CN215404657U - 碳化硅晶体生长用坩埚及碳化硅晶体生长装置 - Google Patents
碳化硅晶体生长用坩埚及碳化硅晶体生长装置 Download PDFInfo
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CN116815320B (zh) * | 2023-06-28 | 2024-01-12 | 通威微电子有限公司 | 碳化硅晶体生长装置、方法及碳化硅晶体 |
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Effective date of registration: 20220422 Address after: 321000 plant 3, No. 2688, south 2nd Ring West Road, qiubin street, Wucheng District, Jinhua City, Zhejiang Province (self declaration) Patentee after: Zhejiang Fuxin Microelectronics Technology Co.,Ltd. Address before: 321000 South Second Ring West Road, Jinhua, Zhejiang Province, No. 2688 Patentee before: ZHEJIANG BOLANTE SEMICONDUCTOR TECHNOLOGY Co.,Ltd. |
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Effective date of registration: 20230525 Address after: 321000 south side of Building 1, No. 2688, south 2nd Ring West Road, qiubin street, Wucheng District, Jinhua City, Zhejiang Province Patentee after: Jinhua Bolante New Material Co.,Ltd. Address before: 321000 plant 3, No. 2688, south 2nd Ring West Road, qiubin street, Wucheng District, Jinhua City, Zhejiang Province (self declaration) Patentee before: Zhejiang Fuxin Microelectronics Technology Co.,Ltd. |