CN215394564U

CN215394564U - Cleaning machine before OLED and substrate laser stripping

Info

Publication number: CN215394564U
Application number: CN202121314635.0U
Authority: CN
Inventors: 高军鹏; 李世杰; 康宏刚; 张立文
Original assignee: Shenzhen Etmade Automatic Equipment Co Ltd
Current assignee: Shenzhen Etmade Automatic Equipment Co Ltd
Priority date: 2021-06-15
Filing date: 2021-06-15
Publication date: 2022-01-04
Anticipated expiration: 2031-06-15

Abstract

The utility model discloses a cleaning machine before laser stripping of an OLED (organic light emitting diode) and a substrate, which comprises a material receiving mechanism, a transfer platform, a transfer arm, a grinding platform, a grinding mechanism, a two-fluid and air drying mechanism and a discharging mechanism, wherein the material receiving mechanism is arranged at the front end of a machine table, and the transfer platform is arranged at the side part of the material receiving mechanism at intervals; the grinding platform is horizontally arranged on the machine platform; the grinding mechanism is arranged above the grinding platform in a spanning mode, and the grinding mechanism is provided with grinding disc assemblies corresponding to the double grinding channels respectively; the transfer arm is arranged between the material receiving mechanism and the transfer platform in a spanning mode; the two fluid and air drying mechanisms comprise two groups which are respectively arranged at the side parts of the two grinding channels of the grinding platform; the blanking mechanism is arranged at the rear end of the machine table. The utility model improves the grinding efficiency by 12-16 times, flexibly adapts to different capacity requirements, effectively realizes the protection and isolation of the FPC during grinding by the functions of turnover covering protection and double-layer air curtain blocking, and further improves the grinding cleanliness by adopting the technology of two-fluid mixed spraying and air drying.

Description

Cleaning machine before OLED and substrate laser stripping

Technical Field

The utility model relates to the field of automation equipment, in particular to a cleaning machine used before laser stripping of an OLED (organic light emitting diode) and a substrate.

Background

In the field of flat panel display device production equipment, related parts comprise a glass substrate, a cover plate, an FPC (flexible printed circuit) and various optical films, and when the processes of assembling, adhering and the like of the parts of the flat panel display device are carried out, a pre-processing process is required. Such as a cleaning process, is an essential front-end process for assembling and bonding flat panel display devices, and is used for cleaning the surface of a screen.

In the production process of an OLED screen, a layer of interlayer adhesive is arranged between an OLED and an upper substrate, the interlayer adhesive needs to be stripped and removed by adopting laser, the laser irradiates the surface of the substrate, penetrates through the substrate and then is irradiated onto the interlayer adhesive, and the adhesive layer stripping function is realized. In order to ensure that the laser can effectively penetrate through the substrate and reduce the blocking situation caused by impurities on the surface of the substrate, the surface of the substrate needs to be cleaned before laser stripping. Because the sundries adhered to the surface of the substrate are difficult to remove, the commonly adopted process is grinding and cleaning, namely, the grinding disc is tightly attached to the surface of the substrate, the surface of the substrate is ground through the rotation of the grinding disc, and the sundries are separated from the surface of the substrate and then are removed. The traditional single-machine grinding and cleaning process adopts a single-chip grinding mode, has low grinding efficiency and cannot meet the online grinding requirement of an OLED high-speed automatic production line. In addition, because the side part of the OLED is connected with the FPC, substances such as water vapor and the like during grinding fall onto the FPC in a sputtering mode in the grinding and cleaning process by adopting the traditional grinding and cleaning process, and the inner circuit of the FPC can be corroded, so that the FPC needs to be isolated and protected in the grinding process. In addition, after grinding, the situation that materials stuck on the surface of the screen are attached to the surface of the substrate can exist after the materials are separated, so that the requirement on cleanliness can be met only by further cleaning or flushing the rear section; meanwhile, the liquid accumulated on the screen during the cleaning process needs to be dried in the air before flowing into the next process.

SUMMERY OF THE UTILITY MODEL

The utility model aims to solve the technical problem of providing the OLED and substrate cleaning machine before laser stripping, which adopts a double-channel and multi-sheet synchronous grinding mode, improves the grinding efficiency by 12-16 times, flexibly adapts to different capacity requirements by changing wires, effectively realizes the protection and isolation of the FPC during grinding through the overturning covering protection and double-layer air curtain blocking function, and further improves the grinding cleanliness by adopting a two-fluid mixed spraying and air drying technology.

The technical scheme adopted by the utility model is as follows: the cleaning machine comprises a material receiving mechanism, a transfer platform, a transfer moving arm, a grinding platform, a grinding mechanism, a two-fluid and air drying mechanism and a discharging mechanism, wherein the material receiving mechanism is arranged at the front end of a machine table, an OLED substrate to be cleaned is moved into the material receiving mechanism, and the transfer platform is arranged at the side part of the material receiving mechanism at intervals; the grinding platform is horizontally arranged on the machine table and is positioned at the rear side of the material receiving mechanism, the grinding platform comprises double grinding channels which are arranged in parallel at intervals, and a grinding carrying platform and an FPC waterproof assembly are arranged in a single grinding channel; the grinding mechanism is arranged above the grinding platform in a spanning mode, and the grinding mechanism is provided with grinding disc assemblies corresponding to the double grinding channels respectively; the transfer arm is arranged between the material receiving mechanism and the transfer platform in a spanning mode, the transfer arm synchronously transfers at least two OLED substrates on the material receiving mechanism to the transfer platform respectively, the material loading arm arranged on the rear side of the transfer arm carries the at least two OLED substrates on the transfer platform to grinding carrying platforms of two grinding channels of the grinding platform, and an FPC (flexible printed circuit) connected to one side of the OLED substrates is blocked and sealed by an FPC (flexible printed circuit) waterproof assembly to prevent water from entering when the OLED substrates are ground by the grinding disc assembly; the two-fluid and air-drying mechanism comprises two groups which are respectively arranged at the side parts of the two grinding channels of the grinding platform, and the OLED substrate which is grinded and cleaned in the grinding channels is washed and air-dried by the two fluids through the two-fluid and air-drying mechanism; the blanking mechanism is arranged at the rear end of the machine table, and the blanking mechanism sucks the OLED substrate from the grinding channel and transfers the OLED substrate to the next station.

Preferably, the receiving mechanism comprises a receiving moving arm and a receiving platform, wherein the receiving moving arm and the receiving platform are arranged on the machine table at intervals, the receiving moving arm adsorbs the OLED substrate on the outer side of the machine table and then rotates 180 degrees to the position above the receiving platform, and the OLED substrate is placed on the receiving platform.

Preferably, the transfer arm comprises a transfer support, a transfer horizontal module, a transfer lifting seat, a transfer rotating motor, a transfer rotating seat and a transfer suction nozzle, wherein the transfer support is of a U-shaped support structure, and the transfer support is arranged above the material receiving platform and the transfer platform; the transfer horizontal module is horizontally arranged on the transfer support along the linear direction; the transfer lifting module is connected to the transfer horizontal module in a sliding manner and is driven by the transfer horizontal module to move linearly; the transfer lifting seat is connected to the transfer lifting module in a sliding manner along the vertical direction and is driven by the transfer lifting module to move up and down; the transfer rotating motor is arranged on the transfer lifting seat, and the output end of the transfer rotating motor penetrates through the transfer lifting seat to extend downwards; the transfer rotating base is horizontally connected to the output end of the transfer rotating motor; the transfer suction nozzles are vertically arranged on the transfer lifting seat, and the OLED substrate is adsorbed through vacuum negative pressure.

Preferably, the grinding carrying platform and the FPC waterproof assembly are slidably arranged on the grinding linear module, and the grinding linear module is horizontally linearly arranged along the front-back direction of the machine platform and drives the grinding carrying platform and the FPC waterproof assembly to synchronously and linearly move.

Preferably, the grinding carrier comprises a carrier support, a carrier suction plate and carrier suction holes, wherein the carrier support is horizontally arranged, the carrier suction plate comprises at least two blocks, and the carrier suction plate is horizontally arranged on the carrier support; the carrier suction holes comprise at least two, the carrier suction holes are distributed on the carrier suction plate, the carrier suction holes form vacuum negative pressure suction areas in the horizontal plane where the carrier suction plate is located according to the OLED substrate, and the work of the carrier suction holes in different positions is controlled, so that the vacuum negative pressure suction areas can be used for compatibly sucking horizontal screens or vertical screens.

Preferably, the FPC waterproof assembly includes an FPC holder, a flip protection member, an FPC holder, and a blocking member, wherein the FPC holder is horizontally arranged close to the outer side of the carrier holder; the FPC supporting platform is horizontally arranged in the middle of the FPC bracket, and the FPC connected with the side edge of the OLED substrate is horizontally supported by the FPC supporting platform; the turnover protection component is arranged at the outer side of the FPC branch table and turns over above the FPC branch table so as to cover and protect the FPC; the blocking component is arranged on the inner side of the FPC supporting platform, the blocking component blocks the FPC supporting platform and the carrying platform suction plate through a step difference surface and an air curtain, and water vapor is sputtered to the FPC supporting platform when the OLED substrate on the carrying platform suction plate is ground.

Preferably, the turnover protection component comprises a turnover motor, a rotating shaft, a connecting seat and a cover plate, wherein the turnover motor is arranged at the outer side of the FPC bracket, and the output end of the turnover motor is arranged towards the side edge of the FPC bracket; the rotating shaft is arranged on the outer side of the FPC support along the side edge direction of the FPC support and is connected with the output end of the turnover motor, and the turnover motor drives the rotating shaft to rotate; the connecting seats comprise at least two connecting seats, and the connecting seats are detachably sleeved and fixed on the rotating shaft; one side of the cover plate is fixed on the connecting seat, the bottom surface of the cover plate is provided with a surrounding strip extending along the side edge direction, and the surrounding strip is opened at the position corresponding to the inner side edge of the cover plate; the turnover motor drives the cover plate to rotate through the driving rotating shaft.

Preferably, the blocking component comprises a blocking support, a blocking inclined plane, blocking air holes and air holes, wherein the blocking support is arranged on the inner side of the FPC support at intervals in parallel, and the height of the blocking support is higher than that of the FPC support; the blocking inclined plane is arranged on the inner side of the blocking support platform and extends downwards from outside to inside in an inclined manner; the blocking air holes are uniformly arranged on the blocking inclined plane at intervals, and each blocking air hole blows high-pressure air in the direction perpendicular to the blocking inclined plane to form an inclined air curtain so as to block water vapor sputtered from the carrier suction plate; a strip-shaped groove is formed between the blocking support and the FPC support; the air holes are uniformly arranged in the strip-shaped grooves at intervals and form a straight air curtain in the vertical direction.

Preferably, the grinding disc assembly comprises a grinding disc support, a grinding disc linear module, a grinding disc sliding seat, a grinding disc lifting motor, a first lifting seat, a grinding lifting cylinder, a second lifting seat, a grinding motor and a grinding disc, wherein the grinding disc support is arranged above the grinding channel of the grinding platform in a spanning manner; the grinding disc linear module is arranged on the grinding disc bracket along the direction vertical to the grinding channel; the grinding disc sliding seat is horizontally and slidably connected to the grinding linear module and is driven by the grinding linear module to move linearly; the grinding disc lifting motor is arranged on the grinding disc sliding seat, and the output end of the grinding disc lifting motor is arranged downwards; the first lifting seat is connected to one side wall of the grinding disc sliding seat in a sliding manner along the vertical direction and is connected with the output end of a grinding disc lifting motor through a screw rod and a screw rod seat, and the grinding disc lifting motor drives the first lifting seat to move up and down; the grinding lifting cylinder is arranged on the first lifting seat, and the output end of the grinding lifting cylinder is arranged downwards; the second lifting seat is connected to the first lifting seat in a sliding manner along the vertical direction and is connected with the output end of the grinding lifting cylinder, and the lower part of the second lifting seat is rotatably connected with a grinding shaft; the grinding motor is arranged on the second lifting seat, and the output end of the grinding motor is connected with the grinding shaft; the grinding disc is horizontally connected to the lower end of the grinding shaft, and the grinding motor drives the grinding disc to rotate through driving the grinding shaft to rotate.

Preferably, the two-fluid and air-drying mechanism comprises two fluid assemblies and an air-drying assembly, and the two fluid assemblies and the air-drying assembly are sequentially arranged on one side of the grinding channel along the flow direction of the OLED substrate; carrying out two-fluid spraying cleaning on the ground and cleaned OLED substrate through a two-fluid assembly, and carrying out air drying on the surface through an air drying assembly; the two-fluid assembly comprises two fluid brackets, a support rod, a liquid spraying part and an air spraying part, wherein the two fluid brackets are horizontally arranged above the grinding channel; the supporting rods are connected to the lower parts of the two fluid brackets, each supporting rod comprises a vertical supporting rod and a transverse supporting rod, the vertical supporting rods are slidably hung on the two fluid brackets and vertically extend downwards, and the transverse supporting rods are connected to the vertical supporting rods through connecting seats; the air injection component comprises at least two air knives which are detachably connected to the cross support rod through a connecting seat, and air ports are arranged at the bottoms of the air knives and are of linear gap structures and blow high-pressure air out of the air ports; the air knife is arranged in an inclined mode in the vertical direction, so that the air port is arranged in the direction opposite to the flow direction of the OLED substrate; the liquid spraying part comprises a spraying seat, the spraying seat is detachably connected to the transverse supporting rod through a connecting seat, at least two nozzles are arranged at the bottom of the spraying seat, high-pressure liquid is sprayed by the nozzles, and the high-pressure liquid and gas blown out by the air knife are mixed into a gas-liquid-two-fluid mixture to spray the OLED substrate; the air drying assemblies comprise at least two groups, the air drying assemblies are arranged at intervals along the flowing direction of the OLED substrate, and each air drying assembly comprises an air drying support, an air drying adjusting seat, an air drying support rod and an air cavity; wherein, the air drying bracket is vertically arranged; the air drying adjusting seat is detachably sleeved on the air drying support and vertically moves along the air drying support so as to adjust the mounting height; the air drying support rod is horizontally connected to the air drying adjusting seat; the air cavity is connected to the air drying support rod and horizontally extends to the upper portion of the grinding channel, a slit air port is formed in the bottom of the air cavity, and high-pressure air is blown out of the slit air port to the surface of the OLED substrate to be dried in an air drying mode.

Preferably, the blanking mechanism comprises a blanking linear module, a blanking sliding seat, a blanking lifting module, a blanking lifting seat, a blanking adjusting module, a blanking support plate and a blanking suction nozzle, wherein the blanking linear module is arranged at the rear end side part of the grinding channel and extends out of the machine platform; the blanking sliding seat is connected to the blanking linear module in a sliding way and is driven by the blanking linear module to move linearly; the blanking lifting module is arranged on the blanking sliding seat along the vertical direction; the blanking lifting seat is connected to the blanking lifting module in a sliding manner along the vertical direction and is driven to move up and down in the vertical direction by the blanking lifting module; the blanking adjusting module is horizontally arranged on the blanking lifting seat; the blanking support plate is horizontally arranged below the blanking adjusting module, is connected to the output end of the blanking adjusting module through a connecting rod, and is driven by the blanking adjusting module to move along the linear direction; the blanking suction nozzles comprise at least two, and the blanking suction nozzles are detachably connected to the blanking support plate so as to adsorb the OLED substrate.

The cleaning process of the cleaning machine before the OLED and the substrate are stripped by laser comprises the following process steps:

s1, receiving: a material receiving and moving arm of the material receiving mechanism receives the OLED substrate to be ground and cleaned from the previous station and then turns over 180 degrees to be placed on the material receiving platform;

s2, transferring and feeding: the transfer arm synchronously absorbs at least two OLED substrates on the material receiving platform in the step S1 and transfers the OLED substrates to the transfer platform, and the loading and transfer arm arranged on the rear side of the transfer arm transfers the OLED substrates on the transfer platform to the grinding carrying tables of the two grinding channels of the grinding platform;

s3, FPC waterproof protection: after the OLED substrate is transferred to the grinding carrier in the step S2, the FPC on one side of the OLED substrate is supported by the FPC waterproof assembly arranged on one side of the grinding carrier, the FPC waterproof assembly cover plate rotates inwards for 180 degrees to cover and protect the FPC, and strong air flow is blown out through the inclined air holes and the air holes which are arranged side by side to form an inner inclined air curtain and an outer straight air curtain so as to block a space between the grinding carrier and the FPC waterproof assembly and prevent substances generated during grinding on the grinding carrier from entering the FPC;

s4, grinding the OLED substrate: in the step S3, after the FPC is protected from water by the FPC waterproof assembly, the grinding carrier drives the OLED substrate and the FPC to move to the lower side of the grinding mechanism, and the grinding assembly grinds and cleans a plurality of OLED substrates on the grinding carrier;

s5, spraying, washing and air-drying two fluids: after the OLED substrate is ground and cleaned in the step S4, the grinding carrier moves forward to a two-fluid and air-drying mechanism, and two-fluid spraying, washing and air-drying actions are sequentially finished on the ground OLED substrate through the two-fluid and air-drying mechanism;

s6, protecting FPC from water release: after the OLED substrate finishes two-fluid spraying and air drying in the step S4, the grinding carrier moves forwards, the cover plate of the FPC waterproof assembly rotates outwards by 90-100 degrees to loosen the FPC, and the oblique air curtain and the straight air curtain stop outputting strong air flow;

s7, blanking and AOI detection: and step S5, after the FPC waterproof assembly is released for protection, the grinding carrier drives the OLED substrate to move backwards, the blanking mechanism sucks and moves the OLED substrate on the grinding carrier to detect product defects (such as scratches, white dots, black clusters, cracks and residual swords) through the AOI detection mechanism, and then blanking is performed.

The utility model has the beneficial effects that:

the utility model is innovated aiming at the defects and defects existing in the prior art, designs a cleaning machine before laser stripping of an OLED and a substrate, which adopts a double-channel and multi-sheet synchronous grinding mode, improves the grinding efficiency by 12-16 times, is flexible in wire replacement and adapts to different capacity requirements, effectively realizes the protection and isolation of an FPC during grinding through the functions of turning over covering protection and double-layer air curtain blocking, and simultaneously adopts a two-fluid mixed spraying and air drying technology to further improve the grinding cleanliness. The utility model belongs to online OLED substrate grinding equipment, and is suitable for the requirements of high-speed automatic production lines.

The double-grinding-channel grinding machine adopts a double-grinding-channel design, two grinding platforms are arranged on a machine table at intervals in parallel along the material sheet flowing direction to serve as material sheet grinding bearing and conveying carriers, and grinding mechanisms are arranged above the two grinding platforms in a spanning mode respectively; meanwhile, two fluid and air drying mechanisms and a discharging mechanism are respectively arranged behind the two grinding mechanisms, and the single grinding platform and the corresponding grinding mechanism, the two fluid and air drying mechanism and the discharging mechanism respectively and independently complete grinding cleaning, two fluid spraying, air drying and discharging actions. In addition, the grinding mechanism of the utility model adopts a multi-grinding-disc design, preferably a parallel design of four grinding discs, after the grinding platform drives the OLED substrate to move below the grinding mechanism, the four grinding discs synchronously lift and approach the surface of the OLED substrate to finish grinding action. This kind of four abrasive disc design structures of grinding passageway cooperation of two independent workings compares in traditional monolithic grinding process, theoretically promotes grinding efficiency 16 times, and its grinding efficiency promotion is about 12-16 times in the actual grinding course of operation, adapts to the productivity requirement of high-speed automatic grinding production line, and the mode that the double-channel independently ground simultaneously also can be according to actual productivity requirement selection single channel or double-channel work, and the line change is nimble, strong adaptability.

The grinding platform is designed originally aiming at the requirement that the FPC of the OLED needs to be protected and isolated when a substrate is ground, the whole grinding platform comprises a grinding linear module, a grinding carrying platform and an FPC waterproof assembly, the grinding carrying platform is arranged on the grinding linear module and is driven by the grinding linear module to move linearly, carrying platform suction holes are uniformly distributed in a carrying platform suction plate of the grinding carrying platform, the carrying platform suction holes form a vacuum negative pressure suction area on the carrying platform suction plate, and the size of the vacuum negative pressure suction area can be adjusted in real time by controlling the working of the carrying platform suction holes at different positions, so that the requirements of vertical screens placed vertically or horizontal screens placed horizontally or screens with different sizes are met. The outside of microscope carrier suction disc is equipped with FPC waterproof assembly, and FPC waterproof assembly uses the FPC support as bearing structure, and the middle part position of FPC support is equipped with FPC and props up a platform as FPC bearing structure, and the outside of FPC props up the platform is equipped with upset protection part, and the inboard of FPC props up the platform is equipped with the separation part. The turnover protection component takes a turnover motor arranged on the side part of the FPC support as a power structure, the turnover motor drives a cover plate connected to the turnover protection component through a connecting seat to rotate through a driving rotating shaft, so that the cover plate rotates from the outer side to the inner side, the FPC on the FPC supporting table is covered and protected from the upper side, and in order to improve the isolation protection effect, a convex strip-shaped surrounding strip is arranged on the side edge of the bottom surface of the cover plate. The blocking component is arranged on the inner side of the FPC branch table at intervals in parallel, the height of the blocking branch table is higher than that of the FPC branch table and is used as a structural support, and physical blocking is formed through the step difference of the blocking branch table; meanwhile, the inner side of the separation support platform is also provided with a separation inclined plane which slants from outside to inside and extends downwards, the separation inclined plane is provided with a row of separation air holes which are uniformly arranged at intervals, the separation air holes form an inclined air curtain structure in a mode of jetting high-pressure air in a direction vertical to the separation inclined plane, and the first layer of separation of the space between the FPC support platform and the grinding carrier platform is realized through the inclined air curtain; in addition, an inwards sunken strip-shaped groove is formed between the blocking step and the FPC supporting platform, a row of air holes which are uniformly arranged at intervals are arranged in the strip-shaped groove, high-pressure air is upwards blown out of the air holes along the vertical direction to form a layer of direct air curtain structure, and second-layer blocking of the space between the FPC supporting platform and the grinding carrying platform is achieved through the direct air curtain. The double-layer air curtain separation mode realizes double-layer separation of the space on the premise of not generating FPC movement interference, and can effectively separate water vapor or other substances generated during grinding from splashing on the FPC on the grinding carrying platform, so that the FPC is etched.

According to the utility model, aiming at the cleanliness of the screen and the subsequent process requirements, a two-fluid and air drying mechanism is also arranged at the rear grinding and cleaning section to perform spraying, washing and air drying actions on the ground OLED substrate. The whole two-fluid and air drying mechanism comprises a two-fluid component and an air drying component which are arranged along the flow direction of the OLED substrate; the two-fluid component takes a two-fluid bracket which is suspended above the grinding platform as a supporting structure, a plurality of vertical supporting rods are vertically hung at the bottom of the two-fluid bracket, the tops of the vertical supporting rods are inserted into strip-shaped grooves formed in the two-fluid supporting plates and can linearly slide along the strip-shaped grooves so as to adjust the mounting position, the lower parts of the vertical supporting rods are detachably connected with a plurality of transverse supporting rods through connecting seats, and the mounting positions of the transverse supporting rods in the vertical direction can be adjusted through the connecting seats; the transverse strut is connected with a plurality of air knives and a spraying seat through a connecting seat, the air knives are arranged in an inclined mode in the vertical direction, air ports at the bottoms of the air knives are of a linear gap structure, and the air ports blow out high-pressure gas in the direction opposite to the flow direction of the OLED substrate; the bottom of the spraying seat is provided with a plurality of high-pressure nozzles, the nozzle openings of the nozzles are arranged downwards, and high-pressure liquid is sprayed downwards and mixed with the gas blown out by the air knife to form a gas-liquid-two-fluid mixture, and then the gas-liquid-two-fluid mixture is sprayed on the OLED substrate. The two-fluid mixture of this kind of gas-liquid mixed structure has combined gas, liquid advantage, compares in solitary gas or liquid, and the cleaning performance that sprays to the base plate surface is better. And the OLED substrate after two fluids are sprayed is subjected to air drying on the surface through an air drying assembly by high-pressure gas so as to flow into the next station.

Drawings

Fig. 1 is a schematic perspective view of the present invention.

Fig. 2 is a schematic perspective view of the hidden component according to the present invention.

Fig. 3 is a schematic perspective view showing a second embodiment of the hidden component of the present invention.

Fig. 4 is a schematic perspective view of a loading arm according to the present invention.

Fig. 5 is a second schematic perspective view of the loading arm according to the present invention.

Fig. 6 is a third schematic perspective view of the loading arm according to the present invention.

FIG. 7 is a schematic perspective view of a polishing platen according to the present invention.

FIG. 8 is a second schematic perspective view of a polishing platen according to the present invention.

Fig. 9 is a schematic perspective view of a polishing carrier according to one embodiment of the present invention.

Fig. 10 is a second schematic perspective view of the polishing carrier according to the present invention.

Fig. 11 is a third schematic perspective view of the polishing carrier of the present invention.

Fig. 12 is a schematic perspective view of the FPC waterproof assembly of the present invention.

Fig. 13 is a second schematic perspective view of the FPC waterproof assembly of the present invention.

Fig. 14 is an enlarged schematic view of the structure at I in fig. 12.

FIG. 15 is a schematic perspective view of a polishing mechanism according to the present invention.

FIG. 16 is a second schematic perspective view of the polishing mechanism of the present invention.

FIG. 17 is a schematic perspective view of a polishing pad assembly according to the present invention.

FIG. 18 is a second schematic perspective view of a polishing disc assembly according to the present invention.

FIG. 19 is a third schematic perspective view of a polishing disc assembly according to the present invention.

FIG. 20 is a schematic perspective view of a second fluid and seasoning mechanism according to the present invention.

Fig. 21 is a schematic perspective view of a second fluid and air drying mechanism according to the present invention.

FIG. 22 is a third schematic perspective view of a second fluid and air drying mechanism according to the present invention.

Fig. 23 is a schematic perspective view of the blanking arm according to the present invention.

Fig. 24 is a second schematic perspective view of the blanking arm according to the present invention.

Fig. 25 is a third schematic perspective view of the blanking arm according to the present invention.

FIG. 26 is a fourth perspective view of the blanking arm of the present invention.

Detailed Description

The utility model will be further described with reference to the accompanying drawings in which:

as shown in fig. 1 to 26, the technical solution adopted by the present invention is as follows: a cleaning machine before laser stripping of an OLED (organic light emitting diode) and a substrate comprises a material receiving mechanism, a transfer platform 4, a transfer carrying arm 6, a grinding platform 7, a grinding mechanism 8, a two-fluid and air drying mechanism and a discharging mechanism 11, wherein the material receiving mechanism is arranged at the front end of a machine table 1, the OLED substrate to be cleaned is moved into the material receiving mechanism, and the transfer platforms 4 are arranged at the side part of the material receiving mechanism at intervals; the grinding platform 7 is horizontally arranged on the machine table 1 and is positioned at the rear side of the material receiving mechanism, the grinding platform 7 comprises double grinding channels which are arranged in parallel at intervals, and a grinding carrying platform 72 and an FPC waterproof assembly 73 are arranged in a single grinding channel; the grinding mechanism 8 is arranged above the grinding platform 7 in a spanning mode, and the grinding mechanism 8 is provided with grinding disc assemblies corresponding to the double grinding channels respectively; the transfer arm 6 is arranged between the material receiving mechanism and the transfer platform 4 in a spanning mode, at least two OLED substrates on the material receiving mechanism are respectively and synchronously transferred to the transfer platform 4 through the transfer arm 6, the feeding arm arranged on the rear side of the transfer arm 6 carries the at least two OLED substrates on the transfer platform 4 to the grinding carrying platforms of two grinding channels of the grinding platform 7, the FPC connected to one side of the OLED substrates is blocked and sealed through the FPC waterproof assembly, and moisture is prevented from entering when the OLED substrates are ground through the grinding disc assembly; the two-fluid and air-drying mechanism comprises two groups which are respectively arranged at the side parts of the two grinding channels of the grinding platform 7, and the OLED substrate which is grinded and cleaned in the grinding channels is washed and air-dried by the two fluids through the two-fluid and air-drying mechanism; the blanking mechanism 11 is arranged at the rear end of the machine table 1, and the blanking mechanism 11 sucks the OLED substrate from the grinding channel and transfers the OLED substrate to the next station.

The receiving mechanism comprises a receiving moving arm 2 and a receiving platform 3, wherein the receiving moving arm 2 and the receiving platform 3 are arranged on the machine table 1 at intervals, the receiving moving arm 2 adsorbs OLED substrates on the outer side of the machine table 1 and then rotates 180 degrees to the position above the receiving platform 3, and the OLED substrates are placed on the receiving platform 3.

The transfer arm 6 comprises a transfer support 61, a transfer horizontal module 62, a transfer lifting module 63, a transfer lifting seat 64, a transfer rotating motor 65, a transfer rotating seat 66 and a transfer suction nozzle 67, wherein the transfer support 61 is of a U-shaped bracket structure, and the transfer support 61 is arranged above the material receiving platform 3 and the transfer platform 4; the transfer horizontal module 62 is horizontally arranged on the transfer support 61 along the linear direction; the transfer lifting module 63 is slidably connected to the transfer horizontal module 62 and is driven by the transfer horizontal module 62 to move linearly; the transfer lifting seat 64 is slidably connected to the transfer lifting module 63 along the vertical direction and is driven by the transfer lifting module 63 to move up and down; the transfer rotating motor 65 is disposed on the transfer lifting base 64, and the output end of the transfer rotating motor passes through the transfer lifting base 64 and extends downward; the transfer rotating base 66 is horizontally connected to the output end of the transfer rotating motor 65; the transfer suction nozzles 67 include at least two transfer suction nozzles 67, and the transfer suction nozzles 67 are vertically disposed on the transfer lifting base 64 and suck the OLED substrate through vacuum negative pressure.

The grinding carrying table 72 and the FPC waterproof assembly 73 are slidably arranged on the grinding linear module 71, and the grinding linear module 71 is horizontally and linearly arranged along the front-back direction of the machine table 1 and drives the grinding carrying table 72 and the FPC waterproof assembly 73 to synchronously and linearly move.

The grinding carrier 72 comprises a carrier support, a carrier suction plate 721 and a carrier suction hole 722, wherein the carrier support is horizontally arranged, the carrier suction plate 721 comprises at least two pieces, and the carrier suction plate 721 is horizontally arranged on the carrier support; the carrier suction holes 722 are arranged on the carrier suction plate 721, the carrier suction holes 722 form vacuum negative pressure suction areas in the horizontal plane where the carrier suction plate 721 is located according to the OLED substrate, and the vacuum negative pressure suction areas can be used for compatibly sucking a horizontal screen or a vertical screen by controlling the carrier suction holes 722 at different positions to work.

The FPC waterproof assembly 73 includes an FPC holder 730, a flip protection member, an FPC holder 736, and a blocking member, wherein the FPC holder 730 is horizontally disposed close to the outer side of the carrier holder; the FPC supporting table 736 is horizontally arranged in the middle of the FPC bracket 730, and the FPC connected with the side edge of the OLED substrate is horizontally supported by the FPC supporting table 736; the above-mentioned flip protection member is disposed outside the FPC stand 736 and flip-moves above the FPC stand 736 so as to cover and protect the FPC; the blocking component is arranged on the inner side of the FPC supporting table 736 and blocks the FPC supporting table 736 and the carrying table suction plate 721 through a step difference surface and an air curtain, and water vapor is prevented from being sputtered to the FPC supporting table 736 when the OLED substrate on the carrying table suction plate 721 is ground.

The turnover protection component comprises a turnover motor 731, a rotating shaft 732, a connecting seat 733 and a cover plate 734, wherein the turnover motor 731 is arranged on the outer side of the FPC bracket 730, and the output end of the turnover motor 731 is arranged towards the side direction of the FPC bracket 730; the rotating shaft 732 is arranged outside the FPC holder 730 along the side direction of the FPC holder 730 and connected with the output end of the turnover motor 731, and the turnover motor 731 drives the rotating shaft 732 to rotate; the connecting seat 733 includes at least two, and the connecting seat 733 is detachably fixed on the rotating shaft 732 in a sleeved manner; one side of the cover plate 734 is fixed on the connection seat 733, the bottom surface of the cover plate 734 is provided with a surrounding strip extending along the side direction, and the surrounding strip is opened at the position corresponding to the inner side edge of the cover plate 734; the flipping motor 731 drives the cover 734 to rotate by driving the rotating shaft 732.

The blocking part comprises blocking supports 737, blocking inclined planes 738, blocking air holes 739 and air holes 7310, wherein the blocking supports 737 are arranged on the inner side of the FPC supports 736 in parallel at intervals, and the height of the blocking supports 737 is higher than that of the FPC supports 736; the blocking inclined plane 738 is arranged on the inner side of the blocking support 737, and the blocking inclined plane 738 extends downwards from outside to inside in an inclined mode; the blocking air holes 739 include at least two, the blocking air holes 739 are uniformly arranged on the blocking inclined plane 738 at intervals, and each blocking air hole 739 blows high-pressure air in a direction perpendicular to the blocking inclined plane 738 to form an inclined air curtain so as to block water vapor sputtered from the carrier suction plate 721; a strip-shaped groove is formed between the blocking support 737 and the FPC support 736; the air holes 7310 include at least two air holes 7310, the air holes 7310 are uniformly spaced in the strip groove, and the air holes 7310 form a straight air curtain along a vertical direction.

The grinding disc component comprises a grinding disc bracket 81, a grinding disc linear module 82, a grinding disc sliding seat 83, a grinding disc lifting motor 84, a first lifting seat 85, a grinding lifting cylinder 86, a second lifting seat 87, a grinding motor 88 and a grinding disc 89, wherein the grinding disc bracket 81 is arranged above a grinding channel of the grinding platform 7 in a spanning manner; the grinding disc linear module 82 is arranged on the grinding disc bracket 81 along the direction vertical to the grinding channel; the grinding disc slide seat 83 is horizontally and slidably connected to the grinding linear module 82 and is driven by the grinding linear module 82 to move linearly; the grinding disc lifting motor 84 is arranged on the grinding disc sliding seat 83, and the output end of the grinding disc lifting motor faces downwards; the first lifting seat 85 is slidably connected to a side wall of the polishing platen slide 83 in the vertical direction, and is connected to an output end of the polishing platen lifting motor 84 through a lead screw and a lead screw seat, and the polishing platen lifting motor 84 drives the first lifting seat 85 to move up and down; the grinding lifting cylinder 86 is arranged on the first lifting seat 85, and the output end of the grinding lifting cylinder is arranged downwards; the second lifting seat 87 is connected to the first lifting seat 85 in a sliding manner along the vertical direction and is connected with the output end of the grinding lifting cylinder 86, and the lower part of the second lifting seat 87 is rotatably connected with a grinding shaft; the grinding motor 88 is arranged on the second lifting seat 87, and the output end of the grinding motor is connected with the grinding shaft; the grinding disc 89 is horizontally connected to the lower end of the grinding shaft, and the grinding motor 88 drives the grinding disc 89 to rotate through driving the grinding shaft.

The two-fluid and air-drying mechanism comprises two fluid components 9 and an air-drying component 10, and the two fluid components 9 and the air-drying component 10 are sequentially arranged on one side of the grinding channel along the flow direction of the OLED substrate; the OLED substrate after being grinded and cleaned is subjected to two-fluid spraying cleaning through a two-fluid assembly 9, and the surface of the OLED substrate is subjected to air drying through an air drying assembly 10; the two-fluid assembly 9 comprises two fluid holders 91, a support rod, a liquid spraying part and a gas spraying part, wherein the two fluid holders 91 are horizontally arranged above the grinding channel; the supporting rod is connected to the lower part of the two-fluid bracket 91 and comprises a vertical supporting rod and a transverse supporting rod, the vertical supporting rod is slidably hung on the two-fluid bracket 91 and vertically extends downwards, and the transverse supporting rod is connected to the vertical supporting rod through a connecting seat; the air injection part comprises at least two air knives 92, the air knives 92 are detachably connected to the cross support rod through connecting seats, air ports are formed in the bottoms of the air knives 92 and are of linear gap structures, and high-pressure air is blown out of the air ports; the air knife 92 is arranged obliquely to the vertical direction, so that the air opening is arranged in the direction opposite to the flow direction of the OLED substrate; the liquid spraying part comprises a spraying seat 93, the spraying seat 93 is detachably connected to the transverse supporting rod through a connecting seat, at least two nozzles are arranged at the bottom of the spraying seat 93, high-pressure liquid is sprayed by the nozzles, and the high-pressure liquid and the gas blown out by the air knife 92 are mixed into a gas-liquid-two-fluid mixture to spray the OLED substrate; the air drying assemblies 10 comprise at least two groups, the air drying assemblies are arranged at intervals along the flowing direction of the OLED substrate, and each air drying assembly 10 comprises an air drying support 101, an air drying adjusting seat 102, an air drying support rod 103 and an air cavity 104; wherein, the air drying bracket 101 is vertically arranged; the air drying adjusting seat 102 is detachably sleeved on the air drying support 101 and vertically moves along the air drying support 101 so as to adjust the installation height; the air-drying support rod 103 is horizontally connected to the air-drying adjusting seat 102; the air cavity 104 is connected to the air drying support rod 103 and horizontally extends to the upper side of the grinding channel, a slit-shaped air port is formed in the bottom of the air cavity 104, and high-pressure air is blown out from the slit-shaped air port to the surface of the OLED substrate to be dried in an air drying mode.

The blanking mechanism 11 comprises a blanking linear module 111, a blanking slide seat 112, a blanking lifting module 113, a blanking lifting seat 114, a blanking adjusting module 115, a blanking support plate 116 and a blanking suction nozzle 117, wherein the blanking linear module 111 is arranged at the rear end side of the grinding channel and extends out of the machine table 1; the blanking slide 112 is slidably connected to the blanking linear module 111 and is driven by the blanking linear module 111 to move linearly; the blanking lifting module 113 is arranged on the blanking sliding base 112 along the vertical direction; the blanking lifting seat 114 is slidably connected to the blanking lifting module 113 along the vertical direction and is driven by the blanking lifting module 113 to move up and down in the vertical direction; the blanking adjusting module 115 is horizontally arranged on the blanking lifting seat 114; the blanking support plate 116 is horizontally arranged below the blanking adjusting module 115, is connected to the output end of the blanking adjusting module 115 through a connecting rod, and is driven by the blanking adjusting module 115 to move along a linear direction; the blanking suction nozzles 117 include at least two, and the blanking suction nozzles 117 are detachably connected to the blanking support plate 116 so as to absorb the OLED substrate.

Furthermore, the utility model designs a cleaning machine before laser stripping of the OLED and the substrate, which adopts a double-channel and multi-sheet synchronous grinding mode, improves the grinding efficiency by 12-16 times, flexibly adapts to different capacity requirements by changing lines, effectively realizes the protection and isolation of the FPC during grinding through the functions of turnover covering protection and double-layer air curtain blocking, and further improves the grinding cleanliness by adopting a two-fluid mixed spraying and air drying technology. The utility model belongs to online OLED substrate grinding equipment, and is suitable for the requirements of high-speed automatic production lines. The double-grinding-channel grinding machine adopts a double-grinding-channel design, two grinding platforms are arranged on a machine table at intervals in parallel along the material sheet flowing direction to serve as material sheet grinding bearing and conveying carriers, and grinding mechanisms are arranged above the two grinding platforms in a spanning mode respectively; meanwhile, two fluid and air drying mechanisms and a discharging mechanism are respectively arranged behind the two grinding mechanisms, and the single grinding platform and the corresponding grinding mechanism, the two fluid and air drying mechanism and the discharging mechanism respectively and independently complete grinding cleaning, two fluid spraying, air drying and discharging actions. In addition, the grinding mechanism of the utility model adopts a multi-grinding-disc design, preferably a parallel design of four grinding discs, after the grinding platform drives the OLED substrate to move below the grinding mechanism, the four grinding discs synchronously lift and approach the surface of the OLED substrate to finish grinding action. This kind of four abrasive disc design structures of grinding passageway cooperation of two independent workings compares in traditional monolithic grinding process, theoretically promotes grinding efficiency 16 times, and its grinding efficiency promotion is about 12-16 times in the actual grinding course of operation, adapts to the productivity requirement of high-speed automatic grinding production line, and the mode that the double-channel independently ground simultaneously also can be according to actual productivity requirement selection single channel or double-channel work, and the line change is nimble, strong adaptability. The grinding platform is designed originally aiming at the requirement that the FPC of the OLED needs to be protected and isolated when a substrate is ground, the whole grinding platform comprises a grinding linear module, a grinding carrying platform and an FPC waterproof assembly, the grinding carrying platform is arranged on the grinding linear module and is driven by the grinding linear module to move linearly, carrying platform suction holes are uniformly distributed in a carrying platform suction plate of the grinding carrying platform, the carrying platform suction holes form a vacuum negative pressure suction area on the carrying platform suction plate, and the size of the vacuum negative pressure suction area can be adjusted in real time by controlling the working of the carrying platform suction holes at different positions, so that the requirements of vertical screens placed vertically or horizontal screens placed horizontally or screens with different sizes are met. The outside of microscope carrier suction disc is equipped with FPC waterproof assembly, and FPC waterproof assembly uses the FPC support as bearing structure, and the middle part position of FPC support is equipped with FPC and props up a platform as FPC bearing structure, and the outside of FPC props up the platform is equipped with upset protection part, and the inboard of FPC props up the platform is equipped with the separation part. The turnover protection component takes a turnover motor arranged on the side part of the FPC support as a power structure, the turnover motor drives a cover plate connected to the turnover protection component through a connecting seat to rotate through a driving rotating shaft, so that the cover plate rotates from the outer side to the inner side, the FPC on the FPC supporting table is covered and protected from the upper side, and in order to improve the isolation protection effect, a convex strip-shaped surrounding strip is arranged on the side edge of the bottom surface of the cover plate. The blocking component is arranged on the inner side of the FPC branch table at intervals in parallel, the height of the blocking branch table is higher than that of the FPC branch table and is used as a structural support, and physical blocking is formed through the step difference of the blocking branch table; meanwhile, the inner side of the separation support platform is also provided with a separation inclined plane which slants from outside to inside and extends downwards, the separation inclined plane is provided with a row of separation air holes which are uniformly arranged at intervals, the separation air holes form an inclined air curtain structure in a mode of jetting high-pressure air in a direction vertical to the separation inclined plane, and the first layer of separation of the space between the FPC support platform and the grinding carrier platform is realized through the inclined air curtain; in addition, an inwards sunken strip-shaped groove is formed between the blocking step and the FPC supporting platform, a row of air holes which are uniformly arranged at intervals are arranged in the strip-shaped groove, high-pressure air is upwards blown out of the air holes along the vertical direction to form a layer of direct air curtain structure, and second-layer blocking of the space between the FPC supporting platform and the grinding carrying platform is achieved through the direct air curtain. The double-layer air curtain separation mode realizes double-layer separation of the space on the premise of not generating FPC movement interference, and can effectively separate water vapor or other substances generated during grinding from splashing on the FPC on the grinding carrying platform, so that the FPC is etched. According to the utility model, aiming at the cleanliness of the screen and the subsequent process requirements, a two-fluid and air drying mechanism is also arranged at the rear grinding and cleaning section to perform spraying, washing and air drying actions on the ground OLED substrate. The whole two-fluid and air drying mechanism comprises a two-fluid component and an air drying component which are arranged along the flow direction of the OLED substrate; the two-fluid component takes a two-fluid bracket which is suspended above the grinding platform as a supporting structure, a plurality of vertical supporting rods are vertically hung at the bottom of the two-fluid bracket, the tops of the vertical supporting rods are inserted into strip-shaped grooves formed in the two-fluid supporting plates and can linearly slide along the strip-shaped grooves so as to adjust the mounting position, the lower parts of the vertical supporting rods are detachably connected with a plurality of transverse supporting rods through connecting seats, and the mounting positions of the transverse supporting rods in the vertical direction can be adjusted through the connecting seats; the transverse strut is connected with a plurality of air knives and a spraying seat through a connecting seat, the air knives are arranged in an inclined mode in the vertical direction, air ports at the bottoms of the air knives are of a linear gap structure, and the air ports blow out high-pressure gas in the direction opposite to the flow direction of the OLED substrate; the bottom of the spraying seat is provided with a plurality of high-pressure nozzles, the nozzle openings of the nozzles are arranged downwards, and high-pressure liquid is sprayed downwards and mixed with the gas blown out by the air knife to form a gas-liquid-two-fluid mixture, and then the gas-liquid-two-fluid mixture is sprayed on the OLED substrate. The two-fluid mixture of this kind of gas-liquid mixed structure has combined gas, liquid advantage, compares in solitary gas or liquid, and the cleaning performance that sprays to the base plate surface is better. And the OLED substrate after two fluids are sprayed is subjected to air drying on the surface through an air drying assembly by high-pressure gas so as to flow into the next station.

The embodiments of the present invention are merely illustrative of specific embodiments thereof, and are not intended to limit the scope thereof. Since the present invention can be modified by a person skilled in the art, the present invention is not limited to the embodiments described above.

Claims

1. The utility model provides a cleaning machine before OLED peels off with base plate laser which characterized in that: the cleaning device comprises a material receiving mechanism, a transfer platform (4), a transfer carrying arm (6), a grinding platform (7), a grinding mechanism (8), a two-fluid and air drying mechanism and a discharging mechanism (11), wherein the material receiving mechanism is arranged at the front end of a machine table (1), an OLED substrate to be cleaned is moved into the material receiving mechanism, and the transfer platforms (4) are arranged at the side part of the material receiving mechanism at intervals; the grinding platform (7) is horizontally arranged on the machine table (1) and is positioned at the rear side of the material receiving mechanism, the grinding platform (7) comprises double grinding channels which are arranged in parallel at intervals, and a grinding carrier table (72) and an FPC waterproof assembly (73) are arranged in a single grinding channel; the grinding mechanism (8) is arranged above the grinding platform (7) in a spanning mode, and the grinding mechanism (8) is provided with grinding disc assemblies corresponding to the double grinding channels respectively; the transfer arm (6) is arranged between the material receiving mechanism and the transfer platform (4) in a spanning mode, at least two OLED substrates on the material receiving mechanism are transferred onto the transfer platform (4) synchronously through the transfer arm (6), at least two OLED substrates on the transfer platform (4) are transferred onto grinding carrying platforms of two grinding channels of the grinding platform (7) through the material loading and transferring arm arranged on the rear side of the transfer arm (6), the FPC connected to one side of the OLED substrates is blocked and sealed through the FPC waterproof assembly, and moisture is prevented from entering when the OLED substrates are ground through the grinding disc assembly; the two fluid and air drying mechanisms comprise two groups which are respectively arranged at the side parts of the two grinding channels of the grinding platform (7), and the OLED substrate which is grinded and cleaned in the grinding channels is washed and air-dried by the two fluids and the air drying mechanisms; the blanking mechanism (11) is arranged at the rear end of the machine table (1), and the blanking mechanism (11) sucks the OLED substrate from the grinding channel and transfers the OLED substrate to the next station.

2. The cleaning machine before the OLED and the substrate are stripped by the laser according to claim 1, characterized in that: the material receiving mechanism comprises a material receiving moving arm (2) and a material receiving platform (3), wherein the material receiving moving arm (2) and the material receiving platform (3) are arranged on the machine table (1) at intervals, the material receiving moving arm (2) adsorbs an OLED substrate on the outer side of the machine table (1) and then rotates 180 degrees to the position above the material receiving platform (3), and the OLED substrate is placed on the material receiving platform (3).

3. The cleaning machine before the OLED and the substrate are stripped by the laser according to claim 1, characterized in that: the transfer arm (6) comprises a transfer support (61), a transfer horizontal module (62), a transfer lifting module (63), a transfer lifting seat (64), a transfer rotating motor (65), a transfer rotating seat (66) and a transfer suction nozzle (67), wherein the transfer support (61) is of a U-shaped support structure, and the transfer support (61) is erected above the material receiving platform (3) and the transfer platform (4); the transfer horizontal module (62) is horizontally arranged on the transfer support (61) along the linear direction; the transfer lifting module (63) can be connected to the transfer horizontal module (62) in a sliding way and is driven by the transfer horizontal module (62) to move linearly; the transfer lifting seat (64) is connected to the transfer lifting module (63) in a sliding way along the vertical direction and is driven by the transfer lifting module (63) to move up and down; the transfer rotating motor (65) is arranged on the transfer lifting seat (64), and the output end of the transfer rotating motor penetrates through the transfer lifting seat (64) to extend downwards; the transfer rotating base (66) is horizontally connected to the output end of the transfer rotating motor (65); the transfer suction nozzles (67) comprise at least two, and the transfer suction nozzles (67) are vertically arranged on the transfer lifting seat (64) and adsorb the OLED substrate through vacuum negative pressure.

4. The cleaning machine before the OLED and the substrate are stripped by the laser according to claim 1, characterized in that: the grinding carrying table (72) and the FPC waterproof assembly (73) are slidably arranged on the grinding linear module (71), and the grinding linear module (71) is horizontally and linearly arranged along the front-back direction of the machine table (1) and drives the grinding carrying table (72) and the FPC waterproof assembly (73) to synchronously and linearly move.

5. The cleaning machine before the OLED and the substrate are stripped by the laser according to claim 4, characterized in that: the grinding carrier (72) comprises a carrier support, a carrier suction plate (721) and carrier suction holes (722), wherein the carrier support is horizontally arranged, the carrier suction plate (721) comprises at least two blocks, and the carrier suction plate (721) is horizontally arranged on the carrier support; the carrier suction holes (722) are arranged on the carrier suction plate (721), the carrier suction holes (722) form vacuum negative pressure suction areas in the horizontal plane where the carrier suction plate (721) is located according to the OLED substrate, and the vacuum negative pressure suction areas can be used for compatibly sucking a horizontal screen or a vertical screen by controlling the carrier suction holes (722) at different positions to work.

6. The cleaning machine before the OLED and the substrate are stripped by the laser according to claim 5, characterized in that: the FPC waterproof assembly (73) comprises an FPC support (730), a turnover protection component, an FPC support (736) and a blocking component, wherein the FPC support (730) is horizontally arranged close to the outer side of the carrier support; the FPC supporting table (736) is horizontally arranged in the middle of the FPC support (730), and an FPC connected with the side edge of the OLED substrate is horizontally supported by the FPC supporting table (736); the turnover protection component is arranged at the outer side of the FPC branch table (736) and turns over above the FPC branch table (736) so as to cover and protect the FPC; the blocking component is arranged on the inner side of the FPC supporting table (736), and blocks the FPC supporting table (736) and the carrying table suction plate (721) through a step difference surface and an air curtain, so that water vapor is prevented from being sputtered to the FPC supporting table (736) when the OLED substrate on the carrying table suction plate (721) is ground.

7. The cleaning machine before the OLED and the substrate are stripped by the laser according to claim 6, characterized in that: the turnover protection component comprises a turnover motor (731), a rotating shaft (732), a connecting seat (733) and a cover plate (734), wherein the turnover motor (731) is arranged on the outer side of the FPC support (730), and the output end of the turnover motor is arranged towards the side direction of the FPC support (730); the rotating shaft (732) is arranged on the outer side of the FPC support (730) along the side direction of the FPC support (730) and is connected with the output end of the turnover motor (731), and the turnover motor (731) drives the rotating shaft (732) to rotate; the connecting seats (733) comprise at least two, and the connecting seats (733) are detachably sleeved and fixed on the rotating shaft (732); one side of the cover plate (734) is fixed on the connecting seat (733), the bottom surface of the cover plate (734) is provided with a surrounding strip extending along the side direction, and the surrounding strip is opened at the position corresponding to the inner side edge of the cover plate (734); the overturning motor (731) drives the cover plate (734) to rotate through driving the rotating shaft (732).

8. The cleaning machine before the OLED and the substrate are stripped by the laser according to claim 7, characterized in that: the blocking part comprises blocking support platforms (737), blocking inclined planes (738), blocking air holes (739) and air holes (7310), wherein the blocking support platforms (737) are parallelly arranged on the inner side of the FPC support platform (736) at intervals, and the height of the blocking support platforms (737) is higher than that of the FPC support platform (736); the blocking inclined plane (738) is arranged on the inner side of the blocking support platform (737), and the blocking inclined plane (738) extends downwards from outside to inside in an inclined mode; the blocking air holes (739) are arranged on the blocking inclined plane (738) at uniform intervals, and each blocking air hole (739) blows out high-pressure air along the direction vertical to the blocking inclined plane (738) to form an inclined air curtain so as to block water vapor sputtered from the carrier suction plate (721); a strip-shaped groove is formed between the blocking support (737) and the FPC support (736); the air holes (7310) comprise at least two air holes, the air holes (7310) are uniformly arranged in the strip-shaped groove at intervals, and the air holes (7310) form a straight air curtain along the vertical direction.

9. The cleaning machine before the OLED and the substrate are stripped by the laser according to claim 1, characterized in that: the grinding disc component comprises a grinding disc support (81), a grinding disc linear module (82), a grinding disc sliding seat (83), a grinding disc lifting motor (84), a first lifting seat (85), a grinding lifting cylinder (86), a second lifting seat (87), a grinding motor (88) and a grinding disc (89), wherein the grinding disc support (81) is arranged above a grinding channel of the grinding platform (7) in a spanning mode; the grinding disc linear module (82) is arranged on the grinding disc bracket (81) along the direction vertical to the grinding channel; the grinding disc sliding seat (83) is horizontally connected on the grinding linear module (82) in a sliding way and is driven by the grinding linear module (82) to move linearly; the grinding disc lifting motor (84) is arranged on the grinding disc sliding seat (83), and the output end of the grinding disc lifting motor is arranged downwards; the first lifting seat (85) is connected to one side wall of the grinding disc sliding seat (83) in a sliding manner along the vertical direction and is connected with the output end of the grinding disc lifting motor (84) through a screw rod and a screw rod seat, and the grinding disc lifting motor (84) drives the first lifting seat (85) to move up and down; the grinding lifting cylinder (86) is arranged on the first lifting seat (85), and the output end of the grinding lifting cylinder is arranged downwards; the second lifting seat (87) is connected to the first lifting seat (85) in a sliding manner along the vertical direction and is connected with the output end of the grinding lifting cylinder (86), and the lower part of the second lifting seat (87) is rotatably connected with a grinding shaft; the grinding motor (88) is arranged on the second lifting seat (87), and the output end of the grinding motor is connected with the grinding shaft; the grinding disc (89) is horizontally connected to the lower end of the grinding shaft, and the grinding motor (88) drives the grinding disc (89) to rotate by driving the grinding shaft to rotate.

10. The cleaning machine before the OLED and the substrate are stripped by the laser according to claim 1, characterized in that: the two-fluid and air-drying mechanism comprises two fluid assemblies (9) and an air-drying assembly (10), wherein the two fluid assemblies (9) and the air-drying assembly (10) are sequentially arranged on one side of the grinding channel along the flow direction of the OLED substrate; the OLED substrate after being grinded and cleaned is subjected to two-fluid spraying cleaning through a two-fluid assembly (9), and the surface of the OLED substrate is subjected to air drying through an air drying assembly (10); the two-fluid assembly (9) comprises a two-fluid bracket (91), a supporting rod, a liquid spraying part and an air spraying part, wherein the two-fluid bracket (91) is horizontally arranged above the grinding channel; the supporting rod is connected to the lower part of the two-fluid bracket (91), the supporting rod comprises a vertical supporting rod and a transverse supporting rod, the vertical supporting rod is slidably hung on the two-fluid bracket (91) and vertically extends downwards, and the transverse supporting rod is connected to the vertical supporting rod through a connecting seat; the air injection component comprises at least two air knives (92), the air knives (92) are detachably connected to the transverse supporting rod through connecting seats, air ports are formed in the bottoms of the air knives (92), the air ports are of linear gap structures, and high-pressure air is blown out of the air ports; the air knife (92) is arranged in an inclined mode in the vertical direction, so that the air opening is arranged in the direction opposite to the flow direction of the OLED substrate; the liquid spraying part comprises a spraying seat (93), the spraying seat (93) is detachably connected to the transverse supporting rod through a connecting seat, the bottom of the spraying seat (93) is provided with at least two nozzles, the nozzles spray high-pressure liquid, and the high-pressure liquid and the gas blown out of the air knife (92) are mixed into a gas-liquid-two-fluid mixture to spray the OLED substrate; the air drying assemblies (10) comprise at least two groups, the air drying assemblies are arranged at intervals along the flowing direction of the OLED substrate, and each air drying assembly (10) comprises an air drying support (101), an air drying adjusting seat (102), an air drying support rod (103) and an air cavity (104); wherein the air drying bracket (101) is vertically arranged; the air drying adjusting seat (102) is detachably sleeved on the air drying support (101) and vertically moves along the air drying support (101) so as to adjust the installation height; the air drying support rod (103) is horizontally connected to the air drying adjusting seat (102); the air cavity (104) is connected to the air drying support rod (103) and horizontally extends to the upper portion of the grinding channel, a slit-shaped air port is formed in the bottom of the air cavity (104), and high-pressure air is blown out from the slit-shaped air port to the surface of the OLED substrate to be dried in an air drying mode.

11. The cleaning machine before the OLED and the substrate are stripped by the laser according to claim 1, characterized in that: the blanking mechanism (11) comprises a blanking linear module (111), a blanking sliding seat (112), a blanking lifting module (113), a blanking lifting seat (114), a blanking adjusting module (115), a blanking support plate (116) and a blanking suction nozzle (117), wherein the blanking linear module (111) is arranged at the rear end side of the grinding channel and extends out of the machine table (1); the blanking sliding seat (112) is connected to the blanking linear module (111) in a sliding way and is driven by the blanking linear module (111) to move linearly; the blanking lifting module (113) is arranged on the blanking sliding seat (112) along the vertical direction; the blanking lifting seat (114) is connected to the blanking lifting module (113) in a sliding manner along the vertical direction and is driven by the blanking lifting module (113) to move up and down in the vertical direction; the blanking adjusting module (115) is horizontally arranged on the blanking lifting seat (114); the blanking support plate (116) is horizontally arranged below the blanking adjusting module (115), is connected to the output end of the blanking adjusting module (115) through a connecting rod, and is driven by the blanking adjusting module (115) to move along the linear direction; the blanking suction nozzles (117) comprise at least two, and the blanking suction nozzles (117) are detachably connected to the blanking support plate (116) so as to adsorb the OLED substrate.