CN215036462U

CN215036462U - Grinding and polishing driving system

Info

Publication number: CN215036462U
Application number: CN202121397136.2U
Authority: CN
Inventors: 朱枫; 项伟琪; 郭政建
Original assignee: Morinaga Optical and Electronic Equipment Co Ltd
Current assignee: Morinaga Optical and Electronic Equipment Co Ltd
Priority date: 2021-06-23
Filing date: 2021-06-23
Publication date: 2021-12-07
Anticipated expiration: 2031-06-23

Abstract

The utility model discloses a grinding and polishing actuating system, include: the device comprises a body, an upper disc, a first rotating device, a second rotating device, a linear driving device and a lower disc; the first rotating device drives the upper disc to rotate, and the linear driving device drives the upper disc to vertically move; the second rotating device drives the lower disc to rotate; the upper disc is arranged above the lower disc and is arranged oppositely; the first rotating device and the linear driving device are arranged above the upper disc, and the second rotating device is arranged below the lower disc. The utility model provides a high accuracy grinds polishing actuating system, all designs the upper end at the hanging wall through all power supplies with the hanging wall, makes the hanging wall steady when the grinding and polishing decide the height when having simplified the structure, and the grinding product precision of processing obtains improving. Meanwhile, the design reduces the processing requirements on the straightness, the concentricity and the rigidity of the shaft diameter of the long disc shaft, and further reduces the rejection rate of the long shaft, thereby reducing the cost.

Description

Grinding and polishing driving system

The technical field is as follows:

the utility model relates to a grinding and polishing's machinery, more specifically say, relate to a high accuracy grinds polishing actuating system's mechanical structure.

Background art:

the high-precision grinding and polishing machine is mainly applied to the technical field of high-precision planarization grinding and polishing, and can carry out a series of high-quality precise single-side and double-side grinding and polishing; the product obtained by grinding and polishing is widely applicable to grinding and polishing of hard and brittle materials in IC and IT industries, such as silicon carbide, sapphire, piezoelectric crystals, piezoelectric ceramics, molybdenum sheets, semiconductor chips, silicon wafers, optical photoelectrons, liquid crystal displays, LEDs, mobile phone accessories (metal and glass), memory hard disks, metal processing and manufacturing and the like. After single-side and double-side precision plane grinding and polishing, the workpiece can reach the precision degrees of 0.3um flatness, 1um parallelism, 1um thickness difference and less than 0.01um surface roughness, and the requirements of semiconductor chip manufacturing, high-precision ceramic parts, precision optical parts and precision mechanical accessories can be met.

At present, for a large grinding and polishing machine, the main moving parts are as follows: the upper disc, the lower disc, the gear ring and the central gear are driven by respective motors. (the upper plate, the lower plate, the gear ring and the central gear are all driven by respective driving shafts which are arranged below the lower plate and are all of hollow shaft structures (through holes are arranged in the middle of the shafts), the upper plate driving shaft, the central gear driving shaft, the lower plate driving shaft and the gear ring driving shaft are sleeved together from inside to outside and sequentially arranged as the upper plate driving shaft, the central gear driving shaft, the lower plate driving shaft and the gear ring driving shaft, the lengths of the shafts are sequentially reduced from inside to outside, namely the length of the upper plate driving shaft is longest, and the length of the gear ring driving shaft is shortest. As the prior design, a driving device of the moving part is arranged at the lower end of each driving shaft and applies force to each driving shaft to finally act on the upper plate, the lower plate, the gear ring and the central gear to generate rotation; an upper plate suspension part is also arranged above the upper plate, two groups of cylinders are generally arranged on the upper plate suspension part, one group is a quick lifting cylinder, and the other group is a slow lifting cylinder, and lifting and driving the upper disc. The upper disc and the lower disc are arranged oppositely, and the grinding part is arranged between the upper disc and the lower disc and is clamped by the upper disc and the lower disc during grinding. When grinding is needed, only the upper disc and/or the lower disc are/is correspondingly rotated and acted on the surface of a grinding product to carry out grinding and polishing, and the upper disc can slightly displace along the direction of the grinding product according to the actual process of grinding and polishing. Because the upper disk driving shaft is the thinnest and longest one of the four driving shafts, and the upper disk driving device is designed at the lowest end of the upper disk driving shaft, the upper disk can drive the upper disk suspension part and the two groups of cylinders to rotate simultaneously when the upper disk is driven to rotate, and particularly when the length of the upper disk driving shaft reaches more than 1 meter, the requirements of certain straightness, concentricity and rigidity are ensured, the thickening design of the shaft diameter can be generally considered, but the shaft with too thick processing can cause the whole machine to be heavy and generate overweight load, and the general design of the shaft diameter is not enough to transmit torque and generate the phenomenon of upper disk shaking, so the processing quality of grinding workpieces can be seriously influenced. The known design of the upper disc drive therefore has the above-mentioned disadvantageous consequences.

The utility model has the following contents:

the utility model aims at providing a high accuracy grinds actuating system's of burnishing machine mechanical structure.

According to the utility model discloses an embodiment, a grinding and polishing actuating system, its characterized in that: comprises a body, an upper disc, a first rotating device, a second rotating device, a linear driving device and a lower disc; the upper disc is arranged above the lower disc and is oppositely arranged, the first rotating device drives the upper disc to rotate, and the linear driving device drives the upper disc to vertically move; the second rotating device drives the lower disc to rotate. The first rotating device and the linear driving device are installed above the upper disc, and the second rotating device is installed below the lower disc.

In one embodiment, the lapping and polishing drive system further comprises an upper disk suspension member mounted on an upper portion of the upper disk, and a lift table connected to the upper disk by the upper disk suspension member, the first rotating device being mounted on the lift table.

In one embodiment, the linear drive comprises a lead screw drive and/or a cylinder drive; the screw rod driving device comprises a fifth driving motor, a screw rod and a connecting part, the fifth driving motor is arranged on the body and drives the screw rod, and the lifting platform is movably connected with the screw rod through the connecting part; the cylinder driving device is connected with the upper disc suspension part.

In one embodiment, the second rotating device comprises a second gear, a second shaft, a lower disc bearing seat and a second driving motor; the second gear is sleeved on the second shaft, the second shaft is connected with the lower disc through the lower disc bearing seat, and the output end of the second driving motor is connected with the second gear in a meshed mode.

In one embodiment, the lapping and polishing drive system further comprises a sun gear and a sun gear drive, the sun gear drive driving the sun gear and disposed below the lower plate.

In one embodiment, the sun gear drive includes a third gear, a third shaft, and a third drive motor; the central gear and the third gear are sleeved on the third shaft, and the output end of the third driving motor is meshed with the third gear.

In one embodiment, the second shaft and the third shaft are both provided with through holes in the axial direction; the third shaft is arranged in the through hole of the second shaft.

In one embodiment, the lapping and polishing drive system further comprises a ring gear and a ring gear drive; the gear ring driving device drives the gear ring and is arranged below the lower disc.

In one embodiment, the gear ring driving device comprises a fourth driving motor, a fourth gear and a gear ring bearing which are connected in sequence; the fourth driving motor drives the gear ring after sequentially passing through the fourth gear and the gear ring bearing seat.

In one embodiment, the lapping and polishing driving system further comprises a guide rail device, wherein the guide rail device comprises a guide rail arranged on the lifting platform and a sliding part arranged on the upper disk suspension part, and the guide rail is in sliding connection with the sliding part.

In one embodiment, the screw driving device further comprises a coupler, and the output end of the fifth driving motor is synchronously connected with the screw through the coupler; the connecting part comprises an L-shaped connecting plate and a nut, the nut is installed on the screw rod, one side face of the L-shaped connecting plate is connected with the lifting platform, and the other side face of the L-shaped connecting plate is connected with the nut. The first rotating means includes a first driving motor.

The utility model provides a high accuracy grinding polishing actuating system all designs the upper end at the hanging wall through all power supplies with the hanging wall, makes the hanging wall steady when grinding polishing decide the height when having simplified the structure, and the grinding product precision of processing obtains improving. Meanwhile, the design reduces the processing requirements on the straightness, the concentricity and the rigidity of the shaft diameter of the long disc shaft, and further reduces the rejection rate of the long shaft, thereby reducing the cost.

Through the optimal design of the screw rod driving device and/or the guide rail device, the vertical lifting of the upper disc is accurately improved, and the processing precision of processing grinding and polishing products is further improved.

Description of the drawings:

the above and other features, properties and advantages of the present invention will become more apparent from the following description of the embodiments with reference to the accompanying drawings, in which like reference numerals refer to like features throughout, and in which:

FIG. 1 shows a schematic diagram of a polishing drive system according to an embodiment of the prior art.

Fig. 2 shows a front view of a grinding and polishing driving system according to an embodiment of the present invention.

Fig. 3 discloses a side view of the structure of the grinding and polishing driving system according to an embodiment of the present invention.

The specific implementation mode is as follows:

referring to fig. 1: FIG. 1 shows a schematic diagram of a polishing drive system according to an embodiment of the prior art. The upper disc 7, the lower disc 8, the gear ring 9 and the central gear 5 in the control element of the large-scale grinding and polishing drive system of the embodiment are all controlled independently, wherein the motion of the upper disc 7 is controlled by rotary motion and vertical lifting motion, and the vertical lifting motion can be double-speed vertical lifting, namely fast vertical lifting and slow vertical lifting.

The device for controlling the upper disc to rotate mainly comprises an upper disc driving motor 21, an upper disc speed reducer 19, an upper disc speed reducer 20, an upper disc driving gear 18 and an upper disc shaft 17. Driven by a hanging plate driving motor 21, the hanging plate shaft 17 is given a rotation energy after the power transmission of a hanging plate speed reducer 19, a hanging plate speed reducing gear 20 and a hanging plate driving gear 18, and the hanging plate shaft 17 drives the hanging plate 7 to rotate. It will be appreciated that the intermediate transmission components such as the upper disc speed reducer 19 and the upper disc speed reducer gear 20 may also be omitted and the upper disc drive motor 21 may be controlled by an external frequency converter to achieve the same function of speed regulation.

With continued reference to fig. 1, the power source for the vertical lifting movement of the upper plate 7 is in this example performed by two sets of cylinders, a main set of cylinders 1 performing a fast lifting movement and an auxiliary set of cylinders 2 performing a slow lifting movement. The output of the two groups of cylinders does not directly act on the upper disc 7, but acts on the upper disc suspension part 3, and power is applied to the upper disc 7 to perform corresponding lifting movement after the upper disc suspension part 3 is connected with the upper disc 7.

It will be appreciated that the upper disc 7, when rotated, carries the two sets of cylinders and the upper disc suspension member 3 to rotate synchronously.

With continued reference to fig. 1, the driving means for controlling the rotation of the sun gear may mainly comprise a sun gear driving motor (not shown in fig. 1), a sun gear driving gear 15, and a sun gear shaft 16. The power is transmitted from the center gear drive gear 15 and the center gear shaft 16, and then a rotational energy is given to the center gear 5. It can be understood that the central gear drive motor can be controlled by an external frequency converter to achieve the purpose of adjusting the rotating speed.

With continued reference to fig. 1, the device for controlling the rotation of the lower disc may mainly include a lower disc driving motor (not labeled in fig. 1), a lower disc shaft driving gear 14, a lower disc shaft 13, and a lower disc bearing seat 10. Driven by a lower disc driving motor, the lower disc 8 is provided with a rotation energy after the power transmission of a lower disc shaft driving gear 14, a lower disc shaft 13 and a lower disc bearing seat 10 in sequence. It can be understood that the purpose of adjusting the rotating speed can be achieved by controlling the lower disc driving motor by an external frequency converter.

With continued reference to FIG. 1, the drive means for controlling the movement of the ring gear may consist essentially of a ring gear drive motor (not referenced in FIG. 1), a ring gear drive gear 12, a ring gear drive shaft 22 and a ring gear carrier 11. Is driven by the ring gear drive motor, and gives the ring gear 9 a kinetic energy after power transmission through the ring gear drive gear 12, the ring gear drive shaft 22 and the ring gear bearing 11.

With continued reference to fig. 1, the driving block seat 6 is mounted with a driving block (not labeled in fig. 1), the driving block is clamped in the groove of the upper disc driver 23, the upper disc driver 23 is connected with the upper disc shaft 17, the upper disc driver 23 rotates synchronously when the upper disc 7 rotates, and the driving block seat 6 is mounted on the upper disc 7, so that the whole upper disc suspension part 3 and the two sets of cylinders rotate synchronously.

With continued reference to fig. 1, for the integrated installation of the grinding and polishing driving system, the shaft may be hollow, that is, a through hole is designed in the center of the shaft, and the shaft are sequentially sleeved and connected according to the size, in this embodiment, the upper disc shaft 17 is sleeved in the through hole of the central gear shaft 16, and the central gear shaft 16 is sleeved in the through hole of the lower disc shaft 13. It can be understood that the shaft is sleeved with a certain gap, and the positioning and steering functions of the shaft can be achieved by installing bearings with corresponding sizes on the circumference of the shaft. In order to meet the requirement of sleeving, the upper disc shaft 17 sleeved at the innermost part is the most slender, and then the shaft lengths of the upper disc shaft 17, the lower disc shaft 13 and the gear ring driving shaft 22 are sequentially decreased according to the sleeving sequence from the inside to the outside. However, the driving devices of all shafts are arranged below the lower disc 8, especially for the upper disc rotary driving device, the upper disc shaft 17 drives the whole upper disc suspension part 3, two cylinders and the upper disc 7, so that a large torque must be transmitted, the shaking phenomenon of the upper disc 7 can be generated if the power is insufficient, the machining precision of the grinding and polishing part is affected, even if the power is sufficient, the machining precision of the upper disc shaft 17 is highly required, the upper disc shaft 17 is generally required to be more than 1 meter in order to meet the requirement of the sleeving, the shaft with the requirement of ensuring the straightness, concentricity and rigidity of the shaft can be designed into a shaft with a thicker shaft diameter, and if the shaft is too thick, the whole machine is heavy, and the shaft is not thin enough to transmit the torque. This has been a technical difficulty that has been difficult to overcome in this field.

Reference is made to figure 2 in conjunction with figure 3. Fig. 2 discloses a front view of a grinding and polishing driving system according to an embodiment of the present invention, and fig. 3 discloses a side view of the grinding and polishing driving system according to an embodiment of the present invention. The grinding and polishing driving system in this embodiment may be composed of a body 54, an upper disc 39, a first rotating device, a second rotating device, a linear driving device, and a lower disc 41; the first rotating device drives the upper disc 41 to rotate, and the linear driving device drives the upper disc 39 to vertically move; the second rotating device drives the lower disc 41 to rotate; the upper disc 39 is arranged above and opposite to the lower disc 41; an abrasive polished workpiece (not labeled in fig. 2 and 3) is sandwiched between upper disk 39 and lower disk 41. The first rotation means and the linear drive means are mounted above the upper disc 39 and the second rotation means is mounted below the lower disc 41.

Preferably, the polishing and grinding drive system further includes an upper disk suspension member 37 and an elevating table 35, the upper disk suspension member 37 is connected to and mounted on an upper portion of the upper disk 39, the elevating table 35 is connected to and mounted on the upper disk suspension member 37, and the first rotating device is mounted on the elevating table 35.

As one preference, the first rotating means may be a first driving motor 31.

Preferably, the linear drive comprises a spindle drive and/or a cylinder drive; the screw driving device includes a fifth driving motor 31, a screw 53, and a connecting member. The fifth driving motor 31 is installed on the body 54, the fifth driving motor 31 drives the lead screw 53, and the lifting platform 35 is movably connected with the lead screw 53 through a connecting component; the cylinder driving device 36 is connected to the upper disk suspension member 37.

Preferably, the second rotating device comprises a second gear 45, a second shaft 44, a lower disc seat 48 and a second driving motor (not labeled in fig. 2 and 3); the second gear 45 is sleeved on the second shaft 44, the second shaft 44 drives the lower disc 41 to rotate through the lower disc bearing seat 48, and the output end of the second driving motor is meshed with the second gear 45.

Preferably, the lapping and polishing drive system further includes a sun gear 38 and a sun gear drive, which drives the sun gear 38 and is disposed below the lower plate 41.

Preferably, the sun gear drive includes a third gear 46, a third shaft 47 and a third drive motor (not labeled in fig. 2 and 3); the central gear 38 and the third gear 46 are sleeved on the third shaft 47, and the output end of the third driving motor is meshed with the third gear 46.

The second shaft 44 and the third shaft 47 are provided with through holes in the axial direction; a third shaft 47 may be provided in the through hole of the second shaft 44.

Preferably, the grinding and polishing driving system further comprises a gear ring 40 and a gear ring driving device; the ring gear drive means drives the ring gear 40 and is provided below the lower disc 41.

Preferably, the ring gear driving device comprises a fourth driving motor (not labeled in fig. 2 and 3), a fourth gear 43 and a ring gear seat 42 which are connected in sequence; the fourth drive motor drives the ring gear 40 sequentially through the fourth gear 43 and the ring gear holder 42.

Preferably, the grinding and polishing driving system further comprises a guide rail device, the guide rail device comprises a guide rail 33 mounted on the lifting platform and a sliding part (not labeled in fig. 2 and 3) mounted on the hanging part of the upper disk, and the guide rail 33 is connected with the sliding part in a sliding way.

Preferably, the screw driving device further comprises a coupler 32, and the output end of the fifth driving motor 31 is synchronously connected with the screw 53 through the coupler 32;

preferably, the connection member includes an L-shaped connection plate 52 and a nut 51, the nut 51 is mounted on a lead screw 53, one side surface of the L-shaped connection plate 52 is connected to the elevating table 35, and the other side surface of the L-shaped connection plate 52 is connected to the nut 51.

Preferably, the fifth driving motor 31 may be a servo motor, and when the servo motor rotates, the lead screw 53 is driven to rotate, and since the lead screw 53 is fixed and cannot move up and down, the nut 51 connected to the lead screw 53 is driven to move up and down, the nut 51 and the L-shaped connecting plate 52 may be connected by a screw (not labeled in fig. 2 and 3), and the L-shaped connecting plate 52 may also be connected by a screw and the lifting platform 35, so that the lifting platform 35 can move up and down. Meanwhile, in order to ensure the lifting stability and vertical precision, guide rails 33 can be installed on two sides of the lifting platform for accurate guiding.

The above-described embodiments are provided to enable persons skilled in the art to make or use the invention, and many modifications and variations may be made to the above-described embodiments by persons skilled in the art without departing from the inventive concept of the present invention, so that the scope of the invention is not limited by the above-described embodiments, but should be accorded the widest scope consistent with the innovative features set forth in the claims.

Claims

1. A lapping drive system, comprising: comprises a body, an upper disc, a first rotating device, a second rotating device, a linear driving device and a lower disc; the first rotating device drives the upper disc to rotate, and the linear driving device drives the upper disc to vertically move; the second rotating device drives the lower disc to rotate;

wherein the upper disc is arranged above the lower disc and is arranged oppositely; the first rotating device and the linear driving device are installed above the upper disc, and the second rotating device is installed below the lower disc.

2. The lapping drive system of claim 1, wherein: the grinding and polishing driving system further comprises an upper disc suspension part and a lifting table, the upper disc suspension part is connected and installed on the upper part of the upper disc, the lifting table is connected and installed on the upper disc suspension part, and the first rotating device is installed on the lifting table;

the linear driving device comprises a lead screw driving device and/or a cylinder driving device;

the screw rod driving device comprises a fifth driving motor, a screw rod and a connecting component, the fifth driving motor is installed on the body and drives the screw rod, and the lifting platform is movably connected with the screw rod through the connecting component;

the cylinder driving device is connected to the upper plate suspension member.

3. The lapping drive system of claim 2, wherein: the second rotating device comprises a second gear, a second shaft, a lower disc bearing seat and a second driving motor; the second gear is sleeved on the second shaft, the second shaft drives the lower disc to rotate through the lower disc bearing seat, and the output end of the second driving motor is connected with the second gear in a meshed mode.

4. The lapping drive system of claim 3, wherein: the grinding and polishing driving system further comprises a central gear and a central gear driving device, and the central gear driving device drives the central gear and is arranged below the lower disc.

5. The lapping drive system of claim 4, wherein: the central gear driving device comprises a third gear, a third shaft and a third driving motor; the central gear and the third gear are sleeved on the third shaft, and the output end of the third driving motor is meshed with the third gear.

6. The lapping drive system of claim 5, wherein: through holes are formed in the axial directions of the second shaft and the third shaft; the third shaft is arranged in the through hole of the second shaft.

7. The lapping drive system of claim 2, wherein: the grinding and polishing driving system also comprises a gear ring and a gear ring driving device; the gear ring driving device drives the gear ring and is arranged below the lower disc.

8. The lapping drive system of claim 7, wherein: the gear ring driving device comprises a fourth driving motor, a fourth gear and a gear ring bearing seat which are sequentially connected; the fourth driving motor drives the gear ring after passing through the fourth gear and the gear ring bearing seat in sequence.

9. The lapping drive system of any one of claims 2-8, wherein: the grinding and polishing driving system further comprises a guide rail device, the guide rail device comprises a guide rail arranged on the lifting platform and a sliding part arranged on the upper disk suspension part, and the guide rail is connected with the sliding part in a sliding mode.

10. The lapping drive system of claim 2, wherein:

the screw rod driving device further comprises a coupler, and the output end of the fifth driving motor is synchronously connected with the screw rod through the coupler;

the connecting part comprises an L-shaped connecting plate and a nut, the nut is installed on the screw rod, one side surface of the L-shaped connecting plate is connected with the lifting platform, and the other side surface of the L-shaped connecting plate is connected with the nut;

the first rotating means includes a first driving motor.