CN219621298U - Quick cooling thermal field device of Czochralski single crystal furnace - Google Patents
Quick cooling thermal field device of Czochralski single crystal furnace Download PDFInfo
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- CN219621298U CN219621298U CN202320769894.5U CN202320769894U CN219621298U CN 219621298 U CN219621298 U CN 219621298U CN 202320769894 U CN202320769894 U CN 202320769894U CN 219621298 U CN219621298 U CN 219621298U
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- 238000001816 cooling Methods 0.000 title claims abstract description 31
- 239000013078 crystal Substances 0.000 title claims abstract description 25
- 238000004321 preservation Methods 0.000 claims abstract description 76
- 238000010438 heat treatment Methods 0.000 claims abstract description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 25
- 230000008878 coupling Effects 0.000 claims description 22
- 238000010168 coupling process Methods 0.000 claims description 22
- 238000005859 coupling reaction Methods 0.000 claims description 22
- 230000017525 heat dissipation Effects 0.000 claims description 19
- 238000009413 insulation Methods 0.000 claims description 17
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 7
- 229910052802 copper Inorganic materials 0.000 claims description 7
- 239000010949 copper Substances 0.000 claims description 7
- 230000000712 assembly Effects 0.000 claims description 4
- 238000000429 assembly Methods 0.000 claims description 4
- 230000005855 radiation Effects 0.000 claims description 3
- 230000000694 effects Effects 0.000 abstract description 7
- 230000007423 decrease Effects 0.000 abstract 1
- 230000001737 promoting effect Effects 0.000 abstract 1
- 230000014759 maintenance of location Effects 0.000 description 13
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000002178 crystalline material Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
Classifications
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model belongs to the technical field of cooling of single crystal furnaces, in particular to a quick cooling thermal field device of a Czochralski single crystal furnace, which comprises a furnace body; the top end of the furnace body is fixedly connected with a cover body, a heat preservation assembly is arranged in the furnace body, a cooling assembly is arranged in the furnace body, the heat preservation assembly comprises a heat preservation layer, the heat preservation layer is fixedly connected to the inner wall of the furnace body, an arc-shaped groove is formed in the inner wall of the heat preservation layer, and a sliding groove is formed in the bottom of the heat preservation layer; through set up the clearance in the heat preservation of furnace body, can reduce the heat preservation's when needs cool off heat preservation effect, through setting up the arc wall, can make when needs cool off, make the heat preservation piece remove to the arc wall through promoting the push rod to make four heat preservation pieces remove simultaneously through the cooperation of slider and spout, thereby open the clearance of heat preservation, and promote the temperature decline in the furnace body through the cooling effect of heating panel and bellows, thereby solved the heat preservation and kept warm and lead to the slow problem of furnace body cooling.
Description
Technical Field
The utility model relates to the technical field of cooling of single crystal furnaces, in particular to a quick cooling thermal field device of a Czochralski single crystal furnace.
Background
The Czochralski single crystal furnace is a device for melting crystalline materials such as polysilicon by using a graphite heater, and growing single crystals by adopting a Czochralski method, so that the crystals reach a preset effect.
After the Czochralski single crystal furnace continuously works for one production period, the heater is turned off, so that the temperature in the single crystal furnace is reduced to a certain degree, and the heating can be restarted.
When the existing Czochralski single crystal furnace needs to be cooled, the heating system can be generally closed, so that the interior of the single crystal furnace is automatically cooled, and the heat preservation layer in the single crystal furnace can keep heat, so that the cooling time of the single crystal furnace is longer, and the production efficiency is reduced; therefore, a quick cooling thermal field device of a Czochralski single crystal growing furnace is provided for solving the problems.
Disclosure of Invention
In order to make up the defects of the prior art and solve the problems in the prior art, the utility model provides a quick cooling thermal field device of a Czochralski single crystal furnace.
The technical scheme adopted for solving the technical problems is as follows: the utility model relates to a quick cooling thermal field device of a Czochralski single crystal furnace, which comprises a furnace body; the top end of the furnace body is fixedly connected with a cover body, a heat preservation component is arranged in the furnace body, and a cooling component is arranged in the furnace body;
the heat preservation subassembly includes the heat preservation, the heat preservation rigid coupling is at the furnace body inner wall, the arc wall has been seted up to the heat preservation inner wall, the spout has been seted up to the heat preservation bottom, spout inner wall sliding connection has the slider, slider top rigid coupling has the heat preservation piece, the heat preservation piece size is less than the arc wall, the heat preservation piece sets up the clearance department at the heat preservation, the cooling subassembly includes the water tank, the water tank rigid coupling is at the furnace body outer wall, the water tank inner wall rigid coupling has the aqueduct, the aqueduct stretches into in the furnace body, one side rigid coupling that the aqueduct stretches into in the furnace body has the heating panel, the one end rigid coupling of aqueduct has the bellows, aqueduct inner wall and water tank, bellows inner wall intercommunication, the opening has been seted up to furnace body one side, heat preservation piece one side rigid coupling has the push rod, push rod one end stretches out the opening.
Preferably, one side of the furnace body is provided with a retention component, the retention component comprises a rotating shaft, the rotating shaft is fixedly connected to one side of the furnace body, a retention plate is fixedly connected to the top end of the rotating shaft, a buckling hole is formed in the top end of the retention plate, the shape of the buckling hole is buckled with that of a push rod, the buckling holes are arranged in two groups and symmetrically distributed on two sides of the retention plate, and the retention component is arranged at the bottom of the center of the opening.
Preferably, the furnace body bottom is provided with the removal subassembly, the removal subassembly includes the landing leg, the landing leg rigid coupling is in the furnace body bottom, landing leg inner wall rigid coupling has the second spring, second spring bottom rigid coupling has the baffle, the baffle bottom rotates to be connected with the removal wheel, first slot has been seted up to landing leg one side, the second slot is located the bottom of first slot to parallel with first slot, the landing leg is all run through to first slot and second slot both sides, the picture peg has been pegged graft to second slot inner wall, the fluting that is greater than the second spring has been seted up to picture peg center department.
Preferably, one side of the heat radiation plate is fixedly connected with a first spring, the other end of the first spring is fixedly connected with the inner wall of the furnace body, one side of the push rod positioned in the furnace body is fixedly connected with a heat insulation plate, the shape of the heat insulation plate is arc-shaped, the length of the heat insulation plate is larger than that of the opening, and the heat insulation plate is made of copper.
Preferably, the length of the heat preservation sheet is equal to the gap of the heat preservation layer, the heat preservation layer is provided with four groups of gaps, the heat preservation sheet and the heat dissipation plate are arc-shaped, the heat dissipation plate is made of copper, and the heat preservation sheet, the heat dissipation plate and the corrugated pipe are provided with four groups and are circumferentially distributed.
Preferably, the moving assemblies are arranged in four groups and are symmetrically distributed at the bottom of the furnace body.
The utility model has the advantages that:
1. according to the utility model, the gaps are arranged in the heat-insulating layer of the furnace body, so that the heat-insulating effect of the heat-insulating layer can be reduced when cooling is required, the arc-shaped grooves are arranged, the heat-insulating sheets can be moved into the arc-shaped grooves by pushing the push rods, and the four groups of heat-insulating sheets can be simultaneously moved by matching the sliding blocks and the sliding grooves, so that the gaps of the heat-insulating layer are opened, the temperature in the furnace body is reduced by the cooling effect of the heat-radiating plate and the corrugated pipe, and the problem that the furnace body is slowly cooled due to continuous heat insulation of the heat-insulating layer is solved.
2. According to the utility model, the second springs are arranged on the inner walls of the bottoms of the supporting legs, so that the supporting legs can be lifted when the furnace body needs to be moved, the moving wheels are discharged through the second springs, and the inserting plates are inserted into the second slots, so that the positions of the baffle plates are limited through the inserting plates, the moving wheels are prevented from retracting into the inner walls of the supporting legs, and the furnace body can be moved through the moving wheels.
Drawings
In order to more clearly illustrate the embodiments of the utility model or the technical solutions of the prior art, the drawings which are used in the description of the embodiments or the prior art will be briefly described, it being obvious that the drawings in the description below are only some embodiments of the utility model, and that other drawings can be obtained from these drawings without inventive faculty for a person skilled in the art.
Fig. 1 is a schematic perspective view of a first embodiment;
fig. 2 is a schematic view of a first perspective cross-section structure of the first embodiment;
FIG. 3 is an enlarged view at A of FIG. 2;
FIG. 4 is an enlarged view at B of FIG. 2;
FIG. 5 is an enlarged view at C of FIG. 2;
FIG. 6 is a schematic diagram showing a second perspective cross-sectional structure of the first embodiment;
FIG. 7 is an enlarged view of FIG. 6 at D;
fig. 8 is a schematic structural view of a cross bar of the second embodiment.
In the figure: 1. a furnace body; 2. a cover body; 301. a heat preservation layer; 302. an arc-shaped groove; 303. a chute; 304. a slide block; 305. a thermal insulation sheet; 401. a water tank; 402. a water conduit; 403. a heat dissipation plate; 404. a bellows; 405. a first spring; 406. an opening; 407. a push rod; 408. a heat insulating plate; 501. a rotating shaft; 502. a retention plate; 503. a button hole; 601. a support leg; 602. a second spring; 603. a baffle; 604. a moving wheel; 605. a first slot; 606. a second slot; 607. inserting plate; 7. a cross bar.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Example 1
Referring to FIGS. 1-7, a rapid cooling thermal field device of a Czochralski single crystal growing furnace comprises a furnace body 1; the top end of the furnace body 1 is fixedly connected with a cover body 2, a heat preservation component is arranged in the furnace body 1, and a cooling component is arranged in the furnace body 1;
the heat preservation assembly comprises a heat preservation layer 301, the heat preservation layer 301 is fixedly connected to the inner wall of the furnace body 1, an arc-shaped groove 302 is formed in the inner wall of the heat preservation layer 301, a sliding groove 303 is formed in the bottom of the heat preservation layer 301, a sliding block 304 is slidably connected to the inner wall of the sliding groove 303, a heat preservation sheet 305 is fixedly connected to the top end of the sliding block 304, the size of the heat preservation sheet 305 is smaller than that of the arc-shaped groove 302, the heat preservation sheet 305 is arranged at a gap of the heat preservation layer 301, the cooling assembly comprises a water tank 401, the water tank 401 is fixedly connected to the outer wall of the furnace body 1, a water guide pipe 402 is fixedly connected to the inner wall of the water tank 401, the water guide pipe 402 stretches into the furnace body 1, a heat dissipation plate 403 is fixedly connected to one end of the water guide pipe 402, a corrugated pipe 404 is fixedly connected to the inner wall of the water tank 401 and the inner wall of the corrugated pipe 404, an opening 406 is formed in one side of the furnace body 1, a push rod 407 is fixedly connected to one side of the heat preservation sheet 305, and one end of the push rod 407 stretches out of the opening 406.
When the furnace body 1 is required to be cooled, the push rod 407 is moved to the other side of the opening 406, so that the push rod 407 drives the heat preservation sheet 305 to move, the heat preservation sheet 305 is moved into the arc-shaped groove 302 in the heat preservation layer 301, the gap of the heat preservation layer 301 is opened, the heat dissipation plate 403 and the corrugated pipe 404 are exposed out of the gap of the heat preservation layer 301, water in the water tank 401 is transferred into the corrugated pipe 404 through the water guide pipe 402 by adding water into the water tank 401, and the inside of the furnace body 1 is cooled through the corrugated pipe 404 and the heat dissipation plate 403, thereby achieving the purpose of cooling the inside of the furnace body 1.
The furnace comprises a furnace body 1, and is characterized in that one side of the furnace body 1 is provided with a retention component, the retention component comprises a rotating shaft 501, the rotating shaft 501 is fixedly connected to one side of the furnace body 1, the top end of the rotating shaft 501 is fixedly connected with a retention plate 502, the top end of the retention plate 502 is provided with buckling holes 503, the shape of each buckling hole 503 is buckled with a push rod 407, two groups of buckling holes 503 are symmetrically distributed on two sides of the retention plate 502, and the retention component is arranged at the bottom of the center of an opening 406;
when the push rod 407 is required to be moved, the retaining plate 502 rotates through the rotating shaft 501 and pushes the push rod 407 to one side, so that the user can be prevented from being scalded due to overhigh temperature of the push rod 407, when the push rod 407 is pushed to the end of one side of the opening 406, the push rod 407 can be buckled by the buckling holes 503 arranged on one side of the retaining plate 502, the push rod 407 is prevented from moving, and the two groups of buckling holes 503 can enable the push rod 407 to be limited at two ends of the opening 406 through the buckling holes 503 on the retaining plate 502.
The bottom of the furnace body 1 is provided with a moving assembly, the moving assembly comprises a supporting leg 601, the supporting leg 601 is fixedly connected to the bottom of the furnace body 1, a second spring 602 is fixedly connected to the inner wall of the supporting leg 601, a baffle 603 is fixedly connected to the bottom of the second spring 602, a moving wheel 604 is rotatably connected to the bottom of the baffle 603, a first slot 605 is formed in one side of the supporting leg 601, a second slot 606 is formed in one side of the supporting leg 601, the second slot 606 is located at the bottom of the first slot 605 and parallel to the first slot 605, the supporting leg 601 is penetrated by both sides of the first slot 605 and the second slot 606, a plugboard 607 is spliced on the inner wall of the second slot 606, and a slot larger than the second spring 602 is formed in the center of the plugboard 607;
when the furnace body 1 is required to be moved, the support leg 601 is lifted, the baffle 603 and the movable wheel 604 are moved out of the inner wall of the support leg 601 under the pushing of the second spring 602, meanwhile, the inserting plate 607 is inserted into the second slot 606, the movable wheel 604 and the baffle 603 are fixed in position through the inserting plate 607, so that the movable wheel 604 is prevented from retracting into the inner wall of the support leg 601, a slot larger than the second spring 602 is formed in the center of the inserting plate 607, the second spring 602 can not be contacted when the inserting is carried out, the inserting plate 607 can be taken out from the second slot 606 when the moving is stopped, the movable wheel 604 and the baffle 603 are extruded into the second spring 602, the movable wheel 603 is retracted into the support leg 601, and the positions of the baffle 603 and the movable wheel 604 can be fixed through inserting the inserting plate 607 into the first slot 605.
A first spring 405 is fixedly connected to one side of the heat dissipation plate 403, the other end of the first spring 405 is fixedly connected to the inner wall of the furnace body 1, a heat insulation plate 408 is fixedly connected to one side of the push rod 407, which is positioned in the furnace body 1, the heat insulation plate 408 is arc-shaped, the length of the heat insulation plate 408 is greater than that of the opening 406, and the heat insulation plate 408 is made of copper;
when the heat insulation plate 305 is retracted into the arc-shaped groove 302, the first spring 405 can push the heat dissipation plate 403 and the corrugated pipe 404 to the inner wall of the furnace body 1, so that the heat dissipation effect can be improved, the heat insulation plate 408 is arc-shaped, and the push rod 407 can prevent high temperature in the furnace body 1 from overflowing from the opening 406 when moving.
The length of the heat preservation sheet 305 is equal to the gap of the heat preservation layer 301, the heat preservation layer 301 is provided with four groups of gaps, the heat preservation sheet 305 and the heat dissipation plate 403 are arc-shaped, the heat dissipation plate 403 is made of copper, and the heat preservation sheet 305, the heat dissipation plate 403 and the corrugated pipe 404 are provided with four groups and are distributed circumferentially;
when the heat-insulating furnace works, the length of the heat-insulating sheet 305 is equal to that of the gap of the heat-insulating layer 301, when the furnace body 1 is fired at high temperature, the gap of the heat-insulating layer 301 is sealed through the heat-insulating sheet 305, the heat-insulating effect is improved, the copper heat-insulating plate 403 is favorable for cooling, four groups of heat-insulating sheets 305 can be driven by the push rod 407 simultaneously through the matching of the sliding groove 303 and the sliding block 304, and the heat-insulating efficiency can be improved through the four groups of heat-insulating plates 403 and the corrugated pipe 404.
The moving assemblies are arranged in four groups and are symmetrically distributed at the bottom of the furnace body 1;
in operation, the four moving assemblies can provide stable support for the bottom of the furnace body 1, and the furnace body 1 can be stably moved through the four moving wheels 604.
Example two
Referring to fig. 8, in a first comparative example, as another embodiment of the present utility model, a cross bar 7 is fixedly connected to one side of the leg 601; in operation, the cross bar 7 can increase the stability between the legs 601.
The working principle is that in order to solve the problem that the furnace body 1 is slowly cooled due to the continuous heat preservation of the heat preservation layer 301, when the furnace body 1 needs to be cooled, the retaining plate 502 rotates through the rotating shaft 501 and pushes the push rod 407 to one side, so that the condition that a user is scalded due to overhigh temperature of the push rod 407 can be prevented, the heat insulation plate 408 is arc-shaped, the high temperature in the furnace body 1 can be prevented from overflowing from the opening 406 when the push rod 407 moves, when the push rod 407 is pushed to the end of one side of the opening 406, the push rod 407 is buckled by the buckling holes 503 arranged on one side of the retaining plate 502, the push rod 407 is prevented from moving, two groups of buckling holes 503 can enable the two ends of the push rod 407 to be limited through the buckling holes 503 on the retaining plate 502, the push rod 407 moves towards the other side of the opening 406, the push rod 407 drives the heat preservation sheet 305 to move, the heat preservation sheet 305 is moved into the arc-shaped groove 302 in the heat preservation layer 301, the gap of the heat preservation layer 301 is opened, four groups of heat preservation sheets 305 can be simultaneously driven by the push rod 407 through the matching of the sliding groove 303 and the sliding block 304, when the heat preservation sheet 305 is retracted into the arc-shaped groove 302, the heat dissipation plate 403 and the corrugated pipe 404 are pushed to the inner wall of the furnace body 1 by the first spring 405, the heat dissipation plate 403 and the corrugated pipe 404 are exposed out of the gap of the heat preservation layer 301, water in the water tank 401 is transmitted into the corrugated pipe 404 through the water guide pipe 402, and the inside of the furnace body 1 is cooled through the corrugated pipe 404 and the heat dissipation plate 403, so that the purpose of cooling the inside of the furnace body 1 is achieved;
when the furnace body 1 needs to be moved, the supporting leg 601 is lifted, the baffle 603 and the moving wheel 604 are moved out of the inner wall of the supporting leg 601 under the pushing of the second spring 602, meanwhile, the inserting plate 607 is inserted into the second inserting groove 606, the moving wheel 604 and the baffle 603 are fixed in position through the inserting plate 607, so that the moving wheel 604 is prevented from retracting into the inner wall of the supporting leg 601, a slot larger than the second spring 602 is formed in the center of the inserting plate 607, the second spring 602 can not be contacted when the inserting is carried out, the inserting plate 607 can be taken out from the second inserting groove 606 when the moving is stopped, the moving wheel 604 and the baffle 603 are extruded into the second spring 602, the supporting leg 601 is retracted, and the positions of the baffle 603 and the moving wheel 604 can be fixed through inserting the inserting plate 607 into the first inserting groove 605.
In the description of the present specification, the descriptions of the terms "one embodiment," "example," "specific example," and the like, mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present utility model. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
The foregoing has shown and described the basic principles, principal features and advantages of the utility model. It will be understood by those skilled in the art that the present utility model is not limited to the embodiments described above, and that the above embodiments and descriptions are merely illustrative of the principles of the present utility model, and various changes and modifications may be made without departing from the spirit and scope of the utility model, which is defined in the appended claims.
Claims (6)
1. A quick cooling thermal field device of a Czochralski single crystal growing furnace is characterized in that: comprises a furnace body (1); the top end of the furnace body (1) is fixedly connected with a cover body (2), a heat preservation component is arranged in the furnace body (1), and a cooling component is arranged in the furnace body (1);
the heat preservation subassembly includes heat preservation (301), heat preservation (301) rigid coupling is at furnace body (1) inner wall, arc wall (302) have been seted up to heat preservation (301) inner wall, spout (303) have been seted up to heat preservation (301) bottom, spout (303) inner wall sliding connection has slider (304), slider (304) top rigid coupling has heat preservation piece (305), heat preservation piece (305) size is less than arc wall (302), heat preservation piece (305) set up the clearance department at heat preservation (301), the cooling subassembly includes water tank (401), water tank (401) rigid coupling is at furnace body (1) outer wall, water tank (401) inner wall rigid coupling has aqueduct (402), aqueduct (402) stretch into in furnace body (1), one side rigid coupling in aqueduct (402) stretch into furnace body (1) has heating panel (403), the one end rigid coupling of aqueduct (402) has bellows (404), aqueduct (402) inner wall and water tank (401), bellows (404) inner wall intercommunication, opening (406) one side (407), push rod one side (407) has been stretched out, push rod (407) one side rigid coupling.
2. The rapid cooling thermal field device of a czochralski single crystal growing furnace of claim 1, wherein: the utility model discloses a furnace body, including furnace body (1), furnace body (1) one side is provided with the location subassembly, location subassembly includes pivot (501), pivot (501) rigid coupling is in furnace body (1) one side, pivot (501) top rigid coupling has locating plate (502), detain hole (503) have been seted up on locating plate (502) top, detain hole (503) shape and push rod (407) looks knot and, detain hole (503) and set up two sets of to be the both sides of symmetric distribution in locating plate (502), location subassembly sets up the bottom in opening (406) center department.
3. The rapid cooling thermal field device of a czochralski single crystal growing furnace of claim 2, wherein: the utility model discloses a furnace body, including furnace body (1), furnace body (1) bottom is provided with movable assembly, movable assembly includes landing leg (601), landing leg (601) rigid coupling is in furnace body (1) bottom, landing leg (601) inner wall rigid coupling has second spring (602), second spring (602) bottom rigid coupling has baffle (603), baffle (603) bottom rotation is connected with movable wheel (604), first slot (605) have been seted up to landing leg (601) one side, second slot (606) are located the bottom of first slot (605) to parallel with first slot (605), first slot (605) and second slot (606) both sides all run through landing leg (601), peg graft in second slot (606) inner wall has picture peg (607), the fluting that is greater than second spring (602) has been seted up to picture peg (607) center department.
4. A czochralski single crystal growing furnace rapid cooling thermal field device as defined in claim 3, wherein: the heat radiation plate is characterized in that a first spring (405) is fixedly connected to one side of the heat radiation plate (403), the other end of the first spring (405) is fixedly connected to the inner wall of the furnace body (1), a heat insulation plate (408) is fixedly connected to one side of the push rod (407) located in the furnace body (1), the heat insulation plate (408) is arc-shaped, the length of the heat insulation plate (408) is greater than that of the opening (406), and the heat insulation plate (408) is made of copper.
5. The rapid cooling thermal field device for a czochralski crystal growing furnace of claim 4, wherein: the length of the heat preservation piece (305) is equal to the gap of the heat preservation layer (301), the heat preservation layer (301) is provided with four groups of gaps, the heat preservation piece (305) and the heat dissipation plate (403) are arc-shaped, the heat dissipation plate (403) is made of copper, and the heat preservation piece (305), the heat dissipation plate (403) and the corrugated pipe (404) are arranged in four groups and are distributed circumferentially.
6. The rapid cooling thermal field device for a czochralski crystal growing furnace of claim 5, wherein: the moving assemblies are arranged in four groups and are symmetrically distributed at the bottom of the furnace body (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320769894.5U CN219621298U (en) | 2023-04-10 | 2023-04-10 | Quick cooling thermal field device of Czochralski single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320769894.5U CN219621298U (en) | 2023-04-10 | 2023-04-10 | Quick cooling thermal field device of Czochralski single crystal furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219621298U true CN219621298U (en) | 2023-09-01 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202320769894.5U Active CN219621298U (en) | 2023-04-10 | 2023-04-10 | Quick cooling thermal field device of Czochralski single crystal furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219621298U (en) |
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2023
- 2023-04-10 CN CN202320769894.5U patent/CN219621298U/en active Active
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Effective date of registration: 20231212 Address after: 010000 Export Processing Zone, Jinchuan Development Zone, Hohhot City, Inner Mongolia Autonomous Region Patentee after: Inner Mongolia Jingxiang Industry and Trade Co.,Ltd. Address before: 214000 No. 19, Luoyang North Road, Luoshe Town, Huishan District, Wuxi City, Jiangsu Province Patentee before: Zhang Yibo |
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