CN215103508U - Jig for vacuum coating - Google Patents

Jig for vacuum coating Download PDF

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Publication number
CN215103508U
CN215103508U CN202022072440.1U CN202022072440U CN215103508U CN 215103508 U CN215103508 U CN 215103508U CN 202022072440 U CN202022072440 U CN 202022072440U CN 215103508 U CN215103508 U CN 215103508U
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workpiece
work piece
gear
fixing member
jig
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CN202022072440.1U
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Chinese (zh)
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苏文校
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Dongguan Youshang Nanotechnology Co ltd
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Dongguan Youshang Nanotechnology Co ltd
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Abstract

The utility model relates to the field of vacuum coating, in particular to a jig for vacuum coating, which comprises a driving frame and a driving shaft rotatably arranged at the middle position of the driving frame, wherein a first bearing is fixedly arranged between the driving frame and the driving shaft, the driving frame and the driving shaft are both in transmission connection with an external motor mechanism, two workpiece bearing discs distributed in parallel are arranged on the driving frame, and one of the workpiece bearing discs is fixedly connected with the driving frame; the workpiece mounting holes distributed densely are formed, the space on the workpiece bearing plate can be utilized to the maximum, more workpieces are mounted in a unit area, enough gaps are reserved, the uniformity of a plating layer is guaranteed, the workpiece bearing plates distributed in two groups in parallel are arranged, a sealing protective sleeve is arranged between the workpiece bearing plates, the length of the sealing protective sleeve can be adjusted according to the length of the workpieces and the non-plating layer area, and therefore the whole jig is more flexible in size and high in adaptability.

Description

Jig for vacuum coating
Technical Field
The utility model relates to a vacuum coating field, concretely relates to tool for vacuum coating.
Background
Vacuum coating is a method for heating metal or non-metal material under high vacuum condition to evaporate and condense it on the surface of plated piece to form film, and is an important aspect of vacuum application field, and it is a new process for preparing film for scientific research and practical production by using physical or chemical method and absorbing a series of new technologies of electron beam, molecular beam, ion beam, plasma beam, radio frequency and magnetic control, etc. on the basis of vacuum technology. That is, a method of evaporating or sputtering a metal, an alloy or a compound in a vacuum to solidify and deposit the metal, the alloy or the compound on an object to be coated is called as vacuum coating, and a carrier for carrying a workpiece in a coating process is a jig.
The patent with publication number (CN208201097U) discloses a double-end cutter coating jig, and the device can be vertically placed in a vacuum coating machine to can make work piece both ends accomplish the coating simultaneously, but the space utilization of this structure is lower, and the protection of its cutter non-picture layer position has length restriction, therefore has certain limitation.
SUMMERY OF THE UTILITY MODEL
In order to overcome the problems of the prior art, the utility model provides a jig for vacuum coating.
The technical scheme of the utility model is specifically as follows: a jig for vacuum coating comprises a driving frame and a driving shaft rotatably mounted at the middle position of the driving frame, a first bearing is fixedly arranged between the driving frame and the driving shaft, the driving frame and the driving shaft are in transmission connection with an external motor mechanism, two workpiece bearing discs distributed in parallel are arranged on the driving frame, one of the workpiece bearing discs is fixedly connected with the driving frame, the driving shaft penetrates through the workpiece bearing discs and is rotatably connected with the workpiece bearing discs, a workpiece gear disc is rotatably mounted on the workpiece bearing discs and is in transmission connection with the workpiece gear disc, a plurality of workpiece mounting holes for mounting workpieces are formed in the workpiece gear disc and the driving frame, the workpiece mounting holes are distributed in a honeycomb shape, and a workpiece fixing piece for fixing the workpieces is mounted in each workpiece mounting hole, the workpiece fixing piece is fixedly connected with the driving frame and the workpiece gear disc in a threaded connection mode, a sealing protective sleeve is arranged between the workpiece bearing discs, the sealing protective sleeve is sleeved outside the workpiece, and the two ends of the sealing protective sleeve are connected with the workpiece fixing piece in a sealing mode.
Preferably, the workpiece bearing disc is provided with a gear disc mounting groove, a second bearing is fixedly mounted on the inner side wall of the gear disc mounting groove, and the end part of the workpiece gear disc is fixedly arranged on the inner wall of the gear disc mounting groove.
Preferably, the quantity of work piece toothed disc is four, four work piece toothed disc is the rhombus and distributes, it has drive gear to set firmly to correspond work piece toothed disc department on the lateral wall of drive shaft, is close to two of drive shaft work piece toothed disc with drive gear meshing transmission, remaining two work piece toothed disc with be close to two of drive shaft be equipped with driven gear between the work piece toothed disc, and pass through driven gear meshing transmission.
Preferably, the workpiece fixing piece comprises a first fixing piece and a second fixing piece, fixing piece mounting grooves are formed in two ends of the workpiece mounting hole, and the first fixing piece and the second fixing piece are respectively installed in the two fixing piece mounting grooves in a threaded manner.
Preferably, each workpiece gear disc is provided with seven workpiece mounting holes.
Preferably, the workpiece fixing piece and the sealing protective sleeve are made of rubber materials.
Compared with the prior art, the beneficial effects of the utility model are that:
1. by arranging the workpiece mounting holes which are distributed relatively densely, the space on the workpiece bearing plate can be utilized to the maximum extent, so that more workpieces can be mounted in a unit area, and enough gaps are reserved to ensure the uniformity of a plating layer;
2. the two groups of workpiece bearing discs are distributed in parallel, the sealing protective sleeve is arranged between the workpiece bearing discs, the length of the sealing protective sleeve can be adjusted according to the length of the workpiece and the non-coating area, and therefore the whole jig is flexible in size and high in adaptability.
Drawings
Fig. 1 is a schematic structural view of a jig for vacuum deposition according to an embodiment of the present invention;
fig. 2 is a schematic front structural view of the workpiece carrier tray according to an embodiment of the present invention;
fig. 3 is a schematic view of a back structure of the workpiece carrier tray according to an embodiment of the present invention;
fig. 4 is a schematic view of a partial cross-sectional structure of the workpiece carrier tray according to an embodiment of the present invention;
in the above fig. 1-4, 1, the driving frame; 11. a first bearing; 2. a drive shaft; 21. a drive gear; 22. a driven gear; 3. a workpiece carrier tray; 301. a gear plate mounting groove; 31. a second bearing; 4. a workpiece gear plate; 401. a workpiece mounting hole; 402. a fixing piece mounting groove; 5. a workpiece fixing member; 51. a first fixing member; 52. a second fixing member; 6. and sealing the protective sleeve.
The specific implementation mode is as follows:
the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Examples
As shown in fig. 1-4, a vacuum coating jig comprises a driving frame 1 and a driving shaft 2 rotatably mounted at the middle position of the driving frame 1, a first bearing 11 is fixedly arranged between the driving frame 1 and the driving shaft 2, the driving frame 1 and the driving shaft 2 are both in transmission connection with an external motive mechanism, the driving frame 1 is used for driving the whole jig to revolve, the driving shaft 2 is used for driving a workpiece gear disc 4 to rotate, so that the coating on the surface of a workpiece is more uniform, two workpiece bearing discs 3 distributed in parallel are arranged on the driving frame 1, one workpiece bearing disc 3 is fixedly connected with the driving frame 1, when the driving frame 1 drives one workpiece bearing disc 3 to rotate, the other workpiece bearing disc 3 can also rotate due to the workpiece, the driving shaft 2 penetrates through the workpiece bearing disc 3 and is rotatably connected with the workpiece bearing disc 3, the workpiece bearing disc 3 is rotatably mounted with the workpiece gear disc 4, the driving shaft 2 is in transmission connection with the workpiece gear disc 4, when in use, the workpiece bearing disc 3 revolves under the driving of the driving frame 1, the workpiece gear disc 4 arranged on the workpiece bearing disc 3 rotates under the driving of the driving shaft 2, so that the plating layer on the surface of a workpiece is more uniform, a plurality of workpiece mounting holes 401 for mounting the workpiece are respectively arranged on the workpiece gear disc 4 and the driving frame 1, the plurality of workpiece mounting holes 401 are distributed in a honeycomb shape, the space on the workpiece bearing disc 3 can be maximally utilized by arranging the workpiece mounting holes 401 which are distributed relatively densely, so that more workpieces are mounted in a unit area, enough gaps are reserved to ensure the uniformity of the plating layer, the workpiece fixing piece 5 for fixing the workpiece is mounted in each workpiece mounting hole 401, the workpiece fixing piece 5 is fixed with the driving frame 1 and the workpiece gear disc 4 in a threaded manner, and the workpiece fixing pieces 5 are mounted at two ends of the workpiece mounting holes 401 in a threaded manner, not only can fix a position the position of work piece, can also guarantee that work piece and work piece bear the leakproofness at 3 joint positions of dish, protect non-coating region, two work piece bear and be equipped with sealing protection cover 6 between the dish 3, sealing protection cover 6 cover is established in the outside of work piece, and sealing protection cover 6's both ends and 5 sealing connection of work piece mounting, bear dish 3 through the work piece that sets up two sets of parallel distribution, and set up sealing protection cover 6 between work piece bears the dish 3, wherein sealing protection cover 6's length can be adjusted according to the length of work piece and non-coating region, therefore the size of whole tool is more nimble, strong adaptability.
Specifically, as shown in fig. 4, the workpiece bearing plate 3 is provided with a gear plate mounting groove 301, the inner side wall of the gear plate mounting groove 301 is fixedly provided with the second bearing 31, the end portion of the workpiece gear plate 4 is fixedly arranged on the inner wall of the gear plate mounting groove 301, and by arranging the workpiece gear plate 4 which can rotate relative to the workpiece bearing plate 3, the workpieces mounted on the workpiece gear plate 4 can be self-transferred, so that the uniformity of the workpiece surface coating is improved.
Specifically, as shown in fig. 3, the number of the workpiece gear disks 4 is four, four workpiece gear disks 4 are distributed in a rhombus shape, a driving gear 21 is fixedly arranged on the outer side wall of the driving shaft 2 corresponding to the workpiece gear disks 4, two workpiece gear disks 4 close to the driving shaft 2 are in meshing transmission with the driving gear 21, driven gears 22 are arranged between the remaining two workpiece gear disks 4 and two workpiece gear disks 4 close to the driving shaft 2, the driven gears 22 are in meshing transmission, the workpiece gear disks 4 close to each other can be driven to rotate through the middle driving gear 21, and then are matched with the driven gears 22 to drive the workpiece gear disks 4 far away from each other to rotate, so that the four workpiece gear disks 4 are driven to rotate through the driving shaft 2, and the rotation process is realized.
Specifically, as shown in fig. 4, the workpiece fixing member 5 includes a first fixing member 51 and a second fixing member 52, fixing member mounting grooves 402 have been provided at both ends of the workpiece mounting hole 401, and the first fixing member 51 and the second fixing member 52 are respectively installed in the two fixing member mounting grooves 402 by screwing, wherein one end of the workpiece fixing member 5 is threaded, and the other end is a hexagonal edge, so that the workpiece fixing member 5 can be installed by using a tool, thereby not only positioning the position of the workpiece, but also ensuring the sealing property between the workpiece and the joint portion of the workpiece bearing plate 3, and protecting the non-plating layer region.
Specifically, as shown in fig. 2 and 3, seven workpiece mounting holes 401 are formed in each workpiece gear plate 4, so that the space on the workpiece bearing plate 3 can be maximally utilized, and more workpieces can be mounted in a unit area.
Specifically, work piece mounting 5 and sealing protective sleeve 6 are the rubber material, and the rubber material has certain elasticity, and the leakproofness between installation back and the work piece is good, and frictional force is big, can play the fixed action.
The utility model discloses a theory of operation is: when the device is used, the workpiece bearing disc 3 revolves under the driving of the driving frame 1, the workpiece gear disc 4 arranged on the workpiece bearing disc 3 rotates under the driving of the driving shaft 2, so that the coating on the surface of a workpiece is more uniform, a plurality of workpiece mounting holes 401 for mounting the workpiece are arranged on the workpiece gear disc 4 and the driving frame 1, the workpiece mounting holes 401 are distributed in a honeycomb shape, the space on the workpiece bearing disc 3 can be utilized to the maximum extent, so that more workpieces can be mounted in a unit area, enough gaps are reserved to ensure the uniformity of the coating, the workpiece fixing pieces 5 are mounted at two ends of the workpiece mounting holes 401 in a screwing mode, the position of the workpiece can be positioned, the sealing performance of the joint part of the workpiece and the workpiece bearing disc 3 can be ensured, the non-coating area is protected, the sealing protective sleeves 6 are arranged between the two groups of workpiece bearing discs 3 which are distributed in parallel, wherein the length of sealing protective sheath 6 can be adjusted according to the length of work piece and non-coating region, therefore the size of whole tool is more nimble, strong adaptability.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that changes may be made in the embodiments and/or equivalents thereof without departing from the spirit and scope of the invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (6)

1. The utility model provides a tool for vacuum coating, includes that drive frame (1) and rotation are installed drive shaft (2) of drive frame (1) intermediate position department, first bearing (11) have set firmly between drive frame (1) and drive shaft (2), drive frame (1), drive shaft (2) all are connected with the transmission of outside motive mechanism, a serial communication port, be equipped with two parallel distribution's work piece bearing disc (3) on drive frame (1), one of them work piece bearing disc (3) with drive frame (1) fixed connection, drive shaft (2) run through work piece bearing disc (3), and with work piece bearing disc (3) rotate to be connected, work piece bearing disc (3) are gone up and are rotated and install work piece toothed disc (4), drive shaft (2) with work piece toothed disc (4) transmission is connected, a plurality of work piece mounting hole that is used for installing the work piece is all seted up on work piece toothed disc (4) and drive frame (1) (401) A plurality of workpiece setting hole (401) is cellular distribution, every all install workpiece fixing piece (5) that are used for fixed work piece in workpiece setting hole (401), workpiece fixing piece (5) with drive frame (1), work piece toothed disc (4) spiro union are fixed, two the work piece bears and is equipped with sealed protective sheath (6) between dish (3), the outside at the work piece is established to sealed protective sheath (6) cover, just the both ends of sealed protective sheath (6) with workpiece fixing piece (5) sealing connection.
2. The jig for vacuum coating according to claim 1, wherein the workpiece bearing plate (3) is provided with a gear plate mounting groove (301), the inner side wall of the gear plate mounting groove (301) is fixedly provided with a second bearing (31), and the end of the workpiece gear plate (4) is fixedly arranged on the inner wall of the gear plate mounting groove (301).
3. The jig for vacuum coating according to claim 1, wherein the number of the workpiece gear discs (4) is four, the four workpiece gear discs (4) are distributed in a diamond shape, a driving gear (21) is fixedly arranged on the outer side wall of the driving shaft (2) corresponding to the workpiece gear discs (4), two workpiece gear discs (4) close to the driving shaft (2) are in meshing transmission with the driving gear (21), and a driven gear (22) is arranged between the remaining two workpiece gear discs (4) and the two workpiece gear discs (4) close to the driving shaft (2) and is in meshing transmission through the driven gear (22).
4. The jig for vacuum coating according to claim 1, wherein the workpiece fixing member (5) comprises a first fixing member (51) and a second fixing member (52), fixing member mounting grooves (402) are formed at both ends of the workpiece mounting hole (401), and the first fixing member (51) and the second fixing member (52) are respectively installed in the two fixing member mounting grooves (402) in a threaded manner.
5. The jig for vacuum coating according to claim 1, wherein each of the workpiece gear plates (4) is provided with seven workpiece mounting holes (401).
6. The jig for vacuum coating according to claim 1, wherein the workpiece fixing member (5) and the sealing protective sleeve (6) are made of rubber.
CN202022072440.1U 2020-09-21 2020-09-21 Jig for vacuum coating Active CN215103508U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202022072440.1U CN215103508U (en) 2020-09-21 2020-09-21 Jig for vacuum coating

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202022072440.1U CN215103508U (en) 2020-09-21 2020-09-21 Jig for vacuum coating

Publications (1)

Publication Number Publication Date
CN215103508U true CN215103508U (en) 2021-12-10

Family

ID=79261919

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202022072440.1U Active CN215103508U (en) 2020-09-21 2020-09-21 Jig for vacuum coating

Country Status (1)

Country Link
CN (1) CN215103508U (en)

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