CN210633386U - Polishing device for large-size glass sheet for semiconductor - Google Patents
Polishing device for large-size glass sheet for semiconductor Download PDFInfo
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- CN210633386U CN210633386U CN201921163571.1U CN201921163571U CN210633386U CN 210633386 U CN210633386 U CN 210633386U CN 201921163571 U CN201921163571 U CN 201921163571U CN 210633386 U CN210633386 U CN 210633386U
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Abstract
The utility model relates to the technical field of processing of glass sheets for semiconductors, in particular to a polishing processing device of large-size glass sheets for semiconductors, which comprises a marble ring, an upper marble plate, a double-polishing epoxy plate frame, a polishing leather and the like, wherein a main shaft is arranged in a single-shaft ring polishing machine, and the top end of the main shaft is fixed with the bottom surface of the lower marble plate through a positioning chuck; the lower surface of the upper marble plate and the upper surface of the lower marble plate are both bonded with polishing skins through glue, a marble ring is also placed on the lower marble plate, the marble ring is of a hollow structure, a double-polishing epoxy plate frame is placed inside the marble ring, a glass sheet is placed inside the double-polishing epoxy plate frame, and the upper marble plate is placed on the glass sheet; the utility model can simultaneously polish the upper and lower surfaces of the glass sheet, thereby not only reducing the labor cost and improving the production efficiency, but also reducing the influence of operators on the quality of the glass sheet; meanwhile, the large-size glass sheet can be processed, and the practicability is good.
Description
Technical Field
The utility model relates to a glass sheet processing technology field for the semiconductor, concretely relates to polishing processingequipment of big specification glass sheet for semiconductor.
Background
With the development of science and technology, the semiconductor industry is on the rise, and under the background that the transaction amount is greatly increased, especially some glass sheets for packaging are larger and larger in specification, thinner and thinner, and higher in technical index.
According to the traditional polishing device for the glass thin plate, the glass thin plate is fixed on a metal plate through rosin wax, and is quickly polished in a rotating mode through a polishing machine after being ground. In addition, most of the conventional polishing devices for glass sheets perform polishing on one surface, so that the working efficiency is low, and the glass sheets are easily damaged.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a polishing processingequipment of large size glass sheet metal for semiconductor to solve the problem that proposes among the above-mentioned background art.
The utility model discloses a realize through following technical scheme:
a polishing processing device for large-size glass sheets for semiconductors comprises a marble ring, an upper marble plate, a double-polishing epoxy plate frame, a polishing leather, a single-shaft ring polishing machine, a glass sheet and a lower marble plate, wherein a main shaft is arranged inside the single-shaft ring polishing machine, the top end of the main shaft is fixed with the bottom surface of the lower marble plate through a positioning chuck, an eccentric swinging structure is arranged on the upper end surface of the single-shaft ring polishing machine, a swinging arm is fixed at the top end of the eccentric swinging structure, a lifting structure is fixed at the tail end of the swinging arm, a vertical arm is installed at the bottom of the lifting structure, and a sucker seat is installed at the bottom of the vertical arm;
go up the lower surface of marble board with the upper surface of lower marble board all bonds through glue has the polishing skin, still placed down on the marble board the marble ring, the marble ring is hollow structure, placed marble ring inside the ring the two epoxy sheet frames of throwing, placed inside the two epoxy sheet frames of throwing the glass sheet, placed on the glass sheet go up the marble board.
Further, the flatness of the polishing skin is controlled within 1 mm.
Further, the main shaft is driven by a motor installed inside the single-shaft ring polishing machine.
Further, the sucking disc seat set up in go up directly over the marble plate, just sucking disc seat internally mounted has the rubber suction cup.
The polishing device further comprises a water spraying kettle and a water pump, the surface of the polishing leather is wetted by water sprayed by the water spraying kettle, and the water pump can convey polishing liquid to the inner part of the marble ring and the surface of the polishing leather.
Has the advantages that:
compared with the prior art, the utility model can simultaneously polish the upper and lower surfaces of the glass sheet, thereby not only reducing the labor cost and improving the production efficiency, but also reducing the influence of operators on the quality of the glass sheet; meanwhile, the utility model can also effectively reduce the damage to the glass sheet, improve the stability of the quality of the glass sheet and reduce the resource waste; additionally, the utility model discloses can set for according to the specification of sheet glass according to marble ring, last marble slab, lower marble slab and two epoxy frames of throwing to can carry out the processing of big specification sheet glass, improve the practicality of device.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 is a schematic structural view of the present invention;
fig. 2 is a schematic view of the bottom structure of the lifting structure of the present invention;
fig. 3 is the principle and schematic diagram of the rotation of the marble plate under the drive of the utility model.
The automatic polishing machine comprises 1-marble ring, 2-upper marble plate, 3-double polishing epoxy plate frame, 4-polishing leather, 5-single-shaft ring polishing machine, 6-glass sheet, 7-lower marble plate, 8-main shaft, 9-positioning chuck, 10-eccentric swinging structure, 11-swinging arm, 12-lifting structure, 13-vertical arm, 14-sucker seat and 15-motor.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by a person of ordinary skill in the art without creative efforts belong to the protection scope of the present invention.
Referring to fig. 1-3, the present invention provides a technical solution: the utility model provides a polishing processingequipment of big specification glass sheet for semiconductor, includes marble ring 1, goes up marble plate 2, two epoxy sheet frames 3 of throwing, polishing skin 4, unipolar ring polishing machine 5, glass sheet 6 and lower marble plate 7, its characterized in that: a main shaft 8 is arranged in the single-shaft ring polishing machine 5, the top end of the main shaft 8 is fixed with the bottom surface of the lower marble slab 7 through a positioning chuck 9, an eccentric swing structure 10 is arranged on the upper end surface of the single-shaft ring polishing machine 5, a swing arm 11 is fixed at the top end of the eccentric swing structure 10, a lifting structure 12 is fixed at the tail end of the swing arm 11, a vertical arm 13 is installed at the bottom of the lifting structure 12, and a sucker seat 14 is installed at the bottom of the vertical arm 13;
go up the lower surface of marble slab 2 and the upper surface of lower marble slab 7 and all bond through glue has polishing skin 4, has still placed marble ring 1 on the lower marble slab 7, and marble ring 1 is hollow structure, and two epoxy sheet frames 3 of throwing have been placed to marble ring 1 inside, and glass sheet 6 has been placed to two epoxy sheet frame 3 insides of throwing, has placed marble slab 2 on the glass sheet 6.
As a further improvement to the above, the flatness of the polishing skin 4 is controlled to be within 1 mm.
As a further improvement to the above, the main shaft 8 is driven by a motor 15 installed inside the single-shaft ring polishing machine 5.
As a further improvement to the above scheme, the suction cup seat 14 is arranged right above the upper marble plate 2, and a rubber suction cup is installed inside the suction cup seat 14.
As a further improvement of the scheme, the polishing device further comprises a water spraying kettle and a water pump, water sprayed by the water spraying kettle can firstly wet the surface of the polishing leather 4, and the water pump can convey polishing liquid to the interior of the marble ring 1 and the surface of the polishing leather 4.
The utility model discloses a concrete application does: firstly, placing a marble ring 1 on a lower marble plate 7 adhered with a polishing skin 4, adjusting the marble ring 1 to a proper position, wherein the marble ring 1 is of a hollow structure, then placing a double-polishing epoxy plate frame 3 inside the marble ring 1, and then placing a glass sheet 6 inside the double-polishing epoxy plate frame 3; then, wetting the polishing leather 4 by using a water spraying kettle, and starting a water pump to convey polishing liquid to the interior of the marble ring 1 and the surface of the polishing leather 4; then the pressure of the lifting structure 12 in the single-shaft ring polishing machine 5, the parameters of the eccentric swing structure 10 and the rotating speed of the main shaft 8 are adjusted, the glass sheet 6 placed on the polishing leather 4 is driven by the main shaft 8 to rotate under the action of friction force, the upper marble plate 2 placed on the glass sheet 6 is driven by the main shaft 5 and the swing arm 11 in the single-shaft ring polishing machine 5 to rotate left and right under the action of friction force and impact the inner circle of the marble ring 1, so that the marble ring 1 rotates left and right, and the glass sheet 6 in the double-polishing epoxy plate frame 3 can be driven to move regularly, and the glass sheet 6 can be polished under the action of the upper polishing leather 4, the lower polishing leather 4 and polishing liquid. And after the device operates for 2-4 hours, pressing a stop button corresponding to the main shaft 8, lifting the swing arm 11, taking out the marble plate 2, and taking out the glass sheet 6.
The utility model can simultaneously polish the upper and lower surfaces of the glass sheet 6, thereby not only reducing the labor cost and improving the production efficiency, but also reducing the influence of operators on the quality 6 of the glass sheet; meanwhile, the utility model can also effectively reduce the damage to the glass sheet 6, improve the stability of the quality of the glass sheet 6 and reduce the resource waste; additionally, the utility model discloses can set for according to marble ring 1, go up marble slab 2, marble slab 7 and two specifications of throwing epoxy frame 3 down according to glass sheet 6's specification to can carry out the processing of big specification glass sheet 6, improve the practicality of device.
In the description of the present application, it should be noted that, unless otherwise specifically stated or limited, the terms "disposed," "mounted," "connected," and "connected" are used in a broad sense and can be, for example, fixedly connected, detachably connected, or integrally connected, mechanically connected, electrically connected, directly connected, connected through an intermediate medium, or connected to each other through the inside of two elements. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art according to specific circumstances.
In the description of the present application, it should also be noted that reference to the description of the terms "one embodiment," "an example," "a specific example," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
Claims (5)
1. The utility model provides a polishing processingequipment of big specification glass sheet for semiconductor, includes marble ring (1), goes up marble slab (2), two epoxy sheet frames (3), polishing skin (4), unipolar ring polishing machine (5), glass sheet (6) and lower marble slab (7), its characterized in that: a main shaft (8) is arranged inside the single-shaft ring polishing machine (5), the top end of the main shaft (8) is fixed with the bottom surface of the lower marble plate (7) through a positioning chuck (9), an eccentric swing structure (10) is arranged on the upper end surface of the single-shaft ring polishing machine (5), a swing arm (11) is fixed at the top end of the eccentric swing structure (10), a lifting structure (12) is fixed at the tail end of the swing arm (11), a vertical arm (13) is installed at the bottom of the lifting structure (12), and a sucker seat (14) is installed at the bottom of the vertical arm (13);
go up the lower surface of marble board (2) with the upper surface of lower marble board (7) all bonds through glue has polishing skin (4), still placed down on marble board (7) marble ring (1), marble ring (1) is hollow structure, placed marble ring (1) inside two epoxy sheet frames (3) of throwing, two epoxy sheet frames (3) inside has been placed glass sheet (6), placed on glass sheet (6) go up marble board (2).
2. A large size glass sheet for semiconductor polishing apparatus according to claim 1,
the method is characterized in that: the flatness of the polishing leather (4) is controlled within 1 mm.
3. A large-size glass sheet for semiconductors according to claim 1, wherein: the main shaft (8) is driven by a motor (15) arranged in the single-shaft ring polishing machine (5).
4. A large-size glass sheet for semiconductors according to claim 1, wherein: the sucker seat (14) is arranged right above the upper marble plate (2), and a rubber sucker is arranged inside the sucker seat (14).
5. A large-size glass sheet for semiconductors according to claim 1, wherein: the polishing device is characterized by further comprising a water spraying kettle and a water pump, the surface of the polishing leather (4) can be wetted by water sprayed by the water spraying kettle, and the water pump can convey polishing liquid to the interior of the marble ring (1) and the surface of the polishing leather (4).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921163571.1U CN210633386U (en) | 2019-07-24 | 2019-07-24 | Polishing device for large-size glass sheet for semiconductor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921163571.1U CN210633386U (en) | 2019-07-24 | 2019-07-24 | Polishing device for large-size glass sheet for semiconductor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210633386U true CN210633386U (en) | 2020-05-29 |
Family
ID=70799891
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921163571.1U Active CN210633386U (en) | 2019-07-24 | 2019-07-24 | Polishing device for large-size glass sheet for semiconductor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210633386U (en) |
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2019
- 2019-07-24 CN CN201921163571.1U patent/CN210633386U/en active Active
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