly of shooing is just right become the center in looks hole along X axle direction.
9. The visual positioning and inspection device of any of claims 1-8, wherein: the photographing assembly comprises a camera arranged on the mounting seat and a lens arranged on the camera.
10. The visual positioning and inspection device of any of claims 1-8, wherein: be provided with the protection casing on the mount pad, the protection casing cover is located outside the subassembly of shooing.
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CN202121758917.XU CN215449029U (en) | 2021-07-29 | 2021-07-29 | Visual positioning and detecting device |
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CN202121758917.XU CN215449029U (en) | 2021-07-29 | 2021-07-29 | Visual positioning and detecting device |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
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CN114682931A (en) * | 2022-04-01 | 2022-07-01 | 武汉华工激光工程有限责任公司 | Laser drilling process method and device for sapphire sheet |
CN114799546A (en) * | 2022-04-01 | 2022-07-29 | 武汉华工激光工程有限责任公司 | Full-automatic laser drilling method and equipment |
CN116087216A (en) * | 2022-12-14 | 2023-05-09 | 广东九纵智能科技有限公司 | Multi-axis linkage visual detection equipment, method and application |
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2021
- 2021-07-29 CN CN202121758917.XU patent/CN215449029U/en active Active
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
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CN114682931A (en) * | 2022-04-01 | 2022-07-01 | 武汉华工激光工程有限责任公司 | Laser drilling process method and device for sapphire sheet |
CN114799546A (en) * | 2022-04-01 | 2022-07-29 | 武汉华工激光工程有限责任公司 | Full-automatic laser drilling method and equipment |
CN116087216A (en) * | 2022-12-14 | 2023-05-09 | 广东九纵智能科技有限公司 | Multi-axis linkage visual detection equipment, method and application |
CN116087216B (en) * | 2022-12-14 | 2024-02-20 | 广东九纵智能科技有限公司 | Multi-axis linkage visual detection equipment, method and application |
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Effective date of registration: 20220805 Address after: 518000 101, building 6, Wanyan Industrial Zone, Qiaotou community, Fuhai street, Bao'an District, Shenzhen City, Guangdong Province Patentee after: Shenzhen Han's Semiconductor Equipment Technology Co.,Ltd. Address before: 518000 No. 9988 Shennan Road, Nanshan District, Shenzhen, Guangdong Patentee before: HAN'S LASER TECHNOLOGY INDUSTRY GROUP Co.,Ltd. |