CN215088531U - A rubber coating device for carborundum seed crystal bonds - Google Patents
A rubber coating device for carborundum seed crystal bonds Download PDFInfo
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- CN215088531U CN215088531U CN202120615894.0U CN202120615894U CN215088531U CN 215088531 U CN215088531 U CN 215088531U CN 202120615894 U CN202120615894 U CN 202120615894U CN 215088531 U CN215088531 U CN 215088531U
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Abstract
The utility model discloses a gluing device for silicon carbide seed crystal bonding, which comprises a frame, a rotating shaft which is rotatably arranged on the frame and is internally provided with a first cavity, a sucking disc which is connected to the top end of the rotating shaft and is internally provided with a second cavity communicated with the first cavity, a graphite seed crystal seat arranged above the sucking disc, a first driving mechanism which is arranged on the frame and is used for driving the rotating shaft to rotate, and an air exhaust mechanism communicated with the first cavity; a vacuum suction hole communicated with the upper part of the second cavity is formed in the sucker, and the upper end of the vacuum suction hole penetrates through the sucker and is positioned below the graphite seed crystal seat; the device also comprises a glue injection mechanism and a glue scraping mechanism which are arranged above the graphite seed crystal seat, and a second driving mechanism which is arranged on the rack and is used for driving the glue injection mechanism and the glue scraping mechanism to synchronously move along the vertical direction and/or the horizontal direction; the glue injection mechanism is used for quantitatively supplying glue; the glue spreading mechanism comprises a scraper and a vibrator which are connected with each other. The utility model discloses the device can improve the bonding quality between carborundum seed crystal and the graphite seed crystal seat.
Description
Technical Field
The utility model relates to an artificial crystal growth technical field, in particular to a rubber coating device for carborundum seed crystal bonds.
Background
At present, a physical vapor transport method (PVT method) is a mainstream process technology for growing silicon carbide single crystals, and the technology is characterized in that a silicon carbide seed crystal sheet is adhered to a graphite seed crystal seat, the graphite seed crystal seat is arranged at the upper part of a graphite crucible, and the silicon carbide single crystals are grown on the silicon carbide seed crystals by heating and sublimating raw materials at the bottom of the crucible; the uniformity, compactness, firmness and the like of the bonding between the silicon carbide seed crystal and the graphite seed crystal seat have very important influence on the growth quality of the silicon carbide single crystal.
In the prior art, the silicon carbide seed crystal and the graphite seed crystal base are bonded together by coating bonding glue on the end face of the graphite seed crystal base, manually coating the bonding glue on the graphite seed crystal base by using a scraper, then placing the silicon carbide seed crystal, and bonding the silicon carbide seed crystal and the graphite seed crystal base together by a pressurizing and heating process. The method is difficult to ensure the quantitative use of the bonding glue, the uniform thickness of the glue layer, and the problems of non-uniform bonding, insecurity, bubble and the like frequently occur, thereby influencing the normal growth of the silicon carbide single crystal. Therefore, the silicon carbide seed crystal bonding and gluing device is designed, and is vital to improving the bonding quality between the silicon carbide seed crystal and the graphite seed crystal seat and promoting the growth of high-quality silicon carbide single crystals.
Disclosure of Invention
The utility model aims at providing a rubber coating device for carborundum seed crystal bonds can improve the bonding quality between carborundum seed crystal and the graphite seed crystal seat, promotes the growth of high-quality carborundum single crystal.
In order to achieve the above purpose, the utility model adopts the technical scheme that:
a gluing device for gluing a silicon carbide seed crystal comprises a frame, a rotating shaft which can rotate around the direction of the axis of the rotating shaft and is arranged on the frame, a first cavity is arranged in the rotating shaft, a sucking disc which is connected to the top end of the rotating shaft and is internally provided with a second cavity communicated with the first cavity, a graphite seed crystal seat arranged above the sucking disc, a first driving mechanism which is arranged on the frame and is used for driving the rotating shaft to rotate, and an air exhaust mechanism which is communicated with the first cavity;
a vacuum suction hole communicated above the second cavity is formed in the sucker, and the upper end of the vacuum suction hole penetrates through the sucker and is located below the graphite seed crystal seat;
the device also comprises a glue injection mechanism and a glue scraping mechanism which are arranged above the graphite seed crystal seat, and a second driving mechanism which is arranged on the rack and is used for driving the glue injection mechanism and the glue scraping mechanism to synchronously move along the vertical direction and/or the horizontal direction;
the glue injection mechanism is used for quantitatively supplying glue; the glue scraping mechanism comprises a scraping plate and a vibrator connected to the scraping plate.
Preferably, the two ends of the bottom of the scraper along the radial direction of the graphite seed crystal seat are along the up-down direction:
respectively aligned with the center and the edge of the graphite seed crystal seat; or beyond the center and edge of the graphite seed crystal seat respectively; or one end is aligned with the center or edge of the graphite seed crystal seat, and the other end exceeds the edge or center of the graphite seed crystal seat.
Preferably, the rack comprises a base, a housing and an upright column, the housing and the upright column are arranged on the base, the rotating shaft can rotate around the axis line of the rotating shaft and penetrates through the top of the housing, and the first driving mechanism and the air exhaust mechanism are both positioned in the housing; the stand is higher than the graphite seed crystal seat, and the second driving mechanism is arranged on the stand.
Preferably, the second driving mechanism comprises a first sliding block which can move along the horizontal direction and is arranged on the rack, a first motor for driving the first sliding block to move, a second sliding block which can move along the vertical direction and is arranged on the first sliding block, and a second motor and/or a first hand wheel for driving the second sliding block to move.
More preferably, the second driving mechanism further comprises a mounting block arranged on the second sliding block, and the glue injection mechanism and the glue scraping mechanism are respectively and fixedly connected to the mounting block.
Preferably, the first cavity penetrates through the rotating shaft along the axial direction of the rotating shaft, and the air exhaust mechanism comprises a rotating joint communicated with the bottom end part of the rotating shaft and an air exhaust pump communicated with the rotating joint.
More preferably, the second cavity comprises a disc-shaped cavity arranged in the sucker, and a connecting hole, the upper end of the connecting hole is communicated with the disc-shaped cavity, the lower end of the connecting hole penetrates out of the sucker, and the connecting hole and the first cavity are coaxially arranged and are communicated with each other.
Still further preferably, the device further comprises a first sealing ring arranged between the top of the rotating shaft and the bottom of the sucker, and the top end of the first cavity and the bottom end of the connecting hole are both located in the first sealing ring.
Preferably, the device further comprises a second sealing ring arranged between the top of the sucker and the bottom of the graphite seed crystal seat, the number of the vacuum suction holes is multiple, and the top ends of the multiple vacuum suction holes are located in the second sealing ring.
Preferably, the first driving mechanism comprises a worm gear reducer, a third motor and/or a second hand wheel, wherein the worm gear reducer is arranged on the rack and used for driving the rotating shaft to rotate, and the third motor and/or the second hand wheel are used for driving the worm gear reducer to rotate.
Because of above-mentioned technical scheme's application, compared with the prior art, the utility model have the following advantage: the utility model relates to a gluing device for silicon carbide seed crystal bonding, which supplies glue quantitatively to a graphite seed crystal seat through a gluing mechanism, drives the graphite seed crystal seat to rotate through a rotating shaft, and simultaneously evenly scrapes the bonding glue through a scraper; the vibrator is arranged on the scraper, and the bonding glue is uniformly scattered through vibration while the glue is scraped, so that the bonding quality between the silicon carbide seed crystal and the graphite seed crystal seat is improved; through install the vibrator on the scraper blade, can also shake out the bubble in the adhesive cement when the frictioning, further improve the bonding quality between carborundum seed crystal and the graphite seed crystal seat. The utility model relates to a rubber coating device for carborundum seed crystal bonds, through the rotatory vibration knife coating of frictioning mechanism of graphite seed crystal seat, can obtain the accurate controllable, the even adhesive linkage of glue film thickness of volume of gluing, make carborundum seed crystal bond evenly, firmly, bubble-free to improve the bonding quality between carborundum seed crystal and the graphite seed crystal seat, promoted the growth of high-quality carborundum single crystal.
Drawings
Fig. 1 is a schematic structural diagram of a gluing device according to an embodiment of the present invention.
Wherein: 1. a first cavity; 2. a rotating shaft; 3. a second cavity; 31. a disc-shaped cavity; 32. connecting holes; 4. a suction cup; 5. a graphite seed crystal base; 6. vacuum suction holes; 7. a glue injection mechanism; 71. a glue storage container; 72. a glue injection nozzle; 8. a glue scraping mechanism; 81. a squeegee; 82. a vibrator; 9. a base; 10. a housing; 11. a column; 12. a first slider; 13. a first motor; 14. a second slider; 15. a second motor; 16. a first hand wheel; 17. mounting blocks; 18. a rotary joint; 19. a first seal ring; 20. a second seal ring; 21. a worm gear reducer; 22. a third motor; 23. a second hand wheel; 24. a support; 25. and (7) bonding the layers.
Detailed Description
The technical solution of the present invention will be further explained with reference to the following embodiments and the accompanying drawings.
Referring to fig. 1, the embodiment provides a gluing device for silicon carbide seed crystal bonding, which comprises a frame, a rotating shaft 2 which is arranged on the frame and is provided with a first cavity 1 inside and can rotate around the self axial lead direction, a sucking disc 4 which is connected to the top end of the rotating shaft 2 and is provided with a second cavity 3 inside, a graphite seed crystal seat 5 arranged above the sucking disc 4, a first driving mechanism which is arranged on the frame and is used for driving the rotating shaft 2 to rotate, and an air exhaust mechanism communicated with the first cavity 1, wherein the second cavity 3 is communicated with the first cavity 1. The first cavity 1 is vacuumized through the air exhaust mechanism, and the graphite seed crystal seat 5 can be sucked on the sucking disc 4.
Referring to fig. 1, the rack includes a base 9 and a housing 10 disposed on the base 9, the rotating shaft 2 is rotatably disposed on the top of the housing 10 around its axis, the first driving mechanism and the air pumping mechanism are both disposed in the housing 10, the upper end of the rotating shaft 2 upwardly penetrates through the housing 10, and the lower end of the rotating shaft 2 is disposed in the housing 10. The first drive mechanism and the air exhaust mechanism are protected by the housing 10.
Referring to fig. 1, the frame further includes a support 24 disposed on the base 9 and located in the housing 10, and the first driving mechanism includes a worm gear reducer 21 disposed on the support 24 and configured to drive the rotating shaft 2 to rotate, a third motor 22 configured to drive the worm gear reducer 21 to rotate, and a second wheel 23. The rotating shaft 2 is installed in a worm gear hole of the worm gear reducer 21 in a penetrating mode and penetrates into the support 24 downwards. The third motor 22 and the second wheel 23 are used for respectively driving the worm and gear reducer 21 to respectively realize automatic control and manual control of rotation of the rotating shaft 2.
Referring to fig. 1, the first chamber 1 extends through the rotating shaft 2 along the axial direction of the rotating shaft 2, and the air-extracting mechanism includes a rotary joint 18 communicating with the bottom end of the rotating shaft 2, and an air-extracting pump (not shown) communicating with the rotary joint 18. The support 24 is hollow, the rotary joint 18 is positioned inside the support 24, the side of the support 24 is provided with a hole, and the suction pump is arranged outside the support 24. In this embodiment, the first chamber 1 is a cylindrical chamber, one end of the rotary joint 18 is communicated with the bottom end of the cylindrical chamber, and the other end of the rotary joint 18 is communicated with the air pump. The rotary joint 18 is movably connected with the rotating shaft 2, namely, when the rotating shaft 2 rotates, the rotary joint 18 keeps static.
The sucker 4 is internally provided with a vacuum suction hole 6 communicated above the second cavity 3, and the upper end of the vacuum suction hole 6 penetrates through the upper surface of the sucker 4 and is positioned below the graphite seed crystal seat 5. The second cavity 3 comprises a disc-shaped cavity 31 arranged in the suction cup 4, and a connecting hole 32, the upper end of which is communicated with the disc-shaped cavity 31, and the lower end of which penetrates out of the lower surface of the suction cup 4, wherein the connecting hole 32 is coaxially arranged with the first cavity 1 and is communicated with the first cavity.
Referring to fig. 1, in the present embodiment, a plurality of vacuum suction holes 6 are respectively communicated above the disc-shaped cavity 31; only one connecting hole 32 is communicated below the disc-shaped cavity 31, the connecting holes 32 and the disc-shaped cavity 31 are coaxially arranged, and the axial center lines of the connecting holes and the disc-shaped cavity extend along the vertical direction.
The gluing device for gluing the silicon carbide seed crystals further comprises a glue injection mechanism 7 and a glue scraping mechanism 8, wherein the glue injection mechanism 7 and the glue scraping mechanism 8 are located above the graphite seed crystal seat 5.
The glue injection mechanism 7 is used for quantitatively supplying glue, and as shown in fig. 1, the glue injection mechanism 7 comprises a glue storage container 71 and a glue injection nozzle 72 communicated below the glue storage container 71. The adhesive is quantitatively supplied to the graphite seed crystal holder 5 through the adhesive injection nozzle 72. The supply method can be a coating method or a spraying method.
The squeegee mechanism 8 includes a squeegee 81 and a vibrator 82 attached to the squeegee 81. In the present embodiment, the vibrator 82 is an ultrasonic vibrator 82, and the vibration frequency thereof is adjustable.
The bottom of the scraper 81 is along the upper and lower directions of the two ends of the radial direction of the graphite seed crystal seat 5:
respectively aligned with the center and the edge of the graphite seed crystal seat 5; or beyond the center and edge of the graphite seed crystal seat 5, respectively; or one end is aligned with the center or edge of graphite seed pedestal 5 and the other end extends beyond the edge or center of graphite seed pedestal 5. In this embodiment, the graphite seed crystal seat 5 is circular, and the bottom of the scraper 81 is strip-shaped.
Referring to fig. 1, in the present embodiment, the left end of the bottom of the scraper 81 is located at the left side of the left edge of the graphite seed crystal holder 5, and the right end of the bottom of the scraper 81 is located at the right side of the center of the graphite seed crystal holder 5.
In the second embodiment, the left end of the bottom of the scraper 81 is aligned with the left edge of the graphite seed holder 5, and the right end of the bottom of the scraper 81 is aligned with the center of the graphite seed holder 5.
In the third embodiment, the left end of the bottom of the scraper 81 is aligned with the left edge of the graphite seed holder 5, and the right end of the bottom of the scraper 81 is located at the right side of the center of the graphite seed holder 5.
In the fourth embodiment, the right end of the bottom of scraper 81 is aligned with the center of graphite seed crystal holder 5, and the left end of the bottom of scraper 81 is located at the left side of the left edge of graphite seed crystal holder 5.
Through the arrangement, when the rotating shaft 2 drives the graphite seed crystal seat 5 to rotate, after at least one rotation period (namely 360 degrees of rotation), the bonding glue can be uniformly scraped by the scraping plate 81.
In this embodiment, the above gluing device for gluing the silicon carbide seed crystal further comprises a first sealing ring 19 disposed between the top of the rotating shaft 2 and the bottom of the suction cup 4, and the top end of the first cavity 1 and the bottom end of the connecting hole 32 are both located in the first sealing ring 19. By this arrangement, the sealing property between the rotary shaft 2 and the suction cup 4 can be ensured.
In this embodiment, the above gluing device for silicon carbide seed crystal bonding further comprises a second sealing ring 20 arranged between the top of the suction cup 4 and the bottom of the graphite seed crystal seat 5. The top ends of the plurality of vacuum suction holes 6 are located in the second sealing ring 20. By this arrangement, the sealing property between the graphite seed crystal seat 5 and the suction cup 4 can be ensured.
Referring to fig. 1, in the present embodiment, a first annular groove is formed at the top end of the rotating shaft 2, and the first sealing ring 19 is embedded in the first annular groove; the top end of the sucker 4 is provided with a second annular groove, and the second sealing ring 20 is embedded in the second annular groove.
The gluing device for gluing the silicon carbide seed crystals further comprises a second driving mechanism which is arranged on the rack and used for driving the glue injection mechanism 7 and the glue scraping mechanism 8 to synchronously move along the vertical direction and/or the horizontal direction.
Referring to fig. 1, the frame further includes a column 11 disposed on the base 9, and the column 11 is located on the left side of the housing 10. The top end of the upright post 11 is higher than the graphite seed crystal seat 5, and the second driving mechanism is arranged on the upright post 11.
In this embodiment, the second driving mechanism includes a first slider 12 disposed on the upright 11 and capable of moving in the horizontal direction, a first motor 13 disposed on the upright 11 and used for driving the first slider 12 to move, a second slider 14 disposed on the first slider 12 and capable of moving in the vertical direction, a second motor 15 used for driving the second slider 14 to move, and a first hand wheel 16. The second motor 15 and the first hand wheel 16 are used for respectively driving the second sliding block 14, so as to respectively realize automatic control and manual control of the lifting of the second sliding block 14.
In this embodiment, the second slider 14 is provided with a mounting block 17, and the glue injection mechanism 7 and the glue scraping mechanism 8 are respectively fixedly connected to the mounting block 17. Specifically, the glue reservoir 71 and the squeegee 81 are attached to the mounting block 17, respectively.
The following specifically explains the working process of this embodiment:
placing the graphite seed crystal seat 5 on the sucking disc 4, starting an air suction pump, and fixing the graphite seed crystal seat 5 on the sucking disc 4 in an adsorption manner; then the third motor 22 or the second hand wheel 23 drives the worm and gear speed reducer 21 to drive the rotating shaft 2 to rotate; then, the horizontal position of the mounting block 17 is adjusted according to the position of the graphite seed crystal seat 5, and then the mounting block 17 is driven to descend to a proper position through a second motor 15 or a first hand wheel 16; and finally, quantitatively injecting glue into the graphite seed crystal seat 5 through the glue injection nozzle 72, wherein the rotating shaft 2 keeps rotating, and when the bonding glue rotates to the position below the scraper 81, the bonding glue is subjected to vibration blade coating through the scraper 81, so that the bonding layer 25 with accurate and controllable glue amount and uniform glue layer thickness is finally obtained.
During the coating process, the scraper 81 can also be driven by the first motor 13 to move horizontally, so as to further uniformly coat the adhesive.
The above embodiments are only for illustrating the technical concept and features of the present invention, and the purpose thereof is to enable those skilled in the art to understand the contents of the present invention and implement the present invention, and the protection scope of the present invention can not be limited thereby, and all equivalent changes or modifications made according to the spirit of the present invention should be covered by the protection scope of the present invention.
Claims (10)
1. The utility model provides a rubber coating device for carborundum seed bonding which characterized in that: the device comprises a rack, a rotating shaft which is arranged on the rack and can rotate around the direction of the axis of the rotating shaft, a sucker which is connected to the top end of the rotating shaft and is internally provided with a second cavity communicated with the first cavity, a graphite seed crystal seat arranged above the sucker, a first driving mechanism which is arranged on the rack and is used for driving the rotating shaft to rotate, and an air exhaust mechanism communicated with the first cavity;
a vacuum suction hole communicated above the second cavity is formed in the sucker, and the upper end of the vacuum suction hole penetrates through the sucker and is located below the graphite seed crystal seat;
the device also comprises a glue injection mechanism and a glue scraping mechanism which are arranged above the graphite seed crystal seat, and a second driving mechanism which is arranged on the rack and is used for driving the glue injection mechanism and the glue scraping mechanism to synchronously move along the vertical direction and/or the horizontal direction;
the glue injection mechanism is used for quantitatively supplying glue; the glue scraping mechanism comprises a scraping plate and a vibrator connected to the scraping plate.
2. A seed crystal silicon carbide bonding apparatus according to claim 1, wherein: the bottom of the scraper blade is arranged along the upper and lower directions of the two ends of the radial direction of the graphite seed crystal seat:
respectively aligned with the center and the edge of the graphite seed crystal seat; or beyond the center and edge of the graphite seed crystal seat respectively; or one end is aligned with the center or edge of the graphite seed crystal seat, and the other end exceeds the edge or center of the graphite seed crystal seat.
3. A seed crystal silicon carbide bonding apparatus according to claim 1, wherein: the frame comprises a base, a housing and an upright post, the housing and the upright post are arranged on the base, the rotating shaft can rotate around the axis direction of the rotating shaft and penetrates through the top of the housing, and the first driving mechanism and the air exhaust mechanism are both positioned in the housing; the stand is higher than the graphite seed crystal seat, and the second driving mechanism is arranged on the stand.
4. A seed crystal silicon carbide bonding apparatus according to claim 1, wherein: the second driving mechanism comprises a first sliding block, a first motor, a second sliding block, a second motor and/or a first hand wheel, wherein the first sliding block can move along the horizontal direction and is arranged on the rack, the first motor is used for driving the first sliding block to move, the second sliding block can move along the vertical direction and is arranged on the first sliding block, and the second motor and/or the first hand wheel are used for driving the second sliding block to move.
5. A seed crystal bonding paste applying apparatus for silicon carbide according to claim 4, wherein: the second driving mechanism further comprises a mounting block arranged on the second sliding block, and the glue injection mechanism and the glue scraping mechanism are fixedly connected to the mounting block respectively.
6. A seed crystal silicon carbide bonding apparatus according to claim 1, wherein: the first cavity penetrates through the rotating shaft along the axial direction of the rotating shaft, and the air exhaust mechanism comprises a rotating joint and an air exhaust pump, wherein the rotating joint is communicated with the bottom end of the rotating shaft, and the air exhaust pump is communicated with the rotating joint.
7. A seed crystal bonding paste applying apparatus for silicon carbide according to claim 6, wherein: the second cavity comprises a disc-shaped cavity arranged in the sucker, a connecting hole with the upper end communicated with the disc-shaped cavity and the lower end penetrating out of the sucker, and the connecting hole is coaxially arranged with the first cavity and communicated with the first cavity.
8. The gluing device for seed crystal bonding of silicon carbide as claimed in claim 7, wherein: the device is characterized by further comprising a first sealing ring arranged between the top of the rotating shaft and the bottom of the sucker, and the top end of the first cavity and the bottom end of the connecting hole are both located in the first sealing ring.
9. A seed crystal silicon carbide bonding apparatus according to claim 1, wherein: the device is characterized by further comprising a second sealing ring arranged between the top of the sucker and the bottom of the graphite seed crystal seat, wherein the vacuum suction holes are multiple, and the top ends of the vacuum suction holes are located in the second sealing ring.
10. A seed crystal silicon carbide bonding apparatus according to claim 1, wherein: the first driving mechanism comprises a worm gear speed reducer, a third motor and/or a second hand wheel, wherein the worm gear speed reducer is arranged on the rack and used for driving the rotating shaft to rotate, and the third motor and/or the second hand wheel are used for driving the worm gear speed reducer to rotate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120615894.0U CN215088531U (en) | 2021-03-26 | 2021-03-26 | A rubber coating device for carborundum seed crystal bonds |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120615894.0U CN215088531U (en) | 2021-03-26 | 2021-03-26 | A rubber coating device for carborundum seed crystal bonds |
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| CN215088531U true CN215088531U (en) | 2021-12-10 |
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| CN202120615894.0U Active CN215088531U (en) | 2021-03-26 | 2021-03-26 | A rubber coating device for carborundum seed crystal bonds |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115889081A (en) * | 2022-11-30 | 2023-04-04 | 安徽微芯长江半导体材料有限公司 | Silicon carbide wafer wax pasting device and method thereof |
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2021
- 2021-03-26 CN CN202120615894.0U patent/CN215088531U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115889081A (en) * | 2022-11-30 | 2023-04-04 | 安徽微芯长江半导体材料有限公司 | Silicon carbide wafer wax pasting device and method thereof |
| CN115889081B (en) * | 2022-11-30 | 2023-06-27 | 安徽微芯长江半导体材料有限公司 | Silicon carbide wafer wax pasting device and method thereof |
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