CN204525053U - A kind of gas-liquid-solid three-phase abrasive Flow burnishing device for large area super-smooth surface - Google Patents
A kind of gas-liquid-solid three-phase abrasive Flow burnishing device for large area super-smooth surface Download PDFInfo
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- CN204525053U CN204525053U CN201520075722.3U CN201520075722U CN204525053U CN 204525053 U CN204525053 U CN 204525053U CN 201520075722 U CN201520075722 U CN 201520075722U CN 204525053 U CN204525053 U CN 204525053U
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- supersonic generator
- leading screw
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- smooth surface
- linear module
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Abstract
The utility model discloses a kind of gas-liquid-solid three-phase abrasive Flow burnishing device for large area super-smooth surface, comprise carrying casing, translating device, rotation support platform and lowering or hoisting gear that polishing fluid is housed, carrying bottom half is fixed with clamping workpiece dish, polished workpiece by clamping on the clamping workpiece dish of bottom half, polishing fluid is filled with casing and the polished workpiece of submergence, translating device comprises pan drive motor, linear module and supersonic generator, translating device is fixed on rotating supporting device, and rotating supporting device is fixed on lowering or hoisting gear; The utility model, by the feeding of existing module, effectively controls the effective area of polishing; Be that supersonic generator provides the controlled gyration of speed by rotation support platform; The clearance height of supersonic generator and surface of the work is effectively controlled by lowering or hoisting gear; The program is convenient to test operation and process, and its control method degree of accuracy is high, widely applicable.
Description
Technical field
The utility model relates to Precision Machining field, in particular, relates to a kind of gas-liquid-solid three-phase abrasive Flow burnishing device for large area super-smooth surface.
Background technology
In high and new technology fields such as contemporary optics, electronic information and membrane sciences, need to realize super smooth surface processing (Ultrasmooth Surface Manufacturing) at precision optics part and functional crystal material surface, such as soft x-ray optics system, laser gyro speculum, high-density wavelength division multiplexer, superlaser speculum, function photoelectric device, optical window etc.In general, super smooth surface processing is removed for realizing atom level material, and add man-hour very little to the active force of surface of the work, therefore belong to the processing mode that typically slow work yields fine products, efficiency is extremely low, and processing cost is very high.At the technical barrier guaranteeing to realize low cost under the prerequisite not occurring affected layer and sub-surface damage, high efficiency super smooth surface processing is the urgent need solution of precision manufactureing field.
Existing Machining Technology of Super Smooth Surface, totally can be divided into two classes, one class relies on machining tool contact surface of the work to realize processing (as used emery wheel, abrasive band or other flexible material as the grinding, polishing etc. of instrument), another kind of, do not rely on machining tool directly to contact surface of the work, but utilize the processing of flow at high speed realization to surface of the work of carrying the abrasive Flow of fine abrasive grains, this class processing method can be referred to as fluid polishing.The processing of instrument contact surface of the work, in fine abrasive grains, micro-cutting is formed to remove micro-protuberance of surfacing to surface of the work indeed through instrumental purpose, due to fine abrasive grains and the morphology error being mixed in the uneven and tool surfaces of the particle diameter of impurity wherein itself thereof, cause abrasive particle to be subject to the uneven of instrumental purpose power, therefore the abrasive particle of stressed excessive (particularly can cause normal force excessive) is difficult to invariably can cause Surface Machining metamorphic layer and sub-surface damage.Therefore, from the particular/special requirement of super smooth surface processing, the dynamics of the micro-cutting that fluid polishing uses flexible much better fluid to drive fine abrasive grains to be formed surface of the work or micro-shock is then much smaller, particularly can there is sufficient buffering to normal force, therefore can effectively avoid machined layer to go bad and sub-surface damage, be more rational Machining Technology of Super Smooth Surface.
The defect of current liquor finish method is that effective working (finishing) area is little, and working (machining) efficiency is low, and for this problem, the utility model type patent proposes a kind of brand-new polishing structure, effectively improves the problems referred to above.
Utility model content
The purpose of this utility model is to solve the problem that in gas-liquid-solid three-phase abrasive Flow polishing process, effectively working (finishing) area is little, working (machining) efficiency is low, provides a kind of gas-liquid-solid three-phase abrasive Flow burnishing device processed translation friction, can adapt to the large area super-smooth surface adjusting machining angle and gap
The utility model is achieved through the following technical solutions above-mentioned purpose: a kind of gas-liquid-solid three-phase abrasive Flow burnishing device for large area super-smooth surface, comprise carrying casing, translating device, rotation support platform and lowering or hoisting gear that polishing fluid is housed, described carrying bottom half is fixed with clamping workpiece dish, polished workpiece is by clamping on the clamping workpiece dish of bottom half, and polishing fluid is filled with casing and the polished workpiece of submergence; Described translating device comprises pan drive motor, linear module and supersonic generator, supersonic generator is fixed on the slide block of linear module, and pan drive motor connecting linear module also drives linear module to move thus drives supersonic generator to carry out translational motion; Described rotation support platform comprises rotary drive motor and right-angled intersection bearing, described linear module is fixed on right-angled intersection bearing upper surface, the outside of right-angled intersection bearing is provided with external toothing, the output of rotary drive motor is provided with gear and is meshed by the external toothing of this gear with right-angled intersection bearing, thus drives linear module to rotate; Described lowering or hoisting gear comprises lifting drive motors, optical axis guide rail, leading screw and support plate, rotation support platform is fixed in support plate, lifting drive motors connects leading screw upper end and drives the rotation of leading screw, the two ends of support plate are sleeved on optical axis guide rail by optical axis guide pin bushing, leading screw is set with leading screw axle sleeve, the affixed support plate of leading screw axle sleeve, described lifting drive motors drives the elevating movement driving support plate during screw turns, thus the elevating movement of driven rotary support platform; Described support plate is located at directly over bearing box.
Further, described rotary drive motor is fixed in support platform.
Further, described optical axis guide rail is provided with four, and is evenly located at the outside of support plate minor face, four affixed upper plates in optical axis guide rail upper end, the affixed lower plate in lower end; The lower end of described leading screw connects lower plate, and the upper end of leading screw connects lifting drive motors through upper plate, and lifting drive motors is fixed on upper plate by motor cabinet.
Further, affixed slide block bottom described supersonic generator, the transmitting of supersonic generator is rectified polished workpiece.
Further, described supersonic generator bottom angled is fixed on slide block, and transmitting terminal and the polished surface of the work of supersonic generator form polishing angle.
Carrying casing be mainly polished workpiece a clamping is provided and with the platform of polishing fluid coupling contact, general polished workpiece is disc shape silicon chip, optical glass or aluminium flake, during concrete installation, first by clamping firm for polished workpiece on clamping workpiece dish, the polishing fluid being mixed with certain proportion abrasive particle to be filled with in carrying casing and the upper surface certain altitude of the polished workpiece of submergence.
Translating device adjusts the polishing angle of supersonic generator relative to polished surface of the work by the slide block of supersonic generator and linear module, by the initial burnishing position of linear module adjustment supersonic generator relative to polished workpiece, generally the initial burnishing position of supersonic generator is polished workpiece centre position.
Lowering or hoisting gear is by the gap of adjustment lifting drive motors adjustment supersonic generator relative to polished surface of the work.For the polishing fluid of different polished workpiece and different proportion, supersonic generator is different relative to the clearance height of surface of the work, adjusts by adjustment lifting drive motors.
Rotary support is dull and stereotyped drives translating device to carry out spinning by rotary drive motor, because translating device accumbency is fixed on rotation support platform, thus supersonic generator is done with workpiece a bit for the gyration in the center of circle relative to polished workpiece.Drive the position of supersonic generator on translating device by pan drive motor, thus expand its radius of gyration.
The beneficial effects of the utility model are: the utility model requires the difficult points such as effective polishing area is large, process is smooth in gas-liquid-solid three-phase abrasive Flow Super-smooth Surface Polishing method, give a kind of ideal multiple degrees of freedom polishing scheme, by the feeding of existing module, effectively control the effective area of polishing; Be that supersonic generator provides the controlled gyration of speed by rotation support platform; The clearance height of supersonic generator and surface of the work is effectively controlled by lowering or hoisting gear; The program is convenient to test operation and process, and its control method degree of accuracy is high, widely applicable; Processing can be provided to ensure for gas-liquid-solid three-phase abrasive Flow Super-smooth Surface Polishing, simultaneously for gas-liquid-solid three-phase abrasive Flow polishing technology plays its technical advantage in Super-smooth Surface Polishing field and application potential establishes important foundation.
Accompanying drawing explanation
Fig. 1 is overall structure schematic diagram of the present utility model.
Fig. 2 is the utility model rotation support platform apparatus structure schematic diagram.
Fig. 3 is the utility model translating device structural representation.
In figure, 1-carrying casing, 2-clamping workpiece dish, 3-optical axis guide rail, 4-leading screw, 5-optical axis guide pin bushing, 6-leading screw axle sleeve, 7-upper plate, 8-are elevated drive motors, 9-translating device, 10-rotation support platform, 11-support plate, 12-lower plate, 13-rotary drive motor, 14-gear, 15-right-angled intersection bearing, 16-supersonic generator, 17-slide block, the linear module of 18-, 19-pan drive motor.
Detailed description of the invention
Below in conjunction with accompanying drawing, the utility model is described in further detail:
As shown in Figure 1, Figure 2 and Figure 3, a kind of gas-liquid-solid three-phase abrasive Flow burnishing device for large area super-smooth surface, comprises carrying casing 1, translating device 9, rotation support platform 10 and lowering or hoisting gear that polishing fluid is housed.
Be fixed with clamping workpiece dish 2 bottom carrying casing 1, polished workpiece is by clamping on the clamping workpiece dish 2 of bottom half, and ensure that the overall structure of polished workpiece is stablized, polishing fluid is filled with casing and the polished workpiece of submergence.Carrying casing 1 be mainly polished workpiece a clamping is provided and with the platform of polishing fluid coupling contact, general polished workpiece is disc shape silicon chip, optical glass or aluminium flake, during concrete installation, first by clamping firm for polished workpiece on clamping workpiece dish 2, the polishing fluid being mixed with certain proportion abrasive particle to be filled with in carrying casing 1 and the upper surface certain altitude of the polished workpiece of submergence.
Translating device 9 comprises pan drive motor 19, linear module 18 and supersonic generator 16, supersonic generator 16 is fixed on the slide block 17 of linear module 18, and pan drive motor 19 connecting linear module 18 also drives linear module 18 to move thus drives supersonic generator 16 to carry out translational motion.Can direct at right angle setting with slide block 17 bottom supersonic generator 16, also can tilt to install; Translating device 9 adjusts the polishing angle of supersonic generator 16 relative to polished surface of the work by supersonic generator 16 and the slide block 17 of linear module 18, adjust the initial burnishing position of supersonic generator 16 relative to polished workpiece by linear module 18, generally the initial burnishing position of supersonic generator 16 is polished workpiece centre position.
Rotation support platform 10 comprises rotary drive motor 13 and right-angled intersection bearing 15, described linear module 18 is fixed on right-angled intersection bearing 15 upper surface, the outside of right-angled intersection bearing 15 is provided with external toothing, the output of rotary drive motor 13 is provided with gear 14 and is meshed with the external toothing of right-angled intersection bearing 15 by this gear 14, thus drives linear module 18 to rotate; Described rotary drive motor 13 is fixed in support platform.。Rotary support flat board 10 drives translating device 9 to carry out spinning by rotary drive motor 13, because translating device 9 accumbency is fixed on rotation support platform 10, thus supersonic generator 16 is done with workpiece a bit for the gyration in the center of circle relative to polished workpiece.Drive the position of supersonic generator on translating device by pan drive motor, thus expand its radius of gyration.
Lowering or hoisting gear comprises lifting drive motors 8, optical axis guide rail 3, leading screw 4 and support plate 11, rotation support platform 10 is fixed in support plate 11, lifting drive motors 8 connects leading screw 4 upper end and drives the rotation of leading screw 4, the two ends of support plate 11 are sleeved on optical axis guide rail 3 by optical axis guide pin bushing 5, leading screw 4 is set with leading screw axle sleeve 6, the affixed support plate 11 of leading screw axle sleeve 6, the elevating movement of support plate 11 is driven when described lifting drive motors 8 drives leading screw 4 to rotate, thus the elevating movement of driven rotary support platform 10; Described support plate 11 is located at directly over bearing box.Described optical axis guide rail 3 is provided with four, and is evenly located at the outside of support plate 11 minor face, four affixed upper plates 7 in optical axis guide rail 3 upper end, the affixed lower plate 12 in lower end; The lower end of described leading screw 4 connects lower plate 12, and the upper end of leading screw 4 connects upper plate 8 through upper plate 7, and upper plate 8 is fixed on upper plate 7 by motor cabinet.Lowering or hoisting gear adjusts the gap of supersonic generator 16 relative to polished surface of the work by adjustment lifting drive motors 8.For the polishing fluid of different polished workpiece and different proportion, supersonic generator is different relative to the clearance height of surface of the work, adjusts by adjustment lifting drive motors 8.
Concrete operations mode of the present utility model is as follows:
First, by the polished clamping workpiece of plate-like on clamping workpiece dish 2, ensure that polished workpiece does not firmly loosen, then the polishing fluid being mixed with a certain proportion of abrasive particle is filled with in carrying casing 1, require the polished workpiece of submergence, submergence height sets according to the different polishing fluid of different workpieces.
Secondly, adjustment slide block 17 and the angle of supersonic generator 16 junction, make supersonic generator 16 and level angle change.Drive pan drive motor 19, linear module 18 is made to carry out translational motion, and then be with movable slider 17 and supersonic generator 16 to carry out translational motion, the workpiece of general polishing plate-like should make ultrasonic generator transmitting terminal aim at the centre of gyration position of the polished workpiece of plate-like.
Drive lifting drive motors 8 again, and then drive leading screw 4 to rotate, leading screw 4 rotarily drives leading screw axle sleeve 6 and does elevating movement, fixed support flat board 11 on leading screw axle sleeve 6, support plate 11 is sleeved on optical axis guide rail 3 by optical axis guide pin bushing 5, support plate 11 is fixed with rotation support platform 10, thus makes rotation support platform 10 do elevating movement, thus regulate the gap between supersonic generator 16 and polished workpiece, make supersonic generator 16 reach predetermined altitude.
Finally drive rotary drive motor 13, its outlet terminal is equipped with gear 14, gear 14 engages with the external toothing of right-angled intersection bearing 15, right-angled intersection bearing 15 is fixed with translating device 9, thus drive translating device 9 to be rotated, and then supersonic generator 16 is rotated relative to polished workpiece.Finally obtain a supersonic generator 16 by above-mentioned steps and carry out a roto-translation movement relative to polished workpiece.
Above-described embodiment is preferred embodiment of the present utility model; it is not the restriction to technical solutions of the utility model; as long as without the technical scheme that creative work can realize on the basis of above-described embodiment, all should be considered as falling within the scope of the rights protection of the utility model patent.
Claims (5)
1. the gas-liquid-solid three-phase abrasive Flow burnishing device for large area super-smooth surface, it is characterized in that: comprise carrying casing (1), translating device (9), rotation support platform (10) and lowering or hoisting gear that polishing fluid is housed, described carrying casing (1) bottom is fixed with clamping workpiece dish (2), polished workpiece is by clamping on the clamping workpiece dish (2) of bottom half, and polishing fluid is filled with casing and the polished workpiece of submergence, described translating device (9) comprises pan drive motor (19), linear module (18) and supersonic generator (16), supersonic generator (16) is fixed on the slide block (17) of linear module (18), and pan drive motor (19) connecting linear module (18) also drives linear module (18) to move thus drives supersonic generator (16) to carry out translational motion, described rotation support platform (10) comprises rotary drive motor (13) and right-angled intersection bearing (15), described linear module (18) is fixed on right-angled intersection bearing (15) upper surface, the outside of right-angled intersection bearing (15) is provided with external toothing, the output of rotary drive motor (13) is provided with gear (14) and is meshed by the external toothing of this gear (14) with right-angled intersection bearing (15), thus drives linear module (18) to rotate, described lowering or hoisting gear comprises lifting drive motors (8), optical axis guide rail (3), leading screw (4) and support plate (11), rotation support platform (10) is fixed in support plate (11), lifting drive motors (8) connects leading screw (4) upper end and drives the rotation of leading screw (4), the two ends of support plate (11) are sleeved on optical axis guide rail (3) by optical axis guide pin bushing (5), leading screw (4) is set with leading screw axle sleeve (6), leading screw axle sleeve (6) affixed support plate (11), described lifting drive motors (8) drives the elevating movement of support plate (11) when driving leading screw (4) to rotate, thus the elevating movement of driven rotary support platform (10), described support plate (11) is located at directly over bearing box.
2. a kind of gas-liquid-solid three-phase abrasive Flow burnishing device for large area super-smooth surface according to claim 1, is characterized in that: described rotary drive motor (13) is fixed in support platform.
3. a kind of gas-liquid-solid three-phase abrasive Flow burnishing device for large area super-smooth surface according to claim 1, it is characterized in that: described optical axis guide rail (3) is provided with four, and be evenly located at the outside of support plate (11) minor face, the four affixed upper plate in optical axis guide rail (3) upper ends (7), the affixed lower plate in lower end (12); The lower end of described leading screw (4) connects lower plate (12), the upper end of leading screw (4) connects upper plate (8) through upper plate (7), and upper plate (8) is fixed on upper plate (7) by motor cabinet.
4. a kind of gas-liquid-solid three-phase abrasive Flow burnishing device for large area super-smooth surface according to claim 1, it is characterized in that: described supersonic generator (16) the affixed slide block in bottom (17), the transmitting of supersonic generator (16) is rectified polished workpiece.
5. a kind of gas-liquid-solid three-phase abrasive Flow burnishing device for large area super-smooth surface according to claim 1, it is characterized in that: described supersonic generator (16) bottom angled is fixed on slide block (17), transmitting terminal and the polished surface of the work of supersonic generator (16) form polishing angle.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520075722.3U CN204525053U (en) | 2015-02-03 | 2015-02-03 | A kind of gas-liquid-solid three-phase abrasive Flow burnishing device for large area super-smooth surface |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520075722.3U CN204525053U (en) | 2015-02-03 | 2015-02-03 | A kind of gas-liquid-solid three-phase abrasive Flow burnishing device for large area super-smooth surface |
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| CN204525053U true CN204525053U (en) | 2015-08-05 |
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| CN201520075722.3U Withdrawn - After Issue CN204525053U (en) | 2015-02-03 | 2015-02-03 | A kind of gas-liquid-solid three-phase abrasive Flow burnishing device for large area super-smooth surface |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104786111A (en) * | 2015-02-03 | 2015-07-22 | 浙江工业大学 | Gas-liquid-solid three-phase abrasive particle flow polishing device for large ultra-smooth surface |
| CN107838800A (en) * | 2017-10-20 | 2018-03-27 | 广东长盈精密技术有限公司 | Polishing machine |
| CN111571405A (en) * | 2020-06-23 | 2020-08-25 | 萧县华恒静电科技有限公司 | Grinding equipment for processing anti-static element box and working method thereof |
| CN113070786A (en) * | 2021-04-29 | 2021-07-06 | 杭州汽轮铸锻有限公司 | Grinding device and process for steam turbine rotor forging |
| CN116276606A (en) * | 2023-05-04 | 2023-06-23 | 浙江湖磨抛光磨具制造有限公司 | Crankshaft finishing machine |
-
2015
- 2015-02-03 CN CN201520075722.3U patent/CN204525053U/en not_active Withdrawn - After Issue
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104786111A (en) * | 2015-02-03 | 2015-07-22 | 浙江工业大学 | Gas-liquid-solid three-phase abrasive particle flow polishing device for large ultra-smooth surface |
| CN107838800A (en) * | 2017-10-20 | 2018-03-27 | 广东长盈精密技术有限公司 | Polishing machine |
| CN107838800B (en) * | 2017-10-20 | 2020-04-07 | 东莞市新美洋技术有限公司 | Polishing machine |
| CN111571405A (en) * | 2020-06-23 | 2020-08-25 | 萧县华恒静电科技有限公司 | Grinding equipment for processing anti-static element box and working method thereof |
| CN113070786A (en) * | 2021-04-29 | 2021-07-06 | 杭州汽轮铸锻有限公司 | Grinding device and process for steam turbine rotor forging |
| CN113070786B (en) * | 2021-04-29 | 2022-07-08 | 杭州汽轮铸锻有限公司 | Grinding device and process for steam turbine rotor forging |
| CN116276606A (en) * | 2023-05-04 | 2023-06-23 | 浙江湖磨抛光磨具制造有限公司 | Crankshaft finishing machine |
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| C14 | Grant of patent or utility model | ||
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| AV01 | Patent right actively abandoned |
Granted publication date: 20150805 Effective date of abandoning: 20170801 |
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| AV01 | Patent right actively abandoned |
Granted publication date: 20150805 Effective date of abandoning: 20170801 |
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| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |