CN215427444U - 一种快速脱气装置 - Google Patents
一种快速脱气装置 Download PDFInfo
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- CN215427444U CN215427444U CN202121284814.4U CN202121284814U CN215427444U CN 215427444 U CN215427444 U CN 215427444U CN 202121284814 U CN202121284814 U CN 202121284814U CN 215427444 U CN215427444 U CN 215427444U
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- 238000007872 degassing Methods 0.000 claims abstract description 25
- 238000005485 electric heating Methods 0.000 claims abstract description 25
- 238000001914 filtration Methods 0.000 claims abstract description 18
- 238000007789 sealing Methods 0.000 claims abstract description 18
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 17
- 238000007599 discharging Methods 0.000 claims abstract description 13
- 239000007921 spray Substances 0.000 claims abstract description 12
- 229920000742 Cotton Polymers 0.000 claims abstract description 10
- 230000000007 visual effect Effects 0.000 claims description 3
- 239000000463 material Substances 0.000 abstract description 9
- 238000011403 purification operation Methods 0.000 abstract description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 229910052799 carbon Inorganic materials 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 239000000796 flavoring agent Substances 0.000 description 1
- 235000019634 flavors Nutrition 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
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CN202121284814.4U CN215427444U (zh) | 2021-06-09 | 2021-06-09 | 一种快速脱气装置 |
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Cited By (1)
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CN114718875A (zh) * | 2022-06-08 | 2022-07-08 | 中科仪(南通)半导体设备有限责任公司 | 具有零部件防腐蚀功能的真空泵气体过滤装置 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN114718875A (zh) * | 2022-06-08 | 2022-07-08 | 中科仪(南通)半导体设备有限责任公司 | 具有零部件防腐蚀功能的真空泵气体过滤装置 |
CN114718875B (zh) * | 2022-06-08 | 2022-08-23 | 中科仪(南通)半导体设备有限责任公司 | 具有零部件防腐蚀功能的真空泵气体过滤装置 |
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Effective date of registration: 20230504 Address after: 212000 No.298, daijiamen Road, Zhenjiang high tech Zone, Zhenjiang City, Jiangsu Province Patentee after: Yinshi electronic materials (Jiangsu) Co.,Ltd. Patentee after: Yinshi digital materials (Jiangsu) Co.,Ltd. Address before: No. 19, DanJia Road, Xinghua Economic Development Zone, Taizhou, Jiangsu 225775 Patentee before: Yinshi new material technology (Jiangsu) Co.,Ltd. |
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Address after: 212000 No.298, daijiamen Road, Zhenjiang high tech Zone, Zhenjiang City, Jiangsu Province Patentee after: Yinshi electronic materials (Jiangsu) Co.,Ltd. Country or region after: China Patentee after: Jiangsu Yinshi New Materials Group Co.,Ltd. Address before: 212000 No.298, daijiamen Road, Zhenjiang high tech Zone, Zhenjiang City, Jiangsu Province Patentee before: Yinshi electronic materials (Jiangsu) Co.,Ltd. Country or region before: China Patentee before: Yinshi digital materials (Jiangsu) Co.,Ltd. |
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CP03 | Change of name, title or address |