CN214881804U

CN214881804U - Substrate clamp for vertical double-sided coating

Info

Publication number: CN214881804U
Application number: CN202022906902.5U
Authority: CN
Inventors: 杨星; 李长江; 周文彬
Original assignee: Suzhou Shengcheng Solar Equipment Co Ltd
Current assignee: Suzhou Shengcheng Solar Equipment Co Ltd
Priority date: 2020-12-07
Filing date: 2020-12-07
Publication date: 2021-11-26
Anticipated expiration: 2030-12-07

Abstract

The utility model discloses a base plate anchor clamps for vertical two-sided coating film, this kind of base plate anchor clamps for vertical two-sided coating film include tray, last tray, substrate, clamping device and main part support down, clamping device's lock is on the main part support, and the clamping has the substrate between lower tray and the last tray, and lower tray and last tray pass through clamping device and press from both sides tight laminating, are equipped with fretwork piece position on lower tray and the last tray, and the outside extension in edge of fretwork piece position is provided with marginal dog, and the four corners department in fretwork piece position is provided with the four corners dog, goes up tray frame edge all around and is provided with trapezoidal boss, be provided with on the lower tray with trapezoidal recess with trapezoidal boss complex, the substrate is by marginal dog and the narrow and small space in the centre of four corners dog restriction. By the mode, the utility model is not easy to have the phenomena of sheet falling and sheet inclining; the double-sided film coating of the largest area is facilitated; the shielded area of the coating is reduced, and the ineffective area of the coating of the substrate is reduced; the clamping design of the spring and the baffle is convenient for realizing the automatic operation of mass production.

Description

Substrate clamp for vertical double-sided coating

Technical Field

The utility model relates to a semiconductor device production technical field especially relates to a base plate anchor clamps that is used for vertical two-sided coating film.

Background

Solar energy is inexhaustible renewable energy which is also clean energy and does not generate any environmental pollution, among the effective utilization of the solar energy, the solar photoelectric utilization is the fastest developing and most active research field in recent years and is one of the most spotlighted projects, therefore, solar cells are researched and developed, and in recent years, the PERC solar cells enter the bottleneck period of development, and the heterojunction solar cells and TOPCon solar cells are used as novel technologies, so that the efficiency improvement potential is large.

No matter the conventional PERC battery or TOPcon structure or HIT structure, a plasma coating process is needed to prepare a film, the conventional coating equipment is basically of a horizontal structure at present, a carrier plate is driven by a plate-type roller, the carrier plate structure used in the driving mode is usually a groove structure corresponding to the size of a silicon wafer, the silicon wafer is limited by a groove due to self weight, the coating structure has the defects of slag falling, wafer turning and the like, the vertical coating equipment gradually becomes a design scheme considered, the carrier plate required by the scheme is driven in the direction close to the vertical direction, the conventional carrier plate is directly used, the risk of wafer falling and wafer breaking is high, and based on the defects and the defects, the prior art needs to be improved, and the substrate clamp for vertical double-sided coating is designed.

SUMMERY OF THE UTILITY MODEL

The utility model mainly solves the technical problem of providing a substrate clamp for vertical double-sided coating, which is not easy to have the phenomena of sheet falling and sheet tilting; the double-sided film coating of the largest area is facilitated; the shielded area of the coating is reduced, which is beneficial to reducing the ineffective area of the coating of the substrate; the clamping design of the spring and the baffle is convenient for realizing the automatic operation of mass production.

In order to solve the technical problem, the utility model discloses a technical scheme be: the substrate clamp for the vertical double-sided coating comprises a lower tray, an upper tray, a substrate, a clamping device and a main body support, wherein the clamping device is locked on the main body support, the main body support is used for placing the lower tray, the upper tray is matched with the lower tray, the substrate is clamped between the lower tray and the upper tray, the lower tray and the upper tray are clamped and attached through the clamping device, the main body frame is favorable for reinforcing the whole substrate clamp to reduce deformation, hollow sheet positions convenient for coating are arranged on the lower tray and the upper tray, edge stoppers are outwards extended at the edges of the hollow sheet positions, four corner stoppers are arranged at four corners of the hollow sheet positions, trapezoidal bosses are arranged at the edges of the frame around the upper tray, trapezoidal grooves matched with the trapezoidal bosses are arranged on the lower tray, and the design of the trapezoidal bosses and the trapezoidal grooves can ensure the accuracy of folding of the upper tray and the lower tray, meanwhile, the edge stop blocks and the four corner stop blocks can be protected, the substrate is limited in a narrow space in the middle by the edge stop blocks and the four corner stop blocks, and the substrate can be kept stable after being placed on a plate, so that vertical film coating is facilitated.

Preferably, the clamping device comprises a locking stud, a spring and a baffle, the locking stud is locked on the main body bracket, the spring and the baffle are sequentially sleeved on the locking stud from top to bottom, and the extending part of the baffle is positioned above the lower tray and the upper tray.

Preferably, the edge stop blocks are designed to be rectangular, semicircular, triangular or combined, the vertical dimension of the edges of the hollowed-out piece positions is 0.1 mm-10 mm, the parallel dimension of the edges of the hollowed-out piece positions is 0.1 mm-10 mm, and the number of the edge stop blocks is not limited.

Preferably, the four-corner check blocks are designed to be no check block at the four corners of the straight chamfer, the round chamfer or the hollow sheet position, and the size of the chamfer is 0.1-10 mm.

Preferably, the trapezoidal boss corresponds to the trapezoidal groove, the trapezoidal boss can be completely arranged in the trapezoidal groove and attached, and the gap between the trapezoidal faces after attachment is less than 0.01 mm.

Preferably, the hollow bits are designed as a single bit or as a plurality of bits.

Preferably, the main body bracket is provided with a hollow part opposite to the hollow part on the upper tray.

Compared with the prior art, the beneficial effects of the utility model are that:

the substrate is designed to be locked and clamped by the upper tray and the lower tray and used for vertical film coating, and the substrate is fixed in the middle by the edge stop blocks and the four corner stop blocks of the upper tray and the lower tray, so that the phenomena of chip falling and chip tilting are not easy to occur;

the upper tray and the lower tray are all in full-open hollow design, so that double-sided coating of the largest area is facilitated;

compared with the conventional narrow continuous edge support, the design of the edge stop blocks and the four-corner stop blocks greatly reduces the coating shielding area, and is beneficial to reducing the coating invalid area of the substrate;

the clamping design of the spring and the baffle is convenient for realizing the automatic operation of mass production.

Drawings

Fig. 1 is a plan view of a substrate holder for vertical double-sided coating.

Fig. 2 is a partial side view of a substrate holder for vertical double-sided coating.

FIG. 3 is a partial enlarged view of a substrate holder for vertical double-sided coating.

FIG. 4 is a top view of a tray on a single stencil station.

FIG. 5 is a top view of a tray in a single stencil position.

FIG. 6 is a top view of a tray with multiple cutout locations.

FIG. 7 is a top view of a tray with multiple cutout locations.

Fig. 8 is a design example of an edge stop.

Fig. 9 shows an example of the design of the four-corner block.

Fig. 10 is a design example of the main body frame.

Detailed Description

The following detailed description of the preferred embodiments of the present invention will be provided to enable those skilled in the art to more easily understand the advantages and features of the present invention, and to make clear and definite definitions of the protection scope of the present invention.

Referring to fig. 1 to 10, an embodiment of the present invention includes:

a substrate clamp for vertical double-sided coating comprises a lower tray 01, an upper tray 02, a substrate 03, a clamping device 04 and a main body support 05, wherein the clamping device 04 is locked on the main body support 05, the main body support 05 is used for placing the lower tray 01, the lower tray 01 is provided with the upper tray 02 matched with the lower tray 01, the substrate 03 is clamped between the lower tray 01 and the upper tray 02, the lower tray 01 and the upper tray 02 are clamped and attached through the clamping device 04, the main body frame 05 is favorable for reinforcing the whole substrate clamp to reduce deformation, the lower tray 01 and the upper tray 02 are provided with hollowed-out sheet positions convenient for coating, hollows opposite to the hollowed-out sheet positions on the upper tray 02 are arranged on the main body support 05, the edges of the hollowed-out sheet positions extend outwards and are provided with

edge stoppers

012 and 021, and four corners of the hollowed-out sheet positions are provided with four corner stoppers, the edge of the frame around the upper tray 02 is provided with a trapezoidal boss 021, the lower tray 01 is provided with a trapezoidal groove 011 matched with the trapezoidal boss 021, the design of the trapezoidal boss 021 and the trapezoidal groove 011 can ensure the accuracy of the upper tray and the lower tray when the upper tray and the lower tray are folded, and meanwhile, the substrate 03 can also play a role in protecting the edge stop blocks and the four corner stop blocks, the substrate is limited by the edge stop blocks and the four corner stop blocks in a narrow space in the middle, and the tray can also be kept stable after standing up and is convenient for vertical film coating.

The clamping device 04 comprises a locking stud 041, a spring 042 and a baffle 043, the locking stud 041 is locked and attached to the main body bracket 05, the locking stud 041 is sleeved with the spring 042 and the baffle 043 from top to bottom in sequence, and the extending part of the baffle 043 is positioned above the lower tray 01 and the upper tray 02.

The

edge stoppers

012 and 021 are designed to be rectangular, semicircular, triangular or combined, the vertical dimension of the edge of the hollowed-out piece is 0.1 mm-10 mm, the parallel dimension of the edge of the hollowed-out piece is 0.1 mm-10 mm, and the number of the edge stoppers is not limited.

The four-corner stop blocks are designed to be not arranged at the four corners of the straight chamfer, the round chamfer or the hollow sheet position, and the size of the chamfer is 0.1-10 mm.

The trapezoidal boss corresponds to the trapezoidal groove, the trapezoidal boss can be completely arranged in the trapezoidal groove and attached, and the gap between the trapezoidal faces after attachment is smaller than 0.01 mm.

The first embodiment is as follows:

a single hollow-out piece position is designed on the upper tray 02, as shown in fig. 3, the hollow-out piece position is full-open hollow, so that double-sided coating is facilitated, the corresponding lower tray 01 is designed as shown in fig. 4, and the middle of the lower tray 01 is designed to be full-open hollow.

The second embodiment is as follows:

the upper tray 02 is provided with a plurality of hollow positions which are all-open hollow regularly arranged, as shown in fig. 5, the corresponding lower tray 01 is designed as shown in fig. 6, and the middle of the lower tray 01 is designed with all-open hollow regularly arranged.

The utility model relates to a when being used for vertical double-sided coating's base plate anchor clamps during operation, the base sheet 03 is placed lower tray 01 and is placed the back, exert force and put to the baffle 043 of clamping device 04, go up compression spring 042 and reserve the vacancy, go up tray 02 and can move into corresponding position in parallel, trapezoidal boss 021 and trapezoidal recess 011 laminating are placed, go up tray 02 and lower tray 01 laminating, base sheet 03 is fixed at the intermediate position by the edge dog and the four corners dog of two trays, take out the power that exerts on baffle 043, baffle 043 presss from both sides tightly upper tray 02 and lower tray 01 under the spring action of spring 042, base sheet 03 is restricted in the narrow and small space in the middle by edge dog and four corners dog, the tray also can remain stable after standing up, be convenient for vertical coating, when base sheet 03 takes over from the base plate anchor clamps, exert force on clamping device 0's baffle 043 equally, go up compression spring 042 and reserve the vacancy, go up tray 02 and move apart in parallel along locking double-screw 041, the substrate 03 is exposed to allow removal of the wafer.

The utility model relates to a substrate clamp for vertical double-sided coating, which is not easy to have the phenomena of sheet falling and sheet inclining; the double-sided film coating of the largest area is facilitated; the shielded area of the coating is reduced, which is beneficial to reducing the ineffective area of the coating of the substrate; the clamping design of the spring and the baffle is convenient for realizing the automatic operation of mass production.

The above only is the embodiment of the present invention, not limiting the patent scope of the present invention, all the equivalent structures or equivalent processes that are used in the specification and the attached drawings or directly or indirectly applied to other related technical fields are included in the patent protection scope of the present invention.

Claims

1. The utility model provides a base plate anchor clamps for vertical two-sided coating film which characterized in that: the substrate clamp for the vertical double-sided coating comprises a lower tray, an upper tray, a substrate, a clamping device and a main body support, wherein the clamping device is locked on the main body support, the substrate is clamped between the lower tray and the upper tray, the lower tray and the upper tray are tightly clamped and attached through the clamping device, hollow-out piece positions convenient for coating are arranged on the lower tray and the upper tray, edge stops are arranged at the edges of the hollow-out piece positions in an outward extending mode, four corner stops are arranged at four corners of the hollow-out piece positions, trapezoidal bosses are arranged at the frame edges around the upper tray, trapezoidal grooves matched with the trapezoidal bosses are arranged on the lower tray, and the substrate is limited by the edge stops and the four corner stops in the middle of narrow space.

2. The substrate holder for vertical double-sided coating according to claim 1, wherein: the clamping device comprises a locking stud, a spring and a baffle, the locking stud is locked on the main body support, the spring and the baffle are sequentially sleeved on the locking stud from top to bottom, and the extending part of the baffle is positioned above the lower tray and the upper tray.

3. The substrate holder for vertical double-sided coating according to claim 1, wherein: the edge stop blocks are designed to be rectangular, semicircular or triangular, the vertical dimension of the edges of the hollowed-out piece positions is 0.1-10 mm, the parallel dimension of the edges of the hollowed-out piece positions is 0.1-10 mm, and the number of the edge stop blocks is not limited.

4. The substrate holder for vertical double-sided coating according to claim 1, wherein: the four-corner stop blocks are designed to be not arranged at the four corners of the straight chamfer, the round chamfer or the hollow sheet position, and the size of the chamfer is 0.1-10 mm.

5. The substrate holder for vertical double-sided coating according to claim 1, wherein: the trapezoidal boss corresponds to the trapezoidal groove, the trapezoidal boss is completely arranged in the trapezoidal groove and attached, and the gap between the trapezoidal faces after attachment is smaller than 0.01 mm.

6. The substrate holder for vertical double-sided coating according to claim 1, wherein: the hollow bit is designed to be a single bit or a plurality of bits.

7. The substrate holder for vertical double-sided coating according to claim 1, wherein: the main body bracket is provided with a hollow part opposite to the hollow part on the upper tray.