CN214898367U

CN214898367U - OLED and substrate cleaning and air drying device

Info

Publication number: CN214898367U
Application number: CN202121314639.9U
Authority: CN
Inventors: 高军鹏; 康宏刚; 李世杰; 张立文
Original assignee: Shenzhen Etmade Automatic Equipment Co Ltd
Current assignee: Shenzhen Etmade Automatic Equipment Co Ltd
Priority date: 2021-06-15
Filing date: 2021-06-15
Publication date: 2021-11-26
Anticipated expiration: 2031-06-15

Abstract

The utility model discloses an OLED and a device for air-drying after cleaning a substrate, which comprises an air-drying carrying platform, an air-drying carrying arm and an air-drying assembly, wherein the air-drying carrying platform comprises two groups, and the two groups of air-drying carrying platforms are arranged at intervals along the linear direction; the air drying carrying arms are arranged on the side parts of the air drying carrying platforms and extend linearly along the arrangement directions of the two groups of air drying carrying platforms; the air drying assembly is arranged on the side part of the air drying carrying platform along the arrangement direction of the air drying carrying platform; air-dry the microscope carrier and air-dry and remove the arm and be fretwork bearing structure, treat that air-dried OLED base plate places on air-dry the microscope carrier, air-dry and remove the arm and pass air-dry the microscope carrier from the below and hold rising to air-dry microscope carrier top after OLED base plate, pass along rectilinear motion and air-dry the subassembly and air-dry the back, air-dry and remove the arm and descend and return from air-dry microscope carrier below straight line. The utility model discloses a fretwork formula vacuum bears and moves the structure, bears, moves the in-process and accomplish simultaneously that the top and bottom air-dries the action to realize OLED and FPC and independently adsorb fixedly, guarantee to move and air-dry in-process positional stability.

Description

OLED and substrate cleaning and air drying device

Technical Field

The utility model relates to an automation equipment field indicates an air-dry device after OLED and base plate wash very much.

Background

In the field of flat panel display device production equipment, related parts comprise a glass substrate, a cover plate, an FPC (flexible printed circuit) and various optical films, and when the processes of assembling, adhering and the like of the parts of the flat panel display device are carried out, a pre-processing process is required. Such as a cleaning process, is an essential front-end process for assembling and bonding flat panel display devices, and is used for cleaning the surface of a screen. In the production process of an OLED screen, a layer of interlayer adhesive is arranged between an OLED and an upper substrate, the interlayer adhesive needs to be stripped and removed by adopting laser, the laser irradiates the surface of the substrate, penetrates through the substrate and then is irradiated onto the interlayer adhesive, and the adhesive layer stripping function is realized. In order to ensure that the laser can effectively penetrate through the substrate and reduce the blocking situation caused by impurities on the surface of the substrate, the surface of the substrate needs to be cleaned before laser stripping. Because the sundries adhered to the surface of the substrate are difficult to remove, the commonly adopted process is grinding and cleaning, namely, the grinding disc is tightly attached to the surface of the substrate, the surface of the substrate is ground through the rotation of the grinding disc, and the sundries are separated from the surface of the substrate and then are removed. The OLED substrate needs to be sprayed and washed by liquid or gas-liquid mixed two fluids in the cleaning process so as to assist in improving the cleaning cleanliness; therefore, after the polishing cleaning is completed, liquid remains on the substrate surface, and the remaining liquid needs to be dried and removed before proceeding to the next process. The drying process generally adopted is air drying, the upper surface and the lower surface of the OLED are required to be dried simultaneously during drying, and the traditional air drying equipment cannot finish the drying of the upper surface and the lower surface of the OLED while conveying the sheet OLED; and because the strong wind when air-drying the drying can impact OLED, if OLED does not have the fixed measure and very easily blows when air-drying the in-process and conveying, take place the offset, influence air-drying and conveying. In addition, since the side of the OLED is connected with the FPC, the shape, structure and material characteristics of the FPC are different from those of the OLED, and thus different designs of the bearing, adsorbing/moving mechanisms are required in the processes of conveying, air drying and adsorbing and moving the OLED and the FPC.

SUMMERY OF THE UTILITY MODEL

The to-be-solved technical problem of the utility model is not enough to above-mentioned prior art, provide one kind and adopt fretwork formula vacuum to bear and move the structure, bear, move the in-process synchronous completion lower surface and air-dry the action to realize OLED and FPC and independently adsorb fixedly, guarantee to move and air-dry the device after air-drying in-process positional stability's OLED and base plate wash.

The utility model adopts the following technical scheme: an OLED and substrate cleaning and air drying device comprises air drying carrying platforms, an air drying moving arm and air drying assemblies, wherein the air drying carrying platforms comprise two groups, and the two groups of air drying carrying platforms are arranged at intervals along a linear direction; the air drying carrying arms are arranged on the side parts of the air drying carrying platforms and extend linearly along the arrangement directions of the two groups of air drying carrying platforms; the air drying assembly is arranged on the side part of the air drying carrying platform along the arrangement direction of the air drying carrying platform and extends to the upper part of the air drying carrying platform; air-dry the microscope carrier and air-dry and remove the arm and be fretwork bearing structure, treat that air-dried OLED base plate places on air-dry the microscope carrier, air-dry and remove the arm and pass air-dry the microscope carrier from the below and hold the OLED base plate after rising to air-dry microscope carrier top, pass along linear motion and air-dry the subassembly and air-dry the back, air-dry and remove the arm and drop and make OLED base plate through air-dry the microscope carrier support, air-dry and remove the arm from top to bottom and pass air-dry the microscope carrier to from air-dry the microscope carrier below straight line return, hold in the palm and take off a set of OLED base plate.

Preferably, the air-drying carrier comprises a carrier support, an OLED bearing part and an FPC bearing part, wherein the carrier support is vertically arranged in the air-drying box body; the platform support is horizontally arranged on the platform support, the platform support is of an upper-lower double-layer structure, and a moving channel is formed in the middle of the platform support; the OLED bearing part is arranged on one side of the carrier bracket, the OLED and the substrate thereof are supported and adsorbed and fixed by the OLED bearing part, the FPC bearing part is arranged on the other side of the carrier bracket, the FPC connected to one side of the OLED is supported by the FPC bearing part, and the OLED bearing part and the FPC bearing part are of upper and lower hollow structures so as to be convenient to move and air-dry the OLED substrate up and down.

Preferably, the OLED bearing part comprises an OLED bearing plate, OLED branches, a vacuum joint and OLED suction nozzles, wherein the OLED bearing plate comprises at least two pieces, the OLED bearing plate is arranged on the inner side of the carrier bracket, and a through groove is formed in the middle of the OLED bearing plate; the OLED supporting strips comprise at least two, the OLED supporting strips are arranged on the OLED bearing support plate along two sides of the through groove at intervals in parallel, strip-shaped gaps which are communicated up and down are formed between every two adjacent OLED supporting strips, and the OLED supporting strips form OLED bearing areas on the OLED bearing plate; the OLED bearing plate and the OLED branch bars are internally provided with air passages respectively, and the OLED bearing plate is communicated with the air passages of the OLED branch bars; the vacuum joint is arranged at the side part of the OLED bearing plate and is communicated with an air passage in the OLED bearing plate; the OLED suction nozzles are arranged on the OLED branch strips and communicated with the air passages inside the OLED branch strips, and vacuum negative pressure is generated at the OLED suction nozzles so as to downwards adsorb and fix the OLED substrate.

Preferably, the FPC support portion includes an FPC support board, the FPC support board includes at least two pieces, the FPC support board is horizontally disposed on the outer side of the support bracket corresponding to the OLED support board, and at least two strip-shaped gaps are disposed on the FPC support board.

Preferably, the air-drying moving arm comprises a linear module, a sliding seat, a lifting motor, a supporting component, an OLED moving component and an FPC moving component, wherein the linear module is arranged on the side of the air-drying carrying platform along the linear direction; the sliding seat is connected to the linear module in a sliding way and is driven by the linear module; the lifting motor is arranged on one side of the sliding seat; the supporting component is arranged on the other side of the sliding seat in a sliding manner along the vertical direction and is connected with the output end of the lifting motor, and the lifting motor drives the supporting component to move up and down; the OLED shifting component is arranged on one side of the supporting component, and the FPC shifting component is arranged on the other side of the supporting component; at the first group of air-drying carrying platforms, the OLED moving component and the FPC moving component upwards penetrate through a through groove and a strip-shaped gap of the air-drying carrying platforms, the OLED moving component supports and adsorbs the OLED, the FPC moving component supports the FPC, the OLED and the FPC are driven to synchronously and linearly move, the upper surfaces and the lower surfaces of the OLED and the FPC are air-dried through the air-drying component, and then the OLED and the FPC are placed on the air-drying carrying platforms of the caching stations; the OLED moving component and the FPC moving component penetrate through the through groove and the strip-shaped gap of the air drying carrying platform and move downwards into the moving channel, and the OLED moving component and the FPC moving component linearly return to the air drying station in the moving channel.

Preferably, the supporting component comprises a lifting seat and a supporting rod, wherein the lifting seat is connected to the other side of the sliding seat in a sliding manner along the vertical direction and is connected with the output end of the lifting motor; the supporting rods comprise at least two supporting rods, the supporting rods are horizontally connected to the upper portion of the lifting seat at intervals, and air paths are arranged inside the supporting rods.

Preferably, the OLED moving component includes at least two OLED moving branches, the OLED moving branches are arranged on the supporting rod in parallel at intervals and horizontally extend to the left side and the right side of the supporting rod to form an OLED supporting area; an air path is arranged inside the OLED moving branch bar and is communicated with the air path inside the supporting bar; the moving vacuum joint is arranged on the support rod and is connected with the support rod air passage; the moving suction nozzles are arranged on the OLED moving branches and connected with the air passages of the OLED moving branches, and vacuum negative pressure is generated at the moving suction nozzles to adsorb the OLED substrate.

Preferably, the FPC moving part includes FPC moving branches and moving suction nozzles, the FPC moving branches include at least two, the FPC moving branches are arranged on the supporting rod in parallel at intervals, and horizontally extend to the left and right sides of the supporting rod to form FPC supporting areas; an air passage is arranged inside the FPC moving branch and is communicated with the air passage inside the supporting rod, a moving suction nozzle is arranged on the FPC moving branch and is communicated with the air passage inside the FPC moving branch.

Preferably, the air drying assembly comprises an upper air drying part and a lower air drying part, wherein the upper air drying part is arranged on the front side of the first group of air drying carrying tables of the air drying box body, and the upper air drying part is used for air drying the upper part of the OLED substrate when the OLED substrate passes through the upper air drying part and enters the air drying carrying tables; between the two sets of air-dry microscope stages of above-mentioned upper and lower air-dry parts, when the OLED base plate was moved the arm through air-drying and is held to pass upper and lower air-dry parts and get into the buffer memory station from air-drying the station, air-dry the part from top to bottom and air-dry the surface about to the OLED base plate and carry out the air-dry drying.

Preferably, the upper air drying part comprises a first support, a first mounting seat, a first support rod and a first air knife, wherein the first support rod is vertically arranged; the first mounting seat is detachably arranged on the first support column and can slide up and down along the first support column so as to adjust the mounting position; the first supporting rod is horizontally connected to the first mounting seat; the first air knife is horizontally connected to the first support rod, an air port with a slit structure is formed in the bottom of the first air knife, and high-pressure air blown out from the air port is used for air-drying the surface of the OLED substrate; the upper and lower air drying components comprise a second support column, a second mounting seat, a second support rod and a second air knife, wherein the second support column is vertically arranged; the two second mounting seats are arranged along the vertical direction and are detachably connected with the second support; the second supporting rods comprise two, and the two second supporting rods are respectively horizontally connected to the second mounting seats and horizontally extend; the two second air knives are respectively and horizontally connected to the second support rod, and an air drying space is formed between the two second air knives; and one side of the second air knife, which is close to the air drying space, is provided with an air port with a slit structure, and high-pressure air is blown out from the air port so as to air-dry the OLED substrate passing through the air drying space.

The beneficial effects of the utility model reside in that:

the utility model discloses not enough and defect to prior art existence innovate, have designed one kind and have adopted fretwork formula vacuum to bear and move the structure, bear, move the in-process and accomplish the action of air-drying from top to bottom in step to realize OLED and FPC independent absorption fixed, guarantee to move and air-dry after the OLED and the base plate of air-drying in-process positional stability wash the device. The utility model discloses wholly include air-dry microscope carrier, air-dry and carry arm, go up air-dry part and air-dry part from top to bottom, air-dry problem from top to bottom and move, OLED stability problem and OLED and FPC independent bearing adsorption problem in the air-dry process, the utility model discloses the original design has air-dry microscope carrier and air-dry and carries the arm to cooperate and set up air-dry part from top to bottom between air-dry station and buffer memory station; the air drying carrying platform and the air drying moving arm of the utility model are designed by adopting an upper hollow structure and a lower hollow structure, and the air drying carrying platform and the air drying moving are staggered in the vertical direction, thereby not only ensuring the unobstructed air drying of the upper surface and the lower surface of the OLED, but also realizing the lifting, supporting, taking and placing of the OLED; in addition, the OLED bearing area or the FPC bearing area of the air-drying carrying platform and the air-drying moving arm further have a vacuum adsorption function, the air-drying carrying platform or the air-drying moving arm generates downward vacuum negative pressure adsorption force while lifting and supporting the OLED or the FPC, the OLED is fixed in position through the vacuum negative pressure adsorption force, and the conveying and air-drying stability is guaranteed. Specifically, the utility model discloses an air-dry microscope carrier adopts the microscope carrier support of upper and lower bilayer structural design as bearing the main part, and microscope carrier support lower part forms the removal passageway, and microscope carrier support upper portion is the bearing plane, is equipped with OLED bearing part and FPC bearing part, and OLED bearing part uses OLED bearing board as the main part, including two OLED bearing boards that set up side by side, and the middle part of OLED bearing board is seted up logical groove to the arm is moved in the air-dry conveniently and passes from top to bottom; a plurality of OLED branches are arranged on the two sides of the OLED bearing plate close to the through grooves at intervals in parallel, and a gap space is formed between every two adjacent OLED branches so that the air-drying carrying arm can penetrate through the OLED bearing plate up and down; an OLED bearing area is formed between the OLED bearing plate and the OLED branches. In addition, the utility model discloses still be equipped with the gas circuit that communicates each other inside OLED loading board and OLED branch, the lateral part of OLED loading board is connected with the vacuum joint to external vacuum generator, has laid a plurality of OLED suction nozzles on the OLED branch, and vacuum joint and OLED suction nozzle communicate with OLED loading board and OLED branch inside gas circuit respectively, thereby make OLED suction nozzle produce vacuum negative pressure, so that adsorb the OLED that fixedly places on the OLED branch downwards; the FPC bearing part is close to one side of the OLED bearing part, and the FPC bearing part is an FPC bearing plate provided with a plurality of strip-shaped gaps and used for bearing the FPC on one side of the OLED and ensuring that the FPC is air-dried, moved and penetrates up and down. The air-drying carrying arm of the utility model is integrally arranged at the side part of the air-drying carrying platform along the linear direction, the air-drying carrying arm takes the linear module and the slide seat as the linear driving structure, and the linear module drives the slide seat to move back and forth linearly between the two air-drying box bodies; a lifting seat is slidably arranged on the side wall of the sliding seat along the vertical direction, and the lifting seat is driven by a lifting motor to move up and down in the vertical direction; two support rods are arranged on the side part of the lifting seat in parallel at intervals and are used as a bearing main body, and an OLED moving area and an FPC moving area are respectively arranged on the support rods to respectively realize the adsorption moving of the OLED and the FPC; the utility model arranges OLED moving branch bars on the supporting bar in parallel at intervals, the OLED moving branch bars horizontally extend to the left and right sides of the supporting bar, and a plurality of OLED moving branch bars form a horizontal supporting surface for supporting OLED; the lateral part of OLED shifts the branch and is equipped with many parallel FPC that the interval set up and moves the branch, and FPC moves the branch and extends to the left and right sides of branch, forms the horizontal holding surface that supports FPC. And simultaneously, the utility model discloses a branch, OLED move the brace and FPC move the inside gas circuit that all is equipped with of brace, and the three gas circuit communicates each other, and the lateral part of branch is equipped with moves vacuum joint, and OLED moves the brace and FPC moves and is equipped with a plurality of suction nozzles of moving on the brace, moves vacuum joint and moves the suction nozzle and all communicate with the gas circuit to move suction nozzle department and produce vacuum negative pressure and adsorb OLED downwards and move the brace and FPC move OLED and FPC who lifts on the brace and FPC. When the air-drying carrying arm works, the supporting strips penetrate through the through grooves of the air-drying carrying platform from top to bottom, the OLED carrying strips and the FPC carrying strips are carried by the OLED and staggered and oppositely crossed with the OLED supporting strips and the FPC carrying plate of the air-drying carrying platform, and the OLED and the FPC on the air-drying carrying platform are lifted from the lower side of the air-drying carrying platform or the lifted OLED and FPC are placed on the air-drying carrying platform and then penetrate through the through grooves to move downwards.

Drawings

Fig. 1 is a schematic perspective view of the present invention.

Fig. 2 is a second schematic perspective view of the present invention.

Fig. 3 is a third schematic view of a three-dimensional structure of the present invention.

Fig. 4 is one of the three-dimensional schematic diagrams of the air-drying carrying platform and the air-drying arm of the present invention.

Fig. 5 is a second schematic view of the three-dimensional structure of the air-drying carrying platform and the air-drying carrying arm of the present invention.

Fig. 6 is a third schematic view of the three-dimensional structure of the air-drying carrying platform and the air-drying moving arm of the present invention.

Fig. 7 is one of the schematic three-dimensional structures of the air drying carrier of the present invention.

Fig. 8 is a second schematic perspective view of the air drying carrier of the present invention.

Fig. 9 is a third schematic view of the three-dimensional structure of the air drying carrier of the present invention.

Fig. 10 is a schematic view of a three-dimensional structure of the air drying arm according to the present invention.

Fig. 11 is a second schematic view of the three-dimensional structure of the air drying carrying arm of the present invention.

Fig. 12 is a third schematic view of the three-dimensional structure of the air drying carrying arm of the present invention.

Fig. 13 is a schematic perspective view of the upper air-drying part of the present invention.

Fig. 14 is a second schematic perspective view of the upper air-drying component of the present invention.

Fig. 15 is a schematic perspective view of the upper and lower air drying components of the present invention.

Fig. 16 is a second schematic perspective view of the upper and lower airing members according to the present invention.

Detailed Description

The invention will be further described with reference to the accompanying drawings:

as shown in fig. 1 to 16, the technical solution adopted by the present invention is as follows: an OLED and substrate cleaning and air drying device comprises an air drying carrying platform 2, an air drying carrying arm 3 and air drying components, wherein the air drying carrying platform 2 comprises two groups, and the two groups of air drying carrying platforms 2 are arranged at intervals along a linear direction; the air-drying carrying arm 3 is arranged at the side part of the air-drying carrying platform 2 and extends along the arrangement direction of the two groups of air-drying carrying platforms 2; the air drying assembly is arranged on the side part of the air drying carrying platform 2 along the arrangement direction of the air drying carrying platform 2 and extends to the upper part of the air drying carrying platform 2; air-dry microscope carrier 2 and air-dry and remove arm 3 and be fretwork bearing structure, treat that air-dried OLED base plate places on air-dry microscope carrier 2, air-dry and remove arm 3 and pass air-dry microscope carrier 2 from the below and hold the OLED base plate after rise to air-dry microscope carrier 2 top, pass along linear motion and air-dry the subassembly and air-dry the back, air-dry and remove arm 3 and descend and make OLED base plate through air-dry microscope carrier 2 and support, air-dry and remove arm 3 from top to bottom and pass air-dry microscope carrier 2 to from air-dry microscope carrier 2 below straight line return, ask to take off a set of OLED base plate next.

The air-drying carrier 2 comprises a carrier support 21, a carrier support 22, an OLED bearing part and an FPC bearing part, wherein the carrier support 21 is vertically arranged in the air-drying box body; the stage support 22 is horizontally arranged on the stage support 21, the stage support 22 is of a vertical double-layer structure, and a moving channel A is formed in the middle of the stage support 22; the OLED bearing part is arranged on one side of the carrier bracket 22, the OLED and the substrate thereof are supported and adsorbed and fixed by the OLED bearing part, the FPC bearing part is arranged on the other side of the carrier bracket 22, the FPC connected to one side of the OLED is supported by the FPC bearing part, and the OLED bearing part and the FPC bearing part are of an upper hollow structure and a lower hollow structure so as to be convenient to move and air-dry the OLED substrate up and down.

The OLED bearing part comprises an OLED bearing plate 23, OLED supporting strips 24, a vacuum joint 25 and OLED suction nozzles 26, wherein the OLED bearing plate 23 comprises at least two pieces, the OLED bearing plate 23 is arranged on the inner side of the carrier bracket 22, and a through groove B is formed in the middle of the OLED bearing plate 23; the OLED supporting strips 24 comprise at least two, the OLED supporting strips 24 are arranged on the OLED bearing support plate 23 along two sides of the through groove B at intervals in parallel, strip-shaped gaps which are communicated up and down are formed by the adjacent OLED supporting strips 24, and OLED bearing areas are formed on the OLED bearing plate 23 by the OLED supporting strips 24; air passages are respectively arranged inside the OLED bearing plate 23 and the OLED branch strips 24, and the OLED bearing plate 23 is communicated with the air passages of the OLED branch strips 24; the vacuum connector 25 is arranged at the side part of the OLED bearing plate 23 and is communicated with the air channel inside the OLED bearing plate 23; the OLED suction nozzles 26 are arranged on the OLED branches 24 and are communicated with the air passages inside the OLED branches 24, and vacuum negative pressure is generated at the OLED suction nozzles 26 so as to downwards adsorb and fix the OLED substrate.

The FPC bearing part comprises an FPC bearing plate 27, the FPC bearing plate 27 comprises at least two blocks, the FPC bearing plate 27 is horizontally arranged on the outer side of the bearing support 22 corresponding to the OLED bearing plate 23, and at least two strip-shaped gaps are formed in the FPC bearing plate 27.

The air-drying carrying arm 3 comprises a linear module 31, a sliding seat 32, a lifting motor 33, a supporting component, an OLED carrying component and an FPC carrying component, wherein the linear module 31 is arranged on the side part of the air-drying carrying platform 2 along the linear direction; the slide carriage 32 is slidably connected to the linear module 31 and driven by the linear module 31; the lifting motor 33 is arranged on one side of the sliding seat 32; the supporting component is arranged on the other side of the sliding seat 32 in a sliding manner along the vertical direction and is connected with the output end of a lifting motor 33, and the lifting motor 33 drives the supporting component to move up and down; the OLED shifting component is arranged on one side of the supporting component, and the FPC shifting component is arranged on the other side of the supporting component; at the first group of air-drying carrying platform 2, the OLED moving part and the FPC moving part upwards penetrate through a through groove B and a strip-shaped gap of the air-drying carrying platform, the OLED moving part supports and adsorbs the OLED, the FPC moving part supports the FPC, the OLED and the FPC are driven to synchronously and linearly move, the upper surface and the lower surface of the OLED and the upper surface and the lower surface of the FPC are air-dried through the air-drying assembly, and then the OLED and the FPC are placed on the air-drying carrying platform 2 of the caching station; the OLED moving component and the FPC moving component penetrate through the through groove B and the strip-shaped gaps of the air drying carrying platform 2 to move downwards into the moving channel A, and linearly return to the air drying station in the moving channel A.

The supporting component comprises a lifting seat 34 and a supporting rod 35, wherein the lifting seat 34 is connected to the other side of the sliding seat 32 in a sliding manner along the vertical direction and is connected with the output end of the lifting motor 33; the supporting rods 35 comprise at least two supporting rods 35, the supporting rods 35 are horizontally connected to the upper part of the lifting seat 34 at intervals, and air passages are formed in the supporting rods 35.

The OLED moving component comprises an OLED moving branch 36, a moving vacuum joint 37 and a moving suction nozzle 38, wherein the OLED moving branch 36 comprises at least two, the OLED moving branch 36 is arranged on the supporting rod 35 in parallel at intervals and horizontally extends to the left side and the right side of the supporting rod 35 to form an OLED supporting area; an air passage is arranged inside the OLED moving branch 36 and is communicated with the air passage inside the support rod 35; the moving vacuum joint 37 is arranged on the support rod 35 and is connected with the support rod 35 through an air passage; the moving suction nozzles 38 include at least two, the moving suction nozzles 38 are disposed on the OLED moving branch 36 and connected to the air path of the OLED moving branch 36, and the vacuum negative pressure generated at the moving suction nozzles 38 adsorbs the OLED substrate.

The FPC moving component comprises FPC moving support bars 39 and moving suction nozzles 38, the FPC moving support bars 39 comprise at least two, the FPC moving support bars 39 are arranged on the supporting rod 35 in parallel at intervals and horizontally extend to the left side and the right side of the supporting rod 35 to form FPC supporting areas; an air passage is arranged inside the FPC moving branch 39 and is communicated with the air passage inside the supporting rod 35, a moving suction nozzle 38 is arranged on the FPC moving branch 39, and the moving suction nozzle 38 is communicated with the air passage inside the FPC moving branch 39.

The air drying component comprises an upper air drying part 4 and an upper air drying part 5 and a lower air drying part 5, wherein the upper air drying part 4 is arranged on the front side of the first group of air drying carrying platforms 2 of the air drying box body 6, and when the OLED substrate passes through the upper air drying part 4 and enters the air drying carrying platforms 2, the upper air drying part 4 carries out air drying on the upper part of the OLED substrate; between the two sets of air-drying carrying platforms 2 of the upper and lower air-drying components 5, when the OLED substrate is supported by the air-drying arm 3, passes through the upper and lower air-drying components 5 and enters the caching station from the air-drying station, the upper and lower air-drying components 5 air-dry and dry the upper and lower surfaces of the OLED substrate.

The upper air-drying component 4 comprises a first support 41, a first mounting seat 42, a first support rod 43 and a first air knife 44, wherein the first support 41 is vertically arranged; the first mounting seat 42 is detachably disposed on the first support 41 and can slide up and down along the first support 41 to adjust the mounting position; the first supporting rod 43 is horizontally connected to the first mounting seat 42; the first air knife 44 is horizontally connected to the first support rod 43, and an air port with a slit structure is arranged at the bottom of the first air knife 44 and blows high-pressure air out of the air port to air-dry the surface of the OLED substrate; the up-down air-drying component 5 comprises a second support column 51, a second mounting seat 52, a second support rod 53 and a second air knife 54, wherein the second support column 51 is vertically arranged; the second mounting seats 52 comprise two, and the two second mounting seats 52 are arranged along the vertical direction and detachably connected with the second support column 51; the second support rods 53 comprise two, and the two second support rods 53 are respectively horizontally connected to the second mounting seats 52 and horizontally extend; the second air knives 54 include two, the two second air knives 54 are respectively horizontally connected to the second support rods 53, and an air drying space is formed between the two second air knives 54; one side of the second air knife 54 close to the air drying space is provided with an air port with a slit structure, and high-pressure air is blown out from the air port so as to air-dry the OLED substrate passing through the air drying space.

Further, the utility model discloses an adopt fretwork formula vacuum to bear and move the structure, bear, move the in-process and accomplish the top and bottom in step and air-dry the action to realize OLED and FPC and independently adsorb fixedly, guarantee to move and air-dry the device after air-drying OLED and the base plate cleaning of air-drying in-process positional stability. The utility model discloses wholly include air-dry microscope carrier, air-dry and carry arm, go up air-dry part and air-dry part from top to bottom, air-dry problem from top to bottom and move, OLED stability problem and OLED and FPC independent bearing adsorption problem in the air-dry process, the utility model discloses the original design has air-dry microscope carrier and air-dry and carries the arm to cooperate and set up air-dry part from top to bottom between air-dry station and buffer memory station; the air drying carrying platform and the air drying moving arm of the utility model are designed by adopting an upper hollow structure and a lower hollow structure, and the air drying carrying platform and the air drying moving are staggered in the vertical direction, thereby not only ensuring the unobstructed air drying of the upper surface and the lower surface of the OLED, but also realizing the lifting, supporting, taking and placing of the OLED; in addition, the OLED bearing area or the FPC bearing area of the air-drying carrying platform and the air-drying moving arm further have a vacuum adsorption function, the air-drying carrying platform or the air-drying moving arm generates downward vacuum negative pressure adsorption force while lifting and supporting the OLED or the FPC, the OLED is fixed in position through the vacuum negative pressure adsorption force, and the conveying and air-drying stability is guaranteed. Specifically, the utility model discloses an air-dry microscope carrier adopts the microscope carrier support of upper and lower bilayer structural design as bearing the main part, and microscope carrier support lower part forms the removal passageway, and microscope carrier support upper portion is the bearing plane, is equipped with OLED bearing part and FPC bearing part, and OLED bearing part uses OLED bearing board as the main part, including two OLED bearing boards that set up side by side, and the middle part of OLED bearing board is seted up logical groove to the arm is moved in the air-dry conveniently and passes from top to bottom; a plurality of OLED branches are arranged on the two sides of the OLED bearing plate close to the through grooves at intervals in parallel, and a gap space is formed between every two adjacent OLED branches so that the air-drying carrying arm can penetrate through the OLED bearing plate up and down; an OLED bearing area is formed between the OLED bearing plate and the OLED branches. In addition, the utility model discloses still be equipped with the gas circuit that communicates each other inside OLED loading board and OLED branch, the lateral part of OLED loading board is connected with the vacuum joint to external vacuum generator, has laid a plurality of OLED suction nozzles on the OLED branch, and vacuum joint and OLED suction nozzle communicate with OLED loading board and OLED branch inside gas circuit respectively, thereby make OLED suction nozzle produce vacuum negative pressure, so that adsorb the OLED that fixedly places on the OLED branch downwards; the FPC bearing part is close to one side of the OLED bearing part, and the FPC bearing part is an FPC bearing plate provided with a plurality of strip-shaped gaps and used for bearing the FPC on one side of the OLED and ensuring that the FPC is air-dried, moved and penetrates up and down. The air-drying carrying arm of the utility model is integrally arranged at the side part of the air-drying carrying platform along the linear direction, the air-drying carrying arm takes the linear module and the slide seat as the linear driving structure, and the linear module drives the slide seat to move back and forth linearly between the two air-drying box bodies; a lifting seat is slidably arranged on the side wall of the sliding seat along the vertical direction, and the lifting seat is driven by a lifting motor to move up and down in the vertical direction; two support rods are arranged on the side part of the lifting seat in parallel at intervals and are used as a bearing main body, and an OLED moving area and an FPC moving area are respectively arranged on the support rods to respectively realize the adsorption moving of the OLED and the FPC; the utility model arranges OLED moving branch bars on the supporting bar in parallel at intervals, the OLED moving branch bars horizontally extend to the left and right sides of the supporting bar, and a plurality of OLED moving branch bars form a horizontal supporting surface for supporting OLED; the lateral part of OLED shifts the branch and is equipped with many parallel FPC that the interval set up and moves the branch, and FPC moves the branch and extends to the left and right sides of branch, forms the horizontal holding surface that supports FPC. And simultaneously, the utility model discloses a branch, OLED move the brace and FPC move the inside gas circuit that all is equipped with of brace, and the three gas circuit communicates each other, and the lateral part of branch is equipped with moves vacuum joint, and OLED moves the brace and FPC moves and is equipped with a plurality of suction nozzles of moving on the brace, moves vacuum joint and moves the suction nozzle and all communicate with the gas circuit to move suction nozzle department and produce vacuum negative pressure and adsorb OLED downwards and move the brace and FPC move OLED and FPC who lifts on the brace and FPC. When the air-drying carrying arm works, the supporting strips penetrate through the through grooves of the air-drying carrying platform from top to bottom, the OLED carrying strips and the FPC carrying strips are carried by the OLED and staggered and oppositely crossed with the OLED supporting strips and the FPC carrying plate of the air-drying carrying platform, and the OLED and the FPC on the air-drying carrying platform are lifted from the lower side of the air-drying carrying platform or the lifted OLED and FPC are placed on the air-drying carrying platform and then penetrate through the through grooves to move downwards.

The embodiments of the present invention are only for describing the specific implementation thereof, and are not limited to the scope of protection thereof. The present invention is not limited to the above embodiments, but can be modified in various ways without departing from the scope of the present invention.

Claims

1. The utility model provides a device is air-dried after OLED and base plate wash which characterized in that: the air drying device comprises air drying carrying platforms (2), air drying carrying arms (3) and air drying assemblies, wherein the air drying carrying platforms (2) comprise two groups, and the two groups of air drying carrying platforms (2) are arranged at intervals along the linear direction; the air-drying carrying arms (3) are arranged on the side parts of the air-drying carrying platforms (2) and extend linearly along the arrangement direction of the two groups of air-drying carrying platforms (2); the air drying component is arranged on the side part of the air drying carrying platform (2) along the arrangement direction of the air drying carrying platform (2) and extends to the upper part of the air drying carrying platform (2); air-dry microscope carrier (2) and air-dry and remove arm (3) and be fretwork bearing structure, treat that air-dried OLED base plate places on air-dry microscope carrier (2), air-dry and remove arm (3) and pass air-dry microscope carrier (2) from the below and hold OLED base plate back and rise to air-dry microscope carrier (2) top, pass along linear motion and air-dry the subassembly and air-dry the back, air-dry and remove arm (3) and descend and make OLED base plate through air-dry microscope carrier (2) and support, air-dry and remove arm (3) from top to bottom and pass air-dry microscope carrier (2), and return from air-dry microscope carrier (2) below straight line, ask a set of OLED base plate of next.

2. The OLED and substrate post-cleaning seasoning apparatus of claim 1, wherein: the air drying carrier (2) comprises a carrier support (21), a carrier support (22), an OLED bearing part and an FPC bearing part, wherein the carrier support (21) is vertically arranged in the air drying box body; the carrier support (22) is horizontally arranged on the carrier support (21), the carrier support (22) is of a vertical double-layer structure, and a moving channel (A) is formed in the middle of the carrier support (22); the OLED bearing part is arranged on one side of the carrier bracket (22), the OLED and the substrate of the OLED are supported and adsorbed and fixed through the OLED bearing part, the FPC bearing part is arranged on the other side of the carrier bracket (22), the FPC connected to one side of the OLED is supported through the FPC bearing part, and the OLED bearing part and the FPC bearing part are of an upper hollow structure and a lower hollow structure so as to be convenient to move and air-dry the OLED substrate up and down.

3. The OLED and substrate post-cleaning seasoning apparatus of claim 2, wherein: the OLED bearing part comprises an OLED bearing plate (23), OLED supporting strips (24), a vacuum joint (25) and OLED suction nozzles (26), wherein the OLED bearing plate (23) comprises at least two pieces, the OLED bearing plate (23) is arranged on the inner side of the carrier bracket (22), and a through groove (B) is formed in the middle of the OLED bearing plate (23); the OLED supporting strips (24) comprise at least two, the OLED supporting strips (24) are arranged on the OLED bearing support plate (23) along two sides of the through groove (B) at intervals in parallel, strip-shaped gaps which are communicated up and down are formed by the adjacent OLED supporting strips (24), and OLED bearing areas are formed on the OLED bearing plate (23) by the OLED supporting strips (24); air passages are respectively arranged in the OLED bearing plate (23) and the OLED branch bars (24), and the OLED bearing plate (23) is communicated with the air passages of the OLED branch bars (24); the vacuum joint (25) is arranged at the side part of the OLED bearing plate (23) and is communicated with an internal air passage of the OLED bearing plate (23); the OLED suction nozzles (26) are arranged on the OLED branch bars (24) and are communicated with the air passages in the OLED branch bars (24), and vacuum negative pressure is generated at the OLED suction nozzles (26) so as to downwards adsorb and fix the OLED substrate.

4. The OLED and the substrate drying device after being cleaned according to claim 3, wherein: the FPC bearing part comprises an FPC bearing plate (27), the FPC bearing plate (27) comprises at least two blocks, the FPC bearing plate (27) is horizontally arranged on the outer side of the bearing support (22) corresponding to the OLED bearing plate (23), and at least two strip-shaped gaps are formed in the FPC bearing plate (27).

5. The OLED and the substrate drying device after being cleaned according to claim 4, wherein: the air-drying carrying arm (3) comprises a linear module (31), a sliding seat (32), a lifting motor (33), a supporting component, an OLED carrying component and an FPC carrying component, wherein the linear module (31) is arranged on the side part of the air-drying carrying platform (2) along the linear direction; the slide seat (32) is connected to the linear module (31) in a sliding way and is driven by the linear module (31); the lifting motor (33) is arranged on one side of the sliding seat (32); the supporting component is arranged on the other side of the sliding seat (32) in a sliding manner along the vertical direction and is connected with the output end of a lifting motor (33), and the lifting motor (33) drives the supporting component to move up and down; the OLED shifting component is arranged on one side of the supporting component, and the FPC shifting component is arranged on the other side of the supporting component; at the first group of air-drying carrying platforms (2), the OLED moving part and the FPC moving part upwards penetrate through a through groove (B) and a strip-shaped gap of the air-drying carrying platform, the OLED moving part supports and adsorbs the OLED, the FPC moving part supports the FPC, the OLED and the FPC are driven to synchronously and linearly move, the upper surface and the lower surface of the OLED and the upper surface and the lower surface of the FPC are air-dried through the air-drying assembly, and then the OLED and the FPC are placed on the air-drying carrying platforms (2) of the caching station; the OLED moving component and the FPC moving component penetrate through the through groove (B) and the strip-shaped gap of the air drying carrying platform (2) to move downwards into the moving channel (A), and return to the air drying station in the moving channel (A) in a straight line mode.

6. The OLED and the substrate drying device after being cleaned according to claim 5, wherein: the supporting component comprises a lifting seat (34) and a support rod (35), wherein the lifting seat (34) is connected to the other side of the sliding seat (32) in a sliding manner along the vertical direction and is connected with the output end of a lifting motor (33); the supporting rods (35) comprise at least two supporting rods, the supporting rods (35) are horizontally connected to the upper part of the lifting seat (34) at intervals, and air passages are arranged in the supporting rods (35).

7. The OLED and the substrate drying device after being cleaned according to claim 6, wherein: the OLED moving component comprises OLED moving branch bars (36), moving vacuum joints (37) and moving suction nozzles (38), wherein the OLED moving branch bars (36) comprise at least two, the OLED moving branch bars (36) are arranged on the supporting rod (35) in parallel at intervals and horizontally extend to the left side and the right side of the supporting rod (35) to form an OLED supporting area; an air path is arranged inside the OLED moving branch bar (36), and the air path is communicated with the air path inside the support bar (35); the moving vacuum joint (37) is arranged on the support rod (35) and is connected with the support rod (35) through a gas circuit; the moving suction nozzles (38) comprise at least two, the moving suction nozzles (38) are arranged on the OLED moving branch strips (36) and are connected with the air passages of the OLED moving branch strips (36), and vacuum negative pressure is generated at the positions of the moving suction nozzles (38) to adsorb the OLED substrates.

8. The OLED and the substrate drying device after being cleaned according to claim 6, wherein: the FPC moving component comprises FPC moving branch bars (39) and moving suction nozzles (38), the FPC moving branch bars (39) comprise at least two, the FPC moving branch bars (39) are arranged on the supporting rod (35) in parallel at intervals and horizontally extend to the left side and the right side of the supporting rod (35) to form an FPC supporting area; an air path is arranged inside the FPC moving branch (39), the air path is communicated with the air path inside the support rod (35), a moving suction nozzle (38) is arranged on the FPC moving branch (39), and the moving suction nozzle (38) is communicated with the air path inside the FPC moving branch (39).

9. The OLED and substrate post-cleaning seasoning apparatus of claim 2, wherein: the air drying assembly comprises an upper air drying part (4) and an upper air drying part and a lower air drying part (5), wherein the upper air drying part (4) is arranged on the front side of a first group of air drying carrying platforms (2) of an air drying box body (6), and when the OLED substrate passes through the upper air drying part (4) and enters the air drying carrying platforms (2), the upper air drying part (4) carries out air drying on the upper part of the OLED substrate; between the two groups of air-drying carrying platforms (2) of the upper and lower air-drying components (5), when the OLED substrate is supported by the air-drying moving arm (3) to pass through the upper and lower air-drying components (5) and enter the caching station from the air-drying station, the upper and lower air-drying components (5) air-dry and dry the upper and lower surfaces of the OLED substrate.

10. The OLED and substrate post-cleaning seasoning apparatus of claim 9, wherein: the upper air drying component (4) comprises a first support column (41), a first mounting seat (42), a first support rod (43) and a first air knife (44), wherein the first support column (41) is vertically arranged; the first mounting seat (42) is detachably arranged on the first support column (41) and can slide up and down along the first support column (41) so as to adjust the mounting position; the first supporting rod (43) is horizontally connected to the first mounting seat (42); the first air knife (44) is horizontally connected to the first support rod (43), an air port with a slit structure is formed in the bottom of the first air knife (44), and high-pressure air blown out from the air port is used for air-drying the surface of the OLED substrate; the upper and lower air drying components (5) comprise second support columns (51), second mounting seats (52), second support rods (53) and second air knives (54), wherein the second support columns (51) are vertically arranged; the second mounting seats (52) comprise two, and the two second mounting seats (52) are arranged along the vertical direction and are detachably connected with the second support columns (51); the second supporting rods (53) comprise two, and the two second supporting rods (53) are respectively horizontally connected to the second mounting seats (52) and horizontally extend; the two second air knives (54) are respectively and horizontally connected to the second supporting rod (53), and an air drying space is formed between the two second air knives (54); one side of the second air knife (54) close to the air drying space is provided with an air port with a slit structure, and high-pressure air is blown out from the air port so as to air-dry the OLED substrate passing through the air drying space.