JPH10296631A - Super precise trueing device for grinding wheel - Google Patents

Abstract

PROBLEM TO BE SOLVED: To true at an accuracy at a level of sub-micron on account of the minute depth of cut due to a base metal and CBN abrasive grains, which are brittle materials. SOLUTION: In this device, a wheel driving table 3 and a dresser driving table 4 are arranged in a L shape on a base 2, and the driving tables 3 and 4 are guided by a V-V guiding face and a static pressure guiding face, and the nut holders of the nuts threadedly engaged with the feed screws for the drive tables 3 and 4 are guided by the liner guides on bases 3 and 4 and are connected to the drive tables 3 and 4 through static pressure couplings. The drive tables 3 and 4 are driven by direct drive servo motors respectively, and the drive motors are numerically driven by a numerical controller of a control resolution of 0.01 μm or less, and the feed back sensors of the drive tables 3 and 4 are made from linear laser scales 7 and 8 of a resolution of 0.01 μm or less.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to an ultra-precise truing device for a grinding wheel. Ultra-precision processing technology has been developed mainly for the manufacturing technology of optical components such as lenses and semiconductor components such as silicon wafers, but in recent years it has expanded to power transmission components such as bearings and gears as well as precision mechanical components. It is getting.

2. Description of the Related Art Gears are used in all kinds of industrial machines, and in recent years, the required accuracy has become stricter. In addition, if the tooth surface roughness is improved, the permissible transmission load increases three times due to Hertz stress. Research results have been published, and it has been confirmed that the ideal tooth surface roughness for achieving this is about 0.1 μm in Rmax.

[0003] In the industry, there is a tendency to actively employ grinding gears with good finishing accuracy in light of the above recognition. However, the shape error and surface roughness of mass-produced base gears are Rmax of about 2.0 μm due to ordinary grinding wheels. In the case of a CBN wheel having high productivity, the limit is about Rmax of about 5.0 μm.

At present, CBN wheels are often used for gear grinding. However, irregularities in the shape accuracy and abrasive grain height of the wheels naturally greatly affect the machining accuracy and surface roughness of the gears. There is also a demand for improved truing devices that provide the same wheel shape accuracy and abrasive grain height. The present invention relates to such a truing device.

[0005]

2. Description of the Related Art Super-abrasive grains such as CBN and diamond are hard and brittle materials. In micro-cutting of these hard and brittle materials, a brittle mode (brittle fracture type material removal) and a ductile mode (plastic (Deformable material removal).

In the brittle mode, as shown in FIG.
Since cracks occur in the material and the material is removed by the accumulation of the cracks, the processing accuracy is deteriorated. On the other hand, in the ductile mode, as shown in FIG. 9, cracks do not occur and continuous chips are generated, so that the processing accuracy is increased. And
The material removal in the cutting of hard and brittle materials is usually in the brittle mode, but it is known that cutting by plastic deformation up to the ductile mode can be obtained by controlling the high cutting speed and the small depth of cut (" Advanced Technology '', pp. 133-141
March 25, 1996, first edition, first press, published by the Industrial Research Institute Co., Ltd.).

Further, as shown in FIG. 11, it is known that when the truing device has insufficient rigidity and a motion error occurs in the cutting tool, cracks are scattered and the finishing accuracy is reduced.

However, conventionally, a minute cut (for example,
There is no truing device with a feed accuracy of 0.1μm or less), and there is a truing device with the ability to manufacture high-precision wheels with submicron shape errors and surface roughness due to ductility mode cutting due to lack of rigidity and play in each part. Did not. Further, there is no apparatus capable of ultra-precise truing of wheel base metal and abrasive grains on the same machine.

[0009]

SUMMARY OF THE INVENTION In view of the above circumstances, the present invention makes it possible to perform truing in a ductile mode by minute cutting of a steel wheel base and a CBN abrasive grain, which is a brittle material. It is an object of the present invention to provide an ultra-precise truing device capable of truing a super-abrasive grain wheel electrodeposited on or separately manufactured on the same machine.

[0010]

A truing apparatus according to claim 1, wherein a truing device includes a base, a wheel drive table reciprocating in the X-axis direction on the base, and a Z-axis direction orthogonal to the X-axis on the base. A dresser drive table that reciprocates, a wheel bearing mounted on the wheel drive table, a wheel spindle that is rotatably supported by the wheel bearing, and to which a truing metal or wheel is mounted, and a wheel spindle. A wheel drive unit including a wheel drive motor to be rotated, a dresser bearing mounted on the dresser drive table, a dresser spindle that is rotatably supported by the dresser bearing, and on which a dresser that is a truing tool is mounted, and a dresser spindle. A dresser drive unit consisting of a dresser drive motor to rotate Ri, wherein the base is made of a low thermal expansion cast iron, the dresser bearing is static pressure oil bearing, both the wheel driving table and the dresser drive table, the lower sliding surface thereof, was formed on the base V-
The guide is guided by a needle roller bearing disposed between the V guide surface and the VV guide surface, and the upper sliding surface is in contact with the static pressure guide surface formed on the base. And each nut holder of each nut screwed to each reciprocating feed screw of the dresser drive table is guided by a linear ball guide on the base, and via a static pressure coupling, the wheel drive table And each of the dresser driving tables.

In the first aspect of the present invention, whether or not the base is installed on the vibration damping table is optional. However, the truing device according to the second aspect is arranged such that the base is installed on the vibration damping table. Features.

According to a third aspect of the present invention, there is provided a truing apparatus.
In the invention of the second aspect, each drive motor of the wheel drive table and the dresser drive table is a direct drive type servo motor, and a control device of each drive motor is a numerical control device having a control resolution of 0.01 μm or less, The feedback sensors of both drive tables are linear laser scales having a minimum resolution of 0.01 μm.

According to a fourth aspect of the present invention, in the truing apparatus of the first, second or third aspect, an AE sensor is provided on the dresser bearing.

According to a fifth aspect of the present invention, in the truing apparatus according to the first, second, third or fourth aspect, the arbor gripping mechanism for mounting the base metal or the wheel to be trued includes:
It is characterized in that it is a pull stud fixed to the arbor and a collet built in the wheel spindle and capable of being opened and closed from the outside.

According to the first aspect of the present invention, a low thermal expansion cast iron is used for the base, distortion and the like due to heat generated during processing are suppressed to prevent a reduction in processing accuracy due to deformation, and a resistance to processing reaction force is reduced. Enables precision grinding, and has a V
-Adopts V guide surface and needle roller bearing to enable low frictional resistance and highly rigid table movement in the horizontal direction, high rigidity in the vertical direction with the static pressure guide surface, and a dresser bearing with a hydrostatic oil bearing. By increasing the static rigidity and rotational accuracy, the linear ball guide and static pressure coupling reduce the whirling and frictional resistance of the feed screw nut, and the synergistic effect described above increases the rigidity of the truing device sufficiently. In addition, it is possible to prevent a motion error of the cutting tool and scattering of cracks from occurring.

According to the second aspect of the present invention, the propagation of external vibration can be cut off by the vibration damping table, and a reduction in machining accuracy due to the external vibration can be prevented.

According to the third aspect of the present invention, a direct drive servo actuator with high torque and high accuracy, a numerical control device having a control resolution of 0.01 μm, and a linear laser scale having a minimum resolution of 0.01 μm require 0.1 μm required for the ductile mode.
The following minute cuts are made possible, which enables ultra-precise truing.

According to the fourth aspect of the present invention, it is possible to reliably detect the AE wave at the time of crushing the abrasive grains, to reduce the air cut and the cycle time at the time of truing, and to prevent excessive cutting.

According to the fifth aspect of the present invention, the arbor can be easily exchanged by opening and closing the collet from the outside, and it is easy to exchange various base metals and wheels. Truing can be made possible.

[0020]

Next, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view of a truing device according to an embodiment of the present invention, and a schematic configuration will be described based on the drawing.

In FIG. 1, reference numeral 1 denotes a vibration damper, on which a base 2 is installed. On the base 2, a wheel drive table 3 and a dresser drive table 4 are arranged in an L-shape, and the wheel drive table 3 reciprocates in the X-axis direction, and the wheel drive table 4 is moved in a Z direction perpendicular to the X axis.
It reciprocates in the axial direction. That is, a two-axis grinding machine system is configured. The use of a vibration damper is optional, but the use of a vibration damper is preferable because propagation of external vibrations can be suppressed. The table guide structure of each of the drive tables 3 and 4 includes a VV guide surface 40 and the like, and details will be described later.

On the wheel drive table 3, a wheel drive unit including a wheel bearing 10, a wheel spindle 11 rotatably supported by the wheel bearing 10, and a wheel drive motor 12 for rotating the wheel spindle 11 is provided. It is installed. The wheel main shaft 11 and the drive motor 12 are connected by a belt transmission mechanism or the like. A gate-type sensor support 5 is attached to an end of the base 3, and a fixed portion 7 a of a laser linear scale 7 is mounted on the sensor support 5, and a laser linear scale 7 is mounted on the table 3.
Is mounted.

On the dresser drive table 4, a dresser drive unit comprising a dresser bearing 20, a dresser main shaft 21 rotatably supported by the dresser bearing 20, and a dresser drive motor 22 for rotating the dresser main shaft 21. Is installed. The dresser main shaft 21 and the drive motor 22 are directly connected. Also,
A gate-type sensor support 6 is attached to the end of the base 4. A fixed portion 8 a of the laser linear scale 8 is attached to the sensor support 6, and a movable portion 8 b of the laser linear scale 8 is attached to the table 4. Have been.

The base 2 and the sensor support portions 5 and 6 are made of low thermal expansion cast iron to minimize distortion due to heat generated during processing.

Next, details of the guide structure of the drive tables 3 and 4 will be described. FIG. 2 is a front view of the table guide structure, and FIG. 3 is a side view of the table guide structure. The guide structures of the drive tables 3 and 4 are substantially the same.

The drive tables 3 and 4 are guided reciprocally with respect to the base 2 by two rows of mountain-shaped slide grooves, that is, VV guide surfaces 40. That is, in FIG.
Sliding members 41, 41 each having a triangular cross section are attached to the lower surfaces of the left and right end portions of the drive tables 3, 4, respectively, and the lower surfaces of the mountain-shaped portions are lower sliding surfaces 42, 42.

On the other hand, rail members 46, 46 having a pair of V-shaped grooves are provided on the base 2 with the V-shaped guide surfaces 47, 47 facing upward.
41 are accepted. And V-shaped guide surfaces 47, 4
Needle roller bearings 48 are provided between the lower sliding surface 7 and the lower sliding surfaces 42.

The VV guide surface 40 has the advantage that the attitude of the drive tables 3 and 4 in the direction perpendicular to the reciprocating direction of the drive table can be restrained with extremely high precision. Achieves positioning accuracy.

Further, flat upper sliding surfaces 43, 43 are formed on the upper surfaces of the left and right ends of the drive tables 3, 4, respectively. The upper sliding surfaces 43, 43 are used to guide pressure oil. A pressure oil sump 44 is formed, and an oil feed passage 45 is formed in the thickness of the drive table 4. And base 2
Upper sliding portions 52, 52 each having a rectangular cross section are attached to both end portions of the upper portion via connecting members 51, 51, and the lower surfaces thereof are upper sliding surfaces 53, 53 that come into contact with the upper sliding surfaces 43, 43.
It has become. The upper sliding surfaces 53, 53 and the upper sliding surfaces 43, 43 constitute a static pressure guide surface that comes into contact with the medium via static pressure oil.

With the aid of this static pressure guide surface, the drive table 3,
4, the pressure distribution between the base 2 and the drive tables 3, 4 is made uniform.

As shown in FIGS. 2 and 3, the driving table 3,
A feed screw 61 for reciprocating the feed 4 is rotatably supported by brackets 62 on the base 2 via a bearing 63. A nut 60 is screwed onto the feed screw 61 and the nut holder 64 restrains the nut 60 from rotating. A slide shoe 65 is attached to the lower surface of the nut holder 64, and a coupling half 66 constituting a static pressure coupling is formed on the upper surface. The coupling half 66 has a static pressure contact surface 67 formed perpendicular to and perpendicular to the feed direction of the feed screw 61,
67 are formed on the front surface and the return surface.

The coupling half 66 includes a pair of coupling members 72, 7 fixed to the drive tables 3, 4.
2, the inner vertical surface 73 of each coupling member 72 is a static pressure contact surface 67 of the coupling half 66.
An oil passage 74 for introducing the static pressure oil to the inner vertical surface 73 is formed in the thickness of the coupling member 72 and the drive table 4. This static pressure coupling prevents a movement error between the nut 64 and the drive tables 3 and 4.

The slide shoe 65 is slidably fitted on a linear ball guide 71 fixed on the base 2 to prevent the nut 64 from rotating and cause the nut 64 to reciprocate. The linear ball guide 71 is a rolling guide in which rolling elements circulate, and has an advantage that the coefficient of friction on the rolling surface is very small.

With the above-described table guide structure, the straightness of the wheel drive table 3 is 0.1 μm (per 10 mm stroke travel) horizontally and 0.1 μm (per 10 mm stroke travel) vertical, and the straightness of the dresser drive table 4 is , 0.1 μm horizontally (per 10 mm stroke travel) and 0.2 μm vertical (per 10 mm stroke travel).

FIG. 4 shows the wheel bearing 10 and the wheel spindle 1.
FIG. The wheel main shaft 11 is rotatably supported by the wheel bearing 10 by a precision angular contact ball bearing 13 and a double row cylindrical roller bearing 14. Further, a tapered hole 15 is provided in front of the inside of the wheel spindle 11, and the tapered hole 15
A through hole 16 is formed coaxially from to the rear end. A flat belt pulley 36 is attached to the rear end of the wheel spindle 11.

A draw bar 17 is inserted into and fixed to the through hole 16, and a collet 18 is attached to the tip of the draw bar. On the other hand, the base metal Wb to be subjected to the truing process or the arbor 31 as a mounting bracket for the wheel W is also formed such that both ends in the axial direction are tapered, and a pull stud 33 is fixed to the tip of the insertion side taper portion 32. The base metal Wb or the wheel W is fastened to the portion 34 with a nut 35 so as to be detachably fixed.

According to the above-described collet chuck structure, when the nut 19 of the draw bar 17 is loosened and pushed toward the distal end, the collet 18 releases the pull stud 33.
The arbor 31 is removed from the wheel spindle 11. Conversely, when the arbor 31 is inserted, the draw bar 17 is inserted, the collet 18 is hooked on the pull stud 33, pulled toward the rear end, and the nut 19 is tightened, so that the arbor 31 can be fixed to the wheel main shaft 11. For this reason, the base metal Wb
Alternatively, the attachment / detachment of the wheel W to / from the arbor 31 can be freely performed by tightening or loosening the nut 35.

As described above, the base metal Wb and the wheel W on which the CBN abrasive grains are electrodeposited can be easily attached to and detached from the wheel spindle 11, and both can be trued on the same machine.

FIG. 5 is a sectional view of the dresser bearing 20. The dresser main shaft 21 is rotatably supported on the dresser bearing 20 by a combined radial / thrust hydrostatic oil bearing 23 and a radial hydrostatic oil bearing 24. In each of the static pressure oil bearings 23 and 24, a pressure oil reservoir for storing the static pressure oil on the outer surface of the dresser main shaft 21 and an oil supply path for sending the pressure oil to the pressure oil reservoir are formed. The dresser main shaft 21 is supported. With this hydrostatic oil bearing, the static rigidity when a load of 30 kgf is applied to the front shaft end of the dresser main shaft 21 is 2 μm in the radial direction and 1 μm in the axial direction. Enables ultra-precision grinding. A dresser wheel D is detachably attached to the tip of the dresser main shaft 21 with a nut 37.

The configuration of the wheel bearing 10 and the dresser bearing 20 is such that when the normal resistance during truing required for micro truing is large, the shaft on which the rotary dresser is mounted has the same rigidity as the grinding machine main shaft; This greatly contributes to minimizing the runout of the dresser spindle and minimizing the processing transfer error during truing due to torque fluctuation and vibration of the drive motor.

The drive motors 12 and 22 both have a vibration class of CLASS3, and are controlled by inverter control to have a Max.
Arbitrary speed setting up to 000rpm is possible. Thus, the sharpness and the finished surface roughness can be controlled by changing the peripheral speed ratio between the wheel W and the dresser D during micro truing.

The drive motor of the drive tables 3 and 4, ie, the motor connected to the feed screw 61, is a direct drive type servo motor with high torque and high accuracy. The control device of the drive tables 3 and 4 has a control resolution of 0.01 μm
The following numerical control device is used, and the drive tables 3, 4
The laser linear scales 7 and 8 as the feedback sensors have a minimum resolution of 0.01 μm. The fixed part 7a and the movable part 7b of the laser linear scale 7 and the fixed part 8a and the movable part 8b of the laser linear scale 8 are all arranged at positions according to Abbe's principle. That is, according to the principle that a portion to be measured of an object to be measured is placed on an extension of a standard scale (displacement sensor) used as a ruler. The target error is extremely small. The feed amount of the two drive tables, that is, the cut amount of the dresser D with respect to the wheel W is fed back to the numerical controller by the laser linear scales 7 and 8,
Closed loop control is performed.

In this embodiment, as a measure against thermal displacement, the temperature of the hydrostatic oil and the temperature of the grinding fluid are controlled by a temperature control device.
It is controlled in the range of 0.1 ° C. The grinding fluid further uses a magnetic separator to always supply clean coolant.

In the present embodiment, the AE sensor 25 is installed on the dresser bearing 20. This is because dresser D
This is because it is necessary to enable sensing of minute contact between the wheel and the wheel. The AE sensor 25 reliably detects an AE wave (acoustic emission wave / shock wave generated at the time of destruction), and determines whether the dresser D is hitting (cutting) or not hitting the base metal Wb or the wheel W. Detection can be performed reliably, and it is possible to reduce air cut (empty cut) and cycle time during micro truing, and prevent overcutting.

Further, the dynamic balance of each rotation drive unit including the dresser spindle 21 is a vibration displacement of ± 0.001 μm (1,200 rpm).
), The residual balance is adjusted to the last digit of the resolution by a field balancer having a resolution of (1), and then drive is performed.

With respect to the apparatus having the above-described configuration, the motion response performance in response to a minute step feed command from the mechanical NC apparatus was measured by a laser length measuring machine. As a result, as shown in FIG. 6, the minimum step response is 0.05 μm (50 nm) / STE.
Good data could be obtained up to P.

"Masashita Miyashita," Ultra-precision machining principle "
According to "1995", in order to realize ductile mode grinding using a grinding wheel as a multi-blade tool, the variation in abrasive grain cutting edge height must be smaller than the ductile-brittle transition point Dc. In addition, diamond called brittle material,
The transition point Dc between ductility and brittleness of silicon or the like is about 0.1 μm. Therefore, in ultra-precise truing of diamond grinding stones, in order to control the cutting depth of the abrasive grains, satisfy the ductile mode grinding conditions, and realize the ultra-precision grinding accuracy according to the motion transfer principle, it is necessary to adjust the abrasive grain cutting edge height. He proposes that ultra-precise truing technology that corrects the fluctuation to 100 nm (0.1 μm) or less and the rotational runout and bus shape of the diamond grinding wheel to 100 nm is indispensable.

According to the apparatus of this embodiment, the rigidity in the structure is improved and the minute feed is enabled by the control system.
The cutting depth Dp ≦ Dc shown in FIG. 9 is realized, and the movement accuracy of the order of nanometer based on the movement transfer principle is realized.
Grinding states such as material removal due to accumulation of cracks generated when the cutting depth Dp> Dc shown in FIG. 0 and scattering of cracks due to instability of the cutting depth Dp caused by a motion error (play) due to insufficient rigidity of the apparatus shown in FIG. High precision positioning accuracy of less than 0.1μm required for ductile mode grinding is achieved.

Next, the micro truing operation by the truing device will be described. In the truing apparatus of the present invention, a CBN for gear molding having a shape error of 1 μm or less is provided.
Manufacture the base metal Wb of the electrodeposition wheel, CB on the base metal Wb
Micro-truing the CBN electrodeposited wheel W, which is electrodeposited with only one N abrasive grain
High precision and high performance C by realizing surface roughness
BN electrodeposition wheel is obtained.

FIG. 7 is an explanatory diagram of the truing operation of the base metal Wb. The base metal Wb shown in the figure is attached to the wheel spindle 11 shown in FIGS.
While rotating the rotary dresser D, the wheel drive table 3 is moved in the X-axis direction, and the dresser drive table 4 is moved in the Z-axis direction. By this work,
The base metal Wb having a desired shape error is obtained.

FIG. 8 shows that CBN is applied to the wheel base Wb.
It is explanatory drawing of the truing operation | work of the wheel W to which the abrasive grain Wg was electrodeposited. The wheel W on which the CBN abrasive grains Wg are electrodeposited is also attached to the wheel main shaft 11 shown in FIGS. 1 and 4, and the wheel drive table 3 is moved in the X-axis direction while rotating the wheel W and the diamond rotary dresser D to drive the dresser. The table 4 is moved in the Z-axis direction. By this operation, a wheel W having a submicron level shape error and surface roughness is obtained.

It should be noted that in the present invention, the optional gear specifications, correction,
By automatically calculating the offset and the like of the electrodeposition abrasive grain size by a personal computer, generating a machining NC program, and providing a control thread for transferring to the mechanical NC device, it is possible to micro-truing various gear forming wheels. .
Also, not only super-abrasive wheels (CBN abrasives or diamond abrasives) but also micro-truing of ordinary abrasives is possible.

[0053]

According to the first aspect of the present invention, distortion or the like due to heat generation of the base is suppressed to prevent a reduction in machining accuracy due to deformation, and a low frictional resistance and a horizontal and vertical direction are provided for the guide structure of each drive table. The rigidity and rotational precision of the dresser bearing are increased by suppressing the whirling and frictional resistance of the nut of the high-rigidity feed screw, and the rigidity of the truing device is sufficiently increased. Ultra-precision grinding is enabled mainly from a rigid surface by preventing movement errors and scattering of cracks.

According to the second aspect of the present invention, propagation of external vibration can be cut off by the vibration damping table, and a reduction in machining accuracy due to external vibration can be prevented.

According to the third aspect of the present invention, a high-torque and high-precision table driving actuator, a high-resolution numerical measurement control device and a linear laser scale make it possible to make a minute cut of 0.1 μm or less necessary for the ductility mode. This enables ultra-precise truing.

According to the fourth aspect of the present invention, it is possible to reliably detect the AE wave at the time of crushing the abrasive grains, to reduce the air cut and the cycle time at the time of truing, and to prevent excessive cutting.

According to the fifth aspect of the present invention, the arbor can be easily exchanged, and truing of various bases and wheels, and truing of the base and wheels on the same machine can be performed.

[Brief description of the drawings]

FIG. 1 is a perspective view of a truing device according to an embodiment of the present invention.

FIG. 2 is a front view of a guide structure for driving tables 3 and 4;

FIG. 3 is a side view of a guide structure of the drive tables 3 and 4;

FIG. 4 is a sectional view showing a wheel bearing 10 and a wheel main shaft 11.

FIG. 5 is a sectional view showing a dresser bearing 20 and a dresser main shaft 21.

FIG. 6 is a graph showing a feed resolution of a dresser spindle 21;

FIG. 7 is an explanatory diagram of a truing operation of the base metal Wb.

FIG. 8 is an explanatory diagram of a truing operation of the wheel W.

FIG. 9 is an explanatory diagram of ductile mode grinding.

FIG. 10 is an explanatory diagram of brittle mode grinding.

FIG. 11 is an explanatory diagram of grinding with insufficient device rigidity.

[Explanation of symbols]

 2 Base 3 Wheel drive table 4 Dresser drive table 7 Laser linear scale 8 Laser linear scale 10 Wheel bearing 11 Wheel spindle 20 Dresser bearing 21 Dresser spindle 40 V-V guide surface D Dresser W wheel

Claims (5)

[Claims] 1. A base, a wheel driving table reciprocating on the base in the X-axis direction, a dresser driving table reciprocating on the base in a Z-axis direction orthogonal to the X-axis, and the wheel driving table. A wheel bearing mounted on a table, rotatably supported by the wheel bearing,
A wheel spindle on which a truing or wheel to be trued is mounted, a wheel drive unit including a wheel drive motor for rotating the wheel spindle, a dresser bearing mounted on the dresser drive table, and a rotatable rotation on the dresser bearing. A dresser spindle supported by a dresser, which is a truing tool, and a dresser drive unit comprising a dresser drive motor for rotating the dresser spindle; the base is made of low thermal expansion cast iron; and the dresser bearing is a hydrostatic oil bearing. Each of the wheel drive table and the dresser drive table has a lower sliding surface guided by a VV guide surface formed on a base and a needle roller bearing arranged between the VV guide surface. And the upper sliding surface is formed on the base. Each nut holder of each nut that is in contact with the static pressure guide surface and is screwed to each feed screw for reciprocating the wheel drive table and reciprocating the dresser drive table guides the linear ball guide on the base. An ultra-precise truing device for a grinding wheel, wherein the truing device is coupled to each of the wheel drive table and the dresser drive table via a static pressure coupling. 2. The ultra-precise truing device for a grinding wheel according to claim 1, wherein said base is installed on a vibration damping table. 3. The drive motor of each of the wheel drive table and the dresser drive table is a direct drive type servo motor, and the control device of each drive motor is a numerical control device having a control resolution of 0.01 μm or less. Drive table feedback sensor has minimum resolution
3. The ultra-precise truing apparatus for a grinding wheel according to claim 1, wherein the apparatus is a linear laser scale of 0.01 μm. 4. An ultra-precise truing device for a grinding wheel according to claim 1, wherein an AE sensor is provided on said dresser bearing. 5. The arbor gripping mechanism for mounting a base metal or a wheel to be trued is a pull stud fixed to the arbor and a collet built in the wheel spindle and capable of being opened and closed from the outside. 1,
An ultra-precise truing device for a grinding wheel according to 2, 3 or 4.