CN214719199U

CN214719199U - Auxiliary cleaning lifting equipment

Info

Publication number: CN214719199U
Application number: CN202120550347.9U
Authority: CN
Inventors: 郭城; 吕明; 李充; 郭英云; 高悦
Original assignee: Shandong Kexin Electronics Co ltd
Current assignee: Shandong Kexin Electronics Co ltd
Priority date: 2021-03-17
Filing date: 2021-03-17
Publication date: 2021-11-16
Anticipated expiration: 2031-03-17

Abstract

The utility model relates to the technical field of auxiliary cleaning equipment, and discloses auxiliary cleaning lifting equipment, which comprises a lifting device, a flower basket bearing disc and a cleaning tank, wherein the lifting device is fixedly connected with two sides of the cleaning tank, and the flower basket bearing disc is arranged inside the cleaning tank; the lifting device comprises a supporting plate, a control power box, a rotating shaft, a cam and an electric push rod; the bottom of the flower basket bearing disc is connected with a guard plate, a plurality of through holes are formed in the guard plate, and protection columns are fixedly and upwards connected at four corners of the guard plate; the cleaning tank is of a hollow uncovered cuboid structure. The utility model discloses a control power supply box control electric putter up-and-down motion to the basket of flowers bears the lift-draw process of dish in the control washing tank, can adjust lifting speed and frequency according to the technology demand, and the influence that reduces the human factor and cause makes the wafer yield after the washing better with the uniformity.

Description

Auxiliary cleaning lifting equipment

Technical Field

The utility model relates to a wash auxiliary assembly's technical field, especially relate to an auxiliary cleaning lifting equipment.

Background

Semiconductor wafer will clear away various impurity on the silicon chip in manufacturing process, and the silicon chip needs to be cleaned through the washing liquid many times, gets rid of the impurity on wafer surface and damage aspect, and abluent uniformity and stability influence the quality of wafer, in current wafer manufacturing procedure, need operating personnel to carry out the manual operation of pulling to the basket of flowers that is equipped with the silicon chip in the washing tank in most cleaning processes to improve abluent effect.

However, the dependence of manual operation on operators is large, the consistency of lifting time, frequency, amplitude and frequency during operation cannot be ensured due to human factors in the cleaning process, the stability of products is not facilitated, and the stability and consistency of cleaning quality are poor; meanwhile, a person may generate liquid splash during a pulling operation to cause injury.

Disclosure of Invention

In order to solve the problem, the utility model provides an auxiliary cleaning lifting equipment.

The utility model provides an auxiliary cleaning lifting equipment adopts following technical scheme:

an auxiliary cleaning and lifting device comprises a lifting device, a flower basket bearing disc and a cleaning tank, wherein the lifting device is fixedly connected with two sides of the cleaning tank, and the flower basket bearing disc is arranged in the cleaning tank; the lifting device comprises a supporting plate, a control power box, a rotating shaft, a cam and an electric push rod; the bottom of the flower basket bearing disc is connected with a guard plate, a plurality of through holes are formed in the guard plate, and protection columns are fixedly and upwards connected at four corners of the guard plate; the cleaning tank is of a hollow uncovered cuboid structure.

By adopting the technical scheme, the power supply box is controlled to control the electric push rod to zoom, so that the lifting process of the flower basket bearing disc in the cleaning tank is controlled, the lifting speed and frequency can be adjusted according to the process requirements, the influence caused by human factors is reduced, and the yield and consistency of the cleaned wafers are better; the periphery of the flower basket bearing disc is additionally provided with the protection fence, so that the problem that the flower basket of the wafer topples over in the automatic lifting process is effectively prevented; the bottom of the protective plate is additionally arranged on the flower basket bearing plate, so that the wafers in the flower basket can be prevented from inclining outwards to ensure the yield and the yield of products when the wafers are lifted and cleaned.

Preferably, the cam and the control power supply box are respectively arranged on the upper surface of the supporting plate.

Preferably, the control power supply box is coupled with the rotating shaft.

Preferably, the rotating shaft is concentrically connected with a cam.

Preferably, the side surface of the cam slides in contact with the bottom of the electric push rod.

Preferably, the top of the electric push rod is connected with a rubber cap for protecting the top of the electric push rod.

Preferably, a flower basket is placed in the center of the interior of the flower basket bearing plate.

Preferably, the control power box is provided with a lifting switch and an opening and closing switch for controlling the lifting of the flower basket bearing disc.

Preferably, the through holes are arranged on the guard plate in a staggered and equidistant mode.

To sum up, the utility model discloses a beneficial technological effect:

1. the power supply box is controlled to control the electric push rod to lift the flower basket bearing disc in the cleaning tank, the lifting speed and frequency can be adjusted according to process requirements, and influences caused by human factors are reduced, so that the yield and consistency of the cleaned wafers are better.

2. The flower basket bears the dish and installs the protection fence additional all around, effectively prevents to appear the problem that the wafer flower basket emptys at automatic pulling-up in-process.

3. The bottom of the flower basket bearing disc is additionally provided with the protective plate, the bottom of the protective plate is provided with the through hole, the wafers in the flower basket can be prevented from inclining outwards when the wafers are rinsed and cleaned, and the yield of products are guaranteed.

Drawings

Fig. 1 is a front view of an auxiliary cleaning and lifting apparatus of the present invention.

Fig. 2 is a side view of an auxiliary cleaning and lifting apparatus of the present invention.

Fig. 3 is a top view of the flower basket bearing plate of the present invention.

Fig. 4 is a schematic view of the ascending motion of the electric push rod of the present invention.

Fig. 5 is a schematic view of the descending motion of the electric putter of the present invention.

Wherein: 1. a pulling device; 2. a flower basket bearing disc; 3. a cleaning tank; 4. a support plate; 5. a control power box; 6. a rotating shaft; 7. a cam; 8. an electric push rod; 9. a guard plate; 10. a through hole; 11. a guard post; 12. a rubber cap; 13. a flower basket; 14. a lifting switch; 15. and opening and closing the switch.

Detailed Description

The present invention will be described in further detail with reference to the accompanying drawings.

The utility model discloses implement and disclose a supplementary washing and carry equipment of drawing. Referring to fig. 1 or fig. 2, the flower basket washing device comprises a lifting device 1, a flower basket bearing disc 2 and a washing tank 3, wherein the lifting device 1 is fixedly connected with two sides of the washing tank 3, and the flower basket bearing disc 2 is arranged in the washing tank 3; the lifting device 1 comprises a supporting plate 4, a control power supply box 5, a rotating shaft 6, a cam 7 and an electric push rod 8, wherein the cam 7 and the control power supply box 5 are respectively arranged on the upper surface of the supporting plate 4; the bottom of the flower basket bearing disc 2 is connected with a guard plate 9, and a flower basket 13 is arranged in the center of the interior of the flower basket bearing disc 2; the cleaning tank 3 is a hollow uncovered cuboid structure.

Referring to fig. 3, a plurality of through holes 10 are arranged on the guard plate 9, the through holes 10 are arranged on the guard plate 9 in a staggered and equidistant manner, and protection columns 11 are fixedly connected upwards at four corners of the guard plate 9.

Referring to fig. 4 or 5, the control power box 5 is coupled to a rotating shaft 6, the rotating shaft 6 is concentrically connected to a cam 7, the side surface of the cam 7 slides in contact with the bottom of an electric push rod 8, the top of the electric push rod 8 is connected to a rubber cap 12, and the control power box 5 is provided with a lifting switch 14 and an on-off switch 15.

The utility model discloses implement a supplementary washing and carry equipment of drawing: the flower basket cleaning device comprises a lifting device, a flower basket bearing disc and a cleaning tank, wherein the lifting device is fixedly connected with two sides of the cleaning tank, and the flower basket bearing disc is arranged in the cleaning tank; the lifting device comprises a supporting plate, a control power supply box, a rotating shaft, a cam and an electric push rod, wherein the cam and the control power supply box are respectively arranged on the upper surface of the supporting plate, the control power box is coupled with a rotating shaft, the rotating shaft is concentrically connected with a cam, the side surface of the cam is in contact sliding with the bottom of the electric push rod, the top of the electric push rod is connected with a rubber cap for protecting the electric push rod, the control power box is provided with a lifting switch and an on-off switch, used for lifting the flower basket bearing disc, the electric push rod moves up and down to drive the flower basket bearing disc to do lifting movement, the electric push rod is connected with the control power box, the zooming of the electric push rod is controlled by the control circuit so as to control the lifting process, the pulling speed and the frequency can be adjusted according to the process requirements, and the influence caused by human factors is reduced, so that the yield and the consistency of the cleaned wafer are better; the bottom of the flower basket bearing disc is connected with a protective plate, a plurality of through holes are formed in the protective plate, the through holes are arranged on the protective plate in a staggered and equidistant mode, protective columns are fixedly and upwards connected at four corners of the protective plate, wafers in the flower basket can be guaranteed not to incline outwards while the wafers are lifted and cleaned, the yield and the yield of products are guaranteed, the problem that the flower basket of the wafers topples over in the automatic lifting process is effectively prevented, and the flower basket is placed in the center of the inner portion of the flower basket bearing disc; the cleaning tank is of a hollow uncovered cuboid structure.

Above is the preferred embodiment of the utility model, not limit according to this the utility model discloses a protection scope, the event: all equivalent changes made according to the structure, shape and principle of the utility model are covered within the protection scope of the utility model.

Claims

1. The utility model provides an auxiliary cleaning lifting equipment which characterized in that: the flower basket cleaning device comprises a lifting device (1), a flower basket bearing disc (2) and a cleaning groove (3), wherein the lifting device (1) is fixedly connected with two sides of the cleaning groove (3), and the flower basket bearing disc (2) is arranged in the cleaning groove (3);

the lifting device (1) comprises a supporting plate (4), a control power box (5), a rotating shaft (6), a cam (7) and an electric push rod (8);

the bottom of the flower basket bearing disc (2) is connected with a protective plate (9), a plurality of through holes (10) are formed in the protective plate (9), and protective columns (11) are fixedly and upwardly connected at four corners of the protective plate (9);

the cleaning tank (3) is of a hollow uncovered cuboid structure.

2. A cleaning-assist pulling apparatus as set forth in claim 1, wherein: the cam (7) and the control power box (5) are respectively arranged on the upper surface of the support plate (4).

3. A cleaning-assist pulling apparatus as set forth in claim 1, wherein: the control power box (5) is coupled with the rotating shaft (6).

4. A cleaning-assist pulling apparatus as set forth in claim 1, wherein: the rotating shaft (6) is concentrically connected with a cam (7).

5. An auxiliary cleaning and lifting apparatus according to claim 1 or 2, wherein: the side surface of the cam (7) is in contact sliding with the bottom of the electric push rod (8).

6. A cleaning-assist pulling apparatus as set forth in claim 1, wherein: the top of the electric push rod (8) is connected with a rubber cap (12).

7. A cleaning-assist pulling apparatus as set forth in claim 1, wherein: the flower basket (13) is arranged in the center of the interior of the flower basket bearing disc (2).

8. A washing aid pulling apparatus according to claim 1 or 3, wherein: the control power box (5) is provided with a lifting switch (14) and an opening and closing switch (15).

9. A cleaning-assist pulling apparatus as set forth in claim 1, wherein: the through holes (10) are arranged on the guard plate (9) in a staggered and equidistant mode.