CN214694287U - High-efficient circulation annealing stove - Google Patents
High-efficient circulation annealing stove Download PDFInfo
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- CN214694287U CN214694287U CN202022915742.0U CN202022915742U CN214694287U CN 214694287 U CN214694287 U CN 214694287U CN 202022915742 U CN202022915742 U CN 202022915742U CN 214694287 U CN214694287 U CN 214694287U
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- support frame
- annealing furnace
- sliding part
- heating
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Abstract
The utility model discloses a high efficiency circulation annealing stove, including support piece, support piece includes first support frame and second support frame, the bottom of first support frame is installed with the front end of second support frame, three annealing stove is installed along self length direction equidistance in the top of first support frame, the afterbody of three annealing stove sets up along the width direction of second support frame, and be formed with the erection gap between the second support frame, be provided with the vertical sliding part in the erection gap, the heating cabinet that is used for heating one of them annealing stove is installed to the upper end of vertical sliding part, the vertical sliding part is used for driving the heating cabinet back-and-forth movement on the periphery wall of the annealing stove that corresponds, the vertical sliding part still is provided with horizontal sliding part, horizontal sliding part is used for driving the reciprocating motion of heating cabinet between three annealing stove.
Description
Technical Field
The utility model relates to an annealing furnace technical field, in particular to high efficiency circulation annealing furnace.
Background
An annealing furnace is a process used in semiconductor device manufacturing that includes heating a plurality of semiconductor wafers to affect their electrical properties. The heat treatment is designed for different effects. The wafer may be heated to activate the dopants, convert the thin film into a thin film or convert the thin film into a wafer substrate interface, densify the deposited thin film, change the state of the grown thin film, repair implanted damage, move dopants or transfer dopants from one thin film to another or from the thin film into the wafer substrate.
The annealing furnace may be integrated into other furnace processing steps, such as oxidation, or may be self-processing. The annealing furnace is completed by an apparatus specifically designed for heating semiconductor wafers. The annealing furnace is an energy-saving periodic operation furnace, has a super energy-saving structure, adopts a fiber structure and saves electricity by 60 percent.
At present, the annealing furnace is generally low in efficiency in the using process and cannot be used for rapidly realizing secondary heating in a reciprocating circulation mode.
SUMMERY OF THE UTILITY MODEL
To the deficiency that prior art exists, the utility model aims to provide an in order to solve foretell problem.
In order to achieve the above purpose, the utility model provides a following technical scheme: the utility model provides a high efficiency circulation annealing stove, including support piece, support piece includes first support frame and second support frame, the bottom of first support frame is installed with the front end of second support frame, three annealing stove is installed along self length direction equidistance in the top of first support frame, the afterbody of three annealing stove sets up along the width direction of second support frame, and be formed with the erection gap between the second support frame, be provided with perpendicular sliding part in the erection gap, the heating cabinet that is used for heating one of them annealing stove is installed to the upper end of perpendicular sliding part, perpendicular sliding part is used for driving the heating cabinet back-and-forth movement on the periphery wall of the annealing stove that corresponds, perpendicular sliding part still is provided with horizontal sliding part, horizontal sliding part is used for driving the reciprocating motion of heating cabinet between three annealing stove.
The technical scheme has the advantages that: the annealing furnaces, the vertical sliding parts and the horizontal sliding parts are matched to heat the three annealing furnaces in a circulating reciprocating manner, so that the operation is simple, the heating efficiency is high, and the maintenance is convenient.
Preferably, the vertical sliding part comprises a third support frame and four rollers, the four rollers are respectively installed at four corners of the third support frame, and each roller located on the left side is connected with the roller located on the same position on the right side through a transmission shaft.
The technical scheme has the advantages that: through the effect of gyro wheel and transmission shaft, make things convenient for the use of heating cabinet, reduce the removal time.
Preferably, the vertical sliding part is further provided with a screw assembly, one side of the screw assembly is provided with a driving source, and the screw assembly and the driving source are matched to provide thrust for the four rollers.
The technical scheme has the advantages that: provide thrust through screw rod assembly to the gyro wheel and drive the heating cabinet back-and-forth movement, improve overall structure stability, the displacement direction that is difficult for making the heating cabinet simultaneously takes place the skew.
Preferably, horizontal sliding portion includes slide, slider, setting element, cylinder, and the slide sets up along the width direction of third support frame, and connects in the left and right sides middle part of third support frame, and the slide is provided with the spout, slider one end and heating cabinet fixed connection, and other end sliding connection is in the spout, and inside the spout was arranged in to the setting element, and was used for fixing a position when removing the slider, and the cylinder sets up in the spout both ends, and is used for producing thrust to the slider and makes the slider remove.
The technical scheme has the advantages that: through the cooperation of slide, slider, setting element, cylinder, realize the removal of heating cabinet in the horizontal direction, overall structure stability is high simultaneously.
Preferably, the locating piece includes "L" type locating plate that rotates in proper order and connect in the left end of spout, middle part, right-hand member, and the horizontal part and the vertical part of "L" type locating plate all are connected through the buckle between with the spout.
The technical scheme has the advantages that: cooperate through three "L" type locating plate, conveniently fix a position the position that the heating cabinet removed, the difficult emergence skew of displacement of heating cabinet in the horizontal direction simultaneously.
Preferably, the sliding groove is internally provided with three mounting grooves matched with the corresponding L-shaped positioning plates for use, and the length of each mounting groove is the sum of the lengths of the vertical part and the horizontal part of each L-shaped positioning plate.
The technical scheme has the advantages that: the conversion between the horizontal part and the vertical part of the L-shaped positioning plate after rotation is more stable, and the sliding block is not easy to be blocked.
Preferably, the head of the annealing furnace is provided with a furnace cover.
The technical scheme has the advantages that: the furnace cover is arranged at the head of the annealing furnace, so that the annealing furnace is convenient to open and close, and meanwhile, a closed space is formed in the annealing furnace, and the heating is convenient.
Drawings
Fig. 1 is a schematic perspective view of the present invention;
fig. 2 is a schematic structural view of the horizontal sliding part of the present invention;
fig. 3 is a schematic structural view of the vertical sliding part of the present invention.
Reference numerals: 1. a support member; 11. a first support frame; 12. a second support frame; 13. an annealing furnace; 14. a mounting gap; 15. a heating box; 16. a furnace cover; 2. a vertical sliding part; 21. a third support frame; 22. a roller; 221. a drive shaft; 23. a screw assembly; 231. a drive source; 3. a horizontal sliding section; 31. a slide base; 311. a chute; 32. a slider; 33. a positioning member; 331. an L-shaped positioning plate; 332. mounting grooves; 34. and a cylinder.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and examples. In which like parts are designated by like reference numerals. It should be noted that the terms "front," "back," "left," "right," "upper" and "lower" used in the following description refer to directions in the drawings, and the terms "bottom" and "top," "inner" and "outer" refer to directions toward and away from, respectively, the geometric center of a particular component.
Referring to fig. 1-3, a high-efficiency circulating annealing furnace 13 comprises a support 1, the support 1 comprises a first support frame 11 and a second support frame 12, the bottom of the first support frame 11 is arranged at the front end of the second support frame 12, three annealing furnaces 13 are arranged at the top of the first support frame 11 along the length direction of the support, the tail parts of the three annealing furnaces 13 are arranged along the width direction of the second support frame 12, and an installation gap 14 is formed between the vertical sliding part 2 and the second support frame 12, a vertical sliding part 2 is arranged in the installation gap 14, a heating box 15 for heating one annealing furnace 13 is installed at the upper end of the vertical sliding part 2, the vertical sliding part 2 is used for driving the heating box 15 to move back and forth on the peripheral wall of the corresponding annealing furnace 13, a horizontal sliding part 3 is further arranged on the vertical sliding part 2, and the horizontal sliding part 3 is used for driving the heating box 15 to move back and forth among the three annealing furnaces 13. The utility model is realized by a support element 1, an annealing furnace 13, a vertical sliding part 2 and a horizontal sliding part 3, when the material is needed to be annealed, the material is firstly put into three annealing furnaces 13, a switch of a heating box 15 is opened, the heating box 15 is moved to the rear part of the leftmost annealing furnace 13 under the action of the horizontal sliding part 3, then the heating box 15 is moved forwards under the action of the vertical sliding part 2, the annealing furnace 13 enters the heating box 15 until the annealing furnace 13 completely enters the heating box 15, the annealing furnace 13 is heated, thereby the material is heated, when the heating of the leftmost annealing furnace 13 is completed, the heating box 15 is moved backwards to be separated from the annealing furnace 13 under the action of the vertical sliding part 2, then the heating box 15 is moved to the rear part of the middle returning furnace under the action of the horizontal sliding part 3, the process of repeated heating is realized, the material in the middle returning furnace is heated, the temperature of the leftmost annealing furnace 13 is lowered until the heating is completed, and when the heating of the middle annealing furnace 13 is completed, the heating box 15 is moved backwards to be separated from the annealing furnace 13 by the action of the vertical sliding part 2, the heating box 15 is moved to the rear of the rightmost annealing furnace by the action of the horizontal sliding part 3, the heating process is repeated, heating the rightmost annealing furnace 13 until the heating is finished, simultaneously cooling the material in the leftmost annealing furnace 13 to the required temperature, cooling the middle annealing furnace 13, taking out the leftmost material, putting the material to be annealed again, repeating the above processes, the leftmost material is heated and is matched with the annealing furnace 13, the vertical sliding part 2 and the horizontal sliding part 3, the three annealing furnaces 13 are heated in a circulating reciprocating manner, so that the operation is simple, the heating efficiency is high, and the maintenance is convenient.
The vertical sliding part 2 includes a third support frame 21 and four rollers 22, the four rollers 22 are respectively installed at four corners of the third support frame 21, and each roller 22 located on the left side is connected with the roller 22 located on the same position on the right side through a transmission shaft 221.
The vertical sliding part 2 is further provided with a screw assembly 23, one side of the screw assembly 23 is provided with a driving source 231, and the screw assembly 23 cooperates with the driving source 231 to provide thrust to the four rollers 22. When the vertical sliding part 2 is operated, the switch of the driving source 231 is turned on, the driving source 231 is a servo motor, the screw of the screw assembly 23 is driven to rotate by the driving source 231, so as to be in threaded fit with the threaded block of the screw assembly 23 arranged on the second support frame 12, a forward acting force is generated on the roller 22 and the transmission shaft 221 in the vertical direction, the roller 22 and the transmission shaft 221 are rotated, so as to drive the heating box 15 to move forward until the annealing furnace 13 completely enters the heating box 15, the switch of the driving source 231 is turned off, when the heating is completed, the switch of the driving source 231 is turned on, the rotation direction of the driving source 231 is switched, so as to drive the rotation direction of the screw assembly 23 to change, the screw is rotated in the threaded block, a backward acting force is generated on the roller 22 and the transmission shaft 221 in the vertical direction, so as to rotate the roller 22 and the transmission shaft 221, thereby drive heating cabinet 15 and remove backward, break off the switch of driving source 231 until annealing stove 13 breaks away from heating cabinet 15, drive heating cabinet 15 back-and-forth movement through screw rod subassembly 23 and gyro wheel 22, make things convenient for heating cabinet 15's use, overall structure stability is high simultaneously, and the difficult displacement direction that makes heating cabinet 15 takes place the skew.
Horizontal sliding portion 3 includes slide 31, slider 32, setting element 33, cylinder 34, slide 31 sets up along the width direction of third support frame 21, and connect in the left and right sides middle part of third support frame 21, slide 31 is provided with spout 311, slider 32 one end and heating cabinet 15 fixed connection, other end sliding connection is in spout 311, inside spout 311 was arranged in to setting element 33, and be used for fixing a position when moving slider 32, cylinder 34 sets up in spout 311 both ends, and is used for producing thrust to slider 32 and makes slider 32 remove.
The positioning member 33 includes an "L" shaped positioning plate 331 rotatably connected to the left, middle and right ends of the sliding slot 311 in sequence, and the horizontal portion and the vertical portion of the "L" shaped positioning plate 331 are connected to the sliding slot 311 by a snap fit.
The chute 311 is further provided with three mounting slots 332 which are matched with the corresponding L-shaped positioning plates 331 for use, and the length of each mounting slot 332 is the sum of the lengths of the vertical part and the horizontal part of each L-shaped positioning plate 331. When the heating box 15 needs to slide in the horizontal direction, the air cylinders 34 on both sides drive the slide block 32 to slide in the chute 311, meanwhile, the L-shaped positioning plate 331 rapidly positions the slide block 32 in the chute 311, when the slide block 32 moves from the leftmost side to the middle, the vertical part of the L-shaped positioning plate 331 blocks the slide block 32, so that the heating box 15 connected with the slide block 32 stops behind the annealing furnace 13 in the middle, when the heating is finished, the air cylinder 34 on the left side continues to drive the slide block 32 to move to the right, so that the L-shaped positioning plate 331 rotates, so that the vertical part of the L-shaped positioning plate 331 is converted into the horizontal part, the horizontal part is converted into the vertical part, the slide block 32 is positioned when moving from the right side to the left side to the middle, and the slide block 32 continues to move to the left until reaching the vertical part of the L-shaped positioning plate 331 on the right side, make heating cabinet 15 move to the rear of the annealing stove 13 of rearmost side, when the slider 32 moves from the right side to the left side, repeat the above-mentioned operation, until the slider 32 moves to the leftmost side of spout 311, cooperate through slide 31, slider 32, setting element 33, cylinder 34, "L" type locating plate 331, realize the removal of heating cabinet 15 in the horizontal direction, conveniently fix a position heating cabinet 15 in the position of removing simultaneously, overall structure stability is high simultaneously, the difficult emergence skew of displacement of heating cabinet 15 in the horizontal direction.
The head of the annealing furnace 13 is provided with a furnace cover 16. The furnace cover 16 is arranged at the head of the annealing furnace 13, so that the annealing furnace 13 can be conveniently opened and closed, and meanwhile, a closed space is formed in the annealing furnace 13, and heating is facilitated.
Above only the utility model discloses an it is preferred embodiment, the utility model discloses a scope of protection not only limits in above-mentioned embodiment, and the all belongs to the utility model discloses a technical scheme under the thinking all belongs to the utility model discloses a scope of protection. It should be noted that, for those skilled in the art, various modifications and decorations can be made without departing from the principle of the present invention, and these modifications and decorations should also be regarded as the protection scope of the present invention.
Claims (7)
1. A high efficiency circulation annealing furnace, includes support piece (1), its characterized in that: the support piece (1) comprises a first support frame (11) and a second support frame (12), the bottom of the first support frame (11) is installed at the front end of the second support frame (12), three annealing furnaces (13) are installed at the top of the first support frame (11) along the length direction of the first support frame at equal intervals, the tail of each annealing furnace (13) is arranged along the width direction of the second support frame (12), an installation gap (14) is formed between each annealing furnace and the second support frame (12), a vertical sliding part (2) is arranged in each installation gap (14), a heating box (15) used for heating one annealing furnace (13) is installed at the upper end of each vertical sliding part (2), each vertical sliding part (2) is used for driving each heating box (15) to move on the outer peripheral wall of the corresponding annealing furnace (13), and each vertical sliding part (2) is further provided with a horizontal sliding part (3), the horizontal sliding part (3) is used for driving the heating box (15) to move back and forth among the three annealing furnaces (13).
2. A high efficiency circulation annealing furnace according to claim 1, characterized in that: the vertical sliding part (2) comprises a third supporting frame (21) and four idler wheels (22), the four idler wheels (22) are respectively installed at four corners of the third supporting frame (21), and each idler wheel (22) located on the left side is connected with the idler wheel (22) located on the same position on the right side through a transmission shaft (221).
3. A high efficiency circulation annealing furnace according to claim 2, characterized in that: the vertical sliding part (2) is further provided with a screw rod assembly (23), one side of the screw rod assembly (23) is provided with a driving source (231), and the screw rod assembly (23) is matched with the driving source (231) to provide thrust for the four rollers (22).
4. A high efficiency circulation annealing furnace according to claim 1, characterized in that: horizontal slip portion (3) include slide (31), slider (32), setting element (33), cylinder (34), the width direction setting of third support frame (21) is followed in slide (31), and connects in the left and right sides middle part of third support frame (21), slide (31) are provided with spout (311), slider (32) one end and heating cabinet (15) fixed connection, other end sliding connection in spout (311), inside spout (311) were arranged in to setting element (33), and was used for fixing a position when removing slider (32), cylinder (34) set up in spout (311) both ends, and were used for producing thrust to slider (32) and make slider (32) remove.
5. A high-efficiency circulation annealing furnace according to claim 4, characterized in that: the positioning piece (33) comprises an L-shaped positioning plate (331) which is sequentially connected to the left end, the middle part and the right end of the sliding groove (311) in a rotating mode, and the horizontal part and the vertical part of the L-shaped positioning plate (331) are connected with the sliding groove (311) through buckles.
6. A high-efficiency circulation annealing furnace according to claim 4, characterized in that: the sliding groove (311) is also internally provided with three mounting grooves (332) matched with the corresponding L-shaped positioning plates (331) for use, and the length of each mounting groove (332) is the sum of the lengths of the vertical part and the horizontal part of each L-shaped positioning plate (331).
7. A high efficiency circulation annealing furnace according to claim 1, characterized in that: the head of the annealing furnace (13) is provided with a furnace cover (16).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022915742.0U CN214694287U (en) | 2020-12-08 | 2020-12-08 | High-efficient circulation annealing stove |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022915742.0U CN214694287U (en) | 2020-12-08 | 2020-12-08 | High-efficient circulation annealing stove |
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| Publication Number | Publication Date |
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| CN214694287U true CN214694287U (en) | 2021-11-12 |
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| CN202022915742.0U Active CN214694287U (en) | 2020-12-08 | 2020-12-08 | High-efficient circulation annealing stove |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114292988A (en) * | 2022-01-11 | 2022-04-08 | 安徽楚江高新电材有限公司 | High-flexibility conductor material multi-temperature-zone annealing equipment and method |
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2020
- 2020-12-08 CN CN202022915742.0U patent/CN214694287U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114292988A (en) * | 2022-01-11 | 2022-04-08 | 安徽楚江高新电材有限公司 | High-flexibility conductor material multi-temperature-zone annealing equipment and method |
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