CN214991824U

CN214991824U - Magnetron sputtering double-sided coating production line

Info

Publication number: CN214991824U
Application number: CN202120565768.9U
Authority: CN
Inventors: 冷长志; 李启炎
Original assignee: Zhejiang Yundu New Material Technology Co ltd
Current assignee: Zhejiang Yundu New Material Technology Co ltd
Priority date: 2021-03-19
Filing date: 2021-03-19
Publication date: 2021-12-03
Anticipated expiration: 2031-03-19

Abstract

The utility model discloses a magnetron sputtering double-sided coating production line, which comprises a magnetron sputtering device; the device is characterized by also comprising a feeding device and a reciprocating device which are arranged at two sides of the magnetron sputtering equipment; the feeding device comprises an automatic turnover mechanism and conveying mechanisms positioned on two sides of the magnetron sputtering equipment. The utility model discloses a through feedway and reciprocating device's setting, carry out automatic input and output to the magnetism material through conveying mechanism, carry out automatic upset to the magnetism material through automatic tilting mechanism, transport about through elevating system to magnetism material fixed plate and magnetism material, transport through reciprocating conveying mechanism to magnetism material fixed plate and magnetism material reciprocating, degree of automation is high, and is efficient, low in labor strength saves artifical labour and product coating film high quality.

Description

Magnetron sputtering double-sided coating production line

Technical Field

The utility model relates to a feeding device of a magnetron sputtering production line, in particular to a magnetron sputtering double-sided coating production line.

Background

At present, a plurality of magnetic materials are required to be subjected to film coating treatment on the surface, when the film coating treatment is carried out, a plurality of magnetic materials are usually placed on a magnetic material fixing plate, then the magnetic materials are pushed into a magnetron sputtering device along with the magnetic material fixing plate to carry out the film coating treatment, because the magnetic materials are laid on the magnetic material fixing plate, only one surface of the magnetic materials can be subjected to film coating treatment each time during the film coating, after one surface is processed, the magnetic material fixing plate is output from the other side of the magnetron sputtering device, the magnetic material fixing plate and the magnetic materials need to be manually transferred to the input end of the magnetron sputtering device, then the magnetic materials are turned over and sent into the magnetron sputtering device to carry out secondary film coating, after one surface of the film coating is processed, the other surface of the magnetic material can be subjected to film coating treatment only after manual transfer and manual turning, the production efficiency and the labor intensity are high, and the workpiece after the film coating has high temperature, if manual turning operation is adopted, the work can be carried out when the workpiece is cooled to the touchable temperature, time is wasted, and the two-side coating effect of the magnetic material is easily different after the workpiece is cooled, so that the product quality is affected. Therefore, a magnetron sputtering double-sided coating production line is provided.

SUMMERY OF THE UTILITY MODEL

The utility model aims at solving the problem that the magnetron sputtering double-sided coating production line is provided because the manual transfer and manual sheet turning are needed after the single-sided coating of the magnetic material, the production efficiency is low, the labor intensity is high, the cooling is carried out, the effect of coating the two sides of the magnetic material is different, and the product quality is influenced.

In order to achieve the aim, the utility model provides a magnetron sputtering double-sided coating production line which comprises a magnetron sputtering device; the device is characterized by also comprising a feeding device and a reciprocating device which are arranged at two sides of the magnetron sputtering equipment; the feeding device comprises an automatic turnover mechanism and conveying mechanisms positioned on two sides of the magnetron sputtering equipment; the conveying mechanism comprises a conveying rack, a plurality of bearings with seats and a transmission rod, wherein the bearings with the seats are arranged on the conveying rack, the transmission rod is movably arranged on the bearings with the seats, a gear is further arranged on one side of the transmission rod, and a chain is connected onto the gear; the conveying frame is also provided with a conveying motor, and the conveying motor is in transmission connection with the gear through a chain; the conveying mechanism on one side of the magnetron sputtering equipment is connected with the reciprocating device, and the conveying mechanism on the other side of the magnetron sputtering equipment is connected with the feeding device; the conveying rack is also provided with an inductor; the reciprocating device comprises a lifting mechanism and a reciprocating conveying mechanism; the lifting mechanism comprises a lifting frame, a lifting cylinder arranged on the lifting frame and a lifting frame which is arranged on the lifting frame in a sliding manner and is connected with the lifting cylinder; the lifting frame is provided with a plurality of guide grooves, and the lifting frame is provided with guide blocks matched with the guide grooves; the automatic turnover mechanism comprises a rack, a fixing frame arranged on the rack, a magnetic material fixing plate arranged on the fixing frame, a power mechanism arranged on the rack and in transmission connection with the fixing frame, a clamping mechanism arranged on the fixing frame, and a PLC control box arranged on the rack and in line connection with the power mechanism and the clamping mechanism.

Further preferably, the reciprocating conveying mechanism comprises a reciprocating base frame; the reciprocating underframe and the lifting frame are both provided with a plurality of belt seat bearings, a transmission rod is movably mounted on the belt seat bearings, one end of the transmission rod is provided with a gear, the gear is connected with a chain, the reciprocating underframe is provided with a reciprocating motor in transmission connection with the chain, and the lifting frame is provided with a lifting motor in transmission connection with the chain on the lifting frame; inductors are arranged on the lifting frame and the reciprocating bottom frame, and a travel switch is arranged on the lifting frame.

Preferably, the power mechanism comprises a motor mounted on the frame and a speed reducer in transmission connection with the motor; the two sides of the rack are also provided with bearing fixing seats, the two sides of the fixing frame are provided with fixing rods, the fixing frame is movably arranged on the rack through the matching of the fixing rods and the bearing fixing seats, and the fixing rod on one side is in transmission connection with the speed reducer; the fixed frame is also provided with a plurality of supporting blocks; the clamping mechanism comprises a plurality of groups of clamping cylinders arranged on the fixing frame, and the clamping cylinders comprise an upper cylinder and a lower cylinder which are arranged oppositely; the upper cylinder and the lower cylinder are respectively provided with an upper pulling block and a lower pulling block; two magnetic material fixing plates are movably arranged between the upper pulling block and the lower pulling block; and two sides of the magnetic material fixing plate are also provided with a stop block.

Preferably, the rack is further provided with a plurality of sensors and buffer blocks, and the fixing frame is provided with positioning blocks corresponding to the buffer blocks.

The utility model discloses a feedway and reciprocating device's setting carries out automatic input and output to the magnetism material through conveying mechanism, carries out automatic upset to the magnetism material through automatic tilting mechanism, transports magnetism material fixed plate and magnetism material from top to bottom through elevating system, transports magnetism material fixed plate and magnetism material through reciprocating conveying mechanism and reciprocates, and degree of automation is high, and is efficient, and low in labor strength saves hand labor and product coating film high quality.

Drawings

FIG. 1 is a schematic structural diagram of the present invention;

FIG. 2 is a schematic structural view of a lifting mechanism of the present invention;

FIG. 3 is a schematic structural view of a conveying mechanism of the present invention;

FIG. 4 is a schematic view of the structure of the automatic turnover mechanism of the present invention

Fig. 5 is a schematic view of the local structure of the automatic turnover mechanism of the present invention.

Illustration of the drawings: 1. a magnetron sputtering apparatus; 2. a feeding device; 3. a reciprocating device; 31. a lifting mechanism; 311. a lifting frame; 312. a lifting cylinder; 313. a lifting frame; 314. a guide groove; 315. a guide block; 316. a lifting motor; 317. a travel switch; 32. a reciprocating conveying mechanism; 321. a reciprocating base frame; 322. a reciprocating motor; 4. an automatic turnover mechanism; 41. a frame; 42. a fixed mount; 43. a magnetic material fixing plate; 44. fixing the rod; 45. a support block; 46. a stopper; 47. a buffer block; 48. positioning blocks; 49. a bearing fixing seat; 5. a conveying mechanism; 51. a conveyor frame; 52. a pedestal bearing; 53. a transmission rod; 54. a gear; 55. a chain; 56. a conveying motor; 6. an inductor; 7. a power mechanism; 71. a motor; 72. a speed reducer; 8. a clamping mechanism; 81. a clamping cylinder; 82. an upper cylinder; 83. a lower cylinder; 84. pulling up the block; 85. a pull-down block; 9. and a PLC control box.

Detailed Description

The magnetron sputtering double-sided coating production line of the present invention will be further described with reference to the accompanying drawings.

Referring to fig. 1, a magnetron sputtering double-sided coating production line of the embodiment includes a magnetron sputtering device 1; the device is characterized by also comprising a feeding device 2 and a reciprocating device 3 which are arranged at two sides of the magnetron sputtering equipment 1; the feeding device 2 comprises an automatic turnover mechanism 4 and conveying mechanisms 5 positioned at two sides of the magnetron sputtering equipment 1; through feedway 2 and reciprocating device 3's setting, carry out automatic input and output to the magnetism material through conveying mechanism 5, overturn automatically to the magnetism material through automatic tilting mechanism 4, transport magnetism material fixed plate 43 and magnetism material from top to bottom through elevating system 31, transport magnetism material fixed plate 43 and magnetism material through reciprocating conveying mechanism 5 and reciprocate, degree of automation is high, and is efficient, low in labor strength, save hand labor power and product coating film high quality.

Further, referring to fig. 1 and 3, the conveying mechanism 5 includes a conveying frame 51, a plurality of bearings 52 with seats mounted on the conveying frame 51, and a transmission rod 53 movably mounted on the bearings 52 with seats, a gear 54 is further mounted on one side of the transmission rod 53, and a chain 55 is connected to the gear 54; the conveying rack 51 is also provided with a conveying motor 56, and the conveying motor 56 is in transmission connection with the gear 54 through a chain 55; the conveying mechanism 5 at one side of the magnetron sputtering device 1 is connected with the reciprocating device 3, and the conveying mechanism 5 at the other side is connected with the feeding device 2; the conveyor frame 51 is also provided with an inductor 6; the conveying mechanism 5 is arranged to convey and transfer the magnetic material fixing plate 43; the conveying motor 56 drives one gear 54 to rotate through the chain 55, the gear 54 drives the transmission rod 53 to rotate, the transmission rod 53 drives other transmission rods 53 to synchronously rotate through the chain 55, and the transmission rod 53 drives the magnetic material fixing plate 43 to move through friction force when rotating, so that manual movement is not needed, labor force is saved, and labor intensity is reduced; the sensor 6 is arranged to sense the position of the magnetic material fixing plate 43 to control the on-off of the conveying motor 56.

Further, referring to fig. 1-2, the shuttle 3 includes a lifting mechanism 31 and a shuttle mechanism 32; the lifting mechanism 31 comprises a lifting frame 311, a lifting cylinder 312 arranged on the lifting frame 311 and a lifting frame 313 which is slidably arranged on the lifting frame 311 and is connected with the lifting cylinder 312; the lifting frame 311 is provided with a plurality of guide slots 314, and the lifting frame 313 is provided with a guide block 315 matched with the guide slots 314; through the arrangement of the lifting cylinder 312, the lifting frame 313 is driven to reciprocate up and down on the lifting frame 311, so that the magnetic material fixing plate 43 is driven to move up and down, and the magnetic material fixing plate 43 can be transferred and conveyed among the reciprocating conveying mechanism 32, the conveying mechanism 5 and the automatic turnover mechanism 4; the lifting frame 313 is limited and guided by the arrangement of the guide groove 314 and the guide block 315.

Further, referring to fig. 1 and fig. 4-5, the automatic turnover mechanism 4 includes a frame 41, a fixing frame 42 mounted on the frame 41, a magnetic fixing plate 43 mounted on the fixing frame 42, a power mechanism 7 mounted on the frame 41 and in transmission connection with the fixing frame 42, a clamping mechanism 8 mounted on the fixing frame 42, and a PLC control box 9 mounted on the frame 41 and in line connection with the power mechanism 7 and the clamping mechanism 8; through power unit 7's setting, drive mount 42 and carry out the upset action on frame 41, cooperation clamping mechanism 8 presss from both sides tight two magnetic material fixed plates 43 and is in the magnetic material between two magnetic material fixed plates 43 to drive the automatic turn-over of magnetic material, need not to wait for through artifical turn-over after the magnetic material cools off, save waiting for the cooling time, improve work efficiency and low in labor strength.

Further, referring to fig. 1-2, the shuttle 32 includes a shuttle chassis 321; the reciprocating underframe 321 and the lifting frame 313 are respectively provided with a plurality of bearings 52 with seats, the bearings 52 with seats are movably provided with a transmission rod 53, one end of the transmission rod 53 is provided with a gear 54, the gear 54 is connected with a chain 55, the reciprocating underframe 321 is provided with a reciprocating motor 322 in transmission connection with the chain 55, and the lifting frame 313 is provided with a lifting motor 316 in transmission connection with the chain 55 on the lifting frame 313; the lifting frame 313 and the reciprocating underframe 321 are both provided with an inductor 6, and the lifting frame 313 is also provided with a travel switch 317; the transmission rod 53 and the lifting motor 316 are also arranged on the lifting frame 313, so that the magnetic material transferring fixing plate 43 is convenient to push; the up-down stroke of the lifting frame 313 is limited by the setting of the stroke switch 317, so that the phenomenon that the magnetic material fixing plate 43 cannot be normally conveyed due to overtravel is avoided.

Further, referring to fig. 4-5, the power mechanism 7 includes a motor 71 mounted on the frame 41 and a speed reducer 72 in transmission connection with the motor 71; bearing fixing seats 49 are further arranged on two sides of the rack 41, fixing rods 44 are arranged on two sides of the fixing frame 42, the fixing frame 42 is movably mounted on the rack 41 through matching of the fixing rods 44 and the bearing fixing seats 49, and the fixing rod 44 on one side is in transmission connection with the speed reducer 72; the fixed frame 42 is also provided with a plurality of supporting blocks 45; the clamping mechanism 8 comprises a plurality of groups of clamping air cylinders 81 arranged on the fixed frame 42, and the clamping air cylinders 81 comprise an upper air cylinder 82 and a lower air cylinder 83 which are oppositely arranged; the upper cylinder 82 and the lower cylinder 83 are respectively provided with an upper pulling block 84 and a lower pulling block 85; two magnetic material fixing plates 43 are movably arranged between the pull-up block 84 and the pull-down block 85; two sides of the magnetic material fixing plate 43 are also provided with a stop block 46; the clamping and fixing effects are improved and the clamping is more stable by installing the plurality of groups of clamping cylinders 81 on the fixing frame 42, so that the clamping and fixing effects of the two magnetic material fixing plates 43 on the magnetic material between the two magnetic material fixing plates are better, and the magnetic material fixing plates 43 or the magnetic material is prevented from falling off during overturning; the upper air cylinder 82 and the lower air cylinder 83 are arranged oppositely, and the upper pulling block 84 and the lower pulling block 85 are arranged in a matched manner, so that one air cylinder is pulled down and the other air cylinder is pulled up, the clamping effect is better, and the condition of deviation is avoided; through the arrangement of the stop blocks 46, the positions of the two sides of the magnetic material are limited, and the magnetic material is prevented from falling off from the two sides; through the arrangement of the bearing fixing seat 49 and the fixing rod 44, the fixing frame 42 can rotate on the rack 41, the fixing rod 44 on one side is in transmission connection with the speed reducer 72, the speed reducer 72 is driven by the motor 71, and the fixing rod 44 is driven by the speed reducer 72 to rotate, so that the fixing frame 42 is driven to rotate; through the setting of a plurality of supporting shoes 45, when installing first magnetic material fixed plate 43 and arranging the magnetic material on magnetic material fixed plate 43, can place magnetic material fixed plate 43 on supporting shoe 45, play the supporting role through supporting shoe 45.

Further, referring to fig. 4-5, the rack 41 is further provided with a plurality of sensors 6 and a buffer block 47, and the fixing frame 42 is provided with a positioning block 48 corresponding to the buffer block 47; the rotation angle of the fixing frame 42 can be controlled, so that the magnetic fixing plate 43 is prevented from being in an inclined state during installation or disassembly and directly falling; through the setting of buffer block 47, play the cushioning effect to locating piece 48, avoid locating piece 48 and frame 41 to produce the collision.

The utility model discloses a working process: referring to fig. 1-5, firstly, one of the magnetic material fixing plates 43 is mounted on the supporting block 45 of the fixing frame 42, then the magnetic material is laid on the magnetic material fixing plate 43, then the part of the magnetic material fixing plate 43 on which the magnetic material is laid is pushed onto the transmission rod 53 of the conveying mechanism 5, then the conveying motor 56 is started, the conveying motor 56 drives the transmission rod 53 to rotate, the transmission rod 53 drives the other transmission rods 53 to synchronously rotate through the chain 55, and when the transmission rod 53 rotates, the magnetic material fixing plate 43 is driven by friction force to move from the fixing frame to the conveying mechanism 5 and is sent to the magnetron sputtering device 1 for film coating treatment; when the coated magnetic material is pushed out to the other side of the conveying mechanism 5 along with the magnetic material fixing plate 43 through the magnetron sputtering device 1, the sensor 6 on the conveying mechanism 5 senses the magnetic material fixing plate 43, then the conveying motor 56 on the conveying mechanism 5 is started, the transmission rod 53 is driven to rotate through the chain 55, and the transmission rod 53 drives the magnetic material fixing plate 43 to move to the lifting frame 313; when the magnetic material fixing plate 43 completely moves to the lifting mechanism 31, the conveying motor 56 stops, the lifting cylinder 312 starts to drive the lifting frame 313 and the magnetic material fixing plate 43 to move downwards, and the lifting cylinder 312 stops working after moving to the travel switch 317; then the lifting motor 316 is started to drive the corresponding transmission rod 53 to rotate, the transmission rod 53 on the lifting frame 313 drives the magnetic material fixing plate 43 to move to the reciprocating bottom frame 321, after the inductor 6 on the reciprocating bottom frame induces the magnetic material fixing plate 43, the lifting frame 313 is reset after the magnetic material fixing plate 43 completely leaves the lifting frame 313, the reciprocating motor 322 is started, and the reciprocating motor 322 drives the magnetic material fixing plate 43 to move through the transmission rod 53 until the magnetic material fixing plate 43 moves to the lifting frame 313 on the other side; then the lifting cylinder 312 is started to drive the magnetic material fixing plate 43 to move upwards; then the lifting motor 316 is started to drive the transmission rod 53 to rotate, and the magnetic material fixing plate 43 is moved to the supporting block 45 of the fixing frame 42 on the automatic turnover mechanism 4 through the rotation of the transmission rod 53; then the worker covers another magnetic material fixing plate 43 on the magnetic material; then, the clamping cylinder 81 is started, and the two magnetic material fixing plates 43 are clamped through the clamping cylinder 81; then starting the motor 71, driving the speed reducer 72 by the motor 71, loosening the clamping cylinder 81 after the speed reducer 72 drives the fixing frame 42 to rotate 180 degrees, and then taking out the magnetic material fixing plate 43 on the upper layer; and pushing the magnetic material fixing plate 43 with the magnetic material placed on the conveying mechanism 5 to perform secondary coating, wherein the subsequent steps are the same as those in the primary coating, taking out the magnetic material until the coated magnetic material and the magnetic material fixing plate 43 return to the fixing frame 42 again, and laying the magnetic material which is not subjected to coating on the magnetic material fixing plate 43 to perform reciprocating coating.

The scope of the present invention is not limited to the above embodiments and their variations. The present invention is not limited to the above embodiments, and other modifications and substitutions may be made by those skilled in the art.

Claims

1. A magnetron sputtering double-sided coating production line comprises a magnetron sputtering device (1); the device is characterized by also comprising a feeding device (2) and a reciprocating device (3) which are arranged at two sides of the magnetron sputtering equipment (1); the feeding device (2) comprises an automatic turnover mechanism (4) and conveying mechanisms (5) positioned on two sides of the magnetron sputtering equipment (1); the conveying mechanism (5) comprises a conveying rack (51), a plurality of bearings (52) with seats and a transmission rod (53), wherein the bearings (52) with seats are arranged on the conveying rack (51), the transmission rod (53) is movably arranged on the bearings (52) with seats, a gear (54) is further arranged on one side of the transmission rod (53), and a chain (55) is connected onto the gear (54); the conveying rack (51) is also provided with a conveying motor (56), and the conveying motor (56) is in transmission connection with the gear (54) through a chain (55); the conveying mechanism (5) at one side of the magnetron sputtering device (1) is connected with the reciprocating device (3), and the conveying mechanism (5) at the other side of the magnetron sputtering device is connected with the feeding device (2); the conveying rack (51) is also provided with an inductor (6); the reciprocating device (3) comprises a lifting mechanism (31) and a reciprocating conveying mechanism (32); the lifting mechanism (31) comprises a lifting frame (311), a lifting cylinder (312) arranged on the lifting frame (311) and a lifting frame (313) which is slidably arranged on the lifting frame (311) and is connected with the lifting cylinder (312); a plurality of guide grooves (314) are formed in the lifting frame (311), and guide blocks (315) matched with the guide grooves (314) are arranged on the lifting frame (313); the automatic turnover mechanism (4) comprises a rack (41), a fixing frame (42) arranged on the rack (41), a magnetic material fixing plate (43) arranged on the fixing frame (42), a power mechanism (7) arranged on the rack (41) and in transmission connection with the fixing frame (42), a clamping mechanism (8) arranged on the fixing frame (42), and a PLC control box (9) arranged on the rack (41) and in line connection with the power mechanism (7) and the clamping mechanism (8).

2. The magnetron sputtering double-sided coating production line according to claim 1, characterized in that: the reciprocating conveying mechanism (32) comprises a reciprocating base frame (321); the reciprocating underframe (321) and the lifting frame (313) are respectively provided with a plurality of bearings (52) with seats, the bearings (52) with seats are movably provided with a transmission rod (53), one end of the transmission rod (53) is provided with a gear (54), the gear (54) is connected with a chain (55), the reciprocating underframe (321) is provided with a reciprocating motor (322) in transmission connection with the chain (55), and the lifting frame (313) is provided with a lifting motor (316) in transmission connection with the chain (55) on the lifting frame (313); inductors (6) are arranged on the lifting frame (313) and the reciprocating bottom frame (321), and a travel switch (317) is further arranged on the lifting frame (313).

3. The magnetron sputtering double-sided coating production line according to claim 1, characterized in that: the power mechanism (7) comprises a motor (71) arranged on the frame (41) and a speed reducer (72) in transmission connection with the motor (71); bearing fixing seats (49) are further arranged on two sides of the rack (41), fixing rods (44) are arranged on two sides of the fixing frame (42), the fixing frame (42) is movably mounted on the rack (41) through matching of the fixing rods (44) and the bearing fixing seats (49), and the fixing rod (44) on one side is in transmission connection with the speed reducer (72); the fixed frame (42) is also provided with a plurality of supporting blocks (45); the clamping mechanism (8) comprises a plurality of groups of clamping cylinders (81) arranged on a fixed frame (42), and the clamping cylinders (81) comprise an upper cylinder (82) and a lower cylinder (83) which are arranged oppositely; an upper pulling block (84) and a lower pulling block (85) are respectively arranged on the upper air cylinder (82) and the lower air cylinder (83); two magnetic material fixing plates (43) are movably arranged between the pull-up block (84) and the pull-down block (85); and two sides of the magnetic material fixing plate (43) are also provided with a stop block (46).

4. The magnetron sputtering double-sided coating production line according to claim 3, characterized in that: the rack (41) is also provided with a plurality of inductors (6) and buffer blocks (47), and the fixing frame (42) is provided with positioning blocks (48) corresponding to the buffer blocks (47).